TWI447989B - A separator for a fuel cell, a separator for a fuel cell and a fuel cell stack for use thereof, and a method for manufacturing a separator material for a fuel cell - Google Patents

A separator for a fuel cell, a separator for a fuel cell and a fuel cell stack for use thereof, and a method for manufacturing a separator material for a fuel cell Download PDF

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TWI447989B
TWI447989B TW100128506A TW100128506A TWI447989B TW I447989 B TWI447989 B TW I447989B TW 100128506 A TW100128506 A TW 100128506A TW 100128506 A TW100128506 A TW 100128506A TW I447989 B TWI447989 B TW I447989B
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fuel cell
separator
substrate
flow path
layer
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TW201308722A (en
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Yoshitaka Shibuya
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Jx Nippon Mining & Metals Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells

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Description

燃料電池用分隔板材料、使用其之燃料電池用分隔板及燃料電池堆、以及燃料電池用分隔板材料之製造方法Separator material for fuel cell, partition plate for fuel cell using the same, fuel cell stack, and method for manufacturing separator material for fuel cell

本發明係關於一種於表面形成Au或Au合金(含有Au之層)之燃料電池用分隔板材料、使用其之燃料電池用分隔板及燃料電池堆。The present invention relates to a separator material for a fuel cell in which Au or an Au alloy (layer containing Au) is formed on a surface, a separator for a fuel cell using the same, and a fuel cell stack.

固體高分子型之燃料電池用分隔板,先前係使用於碳板形成氣體流道者,但存在材料成本或加工成本較大之問題。另一方面,於使用金屬板代替碳板之情形時,因於高溫下暴露於氧化性環境中,故而出現腐蝕或溶出之問題。因此,已知於Ti板表面濺鍍成膜選自Au、Ru、Rh、Pd、Os、Ir及Pt等中之貴金屬與Au之合金而形成導電部分的技術(專利文獻1)。進而,於專利文獻1中揭示有於Ti表面成膜上述貴金屬之氧化物。The solid polymer type separator for a fuel cell has been used for forming a gas flow path in a carbon plate, but there is a problem that material cost or processing cost is large. On the other hand, in the case where a metal plate is used instead of the carbon plate, corrosion or dissolution occurs due to exposure to an oxidizing atmosphere at a high temperature. For this reason, it is known that a surface of a Ti plate is sputter-deposited to form a conductive portion of a noble metal selected from the group consisting of Au, Ru, Rh, Pd, Os, Ir, and Pt, and Au (Patent Document 1). Further, Patent Document 1 discloses that an oxide of the noble metal is formed on the surface of Ti.

另一方面,已知一種於Ti基材之氧化被膜上,隔著由Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W等所構成之中間層而形成Au膜的燃料電池用分隔板(專利文獻2)。該中間層與基材氧化膜之密合性,即與O(氧原子)之鍵結性良好,並且由於係金屬或半金屬故而與Au膜之密合性、鍵結性良好。On the other hand, a fuel cell for forming an Au film on an oxide film of a Ti substrate via an intermediate layer made of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W or the like is known. Partition plate (Patent Document 2). The adhesion between the intermediate layer and the substrate oxide film, that is, the bonding property with O (oxygen atom) is good, and the adhesion to the Au film and the bonding property are good due to the metal or semimetal.

又,於固體高分子型燃料電池中,亦開發有使用操作容易之甲醇作為供給至陽極之燃料氣體的直接甲醇型燃料電池(DMFC(direct methanol fuel cell)。DMFC可自甲醇直接取出能量(電力),故而無需改質器等而可應對燃料電池之小型化,亦可期望作為行動裝置之電源。Further, in a polymer electrolyte fuel cell, a direct methanol fuel cell (DMFC) which uses methanol which is easy to handle as a fuel gas supplied to an anode has been developed. DMFC can directly extract energy from methanol (electric power) Therefore, it is possible to cope with the miniaturization of the fuel cell without using a reformer or the like, and it is also desirable to use it as a power source for the mobile device.

DMFC之構造,提出有以下兩種。首先第1構造係積層有單電池(以燃料電極與氧電極(oxygen electrode)夾持固體高分子型電解質膜的膜電極接合體(以下,稱為MEA))之積層型(主動型)構造。第2構造係於平面方向配置多個單電池的平面型(被動型)構造。該等構造均為將多個單電池串聯連接者(以下,稱為堆),但其中,被動型構造無需有用以將燃料氣體(燃料液體)或空氣等供給至電池內之主動型燃料輸送機構,故而可期望燃料電池之進一步小型化(專利文獻3)。The construction of the DMFC is proposed in the following two ways. In the first structure, a laminated battery (active type) having a single cell (a membrane electrode assembly (hereinafter referred to as MEA) in which a solid electrode is sandwiched between a fuel electrode and an oxygen electrode) is used. The second structure is a planar (passive type) structure in which a plurality of unit cells are arranged in the planar direction. These configurations are all in which a plurality of unit cells are connected in series (hereinafter referred to as a stack), but the passive type structure does not require an active fuel delivery mechanism that supplies fuel gas (fuel liquid), air, or the like into the battery. Therefore, further miniaturization of the fuel cell can be expected (Patent Document 3).

又,燃料電池用分隔板具有導電性,將各單電池電連接,收集各單電池中產生之能量(電力),並且形成將燃料氣體(燃料液體)或空氣(氧)供給至各單電池之流路。該分隔板亦稱為內部連接體(interconnector)、雙極板(bipolar plate)、集電體。Further, the separator for a fuel cell has electrical conductivity, electrically connects the cells, collects energy (electric power) generated in each cell, and supplies fuel gas (fuel liquid) or air (oxygen) to each cell. The flow path. The separator is also referred to as an internal connector, a bipolar plate, and a current collector.

並且,對DMFC用集電體要求之條件多於對使用氫氣之固體高分子型燃料電池用分隔板要求之條件。即,除了對一般之固體高分子型燃料電池用分隔板所要求之對硫酸水溶液之耐蝕性以外,亦要求必須具有對作為燃料之甲醇水溶液之耐蝕性及對甲酸水溶液之耐蝕性。甲酸係於陽極觸媒上自甲醇生成氫離子時產生的副產物。Further, the conditions required for the collector for the DMFC are more than those required for the separator for the polymer electrolyte fuel cell using hydrogen. In other words, in addition to the corrosion resistance to the aqueous sulfuric acid solution required for the separator for a general polymer electrolyte fuel cell, it is required to have corrosion resistance to a methanol aqueous solution as a fuel and corrosion resistance to an aqueous formic acid solution. Formic acid is a by-product produced when hydrogen ions are generated from methanol on an anode catalyst.

進而,若於作為燃料之甲醇水溶液中混入氯(例如來自NaCl),則燃料電池用分隔板之耐蝕性大幅劣化,因此要求燃料電池用分隔板於含有氯之水溶液中具有耐蝕性。Further, when chlorine (for example, from NaCl) is mixed in the methanol aqueous solution as a fuel, the corrosion resistance of the separator for a fuel cell is largely deteriorated. Therefore, the separator for a fuel cell is required to have corrosion resistance in an aqueous solution containing chlorine.

於設想將固體高分子型燃料電池及直接甲醇燃料電池均用於海岸附近之情形時,作為燃料之空氣中含有較多氯。該等氯被吸入燃料電池中,根據分隔板材中所使用之金屬,有時會因氯而使特性大幅劣化。因此必須進行含氯腐蝕液之耐蝕性試驗,具有重要意義(要求燃料電池用分隔板於含有氯之水溶液中具有耐蝕性)。When it is assumed that both a polymer electrolyte fuel cell and a direct methanol fuel cell are used in the vicinity of the coast, the air as a fuel contains a large amount of chlorine. These chlorines are sucked into the fuel cell, and depending on the metal used in the separator, the characteristics may be greatly deteriorated due to chlorine. Therefore, it is necessary to carry out a corrosion resistance test of a chlorine-containing etching liquid, which is important (requires a separator for a fuel cell to have corrosion resistance in an aqueous solution containing chlorine).

如此,於DMFC動作環境下,不一定可直接應用先前之固體高分子型燃料電池用分隔板中所使用之材料。Thus, in the DMFC operating environment, it is not always possible to directly apply the materials used in the separator for the polymer electrolyte fuel cell.

專利文獻1:日本特開2001-297777號公報Patent Document 1: Japanese Laid-Open Patent Publication No. 2001-297777

專利文獻2:日本特開2004-185998號公報Patent Document 2: Japanese Laid-Open Patent Publication No. 2004-185998

專利文獻3:日本特開2005-243401號公報Patent Document 3: Japanese Laid-Open Patent Publication No. 2005-243401

然而,於上述專利文獻1揭示之技術之情形時,為獲得密合性良好之Au合金膜,必須進行除去鈦基材表面之氧化被膜的處理,於氧化被膜之除去不充分之情形時,存在貴金屬膜之密合性下降之問題。However, in the case of the technique disclosed in the above Patent Document 1, in order to obtain an Au alloy film having good adhesion, it is necessary to remove the oxide film on the surface of the titanium substrate, and when the oxide film is insufficiently removed, there is a case where it is insufficient. The problem of the adhesion of the noble metal film is lowered.

又,於專利文獻2中,規定於基材表面之氧化被膜之表面形成導電性薄膜,但例如若欲於鈦基材表面殘留氧化被膜之狀態下成膜Au,則無法均勻成膜。尤其於濕式鍍金中鍍敷之電鍍形狀為粒狀,若鈦基材表面殘留氧化被膜,則鈦基材表面之一部分會成為非鍍敷部分。又,於專利文獻2中,為提高密合性,亦規定設置含有Cr之中間層,但根據本發明人等調查結果,明確若Cr之附著量過多則於含有氯之水溶液中之耐蝕性劣化。Further, in Patent Document 2, a conductive film is formed on the surface of the oxide film on the surface of the substrate. For example, if Au is to be formed in a state in which an oxide film remains on the surface of the titanium substrate, uniform film formation cannot be performed. In particular, in the wet gold plating, the plating shape is granular, and if the oxide film remains on the surface of the titanium substrate, a part of the surface of the titanium substrate becomes a non-plated portion. Further, in Patent Document 2, in order to improve the adhesion, it is also possible to provide an intermediate layer containing Cr. However, according to the findings of the present inventors, it is clear that the corrosion resistance of the aqueous solution containing chlorine is deteriorated if the amount of adhesion of Cr is too large. .

專利文獻3揭示之技術係於對銅板之雙面進行不鏽鋼包覆加工之於基材被覆樹脂者,其耐蝕性並非優異。The technique disclosed in Patent Document 3 is based on a case where a resin coated with a base material is coated on both sides of a copper plate, and the corrosion resistance is not excellent.

即,本發明係為解決上述課題而完成者,其目的在於提供一種可於鈦基材表面以高密合性成膜含有Au之高耐蝕性之導電性膜,即使於含有氯之水溶液中之燃料電池動作環境下亦具有高耐久性的燃料電池用分隔板材料,使用其之燃料電池用分隔板及燃料電池堆。In other words, the present invention has been made to solve the above problems, and an object of the invention is to provide a conductive film which can form a high corrosion resistance of Au on a surface of a titanium substrate with high adhesion, even in an aqueous solution containing chlorine. A fuel cell separator material having high durability in a battery operating environment, and a fuel cell separator and a fuel cell stack are used.

本發明人等進行各種研究,結果發現藉由於Ti基材表面形成含有Au與Cr之表面層,將(Au之附著量)/(Cr之附著量)所表示之比管理在10以上,可使含有Au之層牢固且均勻地形成於Ti上,亦可確保對燃料電池用分隔板所要求之於含有氯之水溶液中之耐蝕性或耐久性。As a result of various studies, the inventors of the present invention have found that by forming a surface layer containing Au and Cr on the surface of the Ti substrate, the ratio represented by (the amount of adhesion of Au) / (the amount of adhesion of Cr) is 10 or more. The Au-containing layer is firmly and uniformly formed on the Ti, and the corrosion resistance or durability required for the fuel cell separator is required in the aqueous solution containing chlorine.

為達成上述目的,本發明之燃料電池用分隔板材料係於Ti基材之表面形成含有Au與Cr之表面層,於上述表面層與上述Ti基材之間存在含有Ti、O及Cr且Au未達20原子%的中間層,Au濃度65原子%以上之區域之厚度存在1.5nm以上,且Au之最大濃度為80原子%以上,Au之附著量為9000~40000ng/cm2 ,(Au之附著量)/(Cr之附著量)所表示之比為10以上,Cr之附著量為200ng/cm2 以上,於上述中間層中,Ti、O分別含有10原子%以上且Cr含有20原子%以上之區域存在1nm以上。In order to achieve the above object, the separator material for a fuel cell of the present invention forms a surface layer containing Au and Cr on the surface of the Ti substrate, and contains Ti, O, and Cr between the surface layer and the Ti substrate. Au is less than 20 atom% of the intermediate layer, and the thickness of the region having an Au concentration of 65 atom% or more is 1.5 nm or more, and the maximum concentration of Au is 80 atom% or more, and the adhesion amount of Au is 9000 to 40,000 ng/cm 2 (Au The ratio of the adhesion amount / (the adhesion amount of Cr) is 10 or more, and the adhesion amount of Cr is 200 ng / cm 2 or more. In the intermediate layer, Ti and O respectively contain 10 atom% or more and Cr contains 20 atoms. More than 1 nm is present in the region above %.

上述Ti基材亦可為將厚度為10nm以上之Ti被膜形成於與Ti不同之基材表面而成。The Ti substrate may be formed by forming a Ti film having a thickness of 10 nm or more on a surface of a substrate different from Ti.

本發明之燃料電池用分隔板材料可較佳地用於固體高分子型燃料電池或直接甲醇型固體高分子型燃料電池。The separator material for a fuel cell of the present invention can be preferably used for a solid polymer fuel cell or a direct methanol type polymer electrolyte fuel cell.

本發明之燃料電池用分隔板係使用上述燃料電池用分隔板材料,其係預先將藉由加壓加工所生成之反應氣體流路及/或反應液體流路形成在該Ti基材後,形成該表面層而成。。In the separator for a fuel cell of the present invention, the separator material for a fuel cell is used, and a reaction gas flow path and/or a reaction liquid flow path formed by press working are formed in advance on the Ti substrate. Forming the surface layer. .

又,本發明之燃料電池用分隔板係使用上述燃料電池用分隔板材料,將上述表面層形成在上述Ti基材後,形成藉由加壓加工所生成之反應氣體流路及/或反應液體流路而成。Further, in the fuel cell separator, the fuel cell separator material is used, and the surface layer is formed on the Ti substrate to form a reaction gas flow path formed by press working and/or The reaction liquid flow path is formed.

本發明之燃料電池堆係使用有上述燃料電池用分隔板材料或上述燃料電池用分隔板者。In the fuel cell stack of the present invention, the fuel cell separator material or the fuel cell separator is used.

本發明之燃料電池用分隔板材料之製造方法係用以製造上述燃料電池用分隔板材料,於上述Ti基材之表面乾式成膜上述Cr後,乾式成膜Au。The method for producing a separator material for a fuel cell according to the present invention is for producing the above-mentioned separator material for a fuel cell, and after dry-forming the Cr on the surface of the Ti substrate, dry-forming Au.

較佳為上述乾式成膜為濺鍍。Preferably, the dry film formation is sputtering.

根據本發明,可使含有Au之層牢固且均勻地形成於Ti上,可確保對燃料電池用分隔板所要求之於含有氯之水溶液中之密合性、耐蝕性。According to the present invention, the Au-containing layer can be formed firmly and uniformly on Ti, and the adhesion and corrosion resistance in the aqueous solution containing chlorine required for the fuel cell separator can be ensured.

以下,對本發明之實施形態之燃料電池用分隔板材料加以說明。再者,於本發明中,所謂%,若無特別說明,則表示原子(at)%。Hereinafter, a separator material for a fuel cell according to an embodiment of the present invention will be described. In the present invention, the term "%" means an atom (at)% unless otherwise specified.

又,於本發明中,所謂「燃料電池用分隔板」,係指具有導電性,將各單電池電性連接,收集各單電池中產生之能量(電力),並且形成對各單電池供給之燃料氣體(燃料液體)或空氣(氧)之流路者。分隔板亦稱為內部連接體、雙極板、集電體。In the present invention, the term "a separator for a fuel cell" means having electrical conductivity, electrically connecting the cells, collecting energy (electric power) generated in each cell, and forming a supply to each cell. The flow of fuel gas (fuel liquid) or air (oxygen). The partition plate is also referred to as an internal connection body, a bipolar plate, and a current collector.

因此,燃料電池用分隔板,除了於板狀之基材表面設置有凹凸狀之流路的分隔板以外,亦包含如上述被動型DMFC用分隔板般,於板狀之基材表面開口有氣體或甲醇之流路孔的分隔板,具體後述。Therefore, the partition plate for a fuel cell includes, in addition to the partition plate having the flow path of the uneven shape on the surface of the plate-like base material, the partition plate of the passive type DMFC, and the surface of the plate-shaped base material. A partition plate having a flow path hole for gas or methanol, which will be described later.

如圖1所示,本發明之實施形態之燃料電池用分隔板材料係於Ti基材2之表面形成中間層2a,於中間層2a之表面形成表面層6而成。As shown in Fig. 1, a separator material for a fuel cell according to an embodiment of the present invention is formed by forming an intermediate layer 2a on the surface of the Ti substrate 2 and a surface layer 6 on the surface of the intermediate layer 2a.

<Ti基材><Ti substrate>

燃料電池用分隔板材料要求具有耐蝕性與導電性,基材需要耐蝕性。因此,基材使用耐蝕性良好之鈦材。The separator material for fuel cells is required to have corrosion resistance and electrical conductivity, and the substrate needs corrosion resistance. Therefore, the base material uses a titanium material having good corrosion resistance.

Ti基材可為純鈦材,亦可為於與Ti不同之基材表面形成厚度為10nm以上之Ti被膜而成者。與Ti不同之基材,可列舉不鏽鋼或鋁、銅等,藉由於該等之表面被覆Ti,可提高耐蝕性低於鈦之不鏽鋼或鋁、銅等之耐蝕性。只是,若不被覆10nm以上之Ti則無法獲得耐蝕性提昇效果。The Ti substrate may be a pure titanium material, or may be formed by forming a Ti film having a thickness of 10 nm or more on the surface of a substrate different from Ti. Examples of the substrate different from Ti include stainless steel, aluminum, copper, etc., and since the surface is coated with Ti, the corrosion resistance of stainless steel, aluminum, copper, or the like which is lower than that of titanium can be improved. However, if Ti is not covered by 10 nm or more, the corrosion resistance improvement effect cannot be obtained.

Ti基材2之材質若為鈦則並無特別限制。又,Ti基材2之形狀亦無特別限制,若為可濺鍍Cr及金之形狀即可,但若考慮到加壓成形為分隔板形狀,則Ti基材之形狀較佳為板材,較佳為Ti基材整體之厚度為10μm以上之板材。The material of the Ti substrate 2 is not particularly limited as long as it is titanium. Further, the shape of the Ti substrate 2 is not particularly limited, and may be a shape in which Cr and gold may be sputtered. However, in consideration of press molding into a separator shape, the shape of the Ti substrate is preferably a plate material. It is preferably a sheet material having a thickness of the entire Ti substrate of 10 μm or more.

中間層2a中所含之O(氧),可藉由將Ti基材2放置於空氣中而自然形成,亦可於氧化環境中積極形成O。The O (oxygen) contained in the intermediate layer 2a can be naturally formed by placing the Ti substrate 2 in the air, and can form O actively in an oxidizing atmosphere.

再者,Ti之濃度係以藉由後述之XPS之濃度檢測而進行,將指定元素之總計設為100%,分析各元素之濃度(原子%)而進行。又,所謂距離燃料電池用分隔板材料之最表面1nm之深度,係指藉由XPS分析之圖表之橫軸(厚度方向)之距離(以SiO2 換算之距離)。In addition, the concentration of Ti was measured by concentration detection of XPS described later, and the total of the designated elements was set to 100%, and the concentration (atomic %) of each element was analyzed. Further, the depth of 1 nm from the outermost surface of the separator material for a fuel cell means the distance (the distance in terms of SiO 2 ) of the horizontal axis (thickness direction) of the graph by XPS analysis.

<表面層><surface layer>

於Ti基材2上形成含有Cr與Au且Au濃度65%以上之區域之厚度存在1.5nm以上的表面層6。該表面層係用以賦予Ti基材Au之特性(耐蝕性、導電性等)或耐氫脆性者。A surface layer 6 having a thickness of 1.5 nm or more in a region containing Cr and Au and having a Au concentration of 65% or more is formed on the Ti substrate 2. The surface layer is used to impart properties (corrosion resistance, electrical conductivity, etc.) or hydrogen embrittlement resistance to the Ti substrate Au.

Cr具有a)易與氧鍵結、b)與Au構成合金、c)難以吸收氫之性質,對表面層賦予上述功能,並且形成中間層而提高表面層與Ti基材之密合性。Cr has a property of being easy to bond with oxygen, b) alloying with Au, c) having difficulty in absorbing hydrogen, imparting the above functions to the surface layer, and forming an intermediate layer to improve adhesion between the surface layer and the Ti substrate.

又,Cr自電位-pH圖可知較Au為易氧化性,又利用難以吸收氫之特性,將Cr用作以下之中間層之構成元素。Further, the Cr self-potential-pH diagram shows that Au is oxidizable, and it is difficult to absorb hydrogen, and Cr is used as a constituent element of the following intermediate layer.

表面層可藉由後述之XPS分析來確認,將根據XPS分析,自最表面面向下層而含有Au與Cr之部分,且位於以下之中間層之上層之部分(Au 20%以上之部分)作為表面層。表面層之厚度較佳為5~100nm。若表面層之厚度未達5nm,則有時無法確保於Ti基材上對燃料電池用分隔板所要求之耐蝕性。表面層之厚度更佳為7nm以上,進而佳為10nm以上。The surface layer can be confirmed by XPS analysis described later, and the portion containing Au and Cr from the outermost surface facing the lower layer according to the XPS analysis, and the portion above the intermediate layer (the portion of Au above 20%) is used as the surface. Floor. The thickness of the surface layer is preferably from 5 to 100 nm. When the thickness of the surface layer is less than 5 nm, the corrosion resistance required for the separator for a fuel cell on the Ti substrate may not be secured. The thickness of the surface layer is more preferably 7 nm or more, and still more preferably 10 nm or more.

又,成膜Cr與Au後亦可進行熱處理。若進行熱處理,則有時亦進行氧化與擴散,導致表層之Au濃度下降。然而,若Au濃度65%以上之區域之厚度存在1.5nm以上,則鈦不會於表面層擴散,從而發揮作為表面層之功能。Further, heat treatment may be performed after forming Cr and Au. When the heat treatment is performed, oxidation and diffusion may also occur, resulting in a decrease in the Au concentration of the surface layer. However, when the thickness of the region having an Au concentration of 65% or more is 1.5 nm or more, titanium does not diffuse in the surface layer, and functions as a surface layer.

若表面層之厚度超過100nm,則有時無法節省資金,導致成本上升。If the thickness of the surface layer exceeds 100 nm, there is a case where it is impossible to save money and the cost increases.

又,於表面層中,於Au濃度65%以上之區域之厚度未達1.5nm之情形時,無法確保對燃料電池用分隔板所要求之耐蝕性。Further, in the case where the thickness of the region having a Au concentration of 65% or more is less than 1.5 nm in the surface layer, the corrosion resistance required for the separator for a fuel cell cannot be ensured.

又,表面層6中之Au之最大濃度必須為80%以上。若Au之最大濃度未達80%,則無法充分對Ti基材賦予Au之特性(耐蝕性、導電性等)或耐氫脆性。Further, the maximum concentration of Au in the surface layer 6 must be 80% or more. When the maximum concentration of Au is less than 80%, the properties of the Au (corrosion resistance, electrical conductivity, etc.) or hydrogen embrittlement resistance cannot be sufficiently imparted to the Ti substrate.

再者,亦可於表面層6之最表面部分形成Au單獨層。Au單獨層係根據XPS分析,Au之濃度幾乎為100%的部分。Further, an Au single layer may be formed on the outermost surface portion of the surface layer 6. The Au single layer was analyzed according to XPS, and the concentration of Au was almost 100%.

又,於表面層6之中間層側,可具有主要由Cr所構成之組成區域(貴金屬區域)。Further, on the intermediate layer side of the surface layer 6, a composition region (precious metal region) mainly composed of Cr may be provided.

<中間層><intermediate layer>

於表面層(或Au單獨層)6與Ti基材2之間,存在含有Ti、O及Cr且Au未達20%之中間層2a。Between the surface layer (or Au separate layer) 6 and the Ti substrate 2, there is an intermediate layer 2a containing Ti, O and Cr and having less than 20% of Au.

通常,Ti基材於表面具有氧化層,難以直接於Ti表面形成難以氧化之Au(含有)層。另一方面,認為上述金屬較Au易於氧化,於Ti基材之表面與Ti氧化物中之O原子形成氧化物,與Ti基材表面牢固鍵結。Usually, the Ti substrate has an oxide layer on the surface, and it is difficult to form an Au (containing) layer which is difficult to oxidize directly on the surface of Ti. On the other hand, it is considered that the above metal is more susceptible to oxidation than Au, and an oxide is formed on the surface of the Ti substrate and the O atom in the Ti oxide, and is firmly bonded to the surface of the Ti substrate.

又,上述金屬難以吸收氫。自該等方面考慮,於含有Au之導電性膜(上述表面層或Au單獨層)之厚度為數10nm以下之情形時,與先前僅使用Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W等作為中間層之情形相比,藉由自Ti、O及Cr形成中間層,可提供耐久性良好之分隔板材。Moreover, it is difficult for the above metal to absorb hydrogen. From the viewpoints of the above, when the thickness of the conductive film containing Au (the above-mentioned surface layer or Au single layer) is several 10 nm or less, only Ti, Zr, Hf, V, Nb, Ta, Cr, Mo are used previously. When the intermediate layer is formed from Ti, O, and Cr as compared with the case where W or the like is an intermediate layer, a separator having good durability can be provided.

再者,較佳為中間層中不含Au,若Au含有20%以上則密合性下降。為使中間層中之Au濃度未達20%,較佳為於Ti基材上,使用Cr單體之靶或低Au濃度之Cr-Au合金靶進行濺鍍。Further, it is preferable that Au is not contained in the intermediate layer, and if Au is contained in an amount of 20% or more, the adhesion is lowered. In order to make the Au concentration in the intermediate layer less than 20%, it is preferred to perform sputtering on the Ti substrate using a Cr monomer target or a low Au concentration Cr-Au alloy target.

較佳為Cr之附著量為200ng/cm2 以上,於中間層中,作為Ti、O分別含有10%以上且Cr含有20%以上之1nm以上之層而存在。於該情形時,藉由XPS分析燃料電池用分隔板材料之剖面時,Ti、O分別含有10%以上且Cr含有20%以上,並且Au含有20%以上之區域於厚度方向存在1nm以上。具有此種組成之中間層之厚度上限並無限定,自Cr之成本而言,較佳為100nm以下。It is preferable that the adhesion amount of Cr is 200 ng/cm 2 or more, and in the intermediate layer, Ti and O are each contained in an amount of 10% or more and Cr is contained in an amount of 20% or more and 1 nm or more. In this case, when the cross section of the separator material for a fuel cell is analyzed by XPS, Ti and O are contained in an amount of 10% or more and Cr is contained in an amount of 20% or more, and a region containing 20% or more of Au is present in a thickness direction of 1 nm or more. The upper limit of the thickness of the intermediate layer having such a composition is not limited, and is preferably 100 nm or less from the cost of Cr.

若Cr之附著量為達200ng/cm2 ,則由於Cr較少,故而有時表面層之密合性劣化。When the adhesion amount of Cr is 200 ng/cm 2 , since the Cr is small, the adhesion of the surface layer may be deteriorated.

此處,測定藉由XPS(X射線光電子光譜)分析之深度(Depth)分佈,進行Au、Ti、O、Cr之濃度分析,可決定濺鍍層之層構造。再者,藉由XPS之濃度檢測係將指定元素之總計設為100%,分析各元素之濃度。又,所謂XPS分析中於厚度方向之1nm之距離,係指藉由XPS分析之圖表之橫軸的距離(以SiO2 換算之距離)。Here, the depth (Depth) distribution analyzed by XPS (X-ray photoelectron spectroscopy) is measured, and the concentration analysis of Au, Ti, O, and Cr is performed to determine the layer structure of the sputter layer. Further, the concentration of each element was analyzed by setting the total of the designated elements to 100% by the concentration detection system of XPS. In addition, the distance of 1 nm in the thickness direction in the XPS analysis means the distance (the distance in terms of SiO 2 ) of the horizontal axis of the graph by XPS analysis.

將Ti、O之下限分別設為10%,將Cr之下限設為20%的理由為:Cr未達20%之部分與Ti基材之表面接近,Ti未達10%之部分與表面層接近,又,認為O未達10%之部分中Cr與Ti無法與O原子形成充分之氧化物,無法發揮中間層之功能。又,Ti、O分別自10%急遽減少,故而測定上將10%作為下限。將Au設為未達20%之理由為:為了提高密合性。於中間層未達1nm之情形時,Cr較薄,Ti基材與Au相接之部分變多,故而有時表面層之密合性劣化。The reason why the lower limit of Ti and O is 10%, and the lower limit of Cr is 20% is that the portion where Cr is less than 20% is close to the surface of the Ti substrate, and the portion where Ti is less than 10% is close to the surface layer. Further, it is considered that Cr and Ti cannot form a sufficient oxide with the O atom in the portion where O is less than 10%, and the function of the intermediate layer cannot be exerted. Further, since Ti and O were each reduced from 10%, the measurement was 10% as the lower limit. The reason for setting Au to less than 20% is to improve adhesion. When the intermediate layer is less than 1 nm, Cr is thin, and the portion where the Ti substrate is in contact with Au is increased, so that the adhesion of the surface layer may be deteriorated.

於本發明之燃料電池用分隔板材料中,Au之附著量必須為9000~40000ng/cm2In the separator material for a fuel cell of the present invention, the adhesion amount of Au must be 9000 to 40,000 ng/cm 2 .

若Au之附著量未達9000ng/cm2 ,則變得無法確保對燃料電池用分隔板所要求之耐蝕性。When the adhesion amount of Au is less than 9000 ng/cm 2 , the corrosion resistance required for the fuel cell separator is not secured.

另一方面,自節省資金之方面而言,Au之附著量必須未達40000ng/cm2 。又,(Au之附著量)/(Cr之附著量)所表示之比為10以上。若Au之附著量未達40000ng/cm2 時,(Au之附著量)/(Cr之附著量)所表示之比未達10,則有濺鍍膜之表面存在露出Cr之部分,於含氯腐蝕液中之耐蝕性試驗中試驗後之接觸電阻增加,Cr之溶出亦較多的問題。On the other hand, in terms of saving money, the adhesion amount of Au must be less than 40,000 ng/cm 2 . Moreover, the ratio represented by (the adhesion amount of Au) / (the adhesion amount of Cr) is 10 or more. If the adhesion amount of Au is less than 40,000 ng/cm 2 , the ratio of (Amount of adhesion of Au) / (the amount of adhesion of Cr) is less than 10, and there is a portion where the surface of the sputtered film is exposed to Cr, and is corroded by chlorine. In the corrosion resistance test in the liquid, the contact resistance after the test increases, and the dissolution of Cr is also large.

(Au之附著量)/(Cr之附著量)所表示之比之上限並無特別限定,但若該比過大則Cr之比例減少,無法確保由Cr所導致之表面層之密合性提昇效果,故而上述比較佳為100以下。上述比若過大,則Au之附著量多於所需,增加成本,故而上述比較佳為50以下。更佳為上述比為30以下,進而佳為20以下。The upper limit of the ratio (the amount of adhesion of Au) / (the amount of adhesion of Cr) is not particularly limited. However, if the ratio is too large, the ratio of Cr is decreased, and the adhesion of the surface layer due to Cr cannot be ensured. Therefore, the above comparison is preferably 100 or less. If the ratio is too large, the amount of adhesion of Au is more than necessary, and the cost is increased. Therefore, the above comparison is preferably 50 or less. More preferably, the ratio is 30 or less, and more preferably 20 or less.

於本發明中,較佳為於Ti基材與表面層6之間,以未達100nm之厚度形成Ti未達50%且O含有20%以上之氧化層。有時該氧化層之一部分與中間層之區域重合。In the present invention, it is preferred to form an oxide layer having less than 50% of Ti and 20% or more of O between the Ti substrate and the surface layer 6 in a thickness of less than 100 nm. Sometimes a portion of the oxide layer coincides with a region of the intermediate layer.

若存在氧化層,則於進行燃料電池之連續發電試驗之情形時可防止鈦基材脆化。Ti低於50%之部分,因鈦量為總量之一半以下,故而認為非鈦基材之部分。並且因鈦基材之表面存在氧化膜,故而自Ti低於50%之部分至表面層之位置為氧化層。將含有20%以上之O之區域作為氧化層的理由為:若氧化層之O(氧)濃度未達20%,則於進行燃料電池之連續發電試驗之情形時,鈦基材脆化,作為燃料電池用分隔板材料之耐久性劣化。If an oxide layer is present, the titanium substrate can be prevented from embrittlement in the case of performing a continuous power generation test of the fuel cell. A portion of Ti which is less than 50% is considered to be a part of a non-titanium substrate because the amount of titanium is one-half or less of the total amount. Further, since an oxide film exists on the surface of the titanium substrate, the position from the portion where Ti is less than 50% to the surface layer is an oxide layer. The reason why the region containing 20% or more of O is used as the oxide layer is that if the O (oxygen) concentration of the oxide layer is less than 20%, the titanium substrate is embrittled when the continuous power generation test of the fuel cell is performed. The durability of the separator material for a fuel cell is deteriorated.

其中,若氧化層之厚度為100nm以上,則有時表面層之密合性或導電性下降。另一方面,若氧化層較薄,則於進行燃料電池之連續發電試驗之情形時,亦存在鈦基材脆化,作為燃料電池用分隔板材料之耐久性劣化之虞。因此,氧化層之厚度較佳為5nm以上,更佳為10nm以上。However, when the thickness of the oxide layer is 100 nm or more, the adhesion or conductivity of the surface layer may be lowered. On the other hand, when the oxide layer is thin, when the continuous power generation test of the fuel cell is performed, the titanium substrate is also embrittled, and the durability of the separator material for the fuel cell is deteriorated. Therefore, the thickness of the oxide layer is preferably 5 nm or more, more preferably 10 nm or more.

表面層中之Au之比例較佳為自下層側朝向上層側增加之漸增組成。此處,Au之比例(at%)可藉由上述XPS分析而求得。表面層之厚度為XPS分析中之掃描距離之實際尺寸。The proportion of Au in the surface layer is preferably an increasing composition increasing from the lower layer side toward the upper layer side. Here, the ratio (at%) of Au can be obtained by the above XPS analysis. The thickness of the surface layer is the actual size of the scanning distance in the XPS analysis.

若表面層為漸增組成,則表面層之下層側中易氧化性之Cr之比例多於Au,與Ti基材表面之鍵結牢固,另一方面表面層之上層側中Au之特性變強,故而耐蝕性與耐久性提高。If the surface layer is of increasing composition, the proportion of Cr which is oxidizable in the lower layer side of the surface layer is more than that of Au, and the bonding with the surface of the Ti substrate is strong, and on the other hand, the property of Au in the layer side above the surface layer becomes strong. Therefore, corrosion resistance and durability are improved.

<燃料電池用分隔板材料之製造><Manufacture of separator material for fuel cell>

燃料電池用分隔板材料之中間層之形成方法,不除去Ti基材之表面Ti氧化膜,於該基材以Cr為靶來進行濺鍍成膜,藉此Cr與表面Ti氧化膜中之O鍵結,從而可形成中間層。又,亦可於除去Ti基材2之表面Ti氧化膜後,以Cr之氧化物為靶來進行濺鍍成膜,或於除去Ti基材2之表面Ti氧化膜後,以Cr為靶且於氧化環境下進行濺鍍成膜,藉此形成中間層。In the method for forming an intermediate layer of a separator material for a fuel cell, the Ti oxide film on the surface of the Ti substrate is not removed, and the substrate is sputter-deposited with Cr as a target, whereby Cr and the surface Ti oxide film are used. The O bond is formed so that an intermediate layer can be formed. Further, after removing the Ti oxide film on the surface of the Ti substrate 2, sputtering may be performed by sputtering an oxide of Cr or after removing the Ti oxide film on the surface of the Ti substrate 2, and then targeting Cr. Sputtering is performed in an oxidizing atmosphere to form an intermediate layer.

再者,濺鍍之時,亦可適度除去Ti基材之表面Ti氧化膜,以基材表面之清潔為目的而進行逆向濺鍍(離子蝕刻)。逆向濺鍍例如可以RF 100W左右之輸出功率,0.2Pa左右之氬壓力對基材照射氬氣來進行。Further, at the time of sputtering, the Ti oxide film on the surface of the Ti substrate can be appropriately removed, and reverse sputtering (ion etching) can be performed for the purpose of cleaning the surface of the substrate. The reverse sputtering can be performed, for example, by an output power of about 100 W RF and an argon pressure of about 0.2 Pa to irradiate the substrate with argon gas.

中間層之Au可藉由以下之用以形成表面層之Au濺鍍,而使Au原子進入中間層,藉此使中間層內含有Au。又,亦可使用含有Cr與Au之合金靶,於Ti基材表面濺鍍成膜。The Au of the intermediate layer can cause Au atoms to enter the intermediate layer by Au sputtering for forming the surface layer, whereby the intermediate layer contains Au. Further, an alloy target containing Cr and Au may be used to form a film on the surface of the Ti substrate.

表面層之形成方法,例如可藉由上述濺鍍而於Ti基材上成膜Cr後,於Cr膜上濺鍍成膜Au。於該情形時,濺鍍粒子具有高能,故而即使僅Cr膜成膜於Ti基材表面,亦可藉由於其上濺鍍Au,而使Au進入Cr膜,成為表面層。又,於該情形時,表面層中之Au之比例為自下層側朝向上層側增加之漸增組成。In the method of forming the surface layer, for example, Cr can be formed on the Ti substrate by the above-described sputtering, and then Au can be sputter-deposited on the Cr film. In this case, since the sputtered particles have high energy, even if only the Cr film is formed on the surface of the Ti substrate, Au can be deposited on the Cr film by sputtering Au thereon to form a surface layer. Further, in this case, the ratio of Au in the surface layer is an increasing composition which increases from the lower layer side toward the upper layer side.

於Ti基材表面最初亦可使用Cr與Au之中Au濃度較低之合金靶來進行濺鍍成膜,其後,使用Cr與Au之中Au濃度較高之合金靶來進行濺鍍成膜。On the surface of the Ti substrate, an alloy target having a low Au concentration among Cr and Au may be used for sputtering, and then an alloy target having a high Au concentration among Cr and Au may be used for sputtering. .

根據本發明之實施形態之燃料電池用分隔板材料,可使含有Au之層牢固且均勻地形成於Ti上,該層具有導電性、耐蝕性及耐久性,因此適合作為燃料電池用分隔板材料。又,根據本發明之實施形態,若將含有Au之層進行濺鍍成膜則該層成為均勻之層,故而與濕式鍍金相比,具有表面平滑、不會浪費地使用Au之優點。According to the separator material for a fuel cell according to the embodiment of the present invention, the Au-containing layer can be firmly and uniformly formed on Ti, and the layer is electrically conductive, corrosion-resistant, and durable, and thus is suitable as a fuel cell separator. Board material. Further, according to the embodiment of the present invention, when the layer containing Au is sputter-deposited to form a film, the layer becomes a uniform layer. Therefore, compared with the wet gold plating, the surface has a smooth surface and does not waste the use of Au.

<燃料電池用分隔板><Fuel separator for fuel cell>

其次,對使用有本發明之燃料電池用分隔板材料之燃料電池用分隔板之一例加以說明。燃料電池用分隔板係將上述燃料電池用分隔板材料加工為特定形狀而成,形成用以使燃料氣體(氫)或燃料液體(甲醇)、空氣(氧)、冷卻水等流通的反應氣體流路或反應液體流路(槽或開口)。Next, an example of a fuel cell separator using the separator material for a fuel cell of the present invention will be described. In the fuel cell separator, the fuel cell separator material is processed into a specific shape to form a reaction for circulating fuel gas (hydrogen), fuel liquid (methanol), air (oxygen), cooling water, and the like. a gas flow path or a reaction liquid flow path (slot or opening).

<積層型(主動型)燃料電池用分隔板><Layered (active) fuel cell separator>

圖3表示積層型(主動型)燃料電池之單電池之剖面圖。再者,圖3中後述之分隔板10之外側分別配置有集電板140A、140B,通常,於積層該單電池而構成堆之情形時,僅於堆之兩端配置一對集電板。Fig. 3 is a cross-sectional view showing a unit cell of a laminated type (active type) fuel cell. Further, the current collector plates 140A and 140B are disposed on the outer sides of the partition plate 10 to be described later in FIG. 3, and generally, when the battery cells are stacked to form a stack, only a pair of current collector plates are disposed at both ends of the stack. .

並且,分隔板10具有導電性,與後述之MEA相接而具有集電作用,具有將各單電池電連接之功能。又,如後述,於分隔板10形成成為燃料氣體或空氣(氧)之流路的槽。Further, the partition plate 10 has electrical conductivity, and has a current collecting function in contact with an MEA to be described later, and has a function of electrically connecting the unit cells. Further, as will be described later, a groove serving as a flow path of fuel gas or air (oxygen) is formed in the partition plate 10.

於圖3中,於固體高分子電解質膜20之兩側分別積層有陽極電極40與陰極電極60,構成膜電極接合體(MEA,Membrane Electrode Assembly)80。又,於陽極電極40與陰極電極60之表面,分別於陽極側積層有氣體擴散膜90A,於陰極側積層有氣體擴散膜90B。於本發明中,於提到膜電極接合體時,亦可為包含氣體擴散膜90A、90B之積層體。又,例如於陽極電極40或陰極電極60之表面形成氣體擴散層等情形時,亦可將固體高分子電解質膜20、陽極電極40、陰極電極60之積層體稱作膜電極接合體。In FIG. 3, an anode electrode 40 and a cathode electrode 60 are laminated on both sides of the solid polymer electrolyte membrane 20 to constitute a membrane electrode assembly (MEA, Membrane Electrode Assembly) 80. Further, on the surfaces of the anode electrode 40 and the cathode electrode 60, a gas diffusion film 90A is laminated on the anode side, and a gas diffusion film 90B is laminated on the cathode side. In the present invention, when a membrane electrode assembly is mentioned, it may be a laminate including gas diffusion membranes 90A and 90B. Further, for example, when a gas diffusion layer or the like is formed on the surface of the anode electrode 40 or the cathode electrode 60, the laminated body of the solid polymer electrolyte membrane 20, the anode electrode 40, and the cathode electrode 60 may be referred to as a membrane electrode assembly.

於MEA80之兩側,以分別與氣體擴散膜90A、90B相對向之方式配置分隔板10,分隔板10夾持MEA80。於MEA80側之分隔板10表面形成流路10L,氣體可於以後述之墊圈(gasket)12、流路10L及氣體擴散膜90A(或90B)包圍之內部空間20內出入。The partition plate 10 is disposed on both sides of the MEA 80 so as to face the gas diffusion films 90A and 90B, respectively, and the partition plate 10 sandwiches the MEA 80. A flow path 10L is formed on the surface of the partition plate 10 on the MEA 80 side, and the gas can be introduced into the internal space 20 surrounded by the gasket 12, the flow path 10L, and the gas diffusion film 90A (or 90B).

並且,藉由於陽極電極40側之內部空間20中流通燃料氣體(氫等),於陰極電極60側之內部空間20中流通氧化性氣體(氧、空氣等),而產生電化學反應。In addition, an oxidizing gas (oxygen, air, or the like) flows through the internal space 20 on the cathode electrode 60 side by the fuel gas (hydrogen or the like) flowing through the internal space 20 on the anode electrode 40 side, thereby generating an electrochemical reaction.

陽極電極40與氣體擴散膜90A之邊緣之外側,由與該等之積層厚度幾乎相同之厚度之框狀的密封構件31所包圍。又,於密封構件31與分隔板10之邊緣之間,插入有與分隔板相接之大致框狀之墊圈12,墊圈12包圍流路10L。進而,於分隔板10之外面(與MEA80側相反側之面)積層有與分隔板10相接之集電板140A(或140B),於集電板140A(或140B)與分隔板10之邊緣之間,插入有大致框狀之密封構件32。The anode electrode 40 and the outer side of the edge of the gas diffusion film 90A are surrounded by a frame-shaped sealing member 31 having a thickness almost the same as the thickness of the laminate. Further, between the sealing member 31 and the edge of the partitioning plate 10, a substantially frame-shaped gasket 12 that is in contact with the partitioning plate is inserted, and the gasket 12 surrounds the flow path 10L. Further, a collector plate 140A (or 140B) that is in contact with the partition plate 10 is laminated on the outer surface of the partition plate 10 (the surface opposite to the MEA 80 side), and the collector plate 140A (or 140B) and the partition plate are laminated. Between the edges of 10, a substantially frame-shaped sealing member 32 is inserted.

密封構件31及墊圈12形成用以防止燃料氣體或氧化氣體外泄至單元外的密封。又,於積層多個單電池而形成堆之情形時,於分隔板10之外面與集電板140A(或140B)之間之空間21中流通與空間20不同之氣體(於空間20中流通氧化性氣體之情形時,空間21中流通氫)。因此,密封構件32亦用作防止氣體外泄至單元外的構件。The sealing member 31 and the gasket 12 form a seal for preventing the fuel gas or the oxidizing gas from leaking out of the unit. Further, when a plurality of unit cells are stacked to form a stack, a gas different from the space 20 flows through the space 21 between the outer surface of the partition plate 10 and the current collector plate 140A (or 140B) (circles in the space 20) In the case of an oxidizing gas, hydrogen flows in the space 21). Therefore, the sealing member 32 also functions as a member that prevents gas from leaking out of the unit.

並且,包含MEA80(及氣體擴散膜90A、90B)、分隔板10、墊圈12、集電板140A、140B而構成燃料電池單元,積層多個燃料電池單元而構成燃料電池堆。Further, the MEA 80 (and the gas diffusion films 90A and 90B), the partition plate 10, the gasket 12, and the current collector plates 140A and 140B are included to constitute a fuel cell unit, and a plurality of fuel cell units are stacked to constitute a fuel cell stack.

