TWI410529B - Electrolyte and copper foil fabrication method utilizing the same - Google Patents

Electrolyte and copper foil fabrication method utilizing the same Download PDF

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TWI410529B
TWI410529B TW97148887A TW97148887A TWI410529B TW I410529 B TWI410529 B TW I410529B TW 97148887 A TW97148887 A TW 97148887A TW 97148887 A TW97148887 A TW 97148887A TW I410529 B TWI410529 B TW I410529B
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copper foil
electrolyte
cathode
foil
compound
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TW201024475A (en
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Yu Chung Chen
Hung Kun Lee
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Ind Tech Res Inst
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Abstract

An electrolyte is provided. The electrolyte includes sulfuric acid, copper sulfate, a sulfur-containing compound, a polyether compound and a quinone compound having formula (I): wherein A is oxygen, sulfur or nitrogen bonded with a hydrogen, B is nitrogen or carbon bonded with a hydrogen, and R1-R9, independently, are hydrogen, C1-6 alkyl, amine or alkyl-substituted amine. The invention also provides a copper foil fabrication method utilizing the electrolyte.

Description

電解液及利用此電解液製造銅箔之方法Electrolyte and method for producing copper foil using the same

本發明係有關於一種電解液,特別是有關於一種含醌類化合物之電解液及利用此電解液製造銅箔之方法。The present invention relates to an electrolyte, and more particularly to an electrolyte containing a quinone compound and a method of producing a copper foil using the electrolyte.

銅箔(copper foil)為電子產業的基礎原料,以電解法製造的銅箔生箔對其施予對應的後續處理後,可應用於例如鋰電池陰極集電板、積體電路(IC)載板、印刷電路板(PCB)或電漿顯示器(PDP)電磁波遮蔽。隨著電子產品功能的演進,產業界對銅箔產品性能的需求亦不斷提升,舉例來說,銅箔是印刷電路板上導電線路的構成材料,係元件間訊號傳輸的主要路徑,當電子產品走向高頻化、可攜化及薄型化的趨勢時,則需要可細線化、低表面粗糙度、高強度、高延展性且更薄的高性能電解銅箔,方能滿足實際應用上的需求。The copper foil is a basic raw material for the electronics industry, and the copper foil raw foil produced by the electrolytic method is subjected to subsequent subsequent treatment, and can be applied to, for example, a lithium battery cathode current collector plate and an integrated circuit (IC). Board, printed circuit board (PCB) or plasma display (PDP) electromagnetic shielding. With the evolution of the functions of electronic products, the industry's demand for the performance of copper foil products is also increasing. For example, copper foil is the constituent material of the conductive lines on the printed circuit board, and is the main path for signal transmission between components. In the trend of high frequency, portability and thinning, high-performance electrolytic copper foil with fine line, low surface roughness, high strength, high ductility and thinner is required to meet the needs of practical applications. .

目前,銅箔相關業者對於銅箔粗糙度的分類概以Rz值(十點平均粗糙度值,ISO 1994)大小為判定依據。粗糙度Rz值在5μm以上者屬STD(standard)級,粗糙度Rz值在3~5μm之間者屬VLP(very low profile)級,至於粗糙度Rz值小於3μm者則歸類為ULP(ultra low profile)級,其中ULP等級的銅箔因最能契合電子產品細線化的發展趨勢,故已成為眾銅箔業者一致積極追求的目標。At present, the copper foil related industry's classification of copper foil roughness is based on the Rz value (ten point average roughness value, ISO 1994). Roughness Rz value above 5μm is STD (standard) grade, roughness Rz value is between 3~5μm is VLP (very low profile) grade, and roughness Rz value less than 3μm is classified as ULP (ultra) Low profile), in which the ULP grade copper foil is the most suitable for the thinning trend of electronic products, it has become the consistent pursuit of the copper foil industry.

為降低電解銅箔表面的粗糙度,業界目前習用的方法 係於酸性硫酸銅溶液中加入添加劑,並藉由調整添加劑的種類及濃度以降低銅箔表面粗糙度。例如特開平2002-129373、US 5,858,029及US 5,431,803即是藉由降低鍍液中氯離子濃度至低於1ppm以下,以便經由抑制銅箔柱狀晶組織的產生而達成降低銅箔表面粗糙度的目的。然而,因受限於氯離子極易殘存於銅鍍液的各項原料來源及製程環境中,欲維持氯離子濃度低於1ppm並不容易,導致製程的穩定性不佳。另,降低鍍液中的氯離子濃度,亦將因減少其伴生的去極化作用,而使銅電鍍電壓增大,導致能源消耗增大的副作用。因此,目前電解銅箔業者大多仍採用高氯製程(即氯離子濃度30ppm以上)。In order to reduce the roughness of the surface of electrolytic copper foil, the current method in the industry The additive is added to the acidic copper sulfate solution, and the surface roughness of the copper foil is reduced by adjusting the type and concentration of the additive. For example, the purpose of reducing the surface roughness of the copper foil by suppressing the generation of the columnar crystal structure of the copper foil is to reduce the chloride ion concentration in the plating solution to less than 1 ppm or less, for example, to reduce the chloride ion concentration in the plating solution to less than 1 ppm. . However, it is not easy to maintain the chloride ion concentration below 1 ppm due to the limitation of chloride ions which are easily stored in the raw materials and process environment of the copper plating solution, resulting in poor process stability. In addition, reducing the concentration of chloride ions in the plating solution will also increase the copper plating voltage by reducing the associated depolarization effect, resulting in an increase in energy consumption. Therefore, most of the current electrolytic copper foil manufacturers still use a high chlorine process (ie, a chloride ion concentration of 30 ppm or more).

此外,對於抑制電極表面尖端放電的現象,亦有經由添加特定吸附型添加劑,以減緩電極表面凸部電鍍速率而達成降低銅箔表面粗糙度的方法。例如特開平10-036991揭露的羧甲基纖維素(carboxymethylcellulose),特開平10-036991及US 5,215,654揭露的硫尿,以及特開平08-058791揭露的混合明膠、硫尿及多醣體等添加劑即屬此一類型。此類方法雖可降低粗糙度,但其降低效果有限,對於厚度10μm的銅箔而言,其粗糙度Rz值約僅能降低至3μm左右,且容易引發銅箔脆化。Further, in order to suppress the phenomenon of discharge at the tip end of the electrode surface, there is also a method of reducing the surface roughness of the copper foil by adding a specific adsorption type additive to slow the plating rate of the convex portion of the electrode surface. For example, carboxymethylcellulose disclosed in Japanese Laid-Open Patent Publication No. Hei 10-036991, the sulphur urethane disclosed in Japanese Patent Application Laid-Open No. Hei 10-036991, and No. 5,215,654, and the mixed gelatin, thiourea and polysaccharides disclosed in JP-A 08-058791 are genus This type. Although such a method can reduce the roughness, the effect of the reduction is limited. For a copper foil having a thickness of 10 μm, the roughness Rz value can be reduced only to about 3 μm, and the copper foil is easily caused to be embrittled.

此外,經發現銅箔表面的光澤程度愈高,對應的表面粗糙度便會下降,因此,例如US 3,328,237、US 4,336,114及特開平09-143785的光澤銅電鍍技術,亦應是一種有效降低銅箔表面粗糙度的方法。此一對策方案雖有良好抑制 粗糙度的效果,但習知光澤銅電鍍技術需以低溫及低電流密度進行方能獲得粗糙度較低的銅箔,相較於目前電解銅箔業者常用的高溫及高電流密度作業條件是有所違背的,並無法滿足業界需求,仍待進一步改善。In addition, it has been found that the higher the gloss of the surface of the copper foil, the corresponding surface roughness is reduced. Therefore, the gloss copper plating technique of, for example, US Pat. No. 3,328,237, US Pat. No. 4,336,114 and Japanese Patent Application No. 09-143785, is also an effective reduction of copper foil. Method of surface roughness. Although this countermeasure scheme has good suppression The effect of roughness, but the conventional gloss copper plating technology needs to be low temperature and low current density to obtain copper foil with lower roughness, compared with the high temperature and high current density operating conditions commonly used by electrolytic copper foil manufacturers. The violations are not able to meet the needs of the industry and still need further improvement.

因此,目前業界亟需開發一種能達到ULP等級銅箔,又能適用於現今電解銅箔業者作業條件的製程技術。Therefore, there is an urgent need in the industry to develop a process technology that can achieve ULP grade copper foil and can be applied to the operating conditions of today's electrolytic copper foil industry.

本發明之一實施例,提供一種電解液,包括:硫酸;硫酸銅;一含硫化合物;一聚醚化合物;以及一醌類化合物,具有下列化學式(I): An embodiment of the present invention provides an electrolyte comprising: sulfuric acid; copper sulfate; a sulfur-containing compound; a polyether compound; and a terpenoid compound having the following chemical formula (I):

其中A是由氧、硫或具有一氫原子配位基結構的N所構成;B是由氮或含有一氫原子配位基的碳所構成;以及R1~R9獨立地為氫、碳數1~6之烷基、胺基或具有烷基替代基之胺基。本發明另提供一種利用此電解液製造銅箔之方法。Wherein A is composed of oxygen, sulfur or N having a hydrogen atom ligand structure; B is composed of nitrogen or a carbon having a hydrogen atom ligand; and R1 to R9 are independently hydrogen and have a carbon number of 1 An alkyl group of ~6, an amine group or an amine group having an alkyl substituent. The present invention further provides a method of producing a copper foil using the electrolyte.

本發明之一實施例,提供一種銅箔之製造方法,包括:提供一陰極與一陽極;提供一上述之電解液;以及施加一電流於該陰極與該陽極,以進行一銅箔製程。An embodiment of the present invention provides a method of manufacturing a copper foil, comprising: providing a cathode and an anode; providing an electrolyte solution; and applying a current to the cathode and the anode to perform a copper foil process.

為讓本發明之上述目的、特徵及優點能更明顯易懂,下文特舉一較佳實施例,並配合所附圖式,作詳細說明如下:The above described objects, features and advantages of the present invention will become more apparent and understood.

本發明之一實施例,提供一種電解液,包括硫酸,硫酸銅,一含硫化合物,一聚醚化合物,以及一醌類化合物,具有下列化學式(I): An embodiment of the present invention provides an electrolyte comprising sulfuric acid, copper sulfate, a sulfur-containing compound, a polyether compound, and an anthraquinone compound having the following chemical formula (I):

在化學式(I)中,A是由氧、硫或具有一氫原子配位基結構的N所構成;B是由氮或含有一氫原子配位基的碳所構成;以及R1~R9獨立地為氫、碳數1~6之烷基、胺基或具有烷基替代基之胺基。本發明另提供一種利用此電解液製造銅箔之方法。In the chemical formula (I), A is composed of oxygen, sulfur or N having a hydrogen atom ligand structure; B is composed of nitrogen or a carbon having a hydrogen atom ligand; and R1 to R9 are independently It is hydrogen, an alkyl group having 1 to 6 carbon atoms, an amine group or an amine group having an alkyl substituent. The present invention further provides a method of producing a copper foil using the electrolyte.

