TWI402499B - Nondestructive inspection method for lining tank - Google Patents

Description

Non-destructive inspection method for lining

The present invention relates to a non-destructive inspection method for detecting a lining groove of a floating portion (peeling portion) of a lining layer produced by a lining groove. More specifically, the present invention relates to a non-destructive inspection method for detecting a lining groove of the aforementioned floating portion by means of an infrared temperature thermograph.

Conventionally, a chemical liquid tank used for a chemical liquid supply system or the like in semiconductor manufacturing is generally composed of a metal can body and a resin backing layer provided with an adhesive layer on the inner surface thereof. Because of its good chemical resistance and purity, it is suitable to use a fluororesin lining layer. Here, the term "pureness" means that the resin lining layer on the inner surface of the chemical solution tank contains substantially no components such as impurities and a film forming monomer, and the component does not dissolve in the chemical liquid inside the chemical solution tank. The liquid inside the tank is not contaminated.

However, there is a case where the chemical solution penetrates through the resin lining layer little by little for many years, and is used in the case where the adhesive of the can body and the resin lining layer of the medicinal solution tank is deteriorated. When the aforementioned adhesive is deteriorated, the resin lining layer floats from the inner surface of the can body to produce a floating portion. Furthermore, the chemical solution penetrating through the resin lining layer corrodes the metal portion of the can body, and a reaction gas such as hydrogen generated during corrosion may accumulate between the inner surface of the can and the resin lining layer, thereby promoting the resin lining layer. The generation of the floating portion.

Due to the generation of the floating portion of the resin lining layer, the lining groove is broken, and the chemical liquid penetrating through the lining layer reacts with the metal can body to generate a reactant. Further, when the reactant passes through the resin lining layer and dissolves inside the chemical liquid, there is a possibility of causing metal contamination of the chemical liquid.

At this time, it will become a big problem that causes the production line of the semiconductor factory to stop. In order to prevent and completely prevent the above-mentioned situation, it is required to detect the extent to which the floating portion or the like floating from the inner surface of the inner surface of the liner layer is currently being performed.

As for the method of detecting the floating portion of the lining layer, there is known an "open inspection" in which the lid body of the lining tank is removed, and the liquid medicine inside the tank is extracted as needed, and the tank is visually inspected. The state of the inner surface.

However, the above method must be open to the lining, from the viewpoint of preventing impurities from being mixed into the inside of the tank and preventing environmental pollution caused by the evaporation of the liquid, regardless of the use condition of the tank, opening the tank is not ideal.

Further, when the opening inspection of the lining tank in use is performed, it is necessary to perform the operation of stopping the use of the tank, extracting the chemical liquid, and cleaning the inside of the tank, and stopping the production line of the semiconductor factory for a long time.

Further, in another method of detecting the floating portion of the lining layer, a heuristic test method in which the surface of the lining layer is struck and the inside of the lining layer is judged by the reverberation sound is known (see, for example, Patent Document 1). The aforementioned heuristic test method predicts the life of the lining layer by comparing the recorded data and the test results of the memory means in which the deterioration life of the lining layer is previously memorized.

However, it is difficult to quantitatively measure the position and range of the floating portion of the backing layer by the above-described heuristic test method, and it is necessary to perform the test in a plurality of portions of the backing layer, and there is a problem that the measurement takes time. Further, since the life of the lining layer is predicted by comparing the recording data and the test results of the memory means in which the deterioration life of the lining layer is previously stored, it is difficult to accurately detect the floating portion of the lining layer when there is no comparison data.

On the other hand, it is known that a corrosion diagnosis method is used to detect a temperature difference caused by unevenness of internal and external heat transmission by a temperature recording method to diagnose an internal corrosion state (see, for example, Patent Document 2).

However, the above-mentioned corrosion diagnosis method is for diagnosing the unevenness of heat conduction due to corrosion of the base material, and is intended to be a pipe or a groove composed of a single member (base material only) not lined with a resin. No review has been conducted. Therefore, there is still room for improvement in the accuracy of the detection of the floating portion of the lining layer of the chemical liquid tank in which the base material is coated with the resin.

Further, a method is disclosed in which a urethane foam is fixed to a polyurethane storage tank for liquid storage in a tank side plate, and a corrosion portion of the groove side plate is detected by a temperature recorder (see, for example, Patent Document 3).

However, in the method described in Patent Document 3, the portion in which the polyurethane foam layer is water-containing is detected. In Patent Document 3, the detection of the spatial floating of the liner layer is not mentioned at all. Further, the method of heating or cooling the object to be measured in order to easily detect the deteriorated portion has not been specifically examined so far, and there is still room for further improvement in the method of detecting the floating portion of the backing layer.

(Patent Document 1) Japanese Patent Laid-Open Publication No. 2001-141627

(Patent Document 2) Japanese Patent Laid-Open Publication No. SHO 63-250554

(Patent Document 3) Japanese Patent Publication No. Sho 57-047423

The subject of the present invention is to solve the problem of the method of detecting the floating portion of the backing layer in the above-mentioned chemical liquid tank. That is, the following method is provided, that is, whether or not the liquid medicine is contained inside the lining tank, and whether the tank is in use or not, the tank is not opened or the liquid medicine inside the tank is extracted, and the precision and the accuracy are simple and simple. A method of detecting the floating portion of the liner layer from the outside of the groove.

The present inventors conducted intensive studies in order to solve the above problems. As a result, it was found that by heating or cooling the lining groove from the inside or the outside of the groove, and by using an infrared temperature recorder, the heat generated by the floating portion of the lining layer to the outer surface or the inner surface of the lining groove was measured. The present invention can be accomplished by conveying the surface temperature distribution due to the unequal speed and the like.

That is, the present invention relates to the following (1) to (8).

(1) A method for non-destructive inspection of a lining groove by measuring an unevenness of heat transfer speed which is transmitted to the inner surface or the outer surface of the lining groove by the lining layer in a peeled state by using an infrared temperature recorder The resulting surface temperature distribution was detected and the floating portion of the backing layer was detected.

(2) The non-destructive inspection method of the lining tank according to the above (1), wherein the outer surface of the lining tank is heated or cooled, and the lining layer due to the peeling state is measured by an infrared temperature recorder. The surface temperature distribution due to the uneven heat transfer speed of the inner surface of the lining is detected, and the floating portion of the lining layer is detected.

(3) The non-destructive inspection method of the lining tank according to the above (2), wherein the outer surface of the lining tank is heated or cooled, so that the lining layer of the lining groove before heating or cooling is not peeled off. The absolute value of the difference between the temperature of the outer surface of the groove and the temperature of the outer surface of the groove after heating or cooling is 1.5 ° C or higher.

(4) The non-destructive inspection method of the lining tank according to the above (2) or (3), wherein the heating medium is made higher than the temperature of the outer surface of the lining tank or the outer surface of the lining tank The low temperature cooling medium contacts the outer surface of the tank to heat or cool the outer surface of the tank.

(5) The non-destructive inspection method of the lining tank according to the above (4), wherein the heating medium or the cooling medium is a sheet-like material.

(6) The non-destructive inspection method of the lining tank according to the above (1), wherein the lining tank is not opened, and the sump is supplied to the inside of the tank to heat or cool the tank from the inside of the tank The outer surface.

(7) The non-destructive inspection method of the lining tank according to the above (6), wherein the temperature of the storage object and the outer surface of the groove are not peeled off from the lining layer of the lining groove before the supply of the storage object The absolute value of the difference in temperature is 1 ° C or more.

(8) The non-destructive inspection method of the lining tank according to the above (1), (2) or (6), wherein the lining tank is used in a medicinal solution tank of the chemical liquid supply system.

According to the present invention, the following method can be provided, that is, whether the liquid medicine is contained inside the lining tank, and whether the tank is in use or not, the tank is not required to be opened or the liquid medicine inside the tank is extracted, so that the precision is good. And a method of simply detecting the floating portion of the liner layer from the outside of the tank.

Hereinafter, the non-destructive inspection method of the lining tank of the present invention will be described in detail.

The non-destructive inspection method of the lining groove of the present invention is characterized in that the (A) generated by the lining layer in the peeled state is transmitted from the outer surface of the lining groove to the inner surface of the lining groove by using an infrared temperature recorder. The surface temperature distribution due to the unevenness of the heat transfer speed or (B) the surface temperature distribution caused by the uneven heat transfer speed from the inner surface of the grooved groove to the outer surface of the grooved groove, and the backing layer is detected. The floating part.

Hereinafter, the present invention will be described in detail with reference to the measurement principle of the present invention, the lining groove to be measured, the infrared temperature recorder belonging to the measuring device, and the masking tape for infrared reflection prevention which are suitably used. The above aspects (A) and (B) of the non-destructive inspection method of the liner.

(Measurement principle: refer to Figure 1 to Figure 4)

1 to 4 are schematic longitudinal cross-sectional views showing a non-destructive inspection method of the lining groove of the present invention for non-destructively detecting the floating portion of the lining layer of the lining groove (Fig. 1 and 2) Figure) and a schematic cross-sectional view (Fig. 3, Fig. 4).

As shown in FIGS. 1 to 4, a part of the backing layer 20 of the interlayer adhesive layer 70 next to the inner surface 30B of the can body 30 of the lining tank 10 is lifted by peeling from the adhesive layer 70. Therefore, an air/exudate layer 40 is formed between the can body 30 and the backing layer 20, and the air/permeate layer 40 accumulates air, a reaction gas such as hydrogen gas generated when the can body 30 is corroded by the chemical solution, and a drug. Liquid such as liquid.

Further, in the following description, in the lining tank 10, a portion in which the tank body 30 and the backing layer 20 are closely adhered to the lining layer 70 is referred to as a health all 50, and an air/exudate layer 40 is formed. The portion is referred to as a floating portion 60.

The infrared temperature recorder 90 passively detects the infrared rays radiated from the outer surface 10A of the lining groove, so that the influence of the lining groove 10 or the like is not caused. However, the infrared temperature recorder 90 does not directly determine the state of the backing layer 20 of the inner surface 10B of the liner.

However, when there is an air/exudate layer 40 which is generated by the peeling of the backing layer 20, the thermal conductivity of the whole 50 and the thermal conductivity of the floating portion 60 may differ depending on the presence or absence of the air/permeate layer 40. .

That is, in the direction Y outside the inner liner groove 10 of the whole 50 ((A) padded outer surface 10A → can body 30 → adhesive layer 70 → lining layer 20 → lining groove inner surface 10B ( 1) or (B) the inner surface 10B of the lining groove → the lining layer 20 → the adhesive layer 70 → the can body 30 → the outer surface 10A of the lining groove (Fig. 2)), and

In the direction X of the inner portion of the floating portion 60 which penetrates the inner liner groove 10 ((A) the groove outer surface 10A → the can body 30 → the adhesive layer 70 → the air/exudate layer 40 → the lining layer 20 → lining Groove inner surface 10B (Fig. 1), or (B) lining inner surface 10B → lining layer 20 → air/exudate layer 40 → adhesive layer 70 → tank 30 → lining outer surface 10A (2nd) Between)))

The heat transfer rate transmitted from the outer surface 10A of the padded groove 10 (A) to the inner surface 10B or the inner surface 10B of the padded groove 10 (B) to the outer surface 10A may cause unevenness p, and the thermal conductivity may be caused by The health 50 and the floating portion 60 are different.

As a result, when the outer surface 10A of the liner is heated or cooled (A), a temperature distribution can be formed on the outer surface 10A of the liner, and the peeling state of the liner layer 20 can be indirectly determined. Therefore, by measuring the temperature distribution described above, the position and extent of the floating portion 60 can be accurately detected.

For example, when a heating medium (not shown) having a temperature higher than the temperature of the outer surface 10A of the lining is brought into contact with the outer surface 10A of the lining groove, the temperature of the outer surface 10A of the lining groove rises.

In general, the thermal conductivity of the floating portion 60 is smaller than the thermal conductivity of the entire heat 50. Therefore, in the whole body 50, the heat transfer speed from the outer surface 10A of the lining groove 10 to the inner surface 10B is fast, and in the floating portion 60, the heat transfer speed is slow. As a result, the temperature of the padded outer surface 10A in the floating portion 60 temporarily becomes higher than the temperature of the padded outer surface 10A in the whole portion 50.

Further, when the (B) lining inner 150 is supplied with a temperature difference from the temperature of the lining outer surface 10A, the floating portion 60 of the lining layer 20 is present on the lining inner surface 10B. Next, a temperature distribution can be formed on the padded outer surface 10A, and the peeling state of the liner layer 20 can be indirectly determined. Therefore, by measuring the temperature distribution described above, the position and extent of the floating portion 60 can be accurately detected.

For example, as shown in Fig. 2, when the inside of the lining tank 150 is supplied with a storage material (not shown) which is lower than the temperature of the lining outer surface 10A, the surface temperature of the outer surface 10A of the groove changes.

As described above, in general, the thermal conductivity of the floating portion 60 is smaller than the thermal conductivity of the entire heat 50. Therefore, in the whole body 50, the heat transfer speed from the inner surface 10B of the lining groove 10 to the outer surface 10A is fast, and in the floating portion 60, the heat transfer speed is slow. As a result, the temperature of the padded outer surface 10A in the floating portion 60 becomes higher as compared with the temperature of the padded outer surface 10A in the whole portion 50.

Therefore, the temperature distribution of the outer surface 10A of the lining groove is measured by the infrared temperature recorder 90 provided from the outer surface 10A of the lining groove to the outside by a predetermined distance, whereby the lining layer 20 can be accurately detected. The position and extent of the starting portion 60.

(Lined groove: refer to Figure 1 to Figure 4)

The lining groove 10 to be subjected to the measurement object of the present invention is formed by the resin lining method on either or both of the inner surface 30B and the outer surface 30A of the can body 30, and the lining layer 20 is formed with the adhesive layer 70. The liner can be added without particular limitation. The backing layer 20 is made of a resin excellent in chemical resistance such as acid resistance and alkali resistance. Further, in FIGS. 1 to 4, the lining groove 10 in which the lining layer 20 is formed is illustrated only on the inner surface 30B of the can body 30.

The adhesive for forming the adhesive layer 70 may, for example, be a rubber-based or epoxy-based adhesive. Further, the thickness of the adhesive layer 70 is not particularly limited as long as the liner layer 20 can be attached at a predetermined position at a low cost, regardless of the use state of the liner tank 10, and is usually 0.1 to 1 mm, preferably A range of 0.3 to 0.6 mm.

The material of the can body 30 is not particularly limited as long as it is a material having high corrosion resistance, heat resistance, and mechanical strength, and examples thereof include stainless steel, carbon steel, and iron. Further, the thickness of the can body 30 is usually from 1 to 10 mm, preferably from 3 to 6 mm. When the thickness of the can body 30 is within the above range, the method of the present invention can be suitably employed.

A fluorine-based resin is exemplified as the resin which is excellent in chemical resistance of the lining layer 20. Examples of the fluorine-based resin include tetrafluoroethylene/perfluoroalkyl vinyl ether copolymer (PFA), polytetrafluoroethylene (PTFE), tetrafluoroethylene/hexafluoropropylene copolymer (FEP), and tetrafluoroethylene. Ethylene/ethylene copolymer (ETFE), polyvinylidene fluoride (PVDF), polychlorotrifluoroethylene (PCTFE), chlorotrifluoroethylene/ethylene copolymer (ECTFE).

Further, the thickness of the backing layer 20 is preferably in the range of 2 to 6 mm. When the thickness of the backing layer 20 is within the above range, the method of the present invention can be suitably applied.

When the thickness of the lining layer 20 is less than 2 mm, the phenomenon of uneven temperature is likely to occur on the outer surface 10A of the lining groove. When the non-destructive inspection is performed with high precision, there are the following cases: (A) outside the lining groove The amount of energy required to heat or cool the surface 10A may increase, or (B) the amount of energy required to heat or cool the contents when supplied to the interior 150 of the lining tank may increase.

Further, when the thickness of the lining layer is more than 6 mm, there are cases where (A) heat is hard to be transmitted from the lining outer surface 10A to the inner surface 10B, or (B) heat is hard to be transmitted from the lining outer surface 10A to The groove inner surface 10B is lined, and the temperature distribution of the pad outer surface 10A becomes small at the time of non-destructive inspection.

(infrared temperature recorder)

The external temperature recorder 90 used in the present invention is not particularly limited, and examples thereof include commercially available products such as "TVS-200EX" (manufactured by Nippon Aeronautical Electronics Co., Ltd.) and "FSV-7000S" (manufactured by apiste).

The infrared temperature recorder 90 can be freely moved in accordance with the measurement position (inspection portion) of the padding tank 10 as needed, and can be used anywhere as long as it is a 100V power source or a battery. Therefore, the detection of the floating portion 60 can be easily performed without the need to suspend the use of the lining tank 10 in use, and without the need to take the medicinal solution.

The distance of the infrared temperature recorder 90 from the outer surface 10A of the lining groove 10 belonging to the observation object is usually set in the range of 0.1 to 100 mm, preferably 0.3 to 3 mm. When the installation location of the infrared temperature recorder 90 is within the above range, the position and range of the floating portion 60 can be accurately detected.

(mask tape for infrared reflection prevention: see Fig. 4 and Fig. 5)

In general, when the low emissivity of the can body 30 of the lining tank 10 is 0.5 or less (for example, the stainless steel is 0.45), the substance is observed, and the outside of the tank 10 (distance) exists. When an infrared source such as a person (observer) is used, the lining outer surface 10A may reflect infrared rays emitted from the infrared ray generating source toward the lining outer surface 10A.

Therefore, the infrared temperature recorder 90 senses the reflected infrared rays, and it is difficult to accurately measure the temperature distribution of the pad outer surface 10A.

Therefore, the following method can be employed: (a) For example, the infrared reflection preventing mask tape 80 shown in Figs. 4 and 5 is attached to the outer surface 10A of the pad, and the paint having a high emissivity is applied. The emissivity of the lining outer surface 10A is set to be equal to or greater than a predetermined value; or (b) the infrared ray temperature recorder 90 belonging to the measuring device and the entire circumference of the lining groove 10 to be measured are surrounded by a dark curtain.

Among them, since the infrared reflection preventing mask tape 80 is thin and has good thermal conductivity, it is preferable to measure the temperature distribution of the outer surface 10A of the lining groove. Therefore, the infrared reflection preventing mask tape 80 can be attached to the outer surface 10A of the lining groove, which is preferable from the viewpoint of measurement accuracy and simplicity.

The infrared reflection preventing mask tape 80 has a tendency to be heat-resistant and does not reflect infrared rays, and the heat transmitted from the pad outer surface 10A appears more rapidly on the surface of the mask tape 80, and The peeling property of the outer surface 10A of the lining groove is good, and the residual paste does not generate after peeling, that is, it is not specifically limited. The commercially available product such as the product name "printed with "Scotch" and protective tape No. 341J" (manufactured by Sumitomo 3M Co., Ltd.) is exemplified.

The emissivity of the infrared reflection preventing mask tape 80 is preferably 0.7 or more, and more preferably 0.9 or more.

By attaching the infrared reflection preventing mask tape 80 to the outer surface 10A of the lining groove, the boundary between the whole 50 of the lining layer 20 and the floating portion 60 can be well discriminated, and the accuracy can be more accurately detected. The position and extent of the floating portion 60 of the backing layer 20.

(non-destructive inspection method (A))

The non-destructive inspection method (A) of the lining groove of the present invention measures the heat transfer speed from the outer surface of the lining groove to the inner surface of the lining groove by the lining layer in the peeled state by using an infrared temperature recorder. The surface temperature distribution due to the unevenness is detected, and the floating portion of the backing layer is detected (hereinafter also referred to as "the invention (A)".

In particular, it is preferred to heat or cool the outer surface of the lining groove, and to measure the heat transfer speed of the lining layer due to the peeling state to the inner surface of the lining groove by using an infrared temperature recorder. The surface temperature distribution due to unequalness is detected, and the floating portion of the lining layer is detected.

(Storage for padded tank: refer to Figure 1)

The contents accommodated in the lining tank 10 include, for example, a chemical liquid such as hydrochloric acid, nitric acid, hydrofluoric acid or hydrogen peroxide water, a liquid such as water, or a gas such as air or nitrogen.

The temperature of the above-mentioned storage material itself is not particularly limited, and for example, it is usually about 0 to 50 ° C immediately before the non-destructive inspection. In the invention (A), the non-destructive inspection of the lining tank 10 is carried out in a temperature range which does not adversely affect the characteristics of the contents.

In the present invention (A), when the entire interior 150 of the lining tank is filled with an object (for example, a liquid or a gas), the outer surface 10A of the lining groove 10 of the detecting object is uniformly heated or cooled regardless of which portion. Thereby, the temperature difference between the outer surface 50X of the lining of the whole 50 and the outer surface 60X of the grooving groove of the floating portion 60 can be expanded in a short time. That is, it is preferable to uniformly heat or cool the entire outer surface 10A of the lining groove in order to accurately measure the surface temperature distribution of the groove 10.

Further, as described above, it is necessary to maintain the purity of the contained chemical liquid in the lining tank 10 used in the chemical liquid supply system for semiconductor manufacturing. Further, the chemical liquid is corrosive to the can body 30 due to the type or state of the chemical liquid, and is toxic to the human body and the like. Therefore, from the viewpoint of preventing environmental pollution, it is difficult to lining at the installation place. The case where the slot 10 is open.

Therefore, in the lining tank 10 in the operation of the chemical supply system, it is preferable to detect the floating portion 60 of the lining layer 20 without opening the groove 10.

For example, in the above-mentioned chemical liquid, particularly since hydrochloric acid, nitric acid, and hydrofluoric acid easily penetrate the backing layer 20, the floating portion 60 is easily generated in the backing layer 20. Further, the chemical liquid is corrosive to the metal can body 30 and is toxic to the human body. Therefore, from the viewpoint of preventing environmental pollution, it is preferable that the lining tank 10 is not opened at the installation place. Lower (that is, the sealed state of the cover (not shown) of the groove 10 is removed), and the floating portion 60 of the lining layer 20 is detected.

Further, generally, when the lining tank 10 is manufactured, the presence or absence of the floating portion 60 of the lining layer 20 due to the subsequent failure is checked, and it is performed before the shipment of the tank 10. In this case, from the viewpoint of avoiding contamination of the inner portion 150 of the lining groove, it is preferable to check the presence or absence of the floating portion 60 of the lining layer 20 without opening the groove 10.

(Using the condition of the groove)

As far as the use condition of the lining tank 10 is concerned, for example, there are the following cases:

(1) The storage object is air, and the interior of the lining tank 150 is entirely filled with air, and the phase in contact with the inner surface 10B of the lining tank is in the gas phase;

(2) The storage object is a gas other than air, and the entire interior 150 of the lining tank is filled with the storage object, and the phase in contact with the inner surface 10B of the lining groove is in a gaseous phase;

(3) The storage contains the liquid medicine, water and other liquids, (3-1) the liquid 110 is accommodated in the lower portion of the interior 150 of the lining tank, and the upper portion of the lining tank 150 is filled with the gas 100, (3- 2) The case where the entire interior 150 of the lining tank is filled with the liquid 110 (not shown);

In the present invention (A), when the condition of the contents of the inner portion 150 of the lining tank is any of the above cases, the method of the invention (A) can be applied, and the floating portion of the lining layer 20 can be accurately detected. 60 location and range.

For example, in the case of the above (3-1), as shown in Fig. 6, when the chemical liquid is contained in the interior 150 of the lining tank to a predetermined height, the contents which are in contact with the inner surface 10B of the lining groove are The outer surface 120A of the groove corresponding to the portion of the gas 100 or the outer surface 125A of the groove corresponding to the portion of the inner surface 10B of the inner liner 10b which is the liquid 110 may be separately heated or cooled. Each surface 120A or 125A can accurately detect the position and extent of the floating portion 60 of the backing layer 20.

(heating method)

In the present invention (A), in the non-destructive inspection of the lining tank 10, in the method of heating the lining outer surface 10A, for example, (a) the temperature higher than the outer surface 10A of the tank is exemplified. a method in which the heating medium contacts the outer surface 10A of the groove; (b) a method of radiant heating the outer surface 10A of the groove by a halogen heater or the like; (c) convection heating the outer surface 10A of the groove by a dryer or the like. The method.

The heating medium is not particularly limited as long as it can uniformly heat the entire outer surface 10A of the lining tank, and may be, for example, a sheet having flexibility to be attached to the curved surface of the lining tank 10. Things. In the case of the above-mentioned sheet, a sheet material composed of a resin material having flexibility can be maintained at a constant temperature, and it is preferable because of operability, and specifically, a silicone sheet or a polyurethane sheet can be cited.

The heating medium can be set to a target temperature, for example, by being placed in a low-temperature dryer or immersed in a thermostatic chamber. In addition, as for the heating medium, a heat source may be used in the medium, and for example, a rubber heater (SAMICON 230 (trade name) manufactured by Sakaguchi Electric Co., Ltd.) may be used.

(Cooling method)

In the invention (A), in the non-destructive inspection of the lining tank 10, in the method of cooling the lining outer surface 10A, for example, (a) lowering the temperature than the outer surface 10A of the tank is exemplified. a method of contacting the cooling medium with the outer surface 10A of the groove; (b) a method of convective cooling the outer surface 10A of the groove by a point cooler; (c) applying a volatile organic solvent such as ethanol to heat the gas The method of cooling.

The cooling medium is not particularly limited as long as it can uniformly cool the entire outer surface 10A of the lining groove, and may be, for example, a sheet having flexibility to be attached to the curved surface of the lining groove 10. Things. In the case of the above-mentioned sheet, a sheet material composed of a resin material having flexibility can be maintained at a constant temperature, and it is preferable because of operability, and specifically, a silicone sheet or a polyurethane sheet can be cited.

The cooling medium can be set to a desired temperature by, for example, immersing in a constant temperature bath or the like.

In any of the heating method and the cooling method, (a) the heating medium having a temperature higher than the temperature of the outer surface 10A of the groove or the lower temperature than the outer surface 10A of the groove is set to be uniform. The method of contacting the outer surface 10A of the groove with the medium can be uniformly heated or cooled while the temperature of the outer surface 10A of the groove is uniform. Therefore, the position and range of the floating portion 60 of the lining layer 20 can be accurately detected.

Heating/Cooling Conditions

(1) In the invention (A), the temperature (α ₀ ) of the outer surface 50X of the liner 50 before the measurement (that is, before heating or cooling), and the measurement (that is, after heating or cooling) The absolute value (∣α ₀ -α ₁ ∣) of the difference of the temperature (α ₁ ) of the outer surface 50X of the liner of the whole 50 is increased from the measurement accuracy to the storage and the lining layer 20 From the viewpoint of adverse effects and improvement in energy efficiency, etc., it is preferably 1.5 ° C or more, more preferably 2 to 30 ° C, and most preferably 5 to 10 ° C.

(2) In the invention (A), the temperature (α ₁ ) of the outer surface 50X of the lining groove 50 after heating or cooling, and the outer surface of the lining groove of the floating portion 60 after heating or cooling The absolute value (∣α ₁ -β ₁ ∣) of the difference in temperature (β ₁ ) of 60X is correct and easy to detect by the infrared temperature recorder of the floating portion 60, and the measurement is made rapid. It is preferably 0.3 ° C or more, more preferably 1 to 10 ° C, most preferably 2 to 5 ° C. Further, although the temperature difference (∣α ₁ -β ₁ ∣) differs depending on the thickness or material of the can body 30, it is reduced with time (close to 0). Therefore, it is preferable to efficiently detect the time zone of the floating portion 60 of the backing layer 20, that is, the above temperature difference, after the outer surface 10A of the lining groove 10A is heated or cooled. ₀ -β ₁ ∣) is the largest time zone for non-destructive inspection with good accuracy.

Specifically, it is preferred to use the infrared temperature recorder 90 after heating or cooling the outer surface 10A of the lining tank, preferably just after 10 minutes, more preferably within 5 minutes, preferably within 5 minutes. The temperature distribution of the outer surface 10A of the liner was measured.

(3) In the invention (A), the temperature (α ₀ ) of the outer surface 50X of the liner 50 before the measurement (that is, before heating or cooling) and the temperature of the medium for heating or cooling ( The absolute value of the difference of γ ₀ ) (∣α _{0 -} γ ₀ ∣) is preferable because the detection by the infrared temperature recorder of the floating portion 60 is accurate and easy, and the measurement is made rapid. It is 5 ° C or more, more preferably 10 to 50 ° C.

(4) In the heating method and the cooling method, when the temperature of the outer surface 10A of the lining tank is too high, the workability and the safety of the operator are deteriorated, and the chemical liquid and the lining layer 20 are adversely affected. And doubts about the deterioration of energy efficiency. Further, when the temperature of the outer surface 10A of the lining groove is too low, there is a problem that dew condensation occurs on the outer surface 10A of the lining groove, and the surface temperature distribution cannot be accurately measured.

Therefore, although it is different depending on the installation place or the environment of the lining tank 10, if the temperature of the lining outer surface 10A at the time of measurement is 0 to 80 ° C, the non-destructive inspection can be suitably performed.

(non-destructive inspection method (B))

The non-destructive inspection method (B) of the lining groove of the present invention measures the heat transfer speed from the inner surface of the lining groove to the outer surface of the lining groove by the lining layer in the peeled state by using an infrared temperature recorder. The surface temperature distribution due to the unequality is detected, and the floating portion of the lining layer is detected (hereinafter also referred to as "the present invention (B)".

In particular, it is preferable that the outer surface of the groove is heated or cooled from the inside of the groove by supplying the stored matter to the inside of the groove without opening the liner.

In the present invention (B), the "housing" means an inspection storage for heating or cooling the outer surface 10A of the tank to the inside 150 of the tank. Such an inspection object is generally used without any concern that contamination of the interior 150 of the liner tank is required, and it is not necessary to substantially clean the contents of the interior 150 of the tank after the non-destructive inspection.

(Storage for padded tank: refer to Figure 2 and Figure 4)

In the present invention (B), it is preferable that the storage material having a temperature difference from the temperature of the outer surface 10A of the lining tank is supplied to the inside of the measuring object without the lining tank 10 being opened. 150, more preferably, the container is supplied to the inside of the tank 150 through a chemical supply line 160 (not shown) in a state in which the lid (not shown) of the tank 10 is removed. The entire inner surface 10B of the groove 10 in which the portion of the container is accommodated is heated or cooled.

Therefore, the temperature difference between the padded outer surface 50X of the health 50 and the padded outer surface 60X of the floating portion 60 can be expanded in a short time.

In particular, it is necessary to maintain the purity of the contained chemical liquid in the lining tank 10 used in the chemical liquid supply system for semiconductor manufacturing. Further, depending on the type and state of the chemical liquid, the chemical liquid is corrosive to the can body 30 and is toxic to the human body and the like. Therefore, from the viewpoint of preventing environmental pollution, it is difficult to lining at the installation place. The case where the slot 10 is open.

Therefore, in the lining tank 10 in the operation of the chemical supply system, it is preferable to use the same chemical solution as the chemical solution to be stored as an object for inspection (for heating or cooling the tank 10). The chemical supply line 160 is supplied to the inside of the tank 150, and the floating portion 60 of the liner layer 20 is detected without opening the groove 10.

Examples of the storage material supplied to the lining tank 10 include a chemical liquid such as hydrochloric acid, nitric acid, hydrofluoric acid, or hydrogen peroxide water, a liquid such as water, or a gas such as air or nitrogen. Among them, from the viewpoint that heat is easily conducted to the can body 30 of the lining tank 10, the above-mentioned storage material is preferably a liquid.

The water may be tap water or pure water, but it is preferable to use pure water from the viewpoint of maintaining the purity (non-contamination) of the inner tank 150.

In the above-mentioned chemical liquid, in particular, hydrochloric acid, nitric acid, and hydrofluoric acid easily penetrate the backing layer 20, so that the floating portion 60 of the backing layer 20 is likely to be generated. Further, the chemical liquid is corrosive to the metal can body 30 and is toxic to the human body. Therefore, from the viewpoint of preventing environmental pollution, it is preferable that the lining tank 10 is not opened at the installation place. Lower (that is, the sealed state of the cover (not shown) of the groove 10 is removed), and the floating portion 60 of the lining layer 20 is detected.

Further, generally, when the lining tank 10 is manufactured, the presence or absence of the floating portion 60 of the lining layer 20 due to the subsequent failure of the lining layer 20 is checked, and it is performed before the shipment of the tank 10. In this case, it is preferable to use pure water from the viewpoint of safety in handling of the lining tank 10, simplicity, and low contamination of the inside of the tank.

Further, when the lining tank 10 is shipped, the inside of the tank 150 is washed with pure water. In this case, from the viewpoint of avoiding contamination of the inside of the lining tank 150, it is preferable to inspect the lining layer 20 together when the tank interior 150 is cleaned using pure water without opening the tank 10. The floating portion 60.

(heating/cooling conditions)

(1) In the present invention (B), the difference between the temperature (α ₀ ) of the outer surface 50X of the padded groove 50 before the supply of the stored product and the temperature (γ ₀ ) of the container before the supply is supplied The absolute value (∣α _{0 -} γ ₀ ∣) differs depending on the thickness of the can body 30 of the lining tank 10, the thickness of the lining layer 20, etc., but the measurement accuracy is improved, the energy efficiency at the time of inspection, and the like. From the viewpoint, it is preferably 1 ° C or more, more preferably 3 to 50 ° C, most preferably 10 to 20 ° C.

In this case, the temperature (γ ₀ ) of the stored product before the supply is not particularly limited as long as the temperature of the stored product can be safely treated. For example, in the case of water, it is preferably 5 to 80 ° C. Further, in the lining tank used in the chemical liquid supply system or the like for manufacturing semiconductors in which a chemical solution such as hydrochloric acid, nitric acid or hydrofluoric acid is used as a storage material, in order to reduce adverse effects on the chemical liquid or the backing layer 20, The temperature (γ ₀ ) of the stock before the supply is preferably 5 to 40 ° C.

(2) In the invention (B), the temperature (α ₁ ) of the outer surface 50X of the liner 50 after the supply of the contents, and the outer surface of the grooved portion of the floating portion 60 after the supply of the container are provided. The difference in temperature (β ₁ ) of 60X differs depending on the thickness of the can body 30, the thickness of the liner layer 20, and the like, but is reduced with time (close to 0).

Therefore, it is preferable that the time zone of the floating portion 60 of the backing layer 20 can be efficiently and accurately detected by the infrared temperature recorder 90 after the storage object is supplied to the interior 150 of the lining tank, that is, The above temperature difference (∣α ₁ -β ₁ ∣) is the largest time zone for non-destructive inspection.

Specifically, it is preferable to supply the stored matter to the inside of the lining tank 150, preferably to within 10 minutes after the supply of the accommodating product, and more preferably within 3 minutes after the supply of the accommodating object, using infrared rays. The temperature recorder 90 measures the temperature distribution of the outer surface 10A of the pad.

In particular, when the stored material is a liquid, after the liquid is supplied to the inside of the lining tank 150 and the liquid level of the inside of the tank 150 reaches the floating portion 60, it is preferable that the liquid level just reaches the floating portion 60 to 10 Within minutes, more preferably within 2 minutes to 5 minutes after the liquid level reaches the floating portion 60, preferably within 2 minutes to 3 minutes after the liquid level reaches the floating portion 60, the lining is measured by the infrared temperature recorder 90. The temperature distribution of the outer surface 10A of the groove.

(3) In the present invention (B), the temperature (α ₀ ) of the outer surface 50X of the liner 50 before the supply of the contents, and the outer surface of the liner of the entire 50 after the supply of the contents are provided. The larger the difference of the temperature (? ₁ ) of 50X, the clearer the temperature distribution of the outer surface 10A of the lining groove, and the position and extent of the floating portion 60 of the lining layer 20 can be accurately detected.

(Example)

Hereinafter, the non-destructive inspection method of the lining groove of the present invention will be described in more detail based on the examples, but the present invention is not limited to the embodiments.

[A1-1] <Lined tank>

The lining tank 10 is made of a barrier rubber-based adhesive and is in the can body 30 (capacity 300 L, inner diameter 600 mm, height 1100 mm, thickness 4 mm, material SUS304, thermal conductivity 16.3 W/m ‧ ° C (20 ° C)) The surface 30B was formed with a fluororesin lining groove of a layer (thickness: 2 mm) composed of a lining layer 20 [PFA (tetrafluoroethylene ‧ perfluoroalkyl vinyl ether copolymer).

<Floating part: Refer to Fig. 7>

The backing layer 20 at the position corresponding to the outer surface 130A of the padding groove is completely peeled off from the adhesive 70 to form the floating portion 60. The floating portion 60 has a horizontal w: 150 mm × a vertical h: 100 mm × a floating height t in the direction of the grooved groove: a size of 5 mm.

<Shield tape for infrared reflection prevention: Refer to Fig. 7>

The protective tape No. 341J (manufactured by Sumitomo 3M Co., Ltd.) having an emissivity of 0.95 is attached to the outer surface 130A of the lining groove at the position corresponding to the floating portion 60. The position indicated by the reference numeral 81 of the outer surface 10A of the lining groove is used as the mask tape 80 for preventing infrared reflection.

<Infrared Temperature Recorder>

The infrared temperature recorder 90 is "TVS-200EX" (manufactured by Nippon Aeronautical Electronics Co., Ltd.) and has a resolution of 0.2 °C. Further, the infrared temperature recorder 90 is disposed at a position 1 m away from the outer surface 10A of the pad.

<heating (cooling) media>

The medium for heating (cooling) was a polyurethane sheet (MITSUMI Co., Ltd.) having a width of 500 mm × a length of 200 mm × a thickness of 5 mm. The polyurethane sheet was immersed in a thermostat set to a predetermined temperature for 20 minutes, and set to the temperature described in "The temperature of the polyurethane sheet (γ ₀ )" in the first table.

<Measurement>

The interior of the lining tank 150 is filled with air. The surface temperature (α ₀ ) of the padded outer surface 50A in all of the health 50 in this state is shown in the first table.

Next, the polyurethane sheet is brought into contact with the outer surface 130A of the grooved outer surface 10A for 100 seconds at the position indicated by the symbol 140 of the outer surface 10A of the groove to heat the outer surface of the groove. 10A (refer to Figure 7).

