TWI414539B - Photosensitive resin composition and light blocking layer using the same - Google Patents

Photosensitive resin composition and light blocking layer using the same Download PDF

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TWI414539B
TWI414539B TW099146893A TW99146893A TWI414539B TW I414539 B TWI414539 B TW I414539B TW 099146893 A TW099146893 A TW 099146893A TW 99146893 A TW99146893 A TW 99146893A TW I414539 B TWI414539 B TW I414539B
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resin composition
photosensitive resin
chemical formula
methacrylate
group
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TW099146893A
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TW201215630A (en
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Chang-Min Lee
Jun-Seok Kim
Kil-Sung Lee
Jung-Sik Choi
Min-Sung Kim
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Cheil Ind Inc
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D471/00Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, at least one ring being a six-membered ring with one nitrogen atom, not provided for by groups C07D451/00 - C07D463/00
    • C07D471/02Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, at least one ring being a six-membered ring with one nitrogen atom, not provided for by groups C07D451/00 - C07D463/00 in which the condensed system contains two hetero rings
    • C07D471/08Bridged systems
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D498/00Heterocyclic compounds containing in the condensed system at least one hetero ring having nitrogen and oxygen atoms as the only ring hetero atoms
    • C07D498/02Heterocyclic compounds containing in the condensed system at least one hetero ring having nitrogen and oxygen atoms as the only ring hetero atoms in which the condensed system contains two hetero rings
    • C07D498/04Ortho-condensed systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • G02B5/223Absorbing filters containing organic substances, e.g. dyes, inks or pigments
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/022Quinonediazides
    • G03F7/023Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials For Photolithography (AREA)

Abstract

The present invention discloses a photosensitive resin composition which comprises the following components: (A) cardo group resin which comprises repetitive units that are respectively represented by a chemical formula 1; (B) active unsaturated compound; (C) pigment; (D) initiating agent and (E) dissolvent. The invention also discloses a color blocking layer which is prepared by the photosensitive resin, wherein, in a chemical formula 1, each substitutional group is same with the structure which is limited in the description.

Description

光敏性樹脂組成物及使用該組成物的光阻隔層Photosensitive resin composition and light blocking layer using the same 發明領域Field of invention

本揭示係有關於一種包括咔哚為主之(cardo-based)樹脂之光敏性樹脂組成物以及使用該組成物的一光阻隔層。The present disclosure relates to a photosensitive resin composition comprising a cardo-based resin and a light-blocking layer using the composition.

發明背景Background of the invention

一液晶顯示裝置包括一個下基材,其含有一光阻隔層、一濾色片,及一ITO像素電極;一有效電路部件,包括一液晶層、一薄膜電晶體,及一電容器層;以及包括一ITO像素電極之一個上基材。A liquid crystal display device includes a lower substrate including a light blocking layer, a color filter, and an ITO pixel electrode; an effective circuit component including a liquid crystal layer, a thin film transistor, and a capacitor layer; An upper substrate of an ITO pixel electrode.

光阻隔層阻隔了未經控制的光傳輸離開一基材的一透明像素電極以及因而避免由於光傳輸經過一薄膜電晶體所生的對比降低。紅色、綠色及藍色的光阻隔層傳輸具一預定的波長的白光之光以及顯示色彩。The photointerceptor layer blocks uncontrolled light transmission away from a transparent pixel electrode of a substrate and thus avoids contrast reduction due to light transmission through a thin film transistor. The red, green, and blue light-blocking layers transmit white light of a predetermined wavelength and display color.

光阻隔層一般係藉由色素分散法來製造。色素分散法包括用一含著色劑光可聚合性組成物來塗覆一透明基材,曝光以藉由熱固化來提供一圖案,以及用一溶劑移除未曝光的部分。The photo-barrier layer is generally produced by a pigment dispersion method. The pigment dispersion method comprises coating a transparent substrate with a colorant-containing photopolymerizable composition, exposing to provide a pattern by thermal curing, and removing the unexposed portion with a solvent.

然而,當作為一黏結劑樹脂時,一種光敏性聚醯亞胺或酚為主之樹脂係使用於色素分散法中,可以獲得高的抗熱性但是敏感性降低以及需要一有機溶劑作為一顯影溶劑。使用一疊氮化物化合物之光阻劑具有低的敏感性與抗熱性以及可以受曝光的期間之氧的影響。However, when used as a binder resin, a photosensitive polyimide or phenol-based resin is used in the pigment dispersion method to obtain high heat resistance but reduced sensitivity and an organic solvent as a developing solvent. . A photoresist using a single azide compound has low sensitivity and heat resistance and can be affected by oxygen during exposure.

並且,一丙烯醯基為主之樹脂具有良好的抗熱性、抗收縮性、耐化學性,及類似物,但是具有降低的敏感性、顯影性質,以及緊密的接觸性質。因包括大量的黑色色素俾以調整一光阻隔層的光學密度,敏感性、顯影性質,及緊密的接觸性質可能會明顯地劣化。Further, an acryl-based resin has good heat resistance, shrink resistance, chemical resistance, and the like, but has reduced sensitivity, developing properties, and tight contact properties. Since a large amount of black pigment enamel is included to adjust the optical density of a light-blocking layer, sensitivity, developing properties, and tight contact properties may be significantly deteriorated.

發明概要Summary of invention

本發明的一態樣提供了一種光敏性樹脂組成物,其具有優良的敏感性、顯影性質、緊密的接觸性質、抗熱性、抗收縮性、耐化學性,以及推拔的性質。One aspect of the present invention provides a photosensitive resin composition which has excellent sensitivity, developing properties, tight contact properties, heat resistance, shrink resistance, chemical resistance, and push properties.

本發明的另一態樣提供了使用該光敏性樹脂組成物來製造的一光阻隔層。Another aspect of the present invention provides a light blocking layer produced using the photosensitive resin composition.

根據本發明的一態樣,提供了一種光敏性樹脂組成物係,其包括(A)含有由下列化學式1表示的一重覆單元之咔哚為主之樹脂;(B)一反應性不飽和化合物;(C)一色素;(D)一起始劑;及(E)一溶劑。According to an aspect of the present invention, there is provided a photosensitive resin composition comprising (A) a resin mainly comprising a repeating unit represented by the following Chemical Formula 1; (B) a reactive unsaturated compound (C) a pigment; (D) a starter; and (E) a solvent.

於化學式1中,R3 與R4 為相同或不同的,以及為氫、鹵素,或經取代或未經取代的C1至C20烷基,R1 與R2 為相同或不同的,以及為氫或CH2 OCH2 CR6 R7 R8 (其中,R6 至R8 為相同或不同的,氫,或經取代或未經取代的(甲基)丙烯酸酯),但有條件是R1 與R2 之至少一者為CH2 OCH2 CR6 R7 R8 (其中,R6 至R8 為相同或不同的,氫,或經取代或未經取代的(甲基)丙烯酸酯,以及R6 至R8 之至少一者為經取代或未經取代的(甲基)丙烯酸酯),Z1 為一單鍵、O、CO、SO2 、CR9 R10 、SiR11 R12 (其中,R9 至R12 為相同或不同的,以及為氫,或經取代或未經取代的C1至C20烷基),或是為由下列化學式2-1至2-11表示的連接基團之至少一者,Z2 為酸酐殘餘基團或酸二酐殘餘基團,m1 與m2 獨立地為範圍由0至4的整數,以及n為1至1000的整數。In Chemical Formula 1, R 3 and R 4 are the same or different and is a substituted or unsubstituted hydrogen, halogen, or with a C1 to C20 alkyl, R 1 and R 2 are the same or different, is hydrogen and Or CH 2 OCH 2 CR 6 R 7 R 8 (wherein R 6 to R 8 are the same or different, hydrogen, or substituted or unsubstituted (meth) acrylate), provided that R 1 is At least one of R 2 is CH 2 OCH 2 CR 6 R 7 R 8 (wherein R 6 to R 8 are the same or different, hydrogen, or substituted or unsubstituted (meth) acrylate, and R At least one of 6 to R 8 is a substituted or unsubstituted (meth) acrylate), Z 1 is a single bond, O, CO, SO 2 , CR 9 R 10 , SiR 11 R 12 (where R 9 to R 12 are the same or different, and are hydrogen or a substituted or unsubstituted C1 to C20 alkyl group, or at least a linking group represented by the following Chemical Formulas 2-1 to 2-11 In one case, Z 2 is an acid anhydride residual group or an acid dianhydride residual group, and m 1 and m 2 are independently an integer ranging from 0 to 4, and n is an integer of 1 to 1000.

於化學式2-5中,Ra 為氫、乙基、C2 H4 Cl、C2 H4 OH、CH2 CH=CH2 ,或苯基。In Chemical Formula 2-5, R a is hydrogen, ethyl, C 2 H 4 Cl, C 2 H 4 OH, CH 2 CH=CH 2 , or a phenyl group.

該咔哚為主之樹脂可以具有至1,000至50,000 g/mol的重量平均分子量。The ruthenium-based resin may have a weight average molecular weight of from 1,000 to 50,000 g/mol.

該咔哚為主之樹脂可以包括由下列化學式4表示的一末端基於二個末端端的至少一者。The ruthenium-based resin may include one end represented by the following Chemical Formula 4 based on at least one of the two terminal ends.

於化學式4中,Z3 為由下列化學式5-1至5-7表示的連接基團之至少一者。In Chemical Formula 4, Z 3 is at least one of the linking groups represented by the following Chemical Formulas 5-1 to 5-7.

於化學式5-1中,Rb 與Rc 為相同或不同的,以及為氫、經取代或未經取代的C1至C20烷基、酯基,或醚基。In Chemical Formula 5-1, R b and R c are the same or different and are a hydrogen, substituted or unsubstituted C1 to C20 alkyl group, an ester group, or an ether group.

於化學式5-5中,Rd 為O、S、NH、經取代或未經取代的C1至C20烷基、C1至C20烷基胺基,或是C2至C20丙烯胺基。In Chemical Formula 5-5, R d is O, S, NH, a substituted or unsubstituted C1 to C20 alkyl group, a C1 to C20 alkylamino group, or a C2 to C20 acrylamide group.

該光敏性樹脂組成物可以包括1至30 wt%的該咔哚為主之樹脂(A);1至30 wt%的該反應性不飽和化合物(B);1至30 wt%的該色素(C);0.01至10 wt%的該起始劑(D);以及差額的該溶劑(E)。The photosensitive resin composition may include 1 to 30% by weight of the ruthenium-based resin (A); 1 to 30% by weight of the reactive unsaturated compound (B); and 1 to 30% by weight of the pigment ( C); 0.01 to 10 wt% of the starter (D); and the difference of the solvent (E).

該光敏性樹脂組成物可以進一步包括一丙烯醯基為主之樹脂,以及該丙烯醯基為主之樹脂可以包括第一乙烯屬不飽和單體與第二乙烯屬不飽和單體之一共聚物:該第一乙烯屬不飽和單體為甲基丙烯酸、馬來酸、衣康酸、反丁烯二酸,或其等之組合的第一乙烯屬不飽和單體;以及該第二乙烯屬不飽和單體為苯乙烯、α-甲基苯乙烯、乙烯基甲苯、乙烯基苄基甲基醚、甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸丁酯、甲基丙烯酸2-羥基乙酯、甲基丙烯酸2-羥基丁酯、甲基丙烯酸苄酯、甲基丙烯酸環己酯、甲基丙烯酸苯酯、甲基丙烯酸2-胺基乙酯、甲基丙烯酸2-二甲基胺基乙酯、乙酸乙烯酯、苯甲酸乙烯酯、甲基丙烯酸縮水甘油酯、甲基丙烯腈、甲基丙烯醯胺,或其等之組合的第二乙烯屬不飽和單體。The photosensitive resin composition may further include an acryl-based resin, and the propylene-based resin may include a copolymer of a first ethylenically unsaturated monomer and a second ethylenically unsaturated monomer. The first ethylenically unsaturated monomer is a first ethylenically unsaturated monomer of methacrylic acid, maleic acid, itaconic acid, fumaric acid, or the like; and the second ethylenic The unsaturated monomer is styrene, α-methylstyrene, vinyl toluene, vinylbenzyl methyl ether, methyl methacrylate, ethyl methacrylate, butyl methacrylate, methacrylic acid 2- Hydroxyethyl ester, 2-hydroxybutyl methacrylate, benzyl methacrylate, cyclohexyl methacrylate, phenyl methacrylate, 2-aminoethyl methacrylate, 2-dimethyl methacrylate A second ethylenically unsaturated monomer of a combination of aminoethyl ester, vinyl acetate, vinyl benzoate, glycidyl methacrylate, methacrylonitrile, methacrylamide, or the like.

該丙烯醯基為主之樹脂可以具有大約3,000至40,000 g/mol的重量平均分子量。The acryl-based resin may have a weight average molecular weight of about 3,000 to 40,000 g/mol.

該咔哚為主之樹脂與丙烯醯基為主之樹脂可以以99:1至30:70的重量比被包括。The bismuth-based resin and the acryl-based resin may be included in a weight ratio of 99:1 to 30:70.

該起始劑可以包括一種光聚合化起始劑、一種自由基聚合化起始劑,或其等之一組合。The initiator may include a photopolymerization initiator, a radical polymerization initiator, or a combination thereof.

該光敏性樹脂組成物可以以該光敏性樹脂組成物的100份重量計為基準包括0.01至20份以重量計的環氧化合物。The photosensitive resin composition may include 0.01 to 20 parts by weight of the epoxy compound based on 100 parts by weight of the photosensitive resin composition.

根據本發明的另一態樣,提供了使用該光敏性樹脂組成物來製造的一光阻隔層。According to another aspect of the present invention, a light blocking layer produced using the photosensitive resin composition is provided.

下文中,其他的具體例將詳盡地予以說明。Hereinafter, other specific examples will be described in detail.

該光敏性樹脂組成物具有優良的敏感性、顯影性質、緊密的接觸性質、抗熱性、抗收縮性、耐化學性,和推拔的性質以及通常可以實施至一光阻隔層,及類似物。The photosensitive resin composition has excellent sensitivity, developing properties, tight contact properties, heat resistance, shrink resistance, chemical resistance, and push-off properties, and can usually be applied to a light barrier layer, and the like.

圖式簡單說明Simple illustration

第1圖為一掃描式電子顯微鏡圖,其顯示出依據實施例1的光敏性樹脂組成物的殘餘物;第2圖為一掃描式電子顯微鏡圖,其顯示出依據比較實施例3的光敏性樹脂組成物的殘餘物;第3圖為一掃描式電子顯微鏡圖,其顯示出依據比較實施例1的光敏性樹脂組成物的殘餘物;第4圖為一掃描式電子顯微鏡圖,其顯示出依據實施例2的光敏性樹脂組成物的殘餘物;第5圖為一掃描式電子顯微鏡圖,其顯示出依據實施例1的光敏性樹脂組成物之圖案形成性質;第6圖為一掃描式電子顯微鏡圖,其顯示出依據比較實施例3的光敏性樹脂組成物之圖案形成性質;第7圖為一掃描式電子顯微鏡圖,其顯示出依據比較實施例2的光敏性樹脂組成物之圖案形成性質;第8圖為一光學顯微鏡圖,其顯示出依據實施例2之光敏性樹脂組成物的圖案尺寸;第9圖為一光學顯微鏡圖,其顯示出依據比較實施例2之光敏性樹脂組成物的圖案尺寸;第10圖為一光學顯微鏡圖,其顯示出依據比較實施例4之光敏性樹脂組成物的圖案尺寸。1 is a scanning electron microscope image showing a residue of a photosensitive resin composition according to Example 1; and FIG. 2 is a scanning electron microscope image showing photosensitivity according to Comparative Example 3. a residue of the resin composition; Fig. 3 is a scanning electron microscope image showing the residue of the photosensitive resin composition according to Comparative Example 1; and Fig. 4 is a scanning electron microscope image showing The residue of the photosensitive resin composition according to Example 2; FIG. 5 is a scanning electron microscope image showing the pattern forming property of the photosensitive resin composition according to Example 1; and FIG. 6 is a scanning type An electron micrograph showing the pattern forming property of the photosensitive resin composition according to Comparative Example 3; and FIG. 7 is a scanning electron microscope image showing the pattern of the photosensitive resin composition according to Comparative Example 2. Forming properties; Fig. 8 is an optical micrograph showing the pattern size of the photosensitive resin composition according to Example 2; and Fig. 9 is an optical micrograph showing the Example 2 pattern size of the photosensitive resin composition of Comparative Example; 10 optical microscope picture shows a diagram showing the pattern dimension of Example 4 The photosensitive resin composition according to the comparative embodiment.

較佳實施例之詳細說明Detailed description of the preferred embodiment

在下文中將詳細地說明本揭示之例示性具體例。然而,此等具體例僅供舉例說明之用而不會限制本揭示。Illustrative specific examples of the present disclosure will be described in detail below. However, these specific examples are for illustrative purposes only and do not limit the disclosure.

當使用於本文中,當未提供特定定義時,「經取代的」一詞係指用以下的至少一者,代替至少一個氫:鹵素(F、Cl、Br,或I)、羥基、C1至C20烷氧基、硝基、氰基、胺基、亞胺基、疊氮基、甲脒基、肼基、亞肼基、羰基、胺甲醯基、硫醇基、酯基、醚基、羧基或其鹽類、磺酸基或其鹽類、磷酸基或其鹽類、C1至C20烷基、C2至C20烯基、C2至C20炔基、C6至C30芳基、C3至C20環烷基、C3至C20環烯基、C3至C20環炔基、C2至C20雜環烷基、C2至C20雜環烯基、C2至C20雜環炔基、C3至C30雜芳基,或其等之一組合。As used herein, when a specific definition is not provided, the term "substituted" means replacing at least one hydrogen with at least one of: halogen (F, Cl, Br, or I), hydroxyl, C1 to C20 alkoxy, nitro, cyano, amine, imino, azide, methionyl, fluorenyl, fluorenylene, carbonyl, amine carbhydryl, thiol, ester, ether, a carboxyl group or a salt thereof, a sulfonic acid group or a salt thereof, a phosphoric acid group or a salt thereof, a C1 to C20 alkyl group, a C2 to C20 alkenyl group, a C2 to C20 alkynyl group, a C6 to C30 aryl group, a C3 to C20 naphthenic group a C3 to C20 cycloalkenyl group, a C3 to C20 cycloalkynyl group, a C2 to C20 heterocycloalkyl group, a C2 to C20 heterocycloalkenyl group, a C2 to C20 heterocycloalkynyl group, a C3 to C30 heteroaryl group, or the like One combination.

當使用於本文中,當未提供特定定義時,「雜」一詞可指包括選自於N、O、S,及P的至少一雜原子於一環系基團中的一者。As used herein, when a specific definition is not provided, the term "hetero" may mean one of at least one heteroatom selected from the group consisting of N, O, S, and P in a ring system.

當使用於本文中,當未提供特定定義時,「(甲基)丙烯酸酯((meth)acrylate)」係指「丙烯酸酯」與「甲基丙烯酸酯」二者,以及「(甲基)丙烯酸((meth)acrylic acid)」係指「丙烯酸」與「甲基丙烯酸(methacrylic acid)」。As used herein, when a specific definition is not provided, "(meth)acrylate" means both "acrylate" and "methacrylate", and "(meth)acrylic acid" ((meth)acrylic acid)" means "acrylic acid" and "methacrylic acid".

依據一具體例之光敏性樹脂組成物包括(A)一咔哚為主之樹脂、(B)一反應性不飽和化合物、(C)一色素、(D)一起始劑,及(E)一溶劑。The photosensitive resin composition according to a specific example includes (A) a monoterpene-based resin, (B) a reactive unsaturated compound, (C) a pigment, (D) a starter, and (E) a Solvent.

在下文中,詳細地說明各組份。Hereinafter, each component will be described in detail.

(A) 咔哚為主之樹脂(A) bismuth-based resin

該咔哚為主之樹脂包括由下列化學式1表示的一重覆單元。The base-based resin includes a repeating unit represented by the following Chemical Formula 1.

於化學式1中,R3 與R4 為相同或不同的,以及為氫、鹵素,或經取代或未經取代的C1至C20烷基,R1 與R2 為相同或不同的,以及為氫或CH2 OCH2 CR6 R7 R8 (其中,R6 至R8 為相同或不同的,氫,或經取代或未經取代的(甲基)丙烯酸酯),但有條件是R1 與R2 之至少一者為CH2 OCH2 CR6 R7 R8 (其中,R6 至R8 為相同或不同的,氫,或經取代或未經取代的(甲基)丙烯酸酯,但有條件是R6 至R8 之至少一者為經取代或未經取代的(甲基)丙烯酸酯),Z1 為一單鍵、O、CO、SO2 、CR9 R10 、SiR11 R12 (其中,R9 至R12 為相同或不同的,以及為氫,或經取代或未經取代的C1至C20烷基),或是為由下列化學式2-1至2-11表示的連接基團之至少一者,Z2 為酸酐殘餘基團或酸二酐殘餘基團,In Chemical Formula 1, R 3 and R 4 are the same or different, and are hydrogen, halogen, or a substituted or unsubstituted C1 to C20 alkyl group, and R 1 and R 2 are the same or different, and are hydrogen. Or CH 2 OCH 2 CR 6 R 7 R 8 (wherein R 6 to R 8 are the same or different, hydrogen, or substituted or unsubstituted (meth) acrylate), provided that R 1 is At least one of R 2 is CH 2 OCH 2 CR 6 R 7 R 8 (wherein R 6 to R 8 are the same or different, hydrogen, or substituted or unsubstituted (meth) acrylate, but Provided that at least one of R 6 to R 8 is a substituted or unsubstituted (meth) acrylate), Z 1 is a single bond, O, CO, SO 2 , CR 9 R 10 , SiR 11 R 12 (wherein R 9 to R 12 are the same or different, and are hydrogen or a substituted or unsubstituted C1 to C20 alkyl group), or a linking group represented by the following Chemical Formulas 2-1 to 2-11 At least one of the groups, Z 2 is an acid anhydride residue group or an acid dianhydride residue group.

於化學式2-5中,Ra 為氫、乙基、C2 H4 Cl、C2 H4 OH、CH2 CH=CH2 ,或苯基。In Chemical Formula 2-5, R a is hydrogen, ethyl, C 2 H 4 Cl, C 2 H 4 OH, CH 2 CH=CH 2 , or a phenyl group.

該咔哚為主之樹脂可以包括一者,該處於化學式1中之各R1 與R2 為由下列化學式3表示的一取代基。The ruthenium-based resin may include one, and each of R 1 and R 2 in Chemical Formula 1 is a substituent represented by the following Chemical Formula 3.

由以上的化學式1表示的重覆單元包括(甲基)丙烯酸酯之至少一者,特別地於R1 與R2 位置處之6個(甲基)丙烯酸酯。既然該咔哚為主之樹脂每一個重覆單元包括6個(甲基)丙烯酸酯,可以實現優良的相容性、顯影性質、敏感性、緊密的接觸性質,和機械強度,以及當其被應用至一種光敏性樹脂組成物時,由於優良的抗熱性與耐光性,於高溫下工作可為可能的。The repeating unit represented by the above Chemical Formula 1 includes at least one of (meth) acrylates, particularly six (meth) acrylates at positions R 1 and R 2 . Since the ruthenium-based resin includes six (meth) acrylates per recoating unit, excellent compatibility, developing properties, sensitivity, tight contact properties, and mechanical strength can be achieved, and when it is When applied to a photosensitive resin composition, it is possible to work at a high temperature due to excellent heat resistance and light resistance.

該咔哚為主之樹脂可以包括為由下列化學式4表示的一末端基於二個末端端的至少一者。The ruthenium-based resin may include at least one of the ends represented by the following Chemical Formula 4 based on the two terminal ends.

於化學式4中,Z3 為由下列化學式5-1至5-7表示的連接基團之至少一者。In Chemical Formula 4, Z 3 is at least one of the linking groups represented by the following Chemical Formulas 5-1 to 5-7.

於化學式5-1中,Rb 與Rc 為相同或不同的,以及為氫、經取代或未經取代的C1至C20烷基、酯基,或醚基。In Chemical Formula 5-1, R b and R c are the same or different and are a hydrogen, substituted or unsubstituted C1 to C20 alkyl group, an ester group, or an ether group.

於化學式5-5中,Rd 為O、S、NH、經取代或未經取代的C1至C20烷基、C1至C20烷基胺基,或是C2至C20丙烯胺基。In Chemical Formula 5-5, R d is O, S, NH, a substituted or unsubstituted C1 to C20 alkyl group, a C1 to C20 alkylamino group, or a C2 to C20 acrylamide group.

該咔哚為主之樹脂之實例可以包括以下之二或更多者:含氟的化合物,例如9,9'-雙(4-環氧乙基甲氧基苯基)氟,及類似物;酐化合物,例如:苯四甲酸二酐、萘四甲酸二酐、聯苯四甲酸二酐、二苯甲酮四甲酸二酐、焦蜜石酸二酐、環丁四甲酸二酐、苝四甲酸二酐、四氫呋喃四甲酸二酐、四氫鄰苯二甲酐(tetrahydrophthacid anhydride),及類似物;乙二醇(glycol)化合物,例如:乙二醇(ethyleneglycol)、丙二醇、聚乙二醇,及類似物;醇化合物,例如:甲醇、乙醇、丙醇、正丁醇、環己醇、苯甲醇,及類似物;一溶劑化合物,例如:丙二醇甲乙醋酸酯、N-甲基吡咯啶酮,及類似物;一磷化合物,例如三苯膦,及類似物;一胺或銨鹽化合物,氯化四甲銨、溴化四乙銨、苄基二乙胺、三乙胺、三丁胺、苄基三乙基氯化銨,及類似物。Examples of the ruthenium-based resin may include two or more of the following: a fluorine-containing compound such as 9,9'-bis(4-oxiranylmethoxyphenyl)fluorene, and the like; Anhydride compound, for example: pyromellitic dianhydride, naphthalene tetracarboxylic dianhydride, biphenyltetracarboxylic dianhydride, benzophenone tetracarboxylic dianhydride, pyromellitic dianhydride, cyclotetracarboxylic dianhydride, decanetetracarboxylic acid a dianhydride, tetrahydrofuran tetracarboxylic dianhydride, tetrahydrophthacid anhydride, and the like; a glycol compound such as ethyleneglycol, propylene glycol, polyethylene glycol, and An analog; an alcohol compound such as methanol, ethanol, propanol, n-butanol, cyclohexanol, benzyl alcohol, and the like; a solvent compound such as propylene glycol methyl acetate, N-methylpyrrolidone, and Analog; a phosphorus compound such as triphenylphosphine, and the like; a monoamine or ammonium compound, tetramethylammonium chloride, tetraethylammonium bromide, benzyldiethylamine, triethylamine, tributylamine, benzyl Triethylammonium chloride, and the like.

該咔哚為主之樹脂可以具有1,000至50,000 g/mol的重量平均分子量,特別地2,000至50,000 g/mol的重量平均分子量,以及更特別地2,000至20,000 g/mol的重量平均分子量。當該咔哚為主之樹脂具有於此範圍內的重量平均分子量時,在一光阻隔層的製造期間,一圖案被形成而無殘餘物,以及在顯影期間沒有損失一膜厚度,導致一良好的圖案。The ruthenium-based resin may have a weight average molecular weight of 1,000 to 50,000 g/mol, particularly a weight average molecular weight of 2,000 to 50,000 g/mol, and more specifically a weight average molecular weight of 2,000 to 20,000 g/mol. When the ruthenium-based resin has a weight average molecular weight within this range, a pattern is formed without residue during the manufacture of a photoresist layer, and a film thickness is not lost during development, resulting in a good picture of.

該咔哚為主之樹脂可以以該光敏性樹脂組成物的總重量為基準,以1至30 wt%,以及特別地2至20 wt%的一量被包括。當包括此範圍內的該咔哚為主之樹脂時,優良的敏感性、顯影性質、抗熱性、耐光性,和緊密的接觸性質可以被實現。The ruthenium-based resin may be included in an amount of 1 to 30% by weight, and particularly 2 to 20% by weight based on the total weight of the photosensitive resin composition. When the ruthenium-based resin in this range is included, excellent sensitivity, development properties, heat resistance, light resistance, and tight contact properties can be achieved.

該光敏性樹脂組成物可以除了該咔哚為主之樹脂之外進一步包括一丙烯醯基為主之樹脂。The photosensitive resin composition may further comprise an acrylic resin-based resin in addition to the ruthenium-based resin.

該丙烯醯基為主之樹脂為一第一乙烯屬不飽和單體以及可與該第一乙烯屬不飽和單體共聚合的一第二乙烯屬不飽和單體之一種共聚物,以及包括至少一丙烯醯基為主之重覆單元的一樹脂。The acryl-based resin is a copolymer of a first ethylenically unsaturated monomer and a second ethylenically unsaturated monomer copolymerizable with the first ethylenically unsaturated monomer, and includes at least A resin of a repeating unit mainly composed of an acrylonitrile group.

該第一乙烯屬不飽和單體為包括至少一羧基之一乙烯屬不飽和單體。該單體之實例包括丙烯酸、甲基丙烯酸、馬來酸、衣康酸、反丁烯二酸,或其等之組合。The first ethylenically unsaturated monomer is an ethylenically unsaturated monomer comprising at least one carboxyl group. Examples of the monomer include acrylic acid, methacrylic acid, maleic acid, itaconic acid, fumaric acid, or a combination thereof.

該第一乙烯屬不飽和單體以該丙烯醯基為主之樹脂的總量為基準,可以包括範圍由5至50 wt%,以及特別地,由10至40 wt%的一量。The first ethylenically unsaturated monomer may be included in an amount ranging from 5 to 50% by weight, and particularly from 10 to 40% by weight, based on the total amount of the acrylonitrile-based resin.

該第二乙烯屬不飽和單體之實例可以包括:芳香族乙烯基化合物,例如苯乙烯、α-甲基苯乙烯、乙烯基甲苯、乙烯基苄基甲基醚,及類似物;不飽和羧酸酯化合物,例如:甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸桂皮酯、甲基丙烯酸丁酯、甲基丙烯酸2-羥基乙酯、甲基丙烯酸2-羥基丁酯、甲基丙烯酸苄酯、甲基丙烯酸環己酯,甲基丙烯酸苯酯,及類似物;不飽和羧酸胺基烷基酯化合物,例如:甲基丙烯酸2-胺基乙酯、甲基丙烯酸2-二甲基胺基乙酯,及類似物;羧酸乙烯基酯化合物,例如:乙酸乙烯酯、苯甲酸乙烯酯,及類似物;不飽和羧酸縮水甘油酯化合物,例如甲基丙烯酸縮水甘油酯,及類似物;乙烯基氰化物化合物,例如甲基丙烯腈及類似物;不飽和醯胺化合物,例如甲基丙烯醯胺及類似物;以及類似物。其等可以單一地或如多於二個之混合物來使用。Examples of the second ethylenically unsaturated monomer may include: an aromatic vinyl compound such as styrene, α-methylstyrene, vinyltoluene, vinylbenzyl methyl ether, and the like; an unsaturated carboxyl group; Acid ester compounds, for example: methyl methacrylate, ethyl methacrylate, cinnamyl methacrylate, butyl methacrylate, 2-hydroxyethyl methacrylate, 2-hydroxybutyl methacrylate, methyl Benzyl acrylate, cyclohexyl methacrylate, phenyl methacrylate, and the like; an aminoalkyl ester of an unsaturated carboxylic acid, such as 2-aminoethyl methacrylate, 2- methacrylate Methylaminoethyl ester, and the like; a vinyl carboxylate compound such as vinyl acetate, vinyl benzoate, and the like; an unsaturated carboxylic acid glycidyl ester compound such as glycidyl methacrylate, And analogs; vinyl cyanide compounds such as methacrylonitrile and the like; unsaturated guanamine compounds such as methacrylamide and the like; and the like. They can be used singly or as a mixture of more than two.

該丙烯醯基為主之樹脂之實例可以包括甲基丙烯酸/甲基丙烯酸苄酯共聚物、甲基丙烯酸/甲基丙烯酸苄酯/苯乙烯共聚物、甲基丙烯酸/甲基丙烯酸苄酯/甲基丙烯酸2-羥基乙酯共聚物、甲基丙烯酸/甲基丙烯酸苄酯/苯乙烯/甲基丙烯酸2-羥基乙酯共聚物,及類似物,但不限於彼等。其等可以單一地或是如二個或更多個之混合物來使用。Examples of the acryl-based resin may include methacrylic acid/benzyl methacrylate copolymer, methacrylic acid/benzyl methacrylate/styrene copolymer, methacrylic acid/benzyl methacrylate/methyl 2-hydroxyethyl acrylate copolymer, methacrylic acid / benzyl methacrylate / styrene / 2-hydroxyethyl methacrylate copolymer, and the like, but not limited to them. They may be used singly or as a mixture of two or more.

該丙烯醯基為主之樹脂可以具有範圍從3,000至150,000 g/mol,特別地3,000至40,000 g/mol,以及更特別地5,000至30,000 g/mol的重量平均分子量。當該丙烯醯基為主之樹脂具有於此範圍內的重量平均分子量時,該光敏性樹脂組成物具有良好的物理性質與化學性質、適當的黏度,以及與一基材之緊密的接觸性質,當被應用至一光阻隔層時。The propylene sulfhydryl-based resin may have a weight average molecular weight ranging from 3,000 to 150,000 g/mol, particularly 3,000 to 40,000 g/mol, and more specifically 5,000 to 30,000 g/mol. When the propylene fluorenyl-based resin has a weight average molecular weight within this range, the photosensitive resin composition has good physical properties and chemical properties, appropriate viscosity, and close contact property with a substrate. When applied to a light barrier layer.

該丙烯醯基為主之樹脂可以具有範圍從30至200 mgKOH/g的酸價,以及特別地50至180 mgKOH/g的酸價。當丙烯醯基為主之樹脂具有於此範圍內的酸價時,可以實現優異的像素解析度。The acryl-based resin may have an acid value ranging from 30 to 200 mgKOH/g, and particularly an acid value of 50 to 180 mgKOH/g. When the acryl-based resin mainly has an acid value in this range, excellent pixel resolution can be achieved.

當該丙烯醯基為主之樹脂被包括於該光敏性樹脂組成物之內時,該咔哚為主之樹脂和該丙烯醯基為主之樹脂可以以99:1至1:99的重量比存在,以及特別地以95:5至50:50的重量比存在。當該咔哚為主之樹脂和丙烯醯基為主之樹脂係以該重量比被包括時,優良的顯影性質與敏感性係被實現以及可以獲得具有優良的圖案形成能力之光阻隔層圖案而抑制底切的產生。When the acryl-based resin is included in the photosensitive resin composition, the bismuth-based resin and the acryl-based resin may have a weight ratio of 99:1 to 1:99. It is present, and in particular in a weight ratio of from 95:5 to 50:50. When the bismuth-based resin and the acryl-based resin-based resin are included in the weight ratio, excellent developing properties and sensitivities are achieved and a light-blocking layer pattern having excellent pattern forming ability can be obtained. Suppresses the production of undercuts.

(B) 反應性不飽和化合物(B) Reactive unsaturated compounds

該反應性不飽和化合物可以是於一種光敏性樹脂組成物中之普遍使用的單體或寡聚物。其可以為包括至少一乙烯屬不飽和雙鍵之單官能或多官能性甲基丙烯酸酯。The reactive unsaturated compound may be a commonly used monomer or oligomer in a photosensitive resin composition. It may be a monofunctional or polyfunctional methacrylate comprising at least one ethylenically unsaturated double bond.

該反應性不飽和化合物在曝光時於圖案形成製程期間,由於乙烯屬不飽和雙鍵,引起了充分的光聚合化作用以形成具有優良的抗熱性、耐光性,及耐化學性之圖案。The reactive unsaturated compound causes sufficient photopolymerization to form a pattern having excellent heat resistance, light resistance, and chemical resistance during the pattern forming process due to the ethylenic unsaturated double bond.

該反應性不飽和化合物之實例可以包括二丙烯酸乙二醇酯、乙二醇二甲基丙烯酸酯、二丙烯酸二乙二醇酯、二丙烯酸三乙二醇酯、三乙二醇二甲基丙烯酸酯、1,6-己二醇二丙烯酸酯、1,6-己二醇二甲基丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、雙酚A環氧丙烯酸酯、乙二醇甲醚丙烯酸酯、三羥甲基丙烷三丙烯酸酯、三丙烯醯基氧乙基磷酸酯,及類似物。Examples of the reactive unsaturated compound may include ethylene glycol diacrylate, ethylene glycol dimethacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, and triethylene glycol dimethacrylate. Ester, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, bisphenol A epoxy acrylate, ethylene glycol methyl ether acrylate, trimethylolpropane triacrylate, tripropylene decyl oxyethyl phosphate, and the like.

該反應性不飽和化合物之商業上可得的實例係如下列。單官能性甲基丙烯酸酯可以包括Aronix M-、M-、M-(TOAGOSEI CHEMICAL INDUSTRY CO.,LTD.);KAYARAD TC-、TC-(NIPPON KAYAKU CO.,LTD.);V-、V-(OSAKA ORGANIC CHEMICAL IND.,LTD.),及類似物。雙官能性甲基丙烯酸酯之實例可以包括Aronix M-、M-、M-(TOAGOSEI CHEMICAL INDUSTRY CO.,LTD.)、KAYARAD、HX-、R-(NIPPON KAYAKU CO.,LTD.)、V-、V-、V-335(OSAKA ORGANIC CHEMICAL IND.,LTD.),及類似物。三官能性甲基丙烯酸酯之實例可以包括Aronix M-、M-、M-、M-、M-、M-、M-(TOAGOSEI CHEMICAL INDUSTRY CO.,LTD.)、KAYARAD、DPCA-、DPCA-、DPCA-、DPCA-(NIPPON KAYAKU CO.,LTD.)、V-、V-、V-、V-、V-、V-(Osaka Yuki Kayaku Kogyo Co. Ltd.),及類似物。該反應性不飽和化合物可以單一地或是如二個或更多個之混合物來使用。Commercially available examples of such reactive unsaturated compounds are as follows. Monofunctional methacrylates can include Aronix M- , M- , M- (TOAGOSEI CHEMICAL INDUSTRY CO.,LTD.);KAYARAD TC- TC- (NIPPON KAYAKU CO.,LTD.);V- , V- (OSAKA ORGANIC CHEMICAL IND., LTD.), and the like. Examples of difunctional methacrylates may include Aronix M- , M- , M- (TOAGOSEI CHEMICAL INDUSTRY CO.,LTD.), KAYARAD HX- , R- (NIPPON KAYAKU CO.,LTD.), V- , V- V-335 (OSAKA ORGANIC CHEMICAL IND., LTD.), and the like. Examples of trifunctional methacrylates may include Aronix M- , M- , M- , M- , M- , M- , M- (TOAGOSEI CHEMICAL INDUSTRY CO.,LTD.), KAYARAD , DPCA- , DPCA- , DPCA- , DPCA- (NIPPON KAYAKU CO.,LTD.), V- , V- , V- , V- , V- , V- (Osaka Yuki Kayaku Kogyo Co. Ltd.), and the like. The reactive unsaturated compound may be used singly or as a mixture of two or more.

該反應性不飽和化合物可以用酸酐予以處理以改善顯影性質。The reactive unsaturated compound can be treated with an acid anhydride to improve developing properties.

該反應性不飽和化合物以該光敏性樹脂組成物的總量為基準,可以以範圍由1至30 wt%,以及特別地1至15 wt%的一量被包括。當包括此範圍內的反應未飽和化合物時,固化在曝光時於圖案形成製程期間被充分地執行,以及可以實現可靠性、抗熱性、耐光性,和耐化學性、解析度以及圖案之緊密的接觸性質。The reactive unsaturated compound may be included in an amount ranging from 1 to 30 wt%, and particularly from 1 to 15 wt%, based on the total amount of the photosensitive resin composition. When a reactive unsaturated compound within this range is included, curing is sufficiently performed during the patterning process at the time of exposure, and reliability, heat resistance, light resistance, and chemical resistance, resolution, and pattern closeness can be achieved. The nature of the contact.

(C) 色素(C) pigment

色素可以為一有機色素或一無機色素。The pigment may be an organic pigment or an inorganic pigment.

色素可以包括一紅色色素、一綠色色素、一藍色色素、一黃色色素、一黑色色素,及類似物。The pigment may include a red pigment, a green pigment, a blue pigment, a yellow pigment, a black pigment, and the like.

