TWI405493B - - Google Patents

Info

Publication number
TWI405493B
TWI405493B TW98130187A TW98130187A TWI405493B TW I405493 B TWI405493 B TW I405493B TW 98130187 A TW98130187 A TW 98130187A TW 98130187 A TW98130187 A TW 98130187A TW I405493 B TWI405493 B TW I405493B
Authority
TW
Taiwan
Prior art keywords
heating layer
electrically heating
substrate
electricity
conducting layers
Prior art date
Application number
TW98130187A
Other languages
English (en)
Chinese (zh)
Other versions
TW201110800A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW98130187A priority Critical patent/TW201110800A/zh
Publication of TW201110800A publication Critical patent/TW201110800A/zh
Application granted granted Critical
Publication of TWI405493B publication Critical patent/TWI405493B/zh

Links

Landscapes

  • Resistance Heating (AREA)
  • Laminated Bodies (AREA)
TW98130187A 2009-09-08 2009-09-08 Hot aluminum plate structure TW201110800A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW98130187A TW201110800A (en) 2009-09-08 2009-09-08 Hot aluminum plate structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW98130187A TW201110800A (en) 2009-09-08 2009-09-08 Hot aluminum plate structure

Publications (2)

Publication Number Publication Date
TW201110800A TW201110800A (en) 2011-03-16
TWI405493B true TWI405493B (enrdf_load_stackoverflow) 2013-08-11

Family

ID=44836374

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98130187A TW201110800A (en) 2009-09-08 2009-09-08 Hot aluminum plate structure

Country Status (1)

Country Link
TW (1) TW201110800A (enrdf_load_stackoverflow)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW223216B (en) * 1992-11-20 1994-05-01 Lamp Entpr Co Ltd U Method of preparing carbon electrothermal film
US20040074899A1 (en) * 2002-10-21 2004-04-22 General Electric Company Encapsulated graphite heater and process
JP2004339048A (ja) * 2003-04-24 2004-12-02 Mitsuyuki Oyanagi C−SiC焼結体およびその製造方法
TW200808100A (en) * 2006-04-13 2008-02-01 Shinetsu Chemical Co Heating element
TW200824070A (en) * 2006-11-24 2008-06-01 Uf Tech Corp Aluminum nitride wafer carrier

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW223216B (en) * 1992-11-20 1994-05-01 Lamp Entpr Co Ltd U Method of preparing carbon electrothermal film
US20040074899A1 (en) * 2002-10-21 2004-04-22 General Electric Company Encapsulated graphite heater and process
JP2004339048A (ja) * 2003-04-24 2004-12-02 Mitsuyuki Oyanagi C−SiC焼結体およびその製造方法
TW200808100A (en) * 2006-04-13 2008-02-01 Shinetsu Chemical Co Heating element
TW200824070A (en) * 2006-11-24 2008-06-01 Uf Tech Corp Aluminum nitride wafer carrier

Also Published As

Publication number Publication date
TW201110800A (en) 2011-03-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees