TWI405493B - - Google Patents
Info
- Publication number
- TWI405493B TWI405493B TW98130187A TW98130187A TWI405493B TW I405493 B TWI405493 B TW I405493B TW 98130187 A TW98130187 A TW 98130187A TW 98130187 A TW98130187 A TW 98130187A TW I405493 B TWI405493 B TW I405493B
- Authority
- TW
- Taiwan
- Prior art keywords
- heating layer
- electrically heating
- substrate
- electricity
- conducting layers
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 229910002804 graphite Inorganic materials 0.000 abstract 1
- 239000007770 graphite material Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000002210 silicon-based material Substances 0.000 abstract 1
Landscapes
- Resistance Heating (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW98130187A TW201110800A (en) | 2009-09-08 | 2009-09-08 | Hot aluminum plate structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW98130187A TW201110800A (en) | 2009-09-08 | 2009-09-08 | Hot aluminum plate structure |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201110800A TW201110800A (en) | 2011-03-16 |
TWI405493B true TWI405493B (enrdf_load_stackoverflow) | 2013-08-11 |
Family
ID=44836374
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW98130187A TW201110800A (en) | 2009-09-08 | 2009-09-08 | Hot aluminum plate structure |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201110800A (enrdf_load_stackoverflow) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW223216B (en) * | 1992-11-20 | 1994-05-01 | Lamp Entpr Co Ltd U | Method of preparing carbon electrothermal film |
US20040074899A1 (en) * | 2002-10-21 | 2004-04-22 | General Electric Company | Encapsulated graphite heater and process |
JP2004339048A (ja) * | 2003-04-24 | 2004-12-02 | Mitsuyuki Oyanagi | C−SiC焼結体およびその製造方法 |
TW200808100A (en) * | 2006-04-13 | 2008-02-01 | Shinetsu Chemical Co | Heating element |
TW200824070A (en) * | 2006-11-24 | 2008-06-01 | Uf Tech Corp | Aluminum nitride wafer carrier |
-
2009
- 2009-09-08 TW TW98130187A patent/TW201110800A/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW223216B (en) * | 1992-11-20 | 1994-05-01 | Lamp Entpr Co Ltd U | Method of preparing carbon electrothermal film |
US20040074899A1 (en) * | 2002-10-21 | 2004-04-22 | General Electric Company | Encapsulated graphite heater and process |
JP2004339048A (ja) * | 2003-04-24 | 2004-12-02 | Mitsuyuki Oyanagi | C−SiC焼結体およびその製造方法 |
TW200808100A (en) * | 2006-04-13 | 2008-02-01 | Shinetsu Chemical Co | Heating element |
TW200824070A (en) * | 2006-11-24 | 2008-06-01 | Uf Tech Corp | Aluminum nitride wafer carrier |
Also Published As
Publication number | Publication date |
---|---|
TW201110800A (en) | 2011-03-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |