TWI397683B - Optical inspection apparatus and optical inspection method - Google Patents

Optical inspection apparatus and optical inspection method Download PDF

Info

Publication number
TWI397683B
TWI397683B TW98102592A TW98102592A TWI397683B TW I397683 B TWI397683 B TW I397683B TW 98102592 A TW98102592 A TW 98102592A TW 98102592 A TW98102592 A TW 98102592A TW I397683 B TWI397683 B TW I397683B
Authority
TW
Taiwan
Prior art keywords
pixel
superimposed
grayscale
display panel
pixels
Prior art date
Application number
TW98102592A
Other languages
Chinese (zh)
Other versions
TW201028680A (en
Inventor
Shang Chieh Chou
Ya Wen Chiang
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW98102592A priority Critical patent/TWI397683B/en
Publication of TW201028680A publication Critical patent/TW201028680A/en
Application granted granted Critical
Publication of TWI397683B publication Critical patent/TWI397683B/en

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Liquid Crystal (AREA)

Description

光學檢測裝置及光學檢測方法Optical detecting device and optical detecting method

本發明係與光學檢測有關,特別地,係關於一種用以檢測顯示面板之缺陷分佈情形的光學檢測裝置及光學檢測方法。The present invention relates to optical inspection, and more particularly to an optical detection apparatus and an optical detection method for detecting a distribution of defects of a display panel.

近年來,隨著影像顯示相關之技術不斷地發展,市面上已出現各種有別於傳統顯示器之新型態的顯示裝置,例如液晶顯示器、電漿顯示器等。其中,又以液晶顯示器或液晶電視等應用液晶顯示技術之產品的普及率最高。In recent years, with the continuous development of technologies related to image display, various types of display devices different from conventional displays, such as liquid crystal displays and plasma displays, have appeared on the market. Among them, the popularity of products using liquid crystal display technology such as liquid crystal displays or liquid crystal televisions is the highest.

當工廠所生產的液晶顯示器欲出貨之前,均需要透過檢測人員進行產品的檢測工作。一般而言,目前大多數的廠商均已由傳統的人工檢方式改良成自動光學檢測(Automatic Optical Inspection,AOI)之方式進行液晶顯示面板之檢測。為了要將液晶顯示面板上的所有缺陷均檢測出來,通常需要透過讓液晶顯示面板依序顯示多個不同的畫面之方式,以使得液晶顯示面板上的缺陷能夠顯現出來。When the liquid crystal display produced by the factory is to be shipped, it is necessary to carry out product inspection by the inspectors. In general, most manufacturers have been improved by the traditional manual inspection method into automatic optical inspection (AOI) to detect the liquid crystal display panel. In order to detect all defects on the liquid crystal display panel, it is usually required to display a plurality of different screens in sequence by the liquid crystal display panel so that defects on the liquid crystal display panel can be revealed.

由於目前所採用的自動光學檢測方式係擷取液晶顯示面板顯示不同畫面之影像,並透過分別對每一張擷取到之影像進行影像處理之方式檢測出液晶顯示面板上之缺陷。然而,為了要使得檢測結果達到非常精準的程度,以避免某些缺陷未被檢測出之情形發生,勢必需要進行相當多次的影像處理程序。由於需要進行影像處理的影像數目相當多,也導致自動光學檢測方式檢測每一個液晶顯示面板所耗費的時間拉長,自然會對於整體生產效率及產能造成負面的影響。The automatic optical detection method currently used captures images of different screens by the liquid crystal display panel, and detects defects on the liquid crystal display panel by performing image processing on each of the captured images. However, in order to achieve a very accurate detection result to avoid the occurrence of certain defects not detected, it is necessary to perform a considerable number of image processing procedures. Since the number of images that need to be image processed is quite large, and the time taken by the automatic optical detection method to detect each liquid crystal display panel is lengthened, it will naturally have a negative impact on overall production efficiency and productivity.

因此,本發明之主要範疇在於提供一種光學檢測裝置及光學檢測方法,以解決上述問題。Accordingly, it is a primary object of the present invention to provide an optical detecting device and an optical detecting method to solve the above problems.

根據本發明之第一具體實施例為一種光學檢測裝置。實際上,該光學檢測裝置係應用於顯示面板之缺陷分佈的檢測。於此實施例中,該光學檢測裝置包含影像擷取模組及影像處理模組。影像擷取模組係用以擷取顯示面板於不同的時間所顯示之複數個影像。影像處理模組係耦接至影像擷取模組,並係用以根據複數個影像產生疊加影像並根據疊加影像產生對應於顯示面板之缺陷分佈資訊。A first embodiment according to the present invention is an optical detecting device. In fact, the optical detecting device is applied to the detection of the defect distribution of the display panel. In this embodiment, the optical detecting device includes an image capturing module and an image processing module. The image capture module is configured to capture a plurality of images displayed by the display panel at different times. The image processing module is coupled to the image capturing module, and is configured to generate a superimposed image according to the plurality of images and generate defect distribution information corresponding to the display panel according to the superimposed image.

根據本發明之第二具體實施例為一種之光學檢測方法。於此實施例中,該光學檢測方法係應用於顯示面板之缺陷分佈的檢測。該光學檢測方法包含下列步驟:(a)擷取該顯示面板於不同的時間所顯示之複數個影像;(b)疊加該複數個影像以產生一疊加影像;(c)根據該疊加影像產生一缺陷分佈資訊並根據該缺陷分佈資訊判斷對應於該顯示面板之缺陷分佈。A second embodiment of the present invention is an optical detection method. In this embodiment, the optical detection method is applied to the detection of the defect distribution of the display panel. The optical detection method comprises the steps of: (a) capturing a plurality of images displayed by the display panel at different times; (b) superimposing the plurality of images to generate a superimposed image; and (c) generating a superimposed image according to the superimposed image; The defect distribution information determines the defect distribution corresponding to the display panel based on the defect distribution information.

綜上所述,根據本發明之光學檢測裝置及光學檢測方法由於使用影像疊加之方式進行影像處理,可以避免光學檢測面板缺陷時分別針對每一個影像各自進行缺陷比對之情形,因此,根據本發明之光學檢測裝置及光學檢測方法能夠大幅減少光學檢測面板缺陷所需之整體辨識時間,亦可減少儲存所有擷取影像之空間。In summary, according to the optical detecting device and the optical detecting method of the present invention, since the image processing is performed by using the image superimposing method, it is possible to avoid the defect comparison of each of the images when the optical detecting panel is defective, and therefore, according to the present invention, The optical detecting device and the optical detecting method of the invention can greatly reduce the overall recognition time required for the optical detecting panel defect, and can also reduce the space for storing all captured images.

關於本發明之優點與精神可以藉由以下的發明詳述及所附圖式得到進一步的瞭解。The advantages and spirit of the present invention will be further understood from the following detailed description of the invention.

根據本發明之第一具體實施例為一種光學檢測裝置。於此實施例中,該光學檢測裝置係用以檢測顯示面板之缺陷分佈情形,以確保工廠出貨的顯示面板能夠具有優良且可靠的品質,不會有亮點等缺陷產生。該顯示面板可以是液晶顯示面板或其他顯示裝置,但並不以此為限。請參照圖一及圖二,圖一係繪示該光學檢測裝置針對顯示面板進行缺陷檢測的示意圖;圖二係繪示該光學檢測裝置之功能方塊圖。A first embodiment according to the present invention is an optical detecting device. In this embodiment, the optical detecting device is configured to detect the defect distribution of the display panel to ensure that the factory-displayed display panel can have excellent and reliable quality without defects such as bright spots. The display panel may be a liquid crystal display panel or other display device, but is not limited thereto. Please refer to FIG. 1 and FIG. 2 . FIG. 1 is a schematic diagram showing defect detection of the optical detection device for the display panel. FIG. 2 is a functional block diagram of the optical detection device.

如圖二所示,光學檢測裝置1包含影像擷取模組10、影像處理模組12及儲存模組14。影像處理模組12耦接至影像擷取模組10以及儲存模組14耦接至影像擷取模組10與影像處理模組12。接下來,將分別就光學檢測裝置1所包含之各模組及其具有之功能進行詳細的介紹。As shown in FIG. 2 , the optical detecting device 1 includes an image capturing module 10 , an image processing module 12 , and a storage module 14 . The image processing module 12 is coupled to the image capturing module 10 and the storage module 14 is coupled to the image capturing module 10 and the image processing module 12 . Next, each module included in the optical detecting device 1 and its functions will be described in detail.

如圖一所示,光學檢測裝置1之影像擷取模組10係用以擷取顯示面板2於不同的時間所顯示之複數個影像。一般而言,由於對於顯示面板2進行光學檢測時,必須使顯示面板2顯示多個不同的畫面(亦即顯示樣式),以藉此判斷顯示面板2是否具有缺陷以及缺陷的所在位置。因此,每當顯示面板2顯示不同的畫面時,影像擷取模組10即需擷取顯示面板2顯示這些畫面時之影像,以利後續影像處理及缺陷分析等步驟之進行。As shown in FIG. 1 , the image capturing module 10 of the optical detecting device 1 is configured to capture a plurality of images displayed by the display panel 2 at different times. In general, since optical inspection is performed on the display panel 2, it is necessary to cause the display panel 2 to display a plurality of different screens (i.e., display patterns), thereby judging whether the display panel 2 has defects and positions of defects. Therefore, each time the display panel 2 displays a different screen, the image capturing module 10 needs to capture the image when the display panel 2 displays the images, so as to facilitate subsequent steps of image processing and defect analysis.

實際上,影像擷取模組10可以是任何具有影像擷取功能之裝置,例如攝影機或相機。此外,這些不同的畫面(顯示樣式)可以透過隨機方式自一畫面(顯示樣式)資料庫中選取而產生或由使用者依照其習慣或喜好進行設定而得,並無一定之限制。In fact, the image capturing module 10 can be any device having an image capturing function, such as a camera or a camera. In addition, these different pictures (display styles) can be generated by randomly selecting from a picture (display style) database or by the user according to their habits or preferences, without limitation.

舉例而言,當光學檢測裝置1針對顯示面板2進行光學檢測時,若顯示面板2分別於第一時間、第二時間、第三時間、第四時間及第五時間依序顯示第一畫面、第二畫面、第三畫面、第四畫面及第五畫面等五個不同的畫面,則光學檢測裝置1之影像擷取模組10即可分別擷取顯示面板2於第一時間T1顯示第一畫面之第一影像、顯示面板2於第二時間T2顯示第二畫面之第二影像、顯示面板2於第三時間T3顯示第三畫面之第三影像、顯示面板2於第四時間T4顯示第四畫面之第四影像以及顯示面板2於第五時間T5顯示第五畫面之第五影像。For example, when the optical detecting device 1 performs optical detection on the display panel 2, if the display panel 2 displays the first screen sequentially at the first time, the second time, the third time, the fourth time, and the fifth time, The image capturing module 10 of the optical detecting device 1 can respectively capture the display panel 2 to display the first time at the first time T1, five different screens, such as the second screen, the third screen, the fourth screen, and the fifth screen. The first image of the screen, the display panel 2 displays the second image of the second screen at the second time T2, the third image of the third screen is displayed by the display panel 2 at the third time T3, and the display panel 2 displays the fourth image at the fourth time T4. The fourth image of the four screens and the display panel 2 display the fifth image of the fifth screen at the fifth time T5.

於實際應用中,由於顯示面板2包含有複數個像素(pixel),所以當顯示面板2顯示任一個畫面時,顯示面板2的每一個像素均會分別對應於一灰階值(gray-level value)。於此實施例中,假設顯示面板2包含以一維陣列形式排列之六個像素,由左至右分別為第一像素21、第二像素22、第三像素23、第四像素24、第五像素25及第六像素26,如圖三(A)所示。實際上,顯示面板2之像素的排列方式可以有各種不同的可能性,故無一定之限制。In practical applications, since the display panel 2 includes a plurality of pixels, when the display panel 2 displays any one of the screens, each pixel of the display panel 2 corresponds to a gray-level value (gray-level value). ). In this embodiment, it is assumed that the display panel 2 includes six pixels arranged in a one-dimensional array, and the first pixel 21, the second pixel 22, the third pixel 23, the fourth pixel 24, and the fifth are respectively from left to right. The pixel 25 and the sixth pixel 26 are as shown in FIG. 3(A). In fact, the arrangement of the pixels of the display panel 2 can have various possibilities, and thus there is no limitation.

當影像擷取模組10擷取第一影像至第五影像等五個影像後,影像處理模組12將會根據該五個影像產生一疊加影像。接著,影像處理模組12將會進一步根據該疊加影像產生對應於顯示面板2之一缺陷分佈資訊。實際上,該缺陷分佈資訊係與顯示面板2之每一個像素是否具有缺陷有關。After the image capturing module 10 captures five images, such as the first image to the fifth image, the image processing module 12 generates a superimposed image according to the five images. Then, the image processing module 12 further generates defect distribution information corresponding to one of the display panels 2 according to the superimposed image. In fact, the defect distribution information is related to whether each pixel of the display panel 2 has a defect.

值得注意的是,由於本發明之光學檢測裝置1的影像處理模組12係採用影像疊加之方式進行影像處理,故可避免傳統光學檢測顯示面板之缺陷時,分別針對每一個影像各自進行缺陷比對之耗時方式,以大幅減少光學檢測顯示面板之缺陷所需的整體辨識時間,亦可減少儲存所有擷取影像之空間。尤其當光學檢測之準確度要求較嚴格,亦即需要進行影像處理之影像數目較多時,本發明具有之節省時間及空間的優勢即更加明顯。It is to be noted that, since the image processing module 12 of the optical detecting device 1 of the present invention performs image processing by means of image superimposition, it is possible to avoid defect defects of the conventional optical detecting display panel, and respectively perform defect ratios for each image. The time-consuming method can greatly reduce the overall recognition time required for optically detecting the defects of the display panel, and can also reduce the space for storing all captured images. Especially when the accuracy of the optical detection is strict, that is, the number of images that need to be processed by the image is large, the advantage of saving time and space of the invention is more obvious.

