TWI386119B - Compact inductive power electronics package - Google Patents

Compact inductive power electronics package Download PDF

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TWI386119B
TWI386119B TW098118617A TW98118617A TWI386119B TW I386119 B TWI386119 B TW I386119B TW 098118617 A TW098118617 A TW 098118617A TW 98118617 A TW98118617 A TW 98118617A TW I386119 B TWI386119 B TW I386119B
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inductor
inductive
coil forming
half coil
electronic device
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TW098118617A
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TW201034534A (en
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Tao Fen
Xiaotian Zhang
Francois Hebert
Ming Sun
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Alpha & Omega Semiconductor
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
    • H01L2224/05552Shape in top view
    • H01L2224/05554Shape in top view being square
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49175Parallel arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30107Inductance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

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Description

緊湊型電感功率電子器件封裝 Compact Inductor Power Electronics Package

本發明一般涉及電子系統封裝領域,更具體地,本發明對應於分離式功率電感(或功率電感)與半導體晶片一起進行的物理級封裝。 The present invention relates generally to the field of electronic system packaging, and more particularly to physical level packaging of discrete power inductors (or power inductors) with semiconductor wafers.

由於持續發展的市場需求,在獲得更高的功率級的同時,功率半導體封裝不斷的趨向更小尺寸和(或)更小引腳。一種常見的應用於多種轉換器(升壓和降壓轉換器等)的功率半導體封裝封裝,該封裝涉及電感器件和半導體積體電路(IC)晶片的封裝,在相關領域已有大量現有技術存在。其中一個現有技術名為“超小型功率轉換器”(美國專利6,930,584),由埃多等人發明,已於2005年8月16日獲得授權,以下簡稱“埃多專利”。第A1圖和第A2圖說明了埃多專利。第A1圖所示為一薄膜電感。薄膜電感1包含一個鐵氧體襯底7,其部分被大量電磁鐵線圈導體所包圍。鐵氧體襯底7是電絕緣體。如第A1圖所示,電磁鐵線圈導體的第一部分包括形成於鐵氧體襯底7頂部主平面上的若干頂部線圈導體4,電磁鐵線圈導體的第二部分包括若干形成於鐵氧體襯底7底部主平面上的底部線圈導體5。大量的連接導體3形成在穿過鐵氧體襯底7的孔洞當中,用來連接電磁鐵線圈導體的第一部分4和第二部分5,從而形成了用鐵氧體襯底7作為其電感感芯的螺線管型電感。額外的穿孔6c形成並沿鐵氧體襯底7的週邊金屬化,將頂部電極6a和底部電極6b連接起來,用來構成薄膜電感的外 部觸點,並允許電信號穿過鐵氧體襯底7。第A2圖是一個以晶片尺寸模組形式封裝的超小型功率轉換器的橫截面示意圖。這個晶片尺寸模組包括一個半導體IC(積體電路)8,所述的半導體IC8通過半導體積體電路上的電極(未明確畫出)上的若干柱形凸塊9和若干位於薄膜電感之上的頂部電極6a鍵合到如第1A圖所示的薄膜電感1的頂部。晶片尺寸模組的薄膜電感1部分的橫截面是沿著第A1圖中X-X軸所截取的。一底部填充物(未示出)也應用在薄膜電感1和半導體IC8之間,從而對晶片尺寸模組進行鈍化。值得注意的是,由於薄膜電感1上的鐵氧體襯底7具有由中心及周邊穿孔3、6c,電磁鐵線圈導體4、5和電極6a、6b所構成的三維特徵,結構複雜,從而加工成本高昂。另一個缺點是這個脆弱的鐵氧體晶片直接裸露,外面沒有任何保護。 Due to the growing market demand, power semiconductor packages continue to trend toward smaller sizes and/or smaller pins while achieving higher power levels. A common power semiconductor package for a variety of converters (boost and step-down converters, etc.), which involves the packaging of inductive devices and semiconductor integrated circuit (IC) chips, and a large number of existing technologies exist in related fields. . One of the prior art names is "Ultra-Subminiature Power Converters" (U.S. Patent No. 6,930,584), invented by Edo et al., which was issued on August 16, 2005, hereinafter referred to as "Edo Patent". Figures A1 and A2 illustrate the Edo patent. Figure A1 shows a thin film inductor. The thin film inductor 1 comprises a ferrite substrate 7 which is partially surrounded by a plurality of electromagnet coil conductors. The ferrite substrate 7 is an electrical insulator. As shown in FIG. A1, the first portion of the electromagnet coil conductor includes a plurality of top coil conductors 4 formed on a top main plane of the ferrite substrate 7, and the second portion of the electromagnet coil conductor includes a plurality of ferrite linings formed thereon. The bottom coil conductor 5 on the bottom main plane of the bottom 7. A large number of connecting conductors 3 are formed in the holes passing through the ferrite substrate 7 for connecting the first portion 4 and the second portion 5 of the electromagnet coil conductor, thereby forming a ferrite substrate 7 as its inductance Core solenoid type inductor. An additional through hole 6c is formed and metallized along the periphery of the ferrite substrate 7, and the top electrode 6a and the bottom electrode 6b are connected to form a thin film inductor. Contacts and allow electrical signals to pass through the ferrite substrate 7. Figure A2 is a schematic cross-sectional view of an ultra-small power converter packaged in the form of a chip size module. The chip size module includes a semiconductor IC (integrated circuit) 8 which passes through a plurality of stud bumps 9 on electrodes (not explicitly shown) on the semiconductor integrated circuit and a plurality of thin film inductors The top electrode 6a is bonded to the top of the thin film inductor 1 as shown in FIG. 1A. The cross section of the thin film inductor 1 portion of the wafer size module is taken along the X-X axis of the A1 diagram. An underfill (not shown) is also applied between the thin film inductor 1 and the semiconductor IC 8 to passivate the wafer size module. It is worth noting that since the ferrite substrate 7 on the thin film inductor 1 has three-dimensional features consisting of the center and peripheral perforations 3, 6c, the electromagnet coil conductors 4, 5 and the electrodes 6a, 6b, the structure is complicated and thus processed. The cost is high. Another disadvantage is that this fragile ferrite wafer is barely exposed and there is no protection outside.

另一個現有技術是標題為“包含有電感或其他類似磁性元件的引線框架”的美國專利,專利號5,428,245,發明人是Lin等人,於1995年6月27日獲得授權,以下簡稱“Lin專利”。第B圖簡要描述了Lin專利。一種具有大量導電引線的引線框架應用於圖中所示的積體電路封裝中。該引線框架還包括中心積分第一電感繞組。其他的線圈繞組也會成為引線框架的一個積分組成部分,他們包圍在初級繞組外面,以此形成一個多層的磁性元件繞組。在一個實施例當中,基於引線框架的繞組外面塗上一層磁性材料,形成了基於引線框架的電感。值得注意的是,儘管所公佈的引線框架電感繞組可以作為信號電感使用,但在沒有實際的磁芯材料的情況之下,這種引線框架電感也許無法滿足需要高電感值和低繞組電阻的功率應用。 Another prior art is U.S. Patent No. 5,428,245, entitled "Lead Frames Containing Inductors or Other Similar Magnetic Elements", invented by Lin et al., issued on June 27, 1995, hereinafter referred to as "Lin Patent ". Figure B briefly describes the Lin patent. A lead frame having a large number of conductive leads is applied to the integrated circuit package shown in the drawing. The leadframe also includes a centrally integrated first inductive winding. The other coil windings also become an integral component of the leadframe that surrounds the primary winding to form a multilayered magnetic component winding. In one embodiment, the lead frame based winding is coated with a layer of magnetic material to form an inductor based on the lead frame. It is worth noting that although the published lead frame inductor windings can be used as signal inductors, such lead frame inductors may not be able to meet the power requirements of high inductance and low winding resistance without the actual core material. application.

因此,本發明所期望達到的目標為一種緊湊的,易於製造的電感功率電子器件封裝,該封裝可以提供高電感等級,包括感應系數值和飽和電流。 Accordingly, what is desired in the present invention is a compact, easy to manufacture inductive power electronics package that provides a high level of inductance, including inductance values and saturation current.

本發明公開了一種緊湊的電感功率電子器件封裝,該封裝具有高電感等級,它包括:一個電路襯底。 The present invention discloses a compact inductive power electronics package having a high inductance rating comprising: a circuit substrate.

一個功率電感附著在電路襯底之上。該功率電感具有一個內部開有窗口的封閉磁回路的電感感芯。在一個更具體的實施例當中,電感感芯為環形。作為一個選擇,該電感感芯也可以包含有一個氣隙,以便在保持封閉磁回路的同時,能夠調節感應係數。 A power inductor is attached to the circuit substrate. The power inductor has an inductive core with a closed magnetic circuit with a window inside. In a more specific embodiment, the inductive core is annular. Alternatively, the inductive core may also include an air gap to adjust the inductance while maintaining the closed magnetic circuit.

該電路襯底包含大量的底部半線圈的構成元件,構成位於電感感芯下方的底部半線圈。 The circuit substrate contains a plurality of constituent elements of the bottom half coil, and constitutes a bottom half coil located below the inductor core.

大量頂部半線圈元件與底部半線圈元件相連,共同形成了完整的包圍在電感感芯之外的電感線圈。 A plurality of top half-coil elements are connected to the bottom half-coil elements to form a complete inductive coil that surrounds the inductive core.

在一個相關的實施例當中,頂部半線圈形成元件可以將暴露於電感感芯內部窗口當中的底部半線圈形成元件接線端和相鄰的位於電感感芯之外的底部半線圈形成元件接線端連接,以此來形成整體的電感線圈。換句話說,每個頂部半線圈的構成元件的一端可以與內部窗口內部的底部半線圈構成元件的一端相連,另一端與電感感芯外部的相鄰的底部半線圈構成元件相連,以此來形成環繞在電感感芯之外的電感線圈。大多數底部半線圈構成元件的一個接線端位於電感感芯內部窗 口當中,另一個接線端位於電感感芯外部。 In a related embodiment, the top half coil forming component can connect the bottom half coil forming component terminal exposed to the inner window of the inductor core and the adjacent bottom half coil forming component terminal outside the inductor core In order to form an integral inductor coil. In other words, one end of each of the constituent elements of the top half coil may be connected to one end of the bottom half coil constituent element inside the inner window, and the other end may be connected to an adjacent bottom half coil constituent element outside the inductor core. Forming an inductive coil that surrounds the inductive core. Most of the terminals of the bottom half-coil component are located inside the inductor core In the mouth, the other terminal is located outside the inductor core.

在一個相關的實施例當中,一個內部連接晶片被添加在電感感芯當中的窗口中,用來在內部窗口中連接頂部半線圈和底部半線圈構成元件。在另一個相關實施例當中,添加了一個環繞在電感感芯四周的外部連接晶片,用來在電感感芯外連接頂部半線圈和底部半線圈構成元件。 In a related embodiment, an internal connection wafer is added to the window in the inductive core for connecting the top half and bottom half coil constituent elements in the internal window. In another related embodiment, an external connection wafer surrounding the inductor core is added to connect the top half coil and the bottom half coil to form the component outside the inductor core.

一個功率積體電路(IC)可以添加于該封裝當中,並與功率電感互連。在一個更為具體的實施例當中,功率IC附著於電路襯底的頂部,另外由電路襯底所提供的電路互連器件用於連接功率IC和功率電感。功率IC可以設置於電感感芯頂部或者旁邊。功率IC甚至可以設置於電感感芯當中的窗口內,用以節省封裝的引腳和厚度。功率IC包括一個功率電晶體和一個用來控制該電晶體的控制IC。 A power integrated circuit (IC) can be added to the package and interconnected with the power inductor. In a more specific embodiment, the power IC is attached to the top of the circuit substrate, and the circuit interconnection device provided by the circuit substrate is used to connect the power IC and the power inductor. The power IC can be placed on top of or next to the inductor core. The power IC can even be placed in a window in the inductor core to save the package pins and thickness. The power IC includes a power transistor and a control IC for controlling the transistor.

在一個更為具體的實施例當中,電路襯底即是引線框架,底部半線圈元件即為大量的引線框架引線,並由此構成底部半線圈。頂部半線圈元件可作為大量頂部引線框架引線,這些環繞在電感感芯上部的引線進一步與特定的底部引線框架引線相連,並構成了電感線圈。作為第二選擇,頂部半線圈元件也可以是大量頂部鍵合線,每條鍵合線環繞在電感感芯上,進一步與特定的底部引線框架引線相連,並構成電感線圈。作為第三選擇,頂部半線圈元件可以由三維立體頂部互連板構成,每塊互連板環繞在電感感芯之上,進一步與特定的底部引線框架引線相連,並構成電感線圈。 In a more specific embodiment, the circuit substrate is the lead frame and the bottom half-coil component is a large number of lead frame leads and thus constitutes the bottom half-coil. The top half-coil component acts as a bulky top leadframe lead, and the leads that surround the upper portion of the inductive core are further connected to a particular bottom leadframe lead and form an inductive coil. As a second option, the top half-coil element can also be a plurality of top bond wires, each of which is wrapped around the inductive core, further connected to a particular bottom leadframe lead, and constitutes an inductive coil. As a third option, the top half-coil element may be constructed of three-dimensional top interconnecting boards, each of which surrounds the inductive core, further connected to a particular bottom leadframe lead, and constitutes an inductive coil.

在另一個更為具體的實施例當中,電路襯底是一個多層電路板(MCL),例如印刷電路板(PCB),擁有一個頂部導電線 路層,其中大量的半線圈圖案化導電線路構成了底部半線圈元件。 In another more specific embodiment, the circuit substrate is a multilayer circuit board (MCL), such as a printed circuit board (PCB), having a top conductive line The road layer, in which a large number of half-coil patterned conductive lines constitute the bottom half-coil element.

相應地,類似於引線框架襯底的實施例,頂部半線圈元件可以是大量的引線框架引線,鍵合線或者三維立體互連板。或者,MCL板也可以是雙馬來醯亞胺-三嗪樹脂(BT)襯底。 Accordingly, similar to the embodiment of the lead frame substrate, the top half coil element can be a large number of lead frame leads, bond wires or three dimensional interconnect plates. Alternatively, the MCL plate can also be a bismaleimide-triazine resin (BT) substrate.

對於本領域內的技術人員而言顯而易見的是,頂部半線圈元件可以由任何導體材料製成(例如鍵合線,頂部引線框架,互連板),並連接到特定的底部半線圈元件。同樣,含有底部半線圈元件的電路襯底可以由任何合適的材料構成,例如引線框架,PCB或者BT樹脂襯底。 It will be apparent to those skilled in the art that the top half coil element can be made of any conductor material (eg, bond wires, top lead frames, interconnect boards) and connected to a particular bottom half coil element. Likewise, the circuit substrate containing the bottom half-coil component can be constructed of any suitable material, such as a leadframe, PCB or BT resin substrate.

一種製造上述電感功率電子器件封裝的方法,該方法包括:提供一個電路襯底,其上含有大量底部半線圈元件;通過以下方法在電路襯底上附著一個功率電感: A method of fabricating the above described inductive power electronics package, the method comprising: providing a circuit substrate having a plurality of bottom half coil elements thereon; attaching a power inductor to the circuit substrate by:

●在底部半線圈元件之上設置一個具有封閉磁回路的電感感芯,該感芯中央有一窗口。 - An inductive core having a closed magnetic circuit is disposed above the bottom half coil element, the center of the core having a window.

●附著大量的頂部半線圈元件,使得他們與底部半線圈元件相連,這樣即可共同形成將電感感芯包圍起來的電感線圈。 • A large number of top half-coil components are attached so that they are connected to the bottom half-coil component, which together form an inductive coil that encloses the inductive core.

作為一個額外選擇,可在電路襯底上附著一個功率IC。 As an additional option, a power IC can be attached to the circuit substrate.

作為另外一個額外選擇,可以將電感功率電子器件封裝頂部進行封裝,包括感芯和頂部半線圈形成元件進行封裝。 As an additional option, the top of the inductive power electronics package can be packaged, including the core and top half coil forming components.

附著大量頂部半線圈構成元件的方法包括,將每個頂部半線圈元件與一個位於窗口內的底部半線圈元件的接線端和一個相鄰的位於電感感芯之外的底部半線圈元件接線端相連。 A method of attaching a plurality of top half coil constituent elements includes connecting each top half coil element to a terminal of a bottom half coil element located within the window and an adjacent bottom half coil element terminal located outside the inductive core .

本發明的這些特點和有關實施例,通過本發明的更進一步描 述,對於那些本領域內的技術人員來說,將更為清晰和明確。 These features and related embodiments of the present invention are further described by the present invention It will be clearer and clearer to those skilled in the art.

以上及以下對附圖的描述內容,在此僅針對一個或者幾個本發明當前所提及的實施例,並且同時也描述了一些有代表性的具有附加部件和(或)可替代的實施例。這些描述和附圖是以說明為目而提供,而其本身並不應被認為是對本發明的限制。因此,本領域內的技術人員可以容易的認識到它們的變型、修改、或者替代。這些變型、修改和替代應當被理解為仍然包含在本發明所附權利要求的範圍之內。 The above and below description of the figures is only for one or several of the presently mentioned embodiments of the invention, and also describes some representative embodiments with additional components and/or alternatives. . The description and drawings are provided for the purpose of illustration and should not be construed as limiting the invention. Thus, those skilled in the art can readily recognize variations, modifications, or substitutions thereof. Such variations, modifications, and alterations are to be understood as being included within the scope of the appended claims.

為了便於理解和領會本發明,第C1圖至第C5圖全部附圖包括它們的說明摘自美國專利申請12/011,489並經重新編號,其內容如下:第C1圖是本發明的基於引線框架的分離式功率電感的一個實施例的俯視圖。第C2圖是本發明的頂部引線框架的俯視圖。 In order to facilitate the understanding and understanding of the present invention, the entire drawings of Figures C1 through C5, including their descriptions, are taken from U.S. Patent Application Serial No. 12/011,489, the entire disclosure of which is hereby incorporated by A top view of one embodiment of a power inductor. Figure C2 is a top plan view of the top lead frame of the present invention.

第C3圖是第C1圖當中所示功率電感側視原理圖。第C4圖是本發明的互連晶片的俯視圖。第C5圖是第C4圖當中所示互連晶片的剖視圖。 Figure C3 is a side view of the power inductor shown in Figure C1. Figure C4 is a top plan view of the interconnect wafer of the present invention. Figure C5 is a cross-sectional view of the interconnect wafer shown in Figure C4.

如第C1圖所示,在一個實施例當中,基於引線框架的分離式功率電感編號為300,其中底部引線框架260的部分引線在圖中以虛線顯示。功率電感300包含平坦的底部引線框架260,一個頂部引線框架320,在磁芯110周圍互相連接的引線。一個互連晶片330設置在窗口115當中(如第C3圖所示),使得頂部內部觸點區域與底部引線框架引線之間的連接成為可能。參照第C2圖,頂部引線框架320包括設置在頂部引線框架320 的第一側上的第一組引線320a,320b和320c。 As shown in FIG. C1, in one embodiment, the lead frame based split power inductor number is 300, with a portion of the leads of the bottom lead frame 260 being shown in dashed lines in the figure. Power inductor 300 includes a flat bottom leadframe 260, a top leadframe 320, and leads that are interconnected around core 110. An interconnect wafer 330 is disposed in the window 115 (as shown in Figure C3), making it possible to connect the top internal contact area to the bottom leadframe lead. Referring to FIG. C2, the top lead frame 320 includes a top lead frame 320 disposed at the top. The first set of leads 320a, 320b and 320c on the first side.

頂部引線320a、320b和320c有一非線性的臺階狀結構,以便於連接底部引線框架260的引線,用來構成完整的稍後進行描述的線圈。頂部引線320a、320b和320c包括分別設置在頂部引線320a、320b和320c沿A-A所得截面上的內部觸點區域321a、321b和321c。頂部引線320a、320b和320c還包括分別設置在頂部引線320a、320b和320c沿B-B(在A-A平面之下,平行於A-A平面)所得截面上的外部觸點區域323a、323b和323c。頂部引線框架320還包括設置在頂部引線框架320的第二側上的第二組引線320d、320e和320f。頂部引線320d、320e和320f具有一非線性的臺階狀結構,以便於連接底部引線框架260的引線,用來構成完整的稍後進行描述的線圈。頂部引線320d、320e和320f包括分別設置在截面A-A的內部的觸點區域321d、321e和321f,還包括分別設置在截面B-B的外部觸點區域323d、323e和323f。分別環繞在磁芯110之外的頂部和底部引線框架320和260引線連接之後構成了完整的線圈。 The top leads 320a, 320b, and 320c have a non-linear stepped structure to facilitate connection of the leads of the bottom lead frame 260 to form a complete coil to be described later. The top leads 320a, 320b, and 320c include internal contact regions 321a, 321b, and 321c that are respectively disposed on the cross sections of the top leads 320a, 320b, and 320c along A-A. The top leads 320a, 320b, and 320c further include external contact regions 323a, 323b, and 323c disposed on the cross sections of the top leads 320a, 320b, and 320c, respectively, along B-B (below the A-A plane, parallel to the A-A plane). The top leadframe 320 also includes a second set of leads 320d, 320e, and 320f disposed on a second side of the top leadframe 320. The top leads 320d, 320e, and 320f have a non-linear stepped structure to facilitate connection of the leads of the bottom lead frame 260 to form a complete coil to be described later. The top leads 320d, 320e, and 320f include contact regions 321d, 321e, and 321f respectively disposed inside the section A-A, and further include external contact regions 323d, 323e, and 323f respectively disposed in the section B-B. The top and bottom lead frames 320 and 260, which are respectively wrapped around the core 110, are wire-bonded to form a complete coil.

如第C4圖和第C5圖當中所示的互連晶片330包括6個傳導穿孔330a、330b、330c、330d、330e和330f(如第C1圖當中虛線所示),所述的穿孔相互間隔並設定用來提供頂部引線框架320和底部引線框架260引線的內部觸點區域之間的連接。焊接凸塊340更適宜形成在互聯晶片330的上下兩個表面,以便於連接。 The interconnect wafer 330 as shown in Figures C4 and C5 includes six conductive vias 330a, 330b, 330c, 330d, 330e, and 330f (as indicated by the dashed lines in Figure C1), the vias being spaced apart from each other A connection is provided between the internal contact areas for providing the leads of the top lead frame 320 and the bottom lead frame 260. Solder bumps 340 are preferably formed on the upper and lower surfaces of interconnect wafer 330 to facilitate connection.

環繞在磁芯110周圍的線圈如第C1圖當中所示。底部引線框架260的引線內部觸點區域260a、260b、260c、260d、260f 和260g通過互連晶片330分別耦合到頂部引線框架320的內部觸點區域321a、321b、321c、321d、321e和321f。底部引線框架260的引線外部觸點區域260b、260c、260d、260e、260f和260g分別與頂部引線框架320環繞在磁芯110邊緣的外部觸點區域323a、323b、323c、323d、323e和323f耦合。 The coil surrounding the core 110 is as shown in Fig. C1. Lead internal contact regions 260a, 260b, 260c, 260d, 260f of bottom lead frame 260 And 260g are respectively coupled to the inner contact regions 321a, 321b, 321c, 321d, 321e, and 321f of the top lead frame 320 through the interconnect wafer 330. The lead outer contact regions 260b, 260c, 260d, 260e, 260f, and 260g of the bottom lead frame 260 are coupled to the outer contact regions 323a, 323b, 323c, 323d, 323e, and 323f of the top lead frame 320 around the edge of the magnetic core 110, respectively. .

引線260a的內部觸點區域261a通過穿孔330a耦合到引線320a的內部觸點區域321a。引線320a的外部觸點區域323a與相鄰引線260b的外部觸點區域263b耦合。引線260b的內部觸點區域261b與引線320b的內部觸點區域321b通過穿孔330b耦合。引線320b的外部觸點區域323b與相鄰引線260c的外部觸點區域263c耦合。引線260c的內部觸點區域261c通過穿孔330c與引線320c的內部觸點區域321c耦合。引線320c的外部觸點區域322c與相鄰引線260d的外部觸點區域263d耦合。引線260d的內部觸點區域261d與引線320f的內部觸點區域321f通過穿孔330f耦合。引線320f的外部觸點區域323f與相鄰引線260g的外部觸點區域263g耦合。引線260g的內部觸點區域261g通過穿孔330e與引線320e的內部觸點區域321e耦合。引線320e的外部觸點區域323e與相鄰引線260f的外部觸點區域263f耦合。引線260f的內部觸點區域261f通過穿孔330d與引線320d的內部觸點區域321d耦合。引線320d的外部觸點區域323d與相鄰引線260e的外部觸點區域263e耦合。如第一個和第二個實施例當中所述,頂部和底部引線框架引線的非線性的臺階狀結構為內部和外部觸點區域提供了對準和間隔。 The inner contact region 261a of the lead 260a is coupled to the inner contact region 321a of the lead 320a by a via 330a. The outer contact region 323a of the lead 320a is coupled to the outer contact region 263b of the adjacent lead 260b. The inner contact region 261b of the lead 260b and the inner contact region 321b of the lead 320b are coupled by a through hole 330b. The outer contact region 323b of the lead 320b is coupled to the outer contact region 263c of the adjacent lead 260c. The inner contact region 261c of the lead 260c is coupled to the inner contact region 321c of the lead 320c through the through hole 330c. The outer contact region 322c of the lead 320c is coupled to the outer contact region 263d of the adjacent lead 260d. The inner contact region 261d of the lead 260d and the inner contact region 321f of the lead 320f are coupled by a through hole 330f. The outer contact region 323f of the lead 320f is coupled to the outer contact region 263g of the adjacent lead 260g. The inner contact region 261g of the lead 260g is coupled to the inner contact region 321e of the lead 320e through the through hole 330e. The outer contact region 323e of the lead 320e is coupled to the outer contact region 263f of the adjacent lead 260f. The inner contact region 261f of the lead 260f is coupled to the inner contact region 321d of the lead 320d through the through hole 330d. The outer contact region 323d of the lead 320d is coupled to the outer contact region 263e of the adjacent lead 260e. As described in the first and second embodiments, the non-linear stepped structure of the top and bottom leadframe leads provides alignment and spacing for the inner and outer contact regions.

分離式功率電感300包括接線柱260a和260e,頂部和底部引 線框架320和260引線之間通過互連晶片330的連接,構成了環繞在磁芯110之外的完整線圈。 The split power inductor 300 includes terminals 260a and 260e, top and bottom leads The connection between the wire frames 320 and 260 leads through the interconnect wafer 330 constitutes a complete coil that surrounds the core 110.

分離式功率電感300使用封裝物進行封裝後,形成封裝(圖中未顯示)。封裝物包括常規封裝材料。作為選擇之一,封裝物也包括添加有磁粉的材料,例如鐵氧體顆粒,以此來提供遮罩並提高磁性。 The split power inductor 300 is packaged using a package to form a package (not shown). The package includes conventional packaging materials. Alternatively, the package also includes a material to which magnetic powder is added, such as ferrite particles, to provide a mask and improve magnetic properties.

在第C1圖至第C5圖所示的實施例當中(基於引線框架的分離式功率電感300),包含有底部半線圈元件的電路襯底為底部引線框架260。頂部半線圈元件為頂部引線框架320。內部開有窗口的電感感芯即為具有窗口115的磁芯110。窗口115內的互連封裝330使得頂部半線圈元件320與底部半線圈元件260之間的連接更為便利。功率電感300為分立元件,其並沒有與功率IC封裝在一起。 In the embodiment shown in FIGS. C1 to C5 (separate power inductor 300 based on lead frame), the circuit substrate including the bottom half coil element is the bottom lead frame 260. The top half coil element is the top lead frame 320. The inductive core with the window inside is the core 110 having the window 115. The interconnect package 330 within the window 115 facilitates the connection between the top half coil element 320 and the bottom half coil element 260. Power inductor 300 is a discrete component that is not packaged with a power IC.

為了便於理解和領會本發明,第D1圖至第D2圖及其說明摘自美國專利申請11/986,673,並經重新編號,其內容如下:第D1圖是本發明另一個半導體功率器件封裝的實施例的俯視圖,該半導體封裝包含一個基於引線框架的集成電感。 In order to facilitate the understanding and understanding of the present invention, FIGS. D1 through D2 and their description are taken from U.S. Patent Application Serial No. 11/986,673, the entire disclosure of which is hereby incorporated by In a top view, the semiconductor package includes an integrated inductor based on a leadframe.

第D2圖是本發明的一種半導體功率器件封裝的第六實施例底部的俯視圖,該半導體封裝包含一個基於引線框架的集成電感。 Figure D2 is a top plan view of the bottom of a sixth embodiment of a semiconductor power device package of the present invention comprising a leadframe based integrated inductor.

所述發明的一個實施例如第D1圖所示,它包括一個半導體功率器件封裝1900,該封裝包括一個基於引線框架的集成電感1950。該電感1950由鐵氧體片1800,引線框架100上的多個相鄰引線和鍵合線1920e、1920f、1920i、1920j、1920k和1920m組成。連接晶片500通過形成在其上的穿孔510a至510f提供 導電連接。鐵氧體片1800附著在引線框架100的上表面150之上,並由大襯墊120和小襯墊130支撐。鐵氧體片1800設置在引線框架100上表面150之上,使得引線端140d至140f易於通過窗口1810和140j至140m連接。一個功率IC1930通過窗口1810也易於連接。 One embodiment of the invention, as shown in FIG. D1, includes a semiconductor power device package 1900 that includes a leadframe-based integrated inductor 1950. The inductor 1950 is comprised of a ferrite sheet 1800, a plurality of adjacent leads on the leadframe 100, and bond wires 1920e, 1920f, 1920i, 1920j, 1920k, and 1920m. The connection wafer 500 is provided by the through holes 510a to 510f formed thereon Conductive connection. The ferrite sheet 1800 is attached over the upper surface 150 of the lead frame 100 and is supported by the large liner 120 and the small liner 130. The ferrite sheet 1800 is disposed over the upper surface 150 of the lead frame 100 such that the lead ends 140d to 140f are easily connected through the windows 1810 and 140j to 140m. A power IC 1930 is also easily connected through window 1810.

連接晶片500的尺寸和結構適於裝在窗口1810內。穿孔510a至510f形成並定位在連接封裝500上,這樣他們覆蓋在具有導電環氧樹脂或焊接劑的引線框架100的引線端140d至140f和140j至140m之上,並與其電連接。功率IC1930設置在窗口1810內連接晶片500的旁邊。 The connection wafer 500 is sized and configured to fit within the window 1810. The through holes 510a to 510f are formed and positioned on the connection package 500 such that they are over and electrically connected to the lead terminals 140d to 140f and 140j to 140m of the lead frame 100 having a conductive epoxy or solder. Power IC 1930 is disposed adjacent to wafer 500 in window 1810.

鍵合線將引線框架100的相鄰引線耦合,形成以鐵氧體片1800為磁芯的一個閉合磁路。鍵合線1920e通過穿孔510a將引線110d的一端140d與相鄰引線110e耦合,鍵合線1920e與相鄰引線110d和110e一同構成環繞在鐵氧體片1800外的一個環路。鍵合線1920f通過穿孔510b將引線110e的一端140e與相鄰引線110f耦合,鍵合線1920f與相鄰引線110e和110f一同構成環繞在鐵氧體片1800外的一個環路。鍵合線1920m通過穿孔510c將引線110f的一端140f與相鄰引線110m耦合,鍵合線1920m與相鄰引線110f和110m一同構成環繞在鐵氧體片1800外的一個環路。鍵合線1920k通過穿孔510f將引線110m的一端140m與相鄰引線110k耦合,鍵合線1920k與相鄰引線110m和110k一同構成環繞在鐵氧體片1800外的一個環路。鍵合線通過穿孔510e 1920j將引線110k的一端140k與相鄰引線110j耦合,鍵合線1920j與相鄰引線110k和110j一同構成環繞在鐵氧體片1800外的一個環路。鍵合線通過穿孔 510d 1920i將引線110j的一端140j與相鄰引線110i耦合,鍵合線1920i與相鄰引線110j和110i一同構成環繞在鐵氧體片1800外的一個環路。引線110d和110i組成了電感1950的引線。 The bonding wires couple adjacent leads of the lead frame 100 to form a closed magnetic path with the ferrite sheet 1800 as a magnetic core. The bonding wire 1920e couples one end 140d of the lead 110d to the adjacent lead 110e through the through hole 510a, and the bonding wire 1920e together with the adjacent leads 110d and 110e constitute a loop surrounding the ferrite sheet 1800. The bonding wire 1920f couples one end 140e of the lead 110e to the adjacent lead 110f through the through hole 510b, and the bonding wire 1920f together with the adjacent leads 110e and 110f constitute a loop surrounding the ferrite sheet 1800. The bonding wire 1920m couples one end 140f of the lead 110f to the adjacent lead 110m through the through hole 510c, and the bonding wire 1920m forms a loop around the ferrite sheet 1800 together with the adjacent leads 110f and 110m. The bonding wire 1920k couples one end 140m of the lead 110m to the adjacent lead 110k through the through hole 510f, and the bonding wire 1920k together with the adjacent leads 110m and 110k constitute a loop surrounding the ferrite sheet 1800. The bonding wires couple one end 140k of the lead 110k to the adjacent lead 110j through the through holes 510e 1920j, and the bonding wires 1920j together with the adjacent leads 110k and 110j constitute a loop surrounding the ferrite sheet 1800. Bond wire through perforation 510d 1920i couples one end 140j of lead 110j to adjacent lead 110i, and bond line 1920i, together with adjacent leads 110j and 110i, forms a loop that surrounds ferrite sheet 1800. Leads 110d and 110i make up the leads of inductor 1950.

功率IC1930附著於引線框架100的大襯墊120之上。鍵合線1920d將功率IC1930與引線110d耦合,從而與基於引線框架的集成電感1950耦合。鍵合線1920a、1920b和1920c將功率IC1930分別與引線110a、110b和110c耦合。鍵合線1920g和1920h將功率IC1930分別與引線110g和110h耦合。 The power IC 1930 is attached to the large pad 120 of the lead frame 100. Bond wire 1920d couples power IC 1930 to lead 110d to couple with lead frame based integrated inductor 1950. Bond wires 1920a, 1920b, and 1920c couple power IC 1930 to leads 110a, 110b, and 110c, respectively. Bond wires 1920g and 1920h couple power IC 1930 to leads 110g and 110h, respectively.

由於連接晶片500的應用,不再須要使用專門的鍵合工具(例如K&S Close Center Bond瓶頸鍵合工具),一個標準的鍵合工具就可以滿足要求。 Due to the application of the wafer 500, it is no longer necessary to use special bonding tools (such as the K&S Close Center Bond), and a standard bonding tool can meet the requirements.

一種封裝物被用來完成半導體功率器件封裝1900,該種封裝物被填充在引線110a至110m的半蝕刻區域內,用以固定引線框架100,這樣一來引線就不太可能與封裝分離。封裝物的外部輪廓在圖中由虛線表示。 A package is used to complete the semiconductor power device package 1900, which is filled in the semi-etched regions of the leads 110a through 110m for securing the leadframe 100 such that the leads are less likely to be separated from the package. The outer contour of the package is indicated by a dashed line in the figure.

在第D1圖和第D2圖所示的實施例當中(半導體功率器件封裝1900),含有底部半線圈元件的電路襯底即為引線框架100。頂部半線圈形成元件即為鍵合線1920d至1920f,和1920i至1920m。電感感芯即為具有窗口1810的鐵氧體片1800。該半導體功率器件封裝1900包括設置在窗口1810之內,連接晶片500旁邊的功率IC1930。 In the embodiment shown in FIGS. D1 and D2 (semiconductor power device package 1900), the circuit substrate including the bottom half coil element is the lead frame 100. The top half coil forming elements are the bonding wires 1920d to 1920f, and 1920i to 1920m. The inductive core is a ferrite sheet 1800 having a window 1810. The semiconductor power device package 1900 includes a power IC 1930 disposed within the window 1810 adjacent to the wafer 500.

第1A圖至第1F圖說明了本發明的一個緊湊型電感功率電子器件封裝300,包括一個功率電感12和一個功率IC晶片11,二者均位於MCL板(在本實施例當中為一塊2層PCB板61) 之上。功率電感12有一個具有封閉磁回路的矩形環鐵氧體片15作為電感感芯,其中央開有窗口16。對於本領域內的技術人員來說,為了實現具有緊湊電感尺寸的較高感應係數,將鐵氧體片15製成閉環形狀以便將大部分磁通量約束在其中,這點是非常重要的,而這個閉環的具體形狀則稍顯次要。因此,舉例而言,該閉環形狀可以有以下選擇,方形,多邊形,橢圓或者圓形。不過,通常認為圓形可以提供最高效率的磁約束。封閉磁回路的路徑環繞內部窗口16。該2層PCB板61具有一個頂部導電線路層62,一個底部導電線路層64和使得兩個導電線路層62和64彼此絕緣的中間絕緣層65。第1A圖是這個電感功率電子器件封裝300的俯視圖,為了更清晰的觀察內部器件,封裝物已被去除。第1B圖和第1C圖是鐵氧體片15的頂截面和側截面圖,該鐵氧體15為功率電感12的一個組成部分。第1D圖是功率IC晶片11的俯視圖,該晶片具有若干位於其頂部的IC接觸襯墊11g。第1E圖是頂部導電線路層62的俯視圖。第1F圖是底部導電線路層64的仰視圖。 1A through 1F illustrate a compact inductive power electronics package 300 of the present invention comprising a power inductor 12 and a power IC die 11, both located in an MCL board (in this embodiment, a 2 layer) PCB board 61) Above. The power inductor 12 has a rectangular ring ferrite sheet 15 having a closed magnetic circuit as an inductive core with a window 16 in the center. It is very important for those skilled in the art to make the ferrite sheet 15 into a closed loop shape in order to achieve a high inductance with a compact inductor size in order to confine most of the magnetic flux therein, and this is very important. The specific shape of the closed loop is slightly less important. Thus, for example, the closed loop shape can have the following choices, square, polygonal, elliptical or circular. However, it is generally believed that a circle can provide the most efficient magnetic constraint. The path of the closed magnetic circuit surrounds the inner window 16. The 2-layer PCB board 61 has a top conductive wiring layer 62, a bottom conductive wiring layer 64, and an intermediate insulating layer 65 which insulates the two conductive wiring layers 62 and 64 from each other. Figure 1A is a top plan view of the inductive power electronics package 300 with the package removed for a clearer view of the internal components. FIGS. 1B and 1C are top and side cross-sectional views of the ferrite sheet 15, which is a component of the power inductor 12. Figure 1D is a top plan view of a power IC die 11 having a plurality of IC contact pads 11g on top of it. Figure 1E is a top plan view of the top conductive trace layer 62. FIG. 1F is a bottom view of the bottom conductive wiring layer 64.

接下來,頂部導電線路層62包括第一組設置在電感感芯(鐵氧體片15)下方的半線圈圖案化導電線路62a至62d,62f和62A至62D。實際上,62a至62d,62f和62A至62D一同形成了功率電感12的底部半線圈。相應地,第二組頂部半線圈鍵合線19a至192d和19A至19D位於鐵氧體片15之上,每條鍵合線從上方環繞鐵氧體片15。而且,每一條頂部半線圈鍵合線的兩端都與相應的底部半線圈導電線路相連,一同構成了將鐵氧體片15包圍其中的感應線圈。如此,舉例而言,頂部半線圈鍵合線19a的一端與位於鐵氧體片15外部的半線圈 導電線路62a鍵合,另一端與位於鐵氧體片15內部窗口16內部的相鄰的半線圈導電線路62b鍵合。頂部半線圈鍵合線19b的兩端也以相似地方式與半線圈導電線路62b和62c鍵合。頂部半線圈鍵合線19c的兩端也分別與半線圈導電線路62c和62d鍵合……等等。最終,頂部半線圈鍵合線19D的兩端分別與半線圈導電線路62D和62f鍵合。結果是,頂部導電線路層62的半線圈導電線路62f和62a成為了功率電感12的兩個器件接線柱,用來與感應功率器件封裝300的其他器件連接,舉例來說,與功率IC晶片11通過另外的鍵合線進行電路連接。頂部導電線路層62(鍵合到功率IC晶片11的IC接觸點11g)的其他鍵合襯墊63a至63e,可以通過通孔65a(稍後會進行描述)用來與感應功率器件封裝300外部進行連接。儘管為了避免過度描述細節而未能提及,為了便於對功率電感12的感應係數進行精確調整,鐵氧體片15能夠在製造時在沿磁環方向留有一個或者更多的氣隙。 Next, the top conductive wiring layer 62 includes a first group of half-coil patterned conductive traces 62a to 62d, 62f and 62A to 62D disposed under the inductor core (ferrite sheet 15). In fact, 62a to 62d, 62f and 62A to 62D together form the bottom half coil of power inductor 12. Accordingly, the second set of top half-coil bonding wires 19a to 192d and 19A to 19D are located above the ferrite sheet 15, and each of the bonding wires surrounds the ferrite sheet 15 from above. Moreover, both ends of each of the top half-coil bonding wires are connected to the corresponding bottom half-coil conductive lines to form an induction coil surrounded by the ferrite sheets 15. Thus, for example, one end of the top half coil wire 19a and the half coil located outside the ferrite sheet 15 The conductive line 62a is bonded and the other end is bonded to an adjacent half-coil conductive line 62b located inside the window 16 inside the ferrite sheet 15. Both ends of the top half-coil bonding wire 19b are also bonded to the half-coil conductive lines 62b and 62c in a similar manner. Both ends of the top half-coil bonding wire 19c are also bonded to the half-coil conductive lines 62c and 62d, respectively, and the like. Finally, both ends of the top half-coil bonding wire 19D are bonded to the half-coil conductive lines 62D and 62f, respectively. As a result, the half coil conductive traces 62f and 62a of the top conductive trace layer 62 become the two device terminals of the power inductor 12 for connection to other devices of the inductive power device package 300, for example, with the power IC wafer 11 The circuit is connected by another bonding wire. Other bonding pads 63a to 63e of the top conductive wiring layer 62 (bonded to the IC contact point 11g of the power IC wafer 11) may be used to be external to the inductive power device package 300 through via holes 65a (described later). Make a connection. Although not mentioned in order to avoid excessive description of the details, in order to facilitate precise adjustment of the inductance of the power inductor 12, the ferrite sheet 15 can be left with one or more air gaps in the direction of the magnetic ring at the time of manufacture.

