TWI414214B - Fast disassembly plasma generating apparatus and assembly method thereof - Google Patents

Abstract

A fast disassembly plasma-generating apparatus and assembly method thereof are provided. The plasma-generating apparatus includes a flame, a high voltage provider and a plasma-generating main body. The flame has a first end and a second end opposite the first end. The high voltage provider is disposed within the flame, and has an outer sleeve and a first connector. The first connector is disposed within the outer sleeve and located at the first end. The plasma-generating main body has an inner sleeve and a second connector both protruded from an outer surface of the plasma-generating main body, and the second connector is disposed within the inner sleeve. As the plasma-generating main body is attached to the first end, the outer sleeve receives the inner sleeve and the first connector combines with the second connector, so as to electrically connect the plasma-generating main body to the high voltage provider.

Description

Quick release atmospheric plasma generating device and assembling method thereof

The present invention relates to an atmospheric plasma generating apparatus, and more particularly to a quick-release atmospheric plasma generating apparatus and an assembling method thereof.

In general, atmospheric plasma systems have an absolute cost advantage over conventional vacuum plasma technology because atmospheric plasma is produced at atmospheric pressure or near atmospheric pressure. In addition, it does not require the use of expensive and bulky vacuum equipment in terms of equipment cost. Furthermore, in terms of process, the workpiece can be free from the limitations of the vacuum chamber and can be subjected to a continuous process, and these technical features can effectively reduce the manufacturing cost of the product. The system can also be constructed as a small and portable device, depending on the requirements. This feature will expand its application level.

The generation of atmospheric plasma is mainly to drive an electric field between the two electrodes in a normal pressure environment. When the gas between the electric fields is disintegrated due to collapse, plasma can be generated. Depending on the form of the plasma, there are also a variety of plasma source designs and types, such as: Corona, Dielectric barrier discharge, Plasma jet, and Plasma torch (Plasma). Torch), etc., wherein the jet plasma has the advantages of energy concentration, fast processing speed, and the like, and thus is widely used in the process.

However, under the demand of large area, it is necessary to meet the rapid demand for the surface treatment of the workpiece by using atmospheric plasma. Usually, multiple sets of plasma generators are needed to meet the demand. Indeed, in order to reduce production costs, the current means of commercialization are often Seeing is aimed at a large-area approach. For example, the production line of the FPD panel factory has been planned for the 8.5-generation line (2200mmx2500mm), and other plastic products are mostly planned for continuous large-area production. The application of atmospheric plasma surface treatment or cleaning technology is becoming more and more widespread, and multi-plasma arrays are an effective solution strategy.

In the practical application of commercial production lines, repairs are an inevitable procedure in case one or more of the plasma generators fail. At present, there are two ways to repair the equipment. One is to disassemble the plasma generator and replace the damaged components. The other way is to update the plasma generator (including the power cord and the plasma head). In the case of the repair of the plasma generator, if the professional mechanical engineer is successful, it still takes several working hours to view and repair, and the whole group of the system is also the same. Therefore, how to recover the equipment in the shortest time is the production efficiency and production cost. In order to cope with the practical application of commercialization and reduce the cost of maintenance time, it is a common goal to quickly and effectively remove and update faulty equipment.

The invention relates to a quick release atmospheric plasma generating device and an assembling method thereof, which utilizes the design of the inner and outer sheaths and joints to make assembly and disassembly of the atmospheric plasma generating device easier. In this way, the removal and repair of faulty equipment can be quickly performed, which is in line with the requirements of the application on the manufacturer's process.

The invention provides a quick release atmospheric plasma generating device, which comprises a fixed base, a high voltage power supply component and a plasma generating body. The fixed base has opposite first and second ends. High-voltage power supply components are set in solid The fixed base has a high pressure outer sheath and a first joint, wherein the first joint is disposed in the high pressure outer sheath, and the first joint is located at the first end. The plasma generating body has an inner sheath and a second joint, wherein the inner sheath and the second joint are both protruded on the outer surface of the plasma generating body, and the second joint is disposed in the inner sheath. When the plasma generating body is installed at the first end of the fixed base, the high pressure outer sheath covers the inner sheath, and the second joint is connected with the first joint, thereby causing the plasma to generate the body and the high pressure. The power components are electrically connected.

