TWI394995B - Exposure apparatus - Google Patents

Exposure apparatus Download PDF

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Publication number
TWI394995B
TWI394995B TW96104065A TW96104065A TWI394995B TW I394995 B TWI394995 B TW I394995B TW 96104065 A TW96104065 A TW 96104065A TW 96104065 A TW96104065 A TW 96104065A TW I394995 B TWI394995 B TW I394995B
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gear
ring gear
disposed
exposure apparatus
light source
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TW96104065A
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Chinese (zh)
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TW200834144A (en
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Kun I Yuan
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Hon Hai Prec Ind Co Ltd
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曝光裝置Exposure device

本發明涉及一種曝光裝置,特別涉及一種可用於鏡頭模組組裝過程中之曝光裝置。The invention relates to an exposure device, in particular to an exposure device which can be used in the assembly process of a lens module.

應用於相機或光學儀器上之鏡頭模組通常包括鏡頭座、鏡筒、透鏡組、間隔環與濾光片等元件。其中,透鏡組、間隔環與濾光片沿鏡頭模組之光軸方向依次固定於鏡筒內。鏡筒外壁與鏡頭座內壁通常設有相配合之螺紋,鏡筒藉由螺紋旋入到鏡頭座內固定。Lens modules used in cameras or optical instruments typically include components such as a lens mount, a lens barrel, a lens group, a spacer ring, and a filter. The lens group, the spacer ring and the filter are sequentially fixed in the lens barrel along the optical axis direction of the lens module. The outer wall of the lens barrel and the inner wall of the lens holder are usually provided with matching threads, and the lens barrel is screwed into the lens holder to be fixed.

於鏡頭模組之組裝過程中,將鏡片、濾光片等光學元件組入鏡筒並將其固定,通常需要於光學元件上塗上UV膠(紫外線膠),再利用曝光機之光源發出之UV光將光學元件上之UV膠固化,從而使鏡片、濾光片等光學元件固定於鏡筒中。然而,先前之曝光機之光源所發出之UV光均存在光強分佈不均的情況,一般越靠近光源中心的位置光強越強,如果塗有UV膠之光學元件被光強較大之光照射後容易造成曝光過度,而使UV膠黃化失去粘附功能;如果UV膠被光強較小之光照射後容易造成曝光不足,而使UV膠無法固化,並無法牢固的粘住光學元件。In the assembly process of the lens module, optical components such as lenses and filters are incorporated into the lens barrel and fixed, usually UV glue (ultraviolet glue) is applied to the optical component, and then the UV light is emitted from the light source of the exposure machine. The light cures the UV glue on the optical element to fix the optical components such as the lens and the filter in the lens barrel. However, the UV light emitted by the light source of the previous exposure machine has uneven distribution of light intensity. Generally, the light intensity is stronger when the light source is coated with the UV glue. After exposure, it is easy to cause overexposure, and the UV glue yellowing loses the adhesion function; if the UV glue is exposed to light with less light intensity, it is easy to cause underexposure, and the UV glue cannot be cured, and the optical component cannot be firmly adhered. .

有鑑於此,有必要提供一種可以使被曝光物均勻曝光之曝光裝置。In view of the above, it is necessary to provide an exposure apparatus which can uniformly expose an exposed object.

以下將以實施例說明一種可以使被曝光物均勻曝光之曝光裝置。An exposure apparatus which can uniformly expose an exposed object will be described below by way of example.

一種曝光裝置,其包括光源及一個與該光源相對設置之承載機構,該光源發出之光束投射到該承載機構上,該承載機構包括一個承載台,一個設置於該承載台上且設置有內齒牙之齒圈,一個設置於該承載台上且與該齒圈共中心軸線之第一齒輪,至少一個設置於該齒圈與該第一齒輪之間且分別與該齒圈之內齒牙及該第一齒輪相嚙合之第二齒輪,所述至少一個第二齒輪之與該光源相面對之表面上設置有至少一個用於容置被曝光物之容置槽,所述至少一個第二齒輪繞該中心軸線旋轉之同時可以繞其自身之中心線自轉。An exposure apparatus comprising a light source and a bearing mechanism disposed opposite the light source, the light beam emitted by the light source being projected onto the carrying mechanism, the carrying mechanism comprising a carrying platform, one disposed on the carrying platform and provided with internal teeth a ring gear of a tooth, a first gear disposed on the platform and having a central axis with the ring gear, at least one disposed between the ring gear and the first gear and respectively associated with the internal teeth of the ring gear a second gear meshing with the first gear, a surface of the at least one second gear facing the light source is provided with at least one receiving groove for receiving the exposed object, the at least one second The gear can rotate about its own centerline while rotating about the central axis.

相較於先前技術,所述至少一個第二齒輪可以繞其自身之中心線自轉,以使所述至少一個第二齒輪上之用以容置被曝光物之至少一個容置槽與該光源之相對距離產生週期性變化,即該容置槽將週期性之經過由光源產生之光強較強之區域與光強較弱之區域;所述至少一個第二齒輪可以繞該第一齒輪之中心軸線旋轉,以使該容置槽週期性的經過由光源產生之沿該第一齒輪之圓周方向之光強較強之區域與光強較弱之區域,從而使被曝光物均勻曝光。Compared with the prior art, the at least one second gear can be rotated about its own center line, so that at least one receiving groove of the at least one second gear for accommodating the exposed object and the light source The relative distance is periodically changed, that is, the accommodating groove periodically passes through a region where the light intensity generated by the light source is strong and a region where the light intensity is weak; the at least one second gear can surround the center of the first gear The axis is rotated such that the accommodating groove periodically passes through a region where the light intensity generated by the light source in the circumferential direction of the first gear is strong and the light intensity is weak, thereby uniformly exposing the exposed object.

下面結合附圖與實施例對本發明之曝光裝置作進一步之詳細說明。The exposure apparatus of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

請參見圖1,本發明第一實施例提供之一種曝光裝置10,其包括光源11及一個與該光源11相對設置之承載機構12。Referring to FIG. 1 , an exposure apparatus 10 according to a first embodiment of the present invention includes a light source 11 and a carrier mechanism 12 disposed opposite the light source 11 .

該光源11用於發出能使被曝光物曝光之光束並投射到該承載機構12上,例如紫外光等,於本實施例中,該光源11設置於相對於該承載機構12之一個固定位置。The light source 11 is configured to emit a light beam capable of exposing the exposed object to the carrier mechanism 12, such as ultraviolet light or the like. In the present embodiment, the light source 11 is disposed at a fixed position relative to the carrier mechanism 12.

該承載機構12包括一個承載台121,一個齒圈122,一個中心齒輪123,一個驅動源124及四個旋轉齒輪125。The carrier mechanism 12 includes a carrier 121, a ring gear 122, a sun gear 123, a drive source 124 and four rotating gears 125.

該齒圈122固設於該承載台121上,該齒圈122設置有內齒牙1221,該內齒牙1221之類型及參數可以根據實際需要進行設定。The ring gear 122 is fixed on the bearing table 121. The ring gear 122 is provided with an internal tooth 1221. The type and parameters of the internal tooth 1221 can be set according to actual needs.

該中心齒輪123設置於該承載台121上且與該齒圈122共中心軸線O1 ,該中心齒輪123設置有外齒牙1231。The sun gear 123 is provided on the supporting table 121 and the ring gear 123 is provided with a total of 122 1 center, the center axis O of the outer gear teeth 1231.

該驅動源124用以驅動該中心齒輪123使其繞中心軸線O1 自轉。於本實施例中,該驅動源124包括一個驅動器1241及一個傳動軸1242,該驅動器1241係一個馬達,其設置於該承載台121之背離該光源11之一側,該傳動軸1242之一端該中心齒輪123之中心位置固定連接,其另一端穿過該承載台121與該驅動器1241機械耦合。該驅動器1241驅動該傳動軸1242旋轉以帶動該中心齒輪123繞中心軸線O1 旋轉,同時該中心齒輪123之旋轉速度亦可由該驅動器1241來控制。The driving source 124 is used to drive the sun gear 123 to rotate about the central axis O 1 . In the embodiment, the driving source 124 includes a driver 1241 and a driving shaft 1242. The driver 1241 is a motor disposed on a side of the carrier 121 facing away from the light source 11. One end of the driving shaft 1242 The central position of the sun gear 123 is fixedly coupled, and the other end thereof is mechanically coupled to the driver 1241 through the carrier 121. The driver 1241 drives the transmission shaft 1242 to rotate to drive the central gear 123 to rotate about the central axis O 1 , and the rotational speed of the central gear 123 can also be controlled by the driver 1241 .

該四個旋轉齒輪125可轉動的設置於該承載台121上,例如於該旋轉齒輪125與該承載台121之間設置滾珠、轉軸等。於本實施例中,該四個旋轉齒輪125沿該中心齒輪123之圓周方向均勻設置於該齒圈122與該中心齒輪123之間,每個旋轉齒輪125均設置有外齒牙1251,且每個旋轉齒輪125之外齒牙1251分別與該齒圈122之內齒牙1221及該中心齒輪123之外齒牙1231相嚙合;每個旋轉齒輪125之與該光源11相對之表面1252上設置有兩個用於容置被曝光物之容置槽1253,該兩個容置槽1253以該旋轉齒輪125之中心軸線O2 為軸對稱設置。The four rotating gears 125 are rotatably disposed on the carrying platform 121. For example, a ball, a rotating shaft, or the like is disposed between the rotating gear 125 and the carrying table 121. In this embodiment, the four rotating gears 125 are evenly disposed between the ring gear 122 and the sun gear 123 along the circumferential direction of the sun gear 123. Each of the rotating gears 125 is provided with an external tooth 1251, and each The outer teeth 1251 of the rotating gears 125 are respectively engaged with the inner teeth 1221 of the ring gear 122 and the outer teeth 1231 of the center gear 123; the surface 1252 of each of the rotating gears 125 opposite to the light source 11 is provided with Two accommodating grooves 1253 for accommodating the exposed objects, the two accommodating grooves 1253 are axially symmetrically arranged with the central axis O 2 of the rotating gear 125.

可以理解的是,每個旋轉齒輪125之與該承載台121相對之底面之中心線位置可以設置有一個轉軸1254,同時該承載台121上設置有一個以中心軸線O1 為中心之環形凹槽1211,在此,四個旋轉齒輪125之轉軸1254均裝設於該環形凹槽1211中,這樣可以使每個旋轉齒輪125於該承載台121上轉動時具有一固定軌跡,同時使每個旋轉齒輪125於該承載台121上轉動之阻力更小,如圖2所示。該旋轉齒輪125之數量並不限於本實施例,該旋轉齒輪125可以係一個或複數(例如四個),只要其能分別與該齒圈122及該中心齒輪123相嚙合即可。設置於該旋轉齒輪125之表面1252上之容置槽1253之數量及分佈方式並不限於本實施例,該容置槽1253可以係一個或複數(例如四個),其可以於該旋轉齒輪125之表面1252上均勻分佈亦可以不規則分佈。It can be understood that the center line position of the bottom surface of each of the rotating gears 125 opposite to the loading table 121 may be provided with a rotating shaft 1254, and the carrying platform 121 is provided with an annular groove centered on the central axis O 1 . 1211. Here, the rotating shafts 1254 of the four rotating gears 125 are disposed in the annular groove 1211, so that each rotating gear 125 has a fixed trajectory when rotating on the carrying table 121, and each rotation is performed. The resistance of the gear 125 to rotate on the carrier 121 is smaller, as shown in FIG. The number of the rotating gears 125 is not limited to the embodiment, and the rotating gears 125 may be one or plural (for example, four) as long as they can mesh with the ring gear 122 and the center gear 123, respectively. The number and arrangement of the accommodating grooves 1253 disposed on the surface 1252 of the rotating gear 125 are not limited to the embodiment. The accommodating groove 1253 may be one or plural (for example, four), and the rotating gear 125 may be The surface 1252 is evenly distributed and may also be irregularly distributed.

以下將以對鏡頭模組之鏡筒內塗有UV膠之元件進行曝光為例,對本發明第一實施例提供之一種曝光裝置10之工作過程進行簡要描述:將鏡筒分別放置於每個旋轉齒輪125之容置槽1253內,使該鏡筒內塗有UV膠之元件與該光源11相對;開啟光源11使其發射出紫外光,啟動該驅動源124以驅動該中心齒輪123沿一方向A旋轉,由於該中心齒輪123之外齒牙1231與每個旋轉齒輪125之外齒牙1251相嚙合,且每個旋轉齒輪125之外齒牙1251與固設於該承載台121之齒圈122之內齒牙1221相嚙合,所以每個旋轉齒輪125可以繞上述中心軸線O1 沿該方向A旋轉,同時每個旋轉齒輪125可以繞其自身之中心軸線O2 沿與該方向A相反之方向自轉。The following is a brief description of the operation of the exposure apparatus 10 provided by the first embodiment of the present invention by taking an exposure of the component coated with the UV glue in the lens barrel of the lens module as an example: the lens barrel is placed in each rotation separately. The gear 125 is received in the groove 1253 so that the component coated with the UV glue in the lens barrel is opposite to the light source 11; the light source 11 is turned on to emit ultraviolet light, and the driving source 124 is activated to drive the central gear 123 in one direction. A rotation, because the external gear 1231 of the central gear 123 meshes with the external teeth 1251 of each of the rotating gears 125, and the external teeth 1251 of each of the rotating gears 125 and the ring gear 122 fixed to the bearing table 121 within tooth 1221 engages gear 125 so that rotation of each rotatable about the center axis O 1 in the direction A, while each rotating gear 125 about its own axis O 2 of the center along the direction counter to direction A rotation.

由於該光源11射出得光束之強度分佈通常係不均勻的,當該光源11射到該齒圈122內與該光源11之相對距離不同的點之光強不同時,一般係該齒圈122內的點與該光源11之相對距離越小而光強越強,上述每個旋轉齒輪125可以繞該中心軸線O2 沿與該方向A相反之方向自轉,所以每個旋轉齒輪125之表面1252上的點與該光源11之相對距離將產生週期性變化,即每個旋轉齒輪125之表面1252上的點將週期性的經過光強較強之區域與光強較弱之區域。進一步的,當該光源11射到該齒圈122內的點沿該中心齒輪123之圓周方向之光強亦不同時,一般係該光源11射出之光束之光強沿該中心齒輪123之圓周方向週期性分佈,而該每個旋轉齒輪125繞上述中心軸線O1 沿該方向A旋轉,使得該每個旋轉齒輪125之表面1252上的點週期性的經過光強較強之區域與光強較弱之區域。另外該驅動源124還可以控制該中心齒輪123之旋轉速度,所以每個旋轉齒輪125之容置槽1253於光強較強之區域與光強較弱之區域所停留的時間亦將產生週期性變化。Since the intensity distribution of the light beam emitted by the light source 11 is generally non-uniform, when the light source 11 is incident on the ring gear 122 at a different intensity from the point where the relative distance between the light source 11 and the light source 11 is different, the ring gear 122 is generally The smaller the relative distance between the point and the light source 11 is, the stronger the light intensity is. Each of the rotating gears 125 can rotate around the central axis O 2 in the opposite direction to the direction A, so that the surface 1252 of each rotating gear 125 is The relative distance of the point from the source 11 will produce a periodic variation, i.e., the point on the surface 1252 of each of the rotating gears 125 will periodically pass through a region of stronger light intensity and a region of weaker light intensity. Further, when the light source 11 is incident on the ring gear 122 at a different intensity along the circumferential direction of the central gear 123, the light intensity of the light beam emitted from the light source 11 is generally along the circumferential direction of the central gear 123. cyclical distribution, and the rotation of each gear 125 about the center axis O 1 in the direction a, so that the points on the surface of the 1,252,125 each periodic rotation gear through the region with strong intensity than the light intensity Weak area. In addition, the driving source 124 can also control the rotation speed of the sun gear 123. Therefore, the time that the receiving groove 1253 of each rotating gear 125 stays in a region where the light intensity is strong and the region where the light intensity is weak will also generate periodicity. Variety.

當該容置槽1253與該光源11之相對距離逐漸變小時,射到放置於容置槽1253內之鏡筒內之光束之光強越來越強,當該容置槽1253與該光源11之相對距離逐漸變大時,射到放置於該容置槽1253內之鏡筒內之光束之光強越來越弱,當該容置槽1253繞上述中心軸線O1 沿該中心齒輪123之圓周方向旋轉時,射到放置於容置槽1253內之鏡筒內之光束之光強將產生週期性變化,同時控制放置於容置槽1253內之鏡筒於光強較強與光強較弱之區域所停留之時間,則可以使鏡筒內之UV膠均勻曝光,從而保證鏡筒內之UV膠不會曝光過度或曝光不足,從而使UV膠較好的粘住鏡筒內之光學元件。When the relative distance between the accommodating groove 1253 and the light source 11 is gradually decreased, the light intensity of the light beam incident on the lens barrel placed in the accommodating groove 1253 becomes stronger, when the accommodating groove 1253 and the light source 11 are When the relative distance is gradually increased, the light intensity of the light beam incident on the lens barrel placed in the accommodating groove 1253 becomes weaker and weaker. When the accommodating groove 1253 is wound around the central axis O 1 along the central gear 123 When rotating in the circumferential direction, the intensity of the light beam incident on the lens barrel placed in the receiving groove 1253 will periodically change, and the lens barrel placed in the receiving groove 1253 is controlled to have a stronger light intensity than the light intensity. When the weak area stays, the UV glue in the lens barrel can be uniformly exposed, thereby ensuring that the UV glue in the lens barrel is not overexposed or underexposed, so that the UV glue adheres well to the optical in the lens barrel. element.

請參見圖3與圖4,本發明第二實施例提供之一種曝光裝置20,其與上述第一實施例提供之曝光裝置10基本相同,不同之處在於:該曝光裝置20包括一個用以驅動齒圈222繞中心軸線O1 自轉之驅動源224,於本實施例中,該驅動源224包括一個驅動器(例如馬達)2241及一個驅動齒輪2242;該齒圈222可轉動的設置於承載台221上,於本實施例中,該齒圈222的與該承載台221相對之底面上設置有轉軸2223,同時該承載台221上設置有以中心軸線O1 為中心之環形凹槽2211,在此,該齒圈222之轉軸2223裝設於該環形凹槽2211中;該齒圈222設置有外齒牙2222,該齒圈222之外齒牙2222與該驅動源224之驅動齒輪2242相嚙合;中心齒輪223固設於該承載台221上且與該齒圈222共中心軸線O1 ,四個旋轉齒輪125可轉動的設置於該承載台221上,於本實施例中,於每個旋轉齒輪125的與該承載台221相對之底面上設置有滾珠1255;每個旋轉齒輪125之外齒牙1251分別與該齒圈222之內齒牙2221及該中心齒輪223之外齒牙2231相嚙合。Referring to FIG. 3 and FIG. 4, an exposure apparatus 20 according to a second embodiment of the present invention is substantially the same as the exposure apparatus 10 provided in the first embodiment, except that the exposure apparatus 20 includes a driving unit. The driving source 224 of the ring gear 222 rotates about the central axis O 1 . In the embodiment, the driving source 224 includes a driver (for example, a motor) 2241 and a driving gear 2242 ; the ring gear 222 is rotatably disposed on the carrying platform 221 . on, in the present embodiment, the ring 222 opposite the bottom surface 221 is provided with a rotary shaft 2223 and the supporting table, while the supporting table 221 disposed on the center axis O 1 of the center of the annular groove 2211, in this The ring gear 2223 of the ring gear 222 is disposed in the annular groove 2211; the ring gear 222 is provided with an external tooth 2222, and the tooth 2222 outside the ring gear 222 meshes with the driving gear 2242 of the driving source 224; the sun gear 223 is fixed on the carrier table 221 and 1, four rotary gear 125 is rotatably disposed on the supporting table 221 and the common center axis O ring 222, in this embodiment, each rotary gear On the bottom surface of the opposite side of the carrier 221 Opposing balls 1255; 2231 teeth 1251, respectively, and the inner tooth gear 222. The teeth 2221 of the sun gear 223 and the outside of each of the rotary gear 125 meshed outside.

於本實施例中,該驅動源224可以驅動該齒圈222繞中心軸線O1 沿一方向B旋轉,進而帶動每個旋轉齒輪125繞中心軸線O1 沿該方向B旋轉,同時每個旋轉齒輪125繞其自身之中心軸線O2 沿該方向B自轉,所以每個旋轉齒輪125之表面1252上的點將週期性的經過光強較強之區域與光強較弱之區域,另外該驅動源224還可以控制該齒圈222之旋轉速度,所以每個旋轉齒輪125之容置槽1253於光強較強之區域與光強較弱之區域所停留的時間亦將產生週期性變化。由此可見,利用該曝光裝置20可以使被曝光物均勻曝光。In this embodiment, the driving source 224 can drive the ring gear 222 to rotate in a direction B around the central axis O 1 , thereby driving each rotating gear 125 to rotate in the direction B about the central axis O 1 while each rotating gear 125 rotates in its direction B about its own central axis O 2 , so the point on the surface 1252 of each rotating gear 125 will periodically pass through a region of stronger light intensity and a weaker light intensity, and the driving source 224 The rotation speed of the ring gear 222 can also be controlled, so that the time that the receiving groove 1253 of each of the rotating gears 125 stays in a region where the light intensity is strong and the region where the light intensity is weak will also periodically change. Thus, it can be seen that the exposed object can be uniformly exposed by the exposure device 20.

綜上所述,本發明符合發明專利要件,爰依法提出專利申請。惟,以上所述者僅為本發明之較佳實施例,舉凡熟習本案技藝之人士,在援依本案發明之精神所作之等效修飾或變化,皆應包含於以下之申請專利範圍內。In summary, the present invention complies with the requirements of the invention patent and submits a patent application according to law. The above description is only the preferred embodiment of the present invention, and equivalent modifications or variations made by those skilled in the art of the present invention should be included in the following claims.

曝光裝置...10,20Exposure device. . . 10,20

光源...11light source. . . 11

承載機構...12Carrying mechanism. . . 12

承載台...121,221Carrying platform. . . 121,221

齒圈...122,222Ring gear. . . 122,222

中心齒輪...123,223Center gear. . . 123,223

驅動源...124,224Drive source. . . 124,224

旋轉齒輪...125Rotating gears. . . 125

內齒牙...1221,2221Internal tooth. . . 1221, 2221

傳動軸...1242transmission shaft. . . 1242

驅動器...1241,2241driver. . . 1241, 2241

表面...1252surface. . . 1252

容置槽...1253Hold the slot. . . 1253

轉軸...1254,2223Rotating shaft. . . 1254, 2223

環形凹槽...1211,2211Ring groove. . . 1211, 2211

驅動齒輪...2242Drive gear. . . 2242

滾珠...1255Balls. . . 1255

外齒牙...1231,1251,2222,2231External teeth. . . 1231,1251,2222,2231

圖1係本發明第一實施例之曝光裝置之結構示意圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing the structure of an exposure apparatus according to a first embodiment of the present invention.

圖2係圖1中沿II-II之剖視圖。Figure 2 is a cross-sectional view taken along line II-II of Figure 1.

圖3係本發明第二實施例之曝光裝置之結構示意圖。Figure 3 is a schematic view showing the structure of an exposure apparatus according to a second embodiment of the present invention.

圖4係圖3中沿IV-IV之剖視圖。Figure 4 is a cross-sectional view taken along line IV-IV of Figure 3.

曝光裝置...10Exposure device. . . 10

光源...11light source. . . 11

承載機構...12Carrying mechanism. . . 12

承載台...121Carrying platform. . . 121

齒圈...122Ring gear. . . 122

中心齒輪...123Center gear. . . 123

驅動源...124Drive source. . . 124

旋轉齒輪...125Rotating gears. . . 125

內齒牙...1221Internal tooth. . . 1221

表面...1252surface. . . 1252

容置槽...1253Hold the slot. . . 1253

外齒牙...1231,1251External teeth. . . 1231,1251

Claims (10)

一種曝光裝置,其包括光源及一個與該光源相對設置之承載機構,該光源發出之光束投射到該承載機構上,其改良在於:所述承載機構包括一個承載台,一個設置於該承載台上且設置有內齒牙之齒圈,一個設置於該承載台上且與該齒圈共中心軸線之第一齒輪,至少一個設置於該齒圈與該第一齒輪之間且分別與該齒圈之內齒牙及該第一齒輪相嚙合之第二齒輪,所述至少一個第二齒輪的與該光源相面對之表面上設置有至少一個用於容置被曝光物之容置槽,所述至少一個第二齒輪繞該中心軸線旋轉的同時可以繞其自身之中心線自轉。An exposure device comprising a light source and a bearing mechanism disposed opposite the light source, the light beam emitted by the light source being projected onto the carrying mechanism, the improvement being that the carrying mechanism comprises a carrying platform, and one is disposed on the carrying platform And a ring gear provided with an internal tooth, a first gear disposed on the bearing table and coaxial with the ring gear, at least one disposed between the ring gear and the first gear and respectively coupled to the ring gear a second gear that meshes with the inner tooth and the first gear, and a surface of the at least one second gear facing the light source is provided with at least one receiving groove for receiving the exposed object, The at least one second gear rotates about the central axis while rotating about its own centerline. 如申請專利範圍第1項所述之曝光裝置,其中,所述光源設置於相對於該承載台的一個固定位置。The exposure apparatus of claim 1, wherein the light source is disposed at a fixed position relative to the stage. 如申請專利範圍第1項所述之曝光裝置,其中,所述齒圈固定於該承載台上,所述承載機構還包括一個驅動源,該驅動源用以驅動該第一齒輪繞所述中心軸線自轉。The exposure apparatus of claim 1, wherein the ring gear is fixed to the carrier, the carrier mechanism further comprising a driving source for driving the first gear around the center The axis rotates. 如申請專利範圍第3項所述之曝光裝置,其中,該驅動源包括一個傳動軸及一個驅動器,該傳動軸之一端穿過該承載台與該第一齒輪固定連接,該傳動軸之另一端與該驅動器機械耦合,該驅動器設置於該承載台之背離該光源之一側。The exposure apparatus of claim 3, wherein the driving source comprises a transmission shaft and a driver, and one end of the transmission shaft is fixedly connected to the first gear through the loading platform, and the other end of the transmission shaft Mechanically coupled to the driver, the driver is disposed on a side of the carrier that faces away from the light source. 如申請專利範圍第1項所述之曝光裝置,其中,所述至少一個第二齒輪之數量為複數,該複數第二齒輪沿該第一齒輪之圓周方向均勻設置於該齒圈與該第一齒輪之間且分別與該齒圈之內齒牙及第一齒輪相嚙合。The exposure apparatus of claim 1, wherein the number of the at least one second gear is plural, and the plurality of second gears are evenly disposed on the ring gear and the first along a circumferential direction of the first gear The gears mesh with the internal teeth of the ring gear and the first gear. 如申請專利範圍第1項所述之曝光裝置,其中,所述至少一個容置槽之數量為複數,該複數容置槽沿其上設置有該複數容置槽之第二齒輪之圓周方向均勻設置。The exposure apparatus of claim 1, wherein the number of the at least one accommodating groove is plural, and the plurality of accommodating grooves are evenly distributed along a circumference of the second gear on which the plurality of accommodating grooves are disposed Settings. 如申請專利範圍第1項所述之曝光裝置,其中,所述至少一個第二齒輪的與該承載台相對之底面之中心線位置設置有轉軸,該承載台上設置有以該中心軸線為中心之環形凹槽,該轉軸裝設於該環形凹槽中。The exposure apparatus of claim 1, wherein a center line position of a bottom surface of the at least one second gear opposite to the stage is provided with a rotating shaft, and the stage is provided with the center axis as a center An annular groove, the rotating shaft is disposed in the annular groove. 如申請專利範圍第1項所述之曝光裝置,其中,該第一齒輪固定於該承載台上,該齒圈還設置有外齒牙,所述承載機構還包括一個驅動源,該驅動源用以驅動該齒圈繞所述中心軸線自轉。The exposure device of claim 1, wherein the first gear is fixed on the loading platform, the ring gear is further provided with external teeth, and the bearing mechanism further comprises a driving source, and the driving source is used To drive the ring gear to rotate about the central axis. 如申請專利範圍第8項所述之曝光裝置,其中,該驅動源包括一個驅動器及一個與該驅動器機械耦合之驅動齒輪,該驅動齒輪與該齒圈之外齒牙相嚙合。The exposure apparatus of claim 8, wherein the driving source comprises a driver and a driving gear mechanically coupled to the driver, the driving gear meshing with a tooth outside the ring gear. 如申請專利範圍第8項所述之曝光裝置,其中,該齒圈的與該承載台相對之底面上設置有轉軸,該承載台上設置有以所述中心軸線為中心之環形凹槽,該轉軸裝設於該環形凹槽中。The exposure apparatus of claim 8, wherein a bottom surface of the ring gear opposite to the loading platform is provided with a rotating shaft, and the loading platform is provided with an annular groove centered on the central axis, The rotating shaft is installed in the annular groove.
TW96104065A 2007-02-05 2007-02-05 Exposure apparatus TWI394995B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4616907A (en) * 1984-04-13 1986-10-14 Enshu Kogaku Seiki Company Limited Zooming mechanism for compact binoculars
TW546699B (en) * 2000-02-25 2003-08-11 Nikon Corp Exposure apparatus and exposure method capable of controlling illumination distribution
JP2004045685A (en) * 2002-07-11 2004-02-12 Sony Corp Rotation operation mechanism and image pickup device
JP2006162989A (en) * 2004-12-07 2006-06-22 Fuji Photo Film Co Ltd Camera
CN1892275A (en) * 2005-06-30 2007-01-10 柯尼卡美能达控股株式会社 Optical element fixation method and method for manufacturing optical module

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4616907A (en) * 1984-04-13 1986-10-14 Enshu Kogaku Seiki Company Limited Zooming mechanism for compact binoculars
TW546699B (en) * 2000-02-25 2003-08-11 Nikon Corp Exposure apparatus and exposure method capable of controlling illumination distribution
JP2004045685A (en) * 2002-07-11 2004-02-12 Sony Corp Rotation operation mechanism and image pickup device
JP2006162989A (en) * 2004-12-07 2006-06-22 Fuji Photo Film Co Ltd Camera
CN1892275A (en) * 2005-06-30 2007-01-10 柯尼卡美能达控股株式会社 Optical element fixation method and method for manufacturing optical module

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