TWI395775B - Self-assembly method for manufacturing nano/micro structure - Google Patents

Description

Self-assembly method for manufacturing micro-nano structure

This invention relates to a method of making a micro-nanostructure, and more particularly to a self-assembly method for making a micro-nanostructure.

At present, a process for forming a self-assembled micro-nano structure on a substrate is a Langmuir-Blodgett (hereinafter referred to as "LB") thin film method. In the process of the LB thin film technology, a plurality of amphiphilic molecules are first dispersed on the surface of the volatile solution to uniformly distribute the amphiphilic molecules at the interface between the air and the solution. Then, when the organic solvent is volatilized, the amphiphilic molecules are distributed between the interface of water and air, wherein the hydrophilic groups of the amphiphilic molecules are in contact with water downward, and the hydrophobic groups thereof are directed upwards away from the water layer. At this point, the layer of amphiphilic molecules on the surface of the liquid must be carefully squeezed to reduce the distance between the molecules and the molecules by extrusion, thereby forming a tightly packed monolayer. Then, the flat substrate is immersed or removed from the liquid surface of the monolayer, and at the same time, the surface pressure of the liquid surface is maintained by a motor device such as a robot arm, so that the monolayer on the liquid surface can be transferred to the substrate. On the surface, a tightly arranged, regular and directional molecular film is formed on the surface of the substrate.

However, the LB film process still has the following disadvantages, including: it takes a long time to wait for the volatile solvent in the solution to volatilize; the distribution of the amphiphilic molecules on the liquid surface is a fixed amount, and the substrate is pulled up. Stretching, so that the amphiphilic molecules adhere to the surface of the substrate, so that the liquid molecules must be continuously squeezed to maintain the tightness; in addition, the size of the substrate is limited by the fixed amount of the amphiphilic molecules in the solution. It is also limited; in addition, the surface pressure of the liquid surface must be accurately controlled; moreover, the rate of moving the solid surface on the LB film is slow and the commercial value is low.

Accordingly, an aspect of the present invention provides a self-assembly method for fabricating a micro-nano structure by mixing particles having a hydrophobic surface with a solvent of a short lipophilic group, and then injecting the formed mixture into water, the particles. A self-assembled monolayer structure can be formed between the solution and the air interface by the exchange of the short lipophilic solvent thereon with water. Therefore, the process does not need to use amphiphilic molecules, and does not need to accurately control the surface pressure of the solution, and can quickly form a high-density array of micro-nano structures, and the particles can be continuously replenished during the process, thereby further improving the process convenience.

Another aspect of the present invention provides a self-assembly method for fabricating a micro-nano structure by mixing particles having a hydrophilic surface with a polar solvent, and then injecting the formed mixture into a non-polar solvent by using particles. The exchange of a polar solvent overlying its surface with a non-polar solvent results in a self-assembled monolayer structure between the solution and the air interface. Therefore, the self-assembly process does not require the use of amphiphilic molecules, and does not require precise control of the surface pressure of the solution to rapidly form a high-density array of micro-nanostructures. In addition, the particles can be continuously replenished during the process, thus providing extremely high process convenience.

According to the above object of the present invention, a self-assembly method for fabricating a micro-nano structure is provided, comprising: mixing a plurality of particles with a short lipophilic solvent to form a mixture, wherein each particle has a hydrophobic surface; injecting the mixture a water such that one of the particles is partially floated on one of the water surfaces; a substrate is placed in the water; and the substrate is pulled out of the water so that the aforementioned portions of the particles are attached to be arranged on one surface of the substrate.

According to an embodiment of the invention, the contact angle of the particles with water is greater than 60 degrees.

According to another embodiment of the present invention, the material of the particles is a substance treated with a decane treating agent.

In an exemplary embodiment, the above decane treating agent is a monodecane compound, and the decane compound has the formula R ¹ R ² R ³ R ⁴ Si, wherein R ¹ , R ² , R ³ and R ⁴ are the same or a different group, and the group is a halogen, a linear or branched alkyl group having 4 to 22 carbon atoms, OR ⁵ , phenyl, phenylalkoxy, benzyloxy, or phenylalkyl, Wherein R ⁵ is H or an alkyl group having 1 to 6 carbon atoms, and the decane compound contains 1 to 3 halogens and a linear or branched alkyl group having 4 to 22 carbon atoms, or an OR ⁵ substitution And a straight or branched alkyl group having 4 to 22 carbon atoms.

In another exemplary embodiment, the above decane treating agent is a monodecane compound, and the decane compound has the formula R ¹ R ² R ³ R ⁴ Si, wherein R ¹ , R ² , R ³ and R ⁴ are respectively a group of the same or different, and the group is a straight or branched alkyl group of OR ₅ , 1 to 22 carbon atoms, wherein R ⁵ is H or an alkyl group having 1 to 6 carbon atoms, and The decane compound contains 1 to 3 OR ⁵ substituents.

According to the above object of the present invention, a self-assembly method for fabricating a micro-nano structure is further provided, comprising: mixing a plurality of particles with a polar solvent to form a mixture, wherein each particle has a hydrophilic surface; and injecting the mixture into a non- a polar solvent such that one of the particles is partially floated on one of the non-polar solvents; a substrate is placed in the non-polar solvent; and the substrate is pulled from the non-polar solvent to cause the particles to be Partially attached and arranged on one surface of the substrate.

According to an embodiment of the invention, the particles are spherical, square, stick, strip or triangle.

According to another embodiment of the invention, the particles are a plate or a cylinder, wherein the cylinder may be hollow or solid.

Please refer to FIG. 1 and FIG. 2A to FIG. 2C , wherein FIG. 1 is a flow chart showing a self-assembly method for fabricating a micro-nano structure according to an embodiment of the present invention, and FIG. 2A to FIG. 2C are diagrams. A schematic diagram of a device for fabricating a self-assembly method of a micro-nano structure according to an embodiment of the present invention is shown. In the present embodiment, when the self-assembly method for fabricating the micro-nano structure is performed, a plurality of particles 200 and a solvent 202 are first provided (please refer to FIG. 2A first), wherein the size of the particles 200 may be, for example, micron or nanometer. level. In one embodiment, the particle size of the particles 200 can be, for example, between substantially 100 nm and substantially 100 μm. Further, the shape of these particles 200 may be, for example, a sphere, a square, a stick, a strip, or a triangle. Then, as in step 100 shown in Fig. 1, a mixing step is performed to mix the particles 200 with the solvent 202 to form a mixture 204. Next, a accommodating tank 206 containing a solvent 208 is provided. As in step 102 shown in FIG. 1, the formed mixture 204 can be injected into the solvent 208 of the accommodating tank 206 by, for example, a dropper 210.

In a first exemplary embodiment, the particles 200 have a hydrophobic surface 220, the solvent 202 is a short lipophilic based solvent, and the solvent 208 is water. The solvent 202 having a short lipophilic group may be a 1 to 10 carbon alcohol, an alkane, or a ketone solvent such as methanol. In an embodiment, the contact angle of the particles 200 with water can be, for example, greater than 60 degrees. By dynamic exchange of the short lipophilic solvent 202 over the surface 220 of the particle 200 with water, a portion of the particles 200 can float on the interface of the solvent 208 with air, i.e., the level 214 of the solvent 208. The material of the particles 200 may be, for example, an inorganic material, an organic material, or a mixture of an organic material and an inorganic material. In one embodiment of the present exemplary embodiment, the particles 200 may themselves be composed of a hydrophobic material such as polydimethyl methoxy alkane, polymethylhydroquinone, polydiethyl decane, methyl phenyl. It consists of a siloxane, a polyphthalate, a polymethylsesquioxane or a mixture thereof.

In another embodiment of the exemplary embodiment, the material of the particle 200 itself may be a non-hydrophobic material, but the material of the particle 200 may be a substance treated with a decane treating agent, before being treated with a decane treating agent. The surface 220 of these particles 200 may be surface treated with, for example, ultraviolet light, plasma or an acid-base material. In one embodiment, the aforementioned decane treating agent may be a decane compound, and the decane compound has the formula R ¹ R ² R ³ R ⁴ Si, wherein R ¹ , R ² , R ³ and R ⁴ may be the same group. a group or a different group, and this group may, for example, be a halogen, a linear or branched alkyl group having 4 to 22 carbon atoms, OR ⁵ , phenyl, phenylalkoxy, benzyloxy, or benzene An alkyl group, wherein R ⁵ is H or an alkyl group having 1 to 6 carbon atoms, and the decane compound preferably contains 1 to 3 halogens and a linear or branched alkane having 4 to 22 carbon atoms a substituent, or an OR ⁵ substituent, with a straight or branched alkyl group having 4 to 22 carbon atoms. In another embodiment, the aforementioned decane treating agent may be a decane compound, and the decane compound has the formula R ¹ R ² R ³ R ⁴ Si, wherein R ¹ , R ² , R ³ and R ⁴ are respectively the same a group or a different group, and this group is a straight or branched alkyl group of OR ⁵ , 1 to 22 carbon atoms, wherein R ⁵ is H or an alkyl group having 1 to 6 carbon atoms, and this The decane compound contains from 1 to 3 OR ⁵ substituents.

In still another embodiment of the exemplary embodiment, the surface 220 of the particle 200 may be subjected to a hydrophobization treatment by, for example, a plasma treatment method, wherein the plasma gas utilized in the plasma treatment may be, for example, fluorine-containing. Gas-like, decane-containing, alkane of 1 to 10 carbon atoms, olefin of 1 to 10 carbon atoms, acetylene of 1 to 10 carbon atoms or a mixture thereof. In an embodiment, the hydrophobic surface 220 of the particle 200 can comprise, for example, a fluorine-containing material.

In a second exemplary embodiment, the particles 200 have a hydrophilic surface 220, the solvent 202 is a polar solvent, and the solvent 208 is a non-polar solvent. By dynamic exchange of polar solvent 202 and non-polar solvent 208 coated on surface 220 of particle 200, a portion of these particles 200 can float at the interface of solvent 208 and air, i.e., liquid level 214 of solvent 208.

Next, as shown in step 104 of FIG. 1, the substrate 212 is placed in the solvent 208, and some or all of the substrate 212 is immersed in the solvent 208 as shown in FIG. 2A. The substrate 212 can be of any shape, such as a flat or cylindrical structure, wherein the cylinder can be a solid or hollow structure. Further, the substrate 212 may be a single layer structure composed of a single material layer. The substrate 212 may also be a composite structure composed of at least two material layers.

Next, as shown in step 106 of FIG. 1, the substrate 212 can be pulled out of the solvent 208 in the direction indicated by the arrow 218. When the substrate 212 is pulled out of the solvent 208, since most of the particles 200 injected into the solvent 208 move toward the liquid surface 214, the particles 202 may be attached to the surface 216 of the substrate 212 by capillary action, for example, Figure 2B shows.

As shown in FIG. 2C, while the substrate 212 is pulled out of the solvent 208, the mixture 204 of the particles 200 and the solvent 202 can be continuously injected into the solvent 208 to supplement the amount of particles 200 on the liquid surface 214 of the solvent 208. The liquid level 214 is provided with particles 200 of sufficient density such that the particles 200 are arranged in self-assembly on the desired surface 216 of the substrate 212.

According to the above embodiments of the present invention, it is an advantage of the present invention that in the self-assembly method for fabricating a micro-nano structure of the present invention, particles can be exchanged with water by coating a short lipophilic solvent on the surface thereof. The self-assembled monolayer structure can be formed between the solution and the air interface, so that the micro-nano structure with high density can be quickly formed without using the amphiphilic molecules and the surface pressure of the solution can be accurately controlled, and the particles can be processed during the process. Continuous replenishment, thus increasing the convenience of the process.

It can be seen from the above embodiments of the present invention that another advantage of the present invention is that in the self-assembly method for manufacturing a micro-nano structure of the present invention, particles can be exchanged with a non-polar solvent by coating a surface of a polar solvent. A self-assembled monolayer structure is formed between the solution and the air interface, so that the high-density array of micro-nanostructures can be quickly formed without using the amphiphilic molecules and without precisely controlling the surface pressure of the solution. In addition, the particles can be continuously replenished during the process, thus providing extremely high process convenience.

Although the present invention has been described above in terms of a preferred embodiment, it is not intended to limit the invention, and it is intended that various modifications may be made without departing from the spirit and scope of the invention. And the scope of the present invention is defined by the scope of the appended claims.

100. . . step

102. . . step

104. . . step

106. . . step

200. . . particle

202. . . Solvent

204. . . mixture

206. . . Locating slot

208. . . Solvent

210. . . dropper

212. . . Substrate

214. . . Liquid level

216. . . surface

218. . . arrow

220. . . surface

The above and other objects, features, advantages and embodiments of the present invention will become more apparent and understood.

1 is a flow chart showing a self-assembly method for fabricating a micro-nano structure in accordance with an embodiment of the present invention.

2A to 2C are schematic views showing the flow of a device for fabricating a self-assembly method of a micro-nano structure according to an embodiment of the present invention.

200. . . particle

202. . . Solvent

204. . . mixture

206. . . Locating slot

208. . . Solvent

210. . . dropper

212. . . Substrate

214. . . Liquid level

216. . . surface

218. . . arrow

220. . . surface

Claims (16)

A self-assembly method for fabricating a micro-nano structure, comprising: mixing a plurality of particles with a short lipophilic solvent to form a mixture, wherein each of the particles has a hydrophobic surface, and each of the particles is a monodecane Treating the treated particles or monooxane particles, and the short lipophilic solvent is a 1 to 10 carbon alcohol, alkane, or ketone solvent; injecting the mixture into a water to partially float the particles One of the water surfaces; placing a substrate into the water; and pulling the substrate from the water to adhere the portion of the particles to a surface of the substrate. A self-assembly method for fabricating a micro-nanostructure according to claim 1, wherein the particles have a contact angle with the water of more than 60 degrees. The self-assembly method for manufacturing a micro-nano structure according to claim 1, wherein the particles are subjected to a surface treatment before the treatment with the decane-based treatment agent, and the surface treatment is performed by using ultraviolet rays and electricity. Pulp or acid-base substance. The self-assembly method for producing a micro-nano structure according to claim 1, wherein the decane-based treating agent is a monodecane compound, and the decane compound has the formula R ¹ R ² R ³ R ⁴ Si, wherein R ¹ , R ² , R ³ and R ⁴ are the same or different one group, and the group is a halogen, a linear or branched alkyl group having 4 to 22 carbon atoms, OR ⁵ , a phenyl group, a phenyl alkoxy group. , benzyloxy, or phenylalkyl, wherein R ⁵ is H or an alkyl group having 1 to 6 carbon atoms, and the decane compound contains 1 to 3 halogens and a linear chain having 4 to 22 carbon atoms Or a branched alkyl group, or an OR ⁵ substituent and a straight or branched alkyl group having 4 to 22 carbon atoms. The self-assembly method for producing a micro-nano structure according to claim 1, wherein the decane-based treating agent is a monodecane compound, and the decane compound has the formula R ¹ R ² R ³ R ⁴ Si, wherein R ¹ , R ² , R ³ and R ⁴ are each the same or different one group, and the group is a straight or branched alkyl group of OR ⁵ , 1 to 22 carbon atoms, wherein R ⁵ is H or has 1 to An alkyl group of 6 carbon atoms, and the decane compound contains 1 to 3 OR ⁵ substituents. The self-assembly method for manufacturing a micro-nano structure according to claim 1, wherein the materials of the decane-based particles are polydimethyl siloxane, polymethylhydroquinone, polydiethyl decane, Methylphenyl decane, polyphthalate, polymethylsesquioxanes or mixtures thereof. A self-assembly method for fabricating a micro-nanostructure according to claim 1, wherein the hydrophobic surface of each of the particles is hydrophobized by a plasma treatment. The self-assembly method for manufacturing a micro-nano structure according to claim 7, wherein the plasma treatment utilizes a plasma gas, and the plasma gas is a fluorine-containing gas, a decane-containing, alkane having 1 to 10 carbon atoms. An olefin of 1 to 10 carbon atoms, an acetylene of 1 to 10 carbon atoms or a mixture thereof. A self-assembly method for fabricating a micro-nanostructure according to claim 1, wherein the hydrophobic surface of each of the particles comprises a fluorine-containing material. The self-assembly method for manufacturing a micro-nano structure according to claim 1, wherein each of the particles is a sphere, a square, a stick, a strip, or a triangle. The self-assembly method for manufacturing a micro-nano structure according to claim 1, wherein the substrate is a flat plate or a cylinder. A self-assembly method for fabricating a micro-nanostructure as described in claim 11, wherein the cylinder is hollow. A self-assembly method for fabricating a micro-nanostructure as described in claim 11, wherein the cylinder is solid. A self-assembly method for fabricating a micro-nanostructure according to claim 1, wherein the substrate is a single layer structure. The self-assembly method for fabricating a micro-nanostructure according to claim 1, wherein the substrate is a composite structure of at least two layers. Self-assembled party for manufacturing micro-nanostructure as described in claim 1 The method wherein the particles have a particle size between substantially 100 nm and substantially 100 μm.