TWI390087B - Method for engineer anode copper balls for electroplating - Google Patents

Method for engineer anode copper balls for electroplating Download PDF

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TWI390087B
TWI390087B TW095104226A TW95104226A TWI390087B TW I390087 B TWI390087 B TW I390087B TW 095104226 A TW095104226 A TW 095104226A TW 95104226 A TW95104226 A TW 95104226A TW I390087 B TWI390087 B TW I390087B
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copper ball
copper
electroplating
oil
anode
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TW095104226A
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Chinese (zh)
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TW200700588A (en
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Masanori Yonoki
Shoji Nomura
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Mitsubishi Materials Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21KMAKING FORGED OR PRESSED METAL PRODUCTS, e.g. HORSE-SHOES, RIVETS, BOLTS OR WHEELS
    • B21K1/00Making machine elements
    • B21K1/02Making machine elements balls, rolls, or rollers, e.g. for bearings
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/032Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing oxygen-containing compounds
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper

Description

電鍍用陽極銅球之製造方法Method for manufacturing anode copper ball for electroplating

本發明係有關一種在銅的電解電鍍中作為銅原料使用的電鍍用陽極銅球的製造方法。The present invention relates to a method for producing an anode copper ball for electroplating used as a copper raw material in electrolytic plating of copper.

以往,在行動電話或電腦等的印刷配線基板進行銅電鍍的方法,以銅作為陽極,以印刷配線基板做為陰極,浸漬在稀硫酸溶液等電鍍浴槽中,廣泛使用通電的電解電鍍。該電解電鍍係使做為陽極的銅,溶出至稀硫酸溶液中,對於做為陰極的印刷配線基板的表面進行銅電鍍。Conventionally, in a method of performing copper plating on a printed wiring board such as a mobile phone or a computer, copper is used as an anode, and a printed wiring board is used as a cathode, and is immersed in a plating bath such as a dilute sulfuric acid solution, and electrolytic plating using electricity is widely used. In the electrolytic plating, copper as an anode is eluted into a dilute sulfuric acid solution, and copper plating is performed on the surface of the printed wiring board as a cathode.

對此提出使用形成球狀的銅材(電鍍用陽極銅球),在電鍍浴槽中以Ti等耐蝕性材料構成的籠,在該籠內依序裝入電鍍用陽極銅球,作為構成該電解電鍍的銅原料的陽極。由於銅材溶解在溶液中,故依序消耗,但與其消耗量配合,將電鍍用陽極銅球裝入至Ti籠,因此可連續進行電解電鍍。In this case, a spherical copper material (anode copper ball for electroplating) is used, and a cage made of a corrosion-resistant material such as Ti is used in the plating bath, and an anode copper ball for plating is sequentially placed in the cage to constitute the electrolysis. The anode of the electroplated copper material. Since the copper material is dissolved in the solution, it is sequentially consumed, but in combination with the consumption amount, the anode copper ball for electroplating is loaded into the Ti cage, so that electrolytic plating can be continuously performed.

電鍍用陽極銅球,係藉由冷鍛銅素材而形成。在此,在冷鍛步驟中,由於機械性施加壓力而加工銅素材,而有所謂導致因鍛造使該機械部份所使用的工作油或潤滑油,附著在所獲得的銅球的表面之問題。除去附著在銅系構件上的油量的方法有:浸漬於專利文獻1所示的pH12以上的鹼性脫脂劑水溶液中後,進行酸洗的方法或浸漬在專利文獻2所示的丙酮、乙醇液中而洗淨的方法。The anode copper ball for electroplating is formed by cold forging copper material. Here, in the cold forging step, the copper material is processed by the mechanical application of pressure, and there is a problem that the working oil or lubricating oil used for the mechanical part is attached to the surface of the obtained copper ball by forging. . The method of removing the amount of the oil adhering to the copper-based member is immersed in an aqueous solution of an alkaline degreaser having a pH of 12 or more as shown in Patent Document 1, and then subjected to pickling or immersion in acetone or ethanol shown in Patent Document 2. The method of washing in the liquid.

[專利文獻1]日本特開平3-223482號公報[專利文獻2]日本特開平9-125275號公報[Patent Document 1] Japanese Patent Laid-Open No. Hei 3-223482 (Patent Document 2) Japanese Laid-Open Patent Publication No. Hei 9-125275

然而,在專利文獻1所示的油量除去方法中,由於使用所謂pH12以上的強鹼性的脫脂劑水溶液,故需要以耐腐蝕性的材料構成儲留脫脂劑水溶液的槽或供給裝置、排出裝置,而有導致其製造成本變高的問題。又,由於使用強鹼性的脫脂劑,因此其使用管理需要較多的勞力和時間,而必須處理脫脂劑水溶液的廢液,造成環境負荷明顯變大,導致所謂需要廢液處理成本的問題。However, in the oil amount removal method shown in Patent Document 1, since a highly alkaline degreaser aqueous solution having a pH of 12 or more is used, it is necessary to form a tank or a supply device for discharging the degreaser aqueous solution with a corrosion-resistant material, and to discharge it. The device has a problem that causes its manufacturing cost to become high. Further, since a strong alkaline degreasing agent is used, the use management requires a lot of labor and time, and it is necessary to treat the waste liquid of the degreasing agent aqueous solution, resulting in a significant increase in environmental load, which causes a problem that the waste liquid treatment cost is required.

再者,由於在專利文獻1所示的油量除去方法中,藉由浸漬在鹼性脫脂劑水溶液,除去在銅系構件表面所生成的氧化膜層的方法進行酸洗,因此必須使用所謂硫酸或鹽酸等酸性藥劑。因而,與使用上述強鹼性的脫脂劑相同,必需以耐蝕性的材料構成槽或供給裝置、排出裝置,將有製造成本變高的問題、或在酸性藥劑的使用管理上的勞力和成本的問題、或處理酸性藥劑的廢液等環境負荷、廢液處理成本等的問題。In the oil amount removal method disclosed in Patent Document 1, the method of removing the oxide film layer formed on the surface of the copper-based member by immersing in the aqueous solution of the alkaline degreaser is pickled, and therefore it is necessary to use so-called sulfuric acid. Or an acidic agent such as hydrochloric acid. Therefore, as in the case of using the above-described strongly alkaline degreaser, it is necessary to form a groove, a supply device, and a discharge device with a material having corrosion resistance, which causes a problem of high manufacturing cost or labor and cost in management of use of an acidic drug. Problems such as environmental load such as waste liquid for treating acidic chemicals, disposal cost of waste liquid, and the like.

又,在專利文獻2所示的油量除去方法中,浸漬在丙銅、乙醇液中,僅一邊搖動銅系構件一邊攪拌液體,有無法完全除去強固附著的油量的問題。Moreover, in the oil amount removal method shown by the patent document 2, it is immersed in the copper-copper and ethanol liquid, and the liquid is stirred only by rocking a copper-type member, and the problem of the amount of oil which adhered strongly is not fully removed.

當油量殘存在電鍍用陽極銅球的表面時,該電鍍用陽極銅球藉由裝入到稀硫酸水溶液等的電鍍浴槽,產生所謂油量混入到電鍍浴槽內而被污染的問題。又,產生所謂因為該油量而產生淤渣,污染形成於印刷配線基板的銅電鍍層之間題。When the amount of oil remains on the surface of the anode copper ball for electroplating, the anode copper ball for electroplating is loaded into a plating bath such as a dilute sulfuric acid aqueous solution, thereby causing a problem that the amount of oil is mixed into the plating bath and is contaminated. Further, there is a problem that a sludge is generated due to the amount of the oil, and contamination is formed between the copper plating layers formed on the printed wiring board.

本發明係有鑑於上述事情而研創者,目的在於提供一種不需使用造成環境負荷大的鹼性溶液、酸性溶液,而除去在鍛造步驟附著於銅球表面的油量,製造出高品質的電鍍用陽極銅球的製造方法。The present invention has been made in view of the above, and an object of the present invention is to provide an alkaline solution or an acidic solution which does not require an environmental load, and removes the amount of oil adhering to the surface of the copper ball in the forging step, thereby producing a high-quality plating. A method of manufacturing an anode copper ball.

為了解決上述課題,本發明係一種電鍍用陽極銅球之製造方法,係作為銅的電解電鍍的原料使用,其特徵為,具備有:藉由冷鍛將銅素材形成球狀的鍛造步驟;藉由前述鍛造步驟,在加熱爐內使附著於前述銅球表面的油量揮發之加熱步驟;以及研磨該加熱步驟之後的前述銅球的滾筒磨光步驟。In order to solve the above problems, the present invention provides a method for producing an anode copper ball for electroplating, which is used as a raw material for electrolytic plating of copper, and is characterized in that: a forging step of forming a copper material into a spherical shape by cold forging; a heating step of volatilizing the amount of oil adhering to the surface of the copper ball in the heating furnace by the forging step; and a barrel polishing step of polishing the copper ball after the heating step.

在上述的電鍍用陽極銅球之製造方法中,由於以加熱爐加熱藉由鍛造步驟所獲得的銅球,在鍛造步驟使附著於銅球的表面的油量揮發而除去,因此可確實除去油量。又,在除去油量的狀態下於進行滾筒磨光,因此可使滾筒磨光後的電鍍用陽極銅球的表面加工為更乾淨。In the above method for producing an anode copper ball for electroplating, since the copper ball obtained by the forging step is heated in a heating furnace, the amount of oil adhering to the surface of the copper ball is volatilized and removed in the forging step, so that the oil can be surely removed. the amount. Further, since the barrel polishing is performed in a state where the amount of oil is removed, the surface of the anode copper ball for plating after the barrel polishing can be processed to be cleaner.

又,具有藉由前述加熱步驟,除去在前述銅球的表面所生成的氧化膜之氧化膜除去步驟,加熱銅球而使油量揮發之際,生成於銅球表面的氧化膜,藉由氧化膜除去步驟加以除去。Moreover, the oxide film removal step of removing the oxide film formed on the surface of the copper ball by the heating step, and heating the copper ball to volatilize the amount of oil, the oxide film formed on the surface of the copper ball is oxidized. The membrane removal step is removed.

又,藉由具有前述氧化膜除去步驟在還原性溶液浸漬前述銅球的步驟之同時,具有使浸漬於前述還原性溶液中的前述銅球乾燥的乾燥步驟,藉由還原性溶液確實除去以加熱爐所生成的氧化膜,使浸漬於還原性溶液中的銅球在乾燥步驟中乾燥之後,進行滾筒磨光。Further, the step of immersing the copper ball in the reducing solution by the oxide film removing step has a drying step of drying the copper ball immersed in the reducing solution, and the reducing solution is surely removed for heating. The oxide film formed in the furnace is subjected to barrel polishing after the copper balls immersed in the reducing solution are dried in the drying step.

而且,藉由將前述加熱爐的爐內周圍環境設為還原性氣體周圍環境,使銅球在加熱爐中加熱之際,防止氧化膜強固地形成於其表面。Further, by setting the surrounding environment in the furnace of the heating furnace to the atmosphere of the reducing gas, the copper ball is prevented from being strongly formed on the surface thereof when the copper ball is heated in the heating furnace.

在上述電鍍用陽極銅球的製造方法中,由於不需要使用鹼性脫脂劑,因此可降低其設備成本、管理成本之同時,可大幅的降低環境負荷。又,由於藉由使油量揮發,可確實除去油量,因此沒有油量混入到電鍍浴槽內之虞,可提供一種穩定進行電鍍之電鍍用陽極銅球。In the above method for producing an anode copper ball for electroplating, since it is not necessary to use an alkaline degreaser, the equipment cost and the management cost can be reduced, and the environmental load can be greatly reduced. Further, since the amount of oil can be surely removed by volatilizing the amount of oil, there is no possibility that the amount of oil is mixed into the plating bath, and an anode copper ball for electroplating which is stably plated can be provided.

又,在以加熱爐加熱之際,雖然在銅球表面生成氧化膜,但由於可藉由加熱步驟後的氧化膜除去步驟,除去氧化膜,因此在滾筒磨光時,可供給沒有氧化膜的銅球,而將銅球的表面加工成具有光澤的乾淨表面。Further, when heating is performed in a heating furnace, an oxide film is formed on the surface of the copper ball. However, since the oxide film can be removed by the oxide film removing step after the heating step, the film can be supplied without the oxide film. The copper ball, while the surface of the copper ball is processed into a shiny clean surface.

