TWI401598B - Projective-capacitive touch panel and fabrication method thereof - Google Patents
Projective-capacitive touch panel and fabrication method thereof Download PDFInfo
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Description
本案是關於一種觸控面板及其製造方法,特別是關於一種投射電容式觸控面板及其製造方法。The present invention relates to a touch panel and a method of fabricating the same, and more particularly to a projected capacitive touch panel and a method of fabricating the same.
投射電容式觸控面板(PROJECTIVE-CAPACITIVE TOUCH PANEL)是以傳統的電容式觸控面板為基礎,再增加二組存在於不同平面而又彼此垂直的透明導線(X、Y)以及驅動線所構成。The projected capacitive touch panel (PROJECTIVE-CAPACITIVE TOUCH PANEL) is based on a conventional capacitive touch panel, and is further composed of two sets of transparent wires (X, Y) and driving wires which exist in different planes and are perpendicular to each other. .
請參閱第一圖,其為習用的投射電容式觸控面板之結構的示意圖。在第一圖中,投射電容式觸控面板1主要是依序由作為基板的玻璃基材11、作為第一圖案層的X圖案層12、作為第一保護層的X圖案保護層13、金屬導線層14、作為第二保護層的金屬導線保護層15、作為第二圖案層的Y圖案層16、以及作為絕緣層的頂塗層17所構成。Please refer to the first figure, which is a schematic diagram of the structure of a conventional projected capacitive touch panel. In the first figure, the projected capacitive touch panel 1 is mainly composed of a glass substrate 11 as a substrate, an X pattern layer 12 as a first pattern layer, an X pattern protection layer 13 as a first protective layer, and a metal. The wire layer 14, the metal wire protective layer 15 as the second protective layer, the Y pattern layer 16 as the second pattern layer, and the top coat layer 17 as the insulating layer are formed.
請參閱第二圖,其為與第一圖之投射電容式觸控面板相對應的製造流程圖。以下配合參閱第一圖而說明第二圖的習用製程。Please refer to the second figure, which is a manufacturing flow diagram corresponding to the projected capacitive touch panel of the first figure. The conventional process of the second figure will be described below with reference to the first figure.
(步驟21):投入作為基板的玻璃基材11;(Step 21): putting a glass substrate 11 as a substrate;
(步驟22):在玻璃基材11上蒸鍍一銦錫氧化物(ITO)層,利用某種光阻劑(A)在該ITO層上進行塗布、露光、顯影、蝕刻及剝膜等製程,藉以在玻璃基材11上形成作為第一圖案層的X圖案層12。要注意的是,在此步驟中使用了第一道光罩。(Step 22): depositing an indium tin oxide (ITO) layer on the glass substrate 11, and applying, exposing, developing, etching, and stripping the ITO layer using a photoresist (A) The X pattern layer 12 as the first pattern layer is formed on the glass substrate 11. It should be noted that the first mask was used in this step.
(步驟23):利用某種光阻劑(B)在X圖案層12上進行塗布、露光、顯影、蝕刻及剝膜等製程,藉由形成作為第一保護層的X圖案保護層13。要注意的是,在此步驟中使用了第二道光罩。(Step 23): a process of coating, exposing, developing, etching, and stripping is performed on the X pattern layer 12 by using a photoresist (B) by forming an X pattern protective layer 13 as a first protective layer. It should be noted that a second mask is used in this step.
(步驟24):在X圖案保護層13上濺鍍一金屬層,利用某種光阻劑(B)在該金屬層上進行塗布、露光、顯影、蝕刻及剝膜等製程,藉以在X圖案保護層13上形成金屬導線層14。要注意的是,在此步驟中使用了第三道光罩。(Step 24): sputtering a metal layer on the X pattern protection layer 13, and coating, exposing, developing, etching, and stripping the metal layer by using a photoresist (B), thereby forming an X pattern. A metal wiring layer 14 is formed on the protective layer 13. It should be noted that a third mask is used in this step.
(步驟25):利用某種光阻劑(B)在金屬導線層14上進行塗布、露光、顯影、蝕刻及剝膜等製程,藉由形成作為第二保護層的金屬導線保護層15。要注意的是,在此步驟中使用了第四道光罩。(Step 25): a process of coating, exposing, developing, etching, and stripping on the metal wiring layer 14 by using a photoresist (B) by forming a metal wiring protective layer 15 as a second protective layer. It should be noted that a fourth mask is used in this step.
(步驟26):在金屬導線保護層15上蒸鍍一銦錫氧化物(ITO)層,利用某種光阻劑(A)在該ITO層上進行塗布、露光、顯影、蝕刻及剝膜等製程,藉以在金屬導線保護層15上形成作為第二圖案層的Y圖案層16。要注意的是,在此步驟中使用了第五道光罩。(Step 26): depositing an indium tin oxide (ITO) layer on the metal wire protective layer 15 and applying, exposing, developing, etching, and stripping the ITO layer using a photoresist (A). The process is to form a Y pattern layer 16 as a second pattern layer on the metal wire protective layer 15. It should be noted that a fifth mask is used in this step.
(步驟27):在Y圖案層16上利用感光性樹脂材料(ASAHIKSEI PHOTOSENSITIVE RESIN,APR)進行印刷、紫外線(UV)固化,而形成作為絕緣層的頂塗(TOP COATING,TC)層17。(Step 27): Printing and ultraviolet (UV) curing are performed on the Y pattern layer 16 using a photosensitive resin material (ASAHIKSEI PHOTOSENSITIVE RESIN, APR) to form a TOP COATING (TC) layer 17 as an insulating layer.
(後續步驟):對所形成的投射電容式觸控面板1進行線路檢測、裂片等製程,以作成成品。(Subsequent steps): performing line detection, splitting, and the like on the formed projected capacitive touch panel 1 to form a finished product.
上述的投射電容式觸控面板之習用製程具有下列缺點:The conventional process of the above projected capacitive touch panel has the following disadvantages:
(1)製程複雜:總製程一共需要五道光罩程序以及一道APR程序,使得製程過於複雜。此外,關於塗布、露光、顯影、蝕刻及剝膜等製程的重覆性高,對於設備造成過重的負擔。(1) Complex process: The total process requires a total of five mask programs and an APR program, making the process too complicated. In addition, the process of coating, exposing, developing, etching, and stripping is highly repetitive, which imposes an excessive burden on the device.
(2)影響環境:由於酸洗工程的增加,容易造成環境的污染。(2) Affecting the environment: Due to the increase in pickling engineering, it is easy to cause environmental pollution.
(3)降低性能:為了防止二種圖案層與金屬導線層之間遭受酸液侵蝕,必須在層間追加保護層。由於此保護層具有微酸性,容易影響線路的可靠度。此外,增加的保護層還會降低光線對於面板的透過率。(3) Reducing performance: In order to prevent acid corrosion between the two pattern layers and the metal wiring layer, it is necessary to add a protective layer between the layers. Since the protective layer is slightly acidic, it is easy to affect the reliability of the line. In addition, the added protective layer also reduces the transmission of light to the panel.
因此,有必要構思出與上述習用技術不同的投射電容式觸控面板及其製造方法,藉以簡化製程、降低成本,並提升成品的性能。Therefore, it is necessary to conceive a projected capacitive touch panel different from the above-mentioned conventional technology and a manufacturing method thereof, thereby simplifying the process, reducing the cost, and improving the performance of the finished product.
根據上述構想,本案一方面提出一種投射電容式觸控面板的製造方法,包括下列步驟:提供一基板;於該基板上依序以一第一露光顯影製程及一蝕刻剝膜製程而形成一金屬導線層;於該金屬導線層上依序以一第二露光顯影製程、一第一鍍膜製程及一第一剝膜製程而形成一第一圖案層;於該第一圖案層上形成一絕緣層;以及於該絕緣層上依序以一第三露光顯影製程、一第二鍍膜製程及一第二剝膜製程而形成一第二圖案層。According to the above concept, the present invention provides a method for manufacturing a projected capacitive touch panel, comprising the steps of: providing a substrate; forming a metal on the substrate by a first exposure development process and an etching and stripping process; a wire layer; a first pattern layer is formed on the metal wire layer by a second exposure process, a first coating process and a first filming process; and an insulating layer is formed on the first pattern layer And forming a second pattern layer on the insulating layer by a third exposure process, a second coating process and a second filming process.
根據上述構想,本案另一方面提出一種投射電容式觸控面板,包括:一基板;一金屬層,位於該基板上;一第一圖案層,位於該金屬層上;一頂塗層,位於該第一圖案層上;及一第二圖案層,位於該頂塗層上。According to the above concept, another aspect of the present disclosure is to provide a projected capacitive touch panel comprising: a substrate; a metal layer on the substrate; a first pattern layer on the metal layer; and a top coating layer on the a first pattern layer; and a second pattern layer on the top coating layer.
根據上述構想,本案再一方面提出一種投射電容式觸控面板,是利用上述的製造方法所製造者。According to the above concept, the present invention further proposes a projected capacitive touch panel which is manufactured by the above manufacturing method.
藉由上述的投射電容式觸控面板及其製造方法,不但能夠縮短製程及減少光罩的使用量,還能夠降低製造成本,在提升光線對於面板之透過率的同時,減少製程對於環境的污染。The above-described projected capacitive touch panel and the method of manufacturing the same can not only shorten the process and reduce the amount of use of the mask, but also reduce the manufacturing cost, improve the transmittance of the light to the panel, and reduce the environmental pollution of the process. .
本案得藉由下列圖式及詳細說明,俾得更深入之了解:This case can be further understood by the following diagrams and detailed explanations:
請參閱第三圖,其為本案所提出的投射電容式觸控面板之製造方法的流程圖。以下配合參閱第三圖而說明本案所提出的投射電容式觸控面板之製造方法。Please refer to the third figure, which is a flowchart of a method for manufacturing a projected capacitive touch panel proposed in the present application. The manufacturing method of the projected capacitive touch panel proposed in the present application will be described below with reference to the third figure.
(步驟A):投入作為基板的一玻璃基材;(Step A): feeding a glass substrate as a substrate;
(步驟B):在該玻璃基材上,依序以一第一露光顯影製程及一蝕刻剝膜製程而形成一金屬導線層。其中,是先在該玻璃基材上濺鍍一金屬層,再於該金屬層上塗布某光阻劑(A),並依序以該第一露光顯影製程及該蝕刻剝膜製程而將該金屬層製成該金屬導線層。要注意的是,在此步驟中使用了第一道光罩。(Step B): A metal wire layer is formed on the glass substrate by a first exposure development process and an etching and stripping process. Wherein, a metal layer is first sputtered on the glass substrate, and then a photoresist (A) is coated on the metal layer, and the first exposure development process and the etching and stripping process are sequentially performed on the metal layer. The metal layer is made of the metal wiring layer. It should be noted that the first mask was used in this step.
(步驟C):在該金屬導線層上,依序以一第二露光顯影製程、一第一鍍膜製程及一第一剝膜製程而形成一第一圖案層。其中,是於該金屬導線層上塗布某光阻劑(B),並於光阻層上執行該第二露光顯影製程,再以該第一鍍膜製程形成一第一銦錫氧化物(ITO)層,最後再以該第一剝膜製程而將該第一ITO層製成作為該第一圖案層的一X圖案層。(Step C): forming a first pattern layer on the metal wire layer by a second exposure process, a first coating process and a first filming process. Wherein, a photoresist (B) is coated on the metal wire layer, and the second exposure process is performed on the photoresist layer, and a first indium tin oxide (ITO) is formed by the first plating process. And finally, the first ITO layer is formed as an X-pattern layer of the first pattern layer by the first stripping process.
(步驟D):在該X圖案層上利用感光性樹脂材料(ASAHIKSEI PHOTOSENSITIVE RESIN,APR)進行印刷、紫外線(UV)固化,而形成作為絕緣層的頂塗(TOP COATING,TC)層。(Step D): Printing and ultraviolet (UV) curing are performed on the X pattern layer with a photosensitive resin material (ASAHIKSEI PHOTOSENSITIVE RESIN, APR) to form a TOP COATING (TC) layer as an insulating layer.
(步驟E):在該頂塗層上,依序以一第三露光顯影製程、一第二鍍膜製程及一第二剝膜製程而形成一第二圖案層。其中,是於該頂塗層上塗布某光阻劑(B),並於光阻層上執行該第三露光顯影製程,再以該第二鍍膜製程形成一第二銦錫氧化物(ITO)層,最後再以該第二剝膜製程而將該第二ITO層製成作為該第二圖案層的一Y圖案層。(Step E): forming a second pattern layer on the top coat layer by a third exposure process, a second coating process and a second filming process. Wherein, a photoresist (B) is coated on the top coat layer, and the third exposed light development process is performed on the photoresist layer, and a second indium tin oxide (ITO) is formed by the second plating process. And finally, the second ITO layer is formed as a Y pattern layer of the second pattern layer by the second stripping process.
(後續步驟):對所形成的投射電容式觸控面板進行線路檢測、裂片等製程,以作成成品。(Next steps): Perform line detection, splitting, and the like on the formed projected capacitive touch panel to make a finished product.
請參閱第四圖,其為利用第三圖的製造方法所製造出的投射電容式觸控面板之結構的示意圖。在第四圖中,投射電容式觸控面板4主要是依序由作為基板的玻璃基材41、金屬導線層42、作為第一圖案層的X圖案層43、作為絕緣層的頂塗層44、以及作為第二圖案層的Y圖案層45所構成。Please refer to the fourth figure, which is a schematic diagram of the structure of the projected capacitive touch panel manufactured by the manufacturing method of the third figure. In the fourth figure, the projected capacitive touch panel 4 is mainly composed of a glass substrate 41 as a substrate, a metal wiring layer 42, an X pattern layer 43 as a first pattern layer, and a top coat layer 44 as an insulating layer. And a Y pattern layer 45 as a second pattern layer.
請參閱第五(a)圖,其為第四圖之投射電容式觸控面板之結構一隅的側視圖。如第五(a)圖所示,投射電容式觸控面板5包括了玻璃基材51、金屬導線52、X圖案層53、頂塗層54、以及Y圖案層55。此外,請參閱第五(b)圖,其為第四圖之投射電容式觸控面板之結構另一隅的側視圖。如第五(b)圖所示,同樣可看出投射電容式觸控面板5包括了玻璃基材51、金屬導線52、X圖案層53、頂塗層54、以及Y圖案層55。Please refer to the fifth (a) figure, which is a side view of the structure of the projected capacitive touch panel of the fourth figure. As shown in the fifth (a) diagram, the projected capacitive touch panel 5 includes a glass substrate 51, a metal wire 52, an X pattern layer 53, a top coat layer 54, and a Y pattern layer 55. In addition, please refer to FIG. 5(b), which is another side view of the structure of the projected capacitive touch panel of the fourth figure. As shown in the fifth (b), it can also be seen that the projected capacitive touch panel 5 includes the glass substrate 51, the metal wires 52, the X pattern layer 53, the top coat layer 54, and the Y pattern layer 55.
綜上所述,本案提出了一種投射電容式觸控面板及其製造方法,將光罩的使用量由傳統的五道減少至三道,不但能夠縮短製程,還能夠降低製造成本,同時在提升光線對於面板之透過率的同時,還可以減少製程對於環境的污染。In summary, the present invention proposes a projected capacitive touch panel and a manufacturing method thereof, which reduces the usage of the photomask from the conventional five to three, which not only shortens the process, but also reduces the manufacturing cost while improving. Light can also reduce the environmental pollution caused by the process.
本案得由熟悉本技藝之人士任施匠思而為諸般修飾,然皆不脫如附申請專利範圍所欲保護者。This case has been modified by people who are familiar with the art, but it is not intended to be protected by the scope of the patent application.
1...投射電容式觸控面板1. . . Projected capacitive touch panel
11...玻璃基材11. . . Glass substrate
12...X圖案層12. . . X pattern layer
13...X圖案保護層13. . . X pattern protection layer
14...金屬導線層14. . . Metal wire layer
15...金屬導線保護層15. . . Metal wire protection
16...Y圖案層16. . . Y pattern layer
17...頂塗層17. . . Top coat
4...投射電容式觸控面板4. . . Projected capacitive touch panel
41...玻璃基材41. . . Glass substrate
42...金屬導線層42. . . Metal wire layer
43...X圖案層43. . . X pattern layer
44...頂塗層44. . . Top coat
45...Y圖案層45. . . Y pattern layer
第一圖:習用的投射電容式觸控面板之結構的示意圖。First: Schematic diagram of the structure of a conventional projected capacitive touch panel.
第二圖:與第一圖之投射電容式觸控面板相對應的製造流程圖。Second figure: a manufacturing flow chart corresponding to the projected capacitive touch panel of the first figure.
第三圖:本案所提出的投射電容式觸控面板之製造方法的流程圖。Third: A flow chart of a method for manufacturing a projected capacitive touch panel proposed in the present application.
第四圖:利用第三圖的製造方法所製造出的投射電容式觸控面板之結構的示意圖。Fourth: Schematic diagram of the structure of a projected capacitive touch panel manufactured by the manufacturing method of the third figure.
第五(a)圖:第四圖之投射電容式觸控面板之結構一隅的側視圖。Fifth (a): A side view of the structure of the projected capacitive touch panel of the fourth figure.
第五(b)圖:第四圖之投射電容式觸控面板之結構另一隅的側視圖。FIG. 5(b) is a side view showing the structure of the projected capacitive touch panel of the fourth figure.
4...投射電容式觸控面板4. . . Projected capacitive touch panel
41...玻璃基材41. . . Glass substrate
42...金屬導線層42. . . Metal wire layer
43...X圖案層43. . . X pattern layer
44...頂塗層44. . . Top coat
45...Y圖案層45. . . Y pattern layer
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TWM338404U (en) * | 2007-12-28 | 2008-08-11 | Giantplus Technology Co Ltd | Capacitive touch control panel |
US20080314626A1 (en) * | 2005-12-12 | 2008-12-25 | Moore Chad B | ELECTRODED SHEET (eSheet) PRODUCTS |
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US20080314626A1 (en) * | 2005-12-12 | 2008-12-25 | Moore Chad B | ELECTRODED SHEET (eSheet) PRODUCTS |
TWM338404U (en) * | 2007-12-28 | 2008-08-11 | Giantplus Technology Co Ltd | Capacitive touch control panel |
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