TWI441776B - Fabrication method of electroconductive thin film of carbon nanotubes with excellent flexibility - Google Patents

Fabrication method of electroconductive thin film of carbon nanotubes with excellent flexibility Download PDF

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TWI441776B
TWI441776B TW97150221A TW97150221A TWI441776B TW I441776 B TWI441776 B TW I441776B TW 97150221 A TW97150221 A TW 97150221A TW 97150221 A TW97150221 A TW 97150221A TW I441776 B TWI441776 B TW I441776B
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conductive film
carbon nanotube
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TW201024217A (en
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Nat Univ Chung Hsing
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具優良可撓性之奈米碳管導電薄膜的製造方法Method for manufacturing nanometer carbon tube conductive film with excellent flexibility

本發明是有關於一種導電薄膜的製造方法,特別是指一種具優良可撓性之奈米碳管導電薄膜的製造方法。The present invention relates to a method for producing a conductive film, and more particularly to a method for producing a carbon nanotube conductive film having excellent flexibility.

隨著液晶螢幕的廣泛應用與發展,透明導電材料的開發一直是熱門的研究主題,應用於顯示器與觸控面板的透明導電薄膜則應具備下列基本特性:(1)在可見光範圍的光透過率與導電率皆高,(2)須能被製為表面平滑的薄膜,且能承受電漿製程環境,(3)容易蝕刻,以形成預定的圖樣(pattern),(4)可大面積均勻化,(5)低生產成本,(6)無毒並能回收再生。氧化銦錫(indium tin oxide,簡稱為ITO)由於兼具低薄膜比電阻與可見光透光率在80%~90%的特性,已成為透明導電薄膜的最主要的原料來源,然而ITO原料中的銦屬於稀有金屬,產量有限,造成供給不穩定及原料成本節節高升,因此,開發新的替代性材料已成為主要的課題。此外,針對近來業界積極投入的觸控式面板與可撓曲面板,由於ITO薄膜不夠柔軟,在使用上相對具有耐用性相對較差與可靠性相對較低的缺點。With the wide application and development of LCD screens, the development of transparent conductive materials has been a hot research topic. The transparent conductive films used in displays and touch panels should have the following basic characteristics: (1) Light transmittance in the visible range Both high conductivity and (2) must be made into a smooth surface film and can withstand the plasma process environment, (3) easy to etch to form a predetermined pattern, (4) large area uniformity (5) low production cost, (6) non-toxic and capable of recycling. Indium tin oxide (ITO) has the characteristics of low film specific resistance and visible light transmittance of 80% to 90%, and has become the most important raw material source of transparent conductive film, but in ITO raw materials. Indium is a rare metal with limited production, resulting in unstable supply and high raw material costs. Therefore, the development of new alternative materials has become a major issue. In addition, the touch panel and the flexible panel which have been actively invested in the industry in recent years have disadvantages in that the ITO film is relatively soft and relatively durable in use and relatively low in reliability.

針對ITO的來源不足與其應用極限等問題,奈米碳管為近來研究開發出來的一種熱門的替代性材料,主要是鑑於奈米碳管材料有許多極優異的光、電、磁與機械特性,且其巨觀物性與化性和材料本身微觀的排列方式與數量有直接關係,而能影響到可應用的產品端,目前並已開發出可投入商業化應用的單壁奈米碳管(single-walled carbon nanotubes,簡稱為SWNT)導電薄膜。In view of the insufficient source of ITO and its application limit, nanocarbon tubes are a popular alternative material developed recently, mainly because of the excellent optical, electrical, magnetic and mechanical properties of nano carbon nanotube materials. Moreover, its macroscopic physical properties and chemical properties are directly related to the microscopic arrangement and quantity of the materials themselves, and can affect the applicable product end. At present, single-walled carbon nanotubes (single) that can be put into commercial application have been developed. -walled carbon nanotubes (referred to as SWNT) conductive film.

單壁式奈米碳管導電薄膜主要是採用濾膜法與噴灑法製成。其中,濾膜法是先以雷射法合成SWNT,並以高濃度的硝酸溶液酸洗後,將其加入含有特定界面活性劑的溶劑中形成奈米碳管溶液中,再以特定的濾紙過濾使該等奈米碳管停駐於濾紙表面形成奈米碳管濾膜,接著,將該奈米碳管濾膜貼至透明基板上,再利用丙酮除去濾紙部分,只留下奈米碳管,就能製得單壁式奈米碳管導電薄膜(“Transparent,Conductive Carbon Nanotube Films”,Z.Wu etc.,Science 2004,305,1273、”Effect of SOC12 Treatment on Electrical and Mechanical Properties of Single-Wall Carbon Nanotube Networks”,U.Dettlaff-Weglikowska etc.,J. Am. Chem. Soc.,2005,127,5125-5131)。The single-walled carbon nanotube conductive film is mainly made by a filter method and a spray method. Among them, the filter method is to first synthesize SWNT by laser, pickle it with a high concentration of nitric acid solution, add it to a solvent containing a specific surfactant to form a carbon nanotube solution, and then filter it with a specific filter paper. The carbon nanotubes are parked on the surface of the filter paper to form a carbon nanotube membrane, and then the carbon nanotube membrane is attached to the transparent substrate, and the filter paper portion is removed by acetone, leaving only the carbon nanotubes. , a single-walled carbon nanotube conductive film ("Transparent, Conductive Carbon Nanotube Films", Z. Wu et., Science 2004, 305, 1273, "Effect of SOC12 Treatment on Electrical and Mechanical Properties of Single- Wall Carbon Nanotube Networks", U. Dettlaff-Weglikowska et., J. Am. Chem. Soc., 2005, 127, 5125-5131).

以噴灑法製備單壁式奈米碳管導電薄膜的製造方法則是將預定量的單壁式奈米碳管加入並分散於含有特定界面活性劑的溶劑中形成奈米碳管溶液,將該奈米碳管溶液離心後,取溶液上層50%的部分噴灑於表面溫度維持在100℃的聚對苯二甲酸乙二酯(poly(ethylene terephthalate),簡稱為PET)基材上,接著,以去離子水清洗並烘乾,就能製得單壁式奈米碳管導電薄膜(“Effect of Acid Treatment on Carbon Nanotube-Based Flexible Transparent Conducting Films”,J. Am. Chem. Soc.,2007,129,7758-7759)。The method for preparing a single-walled carbon nanotube conductive film by spraying method is to add a predetermined amount of single-walled carbon nanotubes to a solvent containing a specific surfactant to form a carbon nanotube solution, and After centrifugation of the carbon nanotube solution, a 50% portion of the upper layer of the solution is sprayed onto a poly(ethylene terephthalate, abbreviated as PET) substrate having a surface temperature maintained at 100 ° C, and then A single-walled carbon nanotube conductive film ("Effect of Acid Treatment on Carbon Nanotube-Based Flexible Transparent Conducting Films", J. Am. Chem. Soc., 2007, 129) can be obtained by washing and drying with deionized water. , 7758-7759).

雖然學界與業界的積極研究開發,已發展出各種互有優劣的透明導電薄膜,而且其中的單壁式奈米碳管導電薄膜的製造技術也進入準備商業化的階段,並有可取代ITO薄膜的趨勢,但相關配套的製程技術並非短時間就能成功,為因應未來需求,並創造出更多更人性化的人機介面產品及軟性電子產品,與觸控面板、可撓曲面板、透明電極等有關的液晶顯示器的製程技術也將有所變革,其中,材料技術的成熟度將是關鍵的要素,因此,仍有持續開發不同類型的材料技術的需求,以提供更多元的選擇與應用。Although the academic and industry's active research and development, has developed a variety of transparent conductive films, and the manufacturing technology of single-walled carbon nanotube conductive film has also entered the stage of commercialization, and can replace the ITO film. Trends, but related process technology can not be successful in a short period of time, in response to future needs, and create more humane interface products and soft electronic products, with touch panels, flexible panels, transparent The process technology of liquid crystal displays, such as electrodes, will also change. Among them, the maturity of material technology will be a key element. Therefore, there is still a need to continuously develop different types of material technologies to provide more choices and application.

除了持續開發出新的、低成本且兼具透明性與導電性的導電薄膜材料外,因應未來觸控面板與可撓曲面板的發展趨勢,可撓曲式導電薄膜的發展越來越受到重視,為了達到可供實際應用的標準,導電薄膜經多次撓曲後是否還能維持穩定的電阻與導電性將成為亟待克服的課題,為了提升導電薄膜經多次撓曲後的可靠度,除了開發可供應用的新材質外,還應積極改善材質性能,以提供具有較優良可撓性的導電薄膜,進而提升最終製品的品質。In addition to the continuous development of new, low-cost conductive film materials with transparency and conductivity, the development of flexible conductive films has received more and more attention due to the development trend of future touch panels and flexible panels. In order to achieve the standard for practical application, whether the conductive film can maintain stable resistance and conductivity after multiple deflections will become an urgent problem to be overcome, in order to improve the reliability of the conductive film after multiple deflections, in addition to In addition to developing new materials that can be applied, it is also necessary to actively improve the material properties to provide a conductive film with superior flexibility, thereby improving the quality of the final product.

因此,本發明的目的,是在提供一種經多次撓曲後仍然能夠維持穩定導電性的具優良可撓性之奈米碳管導電薄膜的製造方法。Accordingly, it is an object of the present invention to provide a method for producing a highly flexible carbon nanotube conductive film which can maintain stable conductivity after repeated flexing.

於是,本發明具優良可撓性之奈米碳管導電薄膜的製造方法,包含下列步驟:Therefore, the method for producing the excellent flexible carbon nanotube conductive film of the present invention comprises the following steps:

(i)配製一奈米碳管溶液,將預定量的奈米碳管組份加入一預定量的溶劑中調配成黏度值介於1~50c.p的奈米碳管溶液,且該奈米碳管組份具有多數個多層壁奈米碳管;(i) preparing a carbon nanotube solution, adding a predetermined amount of the carbon nanotube component to a predetermined amount of solvent to prepare a carbon nanotube solution having a viscosity value of 1 to 50 c.p, and the nanometer The carbon tube component has a plurality of multi-layered wall carbon nanotubes;

(ii)透明可撓材披覆,使一透明的可撓性材質塗佈至一放置於一基座的基材片上,並藉由旋轉該基座,讓該可撓性材質在該基材片上形成一第一披覆層;(ii) transparent flexible material coating, applying a transparent flexible material to a substrate sheet placed on a substrate, and rotating the substrate to make the flexible material on the substrate Forming a first cladding layer on the sheet;

(iii)霧化,施加一超音波霧化頻率於該奈米碳管溶液,使該奈米碳管溶液霧化成多數個分散且挾帶有該等奈米碳管的霧化顆粒,並提供一攜帶氣體使該等霧化顆粒沿一預定路徑傳送,其中,該等霧化顆粒的粒徑是介於0.5μm~50μm;及(iii) atomizing, applying an ultrasonic atomization frequency to the carbon nanotube solution, atomizing the carbon nanotube solution into a plurality of atomized particles dispersed and carrying the carbon nanotubes, and providing Carrying a gas to transport the atomized particles along a predetermined path, wherein the atomized particles have a particle diameter of between 0.5 μm and 50 μm;

(iv)旋轉塗佈,將該等霧化顆粒引導至已塗佈有該第一披覆層的該基座上方,再藉由旋轉該基座,使該等霧化顆粒均勻地塗佈於該第一披覆層上,進而形成一與該第一披覆層相結合的導電薄膜。(iv) spin coating, directing the atomized particles onto the susceptor to which the first cladding layer has been applied, and rotating the susceptor to uniformly coat the atomized particles The first cladding layer further forms a conductive film combined with the first cladding layer.

本發明的有益效果在於:藉由先在該基材片上披覆上由可撓性材質製成的第一披覆層,再利用超音波霧化與旋轉塗佈技術使該等奈米碳管形成的導電薄膜塗佈並結合於該第一披覆層上,使最終所製得的導電薄膜承受多次撓曲後仍然維持較穩定的導電性,使本發明具有能製造出可靠性相對較高的具優良可撓性之奈米碳管導電薄膜的優點。The invention has the beneficial effects of: using the first coating layer made of flexible material on the substrate sheet, and then using the ultrasonic atomization and spin coating technology to make the carbon nanotubes The formed conductive film is coated and bonded to the first coating layer, so that the finally obtained conductive film can maintain a relatively stable conductivity after being subjected to multiple deflections, so that the invention can be manufactured with relatively high reliability. The advantage of a high-conductivity carbon nanotube conductive film with excellent flexibility.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之二個較佳實施例的詳細說明中,將可清楚的呈現。The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments of the invention.

參閱圖1與圖3,本發明具優良可撓性之奈米碳管導電薄膜的製造方法的一第一較佳實施例包含下列步驟:步驟101是純化,是分別以高濃度鹽酸溶液酸洗、沉澱法水洗及真空乾燥處理以純化一奈米碳管組份中的多數個多層壁奈米碳管,純化處理的主要目的在去除該等奈米碳管原料中的氧化鐵、不定型碳、表面官能基等附著或混摻在該等奈米碳管原料中的雜質,以提高多層壁奈米碳管的導電度,進而使該等奈米碳管能表現出較佳的光電特質。Referring to Figures 1 and 3, a first preferred embodiment of the method for producing an excellent flexible carbon nanotube conductive film of the present invention comprises the following steps: Step 101 is purification, which is respectively pickled with a high concentration hydrochloric acid solution. , precipitation washing and vacuum drying to purify a plurality of multi-walled carbon nanotubes in a carbon nanotube component, the main purpose of the purification treatment is to remove iron oxide and amorphous carbon in the carbon nanotube raw materials. The surface functional groups or the like are adhered or mixed with impurities in the carbon nanotube raw materials to improve the conductivity of the multilayered carbon nanotubes, thereby enabling the carbon nanotubes to exhibit better photoelectric properties.

步驟102是配製一奈米碳管溶液20,將1重量份的奈米碳管組份及1重量份的界面活性劑組份分別加入1000~1000000重量份的溶劑中調配成黏度值介於1~50c.p的奈米碳管溶液20,且該奈米碳管組份具有多數個多層壁奈米碳管。Step 102 is to prepare a carbon nanotube solution 20, and add 1 part by weight of the carbon nanotube component and 1 part by weight of the surfactant component to 1000 to 1,000,000 parts by weight of the solvent respectively to prepare a viscosity value of 1 ~50c.p of carbon nanotube solution 20, and the carbon nanotube component has a plurality of multi-layered wall carbon nanotubes.

該界面活性劑組份是用以防止該等多層壁奈米碳管聚集,且為一選自下列群組中的物質:醇之硫酸酯鹽(sulfated alcohol,通式為ROSO3 - M+ )、烷基磺酸鹽(alkylsulfonate,通式為RSO3 - M+ )、α-烯烴磺酸鹽(alpha-olefinsulphonate,簡稱為AOS,通式為RCH=CH(CH2 )n -SO3 M)、第四級銨鹽(Quaternary ammonium salt,通式為)、環氧乙烷系(亦稱聚乙二醇系,polyoxyethylene,簡稱為POE)、聚氧乙烯烷基醚(又稱為脂肪醇聚氧乙烯醚、醚醇,alcohol ethoxylate,簡稱為AE,通式為RO(CH2 CH2 O)n H),及其等之組合。The surfactant component is for preventing the aggregation of the multi-walled nanotubes, and is a substance selected from the group consisting of a sulfated alcohol (ROSO 3 - M + ) , alkylsulfonate (formula RSO 3 - M + ), α-olefin sulfonate (alpha-olefinsulphonate, abbreviated as AOS, of the formula RCH=CH(CH 2 ) n -SO 3 M) Quaternary ammonium salt ), ethylene oxide (also known as polyethylene glycol, polyoxyethylene, POE for short), polyoxyethylene alkyl ether (also known as fatty alcohol polyoxyethylene ether, ether alcohol, alcohol ethoxylate, referred to as AE, The formula is RO(CH 2 CH 2 O) n H), and combinations thereof.

較佳地,該界面活性劑為一選自下列群組中的物質:C4 ~C18 之直鏈烷基磺酸鈉(通式為RSO3 - Na+ )、C4 ~C18 之直鏈烷基磺酸鉀(通式為RSO3 - K+ )、C4 ~C18 之直鏈烷基硫酸鈉(通式為ROSO3 - Na+ )、C4 ~C18 之直鏈烷基硫酸鉀(通式為ROSO3 - K+ )、C4 ~C18 之直鏈烷基苯磺酸鈉(通式為RC6 H4 SO3 - Na+ )、C4 ~C18 之直鏈烷基苯磺酸鉀(通式為RC6 H4 SO3 - K+ )、C4 ~C18 之直鏈烷基苯硫酸鈉(通式為ROC6 H4 SO3 - Na+ )、C4 ~C18 之直鏈烷基苯硫酸鉀(通式為ROC6 H4 SO3 - K+ )、C2 ~C16 之直鏈烷基四級銨鹽、α-烯烴磺酸鹽(簡稱為AOS,通式為RCH=CH(CH2 )n -SO3 M,其中,n=14~16,且M為鹼金族離子)、烷基為C2 ~C16 之聚氧乙烯烷基醚(簡稱為AE,通式為RO(CH2 CH2 O)n H,n=5~30),及其等之組合。藉此,可達到較佳的分散效果,在本實施例中,是選用十二烷基磺酸鈉(sodium dodecyl sulfate,簡稱為SDS)作為該界面活性劑。Preferably, the surfactant is a substance selected from the group consisting of sodium C 4 ~ C 18 linear alkyl sulfonate (formula RSO 3 - Na + ), C 4 ~ C 18 straight Potassium alkane sulfonate (formula RSO 3 - K + ), linear alkyl sodium sulfate of C 4 ~ C 18 (formula of ROSO 3 - Na + ), linear alkyl group of C 4 ~ C 18 Potassium sulfate (formula of ROSO 3 - K + ), sodium C 4 ~ C 18 linear alkylbenzene sulfonate (formula RC 6 H 4 SO 3 - Na + ), linear chain of C 4 ~ C 18 Potassium alkylbenzene sulfonate (formula RC 6 H 4 SO 3 - K + ), linear C 4 -C 18 linear alkyl benzene sulphate (formula: ROC 6 H 4 SO 3 - Na + ), C 4 to C 18 linear alkyl benzene sulfate (formula: ROC 6 H 4 SO 3 - K + ), C 2 to C 16 linear alkyl quaternary ammonium salt, α-olefin sulfonate (abbreviation is the AOS, the formula RCH = CH (CH 2) n -SO 3 M, where, n = 14 ~ 16, and M is an alkali metal ion group), alkyl polyoxyethylene alkyl is a C 2 ~ C 16 of Ether (abbreviated as AE, the formula is RO(CH 2 CH 2 O) n H, n=5~30), and combinations thereof. Thereby, a better dispersion effect can be achieved. In the present embodiment, sodium dodecyl sulfate (SDS) is selected as the surfactant.

其中,該溶劑為一選自下列群組中的液體:水、乙醇、異丙醇及丙酮。配製時,於溶劑中添加該多層壁奈米碳管組份與該界面活性劑後,可先以功率750W的探頭式超音波震盪分散器(機型:Sonics & Materials,Inc.「SONICSVCX750」)對該MWNT溶液以20%功率作用5分鐘,及30%功率作用5分鐘,以防止該等多層壁奈米碳管聚集並呈均勻分散的狀態。Wherein the solvent is a liquid selected from the group consisting of water, ethanol, isopropanol and acetone. In the preparation, after adding the multi-layered wall carbon nanotube component and the surfactant to the solvent, the probe type ultrasonic oscillating disperser with a power of 750W can be used first (model: Sonics & Materials, Inc. "SONICS VCX750") The MWNT solution was applied at 20% power for 5 minutes and 30% power for 5 minutes to prevent the multi-walled nanotubes from collecting and being uniformly dispersed.

步驟103是透明可撓材披覆,使一透明的可撓性材質塗佈至一放置於一基座22的基材片21上,並藉由旋轉該基座22,讓該可撓性材質在該基材片21上形成一第一披覆層30。Step 103 is a transparent flexible material coating, and a transparent flexible material is applied to a substrate sheet 21 placed on a base 22, and the flexible material is rotated by rotating the base 22. A first cladding layer 30 is formed on the substrate sheet 21.

較佳地,該第一披覆層30是由一選自下列群組中的可撓性材質所製成:為聚乙烯醇(poly(vinyl alcohol),簡稱為PVA)、聚丙烯酸(poly(acrylic acid),簡稱為PAA)、聚乙二醇(poly(ethylene glycol),簡稱為PEG)、聚甲基丙烯酸甲酯(poly(methyl methacrylate),簡稱為PMMA),及聚碳酸酯(polycarbonate,簡稱為PC)。在該較佳實施例,該第一披覆層30是由聚乙烯醇所製成。Preferably, the first cladding layer 30 is made of a flexible material selected from the group consisting of poly (vinyl alcohol, PVA for short) and polyacrylic acid (poly (poly) Acrylic acid), abbreviated as PAA), polyethylene (poly(ethylene glycol), PEG for short), poly(methyl methacrylate) (PMMA for short), and polycarbonate (polycarbonate, Referred to as PC). In the preferred embodiment, the first cladding layer 30 is made of polyvinyl alcohol.

步驟104是霧化,施加一超音波霧化頻率於該奈米碳管溶液20,使該奈米碳管溶液20霧化成多數個分散且挾帶有該等奈米碳管的霧化顆粒23,並提供一攜帶氣體24使該等霧化顆粒23沿一預定路徑傳送。其中,該奈米碳管溶液20是盛裝於一霧化容器25中,且該溶液的液面是藉由一虹吸管26維持在固定高度,藉此,使產生該超音波頻率的超音波元件27恆位於液面下固定深度處,以控制該溶液液面所承受的能量固定,及所產生的霧化顆粒23的粒徑能維持一致。其中,該虹吸管26是連接在該霧化容器25與一貯液容器28之間,該貯液容器28是置於一升降座29上,以受連動而上下位移,並能藉此控制該霧化容器25中的液面高度。Step 104 is atomization, applying an ultrasonic atomization frequency to the carbon nanotube solution 20, and atomizing the carbon nanotube solution 20 into a plurality of atomized particles 23 dispersed with the carbon nanotubes. And carrying a carrier gas 24 to transport the atomized particles 23 along a predetermined path. Wherein, the carbon nanotube solution 20 is contained in an atomization container 25, and the liquid level of the solution is maintained at a fixed height by a siphon tube 26, whereby the ultrasonic wave element 27 generating the ultrasonic frequency is generated. Constantly located at a fixed depth below the liquid surface to control the energy of the liquid level of the solution is fixed, and the particle size of the atomized particles 23 produced can be maintained consistently. Wherein, the siphon tube 26 is connected between the atomization container 25 and a liquid storage container 28, and the liquid storage container 28 is placed on a lifting seat 29 to be vertically displaced by being linked, and the mist can be controlled thereby. The liquid level in the container 25.

較佳地,該超音波霧化頻率為20KHz~2.45MHz,在本實施例中則是採用1.65MHz的超音波霧化頻率,在本實施例中所用的超音波霧化器的機型為:普崴電子Pro-Wave Electronic Corp M165D25、M165D20,而該等霧化顆粒的粒徑則是介於0.5μm~50μm,且較佳是介於2μm~7μm,在本實施例中,則是配合超音波霧化頻率使該等霧化顆粒21的粒徑實質上維持在3μm左右。Preferably, the ultrasonic atomization frequency is 20 kHz to 2.45 MHz. In this embodiment, the ultrasonic atomization frequency of 1.65 MHz is used. The ultrasonic atomizer used in this embodiment is: Pro-Wave Electronic Corp M165D25, M165D20, and the particle size of the atomized particles is between 0.5 μm and 50 μm, and preferably between 2 μm and 7 μm. In this embodiment, it is super The sonic atomization frequency maintains the particle diameter of the atomized particles 21 substantially at about 3 μm.

為了符合所要求的粒徑大小,可透過下列公式推算該超音波的頻率範圍,以較快速地調整到所要求的霧化顆粒尺寸:In order to meet the required particle size, the frequency range of the ultrasonic wave can be estimated by the following formula to adjust to the required atomized particle size relatively quickly:

其中,D為霧化顆粒的粒徑,T為表面張力係數(N/cm),ρ為溶液密度(g/cm3 ),f為超音波霧化頻率(Hz),及α為0.34的常數值。(Ultrasonics Volume 22,Issue 6,November 1984,Pages 259-260)Where D is the particle size of the atomized particles, T is the surface tension coefficient (N/cm), ρ is the solution density (g/cm 3 ), f is the ultrasonic atomization frequency (Hz), and α is 0.34. Value. (Ultrasonics Volume 22, Issue 6, November 1984, Pages 259-260)

較佳地,該攜帶氣體24的流速為1L/min~200L/min,在本實施例中,該攜帶氣體24的流速則是設定為22L/min,且該攜帶氣體24為氮氣。Preferably, the flow rate of the carrier gas 24 is from 1 L/min to 200 L/min. In the present embodiment, the flow rate of the carrier gas 24 is set to 22 L/min, and the carrier gas 24 is nitrogen.

步驟105是旋轉塗佈,將該等霧化顆粒23引導至已塗佈有該第一披覆層30的該基座22上方,再藉由旋轉該基座22,使該等霧化顆粒23均勻地塗佈於該第一披覆層30上,進而形成一與該第一披覆層30相結合的導電薄膜。Step 105 is spin coating, guiding the atomized particles 23 to the top of the susceptor 22 to which the first cladding layer 30 has been applied, and then rotating the susceptor 22 to make the atomized particles 23 The first coating layer 30 is uniformly applied to form a conductive film combined with the first cladding layer 30.

進行旋轉途佈時,配合調整該基座22的低速、中速與高速轉速,該等霧化顆粒23是分別對該基座22進行一次濕潤旋轉塗佈、一次初步成膜旋轉塗佈與至少一次的再成膜旋轉塗佈,以在該第一披覆層30上形成導電薄膜。進行該再成膜旋轉塗佈時,該基座是依序經由一低速轉速、一中速轉速及一高速轉速的周期變換旋轉,且該低速、中速與高速轉速的比率為2~3:3~6:8~40。在本實施例中,該低速轉速較佳為300r.p.m.~450r.p.m.,該中速轉速較佳是控制在450r.p.m.~900r.p.m.,及該高速轉速較佳是1200r.p.m.~6000r.p.m.。When the rotating cloth is rotated, the low speed, the medium speed and the high speed speed of the base 22 are adjusted, and the atomized particles 23 are respectively subjected to a wet spin coating, a preliminary film forming spin coating and at least one preliminary film forming and coating. A re-filming spin coating is applied once to form a conductive film on the first cladding layer 30. When the re-filming spin coating is performed, the susceptor is sequentially rotated through a cycle of a low speed, a medium speed, and a high speed, and the ratio of the low speed, the medium speed, and the high speed speed is 2 to 3: 3~6:8~40. In this embodiment, the low speed is preferably 300 r. pm to 450 rpm, and the medium speed is preferably controlled at 450 rpm to 900 rpm, and the high speed is preferably 1200 rpm to 6000 rpm. Pm.

步驟106是熱壓,是於預定溫度下對含有該導電薄膜與該第一披覆層30的基材片21施加預定壓力,用以使該導電薄膜被壓密緊實,及使該等奈米碳管被壓擠入該第一披覆層30,而與該第一披覆層30形成緊密結合。藉由熱壓可形成緻密穩定的結構,及使該等多層壁奈米碳管之間形成較緊密的連結,而有助於降低該導電薄膜的表面電阻,使該導電薄膜能夠表現更佳的導電度。Step 106 is hot pressing, applying a predetermined pressure to the substrate sheet 21 containing the conductive film and the first cladding layer 30 at a predetermined temperature, so that the conductive film is compacted and compacted, and the The carbon nanotube is pressed into the first cladding layer 30 to form a tight bond with the first cladding layer 30. By forming a dense and stable structure by hot pressing, and forming a tight connection between the multi-walled carbon nanotubes, the surface resistance of the conductive film is reduced, so that the conductive film can perform better. Conductivity.

較佳地,進行熱壓時是於溫度50℃~110℃下施加1~200kg/cm2 的壓力熱壓30秒~30分鐘,在本實施例中則是在溫度90℃下,施加100kg/cm2 的壓力進行熱壓10分鐘。為了確實去除PVA所含水分,當熱壓溫度設定為70℃時,熱壓時間不得少於10分鐘,最佳則是在溫度90℃下以壓力100kg/cm2 熱壓10分鐘。Preferably, when hot pressing is performed, a pressure of 1 to 200 kg/cm 2 is applied at a temperature of 50 ° C to 110 ° C for 30 seconds to 30 minutes, and in the present embodiment, 100 kg / is applied at a temperature of 90 ° C. The pressure of cm 2 was hot pressed for 10 minutes. In order to surely remove the moisture content of the PVA, when the hot pressing temperature is set to 70 ° C, the hot pressing time is not less than 10 minutes, and the best is hot pressing at a temperature of 90 ° C for 10 minutes at a pressure of 100 kg / cm 2 .

步驟107是清洗,是將具有導電薄膜與該第一披覆層30的基材片21先置於去離子水中潤洗5~30分鐘,並浸泡2小時換水,重複5次,再浸泡乙醇2小時,再於溫度60℃下抽真空,藉此可去除殘留在該等導電薄膜中的界面活性劑,以免殘留雜質造成該等導電薄膜的導電度降低。清洗完成並乾燥後,就能製得結合在該基材片21上的具優良可撓性之奈米碳管導電薄膜成品。Step 107 is cleaning, the substrate sheet 21 having the conductive film and the first coating layer 30 is firstly placed in deionized water for 5 to 30 minutes, and soaked for 2 hours for water, repeated 5 times, and then soaked in ethanol 2 After an hour, a vacuum is applied at a temperature of 60 ° C, whereby the surfactant remaining in the conductive films can be removed to prevent the residual impurities from causing a decrease in the conductivity of the conductive films. After the cleaning is completed and dried, a finished product of the excellent flexible carbon nanotube conductive film bonded to the substrate sheet 21 can be obtained.

參閱圖2與圖3,為本發明具優良可撓性之奈米碳管導電薄膜的製造方法的一第二較佳實施例,並包含下列步驟:步驟301是純化該奈米碳管組份中的該等多層壁奈米碳管。Referring to FIG. 2 and FIG. 3, a second preferred embodiment of the method for manufacturing an excellent flexible carbon nanotube conductive film of the present invention comprises the following steps: Step 301 is to purify the carbon nanotube component. The multilayered wall carbon nanotubes in the middle.

步驟302是配製一奈米碳管溶液20,將1重量份的奈米碳管組份及1重量份的界面活性劑組份分別加入1000~1000000重量份的溶劑中調配成黏度值介於1~50c.p的奈米碳管溶液20,該奈米碳管組份、界面活性劑與該溶劑的用量比例,及可用的界面活性劑與溶劑的種類都與該第一較佳實施例步驟102所述者相同,故不再贅述。Step 302 is to prepare a carbon nanotube solution 20, and add 1 part by weight of the carbon nanotube component and 1 part by weight of the surfactant component to 1000 to 1,000,000 parts by weight of the solvent respectively to prepare a viscosity value of 1 ~50c.p carbon nanotube solution 20, the ratio of the carbon nanotube component, the surfactant to the solvent, and the types of surfactants and solvents available are the same as the steps of the first preferred embodiment 102 is the same, so it will not be described again.

步驟303是透明可撓材披覆,使一透明的可撓性材質塗佈至一放置於一基座22的基材片21上,並藉由旋轉該基座22,讓該可撓性材質在該基材片21上形成一第一披覆層30。Step 303 is a transparent flexible material coating, and a transparent flexible material is applied to a substrate sheet 21 placed on a base 22, and the flexible material is rotated by rotating the base 22. A first cladding layer 30 is formed on the substrate sheet 21.

步驟304是霧化,施加一超音波霧化頻率於該奈米碳管溶液20,使該奈米碳管溶液20霧化成多數個分散且挾帶有該等奈米碳管的霧化顆粒23,並提供一攜帶氣體24使該等霧化顆粒23沿一預定路徑傳送。Step 304 is atomization, applying an ultrasonic atomization frequency to the carbon nanotube solution 20, and atomizing the carbon nanotube solution 20 into a plurality of atomized particles 23 dispersed with the carbon nanotubes. And carrying a carrier gas 24 to transport the atomized particles 23 along a predetermined path.

步驟305是旋轉塗佈,將該等霧化顆粒23引導至已塗佈有該第一披覆層30的該基座22上方,再藉由旋轉該基座22,使該等霧化顆粒23均勻地塗佈於該第一披覆層30上,進而形成一與該第一披覆層30相結合的導電薄膜。Step 305 is spin coating, guiding the atomized particles 23 onto the susceptor 22 to which the first cladding layer 30 has been coated, and rotating the susceptor 22 to make the atomized particles 23 The first coating layer 30 is uniformly applied to form a conductive film combined with the first cladding layer 30.

步驟306是熱壓,是於預定溫度下對含有該導電薄膜與該第一披覆層30的基材片21施加預定壓力,用以使該導電薄膜被壓密緊實,及使該等奈米碳管被壓擠入該第一披覆層30,而與該第一披覆層30形成緊密結合。Step 306 is hot pressing, applying a predetermined pressure to the substrate sheet 21 containing the conductive film and the first cladding layer 30 at a predetermined temperature, so that the conductive film is compacted and compacted, and the The carbon nanotube is pressed into the first cladding layer 30 to form a tight bond with the first cladding layer 30.

步驟303~步驟306的內容,包含可使用的物質及各項製造條件或參數與前述第一較佳實施例的步驟103~步驟106相同,故不再贅述。The contents of the steps 303 to 306, including the usable substances and the various manufacturing conditions or parameters, are the same as the steps 103 to 106 of the first preferred embodiment, and therefore will not be described again.

步驟307是清洗,是將具有導電薄膜與該第一披覆層30的基材片21先置於去離子水中潤洗5~30分鐘,並浸泡2小時換水,重複5次,再浸泡乙醇2小時,再於溫度60℃下抽真空,藉此可去除殘留在該等導電薄膜中的界面活性劑,以免殘留雜質造成該等導電薄膜的導電度降低。需要補充說明的是,在進行清洗步驟之前,需先進行一次熱壓,以增強薄膜的力學強度及避免薄膜在清洗過程中受損。Step 307 is cleaning. The substrate sheet 21 having the conductive film and the first coating layer 30 is firstly placed in deionized water for 5 to 30 minutes, and soaked for 2 hours for water exchange, repeated 5 times, and then soaked in ethanol 2 After an hour, a vacuum is applied at a temperature of 60 ° C, whereby the surfactant remaining in the conductive films can be removed to prevent the residual impurities from causing a decrease in the conductivity of the conductive films. It should be added that before the cleaning step, a hot pressing is required to enhance the mechanical strength of the film and to avoid damage to the film during the cleaning process.

該第二較佳實施例與該第一較佳實施例的主要差別在於:以旋轉塗佈在該第一披覆層30上形成該導電薄膜後,還進一步在該導電薄膜上形成一第二披覆層。The main difference between the second preferred embodiment and the first preferred embodiment is that after the conductive film is formed on the first cladding layer 30 by spin coating, a second film is further formed on the conductive film. Covered layer.

步驟308形成該第二披覆層,是將一透明可撓性材質塗佈至該導電薄膜上,以形成該第二披覆層。較佳地,該第二披覆層是由一選自下列群組中的可撓性材質所製成:聚乙烯醇、聚丙烯酸、聚乙二醇、聚甲基丙烯酸甲酯,及聚碳酸酯。在該較佳實施例,該第二披覆層是由聚乙烯醇所製成。Step 308 forms the second cladding layer by coating a transparent flexible material onto the conductive film to form the second cladding layer. Preferably, the second coating layer is made of a flexible material selected from the group consisting of polyvinyl alcohol, polyacrylic acid, polyethylene glycol, polymethyl methacrylate, and polycarbonate. ester. In the preferred embodiment, the second coating layer is made of polyvinyl alcohol.

其中,為了使所製得的導電薄膜維持預定的導電度,該第二披覆層厚度較佳是低於30nm,藉此,使CNT仍可突出該第二披覆層表面,而可避免電阻極劇上升。因此,旋轉塗佈的條件是將分子量27000~32000的PVA配製成濃度50mg/L,每次滴加量為0.25ml,在形成該第一、第二披覆層的過程中是控制該旋轉基座依序進行500r.p.m.、30s,1000r.p.m.、60s,及6000r.p.m.、180s的旋轉塗佈。利用旋轉塗佈時間的長短可控制PVA所形成的第一、第二披覆層的厚度,通常該第一披覆層厚度要大於該第二披覆層的厚度,以使MWNT在步驟306熱壓時能部分沉入其中而與該第一披覆層形成緊密結合。該第二披覆層主要是保護功能,且不能阻礙表面的導電度,所以其厚度必須要薄(低於30nm)。Wherein, in order to maintain the predetermined conductivity of the prepared conductive film, the thickness of the second cladding layer is preferably less than 30 nm, whereby the CNT can still protrude from the surface of the second cladding layer, and the resistance can be avoided. The drama has risen. Therefore, the conditions of spin coating are to prepare a PVA having a molecular weight of 27,000 to 32,000 to a concentration of 50 mg/L, and the amount of each drop is 0.25 ml, which is controlled during the formation of the first and second coating layers. The susceptor was spin-coated at 500 r. pm, 30 s, 1000 rpm, 60 s, and 6000 r. pm, 180 s. The thickness of the first and second cladding layers formed by the PVA can be controlled by the length of the spin coating time. Usually, the thickness of the first cladding layer is greater than the thickness of the second cladding layer, so that the MWNT is hot in step 306. The pressing portion can partially sink therein to form a tight bond with the first cladding layer. The second cladding layer is primarily a protective function and does not impede the conductivity of the surface, so its thickness must be thin (less than 30 nm).

步驟309是熱壓,是於預定溫度下對含有該導電薄膜、該第一披覆層30及該第二披覆層的基材21施加預定壓力,用以使該導電薄膜被壓密緊實,及使該第一披覆層30、第二披覆層靠向該導電薄膜擠壓,進而使該等奈米碳管與該第一、第二披覆層形成緊密結合。Step 309 is hot pressing, applying a predetermined pressure to the substrate 21 containing the conductive film, the first cladding layer 30 and the second cladding layer at a predetermined temperature, so that the conductive film is compacted and compacted. And pressing the first cladding layer 30 and the second cladding layer against the conductive film, so that the carbon nanotubes are tightly bonded to the first and second coating layers.

值得說明的是,為了確保CNT可突出該第二披覆層表面,於熱壓完成後,還利用超音波霧化水氣並在轉速3000r.p.m下清洗該導電薄膜表面,以洗去最表面的PVA。It is worth noting that in order to ensure that the CNT can protrude the surface of the second coating layer, after the hot pressing is completed, the surface of the conductive film is washed by ultrasonic waves and the surface of the conductive film is washed at a rotation speed of 3000 r. PVA.

較佳地,進行熱壓時是於溫度60℃~90℃下施加75~125kg/cm2 的壓力熱壓30分鐘,在本實施例中則是在溫度90℃下,施加100kg/cm2 的壓力進行熱壓10分鐘。熱壓完成後,就能製得結合在該基材片21上的具優良可撓性之奈米碳管導電薄膜成品。Preferably, when hot pressing is performed, a pressure of 75 to 125 kg/cm 2 is applied at a temperature of 60 ° C to 90 ° C for 30 minutes, and in the present embodiment, 100 kg / cm 2 is applied at a temperature of 90 ° C. The pressure was hot pressed for 10 minutes. After the hot pressing is completed, a finished product of the excellent flexible carbon nanotube conductive film bonded to the substrate sheet 21 can be obtained.

<具體例><Specific example>

(1)純化1g的多層壁奈米碳管(MWNT):先配製6M的濃鹽酸溶液250ml,再將1g的MWNT投入該鹽酸溶液中,並攪拌24小時,再以沉澱法連續地水洗6次,接著,再重新配製6M鹽酸250ml,再以前述的酸洗及水洗方式繼續純化MWNT,如此重覆三次,純化完成的MWNT分別在溫度80℃,12小時及溫度250℃,24小時的條件下進行真空乾燥,再置入氮氣烘箱中以溫度400℃烘乾。(1) Purification of 1 g of multi-layered wall carbon nanotubes (MWNT): first prepare 250 ml of 6 M concentrated hydrochloric acid solution, then put 1 g of MWNT into the hydrochloric acid solution, stir for 24 hours, and then continuously wash 6 times by precipitation. Then, reconstitute 250 ml of 6M hydrochloric acid, and then continue to purify MWNT by the above-mentioned pickling and washing, so that the MWNT is purified three times at a temperature of 80 ° C, 12 hours and a temperature of 250 ° C for 24 hours. It was vacuum dried and placed in a nitrogen oven to dry at a temperature of 400 °C.

(2)配置10mg/L的MWNT水溶液:於1L的去離子水中投入10mg的MWNT及10mg的SDS,可先以功率750W的探頭式超音波震盪分散器(機型:Sonics & Materials,Inc.「SONICSVCX750」)對該MWNT溶液以20%功率作用5分鐘,及30%功率作用5分鐘,以防止該等多層壁奈米碳管聚集並呈均勻分散的狀態。(2) Configure 10mg/L MWNT aqueous solution: Put 10mg MWNT and 10mg SDS in 1L deionized water, first use the probe 750W ultrasonic shock diffuser (model: Sonics & Materials, Inc. SONICS VCX750") The MWNT solution was applied at 20% power for 5 minutes and 30% power for 5 minutes to prevent the multi-walled nanotubes from collecting and being uniformly dispersed.

(3)透明可撓材披覆:將聚乙烯醇水溶液塗佈於放置在一旋轉基座的一基材片上,以形成一第一披覆層。進行塗佈前須先清洗該基材片,清洗方式是將該基材片置於基座上,(i)以去離子水分別於轉速300r.p.m下潤洗30秒、轉速500r.p.m下清洗40秒,(ii)再以乙醇分別於轉速800r.p.m下清洗60秒、轉速1200r.p.m下清洗60秒,(iii)最後再以轉速4000r.p.m旋轉120秒甩乾,並重複前述(i)~(iii)的步驟二次。其中,該基材片的大小為4cmx4cm。(3) Transparent flexible material coating: A polyvinyl alcohol aqueous solution is coated on a substrate sheet placed on a spin base to form a first coating layer. The substrate sheet must be cleaned before coating, by cleaning the substrate sheet on the susceptor, (i) rinsing with deionized water at a speed of 300 r. pm for 30 seconds, and rotating at 500 rpm. 40 seconds, (ii) then wash with ethanol at 800r.pm for 60 seconds, 1200r.pm for 60 seconds, (iii) finally rotate at 4000r.pm for 120 seconds, and repeat the above (i ) The steps of ~(iii) are twice. The size of the substrate sheet was 4 cm x 4 cm.

接著,就能進行聚乙烯醇第一披覆層的披覆,先配製50mg/L的聚乙烯醇水溶液(分子量:27000~32000)待用,滴約5滴玻璃滴管量的PVA水溶液至該基材片上,藉由控制該基材片的轉速,使該PVA水溶液分別在該基材片產生不同作用,首先,以轉速450r.p.m轉動30秒~60秒時,可使PVA水溶液在中央凝聚、在轉速600r.p.m下轉動15秒~30秒則使PVA水溶液進行初步拓展、在轉速900r.p.m下轉動30秒~45秒,以進一步延伸,在轉速4500r.p.m下轉動90秒~180秒以形成該第一披覆層薄膜,再於轉速6000r.p.m下轉動120秒以上以進行初步乾燥,最後,將形成於該基材片上的第一披覆層連同該基材片一起置於烘箱,並以溫度150℃烘3小時,藉此,可讓該第一披覆層進行再結晶及消除應力。Then, the first coating layer of polyvinyl alcohol can be coated, and a 50 mg/L aqueous solution of polyvinyl alcohol (molecular weight: 27000-32000) is prepared for use, and about 5 drops of a glass dropper of PVA is added to the solution. On the substrate sheet, by controlling the rotation speed of the substrate sheet, the PVA aqueous solution respectively has different effects on the substrate sheet. First, when the rotation speed is 450 r.pm for 30 seconds to 60 seconds, the PVA aqueous solution can be condensed in the center. Rotate at a speed of 600r.pm for 15 seconds to 30 seconds to make the PVA aqueous solution expand initially, rotate at 900r.pm for 30 seconds to 45 seconds to further extend, and rotate at a speed of 4500 r.pm for 90 seconds to 180 seconds. To form the first coating film, and then rotate at a speed of 6000 r. pm for more than 120 seconds to perform preliminary drying. Finally, the first coating layer formed on the substrate sheet is placed in the oven together with the substrate sheet. And baking at a temperature of 150 ° C for 3 hours, whereby the first coating layer can be recrystallized and stress relieved.

(4)霧化:將超音波震動片置於液面下3.0cm的深度處,並使溶液的溫度維持在30℃,提供1.65MHz的超音波霧化頻率作用於該奈米碳管溶液,則可達到25~30ml/hr的霧化率,且霧化顆粒的粒徑約為3μm,利用一與盛裝MWNT溶液的容器相連通的輸氣管送入攜帶氣體,該攜帶氣體的流速為22L/min。(4) Atomization: The ultrasonic vibration plate was placed at a depth of 3.0 cm below the liquid surface, and the temperature of the solution was maintained at 30 ° C, and an ultrasonic atomization frequency of 1.65 MHz was supplied to the carbon nanotube solution. The atomization rate of 25~30ml/hr can be achieved, and the atomized particle has a particle size of about 3μm. The carrier gas is fed into the gas pipe connected to the container containing the MWNT solution, and the flow rate of the carrier gas is 22L/ Min.

(5)旋轉塗佈:該攜帶氣體將該等霧化顆粒引導到一旋轉塗佈機的基座上,放置於該基座上的基材片已披覆有該第一披覆層並與該基座同步旋轉,該等霧化顆粒是塗佈於該第一披覆層上,以形成一與該第一披覆層相結合的導電薄膜。(5) spin coating: the carrier gas guides the atomized particles onto a susceptor of a spin coater, and the substrate sheet placed on the susceptor has been coated with the first cladding layer and The susceptor rotates synchronously, and the atomized particles are coated on the first cladding layer to form a conductive film combined with the first cladding layer.

參閱圖4,進行超音波霧化顆粒的旋轉塗佈時,是先經一次濕潤旋轉塗佈與一次初步成膜旋轉塗佈的預處理,再重複進行至少一次的再成膜旋轉塗佈。其中,進行濕潤旋轉塗佈的轉速為300r.p.m與450r.p.m.相交替數次,進行初步成膜旋轉塗佈的轉速則為自450r.p.m.依階梯式上升到6000r.p.m.後,再進入再成膜旋轉塗佈。塗佈進行的過程中,該基座是以如圖4所示的階段式周期進行連續旋轉,且區間(I)表示濕潤旋轉塗佈的轉速變化,區間(II)表示初步成膜旋轉塗佈的階梯式轉速變化,區間(III)則為再成膜旋轉塗佈的階梯式轉速變化,藉此,使該等霧化顆粒能較均勻地塗佈至該第一披覆層表面,且能透過旋轉塗佈的時間長短控制該導電薄膜的成膜厚度。在圖4中,不同階段別分別以不同字母表示,並將其所代表的轉速與時間整理如下表1,表1中各階段的時間不應受限,可再依實際需求進行調整。Referring to Fig. 4, when the spin coating of the ultrasonic atomized particles is performed, the pretreatment by one wet spin coating and one preliminary film spin coating is repeated, and the recoating spin coating is repeated at least once. Among them, the rotational speed of the wet spin coating is 300r.pm and 450r.pm alternately, and the rotational speed of the preliminary film spin coating is increased from 450r.pm to 6000r.pm, and then enters again. Film formation spin coating. During the coating process, the susceptor is continuously rotated in a staged cycle as shown in FIG. 4, and the interval (I) represents the change in the rotational speed of the wet spin coating, and the interval (II) represents the preliminary film forming spin coating. The stepwise rotation speed change, the interval (III) is a stepwise rotation speed change of the re-filming rotary coating, thereby enabling the atomized particles to be uniformly applied to the surface of the first cladding layer, and The film thickness of the conductive film is controlled by the length of time of spin coating. In Figure 4, the different stages are represented by different letters, and the speed and time represented by them are organized as shown in Table 1. The time of each stage in Table 1 should not be limited, and can be adjusted according to actual needs.

旋轉塗佈的時間是控制在10分鐘~60分鐘,以藉由控制旋轉塗佈的時間讓所形成的多層壁奈米碳管導電薄膜能達到設計的目的,其中,主要是藉由調整c~f的時間來調整導電薄膜的厚度。The spin coating time is controlled from 10 minutes to 60 minutes to control the spin coating time to achieve the design of the multilayered wall carbon nanotube conductive film, which is mainly by adjusting c~ The time of f is used to adjust the thickness of the conductive film.

(6)熱壓:將一熱壓機的上下壓模的溫度升溫至70℃,並維持恆溫1小時,將溫度的上下變動控制在±0.25℃以內,裁剪四片5cm×5cm的PET薄片,並分別以去離子水、乙醇、去離子水、丙酮、去離子水的清洗順序潤洗該等PET薄片,再以上下各二片的方式夾住已設置有該第一披覆層與該導電薄膜的基材片,再取10cm×10cm的不銹鋼夾具上下疊合於PET薄片外,置於該熱壓機的上下壓模之間,並施加100kg/cm2 的壓力熱壓30分鐘。(6) Hot pressing: the temperature of the upper and lower stampers of a hot press is raised to 70 ° C, and the temperature is maintained for 1 hour, and the temperature fluctuation is controlled within ±0.25 ° C, and four pieces of 5 cm × 5 cm PET sheets are cut. And rinsing the PET sheets in a cleaning sequence of deionized water, ethanol, deionized water, acetone, deionized water, respectively, and clamping the first coating layer and the conductive layer in the manner of the above two pieces. The substrate sheet of the film was placed on top of the PET sheet by a stainless steel jig of 10 cm × 10 cm, placed between the upper and lower stampers of the hot press, and subjected to a pressure of 100 kg/cm 2 for 30 minutes.

(7)清洗:以前述步驟107所述的方式清洗熱壓完成的基材片,就能製得結合該第一披覆層的具優良可撓性之奈米碳管導電薄膜成品。(7) Cleaning: The hot-pressed substrate sheet is cleaned in the manner described in the foregoing step 107, and a finished product of the excellent flexible carbon nanotube conductive film incorporating the first coating layer can be obtained.

參閱圖6,為一掃描式電子顯微鏡照相圖,說明以PVA材質為該第一披覆層,再以該第一披覆層為基底,在其上塗佈該等奈米碳管而形成可撓性奈米碳管導電薄膜成品的微觀放大圖,該等碳米碳管是分別與該第一披覆層相結合。Referring to FIG. 6 , a scanning electron microscope photograph is taken to illustrate that the first cladding layer is made of PVA, and the first cladding layer is used as a base, and the carbon nanotubes are coated thereon to form A microscopic enlarged view of the finished flexible film of the carbon nanotubes, which are respectively combined with the first cladding layer.

若要製作如該第二較佳實施例所示的奈米碳管導電薄膜成品時,則只要在(7)清洗後,再進行如前述步驟307所述地在該導電薄膜形成第二披覆層,並將(6)熱壓移到形成第二披覆層後再進行,就能製得以PVA封裝的奈米碳管導電薄膜成品,如圖7所示,即為依序在該基材片上形成第一披覆層、奈米碳管導電薄膜及第二披覆層後,再熱壓後所形成的導電薄膜成品的微觀放大圖,顯示該等奈米碳管與該第一、第二披覆層相結合,且部分受該第二披覆層包覆保護的情形,由於在該奈米碳管導電薄膜上形成該第二披覆層,使圖7的奈米碳管的影像與圖6相比,相對較為模糊。To produce the finished carbon nanotube conductive film as shown in the second preferred embodiment, the second coating is formed on the conductive film as described in the foregoing step 307 after (7) cleaning. After the layer is pressed and (6) is hot pressed to form the second cladding layer, the finished carbon nanotube conductive film of the PVA package can be prepared, as shown in FIG. A microscopic enlarged view of the finished conductive film formed by forming a first cladding layer, a carbon nanotube conductive film and a second cladding layer on the sheet, and showing the carbon nanotubes and the first and the first In the case where the two cladding layers are combined and partially protected by the second coating layer, the image of the carbon nanotube of FIG. 7 is obtained by forming the second coating layer on the carbon nanotube conductive film. Compared with Figure 6, it is relatively ambiguous.

<耐曲撓性測試><Flexibility test>

參閱圖5,將所製得的結合該第一披覆層與該導電薄膜的基材片裁成1cm×2cm的試片41,並量測該試片41未受彎折前的導電度。接著,將該試片41較長邊的二相反側分別固定至一固定夾座42,及一與該固定夾座41相間隔的活動夾座43,再使該活動夾座43靠向該固定夾座41位移至該試片41長邊的二相反側的間距為1cm,再進一步位移到該試片41長邊的二相反側的間距為0.5cm為止,該試片41會隨著該活動夾座43的活動而曲撓彎折,再使該活動夾座43遠離該固定夾座42位移,並使該試片41回復為平直狀態,量測該試片41受彎折後的片電阻,重複前述使該試片41曲撓彎折的動作,且該試片41每次回復到平直狀態後都再測一次片電阻。藉由片電阻的變化可相應地反應出導電度的變化,片電阻值越穩定顯示導電度也較穩定。Referring to Fig. 5, the prepared substrate sheet in which the first cladding layer and the conductive film were bonded was cut into a test piece 41 of 1 cm × 2 cm, and the conductivity of the test piece 41 before being bent was measured. Next, the two opposite sides of the longer side of the test piece 41 are respectively fixed to a fixed holder 42 and a movable holder 43 spaced apart from the fixed holder 41, and the movable holder 43 is fixed toward the fixed holder 43 The holder 41 is displaced to the opposite side of the long side of the test piece 41 by a distance of 1 cm, and further displaced until the distance between the opposite sides of the long side of the test piece 41 is 0.5 cm, and the test piece 41 follows the activity. The movable seat 43 is flexed and bent, and the movable clamp 43 is displaced away from the fixed clamp 42 to return the test piece 41 to a flat state, and the bent piece of the test piece 41 is measured. The electric resistance repeats the above-described operation of bending the test piece 41, and the test piece 41 is again measured for the sheet resistance after returning to the straight state. The change in conductivity can be correspondingly reflected by the change in sheet resistance, and the more stable the sheet resistance value, the more stable the conductivity is.

測試結果顯示:曲撓100次後,該試片41的片電阻上升5%,曲撓250次後,該試片41的片電阻上升10%,曲撓500次後,該試片41的片電阻上升10%。另外將前述<具體例>中的步驟(3)省略,製作一未塗佈該第一披覆層且僅具有該導電薄膜的基材片作為對照組,並將其裁成與前述試片41相同的大小,以相同的方式測試該對照組的導電薄膜基材片經多次曲撓後,其導電度的變化情形,結果顯示,曲撓100次後,其片電阻上升10%,曲撓250次後,其片電阻上升20%,曲撓500次後,其片電阻上升20%。The test results show that the sheet resistance of the test piece 41 is increased by 5% after the bending of 100 times, and the sheet resistance of the test piece 41 is increased by 10% after the bending of the test piece 41, and the sheet of the test piece 41 is bent 500 times. The resistance rises by 10%. Further, the step (3) in the above <Specific Example> is omitted, and a substrate sheet which is not coated with the first coating layer and has only the conductive film is prepared as a control group, and is cut into the test piece 41 as described above. With the same size, the conductivity of the conductive film substrate sheet of the control group was tested in the same manner after repeated bending, and the results showed that after 100 times of bending, the sheet resistance increased by 10%. After 250 times, the sheet resistance increased by 20%, and after 500 bends, the sheet resistance increased by 20%.

其中,未含有PVA材質之第一披覆層的測試片是以CNT/PET表示,含有第一披覆層的測試片則是以PVA/CNT/PET表示,未進行曲撓性測試前的原始片電阻分別為:CNT/PET≒100Ω/□(其中,□=cm2 ,即Ω/□=Ω/cm2 )、PVA/CNT/PET≒150Ω/□。由於前面幾次的曲撓,會使CNT/PET與PVA/CNT/PET的片電阻皆呈不穩定的變化,無法作明確的比較,因此,先分別將CNT/PET與PVA/CNT/PET的試片各折彎50次使其片電阻(導電度)穩定後,再正式進入耐曲撓性測試。折彎50次後穩定的片電阻值分別為CNT/PET≒3KΩ/□、PVA/CNT/PET≒360Ω/□。Among them, the test piece not containing the first coating layer of the PVA material is represented by CNT/PET, and the test piece containing the first coating layer is represented by PVA/CNT/PET, and the original piece before the flexural test is not performed. The electric resistance was: CNT/PET ≒ 100 Ω/□ (where □=cm 2 , that is, Ω/□=Ω/cm 2 ), and PVA/CNT/PET ≒ 150 Ω/□. Due to the previous several twists, the sheet resistance of CNT/PET and PVA/CNT/PET are unstable, which cannot be clearly compared. Therefore, CNT/PET and PVA/CNT/PET are separately used. After the test piece was bent 50 times to stabilize the sheet resistance (conductivity), it was officially entered into the flexural resistance test. The sheet resistance values after stabilization for 50 times were CNT/PET ≒ 3 K Ω / □ and PVA / CNT / PET ≒ 360 Ω / □, respectively.

(下表中的曲撓次數並未包含預先折彎50次的次數。)(The number of flexings in the table below does not include the number of times of pre-bending 50 times.)

由以上結果可說明披覆有PVA的第一披覆層的試片相較於未披覆有PVA披層層者,可有效降低片電阻的上升比率,亦即可有效降低導電度的下降比率,使所製得的導電薄膜的耐曲撓性提升並有較穩定的可靠度。From the above results, it can be explained that the test piece coated with the PVA first coating layer can effectively reduce the rise ratio of the sheet resistance compared with the uncoated PVA layer, and can effectively reduce the decrease ratio of the conductivity. The flexural flexibility of the prepared conductive film is improved and has a relatively stable reliability.

<在550nm波長光線照射下的透光率><Light transmittance at 550 nm wavelength light>

由於PVA原來的透光率高達95%/cm以上,如果無氣泡與裂孔產生,則當其厚度為1μm以下時,透光率可高於99.9%,因此塗佈PVA對該導電薄膜的透光率並無明顯影響。量測結果亦顯示結合該第一披覆層與該導電薄膜的基材片,在550mm的透光率為90%,而結合有該第一、第二披覆層與該導電薄膜的基材片,在550mm的透光率則為89%,與目前業界使用的導電薄膜的550nm的透光率規格70%~90%相較,顯示本發明製造方法所製得的奈米碳管導電薄膜已具有可供實際應用的價值。Since the original light transmittance of PVA is as high as 95%/cm or more, if no bubbles and cracks are generated, when the thickness is 1 μm or less, the light transmittance may be higher than 99.9%, so the light transmittance of the conductive film is coated by PVA. There is no significant impact on the rate. The measurement result also shows that the substrate sheet combined with the first cladding layer and the conductive film has a light transmittance of 90% at 550 mm, and the substrate with the first and second cladding layers and the conductive film is bonded. The sheet has a light transmittance of 89% at 550 mm, which is compared with the light transmittance specification of 550 nm of 70% to 90% of the conductive film currently used in the industry, and shows the carbon nanotube conductive film produced by the manufacturing method of the present invention. Has value for practical use.

歸納上述,本發明具優良可撓性之奈米碳管導電薄膜的製造方法,可獲致下述的功效及優點,故能達到本發明的目的:In summary, the method for producing a carbon nanotube conductive film having excellent flexibility of the present invention can attain the following effects and advantages, and thus achieve the object of the present invention:

一、藉由結合該等多層壁奈米碳管與可撓性材質的第一披覆層30,或結合該等多層壁奈米碳管與可撓性材質的第一披覆層30、第二披覆層,使最終所製得的可撓性導電薄膜成品,除了能透過該導電薄膜的該等奈米碳管表現出透光性與導電性等優良的光電材料特性外,還能配合該第一披覆層30,或第一、第二披覆層形成較強化的結構,並能表現更佳的可撓曲特性,使本發明製造方法能夠製造出具優良可撓性之奈米碳管導電薄膜,進而能夠提升相關應用產品的可靠度與耐用性。1. The first cladding layer 30 of the flexible material is combined with the multi-layered wall carbon nanotubes, or the first cladding layer 30 of the flexible material is combined with the multi-layered wall carbon nanotubes The second coating layer enables the finished flexible conductive film to be finished, and the carbon nanotubes which pass through the conductive film exhibit excellent optical material properties such as light transmittance and conductivity, and can also be matched. The first cladding layer 30, or the first and second cladding layers, form a stronger structure and can exhibit better flexibility, so that the manufacturing method of the present invention can produce nano carbon with excellent flexibility. The conductive film is used to enhance the reliability and durability of related applications.

二、以本發明製造方法所製出的奈米碳管導電薄膜,其在550nm波長光線的穿透率與電阻值仍然符合一般導電薄膜的規格,而確實具有在商業應用的實際價值。2. The carbon nanotube conductive film produced by the manufacturing method of the present invention has a transmittance and resistance value of light at a wavelength of 550 nm which still conforms to the specifications of a general conductive film, and indeed has practical value in commercial applications.

三、利用本發明的製造方法,能夠以成本相對較低的多層壁奈米碳管為原料,及以相對於現有製造技術,較容易取得的設備且較簡便的製程製出有優良可撓性之奈米碳管導電薄膜產品,而具有可降低製造成本的優點。Third, by using the manufacturing method of the present invention, it is possible to produce a multilayer flexible carbon nanotube having a relatively low cost as a raw material, and to have excellent flexibility in a relatively easy process with respect to equipment which is relatively easy to obtain with respect to existing manufacturing techniques. The carbon nanotube conductive film product has the advantage of reducing the manufacturing cost.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

20...奈米碳管溶液20. . . Nano carbon tube solution

21...基材片twenty one. . . Substrate sheet

22...基座twenty two. . . Pedestal

23...霧化顆粒twenty three. . . Atomized particle

24...攜帶氣體twenty four. . . Carrying gas

25...霧化容器25. . . Atomizing container

26...虹吸管26. . . siphon

27...超音波元件27. . . Ultrasonic component

28...貯液容器28. . . Liquid container

29...升降座29. . . Lifting seat

30...第一披覆層30. . . First coating

41...試片41. . . Audition

42...固定夾座42. . . Fixed clamp

43...活動夾座43. . . Activity holder

圖1是一說明本發明具優良可撓性之奈米碳管導電薄膜的製造方法一第一較佳實施例的流程圖;1 is a flow chart showing a first preferred embodiment of a method for manufacturing a carbon nanotube conductive film having excellent flexibility according to the present invention;

圖2是一說明本發明具優良可撓性之奈米碳管導電薄膜的製造方法一第二較佳實施例的流程圖;2 is a flow chart showing a second preferred embodiment of a method for manufacturing a carbon nanotube conductive film having excellent flexibility according to the present invention;

圖3是一示意圖,說明在該第一、第二較佳實施例中所使用的裝置的組合情形;Figure 3 is a schematic view showing the combination of the devices used in the first and second preferred embodiments;

圖4是一曲線示意圖,說明該第一、第二較佳實施例進行旋轉塗佈時,不同時間所設定轉速的變化情形;Figure 4 is a schematic view showing the change of the rotational speed set at different times during the spin coating of the first and second preferred embodiments;

圖5是一示意圖,說明以本發明製造方法所製出的導電薄膜試片進行曲撓性測試的過程;Figure 5 is a schematic view showing the process of conducting a flexural test on a conductive film test piece produced by the manufacturing method of the present invention;

圖6是一掃描式電子顯微鏡照像圖,說明該導電薄膜的該等奈米碳管結合於該第一披覆層的情形;及Figure 6 is a scanning electron microscope photograph showing the case where the carbon nanotubes of the conductive film are bonded to the first cladding layer;

圖7是一掃描式電子顯微鏡照像圖,說明該導電薄膜的該等奈米碳管與該第一、第二披覆層相結合的情形。Fig. 7 is a scanning electron microscope photograph showing the case where the carbon nanotubes of the electroconductive thin film are combined with the first and second cladding layers.

Claims (30)

一種具優良可撓性之奈米碳管導電薄膜的製造方法,包含下列步驟:(i)配製一奈米碳管溶液,將預定量的奈米碳管組份加入一預定量的溶劑中調配成黏度值介於1~50c.p的奈米碳管溶液,且該奈米碳管組份具有多數個多層壁奈米碳管;(ii)透明可撓材披覆,使一透明的可撓性材質塗佈至一放置於一基座的基材片上,並藉由旋轉該基座,讓該可撓性材質在該基材片上形成一第一披覆層;(iii)霧化,施加一超音波霧化頻率於該奈米碳管溶液,使該奈米碳管溶液霧化成多數個分散且挾帶有該等奈米碳管的霧化顆粒,並提供一攜帶氣體使該等霧化顆粒沿一預定路徑傳送,其中,該等霧化顆粒的粒徑是介於0.5μm~50μm;及(iv)旋轉塗佈,將該等霧化顆粒引導至已塗佈有該第一披覆層的該基座上方,再藉由旋轉該基座,使該等霧化顆粒均勻地塗佈於該第一披覆層上,進而形成一與該第一披覆層相結合的導電薄膜。A method for manufacturing a carbon nanotube conductive film with excellent flexibility, comprising the steps of: (i) preparing a carbon nanotube solution, and adding a predetermined amount of carbon nanotube components to a predetermined amount of solvent. a carbon nanotube solution having a viscosity value of 1 to 50 c.p, and the carbon nanotube component has a plurality of multi-layered wall carbon nanotubes; (ii) a transparent flexible material coating to make a transparent The flexible material is applied to a substrate sheet placed on a base, and the flexible material is formed on the substrate sheet by rotating the base to form a first coating layer; (iii) atomizing, Applying an ultrasonic atomization frequency to the carbon nanotube solution, atomizing the carbon nanotube solution into a plurality of atomized particles dispersed and carrying the carbon nanotubes, and providing a carrier gas to enable the The atomized particles are transported along a predetermined path, wherein the atomized particles have a particle diameter of from 0.5 μm to 50 μm; and (iv) spin coating, the atomized particles are guided to have been coated with the first Above the pedestal of the coating layer, the atomized particles are evenly coated on the first coating layer by rotating the pedestal. Forming a conductive thin film in combination with the first cladding layer. 依據申請專利範圍第1項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(i)中,該溶劑為一選自下列群組中的液體:水、乙醇、異丙醇及丙酮。The method for producing an excellent flexible carbon nanotube conductive film according to claim 1, wherein in the step (i), the solvent is a liquid selected from the group consisting of water, Ethanol, isopropanol and acetone. 依據申請專利範圍第2項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(ii)中,該第一披覆層是由一選自下列群組中的可撓性材質所製成:為聚乙烯醇、聚丙烯酸、聚乙二醇、聚甲基丙烯酸甲酯,及聚碳酸酯。The method for producing an excellent flexible carbon nanotube conductive film according to claim 2, wherein in the step (ii), the first cladding layer is selected from the group consisting of Made of flexible material: polyvinyl alcohol, polyacrylic acid, polyethylene glycol, polymethyl methacrylate, and polycarbonate. 依據申請專利範圍第3項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,製成該第一披覆層的可撓性材質為聚乙烯醇。The method for producing an excellent flexible carbon nanotube conductive film according to claim 3, wherein the flexible material for forming the first coating layer is polyvinyl alcohol. 依據申請專利範圍第3項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,還包含一在步驟(iv)之後的步驟(a),步驟(a)是熱壓,是於預定溫度下對含有該導電薄膜與該第一披覆層的基材施加預定壓力,用以使該導電薄膜被壓密緊實,及使該等奈米碳管被壓擠入該第一披覆層,而與該第一披覆層形成緊密結合。The method for producing an excellent flexible carbon nanotube conductive film according to claim 3, further comprising a step (a) after the step (iv), wherein the step (a) is hot pressing, Applying a predetermined pressure to the substrate containing the conductive film and the first cladding layer at a predetermined temperature for compacting and compacting the conductive film, and pressing the carbon nanotubes into the first The coating layer forms a tight bond with the first coating layer. 依據申請專利範圍第5項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(a)中,是於溫度50℃~110℃下施加1~200kg/cm2 的壓力熱壓30秒~30分鐘。The method for producing an excellent flexible carbon nanotube conductive film according to claim 5, wherein in the step (a), the temperature is applied at a temperature of 50 ° C to 110 ° C of 1 to 200 kg / cm. The pressure of 2 is hot pressed for 30 seconds to 30 minutes. 依據申請專利範圍第6項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(a)中,是於溫度90℃下,施加壓力100kg/cm2 進行熱壓10分鐘。The method for producing an excellent flexible carbon nanotube conductive film according to claim 6, wherein in the step (a), the pressure is applied at a temperature of 90 ° C at a pressure of 100 kg/cm 2 . Press for 10 minutes. 依據申請專利範圍第3項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,還包含一在步驟(iv)之後的步驟(b),步驟(b)是形成一第二披覆層,是將一透明可撓性材質塗佈至該導電薄膜上,以形成該第二披覆層。The method for manufacturing an excellent flexible carbon nanotube conductive film according to claim 3, further comprising a step (b) after the step (iv), wherein the step (b) is forming a second In the coating layer, a transparent flexible material is coated on the conductive film to form the second coating layer. 依據申請專利範圍第8項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(b)中,該第二披覆層是由一選自下列群組中的可撓性材質所製成:聚乙烯醇、聚丙烯酸、聚乙二醇、聚甲基丙烯酸甲酯,及聚碳酸酯。The method for producing an excellent flexible carbon nanotube conductive film according to claim 8, wherein in the step (b), the second coating layer is selected from the group consisting of Made of flexible material: polyvinyl alcohol, polyacrylic acid, polyethylene glycol, polymethyl methacrylate, and polycarbonate. 依據申請專利範圍第9項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(b)中,製成該第二披覆層的可撓性材質為聚乙烯醇。The method for producing an excellent flexible carbon nanotube conductive film according to claim 9, wherein in the step (b), the flexible material of the second coating layer is a poly Vinyl alcohol. 依據申請專利範圍第9項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,還包含一在步驟(b)之後的步驟(c),步驟(c)是熱壓,是於預定溫度下對含有該導電薄膜、該第一披覆層及該第二披覆層的基材施加預定壓力,用以使該導電薄膜被壓密緊實,及使該第一、第二披覆層靠向該導電薄膜擠壓,進而使該等奈米碳管與該第一、第二披覆層形成緊密結合。The method for manufacturing an excellent flexible carbon nanotube conductive film according to claim 9 further comprising a step (c) after the step (b), wherein the step (c) is hot pressing, Applying a predetermined pressure to the substrate containing the conductive film, the first cladding layer and the second cladding layer at a predetermined temperature for compacting and compacting the conductive film, and making the first and second The coating layer is pressed against the conductive film to form a tight bond between the carbon nanotubes and the first and second coating layers. 依據申請專利範圍第11項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(c)中,是於溫度60~90℃下施加75~125kg/cm2 的壓力熱壓30分鐘。The method for producing an excellent flexible carbon nanotube conductive film according to claim 11, wherein in the step (c), 75 to 125 kg/cm 2 is applied at a temperature of 60 to 90 ° C. The pressure is hot pressed for 30 minutes. 依據申請專利範圍第12項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(c)中,實質上是於溫度90℃下,施加壓力100kg/cm2 進行熱壓10分鐘。The method for producing an excellent flexible carbon nanotube conductive film according to claim 12, wherein in the step (c), the pressure is substantially 100 kg/cm 2 at a temperature of 90 ° C. Hot pressing was carried out for 10 minutes. 依據申請專利範圍第12項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(i)中,該奈米碳管溶液還具有一預定量的界面活性劑組份,且該界面活性劑組份是用以防止該奈米碳管組份中的多層壁奈米碳管聚集。The method for producing an excellent flexible carbon nanotube conductive film according to claim 12, wherein in the step (i), the carbon nanotube solution further has a predetermined amount of a surfactant. The component, and the surfactant component is used to prevent aggregation of the multi-walled nanotubes in the carbon nanotube component. 依據申請專利範圍第14項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,該界面活性劑組份為一選自下列群組中的物質:醇之硫酸酯鹽、烷基磺酸鹽、α-烯烴磺酸鹽、第四級銨鹽、環氧乙烷系、聚氧乙烯烷基醚,及其等之組合。The method for producing an excellent flexible carbon nanotube conductive film according to claim 14, wherein the surfactant component is a substance selected from the group consisting of sulfate esters of alcohols. An alkyl sulfonate, an alpha olefin sulfonate, a fourth ammonium salt, an ethylene oxide system, a polyoxyethylene alkyl ether, and combinations thereof. 依據申請專利範圍第15項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,該界面活性劑組份為一選自於下列群組中的物質:C4 ~C18 之直鏈烷基磺酸鈉、C4 ~C18 之直鏈烷基磺酸鉀、C4 ~C18 之直鏈烷基硫酸鈉、C4 ~C18 之直鏈烷基硫酸鉀、C4 ~C18 之直鏈烷基苯磺酸鈉、C4 ~C18 之直鏈烷基苯磺酸鉀、C4 ~C18 之直鏈烷基苯硫酸鈉、C4 ~C18 之直鏈烷基苯硫酸鉀、C2 ~C16 之直鏈烷基四級銨鹽、α-烯烴磺酸鹽、烷基為C2 ~C16 之聚氧乙烯烷基醚,及其等之組合。The method for producing an excellent flexible carbon nanotube conductive film according to claim 15, wherein the surfactant component is a substance selected from the group consisting of C 4 ~ C 18 of the linear alkyl sulfonate, potassium linear alkyl sulfonate of C 4 ~ C 18 straight-chain alkyl sulfate of C 4 ~ C 18 straight-chain alkyl sulfate of C 4 ~ C 18, C 4 ~ C 18 linear sodium alkylbenzene sulfonate, C 4 ~ C 18 linear alkyl benzene sulfonate, C 4 ~ C 18 linear alkyl sodium benzene sulfate, C 4 ~ C 18 linear alkylbenzene sulfate, C 2 ~ C 16 straight-chain alkyl group of quaternary ammonium salts, alpha] -olefin sulfonates, polyoxyethylene alkyl is a C 2 ~ C 16 alkyl ethers of, and etc. combination. 依據申請專利範圍第16項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,該界面活性劑組份是選自於十二烷基磺酸鈉。The method for producing an excellent flexible carbon nanotube conductive film according to claim 16, wherein the surfactant component is selected from sodium dodecyl sulfate. 依據申請專利範圍第16項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(iii)中,該超音波霧化頻率為20KHz~2.45MHz。The method for producing an excellent flexible carbon nanotube conductive film according to claim 16, wherein in the step (iii), the ultrasonic atomization frequency is 20 kHz to 2.45 MHz. 依據申請專利範圍第18項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(iii)中,該超音波霧化頻率為1.65MHz。The method for producing an excellent flexible carbon nanotube conductive film according to claim 18, wherein in the step (iii), the ultrasonic atomization frequency is 1.65 MHz. 依據申請專利範圍第18項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(iii)中,該等霧化顆粒的粒徑是2μm~7μm。The method for producing a highly flexible carbon nanotube conductive film according to claim 18, wherein in the step (iii), the atomized particles have a particle diameter of 2 μm to 7 μm. 依據申請專利範圍第20項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(iii)中,該等霧化顆粒的粒徑實質上是3μm。The method for producing an excellent flexible carbon nanotube conductive film according to claim 20, wherein in the step (iii), the atomized particles have a particle diameter of substantially 3 μm. 依據申請專利範圍第21項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(iii)中,進行旋轉塗佈時,該基座是先經一次濕潤旋轉塗佈與一次初步成膜旋轉塗佈的預處理,再進行至少一次再成膜旋轉塗佈,在該再成膜旋轉塗佈中是依序經由一低速轉速、一中速轉速及一高速轉速的周期變換旋轉,且該低速、中速與高速轉速的比率為2~3:3~6:8~40。The method for producing an excellent flexible carbon nanotube conductive film according to claim 21, wherein in the step (iii), when the spin coating is performed, the susceptor is first wet-rotated. Coating and pre-processed spin coating pretreatment, and then performing at least one re-film spin coating, in the re-film spin coating, sequentially through a low speed, a medium speed and a high speed The cycle is rotated, and the ratio of the low speed, medium speed and high speed speed is 2~3:3~6:8~40. 依據申請專利範圍第22項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(iii)中,該低速轉速為300~450r.p.m.,該中速轉速為450~900r.p.m.,及該高速轉速為1200~6000r.p.m.。According to the manufacturing method of the excellent flexible carbon nanotube conductive film according to claim 22, in the step (iii), the low-speed rotation speed is 300 to 450 r. pm, and the medium-speed rotation speed is 450~900r.pm, and the high speed is 1200~6000r.pm. 依據申請專利範圍第23項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(iii)中,進行濕潤旋轉塗佈的轉速為300r.p.m與450r.p.m.相交替數次,進行初步成膜旋轉塗佈的轉速則為自450r.p.m.依階梯式上升到6000r.p.m.後,再進入再成膜旋轉塗佈。The method for producing an excellent flexible carbon nanotube conductive film according to claim 23, wherein in the step (iii), the rotational rotation of the wet spin coating is 300 r.pm and 450 r.pm. Several times, the number of revolutions of the preliminary film spin coating was increased from 450 r.pm to 6000 r.pm, and then re-filming was applied. 依據申請專利範圍第24項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(i)中,該奈米碳管溶液具有1重量份的界面活性劑組份、1重量份的奈米碳管組份,及1000~1000000重量份的溶劑。The method for producing an excellent flexible carbon nanotube conductive film according to claim 24, wherein in the step (i), the carbon nanotube solution has 1 part by weight of a surfactant group. Parts, 1 part by weight of the carbon nanotube component, and 1000 to 1,000,000 parts by weight of a solvent. 依據申請專利範圍第25項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,還包含一在步驟(iv)與步驟(b)之間的步驟(d),步驟(d)是清洗,用以去除殘留在該導電薄膜中的界面活性劑。The method for manufacturing an excellent flexible carbon nanotube conductive film according to claim 25, further comprising a step (d) between the step (iv) and the step (b), the step (d) It is a cleaning to remove the surfactant remaining in the conductive film. 依據申請專利範圍第26項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(d)中,是將具有該導電薄膜的基材先置於去離子水中潤洗5~30分鐘,並浸泡2小時換水,重複5次,再浸泡乙醇2小時,再於溫度60℃下抽真空12小時。The method for producing an excellent flexible carbon nanotube conductive film according to claim 26, wherein in the step (d), the substrate having the conductive film is first placed in deionized water. Rinse for 5 to 30 minutes, and soak for 2 hours for water change, repeat 5 times, then soak the ethanol for 2 hours, and then vacuum at temperature 60 ° C for 12 hours. 依據申請專利範圍第27項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(iii)中,該攜帶氣體的流速為1L/min~200L/min。The method for producing an excellent flexible carbon nanotube conductive film according to claim 27, wherein in the step (iii), the flow rate of the carrier gas is from 1 L/min to 200 L/min. 依據申請專利範圍第28項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,其中,在步驟(iii)中,該攜帶氣體的流速實質上為22L/min。The method for producing an excellent flexible carbon nanotube conductive film according to claim 28, wherein in the step (iii), the flow rate of the carrier gas is substantially 22 L/min. 依據申請專利範圍第28項所述的具優良可撓性之奈米碳管導電薄膜的製造方法,還包含一在步驟(i)之前的步驟(e),步驟(e)是純化多層壁奈米碳管,是分別經高濃度鹽酸溶液酸洗、沉澱法水洗及真空乾燥處理以純化該等多層壁奈米碳管。The method for producing an excellent flexible carbon nanotube conductive film according to claim 28, further comprising a step (e) before the step (i), wherein the step (e) is a purification of the multilayer wall The carbon nanotubes are respectively subjected to acid washing with a high concentration hydrochloric acid solution, water washing by a precipitation method, and vacuum drying to purify the multi-walled carbon nanotubes.
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