TWI414474B - - Google Patents
Info
- Publication number
- TWI414474B TWI414474B TW99145284A TW99145284A TWI414474B TW I414474 B TWI414474 B TW I414474B TW 99145284 A TW99145284 A TW 99145284A TW 99145284 A TW99145284 A TW 99145284A TW I414474 B TWI414474 B TW I414474B
- Authority
- TW
- Taiwan
- Prior art keywords
- disposed
- roller
- material belt
- vacuum process
- vacuum
- Prior art date
Links
Landscapes
- Advancing Webs (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW099145284A TW201226296A (en) | 2010-12-22 | 2010-12-22 | Continuous feeder apparatus applied in vacuum process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW099145284A TW201226296A (en) | 2010-12-22 | 2010-12-22 | Continuous feeder apparatus applied in vacuum process |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201226296A TW201226296A (en) | 2012-07-01 |
TWI414474B true TWI414474B (ja) | 2013-11-11 |
Family
ID=46932733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW099145284A TW201226296A (en) | 2010-12-22 | 2010-12-22 | Continuous feeder apparatus applied in vacuum process |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201226296A (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI261625B (en) * | 2002-03-21 | 2006-09-11 | Microcosm Technology Co Ltd | Successive type sputtering device |
CN1899815A (zh) * | 2005-07-11 | 2007-01-24 | 富士胶片株式会社 | 气体阻隔性薄膜、基材薄膜及有机电致发光元件 |
US20090200489A1 (en) * | 2005-10-28 | 2009-08-13 | Fei Company | Hermetically sealed housing with electrical feed-in |
JP2009295580A (ja) * | 2008-05-20 | 2009-12-17 | Nordson Corp | 密封型処理チャンバと電極への内部バスによる電気接続とを備えた多電極プラズマ処理システム |
-
2010
- 2010-12-22 TW TW099145284A patent/TW201226296A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI261625B (en) * | 2002-03-21 | 2006-09-11 | Microcosm Technology Co Ltd | Successive type sputtering device |
CN1899815A (zh) * | 2005-07-11 | 2007-01-24 | 富士胶片株式会社 | 气体阻隔性薄膜、基材薄膜及有机电致发光元件 |
US20090200489A1 (en) * | 2005-10-28 | 2009-08-13 | Fei Company | Hermetically sealed housing with electrical feed-in |
JP2009295580A (ja) * | 2008-05-20 | 2009-12-17 | Nordson Corp | 密封型処理チャンバと電極への内部バスによる電気接続とを備えた多電極プラズマ処理システム |
Also Published As
Publication number | Publication date |
---|---|
TW201226296A (en) | 2012-07-01 |
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