TWI431630B - Apparatus of lift-time test for non-volatile memory and method thereof - Google Patents

Apparatus of lift-time test for non-volatile memory and method thereof Download PDF

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TWI431630B
TWI431630B TW99106608A TW99106608A TWI431630B TW I431630 B TWI431630 B TW I431630B TW 99106608 A TW99106608 A TW 99106608A TW 99106608 A TW99106608 A TW 99106608A TW I431630 B TWI431630 B TW I431630B
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volatile memory
charge loss
bias voltage
bias
detecting
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TW201131570A (en
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Tai Yi Wu
Shang Wei Fang
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Ememory Technology Inc
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Description

非揮發性記憶體的生命期檢測裝置及方法Lifetime detecting device and method for non-volatile memory

本發明是有關於一種非揮發性記憶體的檢測裝置及方法,且特別是有關於一種非揮發性記憶體的生命期的檢測裝置及方法。The present invention relates to a non-volatile memory detecting device and method, and more particularly to a non-volatile memory life detecting device and method.

非揮發性記憶體是一種可以在記憶體沒有被供電的狀態下,依舊可以保有其所儲存的資料的一種記憶體。在現今的技術中,非揮發性記憶體大體可以分為兩種,其一種為唯讀記憶體(Read Only Memory,ROM),而另一種則為快閃記憶體(Flash Memory)。A non-volatile memory is a type of memory that can retain its stored data while the memory is not being powered. In today's technology, non-volatile memory can be roughly divided into two types, one of which is a read only memory (ROM), and the other is a flash memory.

非揮發性記憶體除了存取資料的速度、容量及價錢之外,還有一項需要使用者考慮的重要特性,就是非揮發性記憶體的生命期。而在非揮發性記憶體的生命期的檢測上,習知的技術常利用提升溫度的方式來進行。In addition to the speed, capacity, and price of accessing data, non-volatile memory has an important feature that needs to be considered by users, that is, the lifetime of non-volatile memory. In the detection of the lifetime of non-volatile memory, conventional techniques are often carried out by means of increasing the temperature.

以下請參照圖1,圖1繪示非揮發性記憶體在不同溫度下電荷損失率達臨界值之時間關係圖。在過去的半導體製程中,由於非揮發性記憶體的底部氧化層(Bottom Oxide,Box)較厚,因此所呈現的資料儲存時間及活化能量(其中的曲線的斜率所代表)的關係曲線如圖1繪示的曲線110及120所示。其中的曲線110及120分別為70%及85%的電荷損失率,針對不同電荷損失判讀標準得出。曲線110、120的線性度都非常的良好。也因此,在習知的技術中,利用升溫來進行非揮發性記憶體的生命期的檢測是可行的。Please refer to FIG. 1 below. FIG. 1 is a timing diagram showing the relationship between the charge loss rate of a non-volatile memory at a different temperature reaching a critical value. In the past semiconductor process, because the bottom oxide layer (Bottom Oxide, Box) of the non-volatile memory is thicker, the relationship between the data storage time and the activation energy (the slope of the curve) is shown. 1 is shown by curves 110 and 120. Curves 110 and 120 have charge loss rates of 70% and 85%, respectively, which are derived for different charge loss interpretation criteria. The linearity of the curves 110, 120 is very good. Therefore, in the prior art, it is feasible to use the temperature rise for detecting the lifetime of the non-volatile memory.

然而,隨著製程技術的轉變,現今的非揮發性記憶體的底部氧化層越來越薄,而使得非揮發性記憶體的資料儲存時間及活化能量的關係曲線如圖1繪示的曲線130及140所示。明顯的,曲線130及140在低溫區(圖1的右邊區段)時已不具有優良的線性度,因此,藉由升溫來進行非揮發性記憶體的低溫區生命期的預測的準確度也隨之下降。However, with the change of process technology, the bottom oxide layer of today's non-volatile memory is getting thinner and thinner, and the relationship between data storage time and activation energy of non-volatile memory is shown as curve 130 of FIG. And 140 shows. Obviously, curves 130 and 140 do not have excellent linearity in the low temperature region (the right segment of FIG. 1), and therefore, the accuracy of prediction of the lifetime of the low temperature region of the nonvolatile memory by temperature rise is also It will fall.

另外,習知的升溫檢測方式中,提供不同的穩定的溫度以使非揮發記憶體的浮動閘極之電荷損失率達臨界值需要耗去較長的時間,無形中增加了測試的成本。In addition, in the conventional temperature rising detection mode, it is necessary to provide different stable temperatures so that the charge loss rate of the floating gate of the non-volatile memory reaches a critical value, which requires a long time, which inevitably increases the cost of the test.

本發明分別提供一種非揮發性記憶體的生命期檢測裝置及方法,用以準確且快速的偵測出非揮發性記憶體的生命期。The present invention respectively provides a non-volatile memory life detecting device and method for accurately and quickly detecting the lifetime of a non-volatile memory.

本發明提出一種非揮發性記憶體單元的生命期檢測方法,包括:首先,提供第一偏壓電壓至非揮發性記憶體單元的控制閘極。接著,偵測非揮發記憶體單元的浮動閘極的電荷損失率,當電荷損失率超過預設臨界值時,記錄第一偏壓電壓作用的第一電荷損失時間。並且,提供第二偏壓電壓至非揮發性記憶體的記憶體單元的控制閘極,再偵測記憶體單元浮動閘極的電荷損失率,當電荷損失率超過預設臨界值時,記錄第二偏壓電壓作用的第二電荷損失時間。接著,提供第三偏壓電壓至非揮發性記憶體單元的控制閘極,再偵測記憶體單元浮動閘極的電荷損失率,當電荷損失率超過預設臨界值時,記錄第三偏壓電壓作用的第三電荷損失時間。最後,依據施加於控制閘極的第一、二、三偏壓電壓以及計算所得的浮接閘極的第一、二、三電荷損失時間來進行物理模型和線性近似外插的算術運算,並藉由算術運算來獲得電場加速所導致的電荷損失因子,並藉以得知非揮發性記憶體單元的生命期,並依據第一、二、三偏壓電壓的電壓值與所對應的第一、二、三電荷損失時間的關係以得到記憶體生命期方程式。The present invention provides a lifetime detection method for a non-volatile memory unit, comprising: first, providing a first bias voltage to a control gate of a non-volatile memory unit. Next, the charge loss rate of the floating gate of the non-volatile memory unit is detected, and when the charge loss rate exceeds a preset threshold, the first charge loss time of the first bias voltage is recorded. And providing a second bias voltage to the control gate of the memory unit of the non-volatile memory, and then detecting the charge loss rate of the floating gate of the memory unit. When the charge loss rate exceeds a preset threshold, the record is recorded. The second charge loss time at which the two bias voltages act. Then, providing a third bias voltage to the control gate of the non-volatile memory unit, and then detecting the charge loss rate of the floating gate of the memory unit, and recording the third bias when the charge loss rate exceeds a preset threshold The third charge loss time of the voltage action. Finally, the physical model and the linear approximate extrapolation arithmetic operation are performed according to the first, second, and third bias voltages applied to the control gate and the calculated first, second, and third charge loss times of the floating gate, and Obtaining a charge loss factor caused by electric field acceleration by an arithmetic operation, and knowing the lifetime of the non-volatile memory unit, and according to the voltage values of the first, second, and third bias voltages and the corresponding first The relationship between the second and third charge loss times is to obtain the memory lifetime equation.