其次,參照平面圖4說明分隔板10之構造。分隔板10係由本發明之燃料電池用分隔板材料藉由加壓加工而成形為矩形形狀,於分隔板10之上邊緣(上端),燃料氣體導入孔10x於左側開口。又,於分隔板10之下邊緣(下端),燃料氣體排出孔10y於右側開口。Next, the configuration of the partitioning plate 10 will be described with reference to a plan view 4. The partition plate 10 is formed into a rectangular shape by press working by the separator material for a fuel cell of the present invention, and the fuel gas introduction hole 10x is opened to the left side at the upper edge (upper end) of the partition plate 10. Further, at the lower edge (lower end) of the partitioning plate 10, the fuel gas discharge hole 10y is opened to the right side.

進而,於自分隔板10之上端朝向下端之方向(圖4之上下方向)平行延伸之多條直線狀流路槽10L係藉由加壓加工等而形成。直線狀流路槽10L使氣流產生平行流。Further, a plurality of linear flow path grooves 10L extending in parallel from the upper end of the partition plate 10 toward the lower end (upward and downward in FIG. 4) are formed by press working or the like. The linear flow path groove 10L causes a parallel flow of the air flow.

又,於該實施形態中,直線狀流路槽10L之始端及終端未到達分隔板10之外緣,而於分隔板10之外邊緣存在未形成直線狀流路槽10L之平坦部。又,於該實施形態中,雖然鄰接之直線狀流路槽10L分別以等間隔配置,但亦可為非等間隔。Further, in this embodiment, the start end and the end of the linear flow path groove 10L do not reach the outer edge of the partition plate 10, and the outer edge of the partition plate 10 has a flat portion where the linear flow path groove 10L is not formed. Further, in this embodiment, the adjacent linear flow path grooves 10L are arranged at equal intervals, but they may be unequal intervals.

又,於分隔板10之相對向之側邊緣(側邊),分別開口有定位孔10f。Further, positioning holes 10f are formed in the opposite side edges (sides) of the partitioning plate 10, respectively.

再者,流路槽不僅可為直線,亦可為曲線,又,各流路槽並非必須相互平行。又,曲線例如除彎曲線之外,亦可為S字形狀。Furthermore, the flow path grooves may be not only straight lines but also curved lines, and the flow path grooves are not necessarily parallel to each other. Further, the curve may have an S shape, for example, in addition to the curved line.

自易於形成流路槽之方面而言,較佳為相互平行之直線。From the viewpoint of easily forming the flow path grooves, it is preferable that the lines are parallel to each other.

分隔板10之厚度,自加壓成形性之方面而言,較佳為10μm以上,自成本之方面而言,較佳為200μm以下。The thickness of the partition plate 10 is preferably 10 μm or more from the viewpoint of press formability, and is preferably 200 μm or less from the viewpoint of cost.

其次,參照平面圖5說明墊圈12之構造。Next, the configuration of the gasket 12 will be described with reference to a plan view 5.

墊圈12例如為由鐵氟龍(註冊商標)所構成之片狀,外緣為與分隔板10幾乎相同大小之矩形框體,其內緣形成為包圍燃料氣體導入孔10x、排出孔10y及直線狀流路槽10L之大致矩形形狀,於墊圈12之內部空間中,燃料氣體導入孔10x、排出孔10y及直線狀流路槽10L相互連通。The gasket 12 is, for example, a sheet shape composed of Teflon (registered trademark), and the outer edge is a rectangular frame having substantially the same size as the partition plate 10, and the inner edge thereof is formed to surround the fuel gas introduction hole 10x, the discharge hole 10y, and The linear flow path groove 10L has a substantially rectangular shape, and the fuel gas introduction hole 10x, the discharge hole 10y, and the linear flow path groove 10L communicate with each other in the internal space of the gasket 12.

再者,於墊圈12之相對向之側邊緣(側邊),分別開口有定位孔12f,藉由與分隔板10之定位孔10f重合之方式積層墊圈12,而規定分隔板10與墊圈12之相對位置。Further, in the opposite side edges (sides) of the gasket 12, positioning holes 12f are respectively opened, and the gasket 12 is laminated in such a manner as to coincide with the positioning holes 10f of the partitioning plate 10, thereby defining the partitioning plate 10 and the gasket. The relative position of 12.

墊圈12之材料,可使用具有耐蝕性、於燃料電池之工作溫度即80~90℃下之耐熱性的鐵氟龍(註冊商標),使具有耐蝕性與導電性之貴金屬成膜而成之金屬板(鈦、不鏽鋼、鋁等之片材)或碳材。墊圈12之厚度根據分隔板10之凹凸形狀而有所不同,但必須為與分隔板之槽高(框部與凹或凸之高低差)同等以上之厚度。例如,分隔板之槽高為0.5mm之情形時,墊圈之厚度為0.5mm。For the material of the gasket 12, a metal having a corrosion resistance and a heat resistance at a working temperature of a fuel cell, that is, a heat resistance of 80 to 90 ° C, can be used to form a metal having a corrosion-resistant and conductive noble metal. Plate (titanium, stainless steel, aluminum, etc.) or carbon. The thickness of the gasket 12 varies depending on the uneven shape of the partition plate 10, but it must be equal to or higher than the groove height of the partition plate (the height difference between the frame portion and the concave or convex portion). For example, when the groove height of the partition plate is 0.5 mm, the thickness of the gasket is 0.5 mm.

其次,更詳細說明墊圈12之形狀。墊圈12之上側內緣12c位於較直線狀流路槽之上端10L1稍微上側,形成用以使沿直線狀流路槽10L流通之氣體返回而轉向180度之空間。又,上側內緣12c之左端部延伸至外側,使分隔板10之燃料氣體導入孔10x於墊圈12內顯出。Next, the shape of the gasket 12 will be described in more detail. The upper inner edge 12c of the washer 12 is located slightly above the upper end 10L1 of the linear flow path groove, and forms a space for returning the gas flowing through the linear flow path groove 10L and turning it by 180 degrees. Further, the left end portion of the upper inner edge 12c extends to the outside, and the fuel gas introduction hole 10x of the partition plate 10 is displayed in the gasket 12.

同樣,墊圈12之下側內緣12d位於較之直線狀流路槽之下端10L2之稍稍下側,形成用以使沿直線狀流路槽10L流通之氣體返回而轉向180度之空間。又,下側內緣12d之右端部延伸至外側,使分隔板10之燃料氣體排出孔10y於墊圈12內露出。Similarly, the lower inner edge 12d of the washer 12 is located slightly below the lower end 10L2 of the linear flow path groove, and a space for returning the gas flowing through the linear flow path groove 10L and turning 180 degrees is formed. Further, the right end portion of the lower inner edge 12d extends to the outside, and the fuel gas discharge hole 10y of the partition plate 10 is exposed inside the gasket 12.

進而,上側內緣12c中,於與朝向燃料氣體導入孔10x延伸之部分鄰接的位置,朝向內側延伸出片狀之間隔構件12e1。又,上側內緣12c中,於離間隔構件12e1特定距離之右側之位置,朝向內側延伸出另一片狀之間隔構件12e2。並且,間隔構件12e1、12e2之頂端與直線狀流路槽之上端(相當於始端或終端)10L1相接。Further, in the upper inner edge 12c, a sheet-shaped spacer member 12e1 extends inwardly at a position adjacent to a portion extending toward the fuel gas introduction hole 10x. Further, in the upper inner edge 12c, a further sheet-shaped spacer member 12e2 extends toward the inner side at a position on the right side of the specific distance from the spacer member 12e1. Further, the distal ends of the partition members 12e1 and 12e2 are in contact with the upper end (corresponding to the start end or the terminal end) 10L1 of the linear flow path groove.

同樣,下側內緣12d中,於離與間隔構件12e1相對向之位置特定距離之右側之位置,朝向內側延伸出片狀之間隔構件12e3。又,下側內緣12d中,於離與間隔構件12e2相對向之位置特定距離之右側,且與朝向燃料氣體排出孔10y延伸之部分鄰接的位置,朝向內側延伸出片狀之間隔構件12e4。並且,間隔構件12e3、12e4之頂端與直線狀流路槽之下端(相當於始端或終端)10L2相接。Similarly, in the lower inner edge 12d, the sheet-shaped spacer member 12e3 extends inward toward the inner side at a position on the right side of the position facing the spacer member 12e1. Further, in the lower inner edge 12d, a sheet-shaped spacer member 12e4 extends inwardly from a position on the right side of the position facing the spacer member 12e2 and adjacent to the portion extending toward the fuel gas discharge hole 10y. Further, the distal ends of the partition members 12e3 and 12e4 are in contact with the lower end (corresponding to the start end or the terminal end) 10L2 of the linear flow path groove.

又,自墊圈12之相對向之內緣12c、12d分別延伸之間隔構件12e1~12e4,自圖5之左側開始,以間隔構件12e1(上側內緣12c)、12e3(下側內緣12d)、12e2(上側內緣12c)、12e4(下側內緣12d)之順序配置。Further, the partition members 12e1 to 12e4 extending from the inner edges 12c and 12d of the washer 12, respectively, from the left side of FIG. 5, with the partition members 12e1 (upper inner edge 12c), 12e3 (lower inner edge 12d), 12e2 (upper inner edge 12c) and 12e4 (lower inner edge 12d) are arranged in this order.

如此,自墊圈12之相對向之內緣分別延伸之間隔構件相互配置為交錯狀,故而沿直線狀流路槽10L流通之氣體流路於間隔構件附近返回而構成蜿蜒流路。In this manner, the partition members extending from the inner edges of the washers 12 are arranged in a staggered manner. Therefore, the gas flow path that flows along the linear flow path grooves 10L returns to the vicinity of the partition members to constitute a turbulent flow path.

具體而言,自燃料氣體導入孔10x導入分隔板10內之氣體,沿直線狀流路槽10L流向圖5之下方,間隔構件12e3與1個流路槽10L之下端相接,故而沿該流路槽10L之流路被抑制。又,橫穿流路槽10L之流路原本已被抑制。因此,間隔構件12e3所相接之流路槽10L,作為防止氣體於橫方向(圖5之右方向)直接橫流(shortcut)之流路,以及於縱方向之流路之任一者的堤防而發揮功能,故而,氣流於間隔構件12e3附近返回轉向180度,沿直線狀流路槽10L流向上方。其次,因間隔構件12e1、e2同樣防止於橫方向之直接橫流,因此氣流於間隔構件12e2附近返回而沿直線狀流路槽10L流向下方。以下同樣地,氣流於間隔構件12e4附近返回,沿直線狀流路槽10L後,因墊圈12之右側內緣(側緣)防止直接橫流,故而於該部分返回後,沿直線狀流路槽10L排出燃料氣體排出孔10y。Specifically, the gas introduced into the partition plate 10 from the fuel gas introduction hole 10x flows downward along the linear flow path groove 10L toward the lower side of FIG. 5, and the partition member 12e3 is in contact with the lower end of one flow path groove 10L, so that the The flow path of the flow path groove 10L is suppressed. Further, the flow path that traverses the flow path groove 10L is originally suppressed. Therefore, the flow path groove 10L that the partition member 12e3 is in contact with is a flow path that prevents direct flow of gas in the lateral direction (the right direction in FIG. 5) and a diversion of any of the flow paths in the longitudinal direction. Since the function is performed, the airflow returns to the front side of the partition member 12e3 by 180 degrees, and flows upward along the linear flow path groove 10L. Then, since the partition members 12e1 and e2 are similarly prevented from directly traversing in the lateral direction, the airflow returns to the vicinity of the partition member 12e2 and flows downward along the linear flow path groove 10L. Similarly, in the same manner, the airflow returns to the vicinity of the partition member 12e4, and after the linear flow path groove 10L, since the right inner edge (side edge) of the gasket 12 prevents direct cross flow, the linear flow path groove 10L is returned after the portion is returned. The fuel gas discharge hole 10y is discharged.

再者,1個間隔構件相接之流路槽之個數,亦依存於分隔板之大小或流路槽之大小(寬度),故而並無特別限定,但若個數過多,則幫助氣體流通之槽減少,故而較佳為1~3根。Further, the number of the flow path grooves in which one spacer member is connected depends on the size of the partition plate or the size (width) of the flow path groove, and is not particularly limited. However, if the number is too large, the gas is assisted. Since the number of grooves for circulation is reduced, it is preferably 1 to 3.

如上所述,藉由加工容易之墊圈之形狀而使分隔板內之氣體流路以蜿蜒流路之方式構成,故而分隔板中無需形成複雜之流路,使分隔板自身之流路形狀簡單化,即可不損害生產性而改善氣體之流通,提高燃料電池之發電特性。即,可將由分隔板之流路形成之平行流,藉由墊圈之形狀而改變為蜿蜒流(蛇形線,serpentine)。As described above, by processing the shape of the gasket which is easy, the gas flow path in the partition plate is configured as a turbulent flow path, so that it is not necessary to form a complicated flow path in the partition plate, so that the partition plate itself flows. The shape of the road is simplified, and the circulation of the gas can be improved without impairing the productivity, and the power generation characteristics of the fuel cell can be improved. That is, the parallel flow formed by the flow path of the partition plate can be changed to a turbulent flow (serpentine) by the shape of the gasket.

其中,分隔板之流路槽,當然可以使用以蛇形線(蜿蜒)形狀相連者,流路槽之形狀並無限定。In particular, the flow path grooves of the partition plates may be connected in a serpentine shape, and the shape of the flow path grooves is not limited.

圖3所示之積層型(主動型)燃料電池,除上述之將氫用作燃料之燃料電池之外,亦可應用於將甲醇用作燃料之DMFC。The laminated (active) fuel cell shown in Fig. 3 can be applied to a DMFC using methanol as a fuel, in addition to the above-described fuel cell using hydrogen as a fuel.

<平面型(被動型)燃料電池用分隔板><Plane type (passive type) fuel cell separator board>

圖6係表示平面型(被動型)燃料電池之單電池之剖面圖。再者,圖6中於後述之分隔板10之外側分別配置集電板140A、140B,通常,於積層該單電池而構成堆之情形時,僅於堆之兩端配置一對集電板。Fig. 6 is a cross-sectional view showing a unit cell of a planar type (passive type) fuel cell. Further, in FIG. 6, the current collector plates 140A and 140B are disposed on the outer sides of the partition plate 10 to be described later. Generally, when the battery cells are stacked to form a stack, only a pair of current collector plates are disposed at both ends of the stack. .

再者,於圖6中,MEA80之構成與圖5之燃料電池相同,故而標記相同符號而省略說明(圖6中,省略氣體擴散膜90A、90B之揭示,但亦可具有氣體擴散膜90A、90B)。In FIG. 6, the configuration of the MEA 80 is the same as that of the fuel cell of FIG. 5, and therefore the same reference numerals will be given thereto, and the description thereof will be omitted (in FIG. 6, the disclosure of the gas diffusion films 90A and 90B is omitted, but the gas diffusion film 90A may be provided. 90B).

於圖6中,分隔板100具有導電性,與MEA相接而具有集電作用,具有將各單電池電連接之功能。又,如後述,分隔板100中形成成為燃料液體或空氣(氧)之流路的孔。In FIG. 6, the partitioning plate 100 has electrical conductivity, and has a collecting function in contact with the MEA, and has a function of electrically connecting the respective cells. Further, as will be described later, a hole serving as a flow path of a fuel liquid or air (oxygen) is formed in the partition plate 100.

分隔板100以剖面成為曲柄(crank)形狀之方式,於長條平板狀之基材之中央附近形成段部100s,具有隔著段部100s而位於上方之上側片100b、隔著段部100s而位於下方之下側片100a。段部100s於分隔板100之長度方向上沿垂直方向延伸。The partition plate 100 has a segment portion 100s formed in the vicinity of the center of the elongated flat substrate so as to have a cross-sectional shape in the shape of a crank. The partition plate 100 is located above the upper side plate 100b and the segment portion 100s via the segment portion 100s. The lower side panel 100a is located below. The segment portion 100s extends in the vertical direction in the longitudinal direction of the partition plate 100.

並且,多個分隔板100於長度方向排列,鄰接之分隔板100之下側片100a與上側片100b之間形成空間,於該空間插入MEA80。以2個分隔板100夾持MEA80的構造體成為單電池300。如此,多個MEA80經由分隔板100串聯連接,從而構成堆。Further, a plurality of partition plates 100 are arranged in the longitudinal direction, and a space is formed between the lower side panel 100a and the upper side panel 100b adjacent to the partitioning plate 100, and the MEA 80 is inserted into the space. The structure in which the MEA 80 is sandwiched by the two partition plates 100 serves as the unit cell 300. In this manner, the plurality of MEAs 80 are connected in series via the partition plate 100 to constitute a stack.

圖7表示分隔板100之上面圖。於下側片100a與上側片100b,分別開口有多個孔100h,成為氧(空氣)之反應氣體流路或甲醇之反應液體流路。Fig. 7 shows a top view of the partitioning plate 100. A plurality of holes 100h are opened in the lower side sheet 100a and the upper side sheet 100b, respectively, and become a reaction gas flow path of oxygen (air) or a reaction liquid flow path of methanol.

於該堆中,若自圖6之上方流通空氣(氧),則其通過分隔板100之孔100h,使MEA80之陰極電極60側與氧接觸,產生反應。另一方面,若自圖6之下方流通甲醇,則其通過分隔板100之孔100h,使MEA80之陽極電極40側與甲醇接觸,產生反應。再者,自圖6之下方之儲罐(甲醇匣)200供給甲醇。In the stack, if air (oxygen) flows from above the figure 6, it passes through the hole 100h of the partition plate 100, and the cathode electrode 60 side of the MEA 80 is brought into contact with oxygen to cause a reaction. On the other hand, when methanol flows from the lower side of FIG. 6, it passes through the hole 100h of the partition plate 100, and the anode electrode 40 side of the MEA80 is contacted with methanol, and a reaction arises. Further, methanol was supplied from a storage tank (methanol) 200 below the FIG.

圖6所示之平面型(被動型)燃料電池,除上述將甲醇用作燃料之DMFC之外,亦可應用於將氫用作燃料之燃料電池中。又,平面型(被動型)燃料電池用分隔板之開口部之形狀或個數並無限定,開口部除上述孔之外,亦可為狹縫,亦可使分隔板整體為網狀。The planar (passive) fuel cell shown in Fig. 6 can be applied to a fuel cell using hydrogen as a fuel, in addition to the above-described DMFC using methanol as a fuel. Further, the shape or the number of the openings of the partition plate for the flat type (passive type) fuel cell is not limited, and the opening may be a slit in addition to the hole, or the entire partition plate may be a mesh. .

於本發明之燃料電池用分隔板中,較佳為預先藉由加壓加工而於上述Ti基材形成反應氣體流路及/或反應液體流路。若如此操作,則後續步驟中無需形成反應氣體流路(反應液體流路),可藉由對形成中間層或表面層等之前的Ti基材進行加壓加工,而容易地形成反應氣體流路(反應液體流路),故而生產性提高。In the separator for a fuel cell of the present invention, it is preferred that a reaction gas flow path and/or a reaction liquid flow path be formed on the Ti substrate by press working in advance. By doing so, it is not necessary to form a reaction gas flow path (reaction liquid flow path) in the subsequent step, and the reaction gas flow path can be easily formed by press working the Ti substrate before forming the intermediate layer or the surface layer or the like. (Reaction liquid flow path), so productivity is improved.

又,於本發明之燃料電池用分隔板中,亦可對在Ti基材表面形成有表面層或Au單獨層之燃料電池用分隔板材料,之後藉由加壓加工而形成反應氣體流路及/或反應液體流路。由於本發明之燃料電池用分隔板材料之表面層或Au單獨層牢固地密著於Ti基材表面,故而被膜形成後,即使進行加壓加工,亦可於被膜不剝落之狀態下形成反應氣體流路(反應液體流路),生產性提高。Further, in the separator for a fuel cell of the present invention, a separator material for a fuel cell in which a surface layer or an Au single layer is formed on a surface of a Ti substrate may be formed, and then a reaction gas stream is formed by press working. Road and / or reaction liquid flow path. Since the surface layer or the Au single layer of the separator material for a fuel cell of the present invention is firmly adhered to the surface of the Ti substrate, even after the film formation, the reaction can be formed without peeling off the film. The gas flow path (reaction liquid flow path) improves productivity.

再者,為進行用以形成反應氣體流路(反應液體流路)之加壓加工,作為燃料電池用分隔板材料,較佳為將Ti基材之厚度設為10μm以上。Ti基材之厚度之上限並無限定,但自成本之方面而言,較理想的是200μm以下。In addition, in order to perform press working for forming a reaction gas flow path (reaction liquid flow path), it is preferable that the thickness of the Ti base material is 10 μm or more as a separator material for a fuel cell. The upper limit of the thickness of the Ti substrate is not limited, but it is preferably 200 μm or less from the viewpoint of cost.

<燃料電池用堆><fuel cell stack>

本發明之燃料電池用堆係使用本發明之燃料電池用分隔板材料或本發明之燃料電池用分隔板而成。The fuel cell stack of the present invention is obtained by using the fuel cell separator material of the present invention or the fuel cell separator.

燃料電池用堆係將多個以1對電極夾持電解質而成之單電池串聯連接而成者,各單電池之間插入有燃料電池用分隔板,阻斷燃料氣體或空氣。燃料氣體(H2 )所接觸之電極為燃料電極(陽極),空氣(O2 )所接觸之電極為空氣電極(陰極)。In the fuel cell stack, a plurality of cells each having an electrolyte sandwiched between a pair of electrodes are connected in series, and a fuel cell separator is interposed between the cells to block fuel gas or air. The electrode to which the fuel gas (H 2 ) is in contact is the fuel electrode (anode), and the electrode to which the air (O 2 ) is contacted is the air electrode (cathode).

燃料電池用堆之構成例,已於圖3及圖6中說明,但並不限定於此。The configuration example of the fuel cell stack has been described with reference to FIGS. 3 and 6, but is not limited thereto.

[實施例][Examples]

<試樣之製作><Production of sample>

作為Ti基材,使用厚100μm之工業用純鈦材(JIS之1種),藉由FIB(聚焦離子束加工)進行前處理。根據藉由FE-TEM(電解放射型穿透式電子顯微鏡)之能量分散型螢光X射線分析(EDX)進行觀察,結果確認到於Ti基材之表面預先形成約10nm之鈦氧化物層。As the Ti substrate, an industrial pure titanium material (one type of JIS) having a thickness of 100 μm was used, and pretreatment was performed by FIB (Focused Ion Beam Processing). When observed by energy dispersive fluorescent X-ray analysis (EDX) by FE-TEM (electrolytic radiation type transmission electron microscope), it was confirmed that a titanium oxide layer of about 10 nm was formed in advance on the surface of the Ti substrate.

又,於一部分之實施例中,使用對厚100μm之工業用純不鏽鋼材(SUS316L)或厚100μm之純銅(C1100),被覆表1所示之特定厚度之Ti而成者(Ti被覆材)。Ti之被覆藉由使用有電子束蒸鍍裝置(ULVAC製造,MB05-1006)之真空蒸鍍而進行。Further, in some of the examples, a pure stainless steel material (SUS316L) having a thickness of 100 μm or pure copper (C1100) having a thickness of 100 μm was used, and a Ti having a specific thickness shown in Table 1 (Ti coating material) was coated. The coating of Ti was carried out by vacuum evaporation using an electron beam evaporation apparatus (manufactured by ULVAC, MB05-1006).

其次,於Ti基材之鈦氧化物層之表面,使用濺鍍法,以成為特定之目標厚度之方式成膜Cr。靶使用純Cr。其次,使用濺鍍法,以成為特定之目標厚度之方式成膜Au。靶使用純Au。Next, Cr is formed on the surface of the titanium oxide layer of the Ti substrate by sputtering to form a specific target thickness. The target uses pure Cr. Next, Au is formed by sputtering to form a specific target thickness. The target used pure Au.

目標厚度如以下規定。首先,預先於鈦基材藉由濺鍍來成膜對象物(Cr、Au),以螢光X射線膜厚計(Seiko Instruments製造之SEA5100,準直儀:0.1mmΦ)測定實際厚度,掌握該濺鍍條件下之濺鍍速率(nm/min)。並且,基於濺鍍速率,計算成為厚1nm之濺鍍時間,於該條件下進行濺鍍。The target thickness is as specified below. First, an object (Cr, Au) is formed by sputtering on a titanium substrate in advance, and the actual thickness is measured by a fluorescent X-ray film thickness meter (SEA 5100 manufactured by Seiko Instruments, collimator: 0.1 mm Φ). Sputter rate (nm/min) under sputtering conditions. Further, based on the sputtering rate, a sputtering time of 1 nm thick was calculated, and sputtering was performed under the conditions.

Cr及Au之濺鍍係使用ULVAC股份有限公司製造之濺鍍裝置,於輸出功率DC50W、氬壓力0.2Pa之條件下進行。The sputtering of Cr and Au was carried out using a sputtering apparatus manufactured by ULVAC Co., Ltd. under the conditions of an output of DC 50 W and an argon pressure of 0.2 Pa.

<層構造之測定><Measurement of layer structure>

對所得試樣,藉由XPS(X射線光電子光譜)分析測定深度(Depth)分佈,進行Au、Ti、O、Cr之濃度分析,決定濺鍍層之層構造。XPS裝置使用ULVAC-PHI股份有限公司製造之5600MC,極限真空度:6.5×10-8 Pa,激發源:單色化AlK,輸出功率:300W,檢測面積:800μmΦ,入射角:45度,出射角:45度,無中和槍,於以下之濺鍍條件下進行測定。The obtained sample was subjected to XPS (X-ray photoelectron spectroscopy) analysis to measure the depth (Depth) distribution, and the concentration analysis of Au, Ti, O, and Cr was performed to determine the layer structure of the sputter layer. XPS device uses 5600MC manufactured by ULVAC-PHI Co., Ltd., ultimate vacuum: 6.5×10 -8 Pa, excitation source: monochromatic AlK, output power: 300W, detection area: 800μmΦ, incident angle: 45 degrees, exit angle : 45 degrees, no neutralization gun, measured under the following sputtering conditions.

離子種:Ar+Ion species: Ar+

加速電壓:3kVAcceleration voltage: 3kV

掃描區域:3mm×3mmScanning area: 3mm × 3mm

速率:2nm/min(以SiO2 換算)Rate: 2 nm/min (calculated as SiO 2 )

再者,藉由XPS之濃度檢測係將指定元素之總計設為100%,分析各元素之濃度(at%)。又,所謂XPS分析中厚度方向1nm之距離,係指藉由XPS分析之圖表之橫軸之距離(以SiO2 換算之距離)。Further, the concentration of each element was set to 100% by the concentration detection system of XPS, and the concentration (at%) of each element was analyzed. In addition, the distance in the thickness direction of 1 nm in the XPS analysis means the distance (the distance in terms of SiO 2 ) of the horizontal axis of the graph by XPS analysis.

圖2係表示實施例1之試樣之剖面的實際XPS像。Fig. 2 is a view showing an actual XPS image of a cross section of the sample of Example 1.

可知,於Ti基材2之表面形成由Cr與Au所構成之表面層6。進而於Ti基材2與表面層6之間,存在1nm以上之分別含有Ti、O、Cr並且Au未達20%之中間層2a。It is understood that a surface layer 6 composed of Cr and Au is formed on the surface of the Ti substrate 2. Further, between the Ti substrate 2 and the surface layer 6, there is an intermediate layer 2a containing 1 nm or more and containing Ti, O, and Cr, respectively, and having less than 20% of Au.

進而,可知自表面層6之Ti基材2側,以未達100nm之厚度形成Ti未達50%且O含有20%以上之氧化層。Further, it is understood that an oxide layer having less than 50% of Ti and 20% or more of O is formed from the side of the Ti substrate 2 of the surface layer 6 to a thickness of less than 100 nm.

再者,於本發明中,為定義中間層而規定Ti、O等之濃度。因此,中間層之邊界可方便地藉由Ti、O濃度而決定,故而有時於中間層與其上下層(例如Ti基材2)之間,夾入與中間層、Ti基材均不同之層。Further, in the present invention, the concentration of Ti, O, etc. is defined to define the intermediate layer. Therefore, the boundary of the intermediate layer can be conveniently determined by the concentration of Ti and O. Therefore, a layer different from the intermediate layer and the Ti substrate may be sandwiched between the intermediate layer and the upper and lower layers (for example, the Ti substrate 2). .

<各試樣之製作><Production of each sample>

對初期之表面Ti氧化層之厚度分別不同之鈦基材(純Ti、Ti被覆材),將濺鍍時之Cr膜及Au膜之目標厚度進行各種變更,製作實施例1~11之試樣。The titanium substrate (pure Ti, Ti coating material) having different thicknesses of the surface Ti oxide layer at the initial stage was subjected to various changes in the target thicknesses of the Cr film and the Au film at the time of sputtering, and the samples of Examples 1 to 11 were produced. .

作為比較例9,將Au膜之濺鍍厚度減少至4nm而製作試樣。As Comparative Example 9, a sample was produced by reducing the sputtering thickness of the Au film to 4 nm.

作為比較例10、14、15,將Au之附著量/Cr之附著量設為未達10而製作試樣。In Comparative Examples 10, 14, and 15, a sample was prepared by setting the adhesion amount of Au/the adhesion amount of Cr to less than 10.

作為比較例11,將Cr膜之濺鍍厚度減少至0.25nm而製作試樣。As Comparative Example 11, a sample was produced by reducing the sputter thickness of the Cr film to 0.25 nm.

作為比較例12,於濺鍍後實施大氣熱處理(120℃×12小時)而製作試樣。As Comparative Example 12, a sample was prepared by performing atmospheric heat treatment (120 ° C × 12 hours) after sputtering.

作為比較例13,於濺鍍時加熱基板(300℃)而製作試樣。As Comparative Example 13, a substrate (300 ° C) was heated at the time of sputtering to prepare a sample.

<評價><evaluation>

對各試樣進行以下之評價。Each sample was subjected to the following evaluation.

A.被膜之密合性A. Adhesiveness of the film

於各試樣之最表面(表面層)以1mm間隔劃出網格後,黏貼黏著性膠帶,進而將各試驗片彎曲180°,恢復成原先之狀態,將彎曲部之膠帶急速且強力撕下,進行剝離試驗。After the mesh was drawn at the interval of 1 mm on the outermost surface (surface layer) of each sample, the adhesive tape was adhered, and each test piece was bent by 180° to return to the original state, and the tape of the bent portion was quickly and strongly peeled off. , a peel test was performed.

將完全未剝離之情形設為○,即使剝離一部分,只要可目視確認,則設為×。The case where the film was not peeled off at all was set to ○, and even if it was peeled off, it was set as × as long as it was visually confirmed.

B.接觸電阻B. Contact resistance

接觸電阻之測定係藉由對試樣整面施加荷重之方法而進行。首先,於40×50mm之板狀試樣之表背面分別積層碳紙,進而於表背面之碳紙之外側分別積層Cu/Ni/Au板。Cu/Ni/Au板係於厚10mm之銅板鍍敷1.0μm厚之Ni基底,於Ni層上鍍敷0.5μm之Au材料,以Cu/Ni/Au板之鍍Au面與碳紙相接之方式配置。The measurement of the contact resistance is carried out by applying a load to the entire surface of the sample. First, carbon paper was laminated on the front and back surfaces of a 40×50 mm plate-shaped sample, and Cu/Ni/Au plates were laminated on the outer side of the carbon paper on the front and back sides, respectively. The Cu/Ni/Au plate is plated on a 1.0 μm thick Ni substrate on a copper plate having a thickness of 10 mm, and a 0.5 μm Au material is plated on the Ni layer, and the Au plated surface of the Cu/Ni/Au plate is bonded to the carbon paper. Mode configuration.

進而,於Cu/Ni/Au板之外側分別配置鐵氟龍(註冊商標)板,自各鐵氟龍(註冊商標)板之外側以荷重單元於壓縮方向施加10kg/cm2 之荷重。於該狀態下,於2張Cu/Ni/Au板之間流通電流密度為100mA/cm2 之恆定電流時,以四端子法測定Cu/Ni/Au板間之電阻。Further, a Teflon (registered trademark) plate was placed on the outer side of the Cu/Ni/Au plate, and a load of 10 kg/cm 2 was applied from the outside of each Teflon (registered trademark) plate in the compression direction by the load cell. In this state, when a constant current having a current density of 100 mA/cm 2 was passed between two Cu/Ni/Au plates, the electric resistance between the Cu/Ni/Au plates was measured by a four-terminal method.

又,接觸電阻係根據以下2個條件於試驗試樣前後分別測定。Further, the contact resistance was measured before and after the test sample according to the following two conditions.

條件1:將試樣浸漬於硫酸水溶液中之浸漬試驗(浴溫90℃,硫酸濃度0.5g/L,浸漬時間240小時,液量1000cc)Condition 1: Impregnation test in which the sample was immersed in an aqueous sulfuric acid solution (bath temperature: 90 ° C, sulfuric acid concentration: 0.5 g/L, immersion time: 240 hours, liquid volume: 1000 cc)

條件2(含氯水溶液);將試樣浸漬於硫酸(0.5g/L)+氯化鈉(Cl:10ppm)水溶液中之浸漬試驗(浴溫90℃,浸漬時間240小時,液量1000cc)Condition 2 (aqueous solution containing chlorine); immersion test in which the sample was immersed in an aqueous solution of sulfuric acid (0.5 g/L) + sodium chloride (Cl: 10 ppm) (bath temperature 90 ° C, immersion time 240 hours, liquid volume 1000 cc)

C.金屬溶出量C. Metal dissolution

金屬溶出量係藉由對在上述條件1~2下進行試驗後之試驗液中全部之金屬濃度(mg/L)進行ICP(電感耦合電漿)發射光譜分析而進行評價。The metal elution amount was evaluated by performing ICP (inductively coupled plasma) emission spectrometry on all the metal concentrations (mg/L) in the test liquids tested under the above conditions 1 and 2.

又,對燃料電池用分隔板所要求之代表性特性為下述2點:低接觸電阻(10mΩ‧cm2 以下)、於使用環境下之耐蝕性(耐蝕試驗後亦為低接觸電阻,無有害離子溶出)。In addition, the representative characteristics required for the fuel cell separator are the following two points: low contact resistance (10 mΩ·cm 2 or less) and corrosion resistance in the use environment (low contact resistance after corrosion resistance test, no Harmful ions are dissolved).

將所得結果示於表1、表2。再者,中間層、氧化層之存在係自試樣剖面之實際XPS像求出各成分之比例來確認。The results obtained are shown in Tables 1 and 2. Further, the presence of the intermediate layer and the oxide layer was confirmed by determining the ratio of each component from the actual XPS image of the sample cross section.

D.附著量D. Adhesion amount

附著量係藉由酸解/ICP(電感耦合電漿)發射光譜分析來評價。具體而言,將一張50mm×50mm之試樣全部溶解於硝氟酸溶液,分析Au與Cr之附著量。再者,將每1條件之試樣數設為5個,將5次之測定結果之平均值分別示於表1。The amount of adhesion was evaluated by acid hydrolysis/ICP (inductively coupled plasma) emission spectroscopy. Specifically, a sample of 50 mm × 50 mm was completely dissolved in a nitric acid solution, and the adhesion amount of Au and Cr was analyzed. In addition, the number of samples per one condition was set to five, and the average value of the measurement results of five times was shown in Table 1, respectively.

自表1、表2明白了,存在表面層與中間層,Au為65原子%以上之區域之厚度存在1.5nm以上,且Au之最大濃度為80原子%以上,(Au之附著量)/(Cr之附著量)所表示之比為10以上的各實施例之情形,於含氯水溶液中之耐蝕試驗前後,試樣之接觸電阻均無變化,被膜之密合性及耐蝕性優異。It is understood from Tables 1 and 2 that the surface layer and the intermediate layer are present, and the thickness of the region where Au is 65 atom% or more is 1.5 nm or more, and the maximum concentration of Au is 80 atom% or more, (the adhesion amount of Au) / ( In the case of the examples in which the ratio of the adhesion amount of Cr is 10 or more, the contact resistance of the sample did not change before and after the corrosion resistance test in the chlorine-containing aqueous solution, and the adhesion between the film and the corrosion resistance were excellent.

Au附著量未達9000ng/cm2 之比較例9之情形,於使用有含氯水溶液之條件2之耐蝕性試驗中,試驗後之接觸電阻增加,條件2下之Cr之溶出量亦較多,被膜之耐蝕性較差。In the case of Comparative Example 9 in which the Au adhesion amount was less than 9000 ng/cm 2 , in the corrosion resistance test using the condition 2 with a chlorine-containing aqueous solution, the contact resistance after the test increased, and the amount of Cr dissolved under the condition 2 was also large. The film has poor corrosion resistance.

(Au之附著量)/(Cr之附著量)所表示之比未達10之比較例10、14、15之情形,於使用有含氯水溶液之條件2之耐蝕性試驗中,試驗後之接觸電阻增加,條件2下之Cr之溶出量亦較多,被膜之耐蝕性較差。(Amount of adhesion of Au) / (the amount of adhesion of Cr) The ratio of the ratio of the ratio of the ratio of (the adhesion of Cr) is less than 10, in the case of the corrosion resistance test using the condition 2 of the aqueous solution containing chlorine, the contact after the test The electric resistance increases, and the amount of Cr eluted under the condition 2 is also large, and the corrosion resistance of the film is poor.

Cr附著量未達200ng/cm2 之比較例11之情形,濺鍍膜之密合性劣化,無法進行耐蝕性之評價。In the case of Comparative Example 11 in which the Cr adhesion amount was less than 200 ng/cm 2 , the adhesion of the sputter film was deteriorated, and the evaluation of the corrosion resistance could not be performed.

由於濺鍍後進行大氣熱處理,故而Au之最大濃度未達80原子%之比較例12之情形,於條件2之耐蝕性試驗中,試驗後之接觸電阻增加,條件2下之Cr之溶出量亦較多,被膜之耐蝕性較差。In the case of Comparative Example 12 in which the maximum concentration of Au was less than 80 atomic % after atmospheric heat treatment after sputtering, in the corrosion resistance test of Condition 2, the contact resistance after the test increased, and the amount of Cr dissolved under Condition 2 was also More, the film has poor corrosion resistance.

Au濃度65%以上之區域之厚度未達1.5nm之比較例13之情形,於條件2之耐蝕性試驗中,試驗後之接觸電阻增加,條件2下之Cr之溶出量亦較多,被膜之耐蝕性較差。In the case of Comparative Example 13 in which the thickness of the region where the Au concentration is 65% or more is less than 1.5 nm, in the corrosion resistance test of Condition 2, the contact resistance after the test increases, and the amount of Cr eluted under Condition 2 is also large, and the film is Corrosion resistance is poor.

2...Ti基材2. . . Ti substrate

2a...中間層2a. . . middle layer

6...表面層6. . . Surface layer

10、100...分隔板10,100. . . Partition plate

10L、10LB...(氣體)流路10L, 10LB. . . (gas) flow path

10L1、10LB1...流路槽之始端10L1, 10LB1. . . The beginning of the flow channel

10L2、10LB2...流路槽之終端10L2, 10LB2. . . End of flow channel

10f、12f...定位孔10f, 12f. . . Positioning hole

10x...燃料氣體導入孔10x. . . Fuel gas introduction hole

10y...燃料氣體排出孔10y. . . Fuel gas exhaust hole

12、12B...墊圈12, 12B. . . washer

12c、12d...墊圈之內緣12c, 12d. . . Inner edge of the gasket

12e1~12e4...間隔構件12e1~12e4. . . Spacer member

12eb1~12eb4...墊圈流路12eb1~12eb4. . . Washer flow path

20...固體高分子電解質膜20. . . Solid polymer electrolyte membrane

2021 ...空間 20 , 21 . . . space

31、32...密封構件31, 32. . . Sealing member

40...陽極電極40. . . Anode electrode

60...陰極電極60. . . Cathode electrode

80...膜電極接合體(MEA)80. . . Membrane electrode assembly (MEA)

90A、90B‧‧‧氣體擴散膜90A, 90B‧‧‧ gas diffusion membrane

100h‧‧‧(分隔板之)孔100h‧‧‧ (separate plate) hole

100s‧‧‧段部100s‧‧‧ Section

100a‧‧‧上側片100a‧‧‧Upper side film

100b‧‧‧下側片100b‧‧‧Bottom film

140A、140B‧‧‧集電板140A, 140B‧‧‧ collector board

200‧‧‧儲罐(甲醇匣)200‧‧‧ storage tank (methanol)

300‧‧‧單電池300‧‧‧single battery

圖1係表示本發明之實施形態之燃料電池用分隔板材料之構成的示意圖。Fig. 1 is a schematic view showing the configuration of a separator material for a fuel cell according to an embodiment of the present invention.

圖2係表示實施例1之燃料電池用分隔板材料之剖面的XPS分析結果之圖。Fig. 2 is a graph showing the results of XPS analysis of a cross section of the separator material for a fuel cell of Example 1.

圖3係本發明之實施形態之燃料電池堆(單電池)之剖面圖。Fig. 3 is a cross-sectional view showing a fuel cell stack (single cell) according to an embodiment of the present invention.

圖4係表示本發明之實施形態之分隔板之構造的平面圖。Fig. 4 is a plan view showing the structure of a partitioning plate according to an embodiment of the present invention.

圖5係表示本發明之實施形態之墊圈之構造的平面圖。Fig. 5 is a plan view showing the structure of a gasket according to an embodiment of the present invention.

圖6係本發明之實施形態之平面型燃料電池堆之剖面圖。Figure 6 is a cross-sectional view showing a planar fuel cell stack according to an embodiment of the present invention.

圖7係表示平面型燃料電池用分隔板之構造之平面圖。Fig. 7 is a plan view showing the structure of a partition plate for a flat type fuel cell.

Claims (10)

一種燃料電池用分隔板材料,於Ti基材之表面形成含有Au與Cr之表面層,於該表面層與該Ti基材之間存在含有Ti、O及Cr且Au未達20原子%的中間層,Au濃度65原子%以上之區域的厚度存在1.5nm以上,且Au之最大濃度為80原子%以上,Au之附著量為9000~40000ng/cm2 ,(Au之附著量)/(Cr之附著量)所表示之比為10以上,Cr之附著量為200ng/cm2 以上,於該中間層中,Ti、O分別含有10原子%以上且Cr含有20原子%以上之區域存在1nm以上。A separator material for a fuel cell, wherein a surface layer containing Au and Cr is formed on a surface of the Ti substrate, and Ti, O, and Cr are contained between the surface layer and the Ti substrate, and Au is less than 20 atomic %. In the intermediate layer, the thickness of the region having an Au concentration of 65 atom% or more is 1.5 nm or more, and the maximum concentration of Au is 80 atom% or more, and the adhesion amount of Au is 9000 to 40,000 ng/cm 2 (the adhesion amount of Au) / (Cr) The ratio of the adhesion amount is 10 or more, and the adhesion amount of Cr is 200 ng/cm 2 or more. In the intermediate layer, Ti and O are each contained in an amount of 10 atom% or more and Cr content of 20 atom% or more is 1 nm or more. . 如申請專利範圍第1項之燃料電池用分隔板材料,其中,該Ti基材係將厚度為10nm以上之Ti被膜形成於與Ti不同之基材表面而成。 The separator material for a fuel cell according to the first aspect of the invention, wherein the Ti substrate is formed by forming a Ti film having a thickness of 10 nm or more on a surface of a substrate different from Ti. 如申請專利範圍第1或2項之燃料電池用分隔板材料,其係用於固體高分子型燃料電池。 The separator material for a fuel cell according to claim 1 or 2, which is used for a polymer electrolyte fuel cell. 如申請專利範圍第1或2項之燃料電池用分隔板材料,其係用於直接甲醇型固體高分子型燃料電池。 The separator material for a fuel cell according to claim 1 or 2, which is used for a direct methanol type solid polymer fuel cell. 如申請專利範圍第3項之燃料電池用分隔板材料,其係用於直接甲醇型固體高分子型燃料電池。 For example, the separator material for a fuel cell according to item 3 of the patent application is used for a direct methanol type solid polymer fuel cell. 一種燃料電池用分隔板,係使用有申請專利範圍第1 至5項中任一項之燃料電池用分隔板材料之燃料電池用分隔板,其係預先將藉由加壓加工所生成之反應氣體流路及/或反應液體流路形成在該Ti基材後,形成該表面層而成。 A separator for a fuel cell, which is used in the patented scope A separator for a fuel cell of a separator material for a fuel cell according to any one of the fifth aspect, wherein the reaction gas flow path and/or the reaction liquid flow path formed by press working are formed in the Ti in advance After the substrate, the surface layer is formed. 一種燃料電池用分隔板,係使用有申請專利範圍第1至5項中任一項之燃料電池用分隔板材料之燃料電池用分隔板,其係將該表面層形成在該Ti基材後,形成藉由加壓加工所生成之反應氣體流路及/或反應液體流路而成。 A separator for a fuel cell, which is a separator for a fuel cell according to any one of claims 1 to 5, wherein the surface layer is formed on the Ti base. After the material, a reaction gas flow path and/or a reaction liquid flow path formed by press working are formed. 一種燃料電池堆,使用有申請專利範圍第1至第5中任一項之燃料電池用分隔板材料或申請專利範圍第6或7項之燃料電池用分隔板。 A fuel cell stack using the separator material for a fuel cell according to any one of claims 1 to 5, or the separator for a fuel cell according to claim 6 or 7. 一種燃料電池用分隔板材料之製造方法,係用以製造申請專利範圍第1至5項中任一項之燃料電池用分隔板材料,於該Ti基材之表面乾式成膜該Cr後,乾式成膜Au。 A method for producing a separator material for a fuel cell, which is used for manufacturing a separator material for a fuel cell according to any one of claims 1 to 5, after dry-forming the Cr on the surface of the Ti substrate , dry film forming Au. 如申請專利範圍第9項之燃料電池用分隔板材料之製造方法,其中,該乾式成膜為濺鍍。 The method for producing a separator material for a fuel cell according to claim 9, wherein the dry film formation is sputtering.
TW100128506A 2011-08-10 2011-08-10 A separator for a fuel cell, a separator for a fuel cell and a fuel cell stack for use thereof, and a method for manufacturing a separator material for a fuel cell TWI447989B (en)

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