雖然PCB板61的底部導電線路層64和頂部導電線路層62都可以利用各種不同的導電線路幾何圖形外加許多穿過絕緣層65的導電互連通孔被獨立的圖案化,如圖所示底部導電線路層64上還是留有大量底部導電線路64a至64g和大量導電穿孔65a。與之相應,頂部導電線路層62也包含有大量導電穿孔65a,並與在底部導電線路層64上的導電穿孔位置一一對應。這允許底部導電線路64a-g進行外部連接,它們同時和與之相對的頂部導電線路63a-e和62a和62f(底部導電線路64f和64g分別與半線圈導電線路62f和62a相連)之間彼此相連。一個底部導電線路64a的特例是擴展的底部接地平面64m通 常被用來進行針對EMI/RFI(電磁干擾/射頻干擾)進行信號遮罩和進行熱傳導。在一個更為具體的實施例當中,PCB板61由雙馬來醯亞胺-三嗪樹脂(BT)襯底或者其他類型的MCL板製成。當所示功率IC晶片11緊鄰鐵氧體片15放置,在功率IC晶片11、鐵氧體片15和其上的內部窗口16的相關尺寸合適的情況下,功率IC晶片11可以放置於內部窗口16之內,這樣內底部半線圈導電線路和頂部半線圈鍵合線可以在窗口內進行連接。如果需要,該功率IC晶片11甚至可以被放置於鐵氧體片15之上,這樣可以在增加封裝厚度的基礎上進一步減少電感功率電子器件封裝300的管腳面積。該功率IC晶片11包括一個功率電晶體和集成在一起的用來控制該功率電晶體的控制電路。 Although the bottom conductive trace layer 64 and the top conductive trace layer 62 of the PCB board 61 can be independently patterned using a variety of different conductive trace geometries plus a plurality of conductive interconnect vias through the insulating layer 65, as shown at the bottom. A large number of bottom conductive traces 64a to 64g and a large number of conductive vias 65a remain on the conductive wiring layer 64. Correspondingly, the top conductive wiring layer 62 also includes a plurality of conductive vias 65a in one-to-one correspondence with the conductive via locations on the bottom conductive trace layer 64. This allows the bottom conductive traces 64a-g to be externally connected to each other and to the opposite top conductive traces 63a-e and 62a and 62f (the bottom conductive traces 64f and 64g are respectively connected to the half coil conductive traces 62f and 62a) Connected. A special case of a bottom conductive line 64a is an extended bottom ground plane 64m. It is often used for signal masking and heat transfer for EMI/RFI (electromagnetic interference/radio frequency interference). In a more specific embodiment, PCB board 61 is fabricated from a bismaleimide-triazine resin (BT) substrate or other type of MCL plate. When the power IC wafer 11 is placed in close proximity to the ferrite sheet 15, the power IC wafer 11 can be placed in the internal window in the case where the relevant dimensions of the power IC wafer 11, the ferrite sheet 15, and the internal window 16 thereon are appropriate. Within 16 so that the inner bottom half coil conductive line and the top half coil bond line can be connected within the window. If desired, the power IC wafer 11 can even be placed over the ferrite sheet 15, which further reduces the pin area of the inductive power electronics package 300 based on increased package thickness. The power IC die 11 includes a power transistor and control circuitry integrated to control the power transistor.

在緊湊型電感功率電子器件封裝300當中,電路襯底是PCB板61,底部半線圈元件是半線圈導電線路62a至62d、62f和62A至62D。現在,很明顯,一般而言一個多於2層的PCB板或者MLC板可以被應用於緊湊型電感功率電子器件封裝,並相應的增加封裝的靈活性。實際上,PCB板61可以由任何包含有合適的底部半線圈元件的電路襯底替代,例如第C1圖至第C2圖,以及第D1圖至第D2圖當中所示的底部引線框架。頂部半線圈元件是鍵合線19。鍵合線19可以由任何合適的頂部半線圈元件替換,例如第C1圖至第C3圖當中所示頂部引線框架或者互連板。電感功率電子器件封裝包含一個分離式功率電感,如第C1圖至第C3圖所示;或者包含一個與功率IC封裝在一起的功率電感,如第1A圖所示。如第1圖至第4圖當中所示,更多的實施例充分說明了本發明設計的靈活 性。 In the compact inductive power electronics package 300, the circuit substrate is a PCB board 61 and the bottom half coil elements are half coil conductive lines 62a to 62d, 62f and 62A to 62D. Now, it is clear that in general, a PCB or MLC board with more than 2 layers can be applied to a compact inductive power electronics package and correspondingly increase the flexibility of the package. In fact, the PCB board 61 can be replaced by any circuit substrate including a suitable bottom half coil element, such as the C1 to C2 diagrams, and the bottom lead frame shown in FIGS. D1 to D2. The top half coil element is a bond wire 19. Bond wire 19 can be replaced by any suitable top half coil component, such as the top leadframe or interconnect plate shown in Figures C1 through C3. The inductive power electronics package contains a separate power inductor as shown in Figures C1 through C3; or a power inductor packaged with a power IC, as shown in Figure 1A. As shown in Figures 1 to 4, more embodiments fully illustrate the flexibility of the design of the present invention. Sex.

第2圖說明了本緊湊型電感功率電子器件封裝350的第二個實施例,其中具有封閉磁回路的功率電感12位於一個引線框架之上。透過封裝物101,各個組成部分在圖中以虛線顯示。與第1A圖類似,功率電感12有一個矩形的內部開有窗口16的鐵氧體片15作為感芯。引線框架包含一些位於鐵氧體片15之下的底部半線圈導線17a至17g。實際上,底部半線圈導線17a至17g共同構成了功率電感12的底部半線圈。相對地,另一些頂部半線圈鍵合線19a至19f位於鐵氧體片15之上,每一條鍵合線都從鐵氧體片15上繞過。而且,每條頂部半線圈導線的兩端都與特定的相鄰底部半線圈導線連接,共同構成了環繞鐵氧體片15的電感線圈。例如,頂部半線圈鍵合線19a的兩端分別與底部半線圈導線17a和17b相鍵合。頂部半線圈鍵合線19b的兩端分別與底部半線圈導線17b和17c相鍵合。頂部半線圈鍵合線19c的兩端分別與底部半線圈導線17c和17d相鍵合……等等。最後,頂部半線圈鍵合線19f的兩端分別與底部半線圈導線17f和17g相鍵合。結果,引線框架底部半線圈導線17a和17g成為了功率電感12的兩個器件接線柱,用來與電感功率電子器件封裝350外部進行連接。 Figure 2 illustrates a second embodiment of the present compact inductive power electronics package 350 in which the power inductor 12 having a closed magnetic loop is positioned over a leadframe. Through the package 101, the various components are shown in dashed lines in the figure. Similar to Fig. 1A, the power inductor 12 has a rectangular ferrite sheet 15 having a window 16 inside as a core. The lead frame includes a plurality of bottom half coil wires 17a to 17g located below the ferrite sheet 15. In fact, the bottom half coil wires 17a to 17g together constitute the bottom half coil of the power inductor 12. In contrast, other top half-coil bonding wires 19a to 19f are located above the ferrite sheet 15, and each of the bonding wires is bypassed from the ferrite sheet 15. Moreover, both ends of each of the top half coil wires are connected to a specific adjacent bottom half coil wire to collectively constitute an inductor coil surrounding the ferrite sheet 15. For example, both ends of the top half-coil bonding wire 19a are bonded to the bottom half-coil wires 17a and 17b, respectively. Both ends of the top half-coil bonding wire 19b are bonded to the bottom half-coil wires 17b and 17c, respectively. Both ends of the top half-coil bonding wire 19c are bonded to the bottom half-coil wires 17c and 17d, respectively, and the like. Finally, both ends of the top half-coil bonding wire 19f are bonded to the bottom half-coil wires 17f and 17g, respectively. As a result, the lead frame bottom half coil wires 17a and 17g become the two device terminals of the power inductor 12 for connection to the outside of the inductive power electronics package 350.

第3A圖至第3D圖說明了分離式功率電感70的另一實施例,除了將底部引線框架換為一塊MCL板之外(例如一塊2層PCB板71),其餘部分均與先前的實施例相似。該2層PCB板71包含一個頂部導電線路層72,一個底部導電線路層74和一個位於二者之間的絕緣層75,用來將兩個導電線路層72和74彼此絕緣。第3A圖是該分離式功率電感70的橫截面側 視圖。第3B圖是頂部導電線路層72的俯視圖。第3C圖是PCB板71的仰視圖,顯示出了底部導電線路層74。第3D圖是該分離式功率電感70的俯視圖,為了更清晰的觀察內部器件,封裝物101已被去除。頂部導電線路層72當中的半線圈導電線路72a至72g將被圖案化,並起到與第1A圖至第1D圖當中半線圈導電線路62a-62d,62f和62A-62D相類似的功能。PCB板71的底部導電線路層74和頂部導電線路層72都可以利用各種不同的導電線路幾何圖形,外加許多穿過絕緣層75的導電互連通孔被獨立的圖案化,如圖所示,底部導電線路層74上留有大量底部導電線路74a-74c和74f-74g,外加導電穿孔75a和75b。導電穿孔75a和75b將電感(線路72f和72g)連接至PCB板71(線路74f和74g)的底部,這樣就允許將電感與外部進行連接。 3A through 3D illustrate another embodiment of a split power inductor 70, except that the bottom lead frame is replaced by an MCL board (eg, a 2-layer PCB board 71), with the remainder being the same as in the previous embodiment. similar. The 2-layer PCB board 71 includes a top conductive wiring layer 72, a bottom conductive wiring layer 74 and an insulating layer 75 therebetween for insulating the two conductive wiring layers 72 and 74 from each other. Figure 3A is a cross-sectional side of the split power inductor 70 view. Figure 3B is a top plan view of the top conductive trace layer 72. Figure 3C is a bottom plan view of the PCB board 71 showing the bottom conductive trace layer 74. Figure 3D is a top plan view of the split power inductor 70 with the package 101 removed for a clearer view of the internal components. The half coil conductive lines 72a to 72g among the top conductive wiring layers 72 will be patterned and function similarly to the half coil conductive lines 62a-62d, 62f and 62A-62D in Figs. 1A to 1D. Both the bottom conductive trace layer 74 and the top conductive trace layer 72 of the PCB board 71 can be independently patterned using a variety of different conductive trace geometries, plus a plurality of conductive interconnect vias through the insulating layer 75, as shown, A plurality of bottom conductive traces 74a-74c and 74f-74g are left on the bottom conductive trace layer 74, plus conductive vias 75a and 75b. Conductive vias 75a and 75b connect the inductors (lines 72f and 72g) to the bottom of PCB board 71 (lines 74f and 74g), which allows the inductor to be connected to the outside.