接下來,將透過兩個不同的實例來詳細說明光學檢測裝置1進行顯示面板2之缺陷檢測的運作情形,以更清楚呈現影像處理模組12如何根據擷取的影像產生疊加影像並進行後續之影像處理程序。Next, the operation of the defect detection of the display panel 2 by the optical detecting device 1 will be described in detail through two different examples, so as to more clearly show how the image processing module 12 generates a superimposed image according to the captured image and performs subsequent steps. Image processing program.

首先,在第一個實例中,假設顯示面板2如同圖三(A)一樣,由左至右分別為第一像素21、第二像素22、第三像素23、第四像素24、第五像素25及第六像素26。請參照圖三(B),假設當顯示面板2顯示第一影像至第五影像時,顯示面板2之第一像素21至第六像素26所對應的灰階值即如圖三(B)所示。First, in the first example, it is assumed that the display panel 2 is the first pixel 21, the second pixel 22, the third pixel 23, the fourth pixel 24, and the fifth pixel from left to right, as in FIG. 3(A). 25 and sixth pixel 26. Referring to FIG. 3(B), it is assumed that when the display panel 2 displays the first image to the fifth image, the grayscale values corresponding to the first pixel 21 to the sixth pixel 26 of the display panel 2 are as shown in FIG. 3(B). Show.

由圖三(B)可知,於影像擷取模組10所擷取之第一影像中,顯示面板2之第一像素21、第二像素22、第三像素23、第四像素24、第五像素25及第六像素26所對應的灰階值均為2。同樣地,於第三影像中,顯示面板2之第一像素21至第六像素26所對應的灰階值均為7。另外,於第四影像中,顯示面板2之第一像素21至第六像素26所對應的灰階值均為4;於第五影像中,顯示面板2之第一像素21至第六像素26所對應的灰階值均為5。As shown in FIG. 3(B), in the first image captured by the image capturing module 10, the first pixel 21, the second pixel 22, the third pixel 23, the fourth pixel 24, and the fifth of the display panel 2 The gray scale values corresponding to the pixel 25 and the sixth pixel 26 are both 2. Similarly, in the third image, the gray scale values corresponding to the first pixel 21 to the sixth pixel 26 of the display panel 2 are all 7. In addition, in the fourth image, the gray scale values corresponding to the first pixel 21 to the sixth pixel 26 of the display panel 2 are all 4; in the fifth image, the first pixel 21 to the sixth pixel 26 of the display panel 2 The corresponding grayscale values are all 5.

唯一不同的是,於第二影像中,顯示面板2之第一像素21、第二像素22、第四像素24、第五像素25及第六像素26所對應的灰階值均為3,但第三像素23所對應的灰階值為6。The only difference is that in the second image, the grayscale values corresponding to the first pixel 21, the second pixel 22, the fourth pixel 24, the fifth pixel 25, and the sixth pixel 26 of the display panel 2 are all 3, but The grayscale value corresponding to the third pixel 23 is 6.

於此實例中,影像處理模組12係先以加總的方式分別將顯示面板2之每一個像素於不同影像中所對應的灰階值相加,以得到分別對應於每一個像素之疊加灰階值。一般而言,各像素之間它們的疊加灰階值會有多數像素的灰階比較值是相同的數值,則此多數之疊加灰階值可視為正常,而不同於多數之疊加灰階值的像素疊加灰階值則視為異常。如圖三(B)所示,第一像素21、第二像素22、第四像素24、第五像素25及第六像素26的疊加灰階值均為21;而第三像素23的疊加灰階值則為24,相較於其它像素的疊加灰階值均為21之下,則可視第三像素23的疊加灰階值為異常。In this example, the image processing module 12 first adds the grayscale values corresponding to each pixel of the display panel 2 in different images in a summed manner to obtain the grayscale corresponding to each pixel respectively. Order value. In general, the superimposed grayscale values of each pixel have the same grayscale comparison value of most pixels, and the majority of the superimposed grayscale values can be regarded as normal, and different from the majority of the superimposed grayscale values. Pixel overlay grayscale values are considered abnormal. As shown in FIG. 3(B), the superimposed grayscale values of the first pixel 21, the second pixel 22, the fourth pixel 24, the fifth pixel 25, and the sixth pixel 26 are all 21; and the superimposed gray of the third pixel 23 The order value is 24, and the superimposed gray scale value of the other pixels is 21 below, and the superimposed gray scale value of the third pixel 23 is abnormal.

接著,影像處理模組12將會透過分別將每一個像素之疊加灰階值減去其相鄰像素之疊加灰階值後再進行加總以產生對應於每一個像素之灰階比較值。如圖三(B)所示,由於第一像素21之疊加灰階值21減去其唯一相鄰的第二像素22之疊加灰階值21剛好為零,代表對應於第一像素21之灰階比較值即為零。Then, the image processing module 12 will subtract the grayscale values of the adjacent pixels by subtracting the grayscale values of the adjacent pixels to generate grayscale comparison values corresponding to each pixel. As shown in FIG. 3(B), since the superimposed grayscale value 21 of the first pixel 21 minus the superimposed grayscale value 21 of the only adjacent second pixel 22 is exactly zero, it represents the gray corresponding to the first pixel 21. The order comparison value is zero.

對於第二像素22而言,由於第二像素22有兩個相鄰的像素,分別是第一像素21及第三像素23,而第二像素22之疊加灰階值21減去第一像素21之疊加灰階值21剛好為零,並且第二像素22之疊加灰階值21減去第三像素23的疊加灰階值24為-3,故對應於第二像素22之灰階比較值即為-3。同理,對應於第三像素23之灰階比較值為6;對應於第四像素24之灰階比較值為-3;對應於第五像素25及第六像素26之灰階比較值均為零。For the second pixel 22, since the second pixel 22 has two adjacent pixels, respectively, the first pixel 21 and the third pixel 23, and the superimposed grayscale value 21 of the second pixel 22 is subtracted from the first pixel 21 The superimposed grayscale value 21 is just zero, and the superimposed grayscale value 21 of the second pixel 22 minus the superimposed grayscale value 24 of the third pixel 23 is -3, so the grayscale comparison value corresponding to the second pixel 22 is It is -3. Similarly, the grayscale comparison value corresponding to the third pixel 23 is 6; the grayscale comparison value corresponding to the fourth pixel 24 is -3; the grayscale comparison values corresponding to the fifth pixel 25 and the sixth pixel 26 are all zero.

藉此,影像處理模組12即可根據第一像素21至第六像素26之灰階比較值是否異常,判定每一個像素是否具有缺陷,並根據上述的判斷結果產生缺陷分佈資訊,以供檢測人員參考。一般而言,各像素之間它們的灰階比較值會有多數像素的灰階比較值是相同的數值,則此多數之灰階比較值可視為正常,而不同於多數之灰階比較值的像素灰階比較值則視為異常。於此實例中,影像處理模組12即可根據較為異常的第二像素22、第三像素23及第四像素24之灰階比較值,判斷出第三像素23很有可能具有缺陷,檢測人員即可針對第三像素23進行進一步的檢查程序。Therefore, the image processing module 12 can determine whether each pixel has a defect according to whether the gray scale comparison value of the first pixel 21 to the sixth pixel 26 is abnormal, and generate defect distribution information according to the above judgment result for detection. Staff reference. In general, the grayscale comparison value of each pixel between the pixels has the same value of the grayscale comparison value of most pixels, and the majority of the grayscale comparison values can be regarded as normal, and different from the majority of the grayscale comparison values. Pixel grayscale comparison values are considered abnormal. In this example, the image processing module 12 can determine that the third pixel 23 is likely to have defects according to the grayscale comparison values of the second pixel 22, the third pixel 23, and the fourth pixel 24 that are abnormal. A further inspection procedure can be performed for the third pixel 23.

上述之實例係描述顯示面板2之同一個缺陷在不同的顯示畫面中並沒有亮、暗差別的情形,亦即具有缺陷之像素並末在顯示某一影像時具有過高的異常灰階值且於顯示另一影像具有過低的異常灰階值,而是只出現過高的異常灰階值或只出現過低的異常灰階值之情形。The above example describes a case where the same defect of the display panel 2 does not have bright or dark differences in different display images, that is, a pixel having defects and has an excessive abnormal gray scale value when displaying an image and It is shown that another image has an abnormally low grayscale value, but only an abnormally high grayscale value or only an abnormally low grayscale value.

於另一個實例中,顯示面板2之同一個缺陷在不同的顯示畫面中會有亮、暗之差別,亦即具有缺陷之像素在顯示某一影像時具有過高的異常灰階值且於顯示另一影像時具有過低異常灰階值。In another example, the same defect of the display panel 2 has a difference in brightness and darkness in different display images, that is, the pixel having the defect has an excessive abnormal gray scale value when displaying an image and is displayed. Another image has a low abnormal grayscale value.

假設顯示面板2如同圖三(A)一樣,由左至右分別為第一像素21、第二像素22、第三像素23、第四像素24、第五像素25及第六像素26。請參照圖四(A),假設當顯示面板2顯示第一影像至第五影像時,顯示面板2之第一像素21至第六像素26所對應的灰階值即如圖四(A)所示。It is assumed that the display panel 2 is the first pixel 21, the second pixel 22, the third pixel 23, the fourth pixel 24, the fifth pixel 25, and the sixth pixel 26 from left to right as in the case of FIG. 3(A). Referring to FIG. 4(A), it is assumed that when the display panel 2 displays the first image to the fifth image, the grayscale values corresponding to the first pixel 21 to the sixth pixel 26 of the display panel 2 are as shown in FIG. 4(A). Show.

由圖四(A)可知,於影像擷取模組10所擷取之第一影像中,顯示面板2之第一像素21、第二像素22、第三像素23、第四像素24、第五像素25及第六像素26所對應的灰階值均為2。同樣地,於第四影像中,顯示面板2之第一像素21至第六像素26所對應的灰階值均為4;於第五影像中,顯示面板2之第一像素21至第六像素26所對應的灰階值均為5。As shown in FIG. 4(A), in the first image captured by the image capturing module 10, the first pixel 21, the second pixel 22, the third pixel 23, the fourth pixel 24, and the fifth of the display panel 2 The gray scale values corresponding to the pixel 25 and the sixth pixel 26 are both 2. Similarly, in the fourth image, the first pixel 21 to the sixth pixel 26 of the display panel 2 have a grayscale value of 4; in the fifth image, the first pixel 21 to the sixth pixel of the display panel 2 The grayscale values corresponding to 26 are both 5.

值得注意的是,於第二影像中,顯示面板2之第一像素21、第二像素22、第四像素24、第五像素25及第六像素26所對應的灰階值均為3,但第三像素23所對應的灰階值為6;於第三影像中,顯示面板2之第一像素21、第二像素22、第四像素24、第五像素25及第六像素26所對應的灰階值均為7,但第三像素23所對應的灰階值為4。也就是說,第三像素23之灰階值於顯示第二影像時具有較其他像素來得高的異常灰階值,但在顯示第三影像時則具有較其他像素來得低的異常灰階值。It should be noted that, in the second image, the grayscale values corresponding to the first pixel 21, the second pixel 22, the fourth pixel 24, the fifth pixel 25, and the sixth pixel 26 of the display panel 2 are all 3, but The third pixel 23 corresponds to a grayscale value of 6; in the third image, the first pixel 21, the second pixel 22, the fourth pixel 24, the fifth pixel 25, and the sixth pixel 26 of the display panel 2 correspond to The grayscale values are all 7, but the grayscale value corresponding to the third pixel 23 is 4. That is to say, the grayscale value of the third pixel 23 has an abnormal grayscale value higher than that of the other pixels when the second image is displayed, but has an abnormal grayscale value lower than other pixels when the third image is displayed.

針對此一現象,影像處理模組12將會先透過平方的方式分別將顯示面板2之每一個像素於顯示不同影像時所對應的灰階值加以平方,以得到每一個像素於顯示不同影像時所對應之灰階值的平方值,如圖四(B)所示。For this phenomenon, the image processing module 12 first squares the grayscale values corresponding to each pixel of the display panel 2 when displaying different images by squares, so as to obtain each pixel when displaying different images. The square value of the corresponding grayscale value is shown in Figure 4(B).

接著,影像處理模組12再分別將每一個像素於顯示不同影像時所對應之灰階值的平方值相加,以得到每一個像素的疊加灰階值。如圖四(B)所示,第一像素21、第二像素22、第四像素24、第五像素25及第六像素26的疊加灰階值均為103;第三像素23的疊加灰階值則為97。Then, the image processing module 12 adds the square values of the grayscale values corresponding to each pixel when displaying different images to obtain the superimposed grayscale value of each pixel. As shown in FIG. 4(B), the superimposed grayscale values of the first pixel 21, the second pixel 22, the fourth pixel 24, the fifth pixel 25, and the sixth pixel 26 are all 103; the superimposed grayscale of the third pixel 23 The value is 97.

接著,影像處理模組12將會透過分別將每一個像素之疊加灰階值減去其相鄰像素之疊加灰階值後再加總之方式,產生分別對應於每一個像素之灰階比較值。如圖四(B)所示,由於第一像素21之疊加灰階值103減去其唯一相鄰的第二像素22之疊加灰階值103剛好為零,代表對應於第一像素21之灰階比較值即為零。Then, the image processing module 12 generates grayscale comparison values respectively corresponding to each pixel by subtracting the superimposed grayscale values of the adjacent pixels from the superimposed grayscale values of each pixel and then summing them. As shown in FIG. 4(B), since the superimposed grayscale value 103 of the first pixel 21 minus the superimposed grayscale value 103 of the only adjacent second pixel 22 is exactly zero, it represents the gray corresponding to the first pixel 21. The order comparison value is zero.

對於第二像素22而言,由於第二像素22共有兩個相鄰的像素,分別是第一像素21及第三像素23,而第二像素22之疊加灰階值103減去第一像素21之疊加灰階值103剛好為零,並且第二像素22之疊加灰階值103減去第三像素23的疊加灰階值97為6,故對應於第二像素22之灰階比較值即為6。同理可得,對應於第三像素23之灰階比較值為-12;對應於第四像素24之灰階比較值為6;對應於第五像素25及第六像素26之灰階比較值均為零。For the second pixel 22, since the second pixel 22 shares two adjacent pixels, respectively, the first pixel 21 and the third pixel 23, and the superimposed grayscale value 103 of the second pixel 22 is subtracted from the first pixel 21 The superimposed grayscale value 103 is just zero, and the superimposed grayscale value 103 of the second pixel 22 minus the superimposed grayscale value 97 of the third pixel 23 is 6, so the grayscale comparison value corresponding to the second pixel 22 is 6. Similarly, the grayscale comparison value corresponding to the third pixel 23 is -12; the grayscale comparison value corresponding to the fourth pixel 24 is 6; and the grayscale comparison value corresponding to the fifth pixel 25 and the sixth pixel 26 is obtained. Both are zero.

藉此,影像處理模組12即可根據第一像素21至第六像素26之灰階比較值是否異常,判定每一個像素是否具有缺陷,並根據上述的判斷結果產生缺陷分佈資訊,以供檢測人員參考。於此實例中,影像處理模組12即可根據較為異常的第二像素22、第三像素23及第四像素24之灰階比較值,判斷出第三像素23很有可能具有缺陷,檢測人員即可針對第三像素23進一步執行其他檢查程序。Therefore, the image processing module 12 can determine whether each pixel has a defect according to whether the gray scale comparison value of the first pixel 21 to the sixth pixel 26 is abnormal, and generate defect distribution information according to the above judgment result for detection. Staff reference. In this example, the image processing module 12 can determine that the third pixel 23 is likely to have defects according to the grayscale comparison values of the second pixel 22, the third pixel 23, and the fourth pixel 24 that are abnormal. Other inspection procedures can be further performed for the third pixel 23.

至於儲存模組14則係用以儲存影像擷取模組10所擷取之所有的影像,並且用以提供影像處理模組12讀取這些影像以進行後續之影像處理程序。實際上,儲存模組14可以是記憶體、硬碟或其他儲存裝置,並無一定之限制。The storage module 14 is used to store all the images captured by the image capturing module 10, and is used to provide the image processing module 12 to read the images for subsequent image processing. In fact, the storage module 14 can be a memory, a hard disk or other storage device, without limitation.

根據本發明之第二具體實施例為一種光學檢測方法。於此實施例中,該光學檢測方法係應用於顯示面板之缺陷分佈的檢測。實際上,該顯示面板可以是液晶顯示面板,但並不以此為限。請參照圖五,圖五係繪示該光學檢測方法之流程圖。A second embodiment in accordance with the present invention is an optical detection method. In this embodiment, the optical detection method is applied to the detection of the defect distribution of the display panel. In fact, the display panel may be a liquid crystal display panel, but is not limited thereto. Please refer to FIG. 5 , which is a flow chart showing the optical detection method.

如圖五所示,首先,執行步驟S10,擷取該顯示面板於不同的時間所顯示之複數個影像。一般而言,為了能夠有效地將液晶顯示面板上的所有缺陷均檢測出來,因此,該方法必須使顯示面板在不同的時間下分別顯示許多個不同的畫面(顯示樣式)並擷取顯示面板顯示這些畫面的影像,以作為該方法接下來進行缺陷判斷及分析的主要依據。As shown in FIG. 5, first, step S10 is executed to capture a plurality of images displayed by the display panel at different times. In general, in order to effectively detect all defects on the liquid crystal display panel, the method must display the display panel at different times to display a plurality of different screens (display styles) and capture the display panel display. The images of these pictures are used as the main basis for the defect judgment and analysis of the method.

實際上,這些畫面(顯示樣式)可以均相異且可透過隨機方式產生或由使用者任意設定而得,並無一定之限制。In fact, these pictures (display styles) can be different and can be generated in a random manner or arbitrarily set by the user without limitation.

接著,執行步驟S12,疊加步驟S10所擷取之該複數個影像以產生一疊加影像。之後,執行步驟S14,根據步驟S12所得到的疊加影像產生對應於該顯示面板之一缺陷分佈資訊,並根據該缺陷分佈資訊判斷對應於該顯示面板之缺陷分佈。透過步驟S12及步驟S14,該方法即不需如同傳統的光學檢測方法一樣,分別針對每一個影像進行一次影像處理之程序,即可順利地產生對應於該顯示面板之缺陷分佈資訊,故能夠有效地減少整體的影像處理時間及影像儲存空間。Then, step S12 is performed to superimpose the plurality of images captured in step S10 to generate a superimposed image. Then, step S14 is executed to generate defect distribution information corresponding to one of the display panels according to the superimposed image obtained in step S12, and determine a defect distribution corresponding to the display panel according to the defect distribution information. Through the steps S12 and S14, the method does not need to perform the image processing procedure for each image separately as in the conventional optical detection method, and the defect distribution information corresponding to the display panel can be smoothly generated, so that the method can effectively Reduce the overall image processing time and image storage space.

於實際應用中,由於該顯示面板包含有複數個像素,當該顯示面板顯示該複數個影像中之一影像時,該複數個像素中之每一個像素均分別對應於一灰階值。至於該缺陷分佈資訊係與該複數個像素中之每一個像素是否具有缺陷有關。In an actual application, since the display panel includes a plurality of pixels, when the display panel displays one of the plurality of images, each of the plurality of pixels respectively corresponds to a grayscale value. The defect distribution information is related to whether each of the plurality of pixels has a defect.

實際上,上述的缺陷分佈資訊係透過比較該複數個像素所對應之複數個疊加灰階值而產生。至於該方法產生該複數個疊加灰階值之方式,則可能有下列兩種:第一種方式是,該方法分別將每一個像素於顯示該複數個影像時所對應之複數個灰階值相加而得到該複數個疊加灰階值。此種方式係較適用於顯示面板之同一個缺陷在顯示不同的顯示畫面時並沒有亮、暗差別之情形,亦即具有缺陷之像素並未在顯示某一影像時具有過高的異常灰階值(相較於同一影像之其它灰階值下)且於顯示另一影像時具有過低的異常灰階值(相較於同一影像之其它灰階值下)。In fact, the defect distribution information described above is generated by comparing a plurality of superimposed gray scale values corresponding to the plurality of pixels. As for the manner in which the method generates the plurality of superimposed grayscale values, there may be the following two types: In the first method, the method respectively respectively displays a plurality of grayscale values corresponding to each pixel in displaying the plurality of images. Adding the plurality of superimposed gray scale values. This method is more suitable for the same defect of the display panel when there is no difference between light and dark when displaying different display images, that is, the pixel with defects does not have excessive abnormal gray scale when displaying a certain image. The value (as compared to other grayscale values of the same image) and has too low anomalous grayscale values when displaying another image (compared to other grayscale values of the same image).

第二種方式則是,若該複數個像素中之一特定像素於顯示該複數個影像中之第一影像時具有過高的異常灰階值並於顯示第二影像時具有過低的異常灰階值,該方法將會分別把每一個像素於顯示該複數個影像時所對應之複數個灰階值先平方後再相加,以得到該複數個疊加灰階值。此種方式較適用於顯示面板之同一個缺陷在顯示不同的顯示畫面時會有亮、暗之差別,亦即具有缺陷之像素在顯示某一影像時具有過高的異常灰階值且於顯示另一影像時具有過低的異常灰階值。The second method is that if one of the plurality of pixels has an abnormally high grayscale value when displaying the first image in the plurality of images and has a low abnormal gray when displaying the second image The step value, the method will respectively square each of the plurality of grayscale values corresponding to each pixel when displaying the plurality of images, and then add the plurality of grayscale values to obtain the plurality of superimposed grayscale values. This method is more suitable for the same defect of the display panel. When displaying different display screens, there will be a difference between light and dark, that is, the defective pixel has an excessive abnormal gray scale value when displaying an image and is displayed. Another image has an abnormally low grayscale value.

如圖六所示,當該方法產生每一個像素之疊加灰階值後,執行步驟S20,分別將對應每一個像素之疊加灰階值減去對應其相鄰像素之疊加灰階值後再加總,以產生對應於該複數個像素之複數個灰階比較值。接著,執行步驟S22,比較該複數個灰階比較值以產生該缺陷分佈資訊,以供檢測人員參考。一般而言,各像素之間它們的灰階比較值會有多數像素的灰階比較值是相同的數值,則此多數之灰階比較值可視為正常,而不同於多數之灰階比較值的像素灰階比較值則視為異常。因此,於實際應用中,步驟S22可藉由比較該複數個灰階比較值中之每一個灰階比較值是否異常來判定該複數個像素中之每一個像素是否具有缺陷。As shown in FIG. 6 , after the method generates the superimposed grayscale value of each pixel, step S20 is performed, and the superimposed grayscale value corresponding to each pixel is respectively subtracted from the superimposed grayscale value corresponding to the adjacent pixel, and then added. In total, a plurality of grayscale comparison values corresponding to the plurality of pixels are generated. Next, step S22 is performed to compare the plurality of gray scale comparison values to generate the defect distribution information for reference by the detecting personnel. In general, the grayscale comparison value of each pixel between the pixels has the same value of the grayscale comparison value of most pixels, and the majority of the grayscale comparison values can be regarded as normal, and different from the majority of the grayscale comparison values. Pixel grayscale comparison values are considered abnormal. Therefore, in practical applications, step S22 may determine whether each of the plurality of pixels has a defect by comparing whether each of the plurality of gray scale comparison values is abnormal.

綜上所述,根據本發明之光學檢測裝置及光學檢測方法由於使用影像疊加之方式進行影像處理,故可避免光學檢測面板缺陷時分別針對每一個影像各自進行缺陷比對之情形,以大幅減少光學檢測面板缺陷所需之整體辨識時間,亦可減少儲存所有影像之空間。尤其當光學檢測之準確度要求較嚴格,亦即需要進行影像處理之影像數目較多時,本發明具有之節省時間及空間的優勢即更加明顯。In summary, according to the optical detecting device and the optical detecting method of the present invention, since image processing is performed by using image superimposition, it is possible to avoid the defect comparison of each of the images when the optical detecting panel is defective, thereby greatly reducing the situation. The overall recognition time required for optical inspection panel defects also reduces the space for storing all images. Especially when the accuracy of the optical detection is strict, that is, the number of images that need to be processed by the image is large, the advantage of saving time and space of the invention is more obvious.

藉由以上較佳具體實施例之詳述,係希望能更加清楚描述本發明之特徵與精神,而並非以上述所揭露的較佳具體實施例來對本發明之範疇加以限制。相反地,其目的是希望能涵蓋各種改變及具相等性的安排於本發明所欲申請之專利範圍的範疇內。The features and spirit of the present invention will be more apparent from the detailed description of the preferred embodiments. On the contrary, the intention is to cover various modifications and equivalents within the scope of the invention as claimed.

S10~S22...流程步驟S10~S22. . . Process step

1...光學檢測裝置1. . . Optical detection device

2...顯示面板2. . . Display panel

10...影像擷取模組10. . . Image capture module

12...影像處理模組12. . . Image processing module

14...儲存模組14. . . Storage module

21...第一像素twenty one. . . First pixel

22...第二像素twenty two. . . Second pixel

23...第三像素twenty three. . . Third pixel

24...第四像素twenty four. . . Fourth pixel

25...第五像素25. . . Fifth pixel

26...第六像素26. . . Sixth pixel

圖一係繪示根據本發明之第一具體實施例的光學檢測裝置針對顯示面板進行檢測之示意圖。1 is a schematic view showing the detection of a display panel by an optical detecting device according to a first embodiment of the present invention.

圖二係繪示根據本發明之第一具體實施例之光學檢測裝置的功能方塊圖。Figure 2 is a functional block diagram showing an optical detecting apparatus according to a first embodiment of the present invention.

圖三(A)係繪示顯示面板所包含之像素。Figure 3 (A) shows the pixels included in the display panel.

圖三(B)係繪示影像處理模組產生缺陷分佈資訊之一實例。Figure 3 (B) shows an example of the defect distribution information generated by the image processing module.

圖四(A)及圖四(B)係繪示影像處理模組產生缺陷分佈資訊之另一實例。FIG. 4(A) and FIG. 4(B) illustrate another example of the defect distribution information generated by the image processing module.

圖五係繪示根據本發明之第二具體實施例之光學檢測方法的流程圖。Figure 5 is a flow chart showing an optical detecting method according to a second embodiment of the present invention.

圖六係繪示該光學檢測方法根據每一個像素之疊加灰階值產生缺陷分佈資訊之詳細流程圖。FIG. 6 is a detailed flow chart showing the defect detection information generated by the optical detection method according to the superimposed gray scale value of each pixel.

1...光學檢測裝置1. . . Optical detection device

10...影像擷取模組10. . . Image capture module

12...影像處理模組12. . . Image processing module

14...儲存模組14. . . Storage module

Claims (13)

一種光學檢測裝置(optical inspection apparatus),應用於一顯示面板(displaying panel)之缺陷分佈(defect distribution)的檢測,該光學檢測裝置包含:一影像擷取模組,用以擷取該顯示面板於不同的時間所顯示之複數個影像;以及一影像處理模組,耦接至該影像擷取模組,該影像處理模組根據該複數個影像產生一疊加影像並根據該疊加影像產生對應於該顯示面板之一缺陷分佈資訊;其中,該顯示面板包含複數個像素(pixel),當該顯示面板顯示該複數個影像中之一影像時,該複數個像素中之每一個像素均分別對應於一灰階值(gray-level value),該影像處理模組係分別將每一個像素於顯示該複數個影像時所對應之複數個灰階值相加,以得到該疊加影像的複數個疊加灰階值,之後分別將對應每一個像素之疊加灰階值減去與其相鄰像素之疊加灰階值,以據以產生對應於該複數個像素之複數個灰階比較值,再比較該複數個灰階比較值以產生該缺陷分佈資訊,且多數之該複數個疊加灰階值具有一相同數值。 An optical inspection apparatus for detecting a defect distribution of a display panel, the optical detecting apparatus comprising: an image capturing module for capturing the display panel a plurality of images displayed at different times; and an image processing module coupled to the image capturing module, the image processing module generating a superimposed image according to the plurality of images and generating corresponding to the superimposed image according to the superimposed image a defect distribution information of the display panel; wherein the display panel includes a plurality of pixels, and when the display panel displays one of the plurality of images, each of the plurality of pixels respectively corresponds to one a gray-level value, the image processing module respectively adds a plurality of grayscale values corresponding to each pixel in displaying the plurality of images to obtain a plurality of superimposed grayscales of the superimposed image. a value, and then subtracting the superimposed grayscale value corresponding to each pixel from the superimposed grayscale value of the adjacent pixel, respectively, to generate corresponding to the plurality of pixels a plurality of gray scale comparison values of the pixels, and comparing the plurality of gray scale comparison values to generate the defect distribution information, and a plurality of the plurality of superimposed gray scale values have an identical value. 一種光學檢測裝置,應用於一顯示面板之缺陷分佈的檢測,該光學檢測裝置包含:一影像擷取模組,用以擷取該顯示面板於不同的時間所顯示之複數個影像;以及一影像處理模組,耦接至該影像擷取模組,該影像處理模組 根據該複數個影像產生一疊加影像並根據該疊加影像產生對應於該顯示面板之一缺陷分佈資訊;其中,該顯示面板包含複數個像素,當該顯示面板顯示該複數個影像中之一影像時,該複數個像素中之每一個像素均分別對應於一灰階值,該影像處理模組係分別將每一個像素於顯示該複數個影像時所對應之複數個灰階值平方後相加,以得到該疊加影像的複數個平方後疊加灰階值,之後分別將每一個像素之平方後疊加灰階值減去與其相鄰像素之平方後疊加灰階值,以據以產生對應於該複數個像素之複數個灰階比較值,再比較該複數個灰階比較值以產生該缺陷分佈資訊,且多數之該複數個平方後疊加灰階值具有一相同數值。 An optical detecting device is applied to the detection of a defect distribution of a display panel, the optical detecting device comprising: an image capturing module for capturing a plurality of images displayed by the display panel at different times; and an image The processing module is coupled to the image capturing module, and the image processing module Generating a superimposed image according to the plurality of images and generating defect distribution information corresponding to the display panel according to the superimposed image; wherein the display panel includes a plurality of pixels, when the display panel displays one of the plurality of images Each of the plurality of pixels corresponds to a grayscale value, and the image processing module respectively adds a square of the plurality of grayscale values corresponding to each pixel when displaying the plurality of images, After the plurality of squares of the superimposed image are obtained, the grayscale values are superimposed, and then the squared superimposed grayscale values of each pixel are respectively subtracted from the squares of the adjacent pixels and the grayscale values are superimposed to generate corresponding numbers. a plurality of gray scale comparison values of the pixels, and then comparing the plurality of gray scale comparison values to generate the defect distribution information, and a plurality of the plurality of squared superimposed gray scale values have an identical value. 如申請專利範圍第1或2項所述之光學檢測裝置,其中該複數個影像係根據該顯示面板顯示的複數個顯示樣式(pattern)而產生。 The optical detecting device of claim 1 or 2, wherein the plurality of images are generated according to a plurality of display patterns displayed on the display panel. 如申請專利範圍第3項所述之光學檢測裝置,其中該複數個顯示樣式中之所有顯示樣式均相異。 The optical detecting device of claim 3, wherein all of the display patterns of the plurality of display patterns are different. 如申請專利範圍第3項所述之光學檢測裝置,其中該複數個顯示樣式係以隨機方式產生或由使用者設定而得。 The optical detecting device of claim 3, wherein the plurality of display patterns are generated in a random manner or are set by a user. 如申請專利範圍第1或2項所述之光學檢測裝置,進一步包含:一儲存模組,耦接至該影像擷取模組及該影像處理模組,用以儲存該影像擷取模組所擷取之該複數個影像並提供 該影像處理模組進行讀取。 The optical detection device of claim 1 or 2, further comprising: a storage module coupled to the image capture module and the image processing module for storing the image capture module Capture the multiple images and provide The image processing module reads. 一種光學檢測方法(optical inspection method),應用於一顯示面板之缺陷分佈的檢測,該顯示面板包含複數個像素,當該顯示面板顯示該複數個影像中之一影像時,該複數個像素中之每一個像素均分別對應於一灰階值,該光學檢測方法包含下列步驟:擷取該顯示面板於不同的時間所顯示之複數個影像;分別將每一個像素於顯示該複數個影像時所對應之複數個灰階值平方後相加,以得到該疊加影像的複數個平方後疊加灰階值;分別將每一個像素之平方後疊加灰階值減去與其相鄰像素之平方後疊加灰階值,並據以產生對應於該複數個像素之複數個灰階比較值;以及比較該複數個灰階比較值以產生該缺陷分佈資訊。 An optical inspection method for detecting a defect distribution of a display panel, the display panel includes a plurality of pixels, and when the display panel displays one of the plurality of images, the plurality of pixels Each of the pixels corresponds to a grayscale value, and the optical detection method includes the following steps: capturing a plurality of images displayed by the display panel at different times; respectively, respectively, corresponding to each pixel when displaying the plurality of images The plurality of grayscale values are squared and added to obtain a plurality of squared superimposed grayscale values of the superimposed image; respectively, the squared superimposed grayscale values of each pixel are respectively subtracted from the square of the adjacent pixels and then superimposed with grayscale And generating a plurality of grayscale comparison values corresponding to the plurality of pixels; and comparing the plurality of grayscale comparison values to generate the defect distribution information. 如申請專利範圍第7項所述之光學檢測方法,其中分別將每一個像素之平方後疊加灰階值減去與其相鄰像素之平方後疊加灰階值,並據以產生對應於該複數個像素之複數個灰階比較值包含:分別將非位於邊界之每一個像素的平方後疊加灰階值減去與其相鄰之兩像素的平方後疊加灰階值所得之兩差值相加,並據以產生對應於該複數個像素之複數個灰階比較值。 The optical detection method of claim 7, wherein the squared superimposed grayscale value of each pixel is respectively subtracted from the square of the adjacent pixel and the grayscale value is superimposed, and correspondingly generated corresponding to the plurality of pixels The plurality of grayscale comparison values of the pixels include: adding the difference between the squared post-gradation grayscale value of each pixel not located at the boundary and the squared value of the adjacent two pixels, and adding the grayscale values, and A plurality of gray scale comparison values corresponding to the plurality of pixels are generated. 一種光學檢測方法,應用於一顯示面板之缺陷分佈的檢測,該顯示面板包含複數個像素,當該顯示面板顯示該複數個影像中之一影像時,該複數個像素中之每一個像素均分別對應於一灰階值,疊加該複數個影像時會產生複數個疊加灰階值以對應該複數個像素,該光學檢測方法包含下列步驟:擷取該顯示面板於不同的時間所顯示之複數個影像;疊加該複數個影像以產生一疊加影像;分別將每一個像素之疊加灰階值減去與其相鄰像素之疊加灰階值,並據以產生對應於該複數個像素之複數個灰階比較值;以及比較該複數個灰階比較值以產生該缺陷分佈資訊。 An optical detection method is applied to the detection of a defect distribution of a display panel, the display panel includes a plurality of pixels, and when the display panel displays one of the plurality of images, each of the plurality of pixels is respectively Corresponding to a gray scale value, when the plurality of images are superimposed, a plurality of superimposed gray scale values are generated to correspond to the plurality of pixels, and the optical detecting method comprises the following steps: capturing a plurality of the display panels displayed at different times An image; superimposing the plurality of images to generate a superimposed image; respectively subtracting a superimposed grayscale value of each pixel from a superimposed grayscale value of the adjacent pixel, and generating a plurality of grayscales corresponding to the plurality of pixels accordingly Comparing the values; and comparing the plurality of grayscale comparison values to generate the defect distribution information. 如申請專利範圍第7或9項所述之光學檢測方法,另包含該顯示面板顯示複數個樣式(pattern)而產生該複數個影像。 The optical detection method of claim 7 or 9, further comprising the display panel displaying a plurality of patterns to generate the plurality of images. 如申請專利範圍第10項所述之光學檢測方法,其中該複數個樣式中之所有樣式均相異。 The optical detection method of claim 10, wherein all of the plurality of patterns are different. 如申請專利範圍第10項所述之光學檢測方法,另包含以隨機方式或由使用者設定產生該複數個樣式。 The optical detection method of claim 10, further comprising generating the plurality of patterns in a random manner or by a user setting. 如申請專利範圍第9項所述之光學檢測方法,其中分別將每一個像素之疊加灰階值減去與其相鄰像素之疊加灰階值,並據以 產生對應於該複數個像素之複數個灰階比較值包含:分別將非位於邊界之每一個像素的疊加灰階值減去與其相鄰之兩像素的疊加灰階值所得之兩差值相加,並據以產生對應於該複數個像素之複數個灰階比較值。 The optical detecting method according to claim 9, wherein the superimposed grayscale value of each pixel is respectively subtracted from the superimposed grayscale value of the adjacent pixel, and Generating a plurality of grayscale comparison values corresponding to the plurality of pixels includes: adding the difference between the superimposed grayscale values of each pixel not located at the boundary and the superimposed grayscale values of the two adjacent pixels respectively And generating a plurality of grayscale comparison values corresponding to the plurality of pixels.
TW98102592A 2009-01-22 2009-01-22 Optical inspection apparatus and optical inspection method TWI397683B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW98102592A TWI397683B (en) 2009-01-22 2009-01-22 Optical inspection apparatus and optical inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW98102592A TWI397683B (en) 2009-01-22 2009-01-22 Optical inspection apparatus and optical inspection method

Publications (2)

Publication Number Publication Date
TW201028680A TW201028680A (en) 2010-08-01
TWI397683B true TWI397683B (en) 2013-06-01

Family

ID=44853733

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98102592A TWI397683B (en) 2009-01-22 2009-01-22 Optical inspection apparatus and optical inspection method

Country Status (1)

Country Link
TW (1) TWI397683B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111403310B (en) * 2020-03-30 2022-10-21 上海华力集成电路制造有限公司 Wafer defect monitoring method and monitoring system thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200831886A (en) * 2006-09-07 2008-08-01 Toshiba Kk Method for inspecting unevenness, manufacturing method for display panel and apparatus for inspecting unevenness

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200831886A (en) * 2006-09-07 2008-08-01 Toshiba Kk Method for inspecting unevenness, manufacturing method for display panel and apparatus for inspecting unevenness

Also Published As

Publication number Publication date
TW201028680A (en) 2010-08-01

Similar Documents

Publication Publication Date Title
TWI787296B (en) Optical inspection method, optical inspection device and optical inspection system
US7978903B2 (en) Defect detecting method and defect detecting device
CN102279189B (en) Defect detecting device, defect restoring device and defect detecting method
JP5236241B2 (en) Defect inspection apparatus, defect inspection method, image processing apparatus, program, and computer-readable recording medium recording the program
TWI758609B (en) Image generation device and image generation method
JP2007315967A (en) Defect detection apparatus, defect detection method, defect detection program, and computer-readable recording medium stored with the progtram
CN101487934B (en) Optical detection apparatus and method
JP2006303491A (en) Method of inspecting wafer
JP2014164221A (en) Defect detection method for display panel and defect detection device for display panel
KR101261016B1 (en) method and apparatus for automatic optical inspection of flat panel substrate
JP4143660B2 (en) Image analysis method, image analysis apparatus, inspection apparatus, image analysis program, and computer-readable recording medium
JP2005249415A (en) Stain defect detecting method and stain defect detector
TWI397683B (en) Optical inspection apparatus and optical inspection method
JP3695120B2 (en) Defect inspection method
CN108663371B (en) Method and system for detecting dust and foreign matters on display panel
JP2008032653A (en) Test pattern generating method, data structure of test pattern, test pattern generating device, display panel inspection system, control program, and computer readable recording medium with the program recorded thereon
JP5239275B2 (en) Defect detection method and defect detection apparatus
JP2005140655A (en) Method of detecting stain flaw, and stain flaw detector
JP2006201523A (en) Method and instrument for inspecting liquid crystal display panel
JP2004219176A (en) Method and apparatus for detecting pixel irregulality failing
JP5145768B2 (en) Display test equipment
JP2006145228A (en) Unevenness defect detecting method and unevenness defect detector
JP2005181040A (en) Defect detection method for display panel, its detection device, and manufacturing method for the display panel
JP2005195515A (en) Apparatus and method for inspecting flat panel display device
US12013602B2 (en) Method of detecting defective pixels in electronic displays

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees