TWI414474B - - Google Patents
Info
- Publication number
- TWI414474B TWI414474B TW99145284A TW99145284A TWI414474B TW I414474 B TWI414474 B TW I414474B TW 99145284 A TW99145284 A TW 99145284A TW 99145284 A TW99145284 A TW 99145284A TW I414474 B TWI414474 B TW I414474B
- Authority
- TW
- Taiwan
- Prior art keywords
- disposed
- roller
- material belt
- vacuum process
- vacuum
- Prior art date
Links
Landscapes
- Advancing Webs (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
A continuous feeder apparatus applied in a vacuum process, which is to be disposed separately with channels at two end of a main body to provide for penetrating and placing a material belt, and disposed in the interior of a roller set containing an upper roller and a lower roller to provide for clamping the transportation material belt. A sealing mechanism is disposed between the roller set and the channels of the main body. The sealing mechanism is disposed on the side wall above the channel of the main body with the upper sealing member capable of being elastically connected to the circular surface of the upper roller and disposed on the side wall beneath the channel with the lower sealing member capable of being elastically connected to the circular surface of the lower roller. Additionally, the left and right sides of the channel are separately disposed with the side sealing members so that the two side sealing members can respectively elastically urge against the end fringes of the upper and lower rollers and the side fringes of the upper and lower sealing members to form the vacuum auxiliary cavity chamber connecting to the extraction apparatus to be capable of being disposed at the input end and output end of the vacuum process equipment to carry out the continuous transportation of the material belt of the vacuum process; thus, the present invention not only can effectively ensure the block-up of gas to be advantageous to carry out the vacuum process processing of the material belt, but also can make the upper/lower sealing members keep proper urging pressure with the upper and lower rollers to reduce the abrasion to further achieve the practical benefits of enhancing the vacuum closeness and the service life.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW099145284A TW201226296A (en) | 2010-12-22 | 2010-12-22 | Continuous feeder apparatus applied in vacuum process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW099145284A TW201226296A (en) | 2010-12-22 | 2010-12-22 | Continuous feeder apparatus applied in vacuum process |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201226296A TW201226296A (en) | 2012-07-01 |
TWI414474B true TWI414474B (en) | 2013-11-11 |
Family
ID=46932733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW099145284A TW201226296A (en) | 2010-12-22 | 2010-12-22 | Continuous feeder apparatus applied in vacuum process |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201226296A (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI261625B (en) * | 2002-03-21 | 2006-09-11 | Microcosm Technology Co Ltd | Successive type sputtering device |
CN1899815A (en) * | 2005-07-11 | 2007-01-24 | 富士胶片株式会社 | Gas barrier film, substrate film, and organic electroluminescence device |
US20090200489A1 (en) * | 2005-10-28 | 2009-08-13 | Fei Company | Hermetically sealed housing with electrical feed-in |
JP2009295580A (en) * | 2008-05-20 | 2009-12-17 | Nordson Corp | Multiple-electrode plasma processing systems with sealed process chambers and interior-bussed electrical connections with the electrodes |
-
2010
- 2010-12-22 TW TW099145284A patent/TW201226296A/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI261625B (en) * | 2002-03-21 | 2006-09-11 | Microcosm Technology Co Ltd | Successive type sputtering device |
CN1899815A (en) * | 2005-07-11 | 2007-01-24 | 富士胶片株式会社 | Gas barrier film, substrate film, and organic electroluminescence device |
US20090200489A1 (en) * | 2005-10-28 | 2009-08-13 | Fei Company | Hermetically sealed housing with electrical feed-in |
JP2009295580A (en) * | 2008-05-20 | 2009-12-17 | Nordson Corp | Multiple-electrode plasma processing systems with sealed process chambers and interior-bussed electrical connections with the electrodes |
Also Published As
Publication number | Publication date |
---|---|
TW201226296A (en) | 2012-07-01 |
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