PCB板71還包括,與其底部導電線路74a-74c,74f-74g接觸的許多週邊接觸凸塊(例如用來與PCB板71外部進行連接的115e和115a)。這些凸塊被放置在底部線路74a至74c下方來確保穩定性,而底部線路74f和74g下方的凸塊也被用來與外部進行導電連接。在一個更為具體的實施例當中,PCB板71由BT樹脂襯底構成。如第3A圖所示,封裝物101對分離式功率電感70的頂部(包括鐵氧體片15,鍵合線79a-79f和頂部導電線路層72)進行保護。 The PCB board 71 also includes a plurality of peripheral contact bumps (e.g., 115e and 115a for connecting to the outside of the PCB board 71) in contact with the bottom conductive traces 74a-74c, 74f-74g. These bumps are placed below the bottom traces 74a to 74c to ensure stability, while the bumps under the bottom traces 74f and 74g are also used for conductive connection to the outside. In a more specific embodiment, the PCB board 71 is composed of a BT resin substrate. As shown in FIG. 3A, the package 101 protects the top of the split power inductor 70 (including the ferrite sheets 15, the bond wires 79a-79f and the top conductive trace layer 72).

在第3A圖至第3D圖(分離式功率電感70)當中所示的實施例中,含有底部半線圈元件的電路襯底是包含頂部導電線路層72的PCB板71。頂部半線圈元件為鍵合線79a至79f。電感感芯15(通常是鐵氧體片)開有一窗口16。 In the embodiment shown in Figures 3A through 3D (separate power inductor 70), the circuit substrate containing the bottom half coil component is a PCB board 71 comprising a top conductive trace layer 72. The top half coil elements are bonding wires 79a to 79f. The inductive core 15 (typically a ferrite sheet) has a window 16.

第4A圖至第4C圖說明了分離式功率電感40的另一個實施例,其中功率電感40使用了大量週邊支架凸塊(例如位於引線框架41底部的43b和43c)和位於其上的頂部半線圈互連板(42a至42h)。第4A圖是為了更清晰的觀察內部器件已去除封裝物101之後俯視圖。第4B圖是引線框架41獨自的俯視圖。第4C圖是分離式功率電感40的側視圖。與第1A圖當中使用鍵合線不同,大量三維頂部半線圈互連板42a至42h(每一塊均環繞電感感芯15上方並更進一步連接到特定的底部半線圈導電引線41a至41j上)被用來構成電感線圈。例如,頂部半線圈互連板42a的兩端分別與底部半線圈導電引線41a和41b鍵合。頂部半線圈互連板42b的兩端分別與底部半線圈導電引線41b和41c鍵合。頂部半線圈互連板42c的兩端分別與底部半線圈導電引線41c和41d鍵合……等等。最後,頂部半線圈互連板42h的兩端分別與底部半線圈導電引線41h和41i鍵合。結果,底部半線圈導電引線41a和41i就成為了功率電感的用來與外部進行電路連接的兩個器件接線柱。與鍵合線相比較,由頂部半線圈互連板構成的電感線圈的優勢是擁有更低的線圈電阻。 4A through 4C illustrate another embodiment of a split power inductor 40 in which the power inductor 40 uses a plurality of peripheral bracket bumps (e.g., 43b and 43c at the bottom of the lead frame 41) and a top half located thereon. Coil interconnect boards (42a to 42h). Figure 4A is a top view for a clearer view of the internal device after the package 101 has been removed. Fig. 4B is a top plan view of the lead frame 41 alone. Figure 4C is a side view of the split power inductor 40. Unlike the bonding wires used in FIG. 1A, a large number of three-dimensional top half-coil interconnecting plates 42a to 42h (each of which surrounds the inductive core 15 and further connected to the specific bottom half-coil conductive leads 41a to 41j) are Used to form an inductor. For example, both ends of the top half-coil interconnecting plate 42a are bonded to the bottom half-coil conductive leads 41a and 41b, respectively. Both ends of the top half-coil interconnecting plate 42b are respectively bonded to the bottom half-coil conductive leads 41b and 41c. Both ends of the top half-coil interconnection board 42c are respectively bonded to the bottom half-coil conductive leads 41c and 41d, and the like. Finally, both ends of the top half-coil interconnecting plate 42h are respectively bonded to the bottom half-coil conductive leads 41h and 41i. As a result, the bottom half coil conductive leads 41a and 41i become the two device terminals of the power inductor for circuit connection with the outside. The advantage of an inductor consisting of a top half-coil interconnect plate is that it has a lower coil resistance than a bond wire.

若干週邊支架凸塊43b和43c貼在底部半線圈導電引線41d和41f的底部。為了獲得穩定性,至少有三個週邊支架凸塊,儘管只需要其中的兩個來構成與電感的導電連接。 A plurality of peripheral bracket projections 43b and 43c are attached to the bottom of the bottom half coil conductive leads 41d and 41f. In order to achieve stability, there are at least three peripheral bracket bumps, although only two of them are required to form an electrically conductive connection with the inductor.

總的來說,封裝物可以將電感封裝的頂部全部包圍,包括電感感芯和頂部半線圈形成元件。封裝物起到保護和電氣隔離其所包圍元件的作用。在易碎的鐵氧體片被用來作為電感感芯使用的時候,在鍵合線或互連板被用來作為頂部半線圈元件的時 候,這一特性極為有利。例如,封裝物可以是標準的模塑膠。在一個更為具體的實施例當中,封裝物含有嵌入式磁性粒子,用來提高功率電感的電感值。 In general, the package can completely enclose the top of the inductive package, including the inductive core and the top half coil forming component. The package acts to protect and electrically isolate the components it surrounds. When a fragile ferrite sheet is used as an inductive core, when a bond wire or interconnect is used as the top half coil component This feature is extremely beneficial. For example, the package can be a standard molded plastic. In a more specific embodiment, the package contains embedded magnetic particles for increasing the inductance of the power inductor.

對於本領域內的技術人員來說,大量的頂部半線圈鍵合線19a至19f可以用頂部引線框架引線替換,這些引線從上方環繞鐵氧體片15並進一步與下方的特定底部半線圈導電引線17a至17g相連,並由此構成了電感線圈。作為另外一個選擇,頂部半線圈鍵合線19a至19f可以用三維頂部互連板替換,這些互連板從上方環繞鐵氧體片15並進一步連接底部半線圈導電引線17a至17g相連,並由此同樣構成了電感線圈。與使用鍵合線相比,由頂部互連板構成的電感線圈的優勢是擁有更低的線圈電阻。 For those skilled in the art, a large number of top half-coil bond wires 19a through 19f can be replaced with top leadframe leads that surround the ferrite sheet 15 from above and further with a specific bottom half-coil conductive lead below. 17a to 17g are connected and thus constitute an inductive coil. Alternatively, the top half-coil bonding wires 19a to 19f may be replaced with a three-dimensional top interconnecting plate that surrounds the ferrite sheet 15 from above and is further connected to the bottom half-coil conductive leads 17a to 17g, and is connected by This also constitutes an inductive coil. The advantage of an inductor consisting of a top interconnect board is that it has a lower coil resistance than using a bond wire.

再次參照第1A圖至第1F圖,一個相應的製造電感功率電子器件封裝300的方法應當包括:提供一塊PCB板61,其上有大量半線圈圖案化的導電線路例如62a至62D。 Referring again to Figures 1A through 1F, a corresponding method of fabricating an inductive power electronics package 300 should include providing a PCB board 61 having a plurality of semi-coil patterned conductive traces such as 62a through 62D.

通過將鐵氧體片15設置在半線圈圖案化的導電線路之上,將功率電感12粘附在PCB板61之上。作為一個補充選擇,可以將功率IC晶片11也粘附在PCB板61之上。 The power inductor 12 is adhered to the PCB board 61 by placing the ferrite sheet 15 over the semi-coil patterned conductive line. As an additional option, the power IC wafer 11 can also be adhered to the PCB board 61.

再粘附上大量頂部半線圈鍵合線,例如19a至19D,使得他們與下方的大量半線圈圖案化導電線路相連接,並共同構成一個環繞鐵氧體片15的電感線圈。 A plurality of top half-coil bond wires, such as 19a through 19D, are then adhered such that they are connected to a plurality of half-coil patterned conductive traces below and together form an inductive coil surrounding the ferrite sheet 15.

在一個更為具體的實施例當中,粘貼頂部半線圈的方法更進一步包括:將每一個頂部半線圈形成元件的一端與一個位於內部窗口之內的底部半線圈形成元件的一端相連,並將頂部半線圈 形成元件的另一端與位於鐵氧體片之外的相鄰的底部半線圈形成元件的一端相連。 In a more specific embodiment, the method of pasting the top half coil further comprises: connecting one end of each top half coil forming element to one end of a bottom half coil forming element located within the inner window, and the top Half coil The other end of the forming element is connected to one end of an adjacent bottom half coil forming element located outside the ferrite sheet.

該方面更進一步包括一個將電感功率電子器件封裝的頂部用封裝物進行封裝的步驟。 The aspect further includes the step of packaging the top of the inductive power electronics package with a package.

到目前,對於本領域內的技術人員來說很明顯,上述大量的實施例也都可以容易的被進行改良,以適用於其他特定的應用。儘管上述實施例當中包含了很多具體特性描述,這些特性不應被視為對本發明權利範圍的限制,而僅是本發明大量實施例當中的一些示例。 Up to now, it will be apparent to those skilled in the art that a large number of the above embodiments can be easily modified to suit other specific applications. While the above-described embodiments are not to be construed as limiting the scope of the invention,

通過這些描述和圖片,給出了許多包含有具體配置的典型實施例。對於現有本領域內的普通技術人員來說,本發明可以通過大量其他具體實施方式得以實施,這些人員不需要更多的實驗也可以實施類似的其他實施例。就本專利申請的目的來說,本發明的保護範圍並不僅限於前述的這些具體的典型實施例,而是如權利要求所述。 Through these descriptions and pictures, a number of exemplary embodiments including specific configurations are given. The present invention may be embodied in a number of other specific embodiments, which may be practiced by those skilled in the art without departing from the scope of the invention. For the purposes of this patent application, the scope of protection of the present invention is not limited to the specific exemplary embodiments described above, but rather the claims.

任何或者全部與本發明權利要求內容相當或相似的方法或者範圍上的修改,都應當被視為包含在本發明的精神和範圍之內而受到保護。 Any and all modifications or equivalents of the method or scope of the present invention should be construed as being included within the spirit and scope of the invention.

300‧‧‧基於引線框架的分離式功率電感 300‧‧‧Separate power inductors based on lead frames

12‧‧‧功率電感 12‧‧‧Power Inductors

15‧‧‧矩形環鐵氧體片 15‧‧‧Rectangular ring ferrite sheets

16、1810‧‧‧窗口 16, 1810‧‧‧ window

19a、19b、19c、19d、19e、19f、19A、19B、19C、19D‧‧‧頂部半線圈鍵合線 19a, 19b, 19c, 19d, 19e, 19f, 19A, 19B, 19C, 19D‧‧‧ top half coil bonding wires

61、71‧‧‧PCB板 61, 71‧‧‧PCB board

PCB‧‧‧印刷電路板 PCB‧‧‧Printed circuit board

62a、62b、62c、62d、62f、62A、62B、62C、62D、72a、72b、72c、72d、72e、72f、72g‧‧‧半線圈導電線路 62a, 62b, 62c, 62d, 62f, 62A, 62B, 62C, 62D, 72a, 72b, 72c, 72d, 72e, 72f, 72g‧‧‧ half-coil conductive lines

63a、63b、63c、63d、63e、63f‧‧‧頂部導電線路 63a, 63b, 63c, 63d, 63e, 63f‧‧‧ top conductive lines

1‧‧‧薄膜電感 1‧‧‧thin film inductance

7‧‧‧鐵氧體襯底 7‧‧‧ Ferrite substrate

4‧‧‧頂部線圈導體 4‧‧‧Top coil conductor

5‧‧‧底部線圈導體 5‧‧‧Bottom coil conductor

3‧‧‧連接導體 3‧‧‧Connecting conductor

6a‧‧‧頂部電極 6a‧‧‧Top electrode

6b‧‧‧底部電極 6b‧‧‧ bottom electrode

6c、330c、510a、510b、510c、510d、510e、510f‧‧‧穿孔 6c, 330c, 510a, 510b, 510c, 510d, 510e, 510f‧‧‧ perforation

8‧‧‧積體電路 8‧‧‧Integrated circuit

9‧‧‧柱形凸塊 9‧‧‧Cylindrical bumps

110‧‧‧磁芯 110‧‧‧ magnetic core

115、1810‧‧‧窗口 115, 1810‧‧‧ window

260‧‧‧底部引線框架 260‧‧‧Bottom lead frame

260b、260c、260d、260e、260f、260g‧‧‧引 線外部觸點區域 260b, 260c, 260d, 260e, 260f, 260g‧‧‧ cited Line external contact area

320‧‧‧頂部引線框架 320‧‧‧Top lead frame

320a、320b、320c、320d、320e、320f‧‧‧頂部引線 320a, 320b, 320c, 320d, 320e, 320f‧‧‧ top leads

321a、321b、 321c、321d、321e、321f‧‧‧內部觸點區域 321a, 321b, 321c, 321d, 321e, 321f‧‧‧ internal contact area

323a、323b、323c、323d、323e、323f‧‧‧外部觸點區域 323a, 323b, 323c, 323d, 323e, 323f‧‧‧ external contact area

330‧‧‧互連晶片 330‧‧‧Interconnect wafer

330a、330b、330c、330d、330e、330f‧‧‧傳導穿孔 330a, 330b, 330c, 330d, 330e, 330f‧‧‧ conductive perforation

340‧‧‧焊接凸塊 340‧‧‧welding bumps

1900‧‧‧半導體功率器件封裝 1900‧‧‧Semiconductor Power Device Package

100‧‧‧引線框架 100‧‧‧ lead frame

1800‧‧‧鐵氧體片 1800‧‧‧ Ferrite tablets

1950‧‧‧基於引線框架的集成電感 1950‧‧‧Integrated inductance based on lead frame

150‧‧‧表面 150‧‧‧ surface

500‧‧‧連接晶片 500‧‧‧Connected wafer

1930‧‧‧功率IC 1930‧‧‧Power IC

IC‧‧‧積體電路 IC‧‧‧ integrated circuit

120‧‧‧大襯墊 120‧‧‧ large pad

130‧‧‧小襯墊 130‧‧‧Small pad

110a、110b、110c、110d、110e、110f、110g、110h、110i、110j、 110k、110m‧‧‧引線 110a, 110b, 110c, 110d, 110e, 110f, 110g, 110h, 110i, 110j, 110k, 110m‧‧‧ lead

1920a、1920b、1920c、1920d、1920e、 1920f、1920g、1920h、1920i、1920j、1920k、1920m、79a、 79b、79c、79d、79e、79f‧‧‧鍵合線 1920a, 1920b, 1920c, 1920d, 1920e, 1920f, 1920g, 1920h, 1920i, 1920j, 1920k, 1920m, 79a, 79b, 79c, 79d, 79e, 79f‧‧‧ bond wires

11‧‧‧功率IC晶片 11‧‧‧Power IC chip

11g‧‧‧接觸襯墊 11g‧‧‧Contact pads

65、75‧‧‧絕緣層 65, 75‧‧‧ insulation

65a‧‧‧通孔 65a‧‧‧through hole

64、74‧‧‧底部導電線路層 64, 74‧‧‧ bottom conductive layer

64a、64b、64c、64d、64e、64f、64g、74a、74b、74c、74f、74g‧‧‧底部導電線路 64a, 64b, 64c, 64d, 64e, 64f, 64g, 74a, 74b, 74c, 74f, 74g‧‧‧ bottom conductive lines

64m‧‧‧底部接地平面 64m‧‧‧Bottom ground plane

350‧‧‧電感功率電子器件封裝 350‧‧‧Inductor Power Electronics Package

101‧‧‧封裝物 101‧‧‧Package

17a、17b、17c、17d、17e、17f、17g、41a、41b、41c、41d、41e、41f、41g、41h、41i、41j‧‧‧底部半線圈導電引線 17a, 17b, 17c, 17d, 17e, 17f, 17g, 41a, 41b, 41c, 41d, 41e, 41f, 41g, 41h, 41i, 41j‧‧‧ bottom half coil conductive leads

70、40‧‧‧分離式功率電感 70, 40‧‧‧Separate power inductors

72‧‧‧頂部導電線路層 72‧‧‧Top conductive circuit layer

115a、115e‧‧‧週邊接觸凸塊 115a, 115e‧‧‧ peripheral contact bumps

75a、75b‧‧‧導電穿孔 75a, 75b‧‧‧ conductive perforations

42a、42b、42c、42d、42e、42f、42g、42h‧‧‧三維頂部半線圈互連板 42a, 42b, 42c, 42d, 42e, 42f, 42g, 42h‧‧‧3D top half coil interconnection board

43b、43c‧‧‧週邊支架凸塊 43b, 43c‧‧‧ peripheral bracket bumps

為了更完整的描述本發明的大量實施例,特提供附圖以作參考。然而,這些附圖不應當被認為是對本發明在範圍上的限制,而僅僅是解釋性說明。 For a more complete description of the numerous embodiments of the invention, reference is made to the drawings. However, the drawings are not to be considered as limiting the scope of the invention, but are merely illustrative.

第A1圖和第A2圖是一種現有技術的超小型轉換器,該轉換器使用了一種電磁鐵線圈薄膜電感; 第B圖示出了一種以現有技術引線框架為基礎的平面線圈電感;第C1圖至第C5圖是從美國專利申請12/011,489中所摘錄的;第D1圖至第D2圖是從美國專利申請11/986,673中所摘錄的;第1A圖至第1F圖說明了本發明提供的緊湊型電感功率電子器件封裝的第一種實施例,該封裝包含有一個封閉磁回路功率電感和位於一個2層PCB板之上的功率IC晶片;且第2圖說明了本發明提供的緊湊型電感功率電子器件封裝的第二種實施例,該封裝包含有一個位於引線框架之上封閉磁回路功率電感。 Figures A1 and A2 are prior art ultra-small converters using an electromagnet coil film inductor; Figure B shows a planar coil inductor based on a prior art lead frame; Figures C1 through C5 are extracted from U.S. Patent Application Serial No. 12/011,489; and Figures D1 through D2 are from U.S. Patent. Appendix 1/986, 673; FIG. 1A to FIG. 1F illustrate a first embodiment of a compact inductive power electronics package provided by the present invention, the package including a closed magnetic loop power inductor and located at a 2 A power IC chip over a layer PCB board; and Figure 2 illustrates a second embodiment of the compact inductive power electronics package provided by the present invention, the package including a closed magnetic loop power inductor located above the lead frame.

第3A圖至第3D圖說明了本發明提供的緊湊型電感功率電子器件封裝的另一種實施例,該封裝包含有一個分離式的,具有封閉磁回路,並位於一個PCB板之上的功率電感。 3A through 3D illustrate another embodiment of a compact inductive power electronics package provided by the present invention, the package including a separate power inductor having a closed magnetic circuit and located on a PCB board .

第4A圖至第4C圖說明了本發明提供的緊湊型電感功率電子器件封裝的另一種實施例,該封裝包含有一個分離式的,具有封閉磁回路,並位於一個引線框架之上的功率電感,並且採用了互連板作為頂部半線圈形成元件。 4A through 4C illustrate another embodiment of a compact inductive power electronics package provided by the present invention, the package including a separate power inductor having a closed magnetic circuit and being placed over a lead frame And an interconnecting plate is used as the top half coil forming element.

300‧‧‧基於引線框架的分離式功率電感 300‧‧‧Separate power inductors based on lead frames

12‧‧‧功率電感 12‧‧‧Power Inductors

15‧‧‧矩形環鐵氧體片 15‧‧‧Rectangular ring ferrite sheets

16、1810‧‧‧窗口 16, 1810‧‧‧ window

19a、19b、19c、19d、19e、19f、19A、19B、19C、19D‧‧‧頂部半線圈鍵合線 19a, 19b, 19c, 19d, 19e, 19f, 19A, 19B, 19C, 19D‧‧‧ top half coil bonding wires

61、71‧‧‧PCB板 61, 71‧‧‧PCB board

PCB‧‧‧印刷電路板 PCB‧‧‧Printed circuit board

62a、62b、62c、62d、62f、62A、62B、62C、62D、72a、72b、72c、72d、72e、72f、72g‧‧‧半線圈導電線路 62a, 62b, 62c, 62d, 62f, 62A, 62B, 62C, 62D, 72a, 72b, 72c, 72d, 72e, 72f, 72g‧‧‧ half-coil conductive lines

63a、63b、63c、63d、63e、63f‧‧‧頂部導電線路 63a, 63b, 63c, 63d, 63e, 63f‧‧‧ top conductive lines

Claims (21)

一種緊湊型電感功率電子器件封裝,其特徵在於,包括:一個電路襯底;一個附著於電路襯底之上的功率電感,其包含一個具有封閉磁回路的電感感芯,且所述的電感感芯內部開有窗口;所述電路襯底還包含一個由底部半線圈形成元件組成的位於電感感芯之下的底部半線圈;一個與底部半線圈形成元件相互連並與之共同構成一個完整的包圍在電感感芯周圍電感線圈的頂部半線圈形成元件;一個內部互連晶片,其具有一頂部平面和一底部平面,位於電感感芯內部窗口之內,用以將該底部半線圈形成元件和位於內部窗口之內的該頂部半線圈形成元件互連;以及所述頂部半線圈形成元件具有設置在該頂部平面上的內部觸點區域和設置在該底部平面上的外部觸點區域;如此即實現了一個具有高電感等級的緊湊型電感功率電子器件封裝。 A compact inductive power electronic device package, comprising: a circuit substrate; a power inductor attached to the circuit substrate, comprising an inductive core having a closed magnetic circuit, and the inductance a window is formed inside the core; the circuit substrate further comprises a bottom half coil formed by the bottom half coil forming component under the inductance core; and a bottom half coil forming component is interconnected and formed together to form a complete a top half coil forming component surrounding the inductor core around the inductive core; an internal interconnect wafer having a top plane and a bottom plane located within the inner window of the inductive core for forming the bottom half coil component and The top half coils located within the inner window form element interconnections; and the top half coil forming element has an inner contact region disposed on the top plane and an outer contact region disposed on the bottom plane; A compact inductive power electronics package with high inductance levels is implemented. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述頂部半線圈形成元件的一端與位於電感感芯窗口之內的底部半線圈形成元件相連;另一端與相鄰的位於電感感芯之外的另一底部半線圈形成元件相連,這樣構成了所述的電感線圈。 The inductive power electronic device package of claim 1, wherein one end of the top half coil forming element is connected to a bottom half coil forming element located inside the inductive core window; the other end is adjacent to The other bottom half coil forming element outside the inductive core is connected to form the inductive coil. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述電感感芯為環狀。 The inductor power electronic device package according to claim 1, wherein the inductive core is annular. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述的內部互連晶片還包括若干傳導穿孔,所述的 傳導穿孔分別對應於所述底部半線圈形成元件和頂部半線圈形成元件相互間隔設置,並用來提供內部連接。 The inductive power electronic device package of claim 1, wherein the internal interconnect wafer further comprises a plurality of conductive vias, The conductive perforations are respectively spaced apart from each other corresponding to the bottom half coil forming element and the top half coil forming element, and are used to provide an internal connection. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述的封裝還包括一個位於電感感芯旁邊的外部互連晶片,用以將底部半線圈形成元件和位於電感感芯之外的頂部半線圈形成元件互連。 The inductor power electronic device package of claim 1, wherein the package further comprises an external interconnect wafer located beside the inductor core for forming the bottom half coil forming component and the sense of inductance The top half coils outside the core form component interconnections. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述封閉磁回路還包括一個氣隙。 The inductive power electronic device package of claim 1, wherein the closed magnetic circuit further comprises an air gap. 如申請專利範圍第1項所述的電感功率電子器件封裝,還包括一個功率積體電路和一個將該功率IC與功率電感連接的電路連接元件。 The inductive power electronic device package of claim 1, further comprising a power integrated circuit and a circuit connecting component connecting the power IC to the power inductor. 如申請專利範圍第7項所述的電感功率電子器件封裝,其特徵在於,所述功率IC位於電路襯底頂側。 The inductive power electronic device package of claim 7, wherein the power IC is located on a top side of the circuit substrate. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述電路襯底為一個引線框架,其中所述底部半線圈形成元件還包括若干引線框架線路並由此構成底部半線圈。 The inductor power electronic device package of claim 1, wherein the circuit substrate is a lead frame, wherein the bottom half coil forming component further comprises a plurality of lead frame lines and thereby forms a bottom half Coil. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述頂部半線圈形成元件還包括若干引線框架引線,每一條引線從上方環繞電感感芯並通過該內部互連晶片與特定相鄰底部半線圈形成元件相連,並由此構成電感線圈。 The inductive power electronic device package of claim 1, wherein the top half coil forming component further comprises a plurality of lead frame leads, each lead surrounding the inductor core from above and passing through the interconnect chip It is connected to a specific adjacent bottom half coil forming element and thus constitutes an inductive coil. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述頂部半線圈形成元件還包括若干頂部鍵合線,每一條鍵合線從上方環繞電感感芯並通過該內部互連晶片 與特定相鄰底部半線圈形成元件相連,並由此構成電感線圈。 The inductor power electronic device package of claim 1, wherein the top half coil forming component further comprises a plurality of top bonding wires, each of the bonding wires surrounding the inductor core from above and passing through the interior Interconnect wafer It is connected to a specific adjacent bottom half coil forming element and thus constitutes an inductive coil. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述頂部半線圈形成元件還包括若干三維頂部互連板,每一塊互連板從上方環繞電感感芯並通過該內部互連晶片與特定相鄰底部半線圈形成元件相連,並由此構成電感線圈。 The inductor power electronic device package of claim 1, wherein the top half coil forming component further comprises a plurality of three-dimensional top interconnect boards, each of the interconnecting boards surrounding the inductor core from above and passing through the The internal interconnect wafer is connected to a particular adjacent bottom half coil forming element and thereby constitutes an inductive coil. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述電路襯底是一塊多層電路板MCL,該電路板進一步包含一個頂部導電線路層,其上有多個圖案化的半線圈導電線路,並以此作為底部半線圈形成元件。 The inductor power electronic device package of claim 1, wherein the circuit substrate is a multilayer circuit board MCL, the circuit board further comprising a top conductive circuit layer having a plurality of patterns thereon The half-coil conductive line is used as the bottom half-coil forming element. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述的封裝還包括一個底部導電線路層,其中的頂部導電線路層線路與底部導電線路層線路相連。 The inductive power electronic device package of claim 1, wherein the package further comprises a bottom conductive circuit layer, wherein the top conductive circuit layer line is connected to the bottom conductive circuit layer line. 如申請專利範圍第13項所述的電感功率電子器件封裝,其特徵在於,所述MCL板是一塊印刷電路板PCB。 The inductor power electronic device package of claim 13, wherein the MCL board is a printed circuit board PCB. 如申請專利範圍第13項所述的電感功率電子器件封裝,其特徵在於,所述MCL板是一塊雙馬來醯亞胺-三嗪樹脂BT襯底。 The inductor power electronic device package of claim 13, wherein the MCL board is a double maleimide-triazine resin BT substrate. 如申請專利範圍第1項所述的電感功率電子器件封裝,其特徵在於,所述的封裝還包括封裝物,用來將電感功率電子器件封裝的頂部封裝。 The inductive power electronic device package of claim 1, wherein the package further comprises a package for encapsulating the top of the inductive power electronics package. 一種製造電感功率電子器件封裝的方法,其特徵在於,包括:提供一個電路襯底,其上包括底部半線圈形成元件;將一個功率電感粘附在電路襯底之上,粘附該功率電感的過 程包括將一個具有封閉磁回路並且中央開有窗口的電感感芯粘附在底部半線圈形成元件之上;在電感感芯的內部窗口之內設置一個內部互連晶片,其具有一頂部平面和一底部平面,用以將該底部半線圈形成元件和位於內部窗口之內的該頂部半線圈形成元件互連;以及粘附頂部半線圈形成元件,所述頂部半線圈形成元件具有設置在該頂部平面上的內部觸點區域和設置在該底部平面上的外部觸點區域,在內部窗口之內通過該內部互連晶片將這些元件與底部半線圈形成元件相連,以此共同構成環繞在電感感芯周圍的電感線圈。 A method of fabricating an inductor power electronic device package, comprising: providing a circuit substrate including a bottom half coil forming component; attaching a power inductor to the circuit substrate and adhering the power inductor Over The method includes attaching an inductive core having a closed magnetic circuit and having a window in the center to the bottom half coil forming component; and providing an internal interconnect wafer having an upper plane and an inner window of the inductive core a bottom plane for interconnecting the bottom half coil forming element with the top half coil forming element located within the inner window; and adhering the top half coil forming element having the top half coil forming element disposed on the top An internal contact area on the plane and an external contact area disposed on the bottom plane, the elements are connected to the bottom half-coil forming element through the internal interconnect wafer within the internal window, thereby forming a surrounding inductance Inductor coil around the core. 如申請專利範圍第18項所述的製造電感功率電子器件封裝的方法,其特徵在於,所述粘附頂部半線圈形成元件還包括將每一頂部半線圈形成元件的一端通過該內部互連晶片與位於內部窗口的底部半線圈形成元件的一端相連,以及將該頂部半線圈形成元件的另一端與位於電感感芯之外相鄰底部半線圈形成元件的一端相連。 The method of manufacturing an inductor power electronic device package according to claim 18, wherein the adhering top half coil forming component further comprises passing one end of each top half coil forming component through the internal interconnect wafer Connected to one end of the bottom half coil forming element at the inner window and the other end of the top half coil forming element to an end of the adjacent bottom half coil forming element outside the inductive core. 如申請專利範圍第18項所述的製造電感功率電子器件封裝的方法,其特徵在於,還包括:將一塊功率積體電路IC粘附在電路襯底之上。 The method of manufacturing an inductor power electronic device package according to claim 18, further comprising: attaching a power integrated circuit IC to the circuit substrate. 如申請專利範圍第18項所述的製造電感功率電子器件封裝的方法,其特徵在於,還包括用封裝物將電感功率電子器件封裝的頂部進行封裝。 The method of fabricating an inductor power electronic device package of claim 18, further comprising packaging the top of the inductive power electronics package with the package.
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