TWI439777B - Thin film transistor substrate of liquid crystal display panel - Google Patents

Thin film transistor substrate of liquid crystal display panel Download PDF

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TWI439777B
TWI439777B TW100102782A TW100102782A TWI439777B TW I439777 B TWI439777 B TW I439777B TW 100102782 A TW100102782 A TW 100102782A TW 100102782 A TW100102782 A TW 100102782A TW I439777 B TWI439777 B TW I439777B
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liquid crystal
thin film
film transistor
display panel
crystal display
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TW100102782A
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TW201232135A (en
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Chun Hung Yang
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Chunghwa Picture Tubes Ltd
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液晶顯示面板之薄膜電晶體基板Thin film transistor substrate of liquid crystal display panel

本發明係有關於一種液晶顯示面板(liquid crystal display panel,LCD panel)之薄膜電晶體基板(thin film transistor,TFT substrate),特別是有關於一種邊緣電場切換(fringe field switching,以下簡稱為FSS)型之液晶顯示面板之薄膜電晶體基板。The present invention relates to a thin film transistor (TFT substrate) of a liquid crystal display panel (LCD panel), and more particularly to a fringe field switching (hereinafter referred to as FSS). A thin film transistor substrate of a liquid crystal display panel.

液晶顯示面板係利用背光模組(backlight module)提供分佈均勻的面光源來顯示影像。一般而言,由液晶顯示面板出射的光大多係朝向正前方,亦即垂直於液晶顯示面板的顯示面的正面方向。因此,當使用者從側視的角度觀賞時,即無法觀看到具有正常亮度的畫面,或甚至無法觀看到所欲觀賞的畫面。有鑑於此,習知技術係發展出多種廣視角技術(wide viewing angle technology),例如FFS型液晶顯示面板技術。The liquid crystal display panel uses a backlight module to provide a uniformly distributed surface light source to display images. In general, the light emitted from the liquid crystal display panel is mostly directed forward, that is, perpendicular to the front direction of the display surface of the liquid crystal display panel. Therefore, when the user views from a side view angle, the picture with normal brightness cannot be viewed, or even the picture to be viewed cannot be viewed. In view of this, the prior art has developed a variety of wide viewing angle technologies, such as FFS type liquid crystal display panel technology.

請參閱第1圖,第1圖係為一習知FFS型液晶顯示面板之截面示意圖。習知FFS型液晶顯示面板100包含一上基板102、一下基板104與一設置於上基板102與下基板104之間的液晶層106。液晶層106包含有複數個液晶分子106a。此外,上基板102面對液晶層106之表面,以及下基板104面對液晶層106之表面分別設置有一配向層(圖未示)。在下基板104上,由下而上更依序設置有一共通電極120、一絕緣層122、與一畫素電極124。習知FFS型液晶顯示面板100係利用共通電極120與畫素電極124形成密集邊緣電場,以驅動液晶分子106a、調整光的透過率,並使液晶分子106a的響應速度更快、視角更廣。Please refer to FIG. 1 , which is a schematic cross-sectional view of a conventional FFS liquid crystal display panel. The conventional FFS type liquid crystal display panel 100 includes an upper substrate 102, a lower substrate 104, and a liquid crystal layer 106 disposed between the upper substrate 102 and the lower substrate 104. The liquid crystal layer 106 includes a plurality of liquid crystal molecules 106a. In addition, the upper substrate 102 faces the surface of the liquid crystal layer 106, and the surface of the lower substrate 104 facing the liquid crystal layer 106 is respectively provided with an alignment layer (not shown). On the lower substrate 104, a common electrode 120, an insulating layer 122, and a pixel electrode 124 are disposed in this order from bottom to top. The conventional FFS type liquid crystal display panel 100 forms a dense fringe electric field by using the common electrode 120 and the pixel electrode 124 to drive the liquid crystal molecules 106a, adjust the transmittance of light, and make the liquid crystal molecules 106a have a faster response speed and a wider viewing angle.

請參閱第2A圖與第2B圖,其中第2A圖為習知FFS型液晶顯示面板100部分畫素區之示意圖;而第2B圖則為第2A圖中沿A-A’剖線所繪示之截面示意圖。如第2A圖與第2B圖所示,習知FFS型液晶顯示面板100的下基板104更包含複數條資料線(data line)130、複數條掃描線(scan line)132以及複數條儲存電極線(storage electrode line)134,且資料線130與掃描線132定義出複數個畫素區域108。各畫素區域108中係設置有至少一薄膜電晶體110,其中薄膜電晶體110的閘極(圖未示)係與掃描線132電性連接、源極(圖未示)係與資料線130電性連接、而汲極(圖未示)則與一畫素電極124電性連接。Please refer to FIG. 2A and FIG. 2B , wherein FIG. 2A is a schematic diagram of a partial pixel area of a conventional FFS type liquid crystal display panel 100; and FIG. 2B is a cross-sectional view taken along line A-A′ of FIG. 2A. A schematic cross section. As shown in FIGS. 2A and 2B, the lower substrate 104 of the conventional FFS type liquid crystal display panel 100 further includes a plurality of data lines 130, a plurality of scan lines 132, and a plurality of storage electrode lines. A storage electrode line 134, and the data line 130 and the scan line 132 define a plurality of pixel regions 108. At least one thin film transistor 110 is disposed in each of the pixel regions 108. The gate (not shown) of the thin film transistor 110 is electrically connected to the scan line 132, and the source (not shown) and the data line 130 are connected. The electrical connection and the drain (not shown) are electrically connected to the pixel electrode 124.

請繼續參閱第2A圖與第2B圖。為了增加環境光的反射,習知FFS型液晶顯示面板100更常於掃描線132的兩側定義複數個反射區140,並且利用習知薄膜電晶體之半導體層的圖案化製程,於反射區140內形成複數個由半導體層構成的反射元件142。隨後利用形成源極/汲極的圖案化製程於各反射區140內形成一覆蓋反射元件142的反射層144。而覆蓋反射元件142的反射層144係因其下凸起的反射元件142而獲得一凹凸不平的表面輪廓,因此反射層144可提供入射的環境光一個散射界面,繼而提高環境光的反射率。當然,為了避免反射層144與畫素電極124電性連接,反射層144與畫素電極124之間係設置有一絕緣層138。Please continue to see Figures 2A and 2B. In order to increase the reflection of the ambient light, the conventional FFS type liquid crystal display panel 100 defines a plurality of reflective regions 140 on both sides of the scan line 132, and the patterning process of the semiconductor layer of the conventional thin film transistor is used in the reflective region 140. A plurality of reflective elements 142 composed of a semiconductor layer are formed therein. A reflective layer 144 covering the reflective element 142 is then formed in each of the reflective regions 140 by a patterning process that forms a source/drain. The reflective layer 144 covering the reflective element 142 obtains a rugged surface profile due to its lower raised reflective element 142, so the reflective layer 144 can provide a scattering interface of incident ambient light, which in turn increases the reflectivity of the ambient light. Of course, in order to prevent the reflective layer 144 from being electrically connected to the pixel electrode 124, an insulating layer 138 is disposed between the reflective layer 144 and the pixel electrode 124.

而為了增加環境光的反射率,甚至達到在陽光下仍然可視的程度,習知技術係不斷地增加反射區140面積,但如此一來就犧牲了FFS型液晶顯示面板100的開口率。In order to increase the reflectance of the ambient light, even to the extent that it is still visible in sunlight, the conventional technique continuously increases the area of the reflective area 140, but at the expense of the aperture ratio of the FFS type liquid crystal display panel 100.

因此,本發明係於此提供一種可提升有效反射率而不犧牲開口率的FFS型液晶顯示面板之薄膜電晶體基板。Accordingly, the present invention provides a thin film transistor substrate of an FFS type liquid crystal display panel which can improve effective reflectance without sacrificing aperture ratio.

根據本發明所提供之申請專利範圍,係提供一種液晶顯示面板之薄膜電晶體基板,包含有一基板、複數條沿一第一方向設置於該基板上之掃描線、複數條沿一第二方向設置於該基板上之資料線,該等資料線與該等掃描線係定義出複數個畫素區域。該等掃描線分別包含複數個第一凹凸部,且該等第一凹凸部分別包含複數個具有封閉形狀之第一凹陷圖案。另外該液晶顯示面板之薄膜電晶體基板更包含複數個開關元件,分別設置於該等畫素區域中。According to the patent application scope of the present invention, a thin film transistor substrate of a liquid crystal display panel includes a substrate, a plurality of scan lines disposed on the substrate along a first direction, and a plurality of strips disposed along a second direction Data lines on the substrate, the data lines and the scan lines define a plurality of pixel regions. Each of the scan lines includes a plurality of first concavo-convex portions, and the first concavo-convex portions respectively include a plurality of first recess patterns having a closed shape. In addition, the thin film transistor substrate of the liquid crystal display panel further includes a plurality of switching elements respectively disposed in the pixel regions.

根據本發明所提供之申請專利範圍,另提供一種液晶顯示面板之薄膜電晶體基板,包含有一基板、複數條沿一第一方向設置於該基板上之掃描線、複數條沿一第二方向設置於該基板上之資料線,該等資料線與該等掃描線係定義出複數個畫素區域。該等資料線更分別包含複數個第一凹凸部與複數個第一平坦部,且該等第一凹凸部分別包含複數個具有封閉形狀之第一凹陷圖案。另外該液晶顯示面板之薄膜電晶體基板更包含複數個開關元件,分別設置於該等畫素區域中。According to the patent application scope of the present invention, a thin film transistor substrate of a liquid crystal display panel includes a substrate, a plurality of scan lines disposed on the substrate along a first direction, and a plurality of strips disposed along a second direction. Data lines on the substrate, the data lines and the scan lines define a plurality of pixel regions. The data lines further include a plurality of first concave and convex portions and a plurality of first flat portions, and the first concave and convex portions respectively include a plurality of first concave patterns having a closed shape. In addition, the thin film transistor substrate of the liquid crystal display panel further includes a plurality of switching elements respectively disposed in the pixel regions.

根據本發明所提供之申請專利範圍,更提供一種液晶顯示面板之薄膜電晶體基板,包含有一基板、複數條沿一第一方向設置於該基板上之掃描線、複數條沿一第二方向設置於該基板上資料線、與複數條分別沿該第一方向設置於該基板上之儲存電極線。該等資料線與該等掃描線係定義出複數個畫素區域,而該等儲存電極線分別包含一第一凹凸部,且該第一凹凸部包含複數個具有封閉形狀之第一凹陷圖案。另外該液晶顯示面板之薄膜電晶體基板更包含複數個開關元件,分別設置於該等畫素區域中。According to the patent application scope of the present invention, a thin film transistor substrate of a liquid crystal display panel further includes a substrate, a plurality of scan lines disposed on the substrate along a first direction, and a plurality of strips disposed along a second direction The data line on the substrate and the plurality of storage electrode lines respectively disposed on the substrate along the first direction. The data lines and the scan lines define a plurality of pixel regions, and the storage electrode lines respectively comprise a first concave and convex portion, and the first concave and convex portions comprise a plurality of first concave patterns having a closed shape. In addition, the thin film transistor substrate of the liquid crystal display panel further includes a plurality of switching elements respectively disposed in the pixel regions.

本發明之液晶顯示面板之薄膜電晶體基板,係於各掃描線、各資料線、或各儲存電極線上直接設置複數個凹凸部,且各凹凸部分別包含具有封閉形狀的凹陷圖案。因此,可在不需額外設置反射區而降低開口率的前提下,使各掃描線、各資料線、或各儲存電極線本身具備反射光線的能力,故可大幅提昇薄膜電晶體基板的反射率。In the thin film transistor substrate of the liquid crystal display panel of the present invention, a plurality of concave and convex portions are directly disposed on each of the scanning lines, the data lines, or the storage electrode lines, and each of the concave and convex portions includes a concave pattern having a closed shape. Therefore, the scanning lines, the data lines, or the storage electrode lines themselves can have the ability to reflect light without reducing the aperture ratio without additionally providing a reflection area, so that the reflectivity of the thin film transistor substrate can be greatly improved. .

在說明書及後續的申請專利範圍當中使用了某些詞彙來指稱特定的元件。所屬領域中具有通常知識者應可理解,製造商可能會用不同的名詞來稱呼同樣的元件。本說明書及後續的申請專利範圍並不以名稱的差異來作為區別元件的方式,而是以元件在功能上的差異來作為區別的基準。在通篇說明書及後續的請求項當中所提及的「包含」係為一開放式的用語,故應解釋成「包含但不限定於」。此外,「電性連接」一詞在此係包含任何直接及間接的電氣連接手段。因此,若文中描述一第一裝置電性連接於一第二裝置,則代表該第一裝置可直接連接於該第二裝置,或透過其他裝置或連接手段間接地連接至該第二裝置。Certain terms are used throughout the description and following claims to refer to particular elements. It should be understood by those of ordinary skill in the art that manufacturers may refer to the same elements by different nouns. The scope of this specification and the subsequent patent application do not use the difference of the names as the means for distinguishing the elements, but the differences in the functions of the elements as the basis for the distinction. The term "including" as used throughout the specification and subsequent claims is an open term and should be interpreted as "including but not limited to". In addition, the term "electrical connection" is used herein to include any direct and indirect electrical connection. Therefore, if a first device is electrically connected to a second device, it means that the first device can be directly connected to the second device or indirectly connected to the second device through other devices or connection means.

請參閱第3A圖至第3C圖,其中第3A圖為本發明之一液晶顯示面板之薄膜電晶體基板的部分示意圖、第3B圖為第3A圖中沿B-B’剖線所繪示之截面示意圖、第3C圖為第3A圖中沿C-C’剖線所繪示之截面示意圖、第3D圖為第3A圖中沿D-D’剖線所繪示之截面示意圖。首先請參閱第3A圖。在本較佳實施例中,液晶顯示面板之薄膜電晶體基板可為一邊緣電場切換(FFS)型液晶顯示面板之薄膜電晶體基板200,但不以此為限。薄膜電晶體基板200包含一基板202、複數條掃描線204沿一第一方向D1設置於基板202上、以及複數條資料線206沿一第二方向D2設置於基板202上,其中第一方向D1大體上垂直於第二方向D2。如第3A圖所示,掃描線204與資料線206定義出複數個畫素區域208。本較佳實施例之薄膜電晶體基板200更包含複數個開關元件210,例如薄膜電晶體,分別設置於各畫素區域208內。此外薄膜電晶體基板200尚包含複數條儲存電極線212,分別沿第一方向D1設置於基板202上。Please refer to FIG. 3A to FIG. 3C , wherein FIG. 3A is a partial schematic view of a thin film transistor substrate of a liquid crystal display panel of the present invention, and FIG. 3B is a cross-sectional view taken along line BB′ of FIG. 3A . FIG. 3C is a cross-sectional view taken along line C-C' in FIG. 3A, and FIG. 3D is a cross-sectional view taken along line D-D' in FIG. 3A. Please refer to Figure 3A first. In the preferred embodiment, the thin film transistor substrate of the liquid crystal display panel may be a thin film transistor substrate 200 of a fringe field switching (FFS) type liquid crystal display panel, but is not limited thereto. The thin film transistor substrate 200 includes a substrate 202, a plurality of scan lines 204 disposed on the substrate 202 along a first direction D1, and a plurality of data lines 206 disposed on the substrate 202 along a second direction D2, wherein the first direction D1 It is substantially perpendicular to the second direction D2. As shown in FIG. 3A, scan line 204 and data line 206 define a plurality of pixel regions 208. The thin film transistor substrate 200 of the preferred embodiment further includes a plurality of switching elements 210, such as thin film transistors, disposed in each of the pixel regions 208. In addition, the thin film transistor substrate 200 further includes a plurality of storage electrode lines 212 disposed on the substrate 202 in the first direction D1.

請參閱第3A圖與第3B圖。如前所述,由於本較佳實施例所提供之薄膜電晶體基板200係為邊緣電場切換型液晶顯示面板之薄膜電晶體基板,因此本較佳實施例之薄膜電晶體基板200更包含複數個共通電極214分別設置於基板202之各畫素區域208內。薄膜電晶體基板200更包含複數個畫素電極216,分別設置於基板202之各畫素區域208內。如第3A圖所示,其中各畫素電極216具有複數個縫隙(slit)218,且各畫素電極216係與相對應之共通電極214部分重疊。在本較佳實施例中,共通電極214係與畫素電極216形成密集邊緣電場,以邊緣電場驅動液晶顯示面板200之液晶分子(圖未示)、調整光的透過率,並使液晶分子的響應速度更快、視角更廣。Please refer to Figures 3A and 3B. As described above, since the thin film transistor substrate 200 of the preferred embodiment is a thin film transistor substrate of a fringe field switching type liquid crystal display panel, the thin film transistor substrate 200 of the preferred embodiment further includes a plurality of The common electrodes 214 are respectively disposed in the respective pixel regions 208 of the substrate 202. The thin film transistor substrate 200 further includes a plurality of pixel electrodes 216 disposed in each of the pixel regions 208 of the substrate 202. As shown in FIG. 3A, each of the pixel electrodes 216 has a plurality of slits 218, and each of the pixel electrodes 216 partially overlaps with the corresponding common electrode 214. In the preferred embodiment, the common electrode 214 forms a dense fringe electric field with the pixel electrode 216, and drives the liquid crystal molecules (not shown) of the liquid crystal display panel 200 by the fringe electric field, adjusts the transmittance of the light, and makes the liquid crystal molecules Faster response and wider viewing angles.

請繼續參閱第3A圖與第3B圖。值得注意的是,本較佳實施例所提供之薄膜電晶體基板200上的各掃描線204分別包含複數個第一凹凸部204a,而各儲存電極線212則包含一第三凹凸部212a。該領域中具通常知識者應知,在薄膜電晶體基板200上多半係藉由五道圖案化製程完成開關元件210、掃描線204、儲存電極線212、資料線206與畫素電極216等的製作。而在本較佳實施例中,係可在製作開關元件210之閘極與掃描線204的第一道圖案化製程中採用一半透型光罩(half-tone mask)(圖未示)。半透型光罩係包含一半透型光罩區域(half-tone mask region)、一全透型光罩區域(fully transparent region)與一全遮蔽型光罩區域(fully blocked region)。如該領域中具通常知識之人士所知者,全透型光罩區域與全遮蔽型光罩區域係與轉移至光阻之光罩圖案具有全有或全無的相對關係,配合合適之蝕刻製程之後,係可於基板202上形成上述之掃描線204與閘極。更重要的是,由於本較佳實施例採用半透型光罩,其半透型光罩區域係提供了不同的透光度,因此經由微影製程所形成的光阻係隨曝光度而有不同的厚度,而在上述蝕刻製程之後,各掃描線204上係形成複數個具有封閉形狀之第一凹陷圖案250。舉例來說,第一凹陷圖案250可如第3A圖所示為圓形,但本較佳實施例亦不限於形成其他封閉形狀如多角形之第一凹陷圖案250。由於第一凹陷圖案250的存在,掃描線204與閘極可視為包含了複數個具有不平坦表面的第一凹凸部204a。Please continue to refer to Figures 3A and 3B. It should be noted that each scan line 204 on the thin film transistor substrate 200 provided in the preferred embodiment includes a plurality of first concave and convex portions 204a, and each of the storage electrode lines 212 includes a third concave and convex portion 212a. It should be understood by those skilled in the art that on the thin film transistor substrate 200, the switching element 210, the scanning line 204, the storage electrode line 212, the data line 206, and the pixel electrode 216 are mostly completed by a five-pass patterning process. Production. In the preferred embodiment, a half-tone mask (not shown) may be employed in the first patterning process for fabricating the gate of switching element 210 and scan line 204. The semi-transmissive reticle includes a half-tone mask region, a fully transparent region, and a fully blocked region. As is known to those of ordinary skill in the art, the fully permeable reticle region and the fully shielded reticle region have an all-or-nothing relationship with the reticle pattern transferred to the photoresist, with appropriate etching. After the process, the scan line 204 and the gate described above may be formed on the substrate 202. More importantly, since the preferred embodiment uses a semi-transmissive reticle, the semi-transmissive reticle region provides different transmittances, so the photoresist formed by the lithography process has a degree of exposure. Different thicknesses are formed, and after the etching process, a plurality of first recess patterns 250 having a closed shape are formed on each of the scan lines 204. For example, the first recess pattern 250 may be circular as shown in FIG. 3A, but the preferred embodiment is not limited to forming the first recess pattern 250 of other closed shapes such as a polygon. Due to the presence of the first recess pattern 250, the scan line 204 and the gate can be considered to include a plurality of first reliefs 204a having uneven surfaces.

根據本較佳實施例所提供之薄膜電晶體基板200,係利用半透型光罩的微影技術於掃描線204上直接形成複數個第一凹凸部204a。而後續形成的其他膜層材料,如絕緣層220、224等,係沿第一凹凸部204a獲得如第3B圖所示的凹凸表面,而此凹凸表面則可提供入射的環境光一散射界面,進而增進反射效果。換句話說,本較佳實施例所提供之FFS型液晶顯示面板之薄膜電晶體基板200係提供一本身即具有高反射率的掃描線204。According to the thin film transistor substrate 200 provided by the preferred embodiment, a plurality of first concave and convex portions 204a are directly formed on the scanning line 204 by a lithography technique of a semi-transmissive reticle. The other formed film materials, such as the insulating layers 220, 224, etc., obtain the concave-convex surface as shown in FIG. 3B along the first concave-convex portion 204a, and the concave-convex surface provides an incident ambient light-scattering interface. Improve the reflection effect. In other words, the thin film transistor substrate 200 of the FFS type liquid crystal display panel provided by the preferred embodiment provides a scan line 204 which itself has a high reflectivity.

另外值得注意的是,由於儲存電極線212係與掃描線204同時於第一道圖案化製程中形成,因此亦可藉由半透型光罩於儲存電極線212上形成如掃描線204上的第一凹陷圖案250,換句話說儲存電極線212係包含一第三凹凸部212a。而後續形成的其他膜層材料,係沿第三凹凸部212a獲得如第3B圖所示的凹凸表面,而此凹凸表面如上所述可增進反射效果。因此,本較佳實施例所提供之薄膜電晶體基板200亦提供一本身即具有高反射率的儲存電極線212。It is also noted that, since the storage electrode line 212 and the scan line 204 are formed simultaneously in the first patterning process, the semi-transmissive mask can also be formed on the storage electrode line 212 as on the scan line 204. The first recess pattern 250, in other words, the storage electrode line 212, includes a third concavo-convex portion 212a. On the other hand, the other film material formed later obtains the uneven surface as shown in FIG. 3B along the third uneven portion 212a, and the uneven surface enhances the reflection effect as described above. Therefore, the thin film transistor substrate 200 provided by the preferred embodiment also provides a storage electrode line 212 which itself has a high reflectivity.

另外如前所述,由於半透型光罩更包含全透型光罩區域或全遮蔽型光罩區域,因此本較佳實施例可在形成掃描線204時形成複數個如第3C圖所示之具有平坦表面的第一平坦部204b,且各第一平坦部204b係分別作為一開關元件210的閘極。由於閘極具有平坦表面,因此較不會影響薄膜電晶體的電性表現。In addition, as described above, since the semi-transmissive reticle further includes a full-transmissive reticle region or a full-shielding reticle region, the preferred embodiment can form a plurality of the scanning lines 204 as shown in FIG. 3C. The first flat portion 204b having a flat surface, and each of the first flat portions 204b serves as a gate of a switching element 210, respectively. Since the gate has a flat surface, it does not affect the electrical performance of the thin film transistor.

請參閱第3A圖與第3D圖。如該領域中具通常知識者所知,在完成閘極/掃描線204之製作後,係依序進行形成閘極絕緣層、形成半導體層222、以及形成源極/汲極與資料線206等步驟。而在進行製作源極/汲極與資料線206的第三圖案化製程時,亦可採用半透型光罩及微影技術於資料線206上形成複數個第二凹凸部206a與複數個第二平坦部206b。如前所述,由於本較佳實施例採用半透型光罩,其半透型光罩區域係提供了不同的透光度,因此經由微影製程所形成的光阻係隨曝光度而有不同的厚度,而在蝕刻製程之後,各資料線206上係形成複數個具有封閉形狀之第二凹陷圖案260。舉例來說,第二凹陷圖案260可如第3A圖所示為圓形,但本較佳實施例亦不限於形成其他封閉形狀如多角形之第二凹陷圖案260。由於第二凹陷圖案260的存在,資料線206可視為包含了複數個具有不平坦表面的第二凹凸部206a。並且在完成源極汲極與資料線206之製作後,係可依序進行形成絕緣層224、形成接觸洞、以及形成畫素電極216等步驟。Please refer to Figures 3A and 3D. As is known to those of ordinary skill in the art, after the fabrication of the gate/scan line 204 is completed, the gate insulating layer is formed, the semiconductor layer 222 is formed, and the source/drain and the data line 206 are formed. step. When the third patterning process for fabricating the source/drain and the data line 206 is performed, a plurality of second concave and convex portions 206a and a plurality of numbers may be formed on the data line 206 by using a semi-transmissive mask and a lithography technique. Two flat portions 206b. As described above, since the preferred embodiment uses a semi-transmissive reticle, the semi-transmissive reticle region provides different transmittances, so the photoresist formed by the lithography process has a degree of exposure. Different thicknesses, and after the etching process, a plurality of second recess patterns 260 having a closed shape are formed on each of the data lines 206. For example, the second recess pattern 260 may be circular as shown in FIG. 3A, but the preferred embodiment is not limited to forming the second recess pattern 260 of other closed shapes such as a polygon. Due to the presence of the second recess pattern 260, the data line 206 can be considered to include a plurality of second reliefs 206a having uneven surfaces. After the fabrication of the source drain and the data line 206 is completed, the steps of forming the insulating layer 224, forming the contact hole, and forming the pixel electrode 216 may be sequentially performed.

另外,利用半透型光罩的全透型光罩區域或全遮蔽型光罩區域,本較佳實施例係於資料線206上形成複數個如第3D圖所示之具有平坦表面的第二平坦部206b,且各第二平坦部206b係分別作為一開關元件210的源極/汲極。由於源極/汲極具有平坦表面,因此較不會影響薄膜電晶體的電性表現。In addition, with the full-transmissive reticle region or the full-shielding reticle region of the semi-transmissive reticle, the preferred embodiment forms a plurality of second surfaces having a flat surface as shown in FIG. 3D on the data line 206. The flat portion 206b and each of the second flat portions 206b are respectively used as a source/drain of the switching element 210. Since the source/drain has a flat surface, it does not affect the electrical performance of the thin film transistor.

根據本較佳實施例所提供之薄膜電晶體基板200,係利用半透型光罩的微影技術於資料線206上直接形成複數個第二凹凸部206a,而後續形成的其他膜層材料,如絕緣層224等,係沿第二凹凸部206a獲得如第3D圖所示的凹凸表面,而此凹凸表面則可增進反射效果。換句話說,本較佳實施例所提供之FFS液晶顯示面板之薄膜電晶體基板200係提供一本身即具有高反射率的資料線206。According to the thin film transistor substrate 200 provided by the preferred embodiment, a plurality of second concave and convex portions 206a are directly formed on the data line 206 by using a lithography technique of a semi-transmissive reticle, and other film materials subsequently formed, As the insulating layer 224 or the like, the uneven surface as shown in FIG. 3D is obtained along the second uneven portion 206a, and the uneven surface enhances the reflection effect. In other words, the thin film transistor substrate 200 of the FFS liquid crystal display panel provided by the preferred embodiment provides a data line 206 which itself has a high reflectivity.

綜上所述,本發明所提供之FFS型液晶顯示面板之薄膜電晶體基板,係於各掃描線或/與資料線上直接設置複數個由凹陷圖案構成的凹凸部,而此凹凸部係與後續形成的膜層形成一凹凸表面,用以提供入射的環境光一散射界面。因此,本發明係可在不再需要額外設置反射區而降低開口率的前提下,大幅提昇薄膜電晶體基板的反射率。In summary, the thin film transistor substrate of the FFS type liquid crystal display panel provided by the present invention is provided with a plurality of concave and convex portions formed by concave patterns directly on each scanning line or/and a data line, and the concave and convex portions are followed by The formed film layer forms a concave-convex surface for providing an incident ambient light-scattering interface. Therefore, the present invention can greatly increase the reflectance of the thin film transistor substrate without further requiring an additional reflective region to reduce the aperture ratio.

以上所述僅為本發明之較佳實施例,凡依本發明申請專利範圍所做之均等變化與修飾,皆應屬本發明之涵蓋範圍。The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

100...FFS型液晶顯示面板100. . . FFS type liquid crystal display panel

102...上基板102. . . Upper substrate

104...下基板104. . . Lower substrate

106...液晶層106. . . Liquid crystal layer

106a...液晶分子106a. . . Liquid crystal molecule

108...畫素區域108. . . Pixel region

110...薄膜電晶體110. . . Thin film transistor

120...共通電極120. . . Common electrode

122...絕緣層122. . . Insulation

124...畫素電極124. . . Pixel electrode

130...資料線130. . . Data line

132...掃描線132. . . Scanning line

134...儲存電極線134. . . Storage electrode line

138...絕緣層138. . . Insulation

140...反射區140. . . Reflection zone

142...反射元件142. . . Reflective element

144...反射層144. . . Reflective layer

200...薄膜電晶體基板200. . . Thin film transistor substrate

202...基板202. . . Substrate

204...掃描線204. . . Scanning line

204a...第一凹凸部204a. . . First concave and convex portion

204b...第一平坦部204b. . . First flat

206...資料線206. . . Data line

206a...第二凹凸部206a. . . Second concave and convex portion

206b...第二平坦部206b. . . Second flat

208...畫素區域208. . . Pixel region

210...開關元件210. . . Switching element

212...儲存電極線212. . . Storage electrode line

212a...第三凹凸部212a. . . Third concave and convex portion

214...共通電極214. . . Common electrode

216...畫素電極216. . . Pixel electrode

218...縫隙218. . . Gap

220...絕緣層220. . . Insulation

222...半導體層222. . . Semiconductor layer

224...絕緣層224. . . Insulation

250...第一凹陷圖案250. . . First concave pattern

260...第二凹陷圖案260. . . Second concave pattern

D1...第一方向D1. . . First direction

D2...第二方向D2. . . Second direction

A-A’...切線A-A’. . . Tangent

B-B’...切線B-B’. . . Tangent

C-C’...切線C-C’. . . Tangent

D-D’...切線D-D’. . . Tangent

第1圖係為一習知FFS型液晶顯示面板之截面示意圖;1 is a schematic cross-sectional view of a conventional FFS type liquid crystal display panel;

第2A圖為習知FFS型液晶顯示面板部分畫素區之示意圖;2A is a schematic view of a partial pixel area of a conventional FFS type liquid crystal display panel;

第2B圖則為第2A圖中沿A-A’截線所繪示之截面示意圖;Figure 2B is a schematic cross-sectional view taken along line A-A' in Figure 2A;

第3A圖為本較佳實施例所提供之一液晶顯示面板之薄膜電晶體基板的部分示意圖;3A is a partial schematic view of a thin film transistor substrate of a liquid crystal display panel according to a preferred embodiment;

第3B圖為第3A圖中沿B-B’剖線所繪示之截面示意圖;Figure 3B is a schematic cross-sectional view taken along line B-B' in Figure 3A;

第3C圖為第3A圖中沿C-C’剖線所繪示之截面示意圖;以及Figure 3C is a schematic cross-sectional view taken along line C-C' in Figure 3A;

第3D圖為第3A圖中沿D-D’剖線所繪示之截面示意圖。Fig. 3D is a schematic cross-sectional view taken along line D-D' in Fig. 3A.