Next, the polyurethane sheet is removed, and the temperature distribution of the outer surface 10A of the liner is started by the infrared temperature recorder 90 (Fig. 8 is a thermal image immediately after the start of measurement). Here, in the first table, the surface temperature (α ₁ ) of the outer surface 50X of the lining groove 50 in the entire quilt 50 after the removal of the urethane sheet is shown, and the outer surface 60X (130A) of the groove in the floating portion 60 Surface temperature (β ₁ ).

<evaluation>

The case where the position and range of the floating portion 60 can be clearly specified is "A", and the position where only the position of the floating portion 60 can be specified is "B", and the position of the floating portion 60 cannot be specified. The range is set to "C".

The evaluation results are shown in the first table.

[A1-1 to A1-9]

In the above [A1-1], the surface temperature (α ₀ ) of the outer surface 50X of the lining groove of all 50 of the temperature of the polyurethane sheet (γ ₀ ) and the heating (cooling) is set as shown in the first table. The measurement and evaluation of the floating portion 60 of the lining layer 20 were carried out in the same manner as in [A1-1] except for the temperature.

The measurement results and the evaluation results are shown in the first table.

[A2-1 to A2-9]

In the above [A1-1], the surface temperature of the entire outer surface 50X of the liner 50 is filled with water, the entire interior of the liner tank 150, and the temperature of the polyurethane sheet (γ ₀ ) and the heat (cooling). (α ₀ ) The measurement and evaluation of the floating portion 60 of the backing layer 20 were performed in the same manner as the above [A1-1] except that the temperature shown in the second table was set.

The measurement results and the evaluation results are shown in the second table.

[A3-1 to A3-9]

In the above [A1-1], the inner surface 30B of the can body 30 (having a capacity of 2,500 L, an inner diameter of 1300 mm, a height of 2612 mm, a thickness of 4 mm, and a material of SUS304) was formed with a backing layer in addition to a spacer epoxy-based adhesive. 20 [PTFE (polytetrafluoroethylene) layer (thickness 3mm)] fluororesin lining groove as the lining groove 10, and the temperature (γ ₀ ) of the polyurethane rubber sheet and the sound before heating (cooling) The surface temperature (α ₀ ) of the lining outer surface 50X of the portion 50 is set to be the temperature shown in the third table, and the measurement and evaluation of the floating portion 60 of the lining layer 20 are performed in the same manner as the above [A1-1].

Further, in the fluororesin lining groove, a floating portion 60 having an inner diameter of 120 mm × a floating height of 2 mm in the groove inner direction was formed.

The measurement results and evaluation results are shown in Table 3.

[A4-1 to A4-9]

In the above [A3-1], the surface temperature of the entire outer surface 50X of the liner 50 is filled with water, the entire interior of the liner tank 150, and the temperature of the polyurethane sheet (γ ₀ ) and the heat (cooling). (α ₀ ) The measurement and evaluation of the floating portion 60 of the backing layer 20 were performed in the same manner as the above [A3-1] except that the temperature shown in the fourth table was set.

The measurement results and evaluation results are shown in Table 4.

[Table 1]

[Table 2]

[Table 3]

[Table 4]

[B1-1]

Fig. 5 is a view showing the state in which the infrared reflection preventing mask tape 80 is attached to the position indicated by the reference numeral 81 on the outer surface 10A of the lining to cover a portion (half) 60A of the floating portion 60 of the lining groove 10. Illustration of the diagram. Figure 4 is a schematic cross-sectional view of the lining slot 10. Fig. 9 is a thermal image recorded by the infrared temperature recorder 90 of the lining tank 10 just after the water is filled. Figure 10 is a thermal image recorded by the infrared temperature recorder 90 of the liner tank 10 after 5 minutes of full water.

<Lined tank>

The lining tank 10 is formed of a lining layer 20 [PFA (tetrafluorocarbon) on the inner surface 30B of the can body 30 (capacity: 200 L, inner diameter: 600 mm, height: 1220 mm, thickness: 4 mm, material: SUS304) using a barrier rubber-based adhesive. A fluororesin-lined groove of a layer (thickness 2 mm) composed of a vinyl ‧ perfluoroalkyl vinyl ether copolymer). At this time, the initial temperature (α ₀ ) of the outer surface 50X of the padded all 50 was 16 °C.

<floating part>

At a position indicated by reference numeral 60 in Fig. 5, a portion of the backing layer 20 is intentionally peeled off from the adhesive layer 70 by a skid stick to form an air/exuding liquid layer 40, whereby the floating portion 60 is formed. A cross-sectional view of the floating portion 60 is shown in Fig. 4. After the air/exudate layer 40 (the floating portion 60 of the backing layer 20) is formed, the sled stick is pulled out, and one portion of the backing layer 20 is completely peeled off from the adhesive layer 70. The floating portion 60 has a horizontal w: 150 mm × a vertical h: 370 mm × a floating height t in the direction of the inner groove: a size of 20 mm.

<Infrared reflection prevention mask tape 80>

As shown in Fig. 5, by coating one half of the width w (the position indicated by the symbol 60A) of the floating portion 60 formed as described above, the emissivity of 0.95 is "printed with "Scotch", and the protective tape No. .341J (Sumitomo 3M (manufactured by the company)) is attached to the position indicated by the reference numeral 81 on the outer surface 10A of the lining groove, and serves as a mask 80 for preventing infrared reflection.

<housing>

For the storage to be supplied to the lining tank 10, tap water (water temperature (γ ₀ ) 10 ° C, supply speed 30 L/min) was used.

<Infrared Temperature Recorder>

The infrared temperature recorder 90 is "TVS-200EX" (manufactured by Nippon Aeronautical Electronics Co., Ltd.) and has a resolution of 0.2 °C. Further, the infrared temperature recorder 90 is disposed at a position 2.7 m from the outer surface 10A of the pad.

<Measurement>

Under the above conditions, the tap water was supplied to the interior 150 of the lining tank, and the thermal image recorded by the infrared temperature recorder 90 of the outer surface 10A of the lining was observed.

Fig. 9 is a thermal image recorded by the infrared temperature recorder 90 of the lining tank 10 just after the water is filled. In the attaching portion 81 of the infrared ray reflection preventing mask tape 80, the boundary between the health all 50 and the floating portion 60A is apparent, but in the non-attachment portion of the masking tape, all of the 50 and the floating portion are The realm of 60A is not very obvious.

Figure 10 is a thermal image recorded by the infrared temperature recorder 90 of the liner tank 10 after 5 minutes of full water. In the attaching portion 81 of the infrared ray reflection preventing mask tape 80, the floating portion 60A can be completely observed, and the front end of the floating portion 60 can be specified, and the floating portion 60A can be accurately detected. Location and scope. However, in the non-attachment portion 82 of the infrared ray reflection preventing masking tape 80, the boundary of the floating portion 60B is not very conspicuous, and although the floating portion 60B can be detected, the floating is detected from the accuracy. From the viewpoint of the position and range of the portion 60B, it is a slightly unsatisfactory result.

[B2-1]

11 is a state in which the tapping tank 10 is not opened (that is, a state in which the lid of the tank 10 is not removed), and the tap water is supplied to the tank interior 150 by the chemical supply line 160. The water surface 170 of the interior 150 of the tank reaches the thermal image recorded by the infrared temperature recorder 90 of the outer surface 10A of the groove 1 minute after the floating portion 60.

<Lined tank>

The lining tank 10 is formed by a lining layer 20 [PFA (tetrafluoroethylene ‧ perfluoroalkyl vinyl ether) on the inner surface 30B of the can body (capacity 300 L, inner diameter 600 mm, height 1100 mm, thickness 4 mm, material SUS304) A fluororesin-lined groove of a layer (thickness 2 mm) composed of a copolymer).

A floating portion 60 having a meandering width of 300 mm × vertical h: 70 mm is formed at a height of 455 mm from the bottom surface of the can body 30. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the padded all 50 was 24.6 °C.

<Infrared reflection prevention mask tape>

By coating the entire surface of the floating portion 60, the "scotch" having an emissivity of 0.95 and the protective tape No. 341J (manufactured by Sumitomo 3M Co., Ltd.) are attached to the outer surface 10A of the lining groove as The mask tape 80 for infrared reflection prevention.

<housing>

For the storage to be supplied to the lining tank 10, tap water (water temperature (γ ₀ ) 76.4 ° C, supply speed 30 L/min) was used.

<Infrared Temperature Recorder>

The infrared temperature recorder 90 is "TVS-200EX" (manufactured by Nippon Aeronautical Electronics Co., Ltd., resolution: 0.1 ° C). Further, the infrared temperature recorder 90 is disposed at a position 2.7 m from the outer surface 10A of the pad.

<Measurement>

Under the above conditions, the tap water is supplied to the tank interior 150 by the chemical supply line 160 without opening the liner tank 10 (that is, the state in which the lid of the tank 10 is not removed). The thermal image recorded by the infrared temperature recorder of the outer surface 10A of the groove was observed.

As a result, the position and shape of the floating portion 60 can be clearly specified by the thermal image one minute after the water surface 170 reaches the floating portion 60. Further, three minutes after the water surface 170 reaches the floating portion 60, the position and shape of the floating portion 60 can be clearly specified by the thermal image. Further, after 5 minutes after the water surface 170 reaches the floating portion 60, the position and shape of the floating portion 60 can be clearly specified by the thermal image.

[B2-2]

In the lining tank 10 similar to the above [B2-1], the thermal image of the outer surface 10A of the lining groove was observed in the same manner as the above [B2-1]. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the liner 50 was 25.8 ° C, and the water temperature (γ ₀ ) of the tap water supplied to the tank 10 was 41.2 ° C.

The position and shape of the floating portion 60 can be clearly specified by the thermal image 1 minute after the water surface 170 reaches the floating portion 60, 3 minutes later, and 5 minutes later.

The results are shown in the fifth table.

[B2-3]

In the lining tank 10 similar to the above [B2-1], the thermal image of the outer surface of the lining tank was observed in the same manner as the above [B2-1]. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the liner 50 was 23.2 ° C, and the water temperature (γ ₀ ) of the tap water supplied to the tank 10 was 25.9 ° C.

One minute after the water surface 170 reaches the floating portion 60, the position of the floating portion 60 can be detected, but the shape of the floating portion 60 cannot be clearly specified. However, three minutes after the water surface 170 reaches the floating portion 60, the position and shape of the floating portion 60 can be clearly specified by the thermal image. Further, after 5 minutes after the water surface 170 reaches the floating portion 60, the position and shape of the floating portion 60 can be clearly specified by the thermal image.

The results are shown in the fifth table.

[B2-4]

In the lining tank 10 similar to the above [B2-1], the thermal image of the outer surface 10A of the lining groove was observed in the same manner as the above [B2-1]. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the liner 50 was 20.7 ° C, and the water temperature (γ ₀ ) of the tap water supplied to the tank 10 was 19.7 °C.

One minute after the water surface 170 reaches the floating portion 60, the floating portion 60 cannot be detected. However, after 3 minutes after the water surface 170 reaches the floating portion 60, the position of the floating portion 60 can be detected. Further, after 5 minutes after the water surface 170 reaches the floating portion 60, the floating portion 60 cannot be detected.

The results are shown in the fifth table.

[B2-5]

In the lining tank 10 similar to the above [B2-1], the thermal image of the outer surface 10A of the lining groove was observed in the same manner as the above [B2-1]. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the liner 50 of the whole 50 was 20.8 ° C, and the water temperature (γ ₀ ) of the tap water supplied to the tank 10 was 17.9 ° C.

The position and shape of the floating portion 60 can be clearly specified by the thermal image 1 minute after the water surface 170 reaches the floating portion 60, 3 minutes later, and 5 minutes later.

The results are shown in the fifth table.

[B2-6]

In the lining tank 10 similar to the above [B2-1], the thermal image of the outer surface 10A of the lining groove was observed in the same manner as the above [B2-1]. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the liner 50 was 22.4 ° C, and the water temperature (γ ₀ ) of the tap water supplied to the tank 10 was 12.9 ° C.

The position and shape of the floating portion 60 can be clearly specified by the thermal image 1 minute after the water surface 170 reaches the floating portion 60, 3 minutes later, and 5 minutes later.

The results are shown in the fifth table.

In the fifth table, the unit of temperature is °C.

A: The position and shape of the floating portion can be specified specifically.

B: The position of the specific floating portion can be specified.

C: The position and shape of the floating portion cannot be specified.

[B3-1]

In the lining tank 10 described below, the infrared reflection preventing mask tape 80 is attached to the entire surface of the covering floating portion 60 in the same manner as the above [B2-1], and the lining groove is observed by the infrared temperature recorder 90. Thermal image of outer surface 10A.

<Lined tank>

The lining groove 10 is formed of a lining layer 20 [PTFE] on the inner surface 30B of the can body (having a capacity of 2,500 liter, an inner diameter of 1300 mm, a height of 2612 mm, a thickness of 4 mm, a material of SUS304, and a thickness of 4 mm). A fluororesin lining groove of a layer (thickness: 3 mm) composed of (polytetrafluoroethylene).

A floating portion 60 having a size of 120 mm in inner diameter is formed at a height of 230 mm from the bottom surface of the can body 30 of the fluororesin lining groove. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the padded all 50 was 27.1 °C.

<housing>

For the storage to be supplied to the lining tank 10, tap water (water temperature (γ ₀ ) 61.2 ° C, supply speed 80 L/min) was used.

<Infrared Temperature Recorder>

The infrared temperature recorder 90 is "TVS-200EX" (manufactured by Nippon Aeronautical Electronics Co., Ltd.) and has a resolution of 0.2 °C. Further, the infrared temperature recorder 90 is disposed at a position 2 m away from the outer surface 10A of the pad.

<Measurement>

Under the above conditions, the tap water is supplied to the tank interior 150 by the chemical supply line 160 without opening the liner tank 10 (that is, the state in which the lid of the tank 10 is not removed). The thermal image recorded by the infrared temperature recorder of the outer surface 10A of the groove was observed.

As a result, the position and shape of the floating portion 60 can be clearly specified by the thermal image one minute after the water surface 170 reaches the floating portion 60. Further, three minutes after the water surface 170 reaches the floating portion 60, the position and shape of the floating portion 60 can be clearly specified by the thermal image. Further, after 5 minutes after the water surface 170 reaches the floating portion 60, the position and shape of the floating portion 60 can be clearly specified by the thermal image.

The results are shown in the sixth table.

[B3-2]

In the lining tank 10 similar to the above [B3-1], the thermal image of the outer surface 10A of the lining groove was observed in the same manner as the above [B3-1]. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the liner 50 was 27.1 ° C, and the water temperature (γ ₀ ) of the tap water supplied to the tank 10 was 40.0 °C.

The position and shape of the floating portion 60 can be clearly specified by the thermal image 1 minute after the water surface 170 reaches the floating portion 60, 3 minutes later, and 5 minutes later.

The results are shown in the sixth table.

[B3-3]

In the lining tank 10 similar to the above [B3-1], the thermal image of the outer surface 10A of the lining groove was observed in the same manner as the above [B3-1]. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the liner 50 was 25.2 ° C, and the water temperature (γ ₀ ) of the tap water supplied to the tank 10 was 23.9 ° C.

One minute after the water surface 170 reaches the floating portion 60, the floating portion 60 cannot be detected. However, after 3 minutes after the water surface 170 reaches the floating portion 60, the position of the floating portion 60 can be detected. Further, after 5 minutes after the water surface 170 reaches the floating portion 60, the floating portion 60 cannot be detected.

The results are shown in the sixth table.

[B3-4]

In the lining tank 10 similar to the above [B3-1], the thermal image of the outer surface 10A of the lining groove was observed in the same manner as the above [B3-1]. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the liner 50 was 25.5 ° C, and the water temperature (γ ₀ ) of the tap water supplied to the tank 10 was 22.8 ° C.

One minute after the water surface 170 reaches the floating portion 60, the position of the floating portion 60 can be detected. Further, three minutes after the water surface 170 reaches the floating portion 60, the position and shape of the floating portion 60 can be clearly specified by the thermal image. However, after 5 minutes after the water surface 170 reaches the floating portion 60, the shape of the floating portion 60 cannot be clearly specified.

The results are shown in the sixth table.

[B3-5]

In the lining tank 10 similar to the above [B3-1], the thermal image of the outer surface 10A of the lining groove was observed in the same manner as the above [B3-1]. At this time, the initial temperature (α ₀ ) of the outer surface 50X of the liner 50 was 25.3 ° C, and the water temperature (γ ₀ ) of the tap water supplied to the tank 10 was 20.1 ° C.

As a result, the position and shape of the floating portion 60 can be clearly specified by the thermal image 1 minute after the water surface 170 reaches the floating portion 60, 3 minutes later. However, after 5 minutes after the water surface 170 reaches the floating portion 60, the position of the floating portion 60 can be detected, but the shape of the floating portion 60 cannot be clearly specified.

The results are shown in the sixth table.

[B3-6]

In the lining tank 10 similar to the above [B3-1], the thermal image of the outer surface 10A of the lining groove was observed in the same manner as the above [B3-1]. At this time, the initial temperature (α ₀ ) of the outer surface 10A of the liner 50 was 25.3 ° C, and the water temperature (γ ₀ ) of the tap water supplied to the tank 10 was 14.9 ° C.

The position and shape of the floating portion 60 can be clearly specified by the thermal image 1 minute after the water surface 170 reaches the floating portion 60, 3 minutes later, and 5 minutes later.

The results are shown in the sixth table.

In the sixth table, the unit of temperature is °C.

A: The position and shape of the floating portion can be specified specifically.

B: The position of the specific floating portion can be specified.

C: The position and shape of the floating portion cannot be specified.

10. . . Slotted groove

10A. . . Lining outer surface

10B. . . Lining inner surface

20. . . Lining layer

30. . . Tank body

30A. . . Can outer surface

30B. . . Inner surface of the can

40. . . Air/exudate layer

50. . . Health

50X. . . The entire outer surface of the padded groove

60. . . Floating part

60A. . . Masking tape attachment portion for infrared reflection prevention of floating portion

60B. . . Non-attachment part of mask tape for infrared reflection prevention of floating part

60X. . . The outer surface of the grooved portion of the floating portion

70. . . Subsequent layer

80. . . Infrared reflection preventing mask tape

81. . . Infrared reflection prevention mask tape attachment portion

82. . . Infrared reflection prevention mask tape non-attachment part

90. . . Infrared temperature recorder

100. . . a gas phase portion of the air inside the lining tank

110. . . The liquid phase portion of the liquid medicine inside the liner tank

120A. . . The phase in contact with the inner surface of the padded groove is the outer surface of the grooved portion of the gas phase portion

125A. . . The phase in contact with the inner surface of the padded groove is the outer surface of the grooved portion of the liquid phase

130A. . . The outer surface of the groove corresponding to the floating portion formed in [A1-1]

140. . . Polyurethane sheet used in [A1-1]

150. . . Inside the lining tank (the accommodating part of the liquid medicine, etc.)

160. . . The liquid supply line 170 is lined with the water surface inside the groove

t. . . Height of the air/exudate layer (floating portion) in the direction of the groove

h. . . Length of the air/exudate layer (floating portion) in the longitudinal direction of the lining groove

w. . . Width of the air/exudate layer (floating portion) in the lateral direction of the lining groove

X. . . In the direction in which the floating portion penetrates the inside and outside of the lining groove

Y. . . In the direction of the inside and outside of the padding groove

Fig. 1 is a schematic longitudinal cross-sectional view showing the configuration of the inspection method (A) of the present invention.

Fig. 2 is a schematic longitudinal cross-sectional view showing the configuration of the inspection method (B) of the present invention.

Fig. 3 is a schematic cross-sectional view showing the constitution of the inspection method (A) of the present invention.

Fig. 4 is a schematic cross-sectional view showing the constitution of the inspection method (B) of the present invention.

Fig. 5 is an explanatory view showing a state in which a masking tape is attached to the outer surface of the lining groove to cover a portion (half) of the floating portion of the lining groove.

Fig. 6 is a schematic longitudinal sectional view showing a lining groove used in the present invention, and is an explanatory view showing a state in which a container is accommodated at a predetermined depth inside the groove.

Fig. 7 is an explanatory view showing the attached state of the mask tape and the polyurethane rubber sheet in the lining groove used in [A1-1].

Fig. 8 is a thermal image after the start of the measurement of [A1-1].

Figure 9 is a thermal image of the infrared temperature recorder attached to the outer surface of the liner after the water is filled in [B1-1].

Figure 10 is a thermal image of the infrared temperature recorder attached to the outer surface of the liner after 5 minutes of full water in [B1-1].

Fig. 11 is a thermal image of the infrared temperature recorder of the outer surface of the groove after the water surface inside the lining groove in [B2-1] reaches the floating portion for 1 minute.

10. . . Slotted groove

10A. . . Lining outer surface

10B. . . Lining inner surface

20. . . Lining layer

30. . . Tank body

30A. . . Can outer surface

30B. . . Inner surface of the can

40. . . Air/exudate layer

50. . . Health

50X. . . The entire outer surface of the padded groove

60. . . Floating part

60X. . . The outer surface of the grooved portion of the floating portion

70. . . Subsequent layer

150. . . Inside the lining tank (the accommodating part of the liquid medicine, etc.)

Claims (8)

A method for non-destructive inspection of a lining groove by using an infrared temperature recorder to measure the unevenness of the heat transfer speed of the lining layer due to the peeling state to the inner surface or the outer surface of the lining groove The surface temperature distribution of the outer surface of the liner is detected, and the floating portion of the lining layer is detected, wherein the infrared reflection preventing mask tape is attached to the outer surface of the lining groove, and the infrared temperature recorder is set to be The outer surface of the lining groove is spaced outwardly by a predetermined distance. The method for non-destructive inspection of a lining tank according to claim 1, wherein the outer surface of the lining tank is heated or cooled, and an infrared temperature recorder is used to measure the conveyance of the lining layer due to the peeling state. The surface temperature distribution due to the uneven heat transfer speed of the inner surface of the lining groove is detected, and the floating portion of the lining layer is detected. For example, in the non-destructive inspection method of the lining groove of claim 2, wherein the outer surface of the lining groove is heated or cooled, and the lining layer of the lining groove before heating or cooling is not peeled off. The absolute value of the difference between the temperature of the outer surface of the groove and the temperature of the outer surface of the groove after heating or cooling is 1.5 ° C or higher. A non-destructive inspection method for a liner tank according to the second or third aspect of the patent application, wherein the temperature of the heating medium is higher than the temperature of the outer surface of the liner tank or the temperature of the outer surface of the liner tank The low temperature cooling medium contacts the outer surface of the tank to heat or cool the outer surface of the tank. A method for non-destructive inspection of a lining tank according to the fourth aspect of the invention, wherein the heating medium or the cooling medium is a sheet material. A non-destructive inspection method according to the first aspect of the invention, wherein the grooving groove is not opened, and the outer surface of the groove is heated or cooled from the inside of the groove by supplying the container to the inside of the groove. The non-destructive inspection method of the lining tank of the sixth aspect of the patent application, wherein the temperature of the storage object and the temperature of the outer surface of the groove are not peeled off from the lining layer of the lining groove before the supply of the storage object The absolute value of the difference is 1 ° C or more. The non-destructive inspection method of the liner tank of the first, second or sixth aspect of the patent application, wherein the lining tank is used in a chemical liquid tank of the chemical liquid supply system.