TWI405921B - Vacuum valve - Google Patents

Abstract

Disclosed is a vacuum bulb having a pair of electrodes which are detachably stored in a vacuum container, wherein a movable electrode (1) is comprised of an outer peripheral coil electrode (3) and an inner peripheral coil electrode (4), which are coaxially arranged, and are respectively divided by slits (3b), (4b). The outer peripheral coil electrode (3) and the inner peripheral coil electrode (4) are respectively connected to spoke portions (3c), (4c), each of which extends in radial directions from a cup-shaped bottom portion toward the outer periphery. The outer peripheral coil electrode (3) and the inner peripheral coil electrode (4) respectively have coil portions (3d), (4d), in which an arciform conducting path is formed in the circumferential direction. One end of the outer peripheral coil electrode (3) and the inner peripheral coil electrode (4) is connected to an electrode rod (5) which discharges electric current to the outside of the vacuum container, and the other end is connected to a contact point (2), so that a magnetic field occurring when the contact point (2) is detached is equalized, and the arc is dispersed. Thus, the interruption performance is improved.

Description

Vacuum valve

The present invention relates to a vacuum valve which improves the cutting performance of a switch contact for a vacuum breaker.

The vacuum valve is composed of an insulator such as ceramic or glass, which is a gas-tight cylindrical vacuum container under high vacuum; and is opposed to each other at both ends of the vacuum container. a pair of electrodes that are separable in contact; and an arc shield that is disposed in the vacuum vessel in such a manner as to surround the electrodes. When the current is cut off, the vacuum valve acts to extinguish the arc that occurs between the electrodes with the separation of the electrodes.

However, if this arc is continuously generated locally, the electrode will locally melt and the electrode will be damaged. In order to avoid this, there is proposed a method in which a coil is disposed between the coil and a longitudinal magnetic field generated by the coil, so that an arc generated when the current is cut is widely spread in the radial direction of the electrode, suppressing The metal vapor and charged particles generated by the arc enhance the cutting performance and suppress the melting of the electrode.

As a method of further improving the cutting performance of the vacuum valve having the coil, for example, the vacuum valve disclosed in Patent Document 1 forms a groove in a circumferential direction at a predetermined angle in the circumferential direction of the arc electrode, and An insulating fitting is embedded in the groove. Thereby, the insulation recovery voltage becomes high, and the voltage rating is increased. Further, since the insulating electrode having a larger width than the groove is formed on the coil electrode side of the fitting body, the fitting body is less likely to fall off from the arc electrode, and the mechanical reliability is improved.

Further, as a method of further improving the cutting performance of the vacuum valve having a coil, for example, in the vacuum valve disclosed in Patent Document 2, the cup-shaped groove electrode is formed on the outer peripheral side with an oblique direction to the axial direction of the energizing shaft. A plurality of grooves that are transversely cut. Even if the distance between the electrodes is widened, a high longitudinal magnetic field can be generated, and the cutting performance is improved.

(previous technical literature)

(Patent Literature)

Patent Document 1: Japanese Laid-Open Patent Publication No. 2002-150902

Patent Document 2: Japanese Laid-Open Patent Publication No. 2008-135338

However, the vacuum valves disclosed in Patent Document 1 and Patent Document 2 have the following problems: the coils are provided only in the arc electrodes and the contacts (corresponding to the contacts of the present application, hereinafter referred to as "contacts"). In the outer peripheral portion, the generated magnetic field is not necessarily uniformly formed on the entire contact, and the generated arc is not sufficiently dispersed in the entire joint, and the cutting performance is limited.

The present invention has been made in order to solve the aforementioned problems, and an object thereof is to provide a vacuum valve which can improve the uniformity of a magnetic field generated at the time of contact separation and improve the cutting performance.

In order to solve the above problems, the vacuum valve of the present invention is characterized in that it has a pair of contacts which are detachably contacted in a vacuum container held in a vacuum, and a plurality of different outer diameters which are connected to the contacts and are arranged concentrically. A cup-shaped coil electrode, and an electrode rod that fixes a plurality of coil electrodes and is energized.

According to the present invention, the coil is provided not only at the outer peripheral portion of the contact but also at the inner peripheral portion, thereby improving the uniformity of the magnetic field, thereby dispersing the generated arc to the entire joint, and achieving a remarkable improvement in the cutting performance. Effect.

Hereinafter, a movable electrode of a vacuum valve according to an embodiment of the present invention will be described with reference to Figs. 1 to 10 .

(First embodiment)

Fig. 1 is a side view showing a movable electrode and a fixed electrode of a vacuum valve according to a first embodiment. Fig. 2 is a structural view of a movable electrode, Fig. 2(a) is an exploded perspective view of the movable electrode, and Fig. 2(b) is a plan view of the coil electrode. Further, Fig. 3 is a view showing a magnetic field distribution in the circumferential direction generated by the coil electrodes.

As shown in Fig. 1, the vacuum valve is constituted by one of the movable electrode 1 and the fixed electrode 11 housed in a vacuum container held in a vacuum, and since the structure is the same, only the structure of the movable electrode 1 is used here. Description. In Fig. 2, the component symbol 1 is a movable electrode, and the movable electrode is composed of a contact 2, a peripheral coil electrode 3 and an inner circumference coil which are concentrically arranged and connected to the contact 2 cup shape. The electrode 4, the electrode rod 5 connecting the outer peripheral coil electrode 3 and the inner peripheral coil electrode 4 and taking out a current to a vacuum container (not shown), the reinforcing material 6 for reinforcing the contact 2, and the outer peripheral coil electrode 3 And the insulating ring 7 into which the inner circumferential coil electrode 4 is insulated and inserted.

The outer peripheral coil electrode 3 is composed of a member which is divided by a groove 3b which is disposed in parallel with the axial direction 1a of the movable electrode 1 on the side surface 3a of the cup shape, and which is branched from the bottom of the cup to the outer circumference. The coil portion 3d that is connected to the portion 3c and has an arc-shaped through circuit in the circumferential direction; the terminal portion 3e that is connected to the contact 2; and the fitting hole 3f that is fitted to and fixed to the fitting portion 5a of the electrode rod 5. Similarly to the outer peripheral coil electrode 3, the inner circumferential coil electrode 4 is composed of a member which is divided by a groove 4b which is disposed in parallel with the axial direction 1a of the cup-shaped side surface 4a, and which is divided from the bottom of the cup shape. a coil portion 4d that is connected to the spoke portion 3c that is different in the outer circumference and that has an arc-shaped through circuit in the circumferential direction; a terminal portion 4e that is connected to the contact 2; and a fitting that is fitted and fixed to the fitting portion 5b of the electrode rod 5. Hole 4f.

Further, since the diameters of the fitting holes 3f and 4f of the plurality of outer circumferential coil electrodes 3 and the inner circumferential coil electrodes 4 are sequentially changed, the outer diameters of the fitting portions 5a and 5b of the corresponding electrode rods 5 are also sequentially matched. With the change, each of the outer circumference coil electrode 3 and the inner circumference coil electrode 4 can be fixed at a predetermined position.

Here, the position of the coil portion 3d of the through-circuit belonging to the outer circumferential coil electrode 3 and the position of the coil portion 4d of the through-circuit belonging to the inner circumferential coil electrode 4 are arranged at positions different from each other in the circumferential direction.

Further, the reinforcing material 6 is fitted and fixed by the fitting portion 5a of the protruding portion 6a and the electrode rod 5, and is in contact with the back surface of the contact 2, and the contact 2 is supported by the back surface as reinforcement. The contact 2, the outer circumferential coil electrode 3, the inner circumferential coil electrode 4, and the electrode rod 5 are made of a copper-based material having a low electric resistance, and the reinforcing material 6 is made of a stainless steel-based metal or insulator having a high electric resistance.

Next, the operation of the vacuum valve according to the first embodiment will be described with reference to Figs. 1 to 3 . Further, since the main system of the present invention is composed of a movable electrode and a fixed electrode, the description of driving the movable electrode will be omitted.

In the vacuum valve according to the first embodiment, the current is normally supplied from the electrode rod 15 of the fixed electrode 11 through the outer peripheral coil electrode 13, the inner circumferential coil electrode 14, and the contact 12, and flows from the contact 2 of the movable electrode 1 to the outer periphery. The coil electrode 3 and the inner circumferential coil electrode 4 further flow to the electrode rod 5. When the movable electrode 1 is retracted and the current is cut off, the contact 2 of the movable electrode 1 is separated by the contact 12 of the fixed electrode 11, and an arc is generated between the contact 2 and the contact 12. The current generated by the arc flows through the contact portion 2 in the radial direction, and flows from the terminal portion 3e and the terminal portion 4e to the coil portion 3d and the coil portion 4d of the outer circumferential coil electrode 3 and the inner circumferential coil electrode 4, and passes through the spoke portion 3c. The spoke portion 4c flows to the electrode rod 5. At this time, since the coil portion 3d and the coil portion 4d are formed in an arc shape and current flows in the circumferential direction, a longitudinal magnetic field parallel to the axial direction 1a of the movable electrode 1 is generated. The insulating ring 7 is inserted in order to prevent the magnetic field distribution from being disturbed by the contact between the outer coil electrode 3 and the coil portion 3d and the coil portion 4d of the inner circumferential coil electrode 4.

Fig. 3 is a view showing a comparison of a magnetic field distribution in the circumferential direction generated by a coil electrode with a conventional example. The magnetic flux density B is measured along the arrow direction L of Fig. 2(b). In Fig. 3, T is the magnetic flux density generated by a conventional coil electrode, and C is the outer circumference coil of the first embodiment. The magnetic flux density generated by the composite coil electrode of the electrode 3 and the inner circumferential coil electrode 4. The position of the terminal portion 3e of the outer circumferential coil electrode 3 and the position of the terminal portion 4e of the inner circumferential coil electrode 4 are arranged so as to be different from each other in the circumferential direction L. Therefore, compared with the case of the single coil electrode, The magnetic field distribution in the circumferential direction of the magnetic field generated by the composite coil electrode is greatly improved, and as a result of better uniformity of the lift, the arc is concentrated in the range of the contact and diffuses toward the entirety of the contact 2, Blocking it to local concentration can protect the joint 2 from damage.

Further, the insulating ring 7 can be omitted by providing a gap between the outer circumferential coil electrode 3 and the inner circumferential coil electrode 4. Further, instead of the insulating ring 7, an insulating film may be plated on the outer surface of the inner circumference of the coil electrode or the inner surface of the outer circumference of the coil electrode. Even if the coil electrodes are in contact with each other, the uniformity of the magnetic field is lowered, but the effect is still exerted.

In the method of manufacturing the coil electrode according to the first embodiment, the movable electrode 1 and the fixed electrode 11 are composed of a plurality of coil electrode combinations, and the thickness of each of the coil electrodes may be thin, so that the plate is subjected to press working. The method is effective. Fig. 4 is a view showing a manufacturing method of a coil electrode through a press working method. First, the flat plate 10 (Fig. 4(a)) is subjected to a process of punching out the fitting hole 3f and forming a portion other than the coil portion 3d (Fig. 4(b)), and then forming a side surface 3a by extrusion processing. It is processed into a cup shape (Fig. 4(c)). Then, the coil electrodes 3, 4 having different outer diameters are combined to manufacture a target composite coil electrode (Fig. 4 (d)). Here, the state in which the coil portion 3d and the coil portion 4d of the outer circumferential coil electrode 3 and the inner circumferential coil electrode 4 are at the same position in the circumferential direction is shown. In addition, although the insulating ring 7 is not shown in FIG. 4, it is inserted in the cooperation. When it is produced by a cutting process from a bar, such a complicated machining method is difficult and requires a high manufacturing cost, and by using a press working method, it is possible to combine a plurality of coils by combining a plurality of coils. The composite coil electrode is manufactured at low cost.

As described above, in the vacuum valve according to the first embodiment, the cup-shaped side surface is provided with parallel grooves in the axial direction, and a plurality of cup-shaped coils having different outer diameters of the arc-shaped through-circuit are formed in the circumferential direction. The electrodes are arranged in a concentric manner to generate a magnetic field, thereby improving the uniformity of the circumferential magnetic field distribution generated when the arc is generated, preventing the arc from being concentrated locally, thereby protecting the contacts from damage, and It can improve the remarkable effect of cutting performance.

(Second embodiment)

Fig. 5 is a perspective exploded view showing the structure of a movable electrode of the vacuum valve of the second embodiment. In Fig. 5, the component symbol 21 is a movable electrode, and the movable electrode is composed of a contact 22; a cup-shaped outer peripheral coil electrode 23 and an inner peripheral coil which are connected to the contact 2 and arranged concentrically. The electrode 24 is connected to the outer circumferential coil electrode 23 and the inner circumferential coil electrode 24, and draws current from the electrode rod 25 other than the vacuum container (not shown); the reinforcing material 26 of the reinforcing contact 22; and the insulating outer circumferential coil electrode 23 and The insulating ring 27 is inserted into the inner circumferential coil electrode 24.

The outer peripheral coil electrode 23 is composed of a member in which a coil portion of an arc-shaped through circuit is formed in the circumferential direction by a groove 23b which is provided obliquely with respect to the axial direction 21a of the movable electrode 21 in the cup-shaped side surface 23a. 23d; a terminal portion 23e connected to the contact 22; and a fitting hole 23f fitted to the fitting portion 25a of the electrode rod 25 and fixed. Similarly to the outer peripheral coil electrode 23, the inner circumferential coil electrode 24 is formed of a member in which an arcuate passage is formed in the circumferential direction by a groove 24b which is provided obliquely with respect to the axial direction 21a in the cup-shaped side surface 24a. The coil portion 24d of the circuit; the terminal portion 24e connected to the contact 22; and the fitting hole 24f fitted to the fitting portion 25b of the electrode rod 25 and fixed.

Here, the position of the coil portion 23d of the through-circuit as the outer coil electrode 23 and the position of the coil portion 24d of the through-circuit as the inner circumferential coil electrode 24 are arranged at different angles in the circumferential direction.

Further, the reinforcing material 26 is fitted and fixed by the fitting portion 25a of the projection 26a and the electrode rod 25, and is in contact with the back surface of the contact 22, and the contact 22 is supported by the back surface as reinforcement. In the same manner as the first embodiment, the contact 22, the outer circumferential coil electrode 23, the inner circumferential coil electrode 24, and the electrode rod 25 are made of a copper-based material having a low electric resistance, and the reinforcing material 26 is made of a stainless steel-based metal having a high electric resistance. Or an insulator.

Next, the operation of the vacuum valve according to the second embodiment will be described with reference to Fig. 5.

In the vacuum valve of the second embodiment, when the movable electrode 21 is retracted and the current is cut off, the movable electrode 21 is separated by a fixed electrode (not shown), and an arc is generated between the contact 22 and the fixed electrode. The current generated by the arc flows through the contact portion 22 in the radial direction, and flows from the terminal portion 23e and the terminal portion 24e to the coil portion 23d and the coil portion 24d of the outer circumferential coil electrode 23 and the inner circumferential coil electrode 24, and passes through the outer peripheral coil electrode. 23 and the bottom of the inner circumference coil electrode 24 flow toward the electrode rod 25. At this time, the coil portion 23d and the coil portion 24d formed by the grooves 23b and the grooves 24b which are provided obliquely on the side surface 23a and the side surface 24a of the cup-shaped outer circumferential coil electrode 23 and the inner circumferential coil electrode 24 are formed. In the case of an arc shape, the current flows obliquely in the circumferential direction, so that a longitudinal magnetic field parallel to the axial direction 21a of the electrode rod 25 is generated.

The position of the coil portion 23d of the outer circumferential coil electrode 23 and the position of the coil portion 24d of the inner circumferential coil electrode 24 are arranged so as to be different in the circumferential direction. Therefore, compared with the case of a single coil electrode, The magnetic field generated by the coil electrodes has the effect of improving the magnetic field distribution in the circumferential direction and obtaining better uniformity of uniformity. Since the arc is concentrated in the range of the contacts, and spreads to the entirety of the contacts 22, it hinders the localization. Concentrate and protect the contacts 22 from damage.

Since the method of manufacturing the coil electrode of the second embodiment is the same as that of the first embodiment, it is effective to pass the sheet material through the press working method. Fig. 6 is a view showing a manufacturing method of a coil electrode through a press working method. First, the flat plate 10 (Fig. 6(a)) is subjected to punching processing (Fig. 6(b)) of the fitting hole 23f and the groove 23b, and then the side surface 23a is formed by extrusion processing, and processed into a cup shape. (Fig. 6(c)). Further, the coil electrode 22 and the coil electrode 23 having different outer diameters are combined to manufacture a target composite coil electrode (Fig. 6(d)). The insulating ring 27 is inserted as needed.

In the vacuum valve according to the second embodiment, the cup-shaped side surface is provided with a groove obliquely to the axial direction, and the outer diameter of the arc-shaped through circuit is formed in the circumferential direction. The coil electrodes are arranged concentrically so as to generate a magnetic field at a plurality of coil electrodes, thereby improving the uniformity of the magnetic field distribution in the circumferential direction generated when the arc is generated, and preventing the local concentration of the arc locally, as in the first embodiment. The protection contact is not damaged, but has a remarkable effect of improving the cutting performance.

(Third embodiment)

Fig. 7 is a structural view of a movable electrode, Fig. 7(a) is an exploded perspective view of the movable electrode, and Fig. 7(b) is a plan view of the coil electrode. Moreover, Fig. 8 is a schematic view showing the distribution of the magnetic field in the diameter direction generated by the coil electrode.

As shown in Fig. 7, the vacuum valve of the third embodiment is provided with a gap d between the cup-shaped outer peripheral coil electrode 3 and the inner peripheral coil electrode 4 arranged concentrically, and the insulating ring 7 is omitted. Other than the point of the first embodiment, the description of the other components is omitted.

Here, the position of the coil portion 3d serving as the through circuit of the outer circumference coil electrode 3 and the position of the coil portion 4d serving as the through circuit of the inner circumference coil electrode 4 are arranged so as to be at different positions in the circumferential direction.

Next, the operation of the vacuum valve according to the third embodiment will be described with reference to Fig. 7.

The vacuum valve of the third embodiment is also the same as that of the first embodiment. The contact 2 of the movable electrode 1 is separated from the contact 12 of the fixed electrode 11 in the state of cutting off the current, and is connected to the contact 2 and the contact 12 An arc is generated. The current generated by the arc flows into the contact portion 2 in the radial direction, and then flows from the terminal portion 3e and the terminal portion 4e to the coil portion 3d and the coil portion 4d of the outer circumferential coil electrode 3 and the inner circumferential coil electrode 4, and passes through the spoke portion 3c. The spoke portion 4c flows to the electrode rod 5. At this time, the coil portion 3d and the coil portion 4d are formed in an arc shape, and a current flows in the circumferential direction, so that a longitudinal magnetic field parallel to the axial direction 1a of the movable electrode 1 is generated.

Fig. 8 is a view showing a comparison of a magnetic field distribution in the circumferential direction generated by the composite coil electrode of the third embodiment with a conventional example. The magnetic flux density B is measured along the radial direction R of the arrow of Fig. 7(b), T is the magnetic flux density generated by a conventional coil electrode, and C is the outer peripheral coil electrode 3 and the inside of the third embodiment. The magnetic flux density generated by the composite coil electrode formed by the circumferential coil electrode 4. The inner circumferential coil electrode 4 having a smaller outer diameter than the outer circumferential coil electrode 3 is disposed with the gap d, so that the magnetic field generated by the composite coil electrode is distributed in the radial direction compared to the case of the single coil electrode. As a result of the improvement and better uniformity of the lifting, the arc 2 is protected from being damaged by the fact that the arc is concentrated in the range of the contact and spreads to the entirety of the joint 2, thereby preventing it from being concentrated locally.

In this way, the vacuum valve of the third embodiment is arranged concentrically with a plurality of concentric circular cup-shaped coil electrodes having different outer diameters of the arc-shaped through-circuit in the circumferential direction so as to have a gap therebetween. In order to generate a magnetic field, it is possible to improve the uniformity of the magnetic field distribution in the radial direction generated when the arc is generated, to prevent the arc from being locally concentrated, to protect the joint from damage, and to have a remarkable effect of improving the cutting performance.

Further, in the above-described embodiment, the composite coil electrode is constituted by two coil electrodes of the outer circumference coil electrode and the inner circumference coil electrode, and may be composed of three or more coil electrodes. Moreover, the thickness of each coil electrode plate may be different.

Further, in the embodiment, the number of divergence (the number of coils) of each of the outer circumferential coil electrode and the inner circumferential coil electrode is described as three. However, as shown in FIG. 9, each coil electrode may be used. The difference in the number of divergence can be adjusted to adjust the magnetic field distribution. Fig. 9(a) is a view showing another embodiment in which the number of divergences of the plurality of coil electrodes corresponding to the third embodiment is different depending on the first embodiment and the ninth figure (b). In particular, when the number of divergences of the outer peripheral coil electrode is larger than the number of divergence of the inner peripheral coil electrode, it is effective to improve the uniformity of the magnetic field.

Further, in the embodiment, the position of the coil electrode of the outer circumferential coil electrode and the position of the coil electrode of the inner circumferential coil electrode are arranged such that they are arranged at positions different in the circumferential direction, but the tenth figure is The position corresponding to the position of the coil portion 3d of the outer circumferential coil electrode 3 of the first embodiment and the position of the coil portion 4d of the inner circumferential coil electrode 4 at the same position with respect to the circumferential direction are displayed. Even if a plurality of coil portions are located at the same position in the circumferential direction, the effect of improving the magnetic field in the radial direction can be expected.

Further, coil electrodes having different load currents are prepared, and these are combined to provide a vacuum valve having various types of allowable load currents.

Further, the present invention is not limited to the above-described embodiments, and of course, the above possible combinations are also included.

In the figures, the same reference numerals are used to refer to the same or equivalent parts.

1,21. . . Movable electrode

1a. . . Axis direction

2,12,22. . . contact

3,13,23. . . Peripheral coil electrode

3a, 23a, 24a. . . side

3b, 4b, 23b, 24b. . . Trench

3c, 4c. . . Spoke

3d, 4d, 23d, 24d. . . Coil part

3e, 4e, 23e, 24e. . . Terminal part

3f, 4f, 5c, 23f, 24f, 25c. . . Fitted hole

4,14,24. . . Inner circumference coil electrode

5,15,25. . . Electrode rod

5a, 5b, 25a, 25b. . . Mating part

6,26. . . Reinforcing material

6a, 26a. . . Protrusion

7,27. . . Insulation ring

10. . . flat

11. . . Fixed electrode

B, C, T. . . Magnetic flux density

Fig. 1 is a side view showing a movable electrode and a fixed electrode of the vacuum valve of the first embodiment.

Fig. 2 (a) and (b) are structural views of the movable electrode of the first embodiment.

Fig. 3 is a view showing a magnetic field distribution in the circumferential direction generated by the composite coil electrode in the first embodiment.

Fig. 4 (a) to (d) show a manufacturing method of the composite coil electrode through the press working method according to the first embodiment.

Fig. 5 is a structural view showing a movable electrode of the second embodiment.

Fig. 6 (a) to (d) are manufacturing methods of the composite coil electrode through the press working method of the second embodiment.

Fig. 7 (a) and (b) are structural views of the movable electrode of the third embodiment.

Fig. 8 is a magnetic field distribution diagram in the radial direction generated by the composite coil electrode in the third embodiment.

Fig. 9 (a) and (b) are plan views of the coil electrode in the case where the number of divisions of the plurality of coil electrodes in the first embodiment and the third embodiment is different.

Fig. 10 is a plan view showing the coil electrode in the case where the positions of the coil portions of the plurality of coil electrodes of the first embodiment are the same in the circumferential direction.

1. . . Movable electrode

2,12. . . contact

3,13. . . Peripheral coil electrode

4,14. . . Inner circumference coil electrode

5,15. . . Electrode rod

11. . . Fixed electrode

Claims (6)

A vacuum valve having a pair of electrodes (1, 11) housed in a vacuum container in a separable contact manner, wherein the electrode (1, 11) has a plurality of coil electrodes (3, 4) having different outer diameters And (13, 14) are formed in a cup shape and arranged in a concentric shape; the electrode rods (5, 15) are fixed to one end of the plurality of coil electrodes (3, 4), (13, 14) And extracting current outside the vacuum container; and a contact (2, 12) fixed to the other ends of the plurality of coil electrodes (3, 4), (13, 14); and the plurality of coils Each of the electrodes (3, 4) and (13, 14) has a plurality of through circuits formed in the circumferential direction along the outer peripheral side surface, and a plurality of the coil electrodes (3, 13) disposed on the outer peripheral side. The plurality of through circuits of the pass circuit and the coil electrodes (4, 14) disposed on the inner peripheral side are formed such that the directions of the plurality of pass circuits are the same direction in the circumferential direction. The vacuum valve of claim 1, wherein the plurality of coil electrodes (3, 4), (13, 14) are interposed between the coil electrodes (3, 4), (13, 14) There are insulating members (7). The vacuum valve of claim 1 or 2, wherein the plurality of coil electrodes (3, 4), (13, 14) are bifurcated from the bottom center of the cup to the outer circumference (3c, 4c), and a through circuit is formed in the circumferential direction along the outer peripheral side. Such as the vacuum valve of claim 1 or 2, wherein the aforementioned The plurality of coil electrodes (3, 4), (13, 14) are branched by a plurality of grooves (3b, 4b) obliquely disposed on the side of the cup with respect to the axial direction, and are circumferentially along the outer peripheral side The direction forms a pass circuit. The vacuum valve according to the first or second aspect of the invention, wherein the coil circuit (3, 13) disposed on the outer peripheral side has a pass circuit position and the coil electrode (4, 14) disposed on the inner peripheral side. The position of the circuit is configured to be different in the circumferential direction. The vacuum valve according to the first or second aspect of the invention, wherein the number of branching circuits of the coil electrode (3, 13) disposed on the outer peripheral side is different from that of the coil electrode disposed on the inner peripheral side (4, 14) The number of pass circuit differences is different.