200...薄膜電晶體基板200. . . Thin film transistor substrate

202...基板202. . . Substrate

204...掃描線204. . . Scanning line

204a...第一凹凸部204a. . . First concave and convex portion

204b...第一平坦部204b. . . First flat

206...資料線206. . . Data line

206a...第二凹凸部206a. . . Second concave and convex portion

206b...第二平坦部206b. . . Second flat

208...畫素區域208. . . Pixel region

210...開關元件210. . . Switching element

212...儲存電極線212. . . Storage electrode line

212a...第三凹凸部212a. . . Third concave and convex portion

216...畫素電極216. . . Pixel electrode

218...縫隙218. . . Gap

250...第一凹陷圖案250. . . First concave pattern

260...第二凹陷圖案260. . . Second concave pattern

D1...第一方向D1. . . First direction

D2...第二方向D2. . . Second direction

B-B’...切線B-B’. . . Tangent

C-C’...切線C-C’. . . Tangent

D-D’...切線D-D’. . . Tangent

Claims (20)

一種液晶顯示面板之薄膜電晶體基板,包含有:一基板;複數條掃描線,沿一第一方向設置於該基板上,該等掃描線分別包含複數個第一凹凸部與複數個第一平坦部,且該等第一凹凸部分別包含複數個具有封閉形狀之第一凹陷圖案;複數條資料線,沿一第二方向設置於該基板上,該等資料線與該等掃描線係定義出複數個畫素區域;以及複數個開關元件,分別設置於該等畫素區域中,其中該等第一平坦部係分別作為該等該開關元件之一閘極。 A thin film transistor substrate of a liquid crystal display panel comprises: a substrate; a plurality of scanning lines disposed on the substrate along a first direction, the scan lines respectively comprising a plurality of first concave and convex portions and a plurality of first flat portions And the first concave and convex portions respectively comprise a plurality of first concave patterns having a closed shape; the plurality of data lines are disposed on the substrate along a second direction, and the data lines and the scanning lines are defined a plurality of pixel regions; and a plurality of switching elements respectively disposed in the pixel regions, wherein the first planar portions respectively serve as one of the gates of the switching elements. 如申請專利範圍第1項所述之液晶顯示面板之薄膜電晶體基板,其中該等資料線更分別包含複數個第二凹凸部與複數個第二平坦部。 The thin film transistor substrate of the liquid crystal display panel of claim 1, wherein the data lines further comprise a plurality of second concave and convex portions and a plurality of second flat portions. 如申請專利範圍第2項所述之液晶顯示面板之薄膜電晶體基板,其中該等第二凹凸部係包含複數個具有封閉形狀之第二凹陷圖案。 The thin film transistor substrate of the liquid crystal display panel of claim 2, wherein the second concave and convex portions comprise a plurality of second concave patterns having a closed shape. 如申請專利範圍第2項所述之液晶顯示面板之薄膜電晶體基板,其中該等第二平坦部係分別作為該等開關元件之 一源極/汲極。 The thin film transistor substrate of the liquid crystal display panel of claim 2, wherein the second flat portions are respectively used as the switching elements A source/bungee. 如申請專利範圍第1項所述之液晶顯示面板之薄膜電晶體基板,更包含複數條儲存電極線,分別沿該第一方向設置於該基板上。 The thin film transistor substrate of the liquid crystal display panel of claim 1, further comprising a plurality of storage electrode lines disposed on the substrate along the first direction. 如申請專利範圍第5項所述之液晶顯示面板之薄膜電晶體基板,其中該等儲存電極線係分別包含一第三凹凸部。 The thin film transistor substrate of the liquid crystal display panel of claim 5, wherein the storage electrode lines each comprise a third concavo-convex portion. 如申請專利範圍第1項所述之液晶顯示面板之薄膜電晶體基板,其中該液晶顯示面板之薄膜電晶體基板係為一邊緣電場切換型液晶顯示面板之薄膜電晶體基板。 The thin film transistor substrate of the liquid crystal display panel of claim 1, wherein the thin film transistor substrate of the liquid crystal display panel is a thin film transistor substrate of a fringe field switching type liquid crystal display panel. 如申請專利範圍第7項所述之液晶顯示面板之薄膜電晶體基板,更包含複數個共通電極分別設置於該基板之各該畫素區域內,以及複數個畫素電極分別設置於該基板之各該畫素區域內,其中各該畫素電極具有複數個縫隙(slit),且各該畫素電極係與相對應之各該共通電極部分重疊。 The thin film transistor substrate of the liquid crystal display panel of claim 7, further comprising a plurality of common electrodes respectively disposed in each of the pixel regions of the substrate, and a plurality of pixel electrodes respectively disposed on the substrate In each of the pixel regions, each of the pixel electrodes has a plurality of slits, and each of the pixel electrodes overlaps with the corresponding common electrode portion. 一種液晶顯示面板之薄膜電晶體基板,包含有:一基板;複數條掃描線,沿一第一方向設置於該基板上;複數條資料線,沿一第二方向設置於該基板上,該等資 料線與該等掃描線係定義出複數個畫素區域,該等資料線更分別包含複數個第一凹凸部與複數個第一平坦部,且該等第一凹凸部分別包含複數個具有封閉形狀之第一凹陷圖案;以及複數個開關元件,分別設置於該等畫素區域中,其中該等第一平坦部係分別作為該等開關元件之一源極/汲極。 A thin film transistor substrate of a liquid crystal display panel, comprising: a substrate; a plurality of scanning lines disposed on the substrate along a first direction; and a plurality of data lines disposed on the substrate along a second direction, Capital The material line and the scanning line system define a plurality of pixel regions, wherein the data lines further comprise a plurality of first concave and convex portions and a plurality of first flat portions, and the first concave and convex portions respectively comprise a plurality of closed portions a first recessed pattern of shapes; and a plurality of switching elements respectively disposed in the pixel regions, wherein the first flat portions respectively serve as source/drain of one of the switching elements. 