紅色色素之實例包括C.I.紅色色素254、C.I.紅色色素255、C.I.紅色色素264、C.I.紅色色素270、C.I.紅色色素272、C.I.紅色色素177、C.I.紅色色素89,及類似物。綠色色素之實例包括一鹵素取代的銅酞藍色素,例如:C.I.綠色色素36、C.I.綠色色素7,及類似物。藍色色素之實例包括一銅酞藍色素,例如:C.I.藍色色素15:6、C.I.藍色色素15、C.I.藍色色素15:1、C.I.藍色色素15:2、C.I.藍色色素15:3、C.I.藍色色素15:4、C.I.藍色色素15:5、C.I.藍色色素16,及類似物。黃色色素之實例包括一異吲哚啉色素,例如C.I.黃色色素139,及類似物,一喹啉黃色素,例如C.I.黃色色素138,及類似物,一鎳錯合物色素,例如C.I.黃色色素150,及類似物。黑色色素之實例包括苯胺黑、苝黑(perylene black)、鈦黑(titanium black)、碳黑,及類似物。色素可以單一地或是如二個或更多個之混合物來使用以及不限於以上說明的色素。Examples of the red pigment include C.I. red pigment 254, C.I. red pigment 255, C.I. red pigment 264, C.I. red pigment 270, C.I. red pigment 272, C.I. red pigment 177, C.I. red pigment 89, and the like. Examples of the green pigment include a halogen-substituted copper indocyanin, such as: C.I. green pigment 36, C.I. green pigment 7, and the like. Examples of the blue pigment include a copper phthalocyanine, for example, CI blue pigment 15:6, CI blue pigment 15, CI blue pigment 15:1, CI blue pigment 15:2, CI blue pigment 15: 3. CI blue pigment 15:4, CI blue pigment 15:5, CI blue pigment 16, and the like. Examples of the yellow pigment include an isoporphyrin pigment such as CI yellow pigment 139, and the like, a quinoline yellow pigment such as CI yellow pigment 138, and the like, a nickel complex pigment such as CI yellow pigment 150. , and the like. Examples of the black pigment include nigrosine black, perylene black, titanium black, carbon black, and the like. The pigment may be used singly or as a mixture of two or more and is not limited to the pigments described above.

在其等之中,為了有效地執行一光阻隔層的光阻隔,可以包括黑色色素。當使用黑色色素時,亦可以使用一顏色校正劑,例如蒽醌為主的色素、苝為主的色素、酞花青為主的色素、偶氮為主的色素,及類似物。Among them, in order to effectively perform light blocking of a light blocking layer, a black pigment may be included. When a black pigment is used, a color correcting agent such as a quinone-based pigment, a quinone-based pigment, a phthalocyanine-based pigment, an azo-based pigment, and the like can also be used.

該光敏性樹脂組成物可以進一步包括一分散劑俾以改善色素的分散。The photosensitive resin composition may further include a dispersing agent to improve the dispersion of the pigment.

特別地,色素可以用一分散劑來表面預處理,或是色素與分散劑可以在該光敏性樹脂組成物的製備期間一起添加。In particular, the pigment may be surface-pretreated with a dispersing agent, or the pigment and the dispersing agent may be added together during the preparation of the photosensitive resin composition.

該分散劑可以包括非離子性分散劑、陰離子性分散劑、陽離子性分散劑,及類似物。分散劑之實例包括聚亞烷基二醇及其之酯、聚氧化烯(polyoxyalkylene)、多羥基醇酯環氧烷加合產物、醇環氧烷加合產物、磺酸酯類、磺酸鹽、羧酸酯類、羧酸鹽、烷基醯胺環氧烷加合產物、烷基胺,及類似物,但不限於彼等。分散劑可以單一地或是如二個或更多個之混合物來使用。The dispersing agent may include a nonionic dispersing agent, an anionic dispersing agent, a cationic dispersing agent, and the like. Examples of the dispersant include polyalkylene glycol and esters thereof, polyoxyalkylene, polyhydric alcohol ester alkylene oxide addition product, alcohol alkylene oxide addition product, sulfonate, sulfonate And, but not limited to, carboxylic acid esters, carboxylates, alkylguanamine alkylene oxide addition products, alkylamines, and the like. The dispersing agent may be used singly or as a mixture of two or more.

該分散劑之商業上可得的實例係如下列:DISPERBYK-101、DISPERBYK-130、DISPERBYK-140、DISPERBYK-160、DISPERBYK-161、DISPERBYK-162、DISPERBYK-163、DISPERBYK-164、DISPERBYK-165、DISPERBYK-166、DISPERBYK-170、DISPERBYK-171、DISPERBYK-182、DISPERBYK-2000、DISPERBYK-2001,及類似物(BYK);EFKA-47、EFKA-47EA、EFKA-48、EFKA-49、EFKA-100、EFKA-400、EFKA-450,及類似物(EFKA chemicals);Solsperse 5000、Solsperse 12000、Solsperse 13240、Solsperse 13940、Solsperse 17000、Solsperse 20000、Solsperse 24000GR、Solsperse 27000、Solsperse 28000,及類似物(Zeneka);或是PB711、PB821,及類似物(Ajinomoto)。Commercially available examples of such dispersants are as follows: DISPERBYK-101, DISPERBYK-130, DISPERBYK-140, DISPERBYK-160, DISPERBYK-161, DISPERBYK-162, DISPERBYK-163, DISPERBYK-164, DISPERBYK-165, DISPERBYK-166, DISPERBYK-170, DISPERBYK-171, DISPERBYK-182, DISPERBYK-2000, DISPERBYK-2001, and the like (BYK); EFKA-47, EFKA-47EA, EFKA-48, EFKA-49, EFKA-100 EFKA-400, EFKA-450, and the like (EFKA chemicals); Solsperse 5000, Solsperse 12000, Solsperse 13240, Solsperse 13940, Solsperse 17000, Solsperse 20000, Solsperse 24000GR, Solsperse 27000, Solsperse 28000, and the like (Zeneka) Or PB711, PB821, and the like (Ajinomoto).

該分散劑可以以該光敏性樹脂組成物的總量為基準,以0.01至10 wt%的一量被包括。當包括以上範圍內的分散劑時,該光敏性樹脂組成物的分散係被改善導致在一光阻隔層的製造期間之優良的安定性、顯影性質,及圖案化性質。The dispersant may be included in an amount of 0.01 to 10% by weight based on the total amount of the photosensitive resin composition. When the dispersant in the above range is included, the dispersion of the photosensitive resin composition is improved to cause excellent stability, developing properties, and patterning properties during the production of a photo-resist layer.

色素可以以該光敏性樹脂組成物的總量為基準,以1至30 wt%,以及特別地2至20 wt%的一量被包括。當包括以上範圍內的色素時,色彩再現性、固化能力,以及圖案之緊密的接觸性質為優良的。The pigment may be included in an amount of 1 to 30% by weight, and particularly 2 to 20% by weight based on the total amount of the photosensitive resin composition. When the pigment in the above range is included, the color reproducibility, the curing ability, and the close contact property of the pattern are excellent.

(D) 起始劑(D) starter

該起始劑可以為一種光聚合化起始劑、一種自由基聚合化起始劑,或其等之一組合。The initiator may be a photopolymerization initiator, a radical polymerization initiator, or a combination thereof.

該光聚合化起始劑可以為於一種光敏性樹脂組成物中普遍使用的起始劑,舉例而言:苯乙酮為主的化合物、二苯基酮為主的化合物、噻酮(thioxanthone)為主的化合物、安息香(benzoin)為主的化合物、三為主的化合物,及類似物。The photopolymerization initiator may be an initiator commonly used in a photosensitive resin composition, for example, an acetophenone-based compound, a diphenylketone-based compound, and a thiophene. Ketone (thioxanthone)-based compound, benzoin-based compound, three Main compounds, and the like.

該苯乙酮為主的化合物包括:2,2’-二乙氧基苯乙酮、2,2’-二丁氧基苯乙銅、2-羥基-2-甲基苯丙酮(methylpropinophenone)、對-第三-丁基三氯苯乙酮、對-第三-丁基二氯苯乙酮、4-氯苯乙酮、2,2’-二氯-4-苯氧基苯乙酮、2-甲基-1-(4-(甲硫基)苯基)-2-嗎福啉丙-1-酮、2-苯甲基-2-二甲基胺基-1-(4-嗎福啉苯基)-丁-1-酮,及類似物。The acetophenone-based compound includes: 2,2'-diethoxyacetophenone, 2,2'-dibutoxyphenethyl copper, 2-hydroxy-2-methylpropiophenone, p-T-butyltrichloroacetophenone, p-t-butyldichloroacetophenone, 4-chloroacetophenone, 2,2'-dichloro-4-phenoxyacetophenone, 2-methyl-1-(4-(methylthio)phenyl)-2-morpholinepropan-1-one, 2-benzyl-2-dimethylamino-1-(4-? Phenanthroline phenyl)-butan-1-one, and the like.

該二苯基酮為主的化合物包括二苯基酮、苯甲醯基苯甲酸酯、苯甲醯基苯甲酸甲酯(benzoyl methyl benzoate)、4-苯基二苯基酮、羥基二苯基酮、丙烯酸化二苯基酮(acrylated benzophenone)、4,4’-雙(二甲基胺基)二苯基酮、4,4’-雙(二乙基胺基)二苯基酮、4,4’-二甲基胺基二苯基酮、4,4’-二氯二苯基酮、3,3’-二甲基-2-甲氧基二苯基酮,及類似物。The diphenyl ketone-based compound includes diphenyl ketone, benzhydryl benzoate, benzoyl methyl benzoate, 4-phenyl diphenyl ketone, hydroxy diphenyl Ketone, acrylated benzophenone, 4,4'-bis(dimethylamino)diphenyl ketone, 4,4'-bis(diethylamino)diphenyl ketone, 4,4'-Dimethylaminodiphenyl ketone, 4,4'-dichlorodiphenyl ketone, 3,3'-dimethyl-2-methoxydiphenyl ketone, and the like.

該噻酮為主的化合物包括噻酮、2-甲基噻酮、異丙基噻酮、2,4-二乙基噻酮、2,4-二異丙基噻酮、2-氯噻酮,及類似物。Thio Ketone-based compounds including thiophenes Ketone, 2-methylthiazide Ketone, isopropyl thiophene Ketone, 2,4-diethylthio Ketone, 2,4-diisopropylthio Ketone, 2-chlorothiazide Ketones, and the like.

該安息香為主的化合物包括安息香、安息香甲醚、安息香乙醚、安息香異丙醚、安息香異丁醚、安息香二甲基縮醛(benzyldimethylketal),及類似物。The benzoin-based compounds include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, benzodimethylketal, and the like.

該三為主的化合物包括2,4,6-三氯-s-三、2-苯基-4,6-雙(三氯甲基)-s-三、2-(3’,4’-二甲氧基苯乙烯基)-4,6-雙(三氯甲基)-s-三、2-(4’-甲氧基萘基)-4,6-雙(三氯甲基)-s-三、2-(對-甲氧基苯基)-4,6-雙(三氯甲基)-s-三、2-(對-甲苯基)-4,6-雙(三氯甲基)-s-三、2-聯苯基4,6-雙(三氯甲基)-s-三、雙(三氯甲基)-6-苯乙烯基-s-三、2-(萘-1-基)-4,6-雙(三氯甲基)-s-三、2-(4-甲氧基萘-1-基)-4,6-雙(三氯甲基)-s-三、2-4-三氯甲基(向日葵基)-6-三、2-4-三氯甲基(4’-甲氧基苯乙烯基)-6-三,及類似物。The three Main compounds include 2,4,6-trichloro-s-three 2-phenyl-4,6-bis(trichloromethyl)-s-three , 2-(3',4'-dimethoxystyryl)-4,6-bis(trichloromethyl)-s-three , 2-(4'-methoxynaphthyl)-4,6-bis(trichloromethyl)-s-three , 2-(p-methoxyphenyl)-4,6-bis(trichloromethyl)-s-three , 2-(p-tolyl)-4,6-bis(trichloromethyl)-s-three 2-biphenyl 4,6-bis(trichloromethyl)-s-three , bis(trichloromethyl)-6-styryl-s-three ,2-(naphthalen-1-yl)-4,6-bis(trichloromethyl)-s-three , 2-(4-methoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-s-three 2-4-trichloromethyl (sunflower based)-6-three 2-4-trichloromethyl (4'-methoxystyryl)-6-three , and the like.

該聚合化起始劑可以進一步包括咔唑為主的化合物、二酮為主的化合物、硼酸鋶為主的化合物、重氮為主的化合物、雙咪唑為主的化合物,及類似物。The polymerization initiator may further include a carbazole-based compound, a diketone-based compound, a bismuth borate-based compound, a diazo-based compound, a bisimidazole-based compound, and the like.

該自由基聚合化起始劑可以包括一過氧化物為主之化合物、一偶氮雙為主之化合物,及類似物。The radical polymerization initiator may include a peroxide-based compound, an azobis-based compound, and the like.

