TWI414474B - - Google Patents

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Publication number
TWI414474B
TWI414474B TW99145284A TW99145284A TWI414474B TW I414474 B TWI414474 B TW I414474B TW 99145284 A TW99145284 A TW 99145284A TW 99145284 A TW99145284 A TW 99145284A TW I414474 B TWI414474 B TW I414474B
Authority
TW
Taiwan
Prior art keywords
disposed
roller
material belt
vacuum process
vacuum
Prior art date
Application number
TW99145284A
Other languages
Chinese (zh)
Other versions
TW201226296A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW099145284A priority Critical patent/TW201226296A/en
Publication of TW201226296A publication Critical patent/TW201226296A/en
Application granted granted Critical
Publication of TWI414474B publication Critical patent/TWI414474B/zh

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  • Advancing Webs (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

A continuous feeder apparatus applied in a vacuum process, which is to be disposed separately with channels at two end of a main body to provide for penetrating and placing a material belt, and disposed in the interior of a roller set containing an upper roller and a lower roller to provide for clamping the transportation material belt. A sealing mechanism is disposed between the roller set and the channels of the main body. The sealing mechanism is disposed on the side wall above the channel of the main body with the upper sealing member capable of being elastically connected to the circular surface of the upper roller and disposed on the side wall beneath the channel with the lower sealing member capable of being elastically connected to the circular surface of the lower roller. Additionally, the left and right sides of the channel are separately disposed with the side sealing members so that the two side sealing members can respectively elastically urge against the end fringes of the upper and lower rollers and the side fringes of the upper and lower sealing members to form the vacuum auxiliary cavity chamber connecting to the extraction apparatus to be capable of being disposed at the input end and output end of the vacuum process equipment to carry out the continuous transportation of the material belt of the vacuum process; thus, the present invention not only can effectively ensure the block-up of gas to be advantageous to carry out the vacuum process processing of the material belt, but also can make the upper/lower sealing members keep proper urging pressure with the upper and lower rollers to reduce the abrasion to further achieve the practical benefits of enhancing the vacuum closeness and the service life.
TW099145284A 2010-12-22 2010-12-22 Continuous feeder apparatus applied in vacuum process TW201226296A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW099145284A TW201226296A (en) 2010-12-22 2010-12-22 Continuous feeder apparatus applied in vacuum process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW099145284A TW201226296A (en) 2010-12-22 2010-12-22 Continuous feeder apparatus applied in vacuum process

Publications (2)

Publication Number Publication Date
TW201226296A TW201226296A (en) 2012-07-01
TWI414474B true TWI414474B (en) 2013-11-11

Family

ID=46932733

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099145284A TW201226296A (en) 2010-12-22 2010-12-22 Continuous feeder apparatus applied in vacuum process

Country Status (1)

Country Link
TW (1) TW201226296A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI261625B (en) * 2002-03-21 2006-09-11 Microcosm Technology Co Ltd Successive type sputtering device
CN1899815A (en) * 2005-07-11 2007-01-24 富士胶片株式会社 Gas barrier film, substrate film, and organic electroluminescence device
US20090200489A1 (en) * 2005-10-28 2009-08-13 Fei Company Hermetically sealed housing with electrical feed-in
JP2009295580A (en) * 2008-05-20 2009-12-17 Nordson Corp Multiple-electrode plasma processing systems with sealed process chambers and interior-bussed electrical connections with the electrodes

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI261625B (en) * 2002-03-21 2006-09-11 Microcosm Technology Co Ltd Successive type sputtering device
CN1899815A (en) * 2005-07-11 2007-01-24 富士胶片株式会社 Gas barrier film, substrate film, and organic electroluminescence device
US20090200489A1 (en) * 2005-10-28 2009-08-13 Fei Company Hermetically sealed housing with electrical feed-in
JP2009295580A (en) * 2008-05-20 2009-12-17 Nordson Corp Multiple-electrode plasma processing systems with sealed process chambers and interior-bussed electrical connections with the electrodes

Also Published As

Publication number Publication date
TW201226296A (en) 2012-07-01

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