TWI420004B - Nano - porous crystalline silicon and its manufacturing method and device thereof - Google Patents

Description

Nanoporous crystalline yttrium and manufacturing method thereof and device thereof

The invention relates to a nanoporous crystalline ruthenium and a preparation method thereof and a device thereof, aiming at providing a oxidative reaction to change the chemical properties of crystallization ruthenium, and then forming a plurality of nanometers easily and rapidly by wet etching. Nano-porous crystalline yttrium of pores.

Because the various energy sources that humans rely on now, such as uranium, natural gas and petroleum, will be used up in the next few decades, scientists will invest a lot of effort and money in the development of alternative energy applications, such as solar energy. Wind, wave and geothermal, and all achieved good results. However, the use of wind, wave and geothermal is geographically restrictive and must be used in certain environments, such as volcanic areas or coastal areas, and the equipment used is large, such as windmills and deep sea water intake lines. Therefore, scientists are optimistic about the application of solar energy and put a lot of effort into the development of related conversion devices, namely solar cells.

At present, various research units in the world use various materials and use various processes to make solar cells, and the photoelectric conversion efficiency of the obtained solar cells is not the same; in addition, the materials of solar cells can be divided into single crystal germanium, polycrystalline germanium, non- Crystal bismuth; three or five families, including gallium arsenide, indium phosphide, gallium indium phosphide; two or six families, including cadmium telluride, indium copper selenide. The highest photoelectric conversion efficiencies are: 24.7% for single crystal germanium, 19.8% for polycrystalline germanium: 14.5% for amorphous germanium, 25.7% for gallium arsenide, and 18.8% for indium selenide. In general, the photoelectric conversion efficiency of solar cells in the laboratory stage has reached 30%. However, the solar cell in the mass production stage sold on the market generally has a photoelectric conversion efficiency of less than 20%, and there is still room for improvement. However, under the double consideration of cost and photoelectric conversion efficiency, there are many applications of crystallization ruthenium (including single crystal germanium and polycrystalline germanium), but in some lower-order applications, such as solar computer or solar watch, photoelectric conversion is used. Amorphous germanium, which is less efficient but less expensive, is used as a material for solar cells.

In addition, since the overall price of the solar cell is too high, the cost of the germanium wafer accounts for more than half of the total cost of the solar cell. Therefore, scientists are doing everything they can to improve the photoelectric conversion efficiency of solar cells and seek effective cost reduction processes to improve the practicality of solar cells. At present, scientists have improved the photoelectric conversion efficiency of solar cells by providing the area of light absorption (such as using the nanowires as a material to react with incident photons) or increasing the number of incident photons (such as setting an anti-reflective layer or forming a rough surface). And increase the reflectivity). However, the process of the nanowire line is complicated and requires the use of a metal catalyst to promote the growth of the nanowire. These metal catalysts not only add additional cost, but for the nanowires, these metal catalysts are impurities and hinder the transmission of electrons in the nanowires, affecting the photoelectric conversion efficiency of the solar cells. In addition, the antireflection layer must be provided with a complicated mask and an etching process to etch the surface of the germanium wafer into a triangular pyramid shape, and the antireflection layer is coated on the triangular pyramid surface by vapor deposition. These processes will increase the price of solar cells and reduce their production yield, which is not conducive to mass production to increase their market share.

Furthermore, the formation of a rough surface can be formed by wet etching or dry etching, wherein the wet etching process generally uses a chemical agent (for example, an acidic drug). The surface of the germanium wafer is etched into individual pits, and the plurality of pits increase the surface area of the germanium wafer, thereby increasing the number of incident photons; however, the wet etching process can only form micron-sized pits. The nano-scale cannot be formed; in addition, the dry etching process uses a mask to expose, develop, etch, etc., and forms a recess on the surface of the germanium wafer, although the pattern of the mask can be used to control the concave The size of the hole (for example, a micron or nano-scale cavity) can be formed, but the process is complicated, and a high-precision photomask is required, which is costly.

In view of the above, the present invention provides a nanoporous crystalline ruthenium having a plurality of nanopores which can be easily and rapidly formed by a redox reaction to change the chemical properties of the crystalline ruthenium.

In order to achieve the above object, in the method for producing a nanoporous crystalline ruthenium according to the present invention, the crystallization enthalpy is immersed in an acidic oxidizing agent capable of forming a plurality of metal nanoparticles on the surface of the crystallization enthalpy by a soaking method, from the metal nano The fine particles and the crystal ruthenium are first subjected to a redox reaction, and the surface of the crystal ruthenium is adhered to the respective metal fine particles, oxidized to form SiO ₂ and easily etched by an acid to form a nanoporous crystalline ruthenium having a plurality of nanopores.

In order to enable the reviewing committee members to understand the main technical contents of the present invention and the embodiments thereof, the following description is given with reference to the following drawings: "Nano porous crystal yttrium and its manufacturing method and its packaging" The crystallization enthalpy is formed by immersing the crystallization oxidant on the surface of the crystallization enthalpy, and the acidic oxidant is formed by mixing an acidic solution and a metal compound having a lower chemical activity. The acidic oxidizing agent forms a redox reaction with the crystallization enthalpy to reduce and precipitate the plurality of metal nanoparticles on the surface of the crystallization enthalpy, and forms a plurality of nano-holes 11 on the surface of the crystallization enthalpy 1 by using the metal nanoparticles as an oxidizing agent, as shown in the first figure. It is shown that each nano hole 11 increases the surface area of the crystal 矽1, thereby increasing the absorption ratio of the incident photons, and the crystallization enthalpy is applied to the solar cell to increase its photoelectric conversion efficiency.

As shown in the second figure, the manufacturing method of the present invention comprises the following steps: Step A, preparing an acidic oxidizing agent in a solution tank, and referring to the manufacturing apparatus of the second drawing at the same time, the acidic oxidizing agent is contained in the solution tank 21. 22, the acidic oxidant 22 is formed by mixing an acidic solution and a metal compound having a lower chemical activity, and the acidic solution is selected from the group consisting of sulfuric acid, phosphoric acid, nitric acid, hydrofluoric acid, and at least one or more of acetic acid. Or in the embodiment shown in the figure, a mixture of silver nitrate 221 and hydrofluoric acid 222; step B, immersing crystallization enthalpy in the solution tank, wherein the manufacturing device is further provided with a clamping member 24, and the The clamping member 24 can be vacuum suctioned. Please refer to the third and fourth figures at the same time to hold the crystallization enthalpy 1 and immerse the crystallization enthalpy 1 in the solution tank 21, as shown in the fifth figure. Step C, the acidic oxidant 22 forms a redox reaction with the crystal ruthenium 1, and the surface of the crystallization ruthenium 1 is reduced to precipitate a plurality of metal nanoparticles, and the metal nanoparticles 23 may be silver, and the metal nanoparticles 23 are attached to each other. On the surface of the crystallization 矽1, as shown in the sixth figure, each metal nanoparticle is used as an oxidizing agent, and a redox reaction is performed there, and the crystallization surface 1 is formed by the adhesion of each metal nanoparticle 23 to form a redox reaction. Then, SiO _{2 is obtained} ; in step D, acid etching is performed, and as shown in the seventh figure, a plurality of nano-holes 11 are formed on the surface of the crystal ruthenium 1 with respect to the adhesion of the respective metal particles.

Wherein, the content of the metal nanoparticles determines the density of the nanopores on the surface of the crystalline germanium. Of course, if the content of the metal nanoparticles is higher, the number of nanopores on the surface of the crystalline germanium is higher, and the density is higher; The depth at which the crystallization enthalpy is immersed in the solution tank determines the range of formation of the nanopore. For example, the depth of the immersion in the solution tank is only in contact with the upper surface of the crystallization crucible, and only the nanopores are formed on the surface of the crystallization crucible. If the crystallization enthalpy is completely immersed in the solution tank, nanopores are formed on each surface of the crystallization enthalpy.

The invention utilizes a redox reaction to change the chemical properties of the crystalline germanium, and then can form a nanoporous crystalline germanium having a plurality of nanopores easily and rapidly by wet etching, which is not only simple in process, low in cost and short in processing time, and Each nanopore increases the surface area of the crystalline germanium, which in turn increases the number of incident photons, allowing the crystalline germanium to be used in solar cells to increase its photoelectric conversion efficiency.

As described above, the present invention provides a preferred and feasible manufacturing method and apparatus for nanoporous crystalline ruthenium, and an application for an invention patent according to law; However, the above description of the embodiments and the drawings, which are preferred embodiments of the present invention, are not intended to limit the present invention, and are intended to be similar to the structures, devices, features, and the like of the present invention. The inventive object of the invention is within the scope of the patent application.

Crystallization ‧‧1

Nano Hole ‧‧11

Solution tank ‧‧21.

Acidic oxidizer ‧‧22

Silver nitrate ‧ ‧ 221

Hydrofluoric acid ‧‧ 222

Metal nanoparticle ‧‧‧23

Clamping parts ‧‧24

The first figure is a perspective view of the structure of the nanoporous crystalline yttrium in the present invention.

The second figure is a schematic diagram of the manufacturing process of the nanoporous crystalline ruthenium in the present invention.

The third figure is a schematic view showing the structure of preparing an acidic solution in a solution tank in the present invention.

The fourth figure is a schematic structural view of a nanoporous porous crystal crucible manufacturing apparatus of the present invention.

The fifth figure is a schematic view showing the structure of immersing crystallization enthalpy in a solution tank in the present invention.

The sixth figure is a schematic view showing the structure in which the metal nanoparticles are attached to the surface of the crystalline crucible for redox reaction.

The seventh figure is a schematic structural view of the surface of the crystallized crucible after acid etching in the present invention.

Crystallization ‧‧1

Nano Hole ‧‧11

Claims (7)

A method for producing a nanoporous crystalline cerium, comprising: preparing an acidic oxidizing agent in a solution tank; immersing a crystallization enthalpy in the solution tank, wherein a plurality of metal nanoparticles are attached to the surface of the crystallization enthalpy, And performing an oxidation-reduction reaction on the surface of the crystallization enthalpy; and etching the crystallization enthalpy with the acidic oxidant to form a plurality of nanopores in the surface of the crystallization enthalpy relative to the plurality of metal nanoparticles. The method for producing a nanoporous crystal enthalpy according to claim 1, wherein the acidic oxidizing agent is selected from the group consisting of a mixed solution of at least one of sulfuric acid, phosphoric acid, nitric acid, hydrofluoric acid, and acetic acid. The method for producing a nanoporous crystal enthalpy according to claim 1, wherein the plurality of metal nanoparticles are silver. The method for producing a nanoporous crystalline crucible according to claim 1, wherein the acidic oxidizing agent is a mixture of silver nitrate and hydrofluoric acid. The method for producing a nanoporous crystal enthalpy according to claim 1, wherein the content of the plurality of metal nanoparticles determines the density of the plurality of crystal ruthenium surface nanoholes. The method for producing a nanoporous crystal enthalpy according to claim 1, wherein the surface of the crystallization enthalpy is subjected to a redox reaction after the adhesion of the plurality of metal nanoparticles, and then SiO 2 is obtained. The method for producing a nanoporous crystal enthalpy according to claim 1, wherein a depth of the crystallization enthalpy in the solution tank determines a range in which the plurality of nanopores are formed.