該過氧化物為主之化合物之實例包括過氧化酮,舉例而言:過氧化甲乙酮、過氧化環己酮、過氧化甲基環己酮、過氧化乙醯丙酮,及類似物;二醯基過氧化物,舉例而言:過氧化異丁醯基、2,4-二氯苯甲醯過氧化物、鄰甲基苯甲醯過氧化物、雙-3,5,5-三甲基己醯基過氧化物,及類似物;氫過氧化物,舉例而言:2,4,4,-三甲基戊基-2-氫過氧化物、二異丙基苯氫過氧化物、氫過氧化異丙苯、三級丁氫過氧化物,及類似物;二烷基過氧化物,舉例而言:雙異苯丙基過氧化物、2,5-二甲基-2,5-二(三級丁基氫過氧)己烷、1,3-雙(三級丁氧基異丙基)苯、三級丁基氫過氧戊酸正丁酯,及類似物;烷基過氧化酯,舉例而言:2,4,4-三甲基戊基過氧苯氧乙酸酯、α-異丙苯基過氧新癸酸酯、三級丁基過氧苯甲酸酯、二-三級丁基過氧三甲基己二酸酯,及類似物;過碳酸酯,舉例而言:二-3-甲氧基丁基過氧二碳酸酯、二-2-乙基己基過氧二碳酸酯、雙-4-三級丁基環己基過氧二碳酸酯、二異丙基過氧二碳酸酯、乙醯環己基磺醯基過氧化物、三級丁基過氧化乙醯基碳酸酯,及類似物。Examples of the peroxide-based compound include ketone peroxides, for example, methyl ethyl ketone peroxide, cyclohexanone peroxide, methyl cyclohexanone peroxide, acetam peroxide, and the like; Peroxides, for example: isobutyl sulfoxide, 2,4-dichlorobenzamide peroxide, o-methylbenzhydryl peroxide, bis-3,5,5-trimethylhexyl Peroxides, and the like; hydroperoxides, for example: 2,4,4,-trimethylpentyl-2-hydroperoxide, diisopropylbenzene hydroperoxide, hydroperoxide Cumene, tertiary butyrate, and the like; dialkyl peroxides, for example: bisisophenylpropyl peroxide, 2,5-dimethyl-2,5-di ( Tertiary butyl hydroperoxide) hexane, 1,3-bis(tertiary butoxyisopropyl)benzene, n-butyl butyl hydroperoxypivalate, and the like; alkyl peroxyester For example: 2,4,4-trimethylpentylperoxyphenoxyacetate, α-cumyl peroxy neodecanoate, tertiary butyl peroxybenzoate, di- Tert-butyl peroxytrimethyl adipate, and the like; percarbonate, for example : bis-3-methoxybutylperoxydicarbonate, di-2-ethylhexylperoxydicarbonate, bis-4-tributylcyclohexylperoxydicarbonate, diisopropyl Oxydicarbonate, acetamidine cyclohexylsulfonyl peroxide, tertiary butyl peroxyethylene carbonate, and the like.

該偶氮雙為主之化合物之實例包括1,1'-偶氮雙環己烷-1-甲腈、2,2'-偶氮雙(2,4-二甲基戊腈)、2,2-偶氮雙(2,4-甲基異丁酸酯)、2,2'-偶氮雙(4-甲氧基-2,4-二甲基戊腈)、α,α'-偶氮雙(異丁腈)及、4,4'-偶氮雙(4-氰戊酸),及類似物。Examples of the azobis-based compound include 1,1'-azobiscyclohexane-1-carbonitrile, 2,2'-azobis(2,4-dimethylvaleronitrile), 2,2 - azobis(2,4-methylisobutyrate), 2,2'-azobis(4-methoxy-2,4-dimethylvaleronitrile), α,α'-azo Bis(isobutyronitrile) and 4,4'-azobis(4-cyanovaleric acid), and the like.

因該起始劑吸收光且予以激化以及繼而傳遞能量,其可與一光敏劑來使用以產生一化學反應。Since the initiator absorbs light and amplifies and then transfers energy, it can be used with a photosensitizer to create a chemical reaction.

該光敏劑之實例包括四甘醇雙-3-巰基丙酸酯、新戊四醇肆-3-巰基丙酸酯、二新戊四醇肆-3-巰基丙酸酯,以及類似物。Examples of the photosensitizer include tetraethylene glycol bis-3-mercaptopropionate, neopentyl 肆-3-mercaptopropionate, dipentaerythritol dec-3-mercaptopropionate, and the like.

該起始劑可以以該光敏性樹脂組成物的總量為基準,以0.01wt%至10wt%的一量被包括,以及特別地0.1至5 wt%的一量被包括。當包括此範圍內的起始劑時,於圖案形成製程期間在曝光時執行了充分的固化以獲得優良的可靠性、抗熱性、耐光性,及耐化學性、解析度以及緊密的接觸性質而不使透射率劣化,由於非反應性起始劑。The initiator may be included in an amount of 0.01% by weight to 10% by weight based on the total amount of the photosensitive resin composition, and particularly an amount of 0.1 to 5% by weight. When the initiator in this range is included, sufficient curing is performed at the time of exposure during the patterning process to obtain excellent reliability, heat resistance, light resistance, chemical resistance, resolution, and close contact properties. The transmittance is not deteriorated due to the non-reactive starter.

(E)溶劑(E) solvent

溶劑具有與該咔哚為主之樹脂、反應性不飽和化合物、色素,以及起始劑之相容性,但是與之不具有一反應。The solvent has compatibility with the bismuth-based resin, reactive unsaturated compound, pigment, and initiator, but does not have a reaction therewith.

溶劑之實例可以包括醇,例如甲醇、乙醇,及類似物;醚,例如:二氯乙醚、n-丁醚、二異戊醚、甲基苯基醚、四氫呋喃,及類似物;二醇醚,例如:乙二醇單甲醚、乙二醇單乙醚,及類似物;乙酸賽璐蘇,例如:乙酸甲賽璐蘇、乙酸乙賽璐蘇、乙酸二乙賽璐蘇,及類似物;卡必醇,例如:甲基乙基卡必醇、二乙基卡必醇、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇甲醚、二乙二醇甲乙醚、二乙二醇乙醚等等;丙二醇烷基醚乙酸酯,例如:丙二醇甲醚乙酸酯、丙二醇丙醚乙酸酯,及類似物;芳烴,例如甲苯、二甲苯,及類似物;酮,例如:甲乙酮、環己酮、4-羥基-4-甲基-2-戊酮、甲基-n-丙酮、甲基-n-丁酮、甲基-n-戊酮、2-庚酮,及類似物;飽和脂族單羧酸烷基酯,例如:乙酸乙酯、n-丁基乙酸酯、異丁基乙酸酯,及類似物;乳酸酯,例如:乳酸甲酯、乳酸乙酯,及類似物;烷基氧基乙酸酯,例如:甲基氧基乙酸酯、乙基氧基乙酸酯、丁基氧基乙酸酯,及類似物;烷基烷氧基乙酸酯,例如:甲氧基乙酸甲酯、甲氧基乙酸乙酯、甲氧基乙酸丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙酯,及類似物;3-氧基丙酸烷基酯(3-oxy propionate alkylesters),例如3-氧基丙酸甲酯、3-氧基丙酸乙酯,及類似物;3-烷氧基丙酸烷基酯,例如:3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸甲酯,及類似物;2-氧基丙酸烷基酯,例如:2-氧基丙酸甲酯、2-氧基丙酸乙酯、2-氧基丙酸丙基(2-oxy propionic acid propyl),及類似物;2-烷氧基丙酸烷基酯,例如:2-甲氧基丙酸甲酯、2-甲氧基丙酸乙酯、2-乙氧基丙酸乙酯、2-乙氧基丙酸甲酯,及類似物;2-氧基-2-甲基丙酸酯,例如:2-氧基-2-甲基丙酸甲酯、2-氧基-2-甲基丙酸乙酯,及類似物;2-烷氧基-2-甲基丙酸烷基的單氧基單羧酸烷基酯,例如:2-甲氧基-2-甲基丙酸甲酯、2-乙氧基-2-甲基丙酸乙酯,及類似物;酯,例如:2-羥基丙酸乙酯、2-羥基-2-甲基丙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯,及類似物;酮酯(ketonate ester)系列,例如丙酮酸乙酯,及類似物。此外,可以進一步添加下列高沸點的溶劑:N-甲基甲醯胺、N、N-二甲基甲醯胺、N-甲基甲醯胺、N-甲基乙醯胺、N、N-二甲基乙醯胺、N-甲基吡咯烷酮、二甲亞碸、苄基乙基醚、二己基醚、乙醯丙酮、異佛酮、己酸、辛酸、1-辛醇、1-壬醇、苯甲醇、乙酸苯甲酯、苯甲酸乙酯、草酸二乙酯、馬來酸二乙酯、γ-丁內酯、碳酸乙烯酯、碳酸丙烯酯、苯基乙酸賽璐蘇,及類似物。Examples of the solvent may include alcohols such as methanol, ethanol, and the like; ethers such as dichloroethyl ether, n-butyl ether, diisoamyl ether, methylphenyl ether, tetrahydrofuran, and the like; glycol ethers, For example: ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, and the like; acetaminophen acetate, for example: acesulfame acetate, acesulfame acetate, dicetaxel acetate, and the like; Alcohol, for example: methyl ethyl carbitol, diethyl carbitol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol methyl ether, diethylene glycol methyl ethyl ether, two Ethylene glycol ethyl ether or the like; propylene glycol alkyl ether acetate, for example: propylene glycol methyl ether acetate, propylene glycol propyl ether acetate, and the like; aromatic hydrocarbons such as toluene, xylene, and the like; ketones, for example : methyl ethyl ketone, cyclohexanone, 4-hydroxy-4-methyl-2-pentanone, methyl-n-acetone, methyl-n-butanone, methyl-n-pentanone, 2-heptanone, and Analogs; saturated aliphatic monocarboxylic acid alkyl esters, for example: ethyl acetate, n-butyl acetate, isobutyl acetate, and the like; lactate esters, for example: lactate A , ethyl lactate, and the like; alkyloxy acetate, such as: methyloxyacetate, ethyloxyacetate, butyloxyacetate, and the like; alkylalkane Oxyacetic acid esters, for example, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, and the like; 3-oxygen 3-oxy propionate alkylesters, such as methyl 3-oxypropionate, ethyl 3-oxypropionate, and the like; alkyl 3-alkoxypropionate, for example: Methyl 3-methoxypropionate, ethyl 3-methoxypropionate, ethyl 3-ethoxypropionate, methyl 3-ethoxypropionate, and the like; 2-oxypropionic acid Alkyl esters, for example: methyl 2-oxypropionate, ethyl 2-oxypropionate, 2-oxy propionic acid propyl, and the like; 2-alkoxy Alkyl propionate, for example: methyl 2-methoxypropionate, ethyl 2-methoxypropionate, ethyl 2-ethoxypropionate, methyl 2-ethoxypropionate, and the like 2-oxy-2-methylpropionate, for example: methyl 2-oxy-2-methylpropanoate, 2-oxy-2-methylpropane Ethyl ethyl ester, and the like; alkoxy monoalkyl monocarboxylic acid alkyl ester of 2-alkoxy-2-methylpropionic acid alkyl group, for example: methyl 2-methoxy-2-methylpropionate, Ethyl 2-ethoxy-2-methylpropanoate, and the like; esters, for example: ethyl 2-hydroxypropionate, ethyl 2-hydroxy-2-methylpropionate, ethyl hydroxyacetate, 2 Methyl hydroxy-3-methylbutanoate, and the like; a series of ketonate esters such as ethyl pyruvate, and the like. Further, the following high boiling solvents may be further added: N-methylformamide, N,N-dimethylformamide, N-methylformamide, N-methylacetamide, N, N- Dimethylacetamide, N-methylpyrrolidone, dimethyl hydrazine, benzyl ethyl ether, dihexyl ether, acetamidine, isophorone, caproic acid, octanoic acid, 1-octanol, 1-nonanol , benzyl alcohol, benzyl acetate, ethyl benzoate, diethyl oxalate, diethyl maleate, γ-butyrolactone, ethylene carbonate, propylene carbonate, cyanoacetate, and the like .

考慮到相容性以及反應性,二醇醚,例如乙二醇單乙醚,及類似物;乙二醇烷基醚乙酸酯,例如乙酸乙賽璐蘇,及類似物;酯,例如2-羥基丙酸乙酯,及類似物;卡必醇,例如二乙二醇單甲醚,及類似物;丙二醇烷基醚乙酸酯,例如:丙二醇甲醚乙酸酯、丙二醇丙醚乙酸酯,以及類似物。Considering compatibility and reactivity, glycol ethers such as ethylene glycol monoethyl ether, and the like; ethylene glycol alkyl ether acetates such as ethyl acesulfame acetate, and the like; esters such as 2- Ethyl hydroxypropionate, and the like; carbitol, such as diethylene glycol monomethyl ether, and the like; propylene glycol alkyl ether acetate, such as propylene glycol methyl ether acetate, propylene glycol propyl ether acetate , and the like.

溶劑係使用為一差額,以及特別地20至95 wt%以該光敏性樹脂組成物的總量為基準。包括此範圍內的溶劑時,該光敏性樹脂組成物可具有適當的黏度導致一光阻隔層的可加工性之改善。The solvent is used as a difference, and particularly 20 to 95% by weight based on the total amount of the photosensitive resin composition. When the solvent in this range is included, the photosensitive resin composition may have an appropriate viscosity to cause an improvement in workability of a light barrier layer.

(F) 其他添加劑(F) Other additives

該光敏性樹脂組成物可以進一步包括一環氧化合物俾以改善與一基材之之緊密的接觸性質。The photosensitive resin composition may further include an epoxy compound to improve the close contact property with a substrate.

該環氧化合物之實例包括酚醛環氧化合物、四甲基聯苯環氧化合物、雙酚A環氧化合物、脂環環氧化合物,或其等之一組合。Examples of the epoxy compound include a novolac epoxy compound, a tetramethylbiphenyl epoxy compound, a bisphenol A epoxy compound, an alicyclic epoxy compound, or a combination thereof.

該環氧化合物可以以該光敏性樹脂組成物的100份重量計為基準,以0.01至5份以重量計的一量被包括,以及特別地0.1至5份以重量計的一量被包括。當包括以上範圍內的環氧化合物時,緊密的接觸性質、抗熱性,以及耐化學性可以被改善。The epoxy compound may be included in an amount of 0.01 to 5 parts by weight, and particularly 0.1 to 5 parts by weight, based on 100 parts by weight of the photosensitive resin composition. When the epoxy compound in the above range is included, tight contact properties, heat resistance, and chemical resistance can be improved.

該光敏性樹脂組成物可以進一步包括具有一反應性取代基,例如羧基、甲基丙烯醯基、異氰酸酯基、環氧基,及類似物的矽烷偶合劑俾以改善對一基材之附著。The photosensitive resin composition may further include a decane coupling agent having a reactive substituent such as a carboxyl group, a methacryl oxime group, an isocyanate group, an epoxy group, and the like to improve adhesion to a substrate.

矽烷偶合劑之實例包括三甲氧矽烷基苯甲酸、γ-甲基丙烯酸氧丙基三甲氧基矽烷、乙烯基三乙醯氧基矽烷、乙烯基三甲氧基矽烷、γ-異氰酸丙基三乙氧基矽烷、γ-縮水甘油醚氧丙基三甲氧基矽烷、β-(3,4-乙氧環己基)乙基三甲氧基矽烷,及類似物。其等可以單一地或是如二個或更多個之混合物來使用。Examples of the decane coupling agent include trimethoxy sulfonyl benzoic acid, γ-methoxy propyl trimethoxy decane, vinyl triethoxy decane, vinyl trimethoxy decane, and γ-isocyanatopropyl three. Ethoxy decane, γ-glycidyloxypropyl trimethoxy decane, β-(3,4-ethoxycyclohexyl)ethyltrimethoxydecane, and the like. They may be used singly or as a mixture of two or more.

該矽烷偶合劑可以以該光敏性樹脂組成物的100份重量計為基準,以0.01至10份以重量計的一量被包括。當包括以上範圍內的矽烷偶合劑時,緊密的接觸性質、儲存性質,及類似物係改善的。The decane coupling agent may be included in an amount of 0.01 to 10 parts by weight based on 100 parts by weight of the photosensitive resin composition. When the decane coupling agent in the above range is included, the close contact properties, storage properties, and the like are improved.

該光敏性樹脂組成物可以進一步包括一界面活性劑俾以改善塗覆性質且抑制斑點。The photosensitive resin composition may further include a surfactant 俾 to improve coating properties and suppress spots.

該界面活性劑之實例可以包括一氟為主的界面活性劑,舉例而言,BM-,及BM-(BM Chemie Inc.);MEGAFACE F、F、F,與FDAINIPPON INK KAGAKU KOGYO CO.,LTD.);FULORAD FC-、FULORAD FC-、FULORAD FC-,與FULORADFC-(SUMITOMO 3M CO.,LTD.);SURFLON S-、SURFLON S-、SURFLON S-、SURFLON S-,與SURFLON S-(ASAHI GLASS CO.,LTD.);及SH-、SH-、SH-、SZ-,與SF-,及類似物(TORAY SILICONE CO.,LTD.)。Examples of the surfactant may include a fluorine-based surfactant, for example, BM- , and BM- (BM Chemie Inc.); MEGAFACE F , F , F With F DAINIPPON INK KAGAKU KOGYO CO.,LTD.);FULORAD FC- , FULORAD FC- , FULORAD FC- With FULORADFC- (SUMITOMO 3M CO., LTD.); SURFLON S- , SURFLON S- , SURFLON S- , SURFLON S- With SURFLON S- (ASAHI GLASS CO., LTD.); and SH- , SH- , SH- , SZ- With SF- , and the like (TORAY SILICONE CO., LTD.).

該界面活性劑可以以該光敏性樹脂組成物的100份重量計為基準,以0.001至5份以重量計的一量被包括。當包括此範圍內的界面活性劑時,可以確保塗覆均勻性,不會產生污斑,以及一玻璃基材之潤濕性質係改善的。The surfactant may be included in an amount of 0.001 to 5 parts by weight based on 100 parts by weight of the photosensitive resin composition. When a surfactant in this range is included, coating uniformity can be ensured without staining, and the wetting property of a glass substrate is improved.

該光敏性樹脂組成物可以進一步其他添加劑,舉例而言,一抗氧化劑、一安定劑,及類似物以預定量,當其等降低性質時。The photosensitive resin composition may further contain other additives, for example, an antioxidant, a stabilizer, and the like in a predetermined amount, when they lower the properties.

依據另一個具體例,提供了使用該光敏性樹脂組成物來製造的一光阻隔層。該光阻隔層可以製造如下。According to another specific example, a light-blocking layer produced using the photosensitive resin composition is provided. The light blocking layer can be manufactured as follows.

(1) 應用及膜形成(1) Application and film formation

前述的光敏性樹脂組成物係使用一旋轉塗覆法或狹縫塗覆法、滾軸塗覆法、網板印刷法、施用器法,及類似物而塗覆以具有一所欲的厚度,舉例而言,範圍由0.5至25μm的厚度,於進行一預定的預處理之一基材上。繼而,該經塗覆的基材係於範圍由70至110℃的溫度下加熱歷時1至10分鐘以移除一溶劑。The aforementioned photosensitive resin composition is coated to have a desired thickness using a spin coating method or a slit coating method, a roll coating method, a screen printing method, an applicator method, and the like. For example, a thickness ranging from 0.5 to 25 μm is used to perform a predetermined pretreatment on one of the substrates. The coated substrate is then heated at a temperature ranging from 70 to 110 ° C for 1 to 10 minutes to remove a solvent.

(2) 曝光(2) Exposure

產生的膜係在放置具一預定的形狀的遮罩之後藉由190至500 nm的活性射線來照射以形成一所欲的圖案。輻射係藉由使用一光源予以執行,例如具低壓、高壓,或是超高壓的一水銀燈,一金屬鹵化物燈,一氬氣雷射,及類似物。然而,其可以使用一X射線、一電子束,及類似物,取決於狀況。The resulting film is irradiated with active rays of 190 to 500 nm after placing a mask having a predetermined shape to form a desired pattern. The radiation is performed by using a light source such as a mercury lamp having a low pressure, a high pressure, or an ultrahigh pressure, a metal halide lamp, an argon laser, and the like. However, it is possible to use an X-ray, an electron beam, and the like, depending on the situation.

當使用一高壓水銀燈時,曝光製程使用,舉例而言,500 mJ/cm2 或更少的(具365 nm感測器)光劑量。然而,光劑量可以取決於該光敏性樹脂組成物的各組份之種類、其之組合比例,以及一乾燥膜厚度而變化。When a high pressure mercury lamp is used, the exposure process uses, for example, a light dose of 500 mJ/cm 2 or less (with a 365 nm sensor). However, the light dose may vary depending on the kind of each component of the photosensitive resin composition, the combination ratio thereof, and the thickness of a dry film.

(3) 顯影(3) Development

在曝光製程之後,使用一鹼性水溶液以顯影曝光膜,其係藉由溶解且移除除了曝光部分外之不必要的部分,形成一影像圖案。After the exposure process, an aqueous alkaline solution is used to develop the exposed film by forming an image pattern by dissolving and removing unnecessary portions other than the exposed portion.

該顯影溶液可以為一有機溶劑型與一鹼性顯影型。有機溶劑型溶液可以造成環境的污染以及對人體作出傷害。因而,以環境而論鹼性顯影型溶液可以為較佳的。依據一具體例,一鹼性水溶液係使用作為一顯影溶液,其係環境友善的。鹼性水溶液中和存在於一咔哚為主之樹脂內之羧酸以及因而,溶解該咔哚為主之樹脂。The developing solution may be an organic solvent type and an alkaline developing type. Organic solvent-based solutions can cause environmental pollution and damage to the human body. Therefore, an alkaline developing type solution may be preferred in terms of environment. According to a specific example, an aqueous alkaline solution is used as a developing solution, which is environmentally friendly. The alkaline aqueous solution neutralizes the carboxylic acid present in the main resin and thus dissolves the ruthenium-based resin.

(4) 後處理(4) Post processing

經顯影的影像圖案可以再次加熱或藉由一活性射線及類似物予以照射用於固化,俾以完成優良的品質,以抗熱性、光阻性、緊密的接觸性質、耐裂性、耐化學性、高強度、儲存安定性,及類似物而論。The developed image pattern can be heated again or irradiated by an active ray and the like for curing, to achieve excellent quality, heat resistance, photoresist resistance, tight contact properties, crack resistance, chemical resistance, High strength, storage stability, and the like.

因而,前述的光敏性樹脂組成物可以帶來一光阻隔層所需要的優良的絕緣與光學密度。Thus, the aforementioned photosensitive resin composition can bring about an excellent insulating and optical density required for a light-blocking layer.

在下文中,本發明係更詳盡地參照實施例予以闡釋。然而,此等為本發明的例示性具體例以及為非限制性的。In the following, the invention is explained in more detail with reference to the examples. However, these are exemplary embodiments of the invention and are non-limiting.

製備實施例1:咔哚為主之樹脂的製備Preparation Example 1: Preparation of ruthenium-based resin

(1) 將29.8g的季戊四醇三丙烯酸酯(Sigma-Aldrich Co.)及35.43g的丙二醇甲乙醋酸酯(Daicel Chemical Industries Ltd.)放至一反應器內以及加熱升高至50℃。接而,將6.8g的乙氧鈉(Sigma-Aldrich Co.)以小量添加至該處,以及將9.3g的表氯醇(epichlorohydrine)(Sigma-Aldrich Co.)添加至該處歷時30分鐘。將混合物加熱升高至80℃,以及維持在相同的溫度下歷時3小時以及接而,予以過濾以合成由下列化學式6-1表示的一化合物。(1) 29.8 g of pentaerythritol triacrylate (Sigma-Aldrich Co.) and 35.43 g of propylene glycol methyl acetate (Daicel Chemical Industries Ltd.) were placed in a reactor and heated to 50 °C. Next, 6.8 g of sodium ethoxide (Sigma-Aldrich Co.) was added thereto in small amounts, and 9.3 g of epichlorohydrine (Sigma-Aldrich Co.) was added thereto for 30 minutes. . The mixture was heated to 80 ° C, and maintained at the same temperature for 3 hours and then filtered to synthesize a compound represented by the following Chemical Formula 6-1.

(2) 將35g的9,9'-雙(4-羥苯基)氟(Hearchem Co.,Ltd.)、141.6g的由以上的化學式5-1表示的化合物、0.23g的苄基三乙基氯化銨(Daejung Chemicals & Metals Co.,Ltd.),以及0.23g的三苯膦(Sigma-Aldrich Co.)放至一反應器內以及接而,加熱升高至90℃以及維持在相同的溫度下歷時12小時以合成由下列化學式6-2表示的一化合物。(2) 35 g of 9,9'-bis(4-hydroxyphenyl)fluoro (Hearchem Co., Ltd.), 141.6 g of the compound represented by the above Chemical Formula 5-1, and 0.23 g of benzyltriethyl Ammonium chloride (Daejung Chemicals & Metals Co., Ltd.), and 0.23 g of triphenylphosphine (Sigma-Aldrich Co.) were placed in a reactor and connected, heating was increased to 90 ° C and maintained at the same The temperature was 12 hours to synthesize a compound represented by the following Chemical Formula 6-2.

(3) 將30g的由以上的化學式6-2表示的化合物、2.1g的聯苯四甲酸二酐(Mitsubishi Gas Chemical Co.,Ltd.),以及1.1g的四氫鄰苯二甲酐(tetrahydrophth anhydride)(Sigma-Aldrich Co.)放至一反應器內。將混合物加熱升高至120℃以及維持在相同的溫度下歷時2小時以合成由下列化學式6-3表示的一化合物(5,400 g/mol的重量平均分子量)。(3) 30 g of the compound represented by the above Chemical Formula 6-2, 2.1 g of biphenyltetracarboxylic dianhydride (Mitsubishi Gas Chemical Co., Ltd.), and 1.1 g of tetrahydrophthic anhydride (tetrahydrophth) Anhydride) (Sigma-Aldrich Co.) was placed in a reactor. The mixture was heated to 120 ° C and maintained at the same temperature for 2 hours to synthesize a compound represented by the following Chemical Formula 6-3 (weight average molecular weight of 5,400 g/mol).

製備實施例2:紅色色素分散的製備Preparation Example 2: Preparation of Red Pigment Dispersion

將15g的C.I.紅色色素254(Ciba-Geigy Ltd.)、4g的DISPERBYK-163(BYK Additives & Instruments)、3g的丙烯酸/甲基丙烯酸苄酯共聚物(Miwon Commercial Co,Ltd.,NPR8000),以及78g的丙二醇甲乙醋酸酯於一反應器內混合。混合物係藉由使用一塗料搖動器(Asada Iron Works Co.,Ltd.)予以分散歷時12小時,來製備一紅色色素分散溶液。15 g of CI Red Pigment 254 (Ciba-Geigy Ltd.), 4 g of DISPERBYK-163 (BYK Additives & Instruments), 3 g of acrylate/benzyl methacrylate copolymer (Miwon Commercial Co, Ltd., NPR 8000), and 78 g of propylene glycol methyl acetate was mixed in a reactor. The mixture was prepared by dispersing using a paint shaker (Asada Iron Works Co., Ltd.) for 12 hours to prepare a red pigment dispersion solution.

製備實施例3:黑色色素分散的製備Preparation Example 3: Preparation of black pigment dispersion

將15g的碳黑(Cabot Co.)、4g的DISPERBYK-163(BYK Additives & Instruments)、3g的丙烯酸/甲基丙烯酸苄酯共聚物(NPR8000,Miwon Commercial Co,Ltd.),以及78g的丙二醇甲乙醋酸酯放至一反應器內。混合物係藉由使用一塗料搖動器(Asada Iron Works Co.,Ltd.)予以分散歷時12小時,來製備一黑色色素分散溶液。15 g of carbon black (Cabot Co.), 4 g of DISPERBYK-163 (BYK Additives & Instruments), 3 g of acrylic acid/benzyl methacrylate copolymer (NPR8000, Miwon Commercial Co, Ltd.), and 78 g of propylene glycol methyl b The acetate is placed in a reactor. The mixture was prepared by dispersing using a paint shaker (Asada Iron Works Co., Ltd.) for 12 hours to prepare a black pigment dispersion solution.

實施例1和2與比較實施例1至4:光敏性樹脂組成物的製備Examples 1 and 2 and Comparative Examples 1 to 4: Preparation of photosensitive resin composition

依據實施例1和2以及比較實施例1至4的各光敏性樹脂組成物係予以製備以包括下列的表1中提供之下列的組份。Each of the photosensitive resin compositions according to Examples 1 and 2 and Comparative Examples 1 to 4 was prepared to include the following components as provided in Table 1 below.

特別地,將一起始劑溶解於一溶劑之中。將溶液於室溫下攪拌歷時2小時。繼而,將一黏結劑樹脂與一反應性不飽和化合物添加至溶液。將混合物於室溫下攪拌歷時2小時。然後,將依據製備實施例1之紅色色素分散溶液或依據製備實施例2的黑色色素分散溶液與一矽烷偶合劑添加至反應物。將產生的混合物於室溫下攪拌歷時1小時。接而,將產物過濾3次以移除雜質,來製備一種光敏性樹脂組成物。In particular, an initiator is dissolved in a solvent. The solution was stirred at room temperature for 2 hours. Then, a binder resin and a reactive unsaturated compound are added to the solution. The mixture was stirred at room temperature for 2 hours. Then, the red pigment dispersion solution according to Preparation Example 1 or the black pigment dispersion solution according to Preparation Example 2 and a decane coupling agent were added to the reactant. The resulting mixture was stirred at room temperature for 1 hour. Next, the product was filtered 3 times to remove impurities to prepare a photosensitive resin composition.

(A) 黏結劑樹脂(A) Adhesive resin

(A-1) 依據製備實施例1之由化學式6-3表示的化合物係使用作為一咔哚為主之樹脂。(A-1) The compound represented by Chemical Formula 6-3 according to Preparation Example 1 was used as a monoterpene-based resin.

(A-2) 一丙烯酸/甲基丙烯酸苄酯共聚物(NPR8000,Miwon Commercial Co,Ltd.)係使用作為一丙烯醯基為主之樹脂。(A-2) A acrylic acid/benzyl methacrylate copolymer (NPR8000, Miwon Commercial Co., Ltd.) was used as a resin mainly composed of an acrylonitrile group.

(A-3) 至於一咔哚為主之樹脂,使用由Nippon Steel Chemical Co.所製造的V259ME。(A-3) As for the main resin, V259ME manufactured by Nippon Steel Chemical Co. was used.

(B) 反應性不飽和化合物(B) Reactive unsaturated compounds

使用二季戊四醇六丙烯酸酯。Dipentaerythritol hexaacrylate was used.

(C) 色素分散溶液(C) Pigment dispersion solution

(C-1) 使用依據製備實施例2之紅色色素分散溶液。於此,一色素固體係以紅色色素分散溶液的全部量為基準,以15 wt%的一量被包括。(C-1) The red pigment dispersion solution according to Preparation Example 2 was used. Here, a pigment solid is included in an amount of 15% by weight based on the total amount of the red pigment dispersion solution.

(C-2) 使用依據製備實施例3的黑色色素分散溶液。於此,一色素固體係以黑色色素分散溶液的全部量為基準,以15 wt%的一量被包括。(C-2) The black pigment dispersion solution according to Preparation Example 3 was used. Here, a pigment solid is included in an amount of 15% by weight based on the total amount of the black pigment dispersion solution.

(D) 起始劑(D) starter

使用由Ciba Geigy Ltd.所製造的IRGACURE OXE02。IRGACURE OXE02 manufactured by Ciba Geigy Ltd. was used.

(E) 溶劑(E) solvent

使用丙二醇甲醚乙酸酯。Propylene glycol methyl ether acetate was used.

(F) 添加劑(F) Additives

至於一矽烷偶合劑,使用γ-縮水甘油醚氧丙基三甲氧基矽烷(S-510,Chisso Co.)。As the monodecane coupling agent, γ-glycidoxypropyltrimethoxydecane (S-510, Chisso Co.) was used.

標記*指示出一色素固體的量,以一(C-1)紅色色素分散溶液或一(C-2)之黑色色素分散溶液的總量為基準。The mark * indicates the amount of a pigment solid based on the total amount of one (C-1) red pigment dispersion solution or one (C-2) black pigment dispersion solution.

評估1:顯影性質Assessment 1: Developing properties

將依據實施例1和2以及比較實施例1至4的各光敏性樹脂組成物用一旋轉塗覆器(KDNS,K-Spin8)予以塗覆成為0.8 μm厚於一矽晶圓之上(LG Siltron)以及接而,以一曝光器(Nikon,I10C)予以曝光歷時350 ms。接而,當曝光產物係藉由使用一顯影器(SSP-200,SVS Corp.)、用0.2 wt%氫氧化四甲銨(TMAH)水溶液予以顯影時,顯影性質係用一參考予以評估時差,當水溶液被塗覆時以及當經塗覆的膜開始要被顯影時。結果係提供於下列的表2中。Each of the photosensitive resin compositions according to Examples 1 and 2 and Comparative Examples 1 to 4 was coated with a spin coater (KDNS, K-Spin 8) to a thickness of 0.8 μm on a single wafer (LG Siltron) and then exposed to an exposure device (Nikon, I10C) for 350 ms. Incidentally, when the exposed product was developed by using a developing device (SSP-200, SVS Corp.) with a 0.2 wt% aqueous solution of tetramethylammonium hydroxide (TMAH), the developing property was evaluated by a reference for the time difference. When the aqueous solution is coated and when the coated film begins to be developed. The results are provided in Table 2 below.

<顯影性質評估><Development property evaluation>

○:少於20秒○: less than 20 seconds

△:多於20秒且少於30秒△: more than 20 seconds and less than 30 seconds

×:多於30秒×: more than 30 seconds

評估2:殘餘物Assessment 2: Residues

將依據實施例1、比較實施例1,以及比較實施例3的各光敏性樹脂組成物用一旋轉塗覆器(K-Spin8,KDNS Inc.)塗覆成0.8 μm厚於一矽晶圓之上(LG Siltron Inc.)以及以一曝光器(I10C,Nikon Co.)予以曝光歷時350 ms。接而,曝光膜係藉由使用一顯影器(SSP-200,SVS Corp.)、用0.2 wt%氫氧化四甲銨(TMAH)水溶液予以顯影以形成一圖案。接而,圖案係藉由使用一CD掃描式電子顯微鏡分析儀(8100XP,KLA-Tencor Co.)予以檢查以評估是否其具有殘餘物。結果係提供於下列的表2中。此外,經顯影的膜係藉由檢查是否其具有殘餘物而經由於第1至3圖中之CD的掃描式電子顯微鏡圖予以評估。Each photosensitive resin composition according to Example 1, Comparative Example 1, and Comparative Example 3 was coated with a spin coater (K-Spin 8, KDNS Inc.) to a thickness of 0.8 μm on a wafer. LG Siltron Inc. and exposure with an exposure device (I10C, Nikon Co.) lasted 350 ms. Next, the exposed film was developed by using a developing device (SSP-200, SVS Corp.) with a 0.2 wt% aqueous solution of tetramethylammonium hydroxide (TMAH) to form a pattern. Next, the pattern was examined by using a CD scanning electron microscope analyzer (8100XP, KLA-Tencor Co.) to evaluate whether it had a residue. The results are provided in Table 2 below. Further, the developed film was evaluated by scanning electron micrographs of the CDs in Figs. 1 to 3 by examining whether it had a residue.

第1圖為顯示出依據實施例1之光敏性樹脂組成物的殘餘物之掃描式電子顯微鏡圖,第2圖為顯示出依據比較實施例3之光敏性樹脂組成物的殘餘物之掃描式電子顯微鏡圖,以及第3圖為顯示出依據比較實施例1之光敏性樹脂組成物的殘餘物之掃描式電子顯微鏡圖。1 is a scanning electron micrograph showing a residue of a photosensitive resin composition according to Example 1, and FIG. 2 is a scanning electron showing a residue of a photosensitive resin composition according to Comparative Example 3. The micrograph, and Fig. 3 is a scanning electron micrograph showing the residue of the photosensitive resin composition according to Comparative Example 1.

<殘餘物評估><Residue Evaluation>

○:如於第1圖中顯示之平滑的圖案○: a smooth pattern as shown in Figure 1

△:如於第2圖中顯示之小量的殘餘物△: a small amount of residue as shown in Fig. 2

×:如於第3圖中顯示之大量的殘餘物×: a large amount of residue as shown in Fig. 3

參照第1至3圖,依據實施例1的光敏性樹脂組成物具有不帶任何殘餘物之平滑的表面。依據比較實施例1及3的光敏性樹脂組成物具有殘餘物。Referring to Figures 1 to 3, the photosensitive resin composition according to Example 1 has a smooth surface without any residue. The photosensitive resin composition according to Comparative Examples 1 and 3 had a residue.

評估3:圖案形成性質Assessment 3: Pattern Formation Properties

依據實施例1和2以及比較實施例1至4的光敏性樹脂組成物係使用一旋轉塗覆器予以塗覆成為1.5μm高於一玻璃基材上以及接而,使用一圖案遮罩與一曝光器(USHIO Inc.)來曝露至45 mJ/cm2 的光。經塗覆的玻璃係於23℃用1 wt%氫氧化鉀稀釋的一水溶液予以顯影歷時1分鐘以及接而,用純水予以清潔歷時1分鐘。此1.5 um-高的圖案係於一220℃烘箱中予以加熱來固化歷時30分鐘。經固化的圖案係使用一掃描式電子顯微鏡就形狀而檢查。結果係提供於下列的表2以及第4至7圖中。The photosensitive resin compositions according to Examples 1 and 2 and Comparative Examples 1 to 4 were coated with a spin coater to be 1.5 μm higher than a glass substrate, and a pattern mask and a pattern were used. An exposure device (USHIO Inc.) was used to expose light to 45 mJ/cm 2 . The coated glass was developed in an aqueous solution diluted with 1 wt% potassium hydroxide at 23 ° C for 1 minute and then rinsed with pure water for 1 minute. The 1.5 um-height pattern was heated in a 220 ° C oven for curing for 30 minutes. The cured pattern was inspected for shape using a scanning electron microscope. The results are provided in Table 2 below and Figures 4 to 7.

第4圖為顯示出依據實施例2之光敏性樹脂組成物的圖案形成性質之掃描式電子顯微鏡圖,第5圖為顯示出依據實施例1之光敏性樹脂組成物的圖案形成性質之掃描式電子顯微鏡圖,第6圖為顯示出依據比較實施例3之光敏性樹脂組成物的圖案形成性質之掃描式電子顯微鏡圖,以及第7圖為顯示出依據比較實施例2之光敏性樹脂組成物的圖案形成性質之掃描式電子顯微鏡圖。4 is a scanning electron micrograph showing the pattern formation property of the photosensitive resin composition according to Example 2, and FIG. 5 is a scanning diagram showing the pattern formation property of the photosensitive resin composition according to Example 1. Electron micrograph, Fig. 6 is a scanning electron micrograph showing the pattern forming property of the photosensitive resin composition according to Comparative Example 3, and Fig. 7 is a photosensitive resin composition showing Comparative Example 2. Scanning electron micrograph of the pattern forming properties.

<圖案形成性質><pattern formation properties>

◎:如於第4圖中顯示之優良的圖案形成性質◎: excellent pattern forming properties as shown in Fig. 4

○:如於第5圖中顯示之良好的圖案形成性質○: good pattern forming properties as shown in Fig. 5

△:如於第6圖中顯示之不好的圖案形成性質△: poor pattern formation properties as shown in Fig. 6

×:如於第7圖中顯示之沒有圖案×: no pattern as shown in Fig. 7

參照第4至7圖,依據實施例1和2的光敏性樹脂組成物形成了優良的圖案,然而依據比較實施例2及3的該等沒有良好的圖案。Referring to Figures 4 to 7, the photosensitive resin compositions according to Examples 1 and 2 formed an excellent pattern, however, the films according to Comparative Examples 2 and 3 did not have a good pattern.

評估4:細線圖案形成性質評估Assessment 4: Assessment of the properties of fine line pattern formation

依據實施例2以及比較實施例2及4的光敏性樹脂組成物係於使用於圖案形成性質之相同的條件下用來形成一圖案。圖案係使用一光學顯微鏡予以檢查以評估其之最小的尺寸。結果係提供於下列的表2以及第8至10圖中。The photosensitive resin composition according to Example 2 and Comparative Examples 2 and 4 was used to form a pattern under the same conditions used for pattern forming properties. The pattern was examined using an optical microscope to evaluate its minimum size. The results are provided in Table 2 below and Figures 8 to 10.

第8圖為顯示出依據實施例2之光敏性樹脂組成物的圖案尺寸之掃描式電子顯微鏡圖,第9圖為顯示出依據比較實施例2之光敏性樹脂組成物的圖案尺寸之光學顯微鏡圖,以及第10圖為顯示出依據比較實施例4之光敏性樹脂組成物的圖案尺寸之光學顯微鏡圖。Fig. 8 is a scanning electron micrograph showing the pattern size of the photosensitive resin composition according to Example 2, and Fig. 9 is an optical micrograph showing the pattern size of the photosensitive resin composition according to Comparative Example 2. And Fig. 10 is an optical micrograph showing the pattern size of the photosensitive resin composition according to Comparative Example 4.

參照第8至10圖,依據實施例2的光敏性樹脂組成物具有7μm之最小的圖案尺寸,然而依據比較實施例2及4的該等具有9μm之最小的圖案尺寸。Referring to Figures 8 to 10, the photosensitive resin composition according to Example 2 had a minimum pattern size of 7 μm, whereas the patterns according to Comparative Examples 2 and 4 had a minimum pattern size of 9 μm.

參照表2與第1至10圖,使用依據實施例1和2的咔哚為主之樹脂來製備的光敏性樹脂組成物顯示出優良的顯影性質、殘餘物,以及圖案形成性質,相較於依據比較實施例1及2的一丙烯醯基為主之樹脂予以製備的該等以及依據比較實施例3及4之具有與實施例1和2中使用的咔哚為主之樹脂不同結構之咔哚為主之樹脂予以製備的該等。Referring to Table 2 and Figures 1 to 10, the photosensitive resin composition prepared using the ruthenium-based resin according to Examples 1 and 2 exhibited excellent development properties, residues, and pattern formation properties as compared with According to Comparative Examples 1 and 2, the acryl-based resin was prepared, and the structures according to Comparative Examples 3 and 4 having the same structure as the ruthenium-based resin used in Examples 1 and 2 were used. The bismuth-based resin is prepared.

儘管已以目前視為實際可行例示性具體例來說明本揭示,但要理解到本發明不限於所揭示的具體例,而是,相反地,欲涵蓋包括在隨附申請專利範圍之精神與範疇內的各種修飾與等效配置。前述的具體例為例示性的但無論如何非限制性的。Although the present disclosure has been described in what is considered as a practical illustrative embodiment, it is understood that the invention is not limited to the specific examples disclosed, but rather, the scope and scope of the accompanying claims Various modifications and equivalent configurations within. The foregoing specific examples are illustrative but not limiting in any way.

第1圖為一掃描式電子顯微鏡圖,其顯示出依據實施例1的光敏性樹脂組成物的殘餘物;Figure 1 is a scanning electron microscope image showing the residue of the photosensitive resin composition according to Example 1;

第2圖為一掃描式電子顯微鏡圖,其顯示出依據比較實施例3的光敏性樹脂組成物的殘餘物;Figure 2 is a scanning electron microscope image showing the residue of the photosensitive resin composition according to Comparative Example 3;

第3圖為一掃描式電子顯微鏡圖,其顯示出依據比較實施例1的光敏性樹脂組成物的殘餘物;Figure 3 is a scanning electron microscope image showing the residue of the photosensitive resin composition according to Comparative Example 1;

第4圖為一掃描式電子顯微鏡圖,其顯示出依據實施例2的光敏性樹脂組成物的殘餘物;Figure 4 is a scanning electron microscope image showing the residue of the photosensitive resin composition according to Example 2;

第5圖為一掃描式電子顯微鏡圖,其顯示出依據實施例1的光敏性樹脂組成物之圖案形成性質;Figure 5 is a scanning electron microscope image showing the pattern forming properties of the photosensitive resin composition according to Example 1;

第6圖為一掃描式電子顯微鏡圖,其顯示出依據比較實施例3的光敏性樹脂組成物之圖案形成性質;Fig. 6 is a scanning electron microscope image showing the pattern forming property of the photosensitive resin composition according to Comparative Example 3;

第7圖為一掃描式電子顯微鏡圖,其顯示出依據比較實施例2的光敏性樹脂組成物之圖案形成性質;Figure 7 is a scanning electron microscope image showing the pattern forming properties of the photosensitive resin composition according to Comparative Example 2;

第8圖為一光學顯微鏡圖,其顯示出依據實施例2之光敏性樹脂組成物的圖案尺寸;Figure 8 is an optical micrograph showing the pattern size of the photosensitive resin composition according to Example 2;

第9圖為一光學顯微鏡圖,其顯示出依據比較實施例2之光敏性樹脂組成物的圖案尺寸;Figure 9 is an optical micrograph showing the pattern size of the photosensitive resin composition according to Comparative Example 2;

第10圖為一光學顯微鏡圖,其顯示出依據比較實施例4之光敏性樹脂組成物的圖案尺寸。Fig. 10 is an optical micrograph showing the pattern size of the photosensitive resin composition according to Comparative Example 4.

Claims (11)

一種光敏性樹脂組成物,其包含:(A)一咔哚為主之(cardo-based)樹脂,其含有由下列化學式1表示的一重覆單元;(B)一反應性不飽和化合物;(C)一色素;(D)一起始劑;及(E)一溶劑: 其中,於化學式1中,R3 與R4 為相同或不同的,以及為氫、鹵素,或經取代或未經取代的C1至C20烷基,R1 與R2 為相同或不同的,以及為氫或CH2 OCH2 CR6 R7 R8 ,其中,R6 至R8 為經取代或未經取代的(甲基)丙烯酸酯,但有條件是R1 與R2 之至少一者為CH2 OCH2 CR6 R7 R8 ,其中,R6 至R8 為經取代或未經取代的(甲基)丙烯酸酯,Z1 為一單鍵、O、CO、SO2 、CR9 R10 、SiR11 R12 (其中,R9 至R12 為相同或不同的,以及為氫,或經取代或 未經取代的C1至C20烷基),或是為由下列化學式2-1至2-11表示的連接基團之至少一者,Z2 為酸酐殘餘基團或酸二酐殘餘基團,m1 與m2 獨立地為範圍由0至4的整數,以及n為1至1000的整數, [化學式2-5] 其中,於化學式2-5中,Ra 為氫、乙基、C2 H4 Cl、C2 H4 OH、CH2 CH=CH2 ,或苯基, A photosensitive resin composition comprising: (A) a cardo-based resin containing a repeating unit represented by the following Chemical Formula 1; (B) a reactive unsaturated compound; (C) a pigment; (D) an initiator; and (E) a solvent: Wherein, in Chemical Formula 1, R 3 and R 4 are the same or different, and are hydrogen, halogen, or a substituted or unsubstituted C1 to C20 alkyl group, and R 1 and R 2 are the same or different, and Is hydrogen or CH 2 OCH 2 CR 6 R 7 R 8 , wherein R 6 to R 8 are substituted or unsubstituted (meth) acrylate, provided that at least one of R 1 and R 2 is CH 2 OCH 2 CR 6 R 7 R 8 , wherein R 6 to R 8 are substituted or unsubstituted (meth) acrylate, Z 1 is a single bond, O, CO, SO 2 , CR 9 R 10 , SiR 11 R 12 (wherein R 9 to R 12 are the same or different, and are hydrogen or a substituted or unsubstituted C1 to C20 alkyl group), or are the following chemical formulas 2-1 to 2 At least one of the linking groups represented by -11, Z 2 is an acid anhydride residual group or an acid dianhydride residual group, m 1 and m 2 are independently an integer ranging from 0 to 4, and n is from 1 to 1000 Integer, [Chemical Formula 2-5] Wherein, in Chemical Formula 2-5, R a is hydrogen, ethyl, C 2 H 4 Cl, C 2 H 4 OH, CH 2 CH=CH 2 , or phenyl, 如申請專利範圍第1項之光敏性樹脂組成物,其中該咔哚為主之樹脂具有1,000至50,000 g/mol的重量平均分子量。 The photosensitive resin composition of claim 1, wherein the bismuth-based resin has a weight average molecular weight of 1,000 to 50,000 g/mol. 如申請專利範圍第1項之光敏性樹脂組成物,其中該咔哚為主之樹脂包含由下列化學式4表示的一末端基於二個末端的至少一者: 其中,於化學式4中,Z3 為由下列化學式5-1至5-7表示的連接基團之至少一者:[化學式5-1] 其中,於化學式5-1中,Rb 與Rc 為相同或不同的,以及為氫、經取代或未經取代的C1至C20烷基、酯基,或醚基。 其中,於化學式5-5中,Rd 為O、S、NH、經取代或 未經取代的C1至C20烷基、C1至C20烷基胺基,或C2至C20丙烯胺基, The photosensitive resin composition of claim 1, wherein the bismuth-based resin comprises one end represented by the following Chemical Formula 4 based on at least one of two ends: Wherein, in Chemical Formula 4, Z 3 is at least one of the linking groups represented by the following Chemical Formulas 5-1 to 5-7: [Chemical Formula 5-1] Wherein, in Chemical Formula 5-1, R b and R c are the same or different, and are a hydrogen, a substituted or unsubstituted C1 to C20 alkyl group, an ester group, or an ether group. Wherein, in Chemical Formula 5-5, R d is O, S, NH, a substituted or unsubstituted C1 to C20 alkyl group, a C1 to C20 alkylamino group, or a C2 to C20 acrylamide group, 如申請專利範圍第1項之光敏性樹脂組成物,其中該光敏性樹脂組成物包含1至30 wt%的該咔哚為主之樹脂(A);1至30 wt%的該反應性不飽和化合物(B);1至30 wt%的該色素(C);0.01至10 wt%的該起始劑(D);以及差額的該溶劑(E)。 The photosensitive resin composition of claim 1, wherein the photosensitive resin composition contains 1 to 30% by weight of the ruthenium-based resin (A); and 1 to 30% by weight of the reactive unsaturated Compound (B); 1 to 30 wt% of the pigment (C); 0.01 to 10 wt% of the initiator (D); and the solvent (E). 如申請專利範圍第1項之光敏性樹脂組成物,其中該光敏性樹脂組成物進一步包含一丙烯醯基為主之樹脂。 The photosensitive resin composition of claim 1, wherein the photosensitive resin composition further comprises an acrylic resin-based resin. 如申請專利範圍第5項之光敏性樹脂組成物,其中該丙烯醯基為主之樹脂包含第一乙烯屬不飽和單體與第二乙烯屬不飽和單體之一共聚物,該第一乙烯屬不飽和單 體為甲基丙烯酸、馬來酸、衣康酸、反丁烯二酸,或其等之組合的第一乙烯屬不飽和單體;以及該第二乙烯屬不飽和單體為苯乙烯、α-甲基苯乙烯、乙烯基甲苯、乙烯基苄基甲基醚、甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸丁酯、甲基丙烯酸2-羥基乙酯、甲基丙烯酸2-羥基丁酯、甲基丙烯酸苄酯、甲基丙烯酸環己酯、甲基丙烯酸苯酯、甲基丙烯酸2-胺基乙酯、甲基丙烯酸2-二甲基胺基乙酯、乙酸乙烯酯、苯甲酸乙烯酯、甲基丙烯酸縮水甘油酯、甲基丙烯腈、甲基丙烯醯胺,或其等之組合的第二乙烯屬不飽和單體。 The photosensitive resin composition of claim 5, wherein the acryl-based resin comprises a copolymer of a first ethylenically unsaturated monomer and a second ethylenically unsaturated monomer, the first ethylene Unsaturated single a first ethylenically unsaturated monomer which is a combination of methacrylic acid, maleic acid, itaconic acid, fumaric acid, or the like; and the second ethylenically unsaturated monomer is styrene, alpha -methylstyrene, vinyl toluene, vinylbenzyl methyl ether, methyl methacrylate, ethyl methacrylate, butyl methacrylate, 2-hydroxyethyl methacrylate, methacrylic acid 2- Hydroxybutyl ester, benzyl methacrylate, cyclohexyl methacrylate, phenyl methacrylate, 2-aminoethyl methacrylate, 2-dimethylaminoethyl methacrylate, vinyl acetate, A second ethylenically unsaturated monomer of vinyl benzoate, glycidyl methacrylate, methacrylonitrile, methacrylamide, or a combination thereof. 如申請專利範圍第5項之光敏性樹脂組成物,其中該丙烯醯基為主之樹脂具有3,000至40,000 g/mol的重量平均分子量。 The photosensitive resin composition of claim 5, wherein the acryl-based resin has a weight average molecular weight of 3,000 to 40,000 g/mol. 如申請專利範圍第5項之光敏性樹脂組成物,其中該咔哚為主之樹脂和該丙烯醯基為主之樹脂係以99:1至30:70的重量比被包括。 The photosensitive resin composition of claim 5, wherein the bismuth-based resin and the acryl-based resin are included in a weight ratio of from 99:1 to 30:70. 如申請專利範圍第1項之光敏性樹脂組成物,其中該起始劑包含一光聚合化起始劑、一自由基聚合化起始劑,或其等之一組合。 The photosensitive resin composition of claim 1, wherein the initiator comprises a photopolymerization initiator, a radical polymerization initiator, or a combination thereof. 如申請專利範圍第1項之光敏性樹脂組成物,其中該光敏性樹脂組成物包含0.01至20份以重量計的環氧化合物,以該光敏性樹脂組成物的100份重量計為基準。 The photosensitive resin composition of claim 1, wherein the photosensitive resin composition contains 0.01 to 20 parts by weight of the epoxy compound based on 100 parts by weight of the photosensitive resin composition. 一種光阻隔層,其係使用如申請專利範圍第1至10項中任一項之光敏性樹脂組成物來製造的。A light-blocking layer produced by using the photosensitive resin composition according to any one of claims 1 to 10.
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