上述含硫化合物可為聚二硫二丙烷磺酸鈉(bis(sodium sulfopropyl)disulfide,SPS)。聚醚化合物可為聚乙二醇或聚丙二醇。在化學式(I)中,A是由氧、硫或具有一氫原子配位基結構的N所構成;B是由氮或含有一氫原子配位基的碳所構成;以及R1~R9獨立地為氫、碳數1~6之烷基、胺 基或具有烷基替代基之胺基。上述醌類化合物可為 The above sulfur-containing compound may be sodium bis(sodium sulfopropyldisulfide, SPS). The polyether compound can be polyethylene glycol or polypropylene glycol. In the chemical formula (I), A is composed of oxygen, sulfur or N having a hydrogen atom ligand structure; B is composed of nitrogen or a carbon having a hydrogen atom ligand; and R1 to R9 are independently It is hydrogen, an alkyl group having 1 to 6 carbon atoms, an amine group or an amine group having an alkyl substituent. The above terpenoids can be

本發明電解液更包括添加有濃度介於30~100ppm的氯離子。The electrolyte of the present invention further comprises the addition of chloride ions having a concentration of between 30 and 100 ppm.

本發明之一實施例,提供一種銅箔的製造方法,包括下列步驟。首先,提供一陰極與一陽極。接著,提供一上述的電解液。之後,施加一電流於陰極與陽極,以進行一銅箔製程。One embodiment of the present invention provides a method of manufacturing a copper foil comprising the following steps. First, a cathode and an anode are provided. Next, an electrolyte solution as described above is provided. Thereafter, a current is applied to the cathode and the anode to perform a copper foil process.

上述銅箔製程的電流密度介於50~70Amp/dm2 ,溫度介於50~70℃。The copper foil process has a current density of 50 to 70 Amp/dm 2 and a temperature of 50 to 70 ° C.

請參閱第1圖,說明本發明之一實施例,一種製造電解銅箔的裝置及步驟。製造電解銅箔的裝置包括一陰極20、一陽極10以及一電解液30。陰極20為可旋轉的輪狀陰極,其材質可為鈦或不鏽鋼。陽極10與陰極20成同心圓狀,其材質可為鉛或不溶性陽極(dimension stable anode)。電解液30通入陰極20與陽極10之間,可包括硫酸銅及例如含硫化合物、聚醚化合物及醌類化合物等添加 劑。Referring to Figure 1, an embodiment of the present invention, an apparatus and a step for manufacturing an electrolytic copper foil are illustrated. The apparatus for producing an electrolytic copper foil includes a cathode 20, an anode 10, and an electrolyte 30. The cathode 20 is a rotatable wheel cathode and may be made of titanium or stainless steel. The anode 10 is concentric with the cathode 20 and may be made of lead or a dimensionally stable anode. The electrolyte 30 is passed between the cathode 20 and the anode 10 and may include copper sulfate and additions such as sulfur compounds, polyether compounds, and terpenoids. Agent.

本發明製造電解銅箔的步驟如下。首先,通入電流於陽極10與陰極20之間,使陰極20表面析出銅,以形成一銅箔生箔100。之後,藉由陰極20的旋轉,連續地形成銅箔生箔100並將其剝離取出。The steps of producing an electrolytic copper foil of the present invention are as follows. First, a current is passed between the anode 10 and the cathode 20 to deposit copper on the surface of the cathode 20 to form a copper foil green foil 100. Thereafter, the copper foil green foil 100 is continuously formed by the rotation of the cathode 20 and peeled off.

【實施例】[Examples] 【實施例1】[Example 1] 本發明電解銅箔製備(1)Preparation of electrolytic copper foil of the invention (1)

首先,通入一電解液於一陽極與一陰極之間。此電解液包含濃度60g/L的銅、60g/L的硫酸、36ppm的氯離子、400ppm的聚乙二醇(PEG)(Mw:4000)、2ppm的聚二硫二丙烷磺酸鈉(SPS)以及3ppm的pyronin Y。之後,調整電解液溫度為50℃,電流密度為60Amp/dm2 ,並以125cm/sec的電解液流速進行電解銅箔製程,以形成厚度大約10μm的銅箔生箔。First, an electrolyte is introduced between an anode and a cathode. The electrolyte contains copper at a concentration of 60 g/L, 60 g/L sulfuric acid, 36 ppm chloride ion, 400 ppm polyethylene glycol (PEG) (Mw: 4000), and 2 ppm sodium polydithiodipropane sulfonate (SPS). And 3ppm pyronin Y . Thereafter, the electrolytic solution temperature was adjusted to 50 ° C, the current density was 60 Amp/dm 2 , and the electrolytic copper foil process was carried out at an electrolyte flow rate of 125 cm/sec to form a copper foil green foil having a thickness of about 10 μm.

【實施例2】[Example 2] 本發明電解銅箔製備(2)Preparation of electrolytic copper foil of the invention (2)

首先,通入一電解液於一陽極與一陰極之間。此電解液包含濃度60g/L的銅、60g/L的硫酸、36ppm的氯離子、400ppm的聚乙二醇(PEG)(Mw:4000)、3ppm的聚二硫二丙烷磺酸鈉(SPS)以及3ppm的pyronin Y。之後,調整電解液溫度為50℃,電流密度為60Amp/dm2 ,並以125cm/sec的電解液流速進行電解銅箔製程,以形成厚 度大約10μm的銅箔生箔。First, an electrolyte is introduced between an anode and a cathode. This electrolyte contains copper at a concentration of 60 g/L, 60 g/L of sulfuric acid, 36 ppm of chloride ion, 400 ppm of polyethylene glycol (PEG) (Mw: 4000), and 3 ppm of sodium polydithiodipropane sulfonate (SPS). And 3ppm pyronin Y . Thereafter, the electrolytic solution temperature was adjusted to 50 ° C, the current density was 60 Amp/dm 2 , and the electrolytic copper foil process was carried out at an electrolyte flow rate of 125 cm/sec to form a copper foil green foil having a thickness of about 10 μm.

【實施例3】[Example 3] 本發明電解銅箔製備(3)Preparation of electrolytic copper foil of the invention (3)

首先,通入一電解液於一陽極與一陰極之間。此電解液包含濃度60g/L的銅、60g/L的硫酸、36ppm的氯離子、400ppm的聚乙二醇(PEG)(Mw:4000)、4ppm的聚二硫二丙烷磺酸鈉(SPS)以及3ppm的pyronin Y。之後,調整電解液溫度為50℃,電流密度為70Amp/dm2 ,並以125cm/sec的電解液流速進行電解銅箔製程,以形成厚度大約10μm的銅箔生箔。First, an electrolyte is introduced between an anode and a cathode. This electrolyte contains copper at a concentration of 60 g/L, 60 g/L sulfuric acid, 36 ppm chloride ion, 400 ppm polyethylene glycol (PEG) (Mw: 4000), and 4 ppm sodium polydithiodipropane sulfonate (SPS). And 3ppm pyronin Y . Thereafter, the electrolytic solution temperature was adjusted to 50 ° C, the current density was 70 Amp/dm 2 , and the electrolytic copper foil process was carried out at an electrolyte flow rate of 125 cm/sec to form a copper foil green foil having a thickness of about 10 μm.

【實施例4】[Embodiment 4] 本發明電解銅箔製備(4)Preparation of electrolytic copper foil of the invention (4)

首先,通入一電解液於一陽極與一陰極之間。此電解液包含濃度60g/L的銅、60g/L的硫酸、36ppm的氯離子、400ppm的聚乙二醇(PEG)(Mw:4000)、2ppm的聚二硫二丙烷磺酸鈉(SPS)以及10ppm的thionin。之後,調整電解液溫度為50℃,電流密度為50Amp/dm2 ,並以125cm/sec的電解液流速進行電解銅箔製程,以形成厚度大約10μm的銅箔生箔。First, an electrolyte is introduced between an anode and a cathode. The electrolyte contains copper at a concentration of 60 g/L, 60 g/L sulfuric acid, 36 ppm chloride ion, 400 ppm polyethylene glycol (PEG) (Mw: 4000), and 2 ppm sodium polydithiodipropane sulfonate (SPS). And 10ppm of thionin . Thereafter, the electrolytic solution temperature was adjusted to 50 ° C, the current density was 50 Amp/dm 2 , and the electrolytic copper foil process was carried out at an electrolyte flow rate of 125 cm/sec to form a copper foil green foil having a thickness of about 10 μm.

【比較實施例1】[Comparative Example 1] 習知電解銅箔製備(1)Conventional Electrolytic Copper Foil Preparation (1)

首先,通入一電解液於一陽極與一陰極之間。此電解液包含濃度60g/L的銅、60g/L的硫酸、36ppm的氯離子、 400ppm的聚乙二醇(PEG)(Mw:4000)、2ppm的聚二硫二丙烷磺酸鈉(SPS)以及3ppm的ethyl violet。之後,調整電解液溫度為50℃,電流密度為50Amp/dm2 ,並以125cm/sec的電解液流速進行電解銅箔製程,以形成厚度大約10μm的銅箔生箔。First, an electrolyte is introduced between an anode and a cathode. This electrolyte contains copper at a concentration of 60 g/L, 60 g/L sulfuric acid, 36 ppm chloride ion, 400 ppm polyethylene glycol (PEG) (Mw: 4000), and 2 ppm sodium polydithiodipropane sulfonate (SPS). And 3ppm of ethyl violet . Thereafter, the electrolytic solution temperature was adjusted to 50 ° C, the current density was 50 Amp/dm 2 , and the electrolytic copper foil process was carried out at an electrolyte flow rate of 125 cm/sec to form a copper foil green foil having a thickness of about 10 μm.

【比較實施例2】[Comparative Example 2] 習知電解銅箔製備(2)Conventional Electrolytic Copper Foil Preparation (2)

首先,通入一電解液於一陽極與一陰極之間。此電解液包含濃度60g/L的銅、60g/L的硫酸、36ppm的氯離子、400ppm的聚乙二醇(PEG)(Mw:4000)、2ppm的聚二硫二丙烷磺酸鈉(SPS)以及3ppm的methyl green。之後,調整電解液溫度為50℃,電流密度為50Amp/dm2 ,並以125cm/sec的電解液流速進行電解銅箔製程,以形成厚度大約10μm的銅箔生箔。First, an electrolyte is introduced between an anode and a cathode. The electrolyte contains copper at a concentration of 60 g/L, 60 g/L sulfuric acid, 36 ppm chloride ion, 400 ppm polyethylene glycol (PEG) (Mw: 4000), and 2 ppm sodium polydithiodipropane sulfonate (SPS). And 3ppm of methyl green . Thereafter, the electrolytic solution temperature was adjusted to 50 ° C, the current density was 50 Amp/dm 2 , and the electrolytic copper foil process was carried out at an electrolyte flow rate of 125 cm/sec to form a copper foil green foil having a thickness of about 10 μm.

表一為實施例1~4及比較實施例1~2製備電鍍銅箔的作業條件,包括溫度、電流密度、電解液組成及電解液流速。表二為實施例1~4及比較實施例1~2製備所得的銅箔生箔試樣其物性測試結果,包括抗拉強度、伸長率及銅箔於電解液側與陰極側之粗糙度值。Table 1 shows the working conditions for preparing the electroplated copper foils of Examples 1 to 4 and Comparative Examples 1 and 2, including temperature, current density, electrolyte composition, and electrolyte flow rate. Table 2 shows the physical property test results of the copper foil raw foil samples prepared in Examples 1 to 4 and Comparative Examples 1 and 2, including tensile strength, elongation, and roughness values of the copper foil on the electrolyte side and the cathode side. .

備註(請參閱第1圖):銅箔於電解液側之粗糙度Rz-MS值為銅箔生箔於電解液側101的十點平均粗糙度值;銅箔於陰極側之粗糙度Rz-SS值為銅箔生箔於 陰極側102的十點平均粗糙度值;銅箔於電解液側之粗糙度Ra-MS值為銅箔生箔於電解液側101的平均粗糙度值;銅箔於陰極側之粗糙度Ra-SS值為銅箔生箔於陰極側102的平均粗糙度值。Remarks (please refer to Figure 1): Roughness of copper foil on the electrolyte side Rz-MS value is the ten point average roughness value of the copper foil green foil on the electrolyte side 101; the roughness of the copper foil on the cathode side Rz- SS value is copper foil foil The ten point average roughness value of the cathode side 102; the roughness Ra-MS value of the copper foil on the electrolyte side is the average roughness value of the copper foil green foil on the electrolyte side 101; the roughness of the copper foil on the cathode side Ra- The SS value is the average roughness value of the copper foil green foil on the cathode side 102.

由表一與表二可看出,本發明於溫度50℃以上及電流密度50Amp/dm2 以上的作業條件下所製得的電解銅箔,其粗糙度不僅可達ULP等級(銅箔生箔於電解液側的粗糙度Rz-MS值甚至低於1μm以下),且銅箔生箔於電解液側的粗糙度Rz-MS值均比各自對應於陰極側的粗糙度Rz-SS值還低。此外,本發明製備的電解銅箔同時具有良好抗拉強度及伸長率,可滿足目前市售COF用途電解銅箔的品質規格。It can be seen from Table 1 and Table 2 that the electrolytic copper foil prepared by the invention under the working conditions of temperature above 50 ° C and current density above 50 Amp/dm 2 has a roughness not only up to ULP grade (copper foil foil) The roughness Rz-MS value on the electrolyte side is even lower than 1 μm), and the roughness Rz-MS value of the copper foil green foil on the electrolyte side is lower than the roughness Rz-SS value corresponding to the cathode side. . In addition, the electrolytic copper foil prepared by the invention has good tensile strength and elongation at the same time, and can meet the quality specifications of the currently commercially available electrolytic copper foil for COF use.

本發明於電解液中加入具有如化學式(I)結構的醌類化合物作為添加劑,在不需改變製程設備情況下,即可適用於目前電鍍銅箔業者高溫及高電流密度的作業條件。此外,本發明電解銅箔製程可實施於高氯製程(30ppm以上),亦克服了習知不易控制低氯離子濃度的困擾。The invention adds an antimony compound having the structure of the formula (I) as an additive to the electrolyte, and can be applied to the working conditions of the high temperature and high current density of the electroplated copper foil manufacturer without changing the process equipment. In addition, the electrolytic copper foil process of the present invention can be implemented in a high chlorine process (above 30 ppm), and overcomes the conventional problem of difficulty in controlling the concentration of low chloride ions.

雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明,任何熟習此項技藝者,在不脫離本發明之精神和範圍內,當可作更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the invention may be modified and retouched without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application attached.

10‧‧‧陽極10‧‧‧Anode

20‧‧‧陰極20‧‧‧ cathode

30‧‧‧電解液30‧‧‧ electrolyte

100‧‧‧銅箔生箔100‧‧‧copper foil foil

101‧‧‧銅箔生箔於電解液側之表面101‧‧‧ Copper foil foil on the surface of the electrolyte side

102‧‧‧銅箔生箔於陰極側之表面102‧‧‧The surface of the foil foil on the cathode side

第1圖為本發明之一實施例,一種製造電解銅箔之裝置及步驟。1 is an embodiment of the present invention, an apparatus and a step for manufacturing an electrolytic copper foil.

10‧‧‧陽極10‧‧‧Anode

20‧‧‧陰極20‧‧‧ cathode

30‧‧‧電解液30‧‧‧ electrolyte

100‧‧‧銅箔生箔100‧‧‧copper foil foil

101‧‧‧銅箔生箔於電解液側之表面101‧‧‧ Copper foil foil on the surface of the electrolyte side

102‧‧‧銅箔生箔於陰極側之表面102‧‧‧The surface of the foil foil on the cathode side

Claims (9)

一種電解液,包括:硫酸;硫酸銅;一含硫化合物;一聚醚化合物;以及一醌類化合物,具有下列化學式(I): 其中A是由氧、硫或具有一氫原子配位基結構的N所構成;B是由氮或含有一氫原子配位基的碳所構成;以及R1~R9獨立地為氫、碳數1~6之烷基、胺基或具有烷基替代基之胺基。An electrolyte comprising: sulfuric acid; copper sulfate; a sulfur-containing compound; a polyether compound; and an anthraquinone compound having the following chemical formula (I): Wherein A is composed of oxygen, sulfur or N having a hydrogen atom ligand structure; B is composed of nitrogen or a carbon having a hydrogen atom ligand; and R1 to R9 are independently hydrogen and have a carbon number of 1 An alkyl group of ~6, an amine group or an amine group having an alkyl substituent. 如申請專利範圍第1項所述之電解液,其中該含硫化合物為聚二硫二丙烷磺酸鈉(bis(sodium sulfopropyl)disulfide,SPS)。The electrolyte according to claim 1, wherein the sulfur-containing compound is sodium bis(sodium sulfopropyldisulfide, SPS). 如申請專利範圍第1項所述之電解液,其中該聚醚化合物為聚乙二醇或聚丙二醇。The electrolyte according to claim 1, wherein the polyether compound is polyethylene glycol or polypropylene glycol. 如申請專利範圍第1項所述之電解液,其中該醌類 化合物為The electrolyte of claim 1, wherein the hydrazine compound is , , , or . 如申請專利範圍第1項所述之電解液,更包括氯離子。For example, the electrolyte described in claim 1 further includes chloride ions. 如申請專利範圍第5項所述之電解液,其中該氯離子之濃度介於30~100ppm。The electrolyte of claim 5, wherein the concentration of the chloride ion is between 30 and 100 ppm. 一種銅箔之製造方法,包括:提供一陰極與一陽極;提供一如申請專利範圍第1項所述之電解液;以及施加一電流於該陰極與該陽極,以進行一銅箔製程。A method for producing a copper foil, comprising: providing a cathode and an anode; providing an electrolyte as described in claim 1; and applying a current to the cathode and the anode to perform a copper foil process. 如申請專利範圍第7項所述之銅箔之製造方法,其中該銅箔製程之電流密度介於50~70Amp/dm2The method for producing a copper foil according to claim 7, wherein the copper foil process has a current density of 50 to 70 Amp/dm 2 . 如申請專利範圍第7項所述之銅箔之製造方法,其中該銅箔製程之溫度介於50~70℃。The method for producing a copper foil according to claim 7, wherein the copper foil process has a temperature of 50 to 70 °C.
TW97148887A 2008-12-16 2008-12-16 Electrolyte and copper foil fabrication method utilizing the same TWI410529B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5544773A (en) * 1991-09-06 1996-08-13 Haruta; Youichi Method for making multilayer printed circuit board having blind holes and resin-coated copper foil used for the method
US20040104117A1 (en) * 2002-11-14 2004-06-03 Iljin Copper Foil Co., Ltd. Electrolyte solution for manufacturing electrolytic copper foil and electrolytic copper foil manufacturing method using the same
US7153408B1 (en) * 2006-04-13 2006-12-26 Herdman Roderick D Copper electroplating of printing cylinders

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5544773A (en) * 1991-09-06 1996-08-13 Haruta; Youichi Method for making multilayer printed circuit board having blind holes and resin-coated copper foil used for the method
US20040104117A1 (en) * 2002-11-14 2004-06-03 Iljin Copper Foil Co., Ltd. Electrolyte solution for manufacturing electrolytic copper foil and electrolytic copper foil manufacturing method using the same
US7153408B1 (en) * 2006-04-13 2006-12-26 Herdman Roderick D Copper electroplating of printing cylinders

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