在本發明之一實施例中,上述的偵測記憶體單元的電荷損失率的步驟包括:首先,量測並計算非揮發性記憶體單元的控制閘極被施加第一、二、三偏壓電壓的其中之一時所量測到的位元線的汲極電流。並且,計算位元線的汲極電流與非揮發性記憶體單元未被施加任何偏壓電壓時的位元線的汲極電流的比例以獲得電荷損失率。In an embodiment of the invention, the step of detecting the charge loss rate of the memory unit includes: first, measuring and calculating the control gate of the non-volatile memory unit to be applied with the first, second, and third bias voltages. The drain current of the bit line measured when one of the voltages is measured. And, the ratio of the drain current of the bit line to the drain current of the bit line when the non-volatile memory cell is not applied with any bias voltage is calculated to obtain a charge loss rate.

在本發明之一實施例中,上述的生命期檢測方法的步驟更包括:首先,提供非揮發性記憶體單元以進行測試,接著,提供測試圖樣,並依據測試圖樣針對非揮發性記憶體單元進行充電。In an embodiment of the present invention, the step of the life detecting method further includes: firstly, providing a non-volatile memory unit for testing, and then providing a test pattern and targeting the non-volatile memory unit according to the test pattern. Charge it.

在本發明之一實施例中,上述的提供第一、二、三偏壓電壓至非揮發性記憶體的記憶體單元的控制閘極是用以在記憶體單元的電荷穿隧路徑上產生第一外加電場、第二外加電場以及第三外加電場。In an embodiment of the invention, the control gate of the memory cell providing the first, second, and third bias voltages to the non-volatile memory is used to generate the first on the charge tunneling path of the memory cell. An applied electric field, a second applied electric field, and a third applied electric field.

在本發明之一實施例中,上述之生命期檢測方法,其中更包括:提供至少一第四偏壓電壓至非揮發性記憶體單元的控制閘極,並偵測非揮發性記憶體單元的電荷損失率。當電荷損失率超過預設臨界值時,記錄第四偏壓電壓作用的至少一第四電荷損失時間。In an embodiment of the present invention, the method for detecting a lifetime, further comprising: providing at least a fourth bias voltage to a control gate of the non-volatile memory unit, and detecting the non-volatile memory unit. Charge loss rate. When the charge loss rate exceeds a predetermined threshold, at least a fourth charge loss time at which the fourth bias voltage acts is recorded.

在本發明之一實施例中,上述之生命期檢測方法,其中更包括:依據第四偏壓電壓以及計算所得的浮接閘極的第四電荷損失時間來配合依據第一、二、三偏壓電壓以及計算所得的浮接閘極的第一、二、三電荷損失時間來進行物理模型的線性外插運算以及該線性近似運算,以獲得電場加速電荷損失因子及得出無施加電場時的非揮發性記憶體的生命期。In an embodiment of the present invention, the life cycle detecting method further includes: matching the first, second, and third biases according to the fourth bias voltage and the calculated fourth charge loss time of the floating gate The voltage and the calculated first, second, and third charge loss times of the floating gate are used to perform a linear extrapolation operation of the physical model and the linear approximation operation to obtain an electric field acceleration charge loss factor and to obtain an applied electric field. The lifetime of non-volatile memory.

在本發明之一實施例中,上述之生命期檢測方法更包括施加第五偏壓電壓以檢驗非揮發性記憶體單元的控制閘極,其中施加第五偏壓電壓的有效時間由將第五偏壓電壓值代入記憶體生命期方程式而得到,若非揮發性記憶體在施加第五偏壓的有效作用時間內或結束時己達到預設臨界值,則非揮發性記憶體單元被判定為失效。In an embodiment of the invention, the life detecting method further includes applying a fifth bias voltage to verify a control gate of the non-volatile memory unit, wherein the effective time for applying the fifth bias voltage is determined by the fifth The bias voltage value is substituted into the memory lifetime equation. If the non-volatile memory reaches the preset threshold within the effective time or the end of the effective period of applying the fifth bias, the non-volatile memory unit is determined to be invalid. .

本發明提出一種非揮發性記憶體的生命期檢測裝置,包括偏壓提供電路、控制電路以及電流偵測器。偏壓提供電路耦接非揮發性記憶體,用以透過非揮發性記憶體中的多數個非揮發性記憶體單元所形成的非揮發性記憶體陣列的字線提供第一偏壓電壓、第二偏壓電壓及第三偏壓電壓至非該揮發性記憶體單元的控制閘極。控制電路耦接偏壓提供電路,用以控制偏壓提供電路提供第一、二、三偏壓電壓至非揮發性記憶體陣列的字線的偏壓電壓值及作用時間長度。電流偵測器耦接控制電路及非揮發性記憶體陣列的位元線,用以偵測非揮發性記憶體陣列的浮接閘極的電荷損失率。其中,控制電路在當第一偏壓電壓作用時,且電荷損失率大於預設臨界值時記錄第一電荷損失時間,在當第二偏壓電壓作用時且電荷損失率大於預設臨界值時記錄第二電荷損失時間,以及在當第三偏壓電壓作用時且電荷損失率大於預設臨界值時記錄第三電荷損失時間。依據第一、二、三偏壓電壓以及第一、二、三電荷損失時間來進行物理模型的線性外插運算以及線性近似運算,以獲得電場加速電荷損失因子及得出無施加電場時的非揮發性記憶體的生命期。The invention provides a lifetime detecting device for a non-volatile memory, comprising a bias supply circuit, a control circuit and a current detector. The bias supply circuit is coupled to the non-volatile memory for providing a first bias voltage through a word line of the non-volatile memory array formed by the plurality of non-volatile memory cells in the non-volatile memory The two bias voltages and the third bias voltage are to the control gates that are not the volatile memory cells. The control circuit is coupled to the bias supply circuit for controlling the bias voltage supply circuit to provide the first, second, and third bias voltages to the bias voltage value of the word line of the non-volatile memory array and the duration of the action. The current detector is coupled to the control circuit and the bit line of the non-volatile memory array for detecting the charge loss rate of the floating gate of the non-volatile memory array. Wherein, the control circuit records the first charge loss time when the first bias voltage is applied, and the charge loss rate is greater than a preset threshold, when the second bias voltage acts and the charge loss rate is greater than a preset threshold The second charge loss time is recorded, and the third charge loss time is recorded when the third bias voltage is applied and the charge loss rate is greater than a predetermined threshold. According to the first, second and third bias voltages and the first, second and third charge loss times, the linear extrapolation operation of the physical model and the linear approximation operation are performed to obtain the electric field acceleration charge loss factor and the non-applied electric field is obtained. The lifetime of volatile memory.

基於上述,本發明利用在非揮發性記憶體單元的控制閘極上提供不同的偏壓電壓以產生不同的外加電場。並利用偵測記憶體單元的電荷損失狀態來獲得記憶體單元在不同的外加電場下所產生的電荷損失時間。並且,利用不同的偏壓電壓所產生的不同的電荷損失時間來進行物理模型與線性近似外插算術運算,以求得主導電荷損失之電場加速因子(斜率參數)與非揮發性記憶體的生命期。Based on the above, the present invention utilizes different bias voltages on the control gates of the non-volatile memory cells to produce different applied electric fields. The charge loss state of the memory cell is detected to obtain the charge loss time generated by the memory cell under different applied electric fields. Moreover, physical model and linear approximation extrapolation arithmetic operations are performed using different charge loss times generated by different bias voltages to obtain an electric field accelerating factor (slope parameter) of dominant charge loss and life of non-volatile memory. period.

為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.

以下請參照圖2,圖2繪示本發明的一實施例的非揮發性記憶體的生命期檢測方法200的步驟流程圖。本實施例的生命期檢測方法200的步驟包括:首先,提供第一偏壓電壓至非揮發性記憶體單元的控制閘極(control gate)(步驟S210)。也就是在受測的非揮發性記憶體單元的控制閘極加上第一偏壓電壓,並藉以在記憶體單元中的電荷穿隧路徑上產生一個外加電場。Referring to FIG. 2, FIG. 2 is a flow chart showing the steps of the non-volatile memory lifetime detecting method 200 according to an embodiment of the present invention. The step of the lifetime detection method 200 of the present embodiment includes first providing a first bias voltage to a control gate of the non-volatile memory unit (step S210). That is, a first bias voltage is applied to the control gate of the non-volatile memory cell under test, and an applied electric field is generated on the charge tunneling path in the memory cell.

接下來,則偵測非揮發性記憶體的記憶體單元浮接閘極(floating gate)的電荷損失率,當電荷損失率超過一個預設臨界值時,則記錄第一偏壓電壓作用的第一電荷損失時間(步驟S220)。也就是說,在持續施加第一偏壓電壓的情況下,針對非揮發性記憶體單元浮接閘極的電荷損失率。由於第一偏壓電壓的持續施加,會使得記憶體單元的電荷損失率隨著第一偏壓電壓的施加時間而上升。一旦偵測出記憶體單元的電荷損失率超過一個預設的臨界值時,則記錄下此時第一偏壓電壓所施加的時間長度,以作為非揮發性記憶體單元控制閘極之第一偏壓電壓對應的浮接閘極的第一電荷損失時間。Next, detecting a charge loss rate of a floating gate of a memory cell of the non-volatile memory, and recording a first bias voltage when the charge loss rate exceeds a predetermined threshold A charge loss time (step S220). That is, the charge loss rate of the floating gate for the non-volatile memory cell in the case where the first bias voltage is continuously applied. Due to the continuous application of the first bias voltage, the charge loss rate of the memory cell is increased with the application time of the first bias voltage. Once the charge loss rate of the memory cell is detected to exceed a predetermined threshold, the length of time during which the first bias voltage is applied is recorded as the first control gate of the non-volatile memory unit. The first charge loss time of the floating gate corresponding to the bias voltage.

請注意,所謂的電荷損失率的偵測可以藉由記憶體單元的位元線來量測記憶體單元所提供或汲極流入的電流大小來判斷。依據本領域具通常知識者所熟知的,記憶體單元在依據所要存入的資料進行充電後,內部將會具有一個穩定的臨界電壓(threshold voltage)準位以判別所存儲的資料為數位資料“1”或是“0”。而在當記憶體單元被施加了因第一偏壓電壓而產生的外加電場後,浮接閘極所儲存的電荷將會流失,進而造成所儲存的數位資料“1”或是“0”的臨界電壓準位所能提供或汲極流入的電流值下降。Please note that the detection of the so-called charge loss rate can be determined by measuring the magnitude of the current supplied by the memory cell or the drain of the drain by the bit line of the memory cell. As is well known in the art, the memory unit will internally have a stable threshold voltage to determine the stored data as digital data after being charged according to the data to be stored. 1" or "0". When the applied electric field generated by the first bias voltage is applied to the memory unit, the stored charge of the floating gate will be lost, thereby causing the stored digital data to be "1" or "0". The threshold voltage level can provide or the value of the current flowing into the drain decreases.

另外,預設臨界值則是由測試者進行設定的一個數據。這個預設臨界值的設定是依據非揮發性記憶體中的記憶體單元的電荷損失率的最大產品應用可容忍度來進行的。也就是說,當非揮發記憶體單元的浮接閘極的電荷損失率超過預設臨界值時,就表示這個非揮發性記憶體已經無法判別“1”或“0”。In addition, the preset threshold is a data set by the tester. This preset threshold is set based on the maximum product application tolerance of the charge loss rate of the memory cells in the non-volatile memory. That is to say, when the charge loss rate of the floating gate of the non-volatile memory unit exceeds a preset threshold, it indicates that the non-volatile memory has been unable to discriminate "1" or "0".

在此,電荷損失率的計算可以藉由在當非揮發記憶體單元的控制閘極被施加第一偏壓時,針對非揮發記憶體單元的位元線的汲極電流進行量測,並計算出這個位元線的汲極電流與當非揮發記憶體單元的控制閘極未被施加任何偏壓時所產生的位元線的汲極電流的比值。這個所計算出的比值即為非揮發記憶體單元的浮接閘極的電荷損失率。Here, the charge loss rate can be calculated by measuring the drain current of the bit line of the non-volatile memory cell when the control gate of the non-volatile memory cell is applied with the first bias voltage, and calculating The ratio of the drain current of this bit line to the drain current of the bit line generated when the control gate of the non-volatile memory cell is not applied with any bias voltage. This calculated ratio is the charge loss rate of the floating gate of the non-volatile memory cell.

延續步驟S220,接下則提供第二偏壓電壓至非揮發性記憶體的記憶體單元的控制閘極(步驟S230),並偵測記憶體單元的浮接閘極的電荷損失率,當電荷損失率超過預設臨界值時,同樣的記錄第二偏壓電壓作用的第二電荷損失時間(步驟S240)。Step S220 is continued, followed by providing a second bias voltage to the control gate of the memory unit of the non-volatile memory (step S230), and detecting the charge loss rate of the floating gate of the memory unit, when the charge When the loss rate exceeds the preset threshold, the second charge loss time at which the second bias voltage acts is also recorded (step S240).

在此請注意,在步驟S210中控制閘極的第一偏壓電壓與步驟S230中的第二偏壓電壓的電壓值是不相同的。簡單來說,就是針對非揮發性記憶體的記憶體單元提供不同大小的控制閘極的偏壓電壓(外加電場),並且藉由浮接閘極的電荷損失率的量測,來記錄出在不同的外加電場下非揮發性記憶體的不同的電荷損失時間。Note here that the first bias voltage for controlling the gate in step S210 is different from the voltage value of the second bias voltage in step S230. To put it simply, the memory cells of the non-volatile memory are provided with bias voltages (applied electric fields) of control gates of different sizes, and are recorded by the measurement of the charge loss rate of the floating gates. Different charge loss times for non-volatile memory under different applied electric fields.

