TWI414474B - - Google Patents

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Publication number
TWI414474B
TWI414474B TW99145284A TW99145284A TWI414474B TW I414474 B TWI414474 B TW I414474B TW 99145284 A TW99145284 A TW 99145284A TW 99145284 A TW99145284 A TW 99145284A TW I414474 B TWI414474 B TW I414474B
Authority
TW
Taiwan
Prior art keywords
disposed
roller
material belt
vacuum process
vacuum
Prior art date
Application number
TW99145284A
Other languages
English (en)
Chinese (zh)
Other versions
TW201226296A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW099145284A priority Critical patent/TW201226296A/zh
Publication of TW201226296A publication Critical patent/TW201226296A/zh
Application granted granted Critical
Publication of TWI414474B publication Critical patent/TWI414474B/zh

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  • Advancing Webs (AREA)
  • Chemical Vapour Deposition (AREA)
TW099145284A 2010-12-22 2010-12-22 Continuous feeder apparatus applied in vacuum process TW201226296A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW099145284A TW201226296A (en) 2010-12-22 2010-12-22 Continuous feeder apparatus applied in vacuum process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW099145284A TW201226296A (en) 2010-12-22 2010-12-22 Continuous feeder apparatus applied in vacuum process

Publications (2)

Publication Number Publication Date
TW201226296A TW201226296A (en) 2012-07-01
TWI414474B true TWI414474B (ja) 2013-11-11

Family

ID=46932733

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099145284A TW201226296A (en) 2010-12-22 2010-12-22 Continuous feeder apparatus applied in vacuum process

Country Status (1)

Country Link
TW (1) TW201226296A (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI261625B (en) * 2002-03-21 2006-09-11 Microcosm Technology Co Ltd Successive type sputtering device
CN1899815A (zh) * 2005-07-11 2007-01-24 富士胶片株式会社 气体阻隔性薄膜、基材薄膜及有机电致发光元件
US20090200489A1 (en) * 2005-10-28 2009-08-13 Fei Company Hermetically sealed housing with electrical feed-in
JP2009295580A (ja) * 2008-05-20 2009-12-17 Nordson Corp 密封型処理チャンバと電極への内部バスによる電気接続とを備えた多電極プラズマ処理システム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI261625B (en) * 2002-03-21 2006-09-11 Microcosm Technology Co Ltd Successive type sputtering device
CN1899815A (zh) * 2005-07-11 2007-01-24 富士胶片株式会社 气体阻隔性薄膜、基材薄膜及有机电致发光元件
US20090200489A1 (en) * 2005-10-28 2009-08-13 Fei Company Hermetically sealed housing with electrical feed-in
JP2009295580A (ja) * 2008-05-20 2009-12-17 Nordson Corp 密封型処理チャンバと電極への内部バスによる電気接続とを備えた多電極プラズマ処理システム

Also Published As

Publication number Publication date
TW201226296A (en) 2012-07-01

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