JP2011249147A - Fuel cell separator material, fuel cell separator using the same, fuel cell stack, and method of manufacturing fuel cell separator material - Google Patents

Fuel cell separator material, fuel cell separator using the same, fuel cell stack, and method of manufacturing fuel cell separator material Download PDF

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JP2011249147A
JP2011249147A JP2010121179A JP2010121179A JP2011249147A JP 2011249147 A JP2011249147 A JP 2011249147A JP 2010121179 A JP2010121179 A JP 2010121179A JP 2010121179 A JP2010121179 A JP 2010121179A JP 2011249147 A JP2011249147 A JP 2011249147A
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fuel cell
cell separator
stainless steel
separator material
steel substrate
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Yoshitaka Shibuya
義孝 澁谷
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JX Nippon Mining and Metals Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract

PROBLEM TO BE SOLVED: To provide a fuel cell separator material in which a layer containing Au can be strongly and uniformly formed on a surface of a stainless steel substrate and adhesiveness and corrosion resistance required to a fuel cell separator can be ensured.SOLUTION: The present invention relates to a fuel cell separator material in which a surface layer 6 containing Au and Cr is formed on a surface of a stainless steel substrate 2, an intermediate layer 2a containing Cr in 20 atom% or more and O in 20 atom% or more to less than 50 atom% is present for 1 nm or more between the surface layer 6 and the stainless steel substrate 2, an area in which the concentration of Au is 65 atom% or more is present for the thickness of 1.5 nm or more, the maximum concentration of Au is 80 atom% or more, and a metal layer containing Cr in 50 atom% or more is not present.

Description

本発明は、表面にAu又はAu合金(Auを含む層)が形成された燃料電池用セパレータ材料、それを用いた燃料電池用セパレータ、及び燃料電池スタックに関する。   The present invention relates to a fuel cell separator material having a surface on which Au or an Au alloy (a layer containing Au) is formed, a fuel cell separator using the same, and a fuel cell stack.

固体高分子型の燃料電池用セパレータは電気伝導性を有し、各単セルを電気的に接続し、各単セルで発生したエネルギー(電気)を集電すると共に、各単セルへ供給する燃料ガス(燃料液体)や空気(酸素)の流路が形成されている。このセパレータは、インターコネクタ、バイポーラプレート、集電体とも称される。
このような燃料電池用セパレータとして、従来はカーボン板にガス流通路を形成したものが使用されていたが、材料コストや加工コストが大きいという問題がある。一方、カーボン板の代わりに金属板を用いる場合、高温で酸化性の雰囲気に曝されるために腐食や溶出が問題となる。このようなことから、ステンレス鋼板の表面にAu,Ru、Rh、Cr、Os、Ir及びPt等から選ばれる貴金属とAuとの合金をスパッタ成膜して導電部分を形成する技術が知られている(特許文献1)。
一方、ステンレス鋼基材の酸化被膜の上に、Ti,Zr、Hf、V、Nb、Ta、Cr、Mo、W等からなる中間層を介してAu膜を形成する燃料電池用セパレータが知られている(特許文献2)。この中間層は、基材酸化膜との密着性、すなわちO(酸素原子)との結合性が良いとともに、金属または半金属のためにAu膜との密着性、結合性が良いとされている。
又、ステンレス鋼板の表面に、下地処理を施さずに酸性浴にて金めっきを施す燃料電池用金属製セパレータが報告されている(特許文献3)。
The polymer electrolyte fuel cell separator has electrical conductivity, and electrically connects each single cell, collects energy (electricity) generated in each single cell, and supplies fuel to each single cell. Gas (fuel liquid) and air (oxygen) flow paths are formed. This separator is also called an interconnector, a bipolar plate, or a current collector.
Conventionally, a fuel cell separator having a gas flow path formed on a carbon plate has been used, but there is a problem that the material cost and processing cost are high. On the other hand, when a metal plate is used instead of the carbon plate, corrosion and elution become a problem because it is exposed to an oxidizing atmosphere at a high temperature. For this reason, a technique for forming a conductive portion by sputtering a noble metal selected from Au, Ru, Rh, Cr, Os, Ir, Pt, etc. and an alloy of Au on the surface of a stainless steel plate is known. (Patent Document 1).
On the other hand, a fuel cell separator is known in which an Au film is formed on an oxide film of a stainless steel substrate through an intermediate layer made of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, or the like. (Patent Document 2). This intermediate layer has good adhesion to the base oxide film, that is, good bonding with O (oxygen atom), and good adhesion and bonding to the Au film because of the metal or metalloid. .
In addition, a metal separator for fuel cells has been reported in which the surface of a stainless steel plate is subjected to gold plating in an acid bath without applying a base treatment (Patent Document 3).

又、固体高分子型燃料電池において、アノードに供給する燃料ガスとして、取扱いが容易なメタノールを使用するダイレクトメタノール型燃料電池(DMFC(direct methanol fuel cell))も開発されている。DMFCは、メタノールから直接エネルギー(電気)を取り出すことができるため、改質器などが不要で燃料電池の小型化に対応でき、携帯機器の電源としても有望視されている。
DMFCの構造としては、以下の2つが提案されている。まず第1の構造は、単セル(固体高分子型電解質膜を燃料極と酸素極で挟み込んだ膜電極接合体(以下、MEAという)を積層した積層型(アクティブ型)構造である。第2の構造は、単セルを平面方向に複数個配置した平面型(パッシブ型)構造である。これらの構造は、いずれも単セルを複数個直列に繋いだもの(以下、スタックという)であるが、このうち、パッシブ型構造は、燃料ガス(燃料液体)や空気などをセル内に供給するための能動的な燃料移送手段を必要としないため、更なる燃料電池の小型化が有望視されている。
In addition, in a polymer electrolyte fuel cell, a direct methanol fuel cell (DMFC) that uses methanol that is easy to handle as a fuel gas to be supplied to an anode has been developed. Since DMFC can directly extract energy (electricity) from methanol, a reformer or the like is not necessary, and it can cope with downsizing of the fuel cell, and is also promising as a power source for portable devices.
The following two structures have been proposed as DMFC structures. First, the first structure is a single cell (stacked (active) structure in which a membrane electrode assembly (hereinafter referred to as MEA) in which a solid polymer electrolyte membrane is sandwiched between a fuel electrode and an oxygen electrode) is stacked. This structure is a planar type (passive type) structure in which a plurality of single cells are arranged in the plane direction, each of which is a structure in which a plurality of single cells are connected in series (hereinafter referred to as a stack). Of these, the passive type structure does not require an active fuel transfer means for supplying fuel gas (fuel liquid), air, or the like into the cell, and therefore further reduction in size of the fuel cell is considered promising. Yes.

特開2001−297777号公報JP 2001-297777 A 特開2004−185998号公報JP 2004-185998 A 特開2004−296381号公報JP 2004-296281 A

しかしながら、上記した特許文献1記載の技術の場合、密着性の良いAu合金膜を得るためには、基材表面の酸化皮膜を取り除く処理が必要であり、酸化被膜の除去が不充分な場合は貴金属膜の密着性が低下するという問題がある。
又、特許文献2に記載されているように単に中間層を設けるだけでは、十分な密着性、及び燃料電池のセパレータとして必要な耐食性や耐久性が得られない。特に、コスト低減を図るためにAuの厚みを薄くした場合に耐食性が得られないことがある。
一方、特許文献3記載の技術の場合、湿式の金めっきの電着形状が粒状であるため、金めっきの付着量が少ないと基材表面の一部に非めっき部分となる部分が生じる。そのため、基材表面全体を均一に金めっきするためには、Auの付着量を多くする必要がある。
However, in the case of the technique described in Patent Document 1 described above, in order to obtain an Au alloy film with good adhesion, it is necessary to remove the oxide film on the surface of the base material. There is a problem that the adhesion of the noble metal film is lowered.
Further, as described in Patent Document 2, simply providing an intermediate layer does not provide sufficient adhesion and corrosion resistance and durability required as a separator for a fuel cell. In particular, when the thickness of Au is reduced in order to reduce the cost, corrosion resistance may not be obtained.
On the other hand, in the case of the technique described in Patent Document 3, since the electrodeposition shape of wet gold plating is granular, if the amount of gold plating is small, a portion that becomes a non-plated portion is generated on a part of the substrate surface. Therefore, in order to uniformly plate the entire surface of the substrate with gold, it is necessary to increase the adhesion amount of Au.

すなわち、本発明は上記の課題を解決するためになされたものであり、ステンレス鋼基材表面にAuを含む高耐食性の導電性膜を高い密着性で成膜することができ、燃料電池作動環境下でも高い耐久性を有する燃料電池用セパレータ材料、それを用いた燃料電池用セパレータ及び燃料電池スタック、並びに燃料電池用セパレータ材料の製造方法の提供を目的とする。   That is, the present invention has been made to solve the above-described problems, and can form a highly corrosion-resistant conductive film containing Au on the surface of a stainless steel substrate with high adhesion, and the fuel cell operating environment. An object of the present invention is to provide a fuel cell separator material having high durability even under, a fuel cell separator and a fuel cell stack using the material, and a method for producing a fuel cell separator material.

本発明者らは種々検討した結果、ステンレス鋼基材表面にAuとCrを含む表面層を形成させ、ステンレス鋼基材と表面層との間にOとCrを含む中間層を形成させ、さらにAu濃度が比較的高い領域を所定厚み形成させることで、Auを含む層をステンレス鋼上に強固かつ均一に形成可能であり、燃料電池用セパレータに要求される耐食性や耐久性も確保できることを見出した。
上記の目的を達成するために、本発明の燃料電池用セパレータ材料は、ステンレス鋼基材の表面にAuとCrとを含む表面層が形成され、前記表面層と前記ステンレス鋼基材との間に、Crを20原子%以上含み、Oを20原子%以上50原子%未満含む中間層が1nm以上存在し、Au濃度65原子%以上の領域の厚みが1.5nm以上、かつAuの最大濃度が80原子%以上であり、Crを50原子%以上含む金属層が存在しない。
As a result of various studies, the present inventors have formed a surface layer containing Au and Cr on the surface of the stainless steel substrate, and formed an intermediate layer containing O and Cr between the stainless steel substrate and the surface layer. It has been found that by forming a region having a relatively high Au concentration to a predetermined thickness, a layer containing Au can be formed firmly and uniformly on stainless steel, and the corrosion resistance and durability required for a fuel cell separator can be secured. It was.
In order to achieve the above object, the fuel cell separator material according to the present invention has a surface layer containing Au and Cr formed on the surface of a stainless steel substrate, and the surface layer is formed between the surface layer and the stainless steel substrate. In addition, an intermediate layer containing Cr of 20 atomic% or more and O containing 20 atomic% or more and less than 50 atomic% exists in an amount of 1 nm or more, the thickness of the region having an Au concentration of 65 atomic% or more is 1.5 nm or more, and the maximum concentration of Au Is 80 atomic% or more, and there is no metal layer containing 50 atomic% or more of Cr.

Auの付着量が9000ng/cm以上であることが好ましい。 It is preferable that the adhesion amount of Au is 9000 ng / cm 2 or more.

本発明の燃料電池用セパレータ材料は、固体高分子形燃料電池又はダイレクトメタノール型固体高分子形燃料電池に好適に用いられる。   The separator material for a fuel cell of the present invention is suitably used for a polymer electrolyte fuel cell or a direct methanol type polymer electrolyte fuel cell.

本発明の燃料電池用セパレータは、前記燃料電池用セパレータ材料を用い、前記ステンレス鋼基材に予めプレス加工による反応ガス流路及び/又は反応液体流路を形成した後、前記表面層を形成して成る。
また、本発明の燃料電池用セパレータは、前記燃料電池用セパレータ材料を用い、前記ステンレス鋼基材に前記表面層を形成した後、プレス加工による反応ガス流路及び/又は反応液体流路を形成して成る。
The fuel cell separator of the present invention uses the fuel cell separator material, and after forming a reaction gas flow path and / or a reaction liquid flow path by pressing in advance on the stainless steel substrate, the surface layer is formed. It consists of
Further, the fuel cell separator of the present invention uses the fuel cell separator material, and after forming the surface layer on the stainless steel substrate, forms a reaction gas channel and / or a reaction liquid channel by press working. It consists of

本発明の燃料電池スタックは、前記燃料電池用セパレータ材料、又は前記燃料電池用セパレータを用いたものである。   The fuel cell stack of the present invention uses the fuel cell separator material or the fuel cell separator.

本発明の燃料電池用セパレータ材料の製造方法は、前記燃料電池用セパレータ材料の製造方法であって、前記ステンレス鋼基材の表面に、前記Crを乾式成膜した後、Auを乾式成膜する。
(Auの厚み/Crの厚み)を3以上とすることが好ましい。
前記乾式成膜がスパッタリングであることが好ましい。
The method for producing a fuel cell separator material according to the present invention is a method for producing the fuel cell separator material, wherein the Cr is dry-formed on the surface of the stainless steel substrate, and then Au is dry-formed. .
(Au thickness / Cr thickness) is preferably 3 or more.
The dry film formation is preferably sputtering.

本発明によれば、Auを含む層をステンレス鋼上に強固かつ均一に形成させることができ、燃料電池用セパレータに要求される密着性、耐食性を確保できる。   According to the present invention, the Au-containing layer can be formed firmly and uniformly on the stainless steel, and the adhesion and corrosion resistance required for the fuel cell separator can be ensured.

本発明の実施形態に係る燃料電池用セパレータ材料の構成を示す模式図である。It is a schematic diagram which shows the structure of the separator material for fuel cells which concerns on embodiment of this invention. 実施例1の燃料電池用セパレータ材料の断面のXPS分析結果を示す図である。It is a figure which shows the XPS analysis result of the cross section of the separator material for fuel cells of Example 1. FIG.

以下、本発明の実施形態に係る燃料電池用セパレータ材料について説明する。なお、本発明において%とは、特に断らない限り、原子(at)%を示すものとする。
又、本発明において「燃料電池用セパレータ」とは、電気伝導性を有し、各単セルを電気的に接続し、各単セルで発生したエネルギー(電気)を集電すると共に、各単セルへ供給する燃料ガス(燃料液体)や空気(酸素)の流路が形成されたものをいう。セパレータは、インターコネクタ、バイポーラプレート、集電体とも称される。
従って、詳しくは後述するが、燃料電池用セパレータとして、板状の基材表面に凹凸状の流路を設けたセパレータの他、上記したパッシブ型DMFC用セパレータのように板状の基材表面にガスやメタノールの流路孔が開口したセパレータを含む。
Hereinafter, a fuel cell separator material according to an embodiment of the present invention will be described. In the present invention,% means atomic (at)% unless otherwise specified.
In the present invention, the “fuel cell separator” has electrical conductivity, electrically connects each single cell, collects energy (electricity) generated in each single cell, and collects each single cell. A fuel gas (fuel liquid) or air (oxygen) flow path is formed. The separator is also referred to as an interconnector, a bipolar plate, or a current collector.
Therefore, as will be described in detail later, as a separator for a fuel cell, in addition to a separator having an uneven flow path on a plate-like substrate surface, a plate-like substrate surface such as the above-described passive DMFC separator is used. It includes a separator with gas and methanol passage holes.

図1に示すように、本発明の実施形態に係る燃料電池用セパレータ材料は、ステンレス鋼基材2の表面に中間層2aが形成され、中間層2aの表面に表面層6が形成されてなる。   As shown in FIG. 1, the separator material for a fuel cell according to the embodiment of the present invention has an intermediate layer 2a formed on the surface of a stainless steel substrate 2 and a surface layer 6 formed on the surface of the intermediate layer 2a. .

<ステンレス鋼基材>
燃料電池用セパレータ材料は耐食性と導電性が要求され、基材には耐食性が求められる。このため基材には耐食性が良好なステンレス鋼を用いる。
ステンレス鋼材2の材質は、ステンレス鋼であれば特に制限されないが、高耐食性のステンレス鋼が望ましく、高耐食性ステンレス鋼の多くは、CrまたはNi濃度が高いものが多い(例:SUS316)。又、ステンレス鋼基材2の形状も特に制限されず、Cr及びAuをスパッタできる形状であればよいが、セパレータ形状にプレス成形することを考えると、ステンレス鋼基材の形状は板材であることが好ましく、ステンレス鋼基材全体の厚みが50μm以上の板材であることが好ましい。
中間層2aに含まれるO(酸素)は、ステンレス鋼基材2を空気中に放置したり、スパッタによりステンレス鋼基材2表面に被膜を形成する際に真空中に放置することにより自然に形成されるが、酸化雰囲気で積極的にOをステンレス鋼基材2表面に形成させてもよい。
<Stainless steel substrate>
The fuel cell separator material is required to have corrosion resistance and conductivity, and the base material is required to have corrosion resistance. For this reason, stainless steel having good corrosion resistance is used for the base material.
The material of the stainless steel material 2 is not particularly limited as long as it is stainless steel, but high corrosion resistance stainless steel is desirable, and many of the high corrosion resistance stainless steels have a high Cr or Ni concentration (for example, SUS316). Further, the shape of the stainless steel substrate 2 is not particularly limited as long as it can be sputtered with Cr and Au. However, considering the press forming into a separator shape, the shape of the stainless steel substrate is a plate material. It is preferable that the thickness of the entire stainless steel substrate is 50 μm or more.
O (oxygen) contained in the intermediate layer 2a is naturally formed by leaving the stainless steel substrate 2 in the air or leaving it in a vacuum when forming a coating on the surface of the stainless steel substrate 2 by sputtering. However, O may be positively formed on the surface of the stainless steel substrate 2 in an oxidizing atmosphere.

<表面層>
ステンレス鋼基材2上に、CrとAuとを含む表面層6が形成される。この表面層は、ステンレス鋼基材にAuの特性(耐食性、導電性等)や耐水素脆性を付与するためのものである。
Crは、a)酸素と結合しやすい、b)Auと合金を構成する、c)水素を吸収し難い、という性質を有しており、表面層に上記した機能を付与するとともに、中間層を形成して表面層とステンレス鋼基材との密着性を向上させる。
又、Crが電位-pH図からAuより易酸化性であり、また水素を吸収しにくい特性を利用し、Crを以下の中間層の構成元素として用いる。
<Surface layer>
A surface layer 6 containing Cr and Au is formed on the stainless steel substrate 2. This surface layer is for imparting Au characteristics (corrosion resistance, conductivity, etc.) and hydrogen embrittlement resistance to the stainless steel substrate.
Cr has the properties that a) easily binds to oxygen, b) constitutes an alloy with Au, and c) hardly absorbs hydrogen. Form and improve the adhesion between the surface layer and the stainless steel substrate.
In addition, Cr is more oxidizable than Au from the potential-pH diagram, and makes use of the characteristic that it is difficult to absorb hydrogen, so Cr is used as a constituent element of the following intermediate layer.

表面層は、後述するXPS分析により確認することができ、XPS分析により最表面から下層に向かってAuとCrを含む部分であって、以下の中間層より上層に位置しAu20%以上の部分を表面層とする。表面層と後述する中間層の合計厚みは5〜20nmであることが好ましい。表面層と中間層の合計厚みが5nm未満であると、ステンレス鋼基材上に燃料電池用セパレータに要求される耐食性を確保できなくなる場合がある。表面層と中間層の合計厚みがより好ましくは7nm以上、さらには好ましくは10nm以上である。
また、CrとAuを成膜後に熱処理をしてもよい。熱処理を行なうと、酸化と拡散が進行し、表層のAuの濃度は下がる場合もある。しかし、Au濃度65%以上の領域の厚みが1.5nm以上存在すれば、ステンレス鋼基材の主成分であるFeが表面層に拡散せず、表面層としての機能をはたす。
The surface layer can be confirmed by XPS analysis, which will be described later, and is a portion containing Au and Cr from the outermost surface to the lower layer by XPS analysis, and is located in the upper layer below the intermediate layer and the portion of Au 20% or more. The surface layer. The total thickness of the surface layer and the intermediate layer described later is preferably 5 to 20 nm. If the total thickness of the surface layer and the intermediate layer is less than 5 nm, the corrosion resistance required for the fuel cell separator on the stainless steel substrate may not be ensured. The total thickness of the surface layer and the intermediate layer is more preferably 7 nm or more, and further preferably 10 nm or more.
Further, heat treatment may be performed after forming the Cr and Au films. When heat treatment is performed, oxidation and diffusion progress, and the Au concentration in the surface layer may decrease. However, if the thickness of the region having an Au concentration of 65% or more is 1.5 nm or more, Fe which is the main component of the stainless steel base material does not diffuse into the surface layer and functions as a surface layer.

表面層の厚みが100nmを超えると省金化が図られずコストアップとなる場合がある。
又、表面層において、Au濃度65%以上の領域の厚みが1.5nm未満である場合、燃料電池用セパレータに要求される耐食性を確保できなくなる。
If the thickness of the surface layer exceeds 100 nm, money saving may not be achieved and the cost may increase.
Further, when the thickness of the region having an Au concentration of 65% or more in the surface layer is less than 1.5 nm, the corrosion resistance required for the fuel cell separator cannot be secured.

又、表面層6におけるAuの最大濃度が80%以上である必要がある。Auの最大濃度が80%未満であると、ステンレス鋼基材にAuの特性(耐食性、導電性等)や耐水素脆性が十分に付与されなくなる。   Further, the maximum concentration of Au in the surface layer 6 needs to be 80% or more. When the maximum concentration of Au is less than 80%, the characteristics of Au (corrosion resistance, conductivity, etc.) and hydrogen embrittlement resistance are not sufficiently imparted to the stainless steel substrate.

なお、表面層6の最表面部分にAu単独層が形成されていてもよい。Au単独層は、XPS分析によりAuの濃度がほぼ100%の部分である。   Note that an Au single layer may be formed on the outermost surface portion of the surface layer 6. The Au single layer is a portion where the concentration of Au is almost 100% by XPS analysis.

<中間層>
表面層(又はAu単独層)6とステンレス鋼基材2との間に、Crを20原子%以上含み、Oを20原子%以上50原子%未満含む中間層2aが1nm以上存在する。
燃料電池用セパレータ材に導電性を付与するためステンレス鋼基材の上にAuを形成させようとしても、ステンレス鋼基材は表面に酸化層を有しているため、酸化され難いAu(含有)層をステンレス鋼表面に直接形成させるのは難しい。そこで、ステンレス鋼基材の表面酸化膜を適度に除去し、基材表面のクリーニングを目的として逆スパッタ(イオンエッチング)を行うことが考えられるが、特にCr濃度の高いステンレス鋼は表面の酸化層が厚いため、酸化膜の除去に時間を要したり、酸化膜が十分に除去できない場合がある。
又、上記特許文献2に記載されているように、中間層として単にTi,Zr、Hf、V、Nb、Ta、Cr、Mo、W等を形成しても、燃料電池のセパレータとして十分な密着性、導電性、及び耐食性が得られない。
ここで、中間層がCrを含む場合、耐食性が低下することがある。つまり、Auの厚みに対してCrの厚みが必要以上に厚い場合、表面層の表面にCrが露出し,塩素含有腐食液での耐食性試験において試験後の接触抵抗が増加し,Crの溶出も比較的多くなる。一方、Auの厚みを厚くすれば表面層の表面へのCrの露出を抑制できるが、Auは高価な金属であるため、Auを厚くする方法は現実的でない。又、Crの厚みを極端に薄くすると、密着性の良い表面層が得られないという問題がある。
<Intermediate layer>
Between the surface layer (or Au single layer) 6 and the stainless steel substrate 2, an intermediate layer 2a containing 20 atomic% or more of Cr and containing 20 atomic% or more and less than 50 atomic% of O is 1 nm or more.
Even if it is going to form Au on a stainless steel base material in order to give conductivity to separator material for fuel cells, since a stainless steel base material has an oxidation layer on the surface, it is difficult to oxidize Au (containing) It is difficult to form the layer directly on the stainless steel surface. Therefore, it is conceivable to remove the surface oxide film of the stainless steel substrate appropriately and perform reverse sputtering (ion etching) for the purpose of cleaning the surface of the substrate. Particularly, stainless steel with a high Cr concentration has a surface oxide layer. Therefore, it may take time to remove the oxide film or the oxide film may not be sufficiently removed.
Further, as described in Patent Document 2, even if Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, etc. are simply formed as an intermediate layer, sufficient adhesion as a fuel cell separator is achieved. , Conductivity and corrosion resistance cannot be obtained.
Here, when the intermediate layer contains Cr, the corrosion resistance may be lowered. In other words, when the thickness of Cr is larger than necessary with respect to the thickness of Au, Cr is exposed on the surface of the surface layer, the contact resistance after the test increases in the corrosion resistance test with a chlorine-containing corrosive liquid, and Cr is also eluted. Relatively many. On the other hand, if the thickness of Au is increased, the exposure of Cr to the surface of the surface layer can be suppressed. However, since Au is an expensive metal, a method of increasing the thickness of Au is not practical. Further, when the thickness of Cr is extremely reduced, there is a problem that a surface layer with good adhesion cannot be obtained.

このようなことから、本発明では、Crを20原子%以上含み、Oを20原子%以上50原子%未満含む中間層2aを形成させる。Crは、a)酸素と結合しやすい、b)Auと合金を構成する、c)水素を吸収し難い、という性質を有しており、中間層の構成元素として好適である。又、CrはAuに比べて酸化され易く、ステンレス鋼基材の表面でO原子と酸化物を形成し、ステンレス鋼基材表面に強固に結合するものと考えられる。そして、中間層のCr及びOの濃度を規定することにより、導電性と耐久性が良好なセパレータ材を提供できる。
中間層2aのCrが20原子%未満であると、上記したCrの性質が発揮されない。中間層2aのOが20原子%未満であると耐食性が劣り、中間層2aからCrが溶出して接触抵抗も増加する。一方、中間層2aのOが50原子%を超えるとAuの密着性が低下し、導電性が劣化する。
For this reason, in the present invention, the intermediate layer 2a containing 20 atomic% or more of Cr and containing 20 atomic% or more and less than 50 atomic% of O is formed. Cr has the properties that a) easily bonds with oxygen, b) constitutes an alloy with Au, and c) hardly absorbs hydrogen, and is suitable as a constituent element of the intermediate layer. In addition, Cr is more easily oxidized than Au, and it is considered that O atoms and oxides are formed on the surface of the stainless steel substrate and are firmly bonded to the surface of the stainless steel substrate. And the separator material with favorable electroconductivity and durability can be provided by prescribing | regulating the density | concentration of Cr and O of an intermediate | middle layer.
When the Cr of the intermediate layer 2a is less than 20 atomic%, the above-described properties of Cr are not exhibited. When the O of the intermediate layer 2a is less than 20 atomic%, the corrosion resistance is inferior, Cr is eluted from the intermediate layer 2a, and the contact resistance is also increased. On the other hand, when O of the intermediate layer 2a exceeds 50 atomic%, the adhesion of Au is lowered and the conductivity is deteriorated.

又、中間層2aが1nm以上の厚みで存在することが必要である。中間層が1nm未満の場合には,Crが薄く,ステンレス鋼基材とAuが接する部分が多くなるため、表面層の密着性が劣化する。   Further, it is necessary that the intermediate layer 2a has a thickness of 1 nm or more. When the intermediate layer is less than 1 nm, Cr is thin and the portion where the stainless steel substrate and Au are in contact with each other increases, so that the adhesion of the surface layer deteriorates.

中間層のCrを20原子%以上とし、Oを20原子%以上50原子%未満に制御する方法としては、Crを含むターゲットを用いた乾式めっき(スパッタ)を行い、ステンレス鋼表面に存在するOの濃度に合わせてCrのスパッタ量(付着量)やスパッタ条件を調整することが挙げられる。たとえば、スパッタは、スパッタ粒子のエネルギーが大きく、ステンレス鋼表面の酸化皮膜を取り除かなくても、Oと結合する金属であれば密着性の良い成膜が行える。そしてもともと基材表面にあるOや、真空引き後にスパッタ成膜室内に存在するOが、スパッタで成膜したCrと結合することで、表面層の密着性、導電性及び耐食性が良好になる。
なお、Crが50原子%以上となる厚み部分(この部分を適宜、「金属層」と称する)が存在すると、後述の条件2での耐食性試験後のCrの溶出量が多くなり、被膜の耐食性が劣る。従って、Crが50原子%以上となる金属層(厚み部分)が存在しないことが好ましい。金属層の厚みはXPS(X線光電子分光)分析により測定できる。又、Crを50原子%以上含む金属層を形成させない方法としては、ステンレス鋼基材上に形成するAuの割合をCrより多くすることが挙げられる。
As a method of controlling the Cr of the intermediate layer to 20 atomic% or more and controlling O to 20 atomic% or more and less than 50 atomic%, dry plating (sputtering) using a Cr-containing target is performed, and O present on the stainless steel surface. The amount of Cr sputtering (adhesion amount) and the sputtering conditions may be adjusted in accordance with the concentration of each. For example, in sputtering, the energy of sputtered particles is large, and even if the oxide film on the surface of the stainless steel is not removed, a film having good adhesion can be formed as long as it is a metal that bonds with O. Then, O originally present on the surface of the base material or O present in the sputter film forming chamber after evacuation is combined with Cr formed by sputtering to improve the adhesion, conductivity and corrosion resistance of the surface layer.
If there is a thickness portion where Cr is 50 atomic% or more (this portion is appropriately referred to as a “metal layer”), the amount of Cr eluted after the corrosion resistance test under Condition 2 described later increases, and the corrosion resistance of the coating film. Is inferior. Therefore, it is preferable that there is no metal layer (thickness portion) in which Cr is 50 atomic% or more. The thickness of the metal layer can be measured by XPS (X-ray photoelectron spectroscopy) analysis. Further, as a method for preventing the formation of a metal layer containing 50 atomic% or more of Cr, the proportion of Au formed on the stainless steel substrate may be made larger than that of Cr.

ここで、XPS(X線光電子分光)分析による深さ(Depth)プロファイルを測定し、Au,O,Cr、Fe,Niの濃度分析を行ってスパッタ層の層構造を決定することができる。なお、XPSによる濃度検出は、指定元素(Au,O,Cr,Fe,Ni)の合計を100%として、各元素の濃度を分析する。又、XPS分析で厚み方向に1nmの距離とは、XPS分析によるチャートの横軸の距離(SiO換算での距離)である。 Here, a depth profile by XPS (X-ray photoelectron spectroscopy) analysis is measured, and concentration analysis of Au, O, Cr, Fe, and Ni is performed to determine the layer structure of the sputtered layer. In the concentration detection by XPS, the concentration of each element is analyzed with the total of designated elements (Au, O, Cr, Fe, Ni) being 100%. In the XPS analysis, the distance of 1 nm in the thickness direction is the distance on the horizontal axis of the chart by XPS analysis (distance in terms of SiO 2 ).

本発明の燃料電池用セパレータ材料において、Auの付着量が9000ng/cm以上である必要がある。
Auの付着量が9000ng/cm未満であると、燃料電池用セパレータに要求される耐食性を確保できなくなる。
一方、省金化の点からAuの付着量が40000ng/cm未満であることが好ましい。
In the fuel cell separator material of the present invention, the amount of Au deposited needs to be 9000 ng / cm 2 or more.
When the adhesion amount of Au is less than 9000 ng / cm 2 , the corrosion resistance required for the fuel cell separator cannot be secured.
On the other hand, it is preferable that the adhesion amount of Au is less than 40000 ng / cm 2 from the viewpoint of saving money.

<燃料電池用セパレータ材料の製造>
燃料電池用セパレータ材料の中間層の形成方法としては、ステンレス鋼基材の表面酸化膜を除去せずに、この基材にCrをターゲットとしてスパッタ成膜することにより、表面酸化膜中のOにCrが結合し、中間層を形成することができる。又、ステンレス鋼基材2の表面酸化膜を除去後、Crの酸化物をターゲットとしてスパッタ成膜することや、ステンレス鋼基材2の表面酸化膜を除去後、Crをターゲットとし酸化雰囲気でスパッタ成膜することによっても中間層を形成することができる。
なお、スパッタの際、ステンレス鋼基材の表面酸化膜を適度に除去し、基材表面のクリーニングを目的として逆スパッタ(イオンエッチング)を行ってもよい。逆スパッタは、例えばRF100W程度の出力で、アルゴン圧力0.2Pa程度としてアルゴンガスを基材に照射して行うことができる。
中間層のAuは、以下の表面層を形成するためのAuスパッタにより、Au原子が中間層に入り込むことによって中間層内に含まれるようになる。又、CrとAuを含む合金ターゲットを用いてステンレス鋼基材表面にスパッタ成膜してもよい。
<Manufacture of fuel cell separator materials>
As a method for forming the intermediate layer of the separator material for the fuel cell, the surface oxide film of the stainless steel base material is not removed, but sputtering is performed on this base material using Cr as a target, so that the O in the surface oxide film is formed. Cr can be bonded to form an intermediate layer. Also, after removing the surface oxide film of the stainless steel base material 2, sputter deposition is performed using Cr oxide as a target, or after removing the surface oxide film of the stainless steel base material 2, sputtering is performed using Cr as a target in an oxidizing atmosphere. The intermediate layer can also be formed by forming a film.
In addition, reverse sputtering (ion etching) may be performed for the purpose of cleaning the surface of the substrate by appropriately removing the surface oxide film of the stainless steel substrate during sputtering. Reverse sputtering can be performed, for example, by irradiating the substrate with argon gas at an output of about RF 100 W and an argon pressure of about 0.2 Pa.
The Au in the intermediate layer is included in the intermediate layer by Au atoms entering the intermediate layer by Au sputtering for forming the following surface layer. Alternatively, sputtering may be performed on the surface of the stainless steel substrate using an alloy target containing Cr and Au.

表面層の形成方法としては、例えば上記したスパッタによりステンレス鋼基材上にCrを成膜した後、Cr膜の上にAuをスパッタ成膜することができる。この場合、スパッタ粒子は高エネルギーを持つため、Cr膜のみがステンレス鋼基材表面に成膜されていても、そこにAuをスパッタすることにより、Cr膜にAuが入り込み、表面層となる。なお、表面層を形成させる際には、(Auの厚み/Crの厚み)が3以上となるように成膜条件を調整することが好ましい。このようにすると、耐食性の良い皮膜をCrの厚みに対してAuの厚みを成膜できる。
ステンレス鋼基材表面に最初にCrとAuのうちAu濃度が低い合金ターゲットを用いてスパッタ成膜し、その後、CrとAuのうちAu濃度が高い合金ターゲットを用いてスパッタ成膜してもよい。
As a method for forming the surface layer, for example, after Cr is formed on a stainless steel substrate by sputtering as described above, Au can be formed by sputtering on the Cr film. In this case, since the sputtered particles have high energy, even if only the Cr film is formed on the surface of the stainless steel substrate, by sputtering Au there, Au enters the Cr film and becomes a surface layer. When forming the surface layer, it is preferable to adjust the film forming conditions so that (Au thickness / Cr thickness) is 3 or more. In this way, a film having good corrosion resistance can be formed with a thickness of Au with respect to a thickness of Cr.
First, sputter film formation may be performed on a stainless steel substrate surface using an alloy target having a low Au concentration of Cr and Au, and then using an alloy target having a high Au concentration of Cr and Au. .

本発明の実施形態に係る燃料電池用セパレータ材料によれば、Auを含む層をステンレス鋼基材上に強固かつ均一に形成させることができ、この層が導電性、耐食性及び耐久性を有することから、燃料電池用セパレータ材料として好適である。又、本発明の実施形態によれば、Auを含む層をスパッタ成膜すればこの層が均一な層となるので、湿式の金めっきに比べて表面が平滑となり、Auを無駄に使用しなくて済むという利点がある。   According to the separator material for a fuel cell according to the embodiment of the present invention, a layer containing Au can be formed firmly and uniformly on a stainless steel substrate, and this layer has conductivity, corrosion resistance and durability. Therefore, it is suitable as a fuel cell separator material. Further, according to the embodiment of the present invention, if a layer containing Au is sputter-deposited, this layer becomes a uniform layer. Therefore, the surface becomes smoother than wet gold plating, and Au is not wasted. There is an advantage that it can be done.

本発明の燃料電池用セパレータにおいて、プレス加工による反応ガス流路及び/又は反応液体流路が予め前記基材に形成されていると好ましい。このようにすると、後工程で反応ガス流路(反応液体流路)を形成する必要がなく、中間層や表面層等を形成する前の基材をプレス加工することで、容易に反応ガス流路(反応液体流路)を形成できるので、生産性が向上する。
又、本発明の燃料電池用セパレータにおいて、基材表面に表面層又はAu単独層を形成した燃料電池用セパレータ材料に対し、後からプレス加工によって反応ガス流路及び/又は反応液体流路を形成してもよい。本発明の燃料電池用セパレータ材料は表面層やAu単独層が基材表面に強固に密着しているので、被膜形成後にプレス加工しても被膜が剥がれずに反応ガス流路(反応液体流路)を形成でき、生産性が向上する。
In the fuel cell separator of the present invention, it is preferable that a reaction gas flow path and / or a reaction liquid flow path by press working is formed in advance on the substrate. In this case, it is not necessary to form a reaction gas channel (reaction liquid channel) in a subsequent process, and the reaction gas flow can be easily performed by pressing the base material before forming the intermediate layer, the surface layer, or the like. Since a channel (reaction liquid channel) can be formed, productivity is improved.
In the fuel cell separator of the present invention, a reaction gas channel and / or a reaction liquid channel is formed later by press working on the fuel cell separator material having a surface layer or a single Au layer formed on the surface of the substrate. May be. In the fuel cell separator material of the present invention, the surface layer or the Au single layer is firmly adhered to the surface of the base material. ) To improve productivity.

なお、反応ガス流路(反応液体流路)形成のためのプレス加工をするためには、燃料電池用セパレータ材料として、基材の厚みを10μm以上とすることが好ましい。基材の厚みの上限は限定されないが、コストの点から200μm以下とすることが望ましい。   In addition, in order to perform the press work for forming the reaction gas flow path (reaction liquid flow path), it is preferable that the thickness of the base material is 10 μm or more as the fuel cell separator material. The upper limit of the thickness of the base material is not limited, but is preferably 200 μm or less from the viewpoint of cost.

<燃料電池用スタック>
本発明の燃料電池用スタックは、本発明の燃料電池用セパレータ材料、又は本発明の燃料電池用セパレータを用いてなる。
燃料電池用スタックは、1対の電極で電解質を挟み込んだセルを複数個直列に接続したものであり、各セルの間に燃料電池用セパレータが介装されて燃料ガスや空気を遮断する。燃料ガス(H2)が接触する電極が燃料極(アノード)であり、空気(O2) が接触する電極が空気極(カソード)である。
<Fuel cell stack>
The fuel cell stack of the present invention comprises the fuel cell separator material of the present invention or the fuel cell separator of the present invention.
The fuel cell stack is formed by connecting a plurality of cells in which an electrolyte is sandwiched between a pair of electrodes, and a fuel cell separator is interposed between the cells to block fuel gas and air. The electrode in contact with the fuel gas (H 2 ) is the fuel electrode (anode), and the electrode in contact with the air (O 2 ) is the air electrode (cathode).

<試料の作製>
ステンレス鋼基材として、厚み100μmのステンレス鋼材(SUS316)を用いた。
次に、ステンレス鋼基材の表面に、スパッタ法を用いて所定の目標厚みとなるように、Crを成膜した。ターゲットには純Crを用いた。次に、スパッタ法を用いて所定の目標厚みとなるようにAuを成膜した。ターゲットには純Auを用いた。
目標厚みは以下のように定めた。まず、予めステンレス鋼基材にスパッタで対象物(Cr、Au)を成膜し、蛍光X線膜厚計(Seiko Instruments製 SEA5100、コリメータ0.1mmΦ)で実際の厚みを測定し、このスパッタ条件におけるスパッタレート(nm/min)を把握した。そして、スパッタレートに基づき、厚み1nmとなるスパッタ時間を計算し、この条件でスパッタを行った。
Cr及びAuのスパッタは、株式会社アルバック製のスパッタ装置を用い、出力DC50W アルゴン圧力0.2Paの条件で行った。
<Preparation of sample>
As the stainless steel substrate, a stainless steel material (SUS316) having a thickness of 100 μm was used.
Next, Cr was deposited on the surface of the stainless steel substrate so as to have a predetermined target thickness by sputtering. Pure Cr was used for the target. Next, Au was deposited using a sputtering method so as to have a predetermined target thickness. Pure Au was used for the target.
The target thickness was determined as follows. First, an object (Cr, Au) is formed in advance on a stainless steel substrate by sputtering, and the actual thickness is measured with a fluorescent X-ray film thickness meter (SEA Instruments 100A, collimator 0.1 mmΦ) manufactured by Seiko Instruments. The sputter rate (nm / min) was ascertained. Based on the sputtering rate, the sputtering time for a thickness of 1 nm was calculated, and sputtering was performed under these conditions.
Sputtering of Cr and Au was performed using a sputtering apparatus manufactured by ULVAC, Inc. under the conditions of an output DC of 50 W and an argon pressure of 0.2 Pa.

<層構造の測定>
得られた試料について、XPS(X線光電子分光)分析による深さ(Depth)プロファイルを測定し、Au, Cr,O,Ni,Feの濃度分析を行ってスパッタ層の層構造を決定した。XPS装置としては、アルバック・ファイ株式会社製5600MCを用い、到達真空度:6.5×10−8Pa、励起源:単色化AlK、出力:300W、検出面積:800μmΦ、入射角:45度、取り出し角:45度、中和銃なしとし、以下のスパッタ条件で、測定した。
イオン種:Ar+
加速電圧:3kV
掃引領域:3mm×3mm
レート:2nm/min.(SiO換算)
なお、XPSによる濃度検出は、指定元素(Au, Cr,O,Ni,Fe)の合計を100%として、各元素の濃度(at%)を分析した。又、XPS分析で最表面からの厚み方向の距離とは、XPS分析によるチャートの横軸の距離(SiO換算での距離)である。
<Measurement of layer structure>
About the obtained sample, the depth (Depth) profile by XPS (X-ray photoelectron spectroscopy) analysis was measured, the density | concentration analysis of Au, Cr, O, Ni, and Fe was performed, and the layer structure of the sputter | spatter layer was determined. As an XPS device, ULVAC-PHI Co., Ltd. 5600MC was used, ultimate vacuum: 6.5 × 10 −8 Pa, excitation source: monochromatic AlK, output: 300 W, detection area: 800 μmΦ, incident angle: 45 degrees, The take-off angle was 45 degrees, no neutralization gun was used, and the measurement was performed under the following sputtering conditions.
Ion species: Ar +
Acceleration voltage: 3 kV
Sweep area: 3mm x 3mm
Rate: 2 nm / min. (SiO 2 equivalent)
For concentration detection by XPS, the total of specified elements (Au, Cr, O, Ni, Fe) was taken as 100%, and the concentration (at%) of each element was analyzed. Further, the distance in the thickness direction from the outermost surface in XPS analysis is the distance on the horizontal axis of the chart (distance in terms of SiO 2 ) by XPS analysis.

図2は、実施例1の試料の断面の実際のXPS像を示す。
ステンレス鋼基材2の表面に、CrとAuを含む表面層6が形成されている。さらにステンレス鋼基材2と表面層6との間に、Crを20原子%以上含み、Oを20原子%以上50原子%未満含む中間層2aが1nm以上存在することがわかる。
なお、本発明においては、中間層を定義するためCr、O等の濃度を規定している。従って、中間層の境界は便宜上Cr、O濃度によって決められるため、中間層とその上下の層(例えばステンレス鋼基材2)との間に、中間層ともステンレス鋼基材とも異なる層が介在する場合もある。
FIG. 2 shows an actual XPS image of the cross section of the sample of Example 1.
A surface layer 6 containing Cr and Au is formed on the surface of the stainless steel substrate 2. Further, it can be seen that an intermediate layer 2a containing 20 atomic% or more of Cr and containing 20 atomic% or more and less than 50 atomic% of O is present at 1 nm or more between the stainless steel substrate 2 and the surface layer 6.
In the present invention, the concentration of Cr, O, etc. is defined in order to define the intermediate layer. Therefore, since the boundary of the intermediate layer is determined by the Cr and O concentration for convenience, a layer different from the intermediate layer and the stainless steel substrate is interposed between the intermediate layer and the upper and lower layers (for example, the stainless steel substrate 2). In some cases.

<各試料の作製>
上記ステンレス鋼基材に対し、スパッタ時のCr膜及びAu膜の目標厚みを種々変更して実施例1〜5の試料を作製した。
比較例6として、Au膜とCr膜のスパッタ厚みを同一(10nm)にして試料を作製した。
比較例7として、Au膜の厚みを30nmに厚くして試料を作製した。
比較例8として、Au膜のスパッタ厚みを4nmに低減して試料を作製した。
比較例9として、Cr膜のスパッタ厚みを0.25nmに低減して試料を作製した。
比較例10として、スパッタ後に大気加熱処理(120℃×12時間)を施して試料を作製した。
比較例11として、スパッタ時に基板を加熱(300℃)して試料を作製した。
<Preparation of each sample>
Samples of Examples 1 to 5 were prepared by changing the target thicknesses of the Cr film and Au film at the time of sputtering with respect to the stainless steel substrate.
As Comparative Example 6, a sample was prepared with the same sputtering thickness (10 nm) for the Au film and the Cr film.
As Comparative Example 7, a sample was prepared by increasing the thickness of the Au film to 30 nm.
As Comparative Example 8, a sample was prepared by reducing the sputtering thickness of the Au film to 4 nm.
As Comparative Example 9, a sample was prepared by reducing the sputtering thickness of the Cr film to 0.25 nm.
As Comparative Example 10, a sample was prepared by performing atmospheric heat treatment (120 ° C. × 12 hours) after sputtering.
As Comparative Example 11, the substrate was heated (300 ° C.) during sputtering to prepare a sample.

<評価>
各試料について以下の評価を行った。
A.被膜の密着性
各試料の最表面(表面層)に1mm間隔で碁盤の目を罫書いた後、粘着性テープ(住友スリーエム株式会社製、Scotchメンディングテープ)をはり付け、さらに各試験片を180°曲げて元の状態に戻し、曲げ部のテープを急速にかつ強く引き剥がす剥離試験を行った。
剥離が全くない場合を○とし、一部でも剥離があると目視で認められた場合を×とした。
<Evaluation>
The following evaluation was performed for each sample.
A. Adhesion of coating After marking the grids at 1 mm intervals on the outermost surface (surface layer) of each sample, adhesive tape (Sumitomo 3M, Scotch Mending Tape) is applied, and each test piece is A peel test was performed in which the tape was bent and returned to its original state, and the tape at the bent portion was peeled off rapidly and strongly.
The case where there was no peeling at all was marked as ◯, and the case where some peeling was visually observed was marked as x.

B.接触抵抗
接触抵抗の測定は、試料全面に荷重を加える方法で行った。まず、40×50mmの板状の試料の表裏にそれぞれカーボンペーパーを積層し、さらに表裏のカーボンペーパーの外側にそれぞれCu/Ni/Au板を積層した。Cu/Ni/Au板は厚み10mmの銅板に1.0μm厚のNi下地めっきをし、Ni層の上に0.5μmのAuめっきした材料であり、Cu/Ni/Au板のAuめっき面がカーボンペーパーに接するように配置した。
さらに、Cu/Ni/Au板の外側にそれぞれテフロン(登録商標)板を配置し、各テフロン(登録商標)板の外側からロードセルで圧縮方向に10kg/cmの荷重を加えた。この状態で、2枚のCu/Ni/Au板の間に電流密度100mA/cmの定電流を流した時、Cu/Ni/Au板間の電気抵抗を4端子法で測定した。
B. Contact resistance The contact resistance was measured by applying a load to the entire surface of the sample. First, carbon papers were laminated on the front and back sides of a 40 × 50 mm plate-like sample, and Cu / Ni / Au plates were further laminated on the outer sides of the front and back carbon papers. The Cu / Ni / Au plate is a material in which a 10 μm thick copper plate is plated with a 1.0 μm thick Ni base, and the Ni layer is plated with a 0.5 μm Au plate. The carbon paper was placed in contact with it.
Further, a Teflon (registered trademark) plate was arranged outside the Cu / Ni / Au plate, and a load of 10 kg / cm 2 was applied in the compression direction from the outside of each Teflon (registered trademark) plate with a load cell. In this state, when a constant current with a current density of 100 mA / cm 2 was passed between the two Cu / Ni / Au plates, the electrical resistance between the Cu / Ni / Au plates was measured by a four-terminal method.

又、接触抵抗は、以下の2つの条件により試料を試験した前後でそれぞれ測定した。
条件1:硫酸水溶液への試料の浸漬試験(浴温90℃、硫酸濃度0.5g/L、浸漬時間240時間、液量1000cc)
条件2:硫酸(0.5g/L)+塩化ナトリウム(Cl:10ppm)水溶液への試料の浸漬試験(浴温90℃、浸漬時間240時間、液量1000cc)
The contact resistance was measured before and after the sample was tested under the following two conditions.
Condition 1: immersion test of sample in sulfuric acid aqueous solution (bath temperature 90 ° C., sulfuric acid concentration 0.5 g / L, immersion time 240 hours, liquid volume 1000 cc)
Condition 2: immersion test of sample in aqueous solution of sulfuric acid (0.5 g / L) + sodium chloride (Cl: 10 ppm) (bath temperature 90 ° C., immersion time 240 hours, liquid volume 1000 cc)

C.金属溶出量
金属溶出量は上記条件1〜2で試験後の試験液中の全ての金属濃度(mg/L)をICP(誘導結合プラズマ)発光分光分析することで評価した。
又、燃料電池用セパレータに求められる代表的な特性は、低接触抵抗(10mΩ・cm以下)、使用環境での耐食性(耐食試験後も低接触抵抗で、有害なイオンの溶出がない)の2つである。
C. Metal Elution Amount The metal elution amount was evaluated by ICP (inductively coupled plasma) emission spectroscopic analysis of all metal concentrations (mg / L) in the test solution after the test under the above conditions 1-2.
Typical characteristics required for fuel cell separators are low contact resistance (10 mΩ · cm 2 or less), corrosion resistance in the environment of use (low contact resistance after corrosion test, no leaching of harmful ions) There are two.

D.付着量
付着量は,酸分解/ICP(誘導結合プラズマ)発光分光分析することで評価した。具体的には、50mm×50mmの試料1枚をフッ硝酸溶液に全量溶解して,Auの付着量を分析した。なお、1条件当たりの試料数を5個とし、5回の測定結果の平均値をそれぞれ表1に記載した。
得られた結果を表1、表2に示す。
D. Amount of adhesion The amount of adhesion was evaluated by acid decomposition / ICP (inductively coupled plasma) emission spectroscopic analysis. Specifically, the entire amount of one 50 mm × 50 mm sample was dissolved in a hydrofluoric acid solution, and the amount of Au deposited was analyzed. The number of samples per condition was five, and the average values of the five measurement results are shown in Table 1, respectively.
The obtained results are shown in Tables 1 and 2.

Figure 2011249147
Figure 2011249147

Figure 2011249147
Figure 2011249147

表1、表2から明らかなように、表面層と中間層が存在し、Auが65原子%以上の領域の厚みが1.5nm以上、かつAuの最大濃度が80原子%以上であり、Crを50原子%以上含む金属層が存在しない各実施例の場合、耐食試験前後で試料の接触抵抗が変化せず、被膜の密着性及び耐食性が優れたものとなった。   As is apparent from Tables 1 and 2, the surface layer and the intermediate layer exist, the thickness of the region where Au is 65 atomic% or more is 1.5 nm or more, and the maximum concentration of Au is 80 atomic% or more. In each of the examples in which there was no metal layer containing 50 atomic% or more, the contact resistance of the sample did not change before and after the corrosion resistance test, and the film adhesion and corrosion resistance were excellent.

AuとCrのスパッタ厚みを同一としたために金属層(Crが50原子%以上の厚み領域)が存在した比較例6の場合、条件2の耐食性試験において試験後の接触抵抗が増加し,条件2でのCrの溶出量も多く、被膜の耐食性が劣った。
比較例6よりもAuのスパッタ厚みを厚くした比較例7の場合、比較例6と同様に、金属層(Crが50原子%以上の厚み領域)が存在したため、条件2の耐食性試験において試験後の接触抵抗が増加し,条件2でのCrの溶出量も多く、被膜の耐食性が劣った。
Au付着量が9000ng/cm未満である比較例8の場合、Auの付着量が少ないために、条件2の耐食性試験において試験後の接触抵抗が増加し,条件2でのCrの溶出量も多く、被膜の耐食性が劣った。
中間層の厚みが1nm未満である比較例9の場合,スパッタ膜の密着性が劣化し、耐食性の評価を行うことができなかった。
In the case of Comparative Example 6 in which a metal layer (Cr having a thickness region of 50 atomic% or more) was present because the Au and Cr sputter thicknesses were the same, the contact resistance after the test increased in the corrosion resistance test of Condition 2, and the condition 2 The amount of Cr elution was large, and the corrosion resistance of the film was poor.
In the case of the comparative example 7 in which the sputtering thickness of Au is made thicker than that of the comparative example 6, the metal layer (thickness region where Cr is 50 atomic% or more) is present in the same manner as the comparative example 6. Contact resistance increased, the amount of Cr eluted under condition 2 was large, and the corrosion resistance of the coating was poor.
In the case of Comparative Example 8 in which the Au adhesion amount is less than 9000 ng / cm 2 , since the Au adhesion amount is small, the contact resistance after the test in the corrosion resistance test of Condition 2 is increased, and the Cr elution amount in Condition 2 is also Many of the coatings were inferior in corrosion resistance.
In the case of Comparative Example 9 in which the thickness of the intermediate layer was less than 1 nm, the adhesion of the sputtered film deteriorated and the corrosion resistance could not be evaluated.

スパッタ後に大気加熱処理を行ったために、Auの最大濃度が80原子%未満になった比較例10の場合、条件2の耐食性試験において試験後の接触抵抗が増加し,条件2でのCrの溶出量も多く、被膜の耐食性が劣った。
Au濃度65%以上の領域の厚みが1.5nm未満である比較例11の場合、条件2の耐食性試験において試験後の接触抵抗が増加し,条件2でのCrの溶出量も多く、被膜の耐食性が劣った。
In Comparative Example 10 where the maximum concentration of Au was less than 80 atomic% due to the atmospheric heat treatment after sputtering, the contact resistance after the test increased in the corrosion resistance test of Condition 2, and the elution of Cr under Condition 2 The amount was large and the corrosion resistance of the film was poor.
In the case of Comparative Example 11 in which the thickness of the region having an Au concentration of 65% or more is less than 1.5 nm, the contact resistance after the test increased in the corrosion resistance test of Condition 2, the amount of Cr eluted under the condition 2 was large, Corrosion resistance was inferior.

2 ステンレス鋼基材
2a 中間層
6 表面層
2 Stainless steel substrate 2a Intermediate layer 6 Surface layer

Claims (10)

ステンレス鋼基材の表面にAuとCrとを含む表面層が形成され、
前記表面層と前記ステンレス鋼基材との間に、Crを20原子%以上含み、Oを20原子%以上50原子%未満含む中間層が1nm以上存在し、
Au濃度65原子%以上の領域の厚みが1.5nm以上、かつAuの最大濃度が80原子%以上であり、Crを50原子%以上含む金属層が存在しない燃料電池用セパレータ材料。
A surface layer containing Au and Cr is formed on the surface of the stainless steel substrate,
Between the surface layer and the stainless steel substrate, there is an intermediate layer containing 20 nm% or more of Cr, and containing 20 nm% or more and less than 50 atom% of O and 1 nm or more,
A fuel cell separator material having a thickness of 1.5 nm or more in a region having an Au concentration of 65 atomic% or more, a maximum Au concentration of 80 atomic% or more, and no metal layer containing 50 atomic% or more of Cr.
Auの付着量が9000ng/cm以上である請求項1に記載の燃料電池用セパレータ材料。 The fuel cell separator material according to claim 1, wherein the adhesion amount of Au is 9000 ng / cm 2 or more. 固体高分子形燃料電池に用いられる請求項1又は2に記載の燃料電池用セパレータ材料。 The separator material for fuel cells according to claim 1 or 2, which is used for a polymer electrolyte fuel cell. ダイレクトメタノール型固体高分子形燃料電池に用いられる請求項1〜3のいずれかに記載の燃料電池用セパレータ材料。 The separator material for fuel cells according to any one of claims 1 to 3, which is used for a direct methanol type polymer electrolyte fuel cell. 請求項1〜4のいずれかに記載の燃料電池用セパレータ材料を用いた燃料電池用セパレータであって、前記ステンレス鋼基材に予めプレス加工による反応ガス流路及び/又は反応液体流路を形成した後、前記表面層を形成して成る燃料電池用セパレータ。 A fuel cell separator using the fuel cell separator material according to any one of claims 1 to 4, wherein a reaction gas flow path and / or a reaction liquid flow path is formed in advance on the stainless steel substrate by pressing. Then, a fuel cell separator formed by forming the surface layer. 請求項1〜4のいずれかに記載の燃料電池用セパレータ材料を用いた燃料電池用セパレータであって、前記ステンレス鋼基材に前記表面層を形成した後、プレス加工による反応ガス流路及び/又は反応液体流路を形成して成る燃料電池用セパレータ。 A fuel cell separator using the fuel cell separator material according to any one of claims 1 to 4, wherein the surface layer is formed on the stainless steel substrate, and then a reaction gas flow path and / or by press working. Alternatively, a fuel cell separator formed by forming a reaction liquid channel. 請求項1〜4のいずれかに記載の燃料電池用セパレータ材料、又は請求項5若しくは6記載の燃料電池用セパレータを用いた燃料電池スタック。 A fuel cell stack using the fuel cell separator material according to claim 1 or the fuel cell separator according to claim 5 or 6. 請求項1〜4のいずれかに記載の燃料電池用セパレータ材料の製造方法であって、
前記ステンレス鋼基材の表面に、Crを乾式成膜した後、Auを乾式成膜する燃料電池用セパレータ材料の製造方法。
It is a manufacturing method of the separator material for fuel cells in any one of Claims 1-4,
A method for producing a separator material for a fuel cell, wherein a dry deposition of Cr is performed on the surface of the stainless steel substrate, followed by a dry deposition of Au.
(Auの厚み/Crの厚み)を3以上とする請求項8記載の燃料電池用セパレータ材料の製造方法。   The method for producing a fuel cell separator material according to claim 8, wherein (Au thickness / Cr thickness) is 3 or more. 前記乾式成膜がスパッタリングである請求項9記載の燃料電池用セパレータ材料の製造方法。   The method for producing a fuel cell separator material according to claim 9, wherein the dry film formation is sputtering.
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