又,藉著將銅球浸漬在還原性溶液中可除去氧化膜,因此不需要使用酸性藥液,在可降低其設備成本、管理成本之同時,可大幅的降低環境負荷。又,由於在使已浸漬於還原性溶液的銅球乾燥之後,供給至滾筒磨光,因此可防止銅球的再度氧化,而將銅球的表面加工成具有光澤的乾淨表面。Further, since the oxide film can be removed by immersing the copper ball in the reducing solution, it is not necessary to use an acidic chemical solution, and the equipment cost and the management cost can be reduced, and the environmental load can be greatly reduced. Further, since the copper balls which have been immersed in the reducing solution are dried and supplied to the drum for polishing, it is possible to prevent the copper balls from being reoxidized and to process the surface of the copper balls into a glossy clean surface.

再者,藉著將加熱爐的爐內周圍環境設為還原性氣體環境,使在銅球表面不會強固地形成氧化膜,因此在加熱步驟後的氧化膜除去步驟中,容易除去氧化膜,可確實除去氧化膜,在滾筒磨光時供給沒有氧化膜的銅球,因此可將銅球的表面加工成具有光澤的乾淨表面。Further, by setting the atmosphere in the furnace of the heating furnace to a reducing gas atmosphere, the oxide film is not strongly formed on the surface of the copper ball. Therefore, in the oxide film removing step after the heating step, the oxide film is easily removed. The oxide film can be surely removed, and the copper ball without the oxide film is supplied while the roller is being polished, so that the surface of the copper ball can be processed into a shiny clean surface.

如以上所述,根據本發明,提供一種不需使用造成環境負荷大的鹼性溶液、酸性溶液除去鍛造步驟中附著在銅球表面的油量,製造出高品質的電鍍用陽極銅球之製造方法。As described above, according to the present invention, it is possible to manufacture a high-quality anode copper ball for electroplating without using an alkaline solution causing a large environmental load and an acidic solution to remove the amount of oil adhering to the surface of the copper ball in the forging step. method.

以下說明本發明的實施形態。第1圖係表示本發明的電鍍用陽極銅球的製造方法的步驟。此外,在本實施形態中所製造的電鍍用陽極銅球之直徑為55mm。Hereinafter, embodiments of the present invention will be described. Fig. 1 is a view showing the steps of a method for producing an anode copper ball for electroplating of the present invention. Further, the diameter of the anode copper ball for plating produced in the present embodiment was 55 mm.

首先,供給成為銅球材料的銅線材。在本實施形態中,使用直徑39mm的銅線材。以適當的長度切斷該銅線材,並裝入到設置於冷鍛機內的模型之中。該模型的內部形成直徑55mm的球狀。鍛造加工插入到該模型中的銅線材,形成直徑55mm的銅球。在該鍛造加工中,鍛造機的潤滑油或工作油存在於鍛造室內,於銅球的表面附著油量。First, a copper wire material that becomes a copper ball material is supplied. In the present embodiment, a copper wire having a diameter of 39 mm is used. The copper wire was cut at an appropriate length and loaded into a mold set in a cold forging machine. The inside of the model formed a spherical shape with a diameter of 55 mm. The copper wire inserted into the mold was forged to form a copper ball having a diameter of 55 mm. In this forging process, the lubricating oil or the working oil of the forging machine is present in the forging chamber, and the amount of oil adheres to the surface of the copper ball.

附著油量的銅球被裝入到加熱爐內。該加熱爐為氣體燃燒器燃燒爐,使用天然瓦斯作為燃料,以及空氣和燃料的混合比作為豐富燃料加以燃燒,燃燒爐內係設為還原性周圍環境。在此,加熱爐內的溫度亦可設定在油量揮發的溫度即400℃以上,當溫度過高時,對於燃燒爐的爐體造成負荷,並且使生成在銅球表面的氧化膜變厚,因此以設為800℃以下較為理想。銅球係在加熱爐內加熱,藉由使附著在其表面的油量揮發,可確實的除去油量。在此,加熱爐內雖設為還原性周圍環境,但從銅球的裝入口或排出口混入大氣,在銅球的表面形成薄的氧化膜。The copper ball to which the oil amount is attached is charged into the heating furnace. The heating furnace is a gas burner combustion furnace, which uses natural gas as a fuel, and a mixture ratio of air and fuel as a rich fuel to be burned, and the inside of the combustion furnace is set as a reducing surrounding environment. Here, the temperature in the heating furnace may be set to a temperature at which the amount of oil is volatilized, that is, 400 ° C or higher. When the temperature is too high, a load is applied to the furnace body of the combustion furnace, and an oxide film formed on the surface of the copper ball is thickened. Therefore, it is preferable to set it as 800 ° C or less. The copper ball is heated in a heating furnace, and the amount of oil adhered to the surface thereof is volatilized, so that the amount of oil can be surely removed. Here, although the inside of the heating furnace is a reducing surrounding environment, it is mixed into the atmosphere from the inlet or the discharge port of the copper ball, and a thin oxide film is formed on the surface of the copper ball.

然後,在加熱爐形成薄的氧化膜的銅球,係浸漬於儲存有還原性溶液的儲存槽內。具體而言,可使用異丙醇的水溶液或乙二醇的水溶液等作為還原性溶液。藉由浸漬於此等還原性溶液中,可除去形成於銅球表面的氧化膜。因而,在銅球的表面成為不存在油量、氧化膜的狀態。Then, a copper ball which forms a thin oxide film in a heating furnace is immersed in a storage tank in which a reducing solution is stored. Specifically, an aqueous solution of isopropyl alcohol or an aqueous solution of ethylene glycol or the like can be used as the reducing solution. The oxide film formed on the surface of the copper ball can be removed by immersing in the reducing solution. Therefore, the surface of the copper ball is in a state in which no oil amount or oxide film exists.

然後,已除去油量、氧化膜的銅球,被供給到乾燥步驟。在乾燥步驟中,對於銅球噴射空氣,使銅球的表面乾燥。以此方法乾燥的銅球供給到滾筒磨光裝置。裝入到滾筒磨光裝置內的複數個銅球激烈的被攪拌,而使銅球之間彼此撞擊,以研磨銅球的表面。在此,在除去銅球表面的油量、氧化膜之同時,可使銅球乾燥,因此在進行滾筒磨光之後的銅球表面呈現銅金屬色,而可加工為具有光澤的乾淨表面。Then, the copper ball from which the oil amount and the oxide film have been removed is supplied to the drying step. In the drying step, the copper ball is sprayed with air to dry the surface of the copper ball. The copper balls dried in this way are supplied to the barrel polishing device. The plurality of copper balls loaded into the barrel polishing device are vigorously stirred, causing the copper balls to collide with each other to grind the surface of the copper balls. Here, the copper ball can be dried while removing the amount of oil on the surface of the copper ball and the oxide film. Therefore, the surface of the copper ball after the barrel polishing is copper-colored, and can be processed into a glossy clean surface.

如以上方法所製造的電鍍用陽極銅球,係供給到配置於儲存有稀硫酸溶液的電鍍浴槽內的Ti製的籠內作為陽極,印刷配線基板浸漬在電鍍浴槽內而通電作為陰極,溶 解在稀硫酸溶液中,於印刷配線基板的表面形成銅電鍍。The anode copper ball for electroplating produced by the above method is supplied to a cage made of Ti disposed in an electroplating bath in which a dilute sulfuric acid solution is stored as an anode, and the printed wiring board is immersed in a plating bath to be electrified as a cathode. In the dilute sulfuric acid solution, copper plating was formed on the surface of the printed wiring board.

在上述電鍍用陽極銅球的製造方法中,藉由在加熱爐加熱銅球的表面到油量的揮發溫度為止,可確實除去油量,可製造出沒有污染電鍍浴槽的高品質的電鍍用陽極銅球。又,由於油量的除去未使用鹼性脫脂劑,因此可大幅降低環境負荷,並且可降低其設備成本、脫脂劑的管理成本、廢液的處理成本等,使製造成本降低。In the above method for producing an anode copper ball for electroplating, by heating the surface of the copper ball to a volatilization temperature of the amount of oil in a heating furnace, the amount of oil can be surely removed, and a high-quality plating anode without contaminating the plating bath can be produced. Copper ball. Further, since the alkaline degreasing agent is not used for the removal of the amount of oil, the environmental load can be greatly reduced, and the equipment cost, the management cost of the degreaser, the processing cost of the waste liquid, and the like can be reduced, and the manufacturing cost can be lowered.

又,藉由在加熱爐中加熱在銅球表面產生氧化膜,但係加熱爐的燃燒燃燒器以豐富燃料,使加熱爐內成為還原性周圍環境,可抑制在銅球表面產生氧化膜,可使氧化膜的厚度變薄。藉此,可容易進行在銅球表面產生的氧化膜的除去。Further, an oxide film is formed on the surface of the copper ball by heating in a heating furnace, but the combustion burner of the heating furnace enriches the fuel to make the inside of the heating furnace a reducing environment, thereby suppressing the formation of an oxide film on the surface of the copper ball. The thickness of the oxide film is made thin. Thereby, the removal of the oxide film generated on the surface of the copper ball can be easily performed.

在銅球表面所產生的氧化膜,藉由浸漬在異丙醇水溶液等的還原性溶液,可簡單的除去。對於除去氧化膜,由於不使用所謂硫酸或鹽酸的酸性藥劑,而可大幅降低環境負荷,由於不需要其設備成本、酸性藥劑的管理成本、廢液的處理成本等,因此可大幅降低電鍍用陽極銅球的製造成本。The oxide film formed on the surface of the copper ball can be easily removed by immersing in a reducing solution such as an aqueous solution of isopropyl alcohol. In the removal of the oxide film, since the acidic agent such as sulfuric acid or hydrochloric acid is not used, the environmental load can be greatly reduced, and the anode for plating can be greatly reduced because the equipment cost, the management cost of the acidic drug, the disposal cost of the waste liquid, and the like are not required. The manufacturing cost of copper balls.

藉由使用上述製造方法所獲得的電鍍用陽極銅球,在作為陰極的印刷配線基板,油量未混入於其電鍍浴槽內,由於電鍍浴乾淨而形成非常乾淨的電鍍層,並且淤渣等不會混入電鍍浴槽內等,可穩定的進行電鍍。By using the anode copper ball for electroplating obtained by the above-described production method, the amount of oil is not mixed in the plating bath in the printed wiring board as the cathode, and the plating bath is clean to form a very clean plating layer, and sludge or the like is not formed. It can be mixed into the plating bath, etc., and can be plated stably.

此外,在本實施形態中,於鍛造步驟隨後,雖說明在加熱爐進行油量除去,但在裝入到加熱爐內之前,進行酸洗等亦可。此時,以酸洗預先除去強固附著在銅球表面的油量,或附著多量的油量等時,藉由加熱爐加熱,因此可確實除去油量。換言之,根據附著於銅球的油之狀況,在加熱爐裝入前,進行酸洗等的前處理,可確實除去油量。Further, in the present embodiment, after the forging step, the amount of oil removed in the heating furnace is described, but it may be pickled or the like before being placed in the heating furnace. At this time, when the amount of oil strongly adhered to the surface of the copper ball is removed by pickling, or when a large amount of oil or the like is adhered, it is heated by the heating furnace, so that the amount of oil can be surely removed. In other words, according to the condition of the oil adhering to the copper ball, pretreatment such as pickling is performed before the heating furnace is installed, and the amount of oil can be surely removed.

又,雖使用氣體燃燒器的燃燒爐作為加熱爐,但其加熱方式沒有限制,亦可為電爐。為電爐等時,由於將爐內設為還原性周圍環境,故從外部將含有還原性氣體,例如一氧化碳或氫氣的氣體導入到爐內為佳。Further, although a combustion furnace using a gas burner is used as the heating furnace, the heating method is not limited, and may be an electric furnace. In the case of an electric furnace or the like, since the inside of the furnace is a reducing environment, it is preferable to introduce a gas containing a reducing gas such as carbon monoxide or hydrogen into the furnace from the outside.

再者,雖然說明在浸漬於還原性溶液之後,另外設置乾燥步驟,但例如藉由使銅球本身的溫度比還原性溶液的揮發溫度還高溫,可藉自然乾燥加以乾燥。Further, although it is explained that a drying step is additionally provided after immersing in the reducing solution, for example, by allowing the temperature of the copper ball itself to be higher than the volatilization temperature of the reducing solution, it can be dried by natural drying.

實施例Example

以下,對於藉由本實施形態所製造的電鍍用陽極銅球,分析殘存在其表面的油量之量。Hereinafter, the amount of oil remaining on the surface of the anode copper ball for plating produced in the present embodiment is analyzed.

在此,所製造的電鍍用陽極銅球的直徑為55mm,加熱爐的氣體燃燒器的空氣/燃料比為0.95/1.00和在豐富燃料的狀態下燃燒,加熱爐的溫度設定為約700℃,銅球係在加熱爐內保持約5分鐘。Here, the manufactured anode copper ball for electroplating has a diameter of 55 mm, the gas burner of the heating furnace has an air/fuel ratio of 0.95/1.00 and is burned in a state of rich fuel, and the temperature of the heating furnace is set to about 700 ° C. The copper balls were held in a heating furnace for about 5 minutes.

從加熱爐拿出的銅球,浸漬在作為還原性溶液的混合2%的異丙醇的水溶液中約30秒之後,以鼓風機使之乾燥,並裝入到滾筒磨光機進行滾筒磨光。The copper ball taken out from the heating furnace was immersed in an aqueous solution of 2% isopropanol mixed as a reducing solution for about 30 seconds, dried by a blower, and charged into a roller sander for barrel polishing.

為了在以此方法獲得的電鍍用陽極銅球的表面定量殘存油量,將電鍍用陽極銅球浸漬在特定的溶液中,以傅立葉轉換紅外線分光光度計(FTIR),分析融入到該溶液中的油量。結果,殘存在直徑55mm的電鍍用陽極銅球的表面的油量,確認為0.1mg/個以下。因而,藉由使用本發明的電鍍用陽極銅球的製造方法,確認可大幅降低附著在電鍍用陽極銅球的表面的油量。In order to quantify the amount of residual oil on the surface of the anode copper ball for electroplating obtained by this method, the anode copper ball for electroplating is immersed in a specific solution, and analyzed by a Fourier transform infrared spectrophotometer (FTIR) to be incorporated into the solution. The amount of oil. As a result, the amount of oil remaining on the surface of the anode copper ball for plating having a diameter of 55 mm was confirmed to be 0.1 mg/piece or less. Therefore, by using the method for producing an anode copper ball for electroplating of the present invention, it has been confirmed that the amount of oil adhering to the surface of the anode copper ball for plating can be greatly reduced.

第1圖係本發明之電鍍用陽極銅球的製造方法的步驟圖。Fig. 1 is a flow chart showing a method of producing an anode copper ball for electroplating of the present invention.

Claims (4)

一種電鍍用陽極銅球之製造方法,係作為銅的電解電鍍的原料使用,其特徵為,具備有:藉由冷鍛將銅素材形成球狀的鍛造步驟;藉由前述鍛造步驟,在加熱爐內使附著於前述銅球表面的油量揮發之加熱步驟;以及磨光該加熱步驟之後的前述銅球的滾筒磨光步驟;前述加熱爐的爐內周圍環境設為還原性氣體周圍環境。 A method for producing an anode copper ball for electroplating, which is used as a raw material for electrolytic plating of copper, characterized by comprising: a forging step of forming a copper material into a spherical shape by cold forging; and a heating step in the heating step by the forging step a heating step of volatilizing the amount of oil adhering to the surface of the copper ball; and a barrel polishing step of polishing the copper ball after the heating step; and a surrounding environment of the furnace of the heating furnace is a reducing gas atmosphere. 如申請專利範圍第1項之電鍍用陽極銅球之製造方法,其中,具有:用來將藉由前述加熱步驟所導致在前述銅球的表面所生成的氧化膜除去之氧化膜除去步驟。 The method for producing an anode copper ball for electroplating according to the first aspect of the invention, further comprising: an oxide film removing step for removing an oxide film formed on a surface of the copper ball by the heating step. 如申請專利範圍第2項之電鍍用陽極銅球之製造方法,其中,前述氧化膜除去步驟,係在還原性溶液浸漬前述銅球的步驟,並具有:使浸漬於前述還原性溶液中的前述銅球乾燥的乾燥步驟。 The method for producing an anode copper ball for electroplating according to the second aspect of the invention, wherein the oxide film removing step is a step of immersing the copper ball in a reducing solution, and the method of immersing in the reducing solution Drying step of copper ball drying. 如申請專利範圍第1至3項中任一項之電鍍用陽極銅球之製造方法,其中,前述加熱爐為電爐,從外部將還原性氣體導入爐內而使爐內成為還原性氣體周圍環境。The method for producing an anode copper ball for electroplating according to any one of claims 1 to 3, wherein the heating furnace is an electric furnace, and a reducing gas is introduced into the furnace from the outside to make the furnace atmosphere a reducing gas atmosphere. .
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