如申請專利範圍第9項所述之液晶顯示面板之薄膜電晶體基板,其中該等掃描線更分別包含複數個第二平坦部與複數個第二凹凸部,且該等第二凹凸部係包含複數個具有封閉形狀之第二凹陷圖案。 The thin film transistor substrate of the liquid crystal display panel of claim 9, wherein the scan lines further comprise a plurality of second flat portions and a plurality of second concave and convex portions, and the second concave and convex portions comprise A plurality of second recess patterns having a closed shape. 如申請專利範圍第10項所述之液晶顯示面板之薄膜電晶體基板,其中該等第二平坦部係分別作為該等開關元件之一閘極。 The thin film transistor substrate of the liquid crystal display panel of claim 10, wherein the second flat portions are respectively used as one of the switching elements. 如申請專利範圍第9項所述之液晶顯示面板之薄膜電晶體基板,更包含複數條儲存電極線,分別沿該第一方向設置於該基板上。 The thin film transistor substrate of the liquid crystal display panel of claim 9, further comprising a plurality of storage electrode lines respectively disposed on the substrate along the first direction. 如申請專利範圍第12項所述之液晶顯示面板之薄膜電晶體基板,其中該等儲存電極線係分別包含一第三凹凸 部。 The thin film transistor substrate of the liquid crystal display panel of claim 12, wherein the storage electrode lines each comprise a third bump unit. 如申請專利範圍第9項所述之液晶顯示面板之薄膜電晶體基板,其中該液晶顯示面板之薄膜電晶體基板係為一邊緣電場切換型液晶顯示面板之薄膜電晶體基板。 The thin film transistor substrate of the liquid crystal display panel of claim 9, wherein the thin film transistor substrate of the liquid crystal display panel is a thin film transistor substrate of a fringe field switching type liquid crystal display panel. 如申請專利範圍第14項所述之液晶顯示面板之薄膜電晶體基板,更包含複數個共通電極分別設置於該基板之各該畫素區域內,以及複數個畫素電極分別設置於該基板之各該畫素區域內,其中各該畫素電極具有複數個縫隙,且各該畫素電極係與相對應之各該共通電極部分重疊。 The thin film transistor substrate of the liquid crystal display panel of claim 14, further comprising a plurality of common electrodes respectively disposed in each of the pixel regions of the substrate, and a plurality of pixel electrodes respectively disposed on the substrate In each of the pixel regions, each of the pixel electrodes has a plurality of slits, and each of the pixel electrodes overlaps with the corresponding common electrode portion. 一種液晶顯示面板之薄膜電晶體基板,包含有:一基板;複數條掃描線,沿一第一方向設置於該基板上,該等掃描線更分別包含複數個第一平坦部與複數個第一凹凸部,且該等第一凹凸部分別包含複數個具有封閉形狀之第一凹陷圖案;複數條資料線,沿一第二方向設置於該基板上,該等資料線與該等掃描線係定義出複數個畫素區域;複數條儲存電極線,分別沿該第一方向設置於該基板上,該等儲存電極線分別包含一第二凹凸部,且該第二凹凸部包含複數個具有封閉形狀之第二凹陷圖 案;以及複數個開關元件,分別設置於該等畫素區域中,其中該等第一平坦部係分別作為該等開關元件之一閘極。 A thin film transistor substrate of a liquid crystal display panel comprises: a substrate; a plurality of scanning lines disposed on the substrate along a first direction, wherein the scan lines further comprise a plurality of first flat portions and a plurality of first portions And the first concave and convex portions respectively include a plurality of first concave patterns having a closed shape; a plurality of data lines are disposed on the substrate along a second direction, and the data lines are defined by the scanning lines a plurality of pixel regions; the plurality of storage electrode lines are respectively disposed on the substrate along the first direction, the storage electrode lines respectively comprise a second concave and convex portion, and the second concave and convex portion comprises a plurality of closed shapes Second depression map And a plurality of switching elements respectively disposed in the pixel regions, wherein the first flat portions are respectively used as one of the switching elements. 如申請專利範圍第16項所述之液晶顯示面板之薄膜電晶體基板,其中該等資料線更分別包含複數個第三凹凸部與複數個第三平坦部,且該等第三凹凸部係包含複數個具有封閉形狀之第三凹陷圖案。 The thin film transistor substrate of the liquid crystal display panel of claim 16, wherein the data lines further comprise a plurality of third concave and convex portions and a plurality of third flat portions, and the third concave and convex portions comprise A plurality of third recess patterns having a closed shape. 如申請專利範圍第17項所述之液晶顯示面板之薄膜電晶體基板,其中該等第三平坦部係分別作為該等開關元件之一源極/汲極。 The thin film transistor substrate of the liquid crystal display panel of claim 17, wherein the third flat portions are respectively a source/drain of the switching elements. 如申請專利範圍第16項所述之液晶顯示面板之薄膜電晶體基板,其中該液晶顯示面板之薄膜電晶體基板係為一邊緣電場切換型液晶顯示面板之薄膜電晶體基板。 The thin film transistor substrate of the liquid crystal display panel of claim 16, wherein the thin film transistor substrate of the liquid crystal display panel is a thin film transistor substrate of a fringe field switching type liquid crystal display panel. 如申請專利範圍第19項所述之液晶顯示面板之薄膜電晶體基板,更包含複數個共通電極分別設置於該基板之各該畫素區域內,以及複數個畫素電極分別設置於該基板之各該畫素區域內,其中各該畫素電極具有複數個縫隙,且各該畫素電極係與相對應之各該共通電極部分重疊。The thin film transistor substrate of the liquid crystal display panel of claim 19, further comprising a plurality of common electrodes respectively disposed in each of the pixel regions of the substrate, and a plurality of pixel electrodes respectively disposed on the substrate In each of the pixel regions, each of the pixel electrodes has a plurality of slits, and each of the pixel electrodes overlaps with the corresponding common electrode portion.
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