接著,提供第三偏壓電壓至非揮發性記憶體的記憶體單元的控制閘極(步驟S250),並偵測記憶體單元的浮接閘極的電荷損失率,當電荷損失率超過預設臨界值時,同樣的記錄第三偏壓電壓作用的第三電荷損失時間(步驟S260)。在此,上述的第一、二、三偏壓的電壓值均不相等。Next, providing a third bias voltage to the control gate of the memory unit of the non-volatile memory (step S250), and detecting the charge loss rate of the floating gate of the memory unit, when the charge loss rate exceeds the preset At the critical value, the third charge loss time at which the third bias voltage acts is also recorded (step S260). Here, the voltage values of the first, second, and third bias voltages described above are not equal.

最後,則依據第一、二、三施於控制閘極的偏壓電壓以及計算浮接閘極的第一、二、三電荷損失時間來進行算術運算,並藉由重複數個不同的偏壓與所計算出的浮接閘極的電荷損失時間來進行這個算術運算,以得出電場加速因子以及電荷損失率,進而獲得非揮發性記憶體的生命期(步驟S270),並依據第一、二、三偏壓電壓的電壓值與所對應的第一、二、三電荷損失時間的關係以得到記憶體生命期方程式。Finally, the arithmetic operation is performed according to the first, second, and third bias voltages applied to the control gate and the first, second, and third charge loss times of the floating gate, and by repeating several different bias voltages. Performing an arithmetic operation on the calculated charge loss time of the floating gate to obtain an electric field acceleration factor and a charge loss rate, thereby obtaining a lifetime of the non-volatile memory (step S270), and according to the first, The relationship between the voltage values of the two and three bias voltages and the corresponding first, second, and third charge loss times to obtain a memory lifetime equation.

值得一提的是,除了提供三個不同的偏壓電壓來對受測的非揮發性記憶體進行生命期檢測外,還可以更增加至少一個不同於控制閘極的偏壓電壓,例如提供第四偏壓電壓至非揮發性記憶體的記憶體單元的控制閘極以獲得第四電荷損失時間,並藉以與第一、二、三偏壓電壓與第一、二、三電荷損失時間來進行物理模型的線性外插運算以及線性近似運算,來對非揮發性記憶體進行生命期檢測。It is worth mentioning that in addition to providing three different bias voltages for lifetime detection of the non-volatile memory under test, it is also possible to add at least one bias voltage different from the control gate, for example, providing Four bias voltages to the control gate of the memory cell of the non-volatile memory to obtain a fourth charge loss time, and thereby with the first, second, and third bias voltages and the first, second, and third charge loss times Linear extrapolation of physical models and linear approximation to perform lifetime detection of non-volatile memory.

在本實施例中,所謂的算術運算可以利用第一偏壓電壓、第一電荷損失時間,第二偏壓電壓、第二電荷損失時間的比例關係以及第三偏壓電壓、第三電荷損失時間的比例關係,利用物理模型的線性外插運算法來計算出當非揮發性記憶體未被施加外加電場時的電荷損失時間。而這個未被施加外加電場時的電荷損失時間也就等同是受測的非揮發性記憶體的生命期(S270)。在此,所謂的物理模型是針對非揮發性記憶體單元利用物理效應機制所計算而獲得,為本領域具通常知識者所熟知,此處恕不詳述。In this embodiment, the so-called arithmetic operation may utilize a first bias voltage, a first charge loss time, a second bias voltage, a second charge loss time proportional relationship, and a third bias voltage and a third charge loss time. The proportional relationship uses a linear extrapolation algorithm of the physical model to calculate the charge loss time when the non-volatile memory is not applied with an applied electric field. The charge loss time when the applied electric field is not applied is equivalent to the lifetime of the non-volatile memory to be tested (S270). Here, the so-called physical model is obtained by calculation of a non-volatile memory unit using a physical effect mechanism, which is well known to those of ordinary skill in the art and will not be described in detail herein.

由於第一、二及三電荷損失時間(或者更多的電荷損失時間)並不一定會呈現完美的線性排列。因此,在獲取的超過兩個的偏壓電壓及電荷損失時間之對應關係下,可以利用數值分析中常見的所謂的最佳線性近似的方法來進行算術運算,並藉以求得無施加外加電場的非揮發性記憶體的浮接閘極的電荷損失時間,也就是非揮發性記憶體的生命期。Since the first, second and third charge loss times (or more charge loss time) do not necessarily exhibit a perfect linear alignment. Therefore, under the correspondence of more than two obtained bias voltages and charge loss times, the so-called optimal linear approximation method commonly used in numerical analysis can be used to perform arithmetic operations, and thereby obtaining no applied external electric field. The charge loss time of the floating gate of a non-volatile memory, that is, the lifetime of a non-volatile memory.

除此之外,本實施例可以更施加第五偏壓電壓以檢驗非揮發性記憶體單元的控制閘極,其中施加第五偏壓電壓的有效時間由將第五偏壓電壓值代入記憶體生命期方程式而得到。若非揮發性記憶體在施加第五偏壓的有效作用時間內或結束時己達到預設臨界值,則非揮發性記憶體單元被判定為失效。In addition, the embodiment may further apply a fifth bias voltage to verify the control gate of the non-volatile memory unit, wherein the effective time for applying the fifth bias voltage is substituted into the memory by the fifth bias voltage value. Obtained from the equation of life. The non-volatile memory unit is determined to be ineffective if the non-volatile memory has reached a predetermined threshold during the effective time or end of application of the fifth bias.

以下請參照圖3A,圖3A繪示依據本發明實施例所產生於控制閘極的偏壓電壓的電壓值及其作用時間與浮接閘極的電荷損失率的關係圖。其中曲線311~317分別表示在不同電壓的偏壓電壓(例如分別為-9V、-8V、-7V、-6V、-5V、-4V、-3V)下,所量測得的浮接閘極的電荷損失率與產生於控制閘極的偏壓電壓的作用時間的關係曲線。在本實施例中,所設定的預設臨界值為75%。也就是說,當電荷損失率超過25%(100%-75%)時,偏壓電壓的施加時間即為電荷損失時間。以曲線313為例,當施加偏壓電壓為-7V時,非揮發性記憶體的電荷損失時間為101 秒,也就是10秒。Referring to FIG. 3A, FIG. 3A is a diagram showing a relationship between a voltage value of a bias voltage generated at a control gate and a duty time thereof and a charge loss rate of a floating gate according to an embodiment of the invention. Curves 311 to 317 indicate the measured floating gates under different bias voltages (for example, -9V, -8V, -7V, -6V, -5V, -4V, -3V, respectively). The charge loss rate is plotted against the time of action of the bias voltage that controls the gate. In this embodiment, the preset threshold value set is 75%. That is, when the charge loss rate exceeds 25% (100% to 75%), the application time of the bias voltage is the charge loss time. Taking curve 313 as an example, when the bias voltage is applied to -7V, the charge loss time of the non-volatile memory is 10 1 second, that is, 10 seconds.

接著請同時參照圖3A及圖3B,其中的圖3B繪示依據圖3A所產生的偏壓電壓與對應穿隧電場及電荷損失時間的關係圖。其中對應點311P~317P分別對應圖3A的曲線311~317。簡單來說,圖3A繪示的曲線313表示偏壓電壓為-7V時電荷損失時間為10秒,對應到圖3B即為對應點313P。其餘各對應點與各曲線的對應關係可依據上述曲線313及對應點313P來推出,在此不多贅述。圖3B另繪示出偏壓電壓的大小與所產生的外加電場的關係,以對應點313P為範例,當偏壓電壓等於-7V時,外加電場為9MV/cm。Referring to FIG. 3A and FIG. 3B simultaneously, FIG. 3B is a diagram showing the relationship between the bias voltage generated according to FIG. 3A and the corresponding tunneling electric field and the charge loss time. The corresponding points 311P~317P correspond to the curves 311~317 of FIG. 3A, respectively. Briefly, the curve 313 shown in FIG. 3A indicates that the charge loss time is 10 seconds when the bias voltage is -7 V, and corresponds to FIG. 3B as the corresponding point 313P. Corresponding relationship between the corresponding points and the respective curves may be derived according to the above-mentioned curve 313 and the corresponding point 313P, and details are not described herein. FIG. 3B further illustrates the relationship between the magnitude of the bias voltage and the applied applied electric field. Taking the corresponding point 313P as an example, when the bias voltage is equal to -7 V, the applied electric field is 9 MV/cm.

在此請特別注意,對應點312P~317P的排列整齊並幾乎以線性方式呈現,而對應點311P則不然。對應點311P因為施加了過大的偏壓電壓(-9V)並產生過大的外加電場,進而造成了極短的電荷損失時間。顯然的對應點311P這個數據並不是有參考價值,而可以予以捨棄。而在捨棄掉對應點311P的狀況下,針對對應點312P~317P就可以利用例如是最佳線性近似的算術運算來計算出直線320。並透過計算出直線320與圖3B繪示的關係的垂直軸的交點,而對應點312P~317P所計算出的直線斜率的值即為電場加速因子。再利用電場加速因子搭配電荷損失率便可以得知在無施加外加電場狀況下的受測非揮發性記憶體的生命期。請特別注意,上述的線性物理模型僅只是作為範例的一種簡單的線性物理模型,並不代表本發明必須受限一定要使用如上述的線性物理模型。Please pay special attention here, the arrangement of the corresponding points 312P~317P is neat and almost linear, while the corresponding point 311P is not. The corresponding point 311P causes an excessively large applied voltage by applying an excessive bias voltage (-9 V), thereby causing an extremely short charge loss time. Obviously the corresponding point 311P data is not a reference value, but can be discarded. In the case where the corresponding point 311P is discarded, the straight line 320 can be calculated for the corresponding points 312P to 317P by, for example, an arithmetic operation of the best linear approximation. And by calculating the intersection of the vertical axis of the relationship between the line 320 and FIG. 3B, the value of the slope of the line calculated by the corresponding points 312P to 317P is the electric field acceleration factor. By using the electric field acceleration factor and the charge loss rate, the lifetime of the tested non-volatile memory without applying an applied electric field can be known. It is important to note that the linear physical model described above is merely a simple linear physical model as an example, and does not mean that the invention must be limited to use a linear physical model as described above.

為更清楚說明本發明的非揮發性記憶體的測試方法實施例的動作細節,以下將提出一個實際的例子來加以說明。進而使本領域具通常知識者可以更輕易的瞭解本發明的特點。In order to more clearly illustrate the details of the operation of the embodiment of the test method for non-volatile memory of the present invention, a practical example will be presented below. Further, the features of the present invention can be more easily understood by those of ordinary skill in the art.

在進行檢測時,首先將完成製程流程之非揮發性記憶體的晶片至入測試機台中,並利用晶片級(wafer level)的測試機台透過例如是探針卡(probe card)或其他的方式來對晶片上的其中一顆的非揮發性記憶體進行測試圖樣(test pattern)的寫入動作。這個測試圖樣由測試工程師輸入至測試機台,其中包括有多數個不相同“0”與“1”的數位信號。測試機台會將測試圖樣針對受測非揮發性記憶體的多個記憶體單元(亦可稱為記憶體陣列(array)單元)進行充電(也就是寫入)。When performing the test, the non-volatile memory wafer that completes the process flow is first introduced into the test machine, and the wafer level test machine is used to pass through, for example, a probe card or other means. To write a test pattern to the non-volatile memory of one of the wafers. This test pattern is input by the test engineer to the test machine, which includes a number of digital signals that are different from "0" and "1". The test machine charges (ie, writes) the test pattern to a plurality of memory cells (also referred to as memory array cells) of the non-volatile memory under test.

在完成上述的充電動作後,測試機台在不同時間點針對受測的非揮發性記憶體提供不同的偏壓電壓,並依據前述實施例中所說明的動作步驟來獲得不同的電荷損失時間。最後,測試機台再利用所獲得的電荷損失時間與對應施加的偏壓電壓來進行算術運算,並獲得受測的非揮發性記憶體的生命期。After completing the charging operation described above, the test machine provides different bias voltages for the tested non-volatile memory at different points in time, and obtains different charge loss times according to the action steps described in the foregoing embodiments. Finally, the test machine reuses the obtained charge loss time and the corresponding applied bias voltage for arithmetic operations, and obtains the lifetime of the measured non-volatile memory.

以下請參照圖4A,圖4A繪示本發明另一實施例的非揮發性記憶體的生命期檢測裝置的示意圖。其中,生命期檢測裝置410耦接至非揮發性記憶體,且生命期檢測裝置410包括控制電路411、偏壓提供電路412及電流偵測器413。偏壓提供電路412耦接非揮發性記憶體,用以提供不同的偏壓電壓VBIAS1、VBIAS2、VBIAS3至非揮發性記憶體的記憶體單元420的字線(word line)(控制閘極CG)。控制電路411則耦接偏壓提供電路412,用以控制偏壓提供電路412提供偏壓電壓VBIAS1、VBIAS2、VBIAS3至記憶體單元420的控制閘極CG的偏壓電壓值及時間長度。電流偵測器413則耦接控制電路411及非揮發性記憶體單元的源極Source及汲極Drain,用以偵測記憶體單元420的浮接閘極FG的電荷損失率。Referring to FIG. 4A, FIG. 4A is a schematic diagram of a lifetime detecting device for a non-volatile memory according to another embodiment of the present invention. The lifetime detecting device 410 is coupled to the non-volatile memory, and the lifetime detecting device 410 includes a control circuit 411, a bias providing circuit 412, and a current detector 413. The bias supply circuit 412 is coupled to the non-volatile memory for providing different bias voltages VBIAS1, VBIAS2, VBIAS3 to the word line of the memory unit 420 of the non-volatile memory (control gate CG) . The control circuit 411 is coupled to the bias supply circuit 412 for controlling the bias voltage supply circuit 412 to provide the bias voltage VBIAS1, VBIAS2, VBIAS3 to the bias voltage value and duration of the control gate CG of the memory unit 420. The current detector 413 is coupled to the source circuit Source and the drain Drain of the control circuit 411 and the non-volatile memory unit for detecting the charge loss rate of the floating gate FG of the memory unit 420.

在此請注意,圖4A僅繪示單一個記憶體單元420只是為了清楚的呈現本實施例的實施動作,並不表示生命期檢測裝置410僅能針對一個記憶體單元進行檢測。事實上,受測的非揮發性記憶體中,所有的記憶體陣列單元都可以透過生命期檢測裝置410一次性的檢測完成。It should be noted that FIG. 4A only shows a single memory unit 420 for the sake of clear implementation of the embodiment, and does not mean that the lifetime detecting device 410 can only detect for one memory unit. In fact, in the non-volatile memory under test, all of the memory array units can be completed by one-time detection by the lifetime detecting device 410.

此外,控制電路411在當第一偏壓電壓VBIAS1作用時且電荷損失率大於預設臨界值時記錄第一電荷損失時間,以及分別在當第二、三偏壓電壓VBIAS2、VBIAS3作用時且電荷損失率大於預設臨界值時的第二、三電荷損失時間。控制電路411更依據第一、二、三偏壓電壓VBIAS1、VBIAS2、VBIAS3以及第一、二、三電荷損失時間來進行算術運算,並藉由算術運算來獲得非揮發性記憶體的生命期。Further, the control circuit 411 records the first charge loss time when the first bias voltage VBIAS1 acts and the charge loss rate is greater than a predetermined threshold, and the charge when the second and third bias voltages VBIAS2, VBIAS3 are respectively applied. The second and third charge loss times when the loss rate is greater than the preset threshold. The control circuit 411 performs arithmetic operations according to the first, second, and third bias voltages VBIAS1, VBIAS2, VBIAS3, and the first, second, and third charge loss times, and obtains the lifetime of the non-volatile memory by arithmetic operations.

關於本實施例的非揮發性記憶體的生命期檢測裝置410的動作細節則與本發明的非揮發性記憶體的生命期檢測方法的實施例相同,在此則不重複說明。The details of the operation of the non-volatile memory lifetime detecting device 410 of the present embodiment are the same as those of the embodiment of the non-volatile memory lifetime detecting method of the present invention, and the description thereof will not be repeated.

另外,請參照圖4B,圖4B繪示本發明實施例的生命期檢測裝置410檢測非揮發性記憶體陣列的示意圖。其中,圖4B繪示的非揮發性記憶體陣列僅只是一個最簡單的範例。在圖4B的繪示中,生命期檢測裝置410同樣可以耦接到由多數個非揮發性記憶體單元4201~420N所組成的非揮發性記憶體陣列的生命期。其中,偏壓提供電路412透過字線WL1~WLn提供偏壓電壓至各非揮發性記憶體單元4201~420N,而電流偵測器413則藉由位元線BL1~BLm來偵測非揮發性記憶體單元4201~420N的汲極電流。如此一來,位在非揮發性記憶體陣列中的所有的非揮發性記憶體單元4201~420N的生命期,就可以藉由生命期檢測裝置410來獲知。In addition, please refer to FIG. 4B. FIG. 4B is a schematic diagram of detecting the non-volatile memory array by the lifetime detecting device 410 according to the embodiment of the present invention. Among them, the non-volatile memory array shown in FIG. 4B is only one of the simplest examples. In the depiction of FIG. 4B, the lifetime detection device 410 can also be coupled to the lifetime of a non-volatile memory array composed of a plurality of non-volatile memory cells 4201-420N. The bias supply circuit 412 provides a bias voltage to the non-volatile memory cells 4201 to 420N through the word lines WL1 WL WLn, and the current detector 413 detects the non-volatile by the bit lines BL1 BL BLm. The drain current of the memory cells 4201 to 420N. As such, the lifetime of all of the non-volatile memory cells 4201-420N located in the non-volatile memory array can be known by the lifetime detection device 410.

綜上所述,本發明藉由在非揮發性記憶體的記憶體單元上的控制閘極施加不同的偏壓電壓以提供記憶體單元外加電場。並透過記憶體單元的浮接閘極的電荷損失率的量測,來獲得非揮發性記憶體在不同偏壓電壓下的電荷損失時間。再藉由獲得電荷損失時間與對應的偏壓電壓來進行算術運算,檢測出電場加速因子和非揮發性記憶體的生命期。這種施加外加電場的方法並不會因為非揮發性記憶體的底部氧化層的厚薄而產生影響,可以檢測出準確的非揮發性記憶體的生命期。並且,施加偏壓電壓所需的上升(升壓)及穩定時間較短,有效節省時間成本。In summary, the present invention provides a memory unit applied electric field by applying different bias voltages to the control gates on the memory cells of the non-volatile memory. And the charge loss time of the non-volatile memory under different bias voltages is obtained by measuring the charge loss rate of the floating gate of the memory unit. The arithmetic operation is performed by obtaining the charge loss time and the corresponding bias voltage, and the electric field acceleration factor and the lifetime of the non-volatile memory are detected. This method of applying an applied electric field does not affect the thickness of the bottom oxide layer of the non-volatile memory, and the lifetime of the accurate non-volatile memory can be detected. Moreover, the rise (boost) and settling time required to apply the bias voltage are short, which saves time and cost.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

110~140、311~317‧‧‧曲線110~140, 311~317‧‧‧ Curve

200‧‧‧生命期檢測方法200‧‧‧Lifetime detection method

311P~317P‧‧‧對應點311P~317P‧‧‧ corresponding point

320‧‧‧直線320‧‧‧ Straight line

410‧‧‧生命期檢測裝置410‧‧‧Lifetime detection device

411‧‧‧控制電路411‧‧‧Control circuit

412‧‧‧偏壓提供電路412‧‧‧ bias supply circuit

413‧‧‧電流偵測器413‧‧‧ Current Detector

420、4201~420N‧‧‧記憶體單元420, 4201~420N‧‧‧ memory unit

VBIAS1、VBIAS2、VBIAS3‧‧‧偏壓電壓VBIAS1, VBIAS2, VBIAS3‧‧‧ bias voltage

FG‧‧‧浮接閘極FG‧‧‧Floating gate

CG‧‧‧控制閘極CG‧‧‧Control gate

Source‧‧‧源極Source‧‧‧ source

Drain‧‧‧汲極Drain‧‧‧汲

S210~S270‧‧‧檢測方法的步驟Steps of the S210~S270‧‧‧ test method

BL1~BLn‧‧‧位元線BL1~BLn‧‧‧ bit line

WL1~WLn‧‧‧字線WL1~WLn‧‧‧ word line

圖1繪示非揮發性記憶體在不同溫度對應電荷損失率達臨界值之時間關係圖。FIG. 1 is a graph showing the time relationship of the non-volatile memory at a different temperature corresponding to a charge loss rate reaching a critical value.

圖2繪示本發明的一實施例的非揮發性記憶體的生命期檢測方法200的步驟流程圖。2 is a flow chart showing the steps of a lifetime detection method 200 for a non-volatile memory according to an embodiment of the invention.

圖3A繪示依據本發明實施例所產生的偏壓電壓的電壓值及其作用時間與電荷損失率的關係圖。FIG. 3A is a graph showing the relationship between the voltage value of the bias voltage and its action time and the charge loss rate according to an embodiment of the invention. FIG.

圖3B繪示依據圖3A所產生的偏壓電壓與對應穿隧電場及電荷損失時間的關係圖。FIG. 3B is a graph showing the relationship between the bias voltage generated according to FIG. 3A and the corresponding tunneling electric field and the charge loss time.

圖4A繪示本發明另一實施例的非揮發性記憶體的生命期檢測裝置的示意圖。4A is a schematic diagram of a lifetime detecting device for a non-volatile memory according to another embodiment of the present invention.

圖4B繪示本發明實施例的生命期檢測裝置410檢測非揮發性記憶體陣列的示意圖。FIG. 4B is a schematic diagram of the lifetime detecting device 410 detecting the non-volatile memory array according to the embodiment of the present invention.

200...生命期檢測方法200. . . Lifetime detection method

S210~S270...檢測方法的步驟S210~S270. . . Steps of the detection method

Claims (15)

一種非揮發性記憶體單元的生命期(life time)檢測方法,包括:提供一第一偏壓電壓至該非揮發性記憶體單元的控制閘極;偵測該非揮發性記憶體單元的一電荷損失率,當該電荷損失率超過一預設臨界值時,記錄該第一偏壓電壓作用的一第一電荷損失時間;提供一第二偏壓電壓至該非揮發性記憶體單元的控制閘極;偵測該些記憶體單元的該電荷損失率,當該電荷損失率超過該預設臨界值時,記錄該第二偏壓電壓作用的一第二電荷損失時間;提供一第三偏壓電壓至該非揮發性記憶體單元的該些記憶體單元的控制閘極;偵測該些記憶體單元的該電荷損失率,當該電荷損失率超過該預設臨界值時,記錄該第三偏壓電壓作用的一第三電荷損失時間;以及依據施加於控制閘極的該第一、二、三偏壓電壓以及計算所得的浮接閘極的該第一、二、三電荷損失時間來進行一物理模型的線性外插運算以及一線性近似運算,以獲得一電場加速電荷損失因子及得出無施加電場時的該非揮發性記憶體的生命期,並依據該第一、二、三偏壓電壓的電壓值與所對應的該第一、二、三電荷損失時間的關係得 到一記憶體生命期方程式。 A life time detecting method for a non-volatile memory unit includes: providing a first bias voltage to a control gate of the non-volatile memory unit; detecting a charge loss of the non-volatile memory unit Rate, when the charge loss rate exceeds a predetermined threshold, recording a first charge loss time of the first bias voltage; providing a second bias voltage to the control gate of the non-volatile memory unit; Detecting the charge loss rate of the memory cells, when the charge loss rate exceeds the predetermined threshold, recording a second charge loss time of the second bias voltage; providing a third bias voltage to a control gate of the memory cells of the non-volatile memory unit; detecting the charge loss rate of the memory cells, and recording the third bias voltage when the charge loss rate exceeds the predetermined threshold a third charge loss time of the action; and the first, second, and third charge loss times according to the first, second, and third bias voltages applied to the control gate and the calculated floating gate Performing a linear extrapolation operation of a physical model and a linear approximation operation to obtain an electric field acceleration charge loss factor and obtaining a lifetime of the non-volatile memory when no electric field is applied, and according to the first, second, and third biases The voltage value of the voltage is related to the corresponding first, second and third charge loss time To a memory life cycle equation. 如申請專利範圍第1項所述之生命期檢測方法,其中偵測該記憶體單元的浮接閘極的電荷損失率的步驟包括:量測並計算該非揮發性記憶體單元的該控制閘極被施加該第一、二、三偏壓電壓的其中之一時所量測到的一汲極電流;以及計算該汲極電流與該非揮發性記憶體單元未被施加任何偏壓電壓時的汲極電流的比例以獲得該電荷損失率。 The method for detecting a lifetime of the floating gate according to claim 1, wherein the step of detecting a charge loss rate of the floating gate of the memory unit comprises: measuring and calculating the control gate of the non-volatile memory unit a drain current measured when one of the first, second, and third bias voltages is applied; and calculating a drain current when the drain current is not applied to the non-volatile memory cell The ratio of the currents is obtained to obtain the charge loss rate. 如申請專利範圍第1項所述之生命期檢測方法,其中更包括:提供該非揮發性記憶體單元以進行測試;以及提供一測試圖樣,並依據該測試圖樣針對該非揮發性記憶體單元進行充電。 The method for detecting a lifetime according to claim 1, further comprising: providing the non-volatile memory unit for testing; and providing a test pattern and charging the non-volatile memory unit according to the test pattern . 如申請專利範圍第1項所述之生命期檢測方法,其中該線性近似運算為最佳線性近似外插運算法。 The life cycle detecting method according to claim 1, wherein the linear approximation operation is an optimal linear approximation extrapolation algorithm. 如申請專利範圍第1項所述之生命期檢測方法,其中提供該第一、二、三偏壓電壓至該非揮發性記憶體的該非揮發性記憶體單元的控制閘極是用以在該非揮發性記憶體單元的電荷穿隧路徑上產生一第一外加電場、一第二外加電場以及一第三外加電場。 The method for detecting a lifetime according to claim 1, wherein the first, second, and third bias voltages are supplied to the control gate of the non-volatile memory unit of the non-volatile memory for use in the non-volatile A first applied electric field, a second applied electric field, and a third applied electric field are generated on the charge tunneling path of the memory cell. 如申請專利範圍第1項所述之生命期檢測方法,其中更包括:提供至少一第四偏壓電壓至該非揮發性記憶體單元 的控制閘極;偵測該非揮發性記憶體單元的該電荷損失率,當該電荷損失率超過該預設臨界值時,記錄該第四偏壓電壓作用的至少一第四電荷損失時間。 The method for detecting a lifetime according to claim 1, further comprising: providing at least a fourth bias voltage to the non-volatile memory unit Controlling the gate; detecting the charge loss rate of the non-volatile memory cell, and recording the at least one fourth charge loss time of the fourth bias voltage when the charge loss rate exceeds the predetermined threshold. 如申請專利範圍第6項所述之生命期檢測方法,其中更包括:依據該第四偏壓電壓以及計算所得的浮接閘極的該第四電荷損失時間來配合依據該第一、二、三偏壓電壓以及計算所得的浮接閘極的該第一、二、三電荷損失時間來進行該物理模型的線性外插運算以及該線性近似運算,以獲得該電場加速電荷損失因子及得出無施加電場時的該非揮發性記憶體的生命期。 The method for detecting a lifetime according to claim 6, wherein the method further comprises: matching the fourth bias voltage and the calculated fourth charge loss time of the floating gate according to the first, second, a three-bias voltage and the calculated first, second, and third charge loss times of the floating gate to perform a linear extrapolation operation of the physical model and the linear approximation operation to obtain the electric field acceleration charge loss factor and The lifetime of the non-volatile memory when no electric field is applied. 如申請專利範圍第1項所述之生命期檢測方法,其中更包括:施加一第五偏壓電壓以檢驗該非揮發性記憶體單元的控制閘極,其中施加該第五偏壓電壓的有效時間由將第五偏壓電壓值代入該記憶體生命期方程式而得到,若該非揮發性記憶體在施加該第五偏壓的有效作用時間內或結束時己達到該預設臨界值,則該非揮發性記憶體單元被判定為失效。 The method of detecting a lifetime according to claim 1, further comprising: applying a fifth bias voltage to verify a control gate of the non-volatile memory unit, wherein an effective time of applying the fifth bias voltage Obtaining the fifth bias voltage value into the memory lifetime equation, if the non-volatile memory reaches the preset threshold during the effective time or end of applying the fifth bias, the non-volatile The memory unit is determined to be invalid. 一種非揮發性記憶體的生命期檢測裝置,包括:一偏壓提供電路,耦接該非揮發性記憶體,用以透過該非揮發性記憶體中的多數個非揮發性記憶體單元所形成的一非揮發性記憶體陣列的字線提供一第一偏壓電壓、一 第二偏壓電壓及一第三偏壓電壓至該些非該揮發性記憶體單元的控制閘極;一控制電路,耦接該偏壓提供電路,用以控制該偏壓提供電路提供該第一、二、三偏壓電壓至該非揮發性記憶體陣列的字線的偏壓電壓值及作用時間長度;以及一電流偵測器,耦接該控制電路及該非揮發性記憶體,用以偵測該非揮發性記憶體陣列的浮接閘極的電荷損失率,其中,該控制電路在當該第一偏壓電壓作用時,且該電荷損失率大於一預設臨界值時記錄一第一電荷損失時間,在當該第二偏壓電壓作用時且該電荷損失率大於該預設臨界值時記錄一第二電荷損失時間,以及在當該第三偏壓電壓作用時且該電荷損失率大於該預設臨界值時記錄一第三電荷損失時間,該控制電路更依據該第一、二、三偏壓電壓以及該第一、二、三電荷損失時間來進行一物理模型的線性外插運算以及一線性近似運算,以獲得一電場加速電荷損失因子及得出無施加電場時的該非揮發性記憶體的生命期,並依據該第一、二、三偏壓電壓的電壓值與所對應的該第一、二、三電荷損失時間的關係以得到一記憶體生命期方程式。 A non-volatile memory lifetime detecting device includes: a bias providing circuit coupled to the non-volatile memory for transmitting a plurality of non-volatile memory cells in the non-volatile memory The word line of the non-volatile memory array provides a first bias voltage, one a second bias voltage and a third bias voltage to the control gates of the non-volatile memory unit; a control circuit coupled to the bias supply circuit for controlling the bias supply circuit to provide the first a bias voltage value of the first, second, and third bias voltages to the word line of the non-volatile memory array and a duration of the action time; and a current detector coupled to the control circuit and the non-volatile memory for detecting Measuring a charge loss rate of the floating gate of the non-volatile memory array, wherein the control circuit records a first charge when the first bias voltage is applied and the charge loss rate is greater than a predetermined threshold Loss time, recording a second charge loss time when the second bias voltage is applied and the charge loss rate is greater than the predetermined threshold, and when the third bias voltage is applied and the charge loss rate is greater than The preset threshold value records a third charge loss time, and the control circuit performs a linear extrapolation operation of the physical model according to the first, second, and third bias voltages and the first, second, and third charge loss times. And a linear approximation operation to obtain an electric field acceleration charge loss factor and to obtain a lifetime of the non-volatile memory when no electric field is applied, and according to the voltage values of the first, second, and third bias voltages The relationship of the first, second, and third charge loss times is to obtain a memory lifetime equation. 如申請專利範圍第9項所述之生命期檢測裝置,其中偵測該非揮發性記憶體陣列的電荷損失率的步驟包括:該電流偵測器量測並計算該非揮發性記憶體陣列的 字線被施加該第一、二、三偏壓電壓的其中之一時所量測到的位元線之一汲極電流,且計算位元線之該汲極電流與該非揮發性記憶體陣列未被施加任何偏壓電壓時的位元線之該汲極電流的比例以獲得該電荷損失率。 The life detecting device of claim 9, wherein the step of detecting a charge loss rate of the non-volatile memory array comprises: measuring, and calculating, the non-volatile memory array by the current detector a drain current of one of the bit lines measured when the word line is applied to one of the first, second, and third bias voltages, and calculating the drain current of the bit line and the non-volatile memory array The ratio of the drain current of the bit line when any bias voltage is applied to obtain the charge loss rate. 如申請專利範圍第9項所述之生命期檢測裝置,其中該控制電路更包括依據一測試圖樣來針對該非揮發性記憶體陣列進行充電。 The life-time detecting device of claim 9, wherein the control circuit further comprises charging the non-volatile memory array according to a test pattern. 如申請專利範圍第9項所述之生命期檢測裝置,其中該偏壓提供電路提供該第一、二、三偏壓電壓至該非揮發性記憶體的該非揮發性記憶體陣列的字線是用以在該記憶體單元陣列的電荷穿隧路徑上產生一第一外加電場、一第二外加電場以及一第三外加電場。 The life detecting device of claim 9, wherein the bias providing circuit provides the first, second, and third bias voltages to the word line of the non-volatile memory array of the non-volatile memory. A first applied electric field, a second applied electric field, and a third applied electric field are generated on the charge tunneling path of the memory cell array. 如申請專利範圍第9項所述之生命期檢測裝置,其中該控制電路更控制該偏壓提供電路提供至少一第四偏壓電壓至該非揮發性記憶體單元的控制閘極,該電流偵測器並偵測該非揮發性記憶體單元的該電荷損失率,當該電荷損失率超過該預設臨界值時,記錄該第四偏壓電壓作用的至少一第四電荷損失時間。 The life detecting device of claim 9, wherein the control circuit further controls the bias providing circuit to provide at least a fourth bias voltage to a control gate of the non-volatile memory unit, the current detecting And detecting the charge loss rate of the non-volatile memory unit, and recording the at least one fourth charge loss time of the fourth bias voltage when the charge loss rate exceeds the predetermined threshold. 如申請專利範圍第13項所述之生命期檢測裝置,其中該控制電路更包括依據該第四偏壓電壓以及計算所得的浮接閘極的該第四電荷損失時間來配合依據該第一、二、三偏壓電壓以及計算所得的浮接閘極的該第一、二、三電荷損失時間來進行該物理模型的線性外插運算以及該線性近似運算,以獲得該電場加速電荷損失因子及得 出無施加電場時的該非揮發性記憶體的生命期。 The life detecting device of claim 13, wherein the control circuit further comprises: according to the fourth bias voltage and the calculated fourth charge loss time of the floating gate, according to the first And a second linear bias voltage and the calculated first, second, and third charge loss times of the floating gate to perform a linear extrapolation operation of the physical model and the linear approximation operation to obtain the electric field accelerated charge loss factor and Got The lifetime of the non-volatile memory when no electric field is applied. 如申請專利範圍第9項所述之生命期檢測裝置,其中該偏壓提供電路更施加一第五偏壓電壓以檢驗該非揮發性記憶體單元的控制閘極,其中施加該第五偏壓電壓的有效時間由將第五偏壓電壓值代入該記憶體生命期方程式而得到,若該非揮發性記憶體在施加該第五偏壓的有效作用時間內或結束時己達到該預設臨界值,則該非揮發性記憶體單元被判定為失效。 The life detecting device of claim 9, wherein the bias providing circuit further applies a fifth bias voltage to verify a control gate of the non-volatile memory unit, wherein the fifth bias voltage is applied The effective time is obtained by substituting the fifth bias voltage value into the memory lifetime equation, and if the non-volatile memory reaches the preset threshold during the effective time or end of applying the fifth bias, Then the non-volatile memory unit is determined to be invalid.
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