The invention provides a method for assembling an atmospheric plasma generating device, the method comprising: inserting a first joint of a high voltage power supply component into a high voltage outer sheath of one of the high voltage power supply components; and then setting the high voltage power supply component to the first Fixing the base; then, providing a plasma generating body, wherein an inner sheath of the plasma generating body and a second joint are protruded on an outer surface of the plasma generating body, and the second joint is disposed at In the inner sheath; then, the plasma generating body is mounted on the fixed base, and the inner sheath is embedded in the high pressure outer sheath, and the second joint is connected with the first joint, thereby generating plasma The body is electrically connected to the high voltage power supply component.

In order to make the above-mentioned contents of the present invention more comprehensible, the preferred embodiments are described below, and the detailed description is as follows:

Please refer to FIG. 1 , which is an exploded view of a quick release atmospheric plasma generating device in accordance with a preferred embodiment of the present invention. The quick release atmospheric plasma generating device 100 comprises a fixed base 110, a high voltage power supply component 120 and an electric The slurry produces a body 130. The fixed base 110 has a first end 112 and a second end 114. The fixed base 110 further has an receiving space 110A extending from the first end 112 to the second end 114. The high voltage power supply component 120 is disposed in the fixed base 110 and has a high voltage outer sheath 122 and a first joint 124. The first joint 124 is configured to be disposed in the high voltage outer sheath 122, and the first joint 124 will be at the first end 112. The first joint 124 is, for example, a female connector, and has one end, for example, an insertion hole 124A for connecting with other components.

In addition, the high voltage power supply component 120 further has a high voltage power supply line 126 for connecting to one of the external power supply terminals (not shown). The high voltage power line 126 is preferably inserted into the fixed base 110 from the second end 114, and the high voltage power line 126 is connected to the other end of the first joint 124. The high voltage power cord 126 and the first joint 124 are coupled, for example, by a knot 128 (such as a screw or rivet).

Preferably, the high-pressure outer sheath 122 has a first-stage sheath 122A and a second-stage sheath 122B, wherein the first-stage sheath 122A is used to cover the high-voltage power line 126, and the first joint 124 is It is disposed in the second section of the sheath 122B. The inner diameter of the first length of sheath 122A and the second length of sheath 122B is determined by the outer diameter of the high voltage power line 126 and the first joint 124. As shown in FIG. 1, the high voltage power line 126 and the first joint 124 have approximately the same outer diameter. Preferably, the inner diameter of the second length of the sheath 122B is greater than the inner diameter of the first length of the sheath 122A, so that after the first joint 124 is assembled to the high pressure outer sheath 122, the first joint 124 and the second length of the sheath 122B A first interval 129 is created (see Figure 3B). In addition, the high pressure outer sheath 122 At the junction of the corresponding high voltage power line 126 and the first joint 124, for example, there is a third length of sheath 122C whose inner diameter can also be designed according to the size of the joint of the first joint 124.

One end of the plasma generating body 130 has an inner sheath 132 and a second joint 134, wherein the inner sheath 132 and the second joint 134 are protruded from the outer surface 130A of the plasma generating body 130, and the second joint The 134 is disposed in the inner sheath 132 and has a second space 136 between the inner sheath 132 and the inner space 132. The second space 136 is preferably about the thickness of the side wall around the insertion hole 124A of the first joint 124. . The second joint 134 is for connection with the first joint 124, which is, for example, an electrode joint of the plasma generating body 130. An electrode connector is used to dissociate the gas to produce a plasma gas. The plasma generating body 130 additionally has a plasma outlet 138 which is located, for example, at the other end of the plasma generating body 130 for transferring the plasma gas to the surface of the workpiece to be processed (processed, cleaned, etc.).

When the plasma generating body 130 is mounted to the first end 112 of the fixed base 110, the high pressure outer sheath 122 covers the inner sheath 132, and the second joint 134 is connected to the first joint 124, whereby The plasma generating body 130 is electrically connected to the high voltage power source 130.

Preferably, the second joint 134 is, for example, a male joint having an enlarged portion 134A, and the outer diameter of the enlarged portion 134A is larger than the aperture of the insertion hole 124A of the first joint 124, so that the first joint 124 and the second joint 134 are It can be close to each other. The material of the first joint 124 and the second joint 134 may be a metal, such as a common copper or a high temperature resistant metal or alloy such as stainless steel or tungsten. In addition, the materials of the high-pressure outer sheath 122 and the inner sheath 132 are absolutely The edge material allows the high voltage outer sheath 122 to isolate the high voltage power line 126, the first connector 124, and the second connector 134 from the fixed base 110, thereby avoiding unnecessary electrical interference caused by electrical contact between the components. And in order to make the assembly more elastic, the material of the high-pressure outer sheath 122 and the inner sheath 132 may be a soft material. The arrangement of the high pressure outer jacket 122 and the inner jacket 132 also facilitates the assembly of the components, as will be further explained hereinafter. The following drawings detail the assembly method of the quick release atmospheric plasma generating apparatus of this embodiment.

Please refer to FIG. 2, which is a flow chart of a method for assembling an atmospheric plasma generating device according to a preferred embodiment of the present invention. The assembling method includes steps S21 to S24. Please refer to Figures 3A to 3D, which are schematic diagrams of component assembly corresponding to the assembly process of Figure 2.

First, as shown in step S21, the first terminal 124 of the high voltage power supply component 120 is routed into the high voltage outer jacket 122 of the high voltage power supply component 120. Wherein, as shown in FIG. 3A, the opening of the second-stage sheath 122B is large, and the high-voltage power line 126 can penetrate into the high-voltage outer sheath 122 from the opening of the second-stage sheath 122B, but the present invention does not Limited to this. Since the material of the high-pressure outer sheath 122 is soft, the first joint 124 can be directly inserted into the high-pressure outer sheath 122 from the opening of the first-stage sheath 122A during assembly.

As shown in FIG. 3B, after the components of the high voltage power supply component 120 are assembled, the first length of the sheath 122A of the high voltage outer sheath 122 is covered with the high voltage power supply line 126. The second section of the sheath 122B surrounds the first joint 124 to create a first space 129 between the first joint 124 and the second section of the sheath 122B. The first gap 129 and the first joint 124 are inserted into the hole. The 124A line is on the same side. In addition, the first connector 124 and the high voltage power line 126 The joint is received in the third section of the sheath 122C.

Next, as shown in step S22, the high voltage power supply element 120 is placed into the fixed base 110. As shown in FIG. 1, the high voltage power supply unit 120 is placed in the accommodating space 110A from the second end 114 of the fixed base 110, for example, and is completed as shown in FIG. 3C.

Then, as shown in step S23, a plasma generating body 130 is provided, wherein the inner sheath 132 and the second joint 134 of the plasma generating body 130 are protruded from the outer surface 130A of the plasma generating body 130, and A second joint 134 is disposed in the inner jacket 132. There is a second spacing 136 between the second joint 134 and the inner sheath 132.

Next, as shown in step S24, the plasma generating body 130 is mounted on the fixed base 110, and the inner sheath 132 is embedded in the high pressure outer sheath 122, and the second joint 134 is connected to the first joint 124. Thereby, the plasma generating body 130 is electrically connected to the high voltage power source element 120.

In this step, when assembled, as shown in FIG. 3C, the inner sheath 132 is first aligned with the first space 129, and the second joint 134 is aligned with the insertion hole 124A of the first joint 124. Thereafter, the inner sheath 132 and the second joint 134 are respectively embedded in the first space 129 and the insertion hole 124A, so that the assembly of the plasma generating body 130 can be easily completed, as shown in FIG. 3D. Also, since the second joint 134 has the enlarged portion 134A to enlarge the outer diameter of the second joint 134, the joints are coupled in a tight fit manner, so that the joint between the first joint 124 and the second joint 134 is more secure. .

When applying atmospheric plasma to the surface treatment or cleaning process, if the atmospheric plasma is used for the surface treatment of the workpiece under the demand of large area, A plurality of sets of atmospheric plasma generating devices are usually installed to meet the requirements of rapid processing. Among them, the plasma system composed of multiple plasma head arrays is an effective solution strategy. Therefore, the plasma generating body 130 of the present embodiment can be further attached to other bases (not shown) by using other connecting members 139 together with the fixing base 110 to be assembled with other plasma generating bodies for further assembly. Into the array of multiple plasma heads, in this way, the overall plasma surface treatment area can be increased to achieve large-area and fast processing purposes.

The combination of the plasma generating body 130 and the high voltage power supply component 120 of the present embodiment only needs to pass through the first joint 124, the second joint 134, the inner sheath 132 and the high pressure outer sheath 122, so that the assembly method is very easy, even The way of disassembly is also relatively simple. For example, when the electrode joint (second joint 134) of the plasma generating body 130 needs to be replaced, only the inner sheath 132 and the second joint 134 need to be inserted from the high pressure outer sheath 122 and the first joint 124. The 124A is removed, and as shown in Fig. 3C, the second joint 134 can be easily replaced.

In addition, please refer to Fig. 4, which is a schematic view of the high voltage power supply element of Fig. 3D taken out. If the components of the high voltage power supply component 120, such as the high voltage power supply line 126, the high voltage outer sheath 122, or the first connector 124 need to be replaced, only the high voltage power supply component 120 needs to be moved away from the plasma generating body 130. The high pressure outer sheath 122 and the first joint 124 are separated from the inner sheath 132 and the second joint 134, and are removed from the fixed base 110 to replace the components.

The quick release atmospheric plasma generating device and the assembling method thereof disclosed in the above embodiments of the present invention utilize a high pressure outer sheath, an inner sheath and a first The combination of the second joints makes assembly and disassembly of the atmospheric plasma generating device very simple, not only reduces the cost of the maintenance schedule, but also removes and updates the faulty device quickly, efficiently and instantly. In the actual application on the production line, if one or more of the plasma generating devices fail, it is no longer necessary to disassemble the plasma generating device and replace the damaged components as in the past, and do not need to use the plasma generating device. In the whole group update, the atmospheric plasma generating device of the embodiment only needs to separate the joint from the sheath, and the component can be replaced. Therefore, the quick release atmospheric plasma generating device and the assembling method thereof disclosed in the above embodiments of the present invention can restore the device in the shortest time, so that the production efficiency and the production cost are improved, and it is indeed possible to respond to the practical application of commercialization.

In conclusion, the present invention has been disclosed in the above preferred embodiments, and is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100‧‧‧Quick-disassembled atmospheric plasma generator

110‧‧‧Fixed base

110A‧‧‧ accommodating space

112‧‧‧ first end

114‧‧‧second end

120‧‧‧High voltage power supply components

122‧‧‧High pressure outer sheath

122A‧‧‧First stage sheath

122B‧‧‧Second section sheath

122C‧‧‧3rd sheath

124‧‧‧First joint

124A‧‧‧Interposed holes

126‧‧‧High voltage power cord

128, 139‧‧‧

129‧‧‧First interval

130‧‧‧ Plasma generation ontology

130A‧‧‧ outer surface

132‧‧‧ inner sheath

134‧‧‧second joint

134A‧‧‧Expanded

136‧‧‧second interval

138‧‧‧Electric plasma export

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is an exploded view of a quick-release atmospheric plasma generating apparatus in accordance with a preferred embodiment of the present invention.

2 is a flow chart showing a method of assembling an atmospheric plasma generating apparatus in accordance with a preferred embodiment of the present invention.

Figures 3A through 3D are schematic views of the assembly of components corresponding to the assembly process of Figure 2.

Fig. 4 is a schematic view showing the high voltage power supply element of Fig. 3D taken out.

110‧‧‧Fixed base

122‧‧‧High pressure outer sheath

124‧‧‧First joint

126‧‧‧High voltage power cord

130‧‧‧ Plasma generation ontology

132‧‧‧ inner sheath

134‧‧‧second joint

134A‧‧‧Expanded

139‧‧‧Connected

Claims (14)

A quick release atmospheric plasma generating device comprises: a fixed base having a first end and a second end; a high voltage power component disposed in the fixed base and having a high voltage outer sheath and a a first joint, wherein the first joint has an insertion hole, the first joint is disposed in the high pressure outer sheath, and the first joint is located at the first end; and a plasma generating body has An inner sheath and a second joint, wherein the second joint has an enlarged portion, the expanded portion has an outer diameter larger than an aperture of the insertion hole, and the inner sheath and the second joint are protruded from the The plasma is formed on an outer surface of the body, and the second joint is disposed in the inner sheath; wherein the plasma is generated by the system at the first end of the fixed base, and the high pressure outer sheath The inner sheath is wrapped, and the second joint is connected to the first joint, thereby electrically connecting the plasma generating body to the high voltage power source. The atmospheric plasma generating device of claim 1, wherein the first joint and the high pressure outer sheath have a first space, and the inner sheath is disposed in the first space. The atmospheric plasma generating device of claim 2, wherein the second joint is embedded in the insertion hole. The atmospheric plasma generating device of claim 3, wherein the second joint and the inner sheath have a second interval, and the second interval is about the size of the first joint. Hole around the side wall The thickness. The atmospheric plasma generating device of claim 1, wherein the high voltage power supply component further has a high voltage power cord inserted from the second end into the fixed base, and the first connector is connected to the High voltage power cord. The atmospheric plasma generating device of claim 5, wherein the high voltage outer sheath covers the high voltage power line. The atmospheric plasma generating device of claim 6, wherein the high-pressure outer sheath has a first-stage sheath and a second-stage sheath, the first-stage sheath covering the high-pressure A power cord, the first joint being disposed in the second length of the sheath. The atmospheric plasma generating device of claim 7, wherein the inner diameter of the second length of the sheath is not equal to the inner diameter of the first length of the sheath. The atmospheric plasma generating apparatus of claim 1, wherein the second joint is an electrode joint of the plasma generating body. The atmospheric plasma generating apparatus according to claim 1, wherein the material of the high-pressure outer sheath and the inner sheath is an insulating material. The atmospheric plasma generating device according to claim 1, wherein the material of the high-pressure outer sheath and the inner sheath is a soft material. The atmospheric plasma generating apparatus according to claim 1, wherein the material of the first joint and the second joint is metal. An assembly method of an atmospheric plasma generating device, comprising: passing a first joint of a high voltage power supply component to the high voltage power supply a high voltage outer sheath of the component, wherein the first joint has an insertion hole; the high voltage power supply component is disposed in a fixed base; and a plasma generating body is provided, wherein the plasma is generated in one of the bodies a sheath and a second joint are protruded on an outer surface of the plasma generating body, wherein an outer diameter of one of the enlarged portions of the second joint is larger than an aperture of the insertion hole, and the second joint is disposed at And the inner plasma sheathing body is mounted on the fixed base, and the inner sheath is embedded in the high voltage outer sheath, and the second joint is connected to the first joint, so that The plasma generating body is electrically connected to the high voltage power supply component. The assembly method of claim 13, wherein the step of inserting the inner sheath into the high-pressure outer sheath and connecting the second joint to the first joint comprises: causing the inner sheath The utility model is disposed in a space between the first joint and the high-pressure outer sheath, and at the same time, the second joint is embedded in the insertion hole of the first joint.