TWI411730B - - Google Patents

Info

Publication number
TWI411730B
TWI411730B TW99141701A TW99141701A TWI411730B TW I411730 B TWI411730 B TW I411730B TW 99141701 A TW99141701 A TW 99141701A TW 99141701 A TW99141701 A TW 99141701A TW I411730 B TWI411730 B TW I411730B
Authority
TW
Taiwan
Prior art keywords
loop
air
gas
air supply
bearing unit
Prior art date
Application number
TW99141701A
Other languages
English (en)
Chinese (zh)
Other versions
TW201224310A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW099141701A priority Critical patent/TW201224310A/zh
Publication of TW201224310A publication Critical patent/TW201224310A/zh
Application granted granted Critical
Publication of TWI411730B publication Critical patent/TWI411730B/zh

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Rolling Contact Bearings (AREA)
TW099141701A 2010-12-01 2010-12-01 Gas bearing device TW201224310A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW099141701A TW201224310A (en) 2010-12-01 2010-12-01 Gas bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW099141701A TW201224310A (en) 2010-12-01 2010-12-01 Gas bearing device

Publications (2)

Publication Number Publication Date
TW201224310A TW201224310A (en) 2012-06-16
TWI411730B true TWI411730B (enExample) 2013-10-11

Family

ID=46725818

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099141701A TW201224310A (en) 2010-12-01 2010-12-01 Gas bearing device

Country Status (1)

Country Link
TW (1) TW201224310A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102817915A (zh) * 2012-09-03 2012-12-12 中国工程物理研究院总体工程研究所 大型精密转台气浮组件
CN104358979B (zh) * 2014-10-29 2016-08-31 中国科学院苏州生物医学工程技术研究所 一种分体式超精密空气静压单轴转台
CN110355996B (zh) * 2018-04-10 2021-11-16 东台精机股份有限公司 用于积层制造的激光装置及其操作方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474483A (en) * 1982-03-29 1984-10-02 Toyoda Koki Kabushiki Kaisha Hydrostatic bearing apparatus with a cooling function
TW432172B (en) * 1997-06-18 2001-05-01 Gerhard Wanger Gas bearing arrangement for a rapidly rotating shaft
CN200991756Y (zh) * 2006-12-18 2007-12-19 广州市大族高精电机有限公司 主轴装置
JP2008038850A (ja) * 2006-08-09 2008-02-21 Yanmar Co Ltd 燃料噴射ポンプのアキュムレータ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474483A (en) * 1982-03-29 1984-10-02 Toyoda Koki Kabushiki Kaisha Hydrostatic bearing apparatus with a cooling function
TW432172B (en) * 1997-06-18 2001-05-01 Gerhard Wanger Gas bearing arrangement for a rapidly rotating shaft
JP2008038850A (ja) * 2006-08-09 2008-02-21 Yanmar Co Ltd 燃料噴射ポンプのアキュムレータ
CN200991756Y (zh) * 2006-12-18 2007-12-19 广州市大族高精电机有限公司 主轴装置

Also Published As

Publication number Publication date
TW201224310A (en) 2012-06-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees