TWI426244B - Dead weight machine - Google Patents

Description

Static code machine

The invention relates to a static code machine, in particular to a force standard machine for balancing the initial weight of the frame to be corrected by using a gas bearing balance and reading the balance point by using a non-contact type laser interferometer, which can reduce the indication error. The value is in the range of 0.01%), and the accuracy of the measured value is improved, and is especially suitable for a static power code machine with a small force (below 1 KN), and the machine of the present invention is small in size and can reduce the occupied space.

The traditional static code machine, due to the limited correction of the initial weight of the frame type hanging of the part to be tested (measured), the use of the frame type hanging of the calibration (test) must be regarded as the first A code, but the structure of the frame type hanging to correct the calibration (measured) is complicated, and it is difficult to reach the rated weight. For the static code machine below 1 KN, the frame type is too heavy. Can not be used as the first code, the current traditional improvement is to set a lever to balance the weight of the frame hanging, but the general fulcrum of the lever is the use of mechanical or blade and the tool holder, the test mode is the same, but the friction resistance Large, affecting the measured value, making the measurement uncertainty become larger, the balance point is difficult to read, and for the static code machine below 1 KN, the precision error requirement of 0.01% cannot be achieved.

The inventor of the present invention filed the invention patent application No. 097147101 on December 4, 1997, "Three-way force standard machine for static code machine and lever machine" (publication number TW201022645A1), which is mainly driven by a screw set. The calibration table (a moving beam) and the frame of the device to be tested are hung up and up, so that the frame type suspension is separated from the universal link of the connecting lever machine, and the static code machine can be used independently; Before using the power support device to drive the frame type suspension upward displacement, the frame type suspension is separated from the universal link connecting the lever machine and does not contact the test piece, and after the law code is loaded to the required load, it is released again. The calibration frame performs the creep test to shorten the loading time of the code under the load; further, the majority of the code codes of the code group are connected by two connecting elements respectively, so that The two adjacent codes maintain a stable connection relationship without the single pendulum shake effect; the case solves the problem that the conventional static code machine code loading time is insufficient and the stability of the code group is insufficient, but the shortcomings exist. For the body of the whole machine The product is huge, it takes up space, and it is not suitable for small forces (less than 1 KN). Therefore, the applicant of this case is based on the spirit and philosophy of the invention of excellence, and believes that it is necessary to further improve the static code machine based on the structure of the case. In order to reduce the precision error value (to the range of 0.01%) of the static power machine with small force (less than 1 KN), the accuracy of the measured value is improved.

In view of the lack of the prior art, the present invention proposes a static code machine that balances the initial weight of the rack to be corrected using a low-friction gas bearing balance and reads the balance point using a non-contact laser interferometer to reduce the accuracy error value. To the range of 0.01%), the accuracy of the measured value is improved, and is especially suitable for a static power code machine with a small force (less than 1 KN), and the machine of the present invention is small in size and can reduce the occupied space.

In order to achieve the above object, the present invention provides a static code machine comprising: a base for stably mounting the static code machine; and a top seat disposed on the top surface of the base by a support frame; The balance is disposed in the upper seat, the balance is provided with a lever, the lever is supported by a gas bearing; a laser interferometer is disposed on the upper seat, and the laser interferometer is used for detecting the balance of the balance a balance frame; a hanging frame is movably mounted between the upper seat and the base, the hanging frame is coupled with a universal joint, and is connected to the balance of the balance of the balance, and the hanging frame The bottom of the method is provided with a code center connecting rod; a power supporting device is coupled with the to-be-corrected frame for driving the upper and lower displacement of the to-be-corrected frame; and a calibration table (moving beam) is disposed corresponding to the calibration frame. For carrying the device to be tested; a screw group is coupled with the calibration table (moving beam) for driving the upper and lower displacements of the calibration table; and at least one code group is a method for hanging the center with the foregoing The connecting rod is connected, and the method code group has a plurality of The code can be added one by one, and each code is connected by 3 connectors.

In order to enable your review committee to have a better understanding and recognition of the structural purpose and efficacy of the present invention, the detailed description is as follows.

The technical means and efficacy of the present invention for achieving the object will be described below with reference to the accompanying drawings, and the embodiments listed in the following drawings are only for the purpose of explanation, and are to be understood by the reviewing committee, but the technical means of the present invention are not Limited to the listed figures.

Referring to the first and second figures, the static code machine 100 of the present invention comprises a base 10, a top seat 20, a day 30, a laser interferometer 40, a hanging frame 50, A power supporting device 60, a calibration table (which is a movable beam) 70, a screw group 80 and at least one code group 90 for stably mounting the static code machine 100, the upper seat 20 The balance plate 30 is disposed on the top surface of the base 10; the balance 30 is disposed on the top surface of the upper seat 20, and the balance 30 is provided with a lever 31. The lever 31 is supported by a gas bearing 32. The gas bearing 32 can be oscillated as a fulcrum. The radial gas film thickness of the gas bearing 32 is 8 to 12 μm, the axial air film thickness is 15 μm, the spindle rotation precision is ±1 μm, and the bearing capacity is 30 kgf. The laser interferometer 40 The system is disposed in the upper seat, and the laser interferometer can be used to perform the linear displacement precision measurement. The laser interferometer 40 is used to detect the balance state of the lever 31 of the balance 30; the hanging frame 50 is movable. The ground frame is disposed between the upper seat 20 and the base 10, and the hanging frame 50 is combined with a universal joint 51. One end of the lever 31 of the balance 30 is connected, and a bottom hanging code connecting rod 52 is arranged at the bottom of the hanging frame 50. The top of the hanging frame 50 has a connecting beam 53 with a second spacing below the connecting beam 53. Beam 54.

The power support device 60 is disposed on the upper seat 20, and the power support device 60 is coupled to the hanging frame 50. The power support device 60 drives the suspension frame 50 up and down. Generally, the power support device The 60 series is composed of a motor, a worm gear set and a support rod; the calibration table 70 is disposed corresponding to the hanging frame 50, and the calibration table 70 is configured to carry a load cell 71; the screw set 80 is coupled with The screw set 80 is generally connected by a motor, a reduction gear, a toothed belt and a screw. The reduction gear is driven by the motor, and the gear belt and the screw are driven by the reduction gear. The screw set 80 is used to drive the gear set 80. The calibration table 70 is moved up and down, and the device under test 71 carried by the calibration table 70 can be moved relative to the second beam 54. The device 71 can be tested by the second beam 54; the at least one code group The 90 series is connected to the above-mentioned center hanging method code link 52. The figure is provided with a three-method code group including a first layer method code group 91, a second layer method code group 92 and a The third layer of code group 93, the first layer of code group 91, the second The legal code group 92 and the third layer legal code group 93 respectively have a plurality of legal codes 911, 921, and 931 which can be added one by one, and each of the legal codes 911, 921, and 931 is composed of three connecting members 912 and 922. 932, the base 10 is provided with a first layer code lifting platform 11, a second layer code lifting platform 12 and a third layer code lifting platform 13, the first layer code lifting platform 11, the first The two-layer code lifting platform 12 and the third layer code lifting platform 13 are configured to respectively carry the first layer legal code group 91, the second layer legal code group 92 and the third layer legal code group 93, and the first The layer code lifting platform 11, the second layer code lifting platform 12 and the third layer code lifting platform 13 are driven by a driving device (not shown) to be able to move up and down, and simultaneously drive the first layer method. The code group 91, the second layer method code group 92, and the third layer method code group 93 are shifted up and down.

Please refer to the second to fourth figures to illustrate the manner in which the present invention corrects the code.

Referring to the second figure, the hanging frame 50 is first lifted by the lever 31 of the balance 30, and the device to be tested 71 is placed on the calibration table 70. The second beam 54 does not overlap with the device to be tested 71. In contact, at this time, the balance 30 is in an equilibrium state, which is an initial balance, and the laser interferometer 40 detects the balance state of the lever 31 and sets an initial balance point value.

Referring to the first and third figures, the first layer of the code lifting platform 11 is first driven to descend, and the code 911 of the first layer of the code group 91 is sequentially hung on the center hanging code link 52. The hanging frame 50 is pulled down by the first layer of the code group 91, so that the second beam 54 is in contact with the member to be tested 71. At this time, the balance 30 moves downward due to the hanging frame 50, so that the balance 30 The lever 31 is tilted by an angle θ, the balance 30 is in an unbalanced state, and the initial balance point value originally detected by the laser interferometer 40 is displaced.

Referring to the fourth figure, the starting screw set 80 drives the calibration stage 70 to move upward, and the second beam 54 (ie, the entire hanging frame 50) is pushed up by the calibration station 70 until the laser interferometer 40 is returned. To the initial balance point value, the balance 30 is in the initial equilibrium state, and the calibration can be completed. If the multi-point correction is to be performed, the steps shown in the second to fourth figures can be repeated. The invention is characterized in that, since the lever 31 of the balance 30 of the present invention is supported by the gas bearing 32, the weight of the hanging frame 50 can be completely balanced by the moment of the lever 31, so that the static code machine is For each code, you can do the additive correction. In the manner shown in the second to fourth figures, the difference between the net weight of the method code and the gas bearing used is confirmed. The following table shows the data table verified by the 10N test of the present invention, which is the gas bearing of the present invention. The gas bearing 32, the difference between the net weight of the used method code and the gas bearing used in the above table, can be obtained as a graph as shown in the fifth figure.

It can be seen from the above table and the fifth figure that the force value error of the gas bearing (the static weight part of the machine) and the net code is less than ±2×10 ^-5 , and the force value repeatability is 2×10 ^-5 , which is less than 5×10 ^- The difference requirement of ⁵ proves that the invention is indeed applicable to the static power code machine of small forces.

In summary, the static code machine provided by the present invention balances the initial weight of the rack to be corrected using a gas bearing balance, and uses a non-contact laser interferometer to read the balance point, thereby reducing the accuracy error value to 0.01%. The range is improved by the accuracy of the measured value, and is especially suitable for a static power code machine with a small force (less than 1 KN). In addition, the machine of the present invention is small in size and can reduce the occupied space.

However, the above description is only for the embodiments of the present invention, and the scope of the invention is not limited thereto. That is to say, the equivalent changes and modifications made by the applicant in accordance with the scope of the patent application of the present invention should still fall within the scope of the patent of the present invention. I would like to ask your review committee to give a clear explanation and pray for it.

100. . . Static code machine

10. . . Pedestal

11. . . First layer code lifting platform

12. . . Second layer code lifting platform

13. . . Third layer code lifting platform

20. . . Sitting

twenty one. . . Support frame

30. . . Balance

31. . . lever

32. . . Gas bearing

40. . . Laser interferometer

50. . . Hanging frame

51. . . Universal joint

52. . . Center hanging method code link

53. . . Connecting beam

54. . . Second beam

60. . . Power support device

70‧‧‧ calibration table

71‧‧‧Testpieces

80‧‧‧ screw group

90‧‧‧Code Group

91‧‧‧First layer code group

92‧‧‧Second layer code group

93‧‧‧Layer 3 Code Group

911, 921, 931‧‧‧ code

912, 922, 932‧‧‧ connectors

Θ‧‧‧ angle

The first figure is a schematic view of the structure of the present invention.

The second to fourth figures are structural diagrams of the gas bearing lever and the portion to be corrected which are subjected to the code correction process of the present invention.

The fifth figure is a difference analysis diagram using a gas bearing and a net method code.

100‧‧‧ static code machine

10‧‧‧ Pedestal

11‧‧‧First layer code lifting platform

12‧‧‧Second layer code lifting platform

13‧‧‧The third layer of code lifting platform

20‧‧‧上上

21‧‧‧Support frame

30‧‧‧ Balance

31‧‧‧Leverage

32‧‧‧ gas bearing

40‧‧‧Laser Interferometer

50‧‧‧ hanging frame

51‧‧‧ universal joint

52‧‧‧The hanging code link of the center

53‧‧‧Connected beams

54‧‧‧Second beam

60‧‧‧Power support device

70‧‧‧ calibration table

71‧‧‧Testpieces

80‧‧‧ screw group

90‧‧‧Code Group

91‧‧‧First layer code group

92‧‧‧Second layer code group

93‧‧‧Layer 3 Code Group

911, 921, 931‧‧‧ code

912, 922, 932‧‧‧ connectors

Claims (5)

A static code machine suitable for powers below 1 kN (1KN), the static code machine comprises: a base for stabilizing the static code machine; and a seat, by a support frame Disposed on the top surface of the base; one day flat is disposed on the top surface of the upper seat, the balance is provided with a lever, the lever is supported by a low friction gas bearing; and a laser interferometer is disposed on the top surface of the upper seat The laser interferometer is used to detect the balance state of the balance of the balance; a calibration frame is movably mounted between the upper seat and the base, and the to-be-corrected frame is combined with a universal joint. The 俾 is connected with the lever of the balance, and the bottom of the to-be-corrected frame is provided with a central hanging method code link; a power supporting device is coupled with the to-be-corrected frame for driving the upper and lower displacement of the to-be-corrected frame a calibration station, which is configured to be mounted on the calibration frame for carrying the device to be tested; a screw group coupled to the calibration table for driving the upper and lower displacements of the calibration table; and at least one code group Connected to the code link connected to the center, and the code group There may be a plurality of individually add a law code and three connections by coupling between the law code. The static code machine according to claim 1, wherein the gas bearing has a radial film thickness of 8 to 12 μm, an axial film thickness of 15 μm, a spindle rotation accuracy of ±1 μm, and a bearing capacity of 30 kgf. The static code machine of claim 1, wherein the top of the hanging frame has a connecting beam, and a second beam is disposed below the connecting beam, and the second beam and the calibration station are to be tested. carry out testing. The static code machine of claim 1, wherein the power support device is disposed in the upper seat. The static code machine of claim 1, wherein the at least one code group comprises a first layer code group, and the first layer is provided with a first layer code lifting platform, the first layer method The code lifting platform is configured to carry the first layer of code group, and the first layer of code lifting platform is driven by a driving device to move up and down.