TWI382161B - Infrared temperature measurement with high accuracy - Google Patents
Infrared temperature measurement with high accuracy Download PDFInfo
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- TWI382161B TWI382161B TW97151651A TW97151651A TWI382161B TW I382161 B TWI382161 B TW I382161B TW 97151651 A TW97151651 A TW 97151651A TW 97151651 A TW97151651 A TW 97151651A TW I382161 B TWI382161 B TW I382161B
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Description
本發明是有關於一種測溫方法，特別是指一種具高準確性之紅外線測溫方法。The invention relates to a temperature measuring method, in particular to an infrared temperature measuring method with high accuracy.
溫度的量測與控制是許多產業中控制產品品質的必要手段，現有溫度的量測方法依據量測儀器的不同大致可區分為接觸式與非接觸式兩大類，其中，接觸式的溫度量測儀器是利用熱傳導的原理進行溫度量測，而非接觸的溫度量測儀器是利用物體所散發出的放射線進行溫度的量測，由於非接觸式的溫度量測儀器具有可測量熾熱、危險、或難以到達之物體溫度的功效，近年已逐漸取代接觸式的溫度量測儀器。The measurement and control of temperature is a necessary means to control the quality of products in many industries. The measurement methods of existing temperature can be roughly divided into contact and non-contact according to the different measuring instruments. Among them, contact temperature measurement The instrument uses the principle of heat conduction for temperature measurement. The non-contact temperature measurement instrument uses the radiation emitted by the object to measure the temperature. Because the non-contact temperature measurement instrument has measurable heat, danger, or The effect of the temperature of an object that is difficult to reach has gradually replaced the contact temperature measuring instrument in recent years.
而現有較常見之接觸式的溫度量測儀器當屬紅外線測溫儀器，紅外線是一種看不見的光線，只要是絕對零度(攝氏零下273度)以上的物體，就都會輻射出這種看不見的紅外線，且物體越熱所發出的紅外能量也就越多，而紅外線測溫儀器就是接收輻射的紅外線並將紅外線能量轉化成電信號再顯示出相對的溫度。The existing more common contact temperature measuring instrument is an infrared temperature measuring instrument. Infrared is an invisible light. As long as it is an object with absolute zero (273 degrees Celsius) or more, it will radiate this invisible Infrared, and the hotter the object, the more infrared energy it emits. The infrared temperature measuring instrument is the infrared light that receives the radiation and converts the infrared energy into an electrical signal to show the relative temperature.
紅外線測溫儀器雖然具有非接觸式的溫度量測儀器可測量熾熱、危險、或難以到達之物體溫度的優點，但是，由於任何物體在絕對零度以上皆會輻射出紅外線，而且不同物體所輻射出之紅外線的放射率也都有所不同，造成紅外線測溫儀器所測得的溫度常為不同被測物體所輻射出之紅外線的放射率、被測物體所在量測環境之光線、氣氛、量測角度、溼度、粉塵...等因素所干擾，造成紅外線測溫儀器所測得的溫度與實際溫度的誤差甚大。Infrared temperature measuring instruments have the advantages of non-contact temperature measuring instruments that can measure the temperature of hot, dangerous, or hard-to-reach objects. However, since any object emits infrared rays above absolute zero, and different objects radiate The emissivity of the infrared rays is also different, and the temperature measured by the infrared temperature measuring instrument is often the emissivity of the infrared rays radiated by different objects to be measured, the light, the atmosphere, and the measurement of the measuring environment in which the object to be measured is measured. Interference caused by factors such as angle, humidity, dust, etc., causes the error between the temperature measured by the infrared temperature measuring instrument and the actual temperature to be very large.
不同被測物體所輻射出之紅外線的放射率雖可藉由參考文獻中不同材質的放射率值表所得知，再輸入該紅外線測溫儀器中，藉此修正紅外線測溫儀器所測得的溫度值，但是被測物體所在量測環境所產生的干擾卻無法有效加以克服，造成紅外線測溫儀器所測得的溫度值之準確度遲遲無法有效提升。The emissivity of the infrared rays radiated from different objects can be obtained by the emissivity table of different materials in the reference, and then input into the infrared thermometer to correct the temperature measured by the infrared thermometer. The value, but the interference caused by the measurement environment of the measured object can not be effectively overcome, and the accuracy of the temperature value measured by the infrared temperature measuring instrument cannot be effectively improved.
因此，本發明之目的，即在提供一種具高準確性之紅外線測溫方法。Accordingly, it is an object of the present invention to provide an infrared temperature measuring method with high accuracy.
於是，本發明具高準確性之紅外線測溫方法，包含一基礎量測步驟、一初始量測步驟、一調整步驟，及一量測執行步驟。Therefore, the infrared temperature measuring method with high accuracy of the present invention comprises a basic measuring step, an initial measuring step, an adjusting step, and a measuring performing step.
該基礎量測步驟是利用一接觸式測溫儀量測一待測物的溫度，並獲得一基礎溫度值；該初始量測步驟，利用一紅外線測溫儀量測該待測物的溫度，並獲得一量測溫度值；之後，進行該調整步驟，改變該紅外線測溫儀的放射率值使該量測溫度值等於該基礎溫度值，即獲得一等效放射率值；最後，遂行該量測執行步驟，以所獲得該等效放射率值為該紅外線測溫儀的放射率值，並用以執行該待測物的溫度量測作業。The basic measuring step is to measure the temperature of a test object by using a contact thermometer and obtain a base temperature value; the initial measuring step uses an infrared thermometer to measure the temperature of the object to be tested, And obtaining a measured temperature value; afterwards, performing the adjusting step, changing the emissivity value of the infrared thermometer to make the measured temperature value equal to the base temperature value, that is, obtaining an equivalent emissivity value; and finally, performing the The measuring execution step is performed to obtain the emissivity value of the infrared thermometer by using the equivalent emissivity value, and to perform a temperature measurement operation of the object to be tested.
本發明之功效在於利用接觸式測溫儀器所測得之基礎溫度值，作為調整該紅外線測溫儀之放射率值的依據，配合當量測溫度值等於該基礎溫度值時所獲得等效放射率值為紅外線測溫儀的放射率值，即可於量測的同時，有效屏除量測環境所產生的干擾，確實達成提升紅外線測溫儀的量測精確度。The effect of the invention is to use the basic temperature value measured by the contact type temperature measuring instrument as the basis for adjusting the emissivity value of the infrared thermometer, and the equivalent radiation obtained when the equivalent measured temperature value is equal to the basic temperature value. The rate value is the emissivity value of the infrared thermometer, which can effectively reduce the interference generated by the measurement environment while measuring, and indeed achieve the measurement accuracy of the infrared thermometer.
有關本發明之前述及其他技術內容、特點與功效，在以下配合參考圖式之一個較佳實施例的詳細說明中，將可清楚的呈現。The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments.
參閱圖1，本發明具高準確性之紅外線測溫方法包含一基礎量測步驟11、一初始量測步驟12、一調整步驟13，及一量測執行步驟14。Referring to FIG. 1, the infrared temperature measuring method with high accuracy of the present invention comprises a basic measuring step 11, an initial measuring step 12, an adjusting step 13, and a measuring performing step 14.
參閱圖1、2，該基礎量測步驟11是利用一接觸式測溫儀21量測一待測物100的溫度，並獲得一基礎溫度值；接著，進行該初始量測步驟12，利用一紅外線測溫儀22量測該待測物100的溫度，並獲得一量測溫度值；然後，進行該調整步驟13，改變該紅外線測溫儀22的放射率值使該量測溫度值等於該基礎溫度值，即獲得一等效放射率值；最後，遂行該量測執行步驟14，以所獲得該等效放射率值為該紅外線測溫儀22的放射率值，並用以執行該待測物100的溫度量測作業。Referring to FIG. 1 and FIG. 2, the basic measurement step 11 measures the temperature of a test object 100 by using a contact thermometer 21, and obtains a base temperature value. Then, the initial measurement step 12 is performed, and the first measurement step 12 is performed. The infrared thermometer 22 measures the temperature of the object to be tested and obtains a measured temperature value; then, the adjusting step 13 is performed to change the emissivity value of the infrared thermometer 22 such that the measured temperature value is equal to the The base temperature value, that is, an equivalent emissivity value is obtained; finally, the measurement is performed to perform step 14 to obtain the emissivity value of the infrared thermometer 22, and to perform the test. Temperature measurement of the object 100.
在此需要特別值得一提的是，當待測物100不同或是待測物100的所處環境改變時，操作人員僅需於量測現場重複上述之基礎量測步驟11、初始量測步驟12，及調整步驟13即可獲得不同待測物100及不同環境的等效放射率值，以利該紅外線測溫儀22面對不同待測物100及不同處環境時，仍可精確測得該待測物100的溫度。It is particularly worth mentioning that when the object to be tested 100 is different or the environment of the object to be tested 100 changes, the operator only needs to repeat the above-mentioned basic measurement step 11 and the initial measurement step at the measurement site. 12, and the adjustment step 13 can obtain the equivalent emissivity values of different objects to be tested 100 and different environments, so that the infrared thermometer 22 can accurately measure when facing different objects to be tested 100 and different environments. The temperature of the analyte 100.
本發明在實際使用上具有下列優點：The invention has the following advantages in practical use:
1.可量測之待測物100的種類較廣：利用接觸式測溫儀21器所測得之基礎溫度值，以調整該紅外線測溫儀22之放射率值，使該紅外線測溫儀22所測得之量測溫度值等於基礎溫度值，並獲得該等效放射率值，藉此免除翻查參考文獻中不同材質待測物100之放射率值的麻煩，更以可應用於未知放射率值之新材質或是多種覆合材質之待測物100的溫度量測。1. The measurable type of the object to be tested 100 is wider: the base temperature value measured by the contact type thermometer 21 is used to adjust the emissivity value of the infrared thermometer 22 to make the infrared thermometer 22 The measured temperature value is equal to the base temperature value, and the equivalent emissivity value is obtained, thereby eliminating the trouble of checking the emissivity value of the different material DST 100 in the reference, and more applicable to the unknown. The new material of the emissivity value or the temperature measurement of the test object 100 of a plurality of laminated materials.
2.準確性高：續上述，利用調整步驟13所得之等效放射率值為紅外線測溫儀22之放射率值，即可使該紅外線測溫儀22所測得之量測溫度值等於基礎溫度值，也就是說，以該等效放射率為該紅外線測溫儀22之放射率值，可使該紅外線測溫儀22所測得之溫度值與接觸式測溫儀21所測得的溫度值相同，克服以待測物100之放射率值為該紅外線測溫儀22之放射率值，量測待測物100之溫度時，因待測物100所處環境所產生之干擾(光線、氣氛、溼度、粉塵...等)而影響所測得的溫度值，有效提高該紅外線測溫儀22的準確性，特別是當待測物100所處環量測境複雜時，更可以有效屏除量測環境所產生的干擾，確實提升紅外線測溫儀22的量測精確度。2. High accuracy: Continuing the above, the equivalent emissivity value obtained by the adjusting step 13 is the emissivity value of the infrared thermometer 22, so that the measured temperature value measured by the infrared thermometer 22 is equal to the basic value. The temperature value, that is, the emissivity value of the infrared thermometer 22 at the equivalent emissivity, allows the temperature value measured by the infrared thermometer 22 to be measured by the contact thermometer 21. The temperature values are the same, and the emissivity value of the object to be tested 100 is overcome, and the emissivity value of the infrared thermometer 22 is measured. When the temperature of the object to be tested 100 is measured, the interference caused by the environment of the object to be tested 100 (light) The atmosphere, the atmosphere, the humidity, the dust, etc. affect the measured temperature value, and effectively improve the accuracy of the infrared thermometer 22, especially when the object to be tested 100 is complex in the environment. The effective screen removal of the interference generated by the measurement environment does improve the measurement accuracy of the infrared thermometer 22.
綜上所述，本發明具高準確性之紅外線測溫方法，利用接觸式測溫儀21所測得待測物100的基礎溫度值為基準，調整紅外線測溫儀22的放射率值，以使紅外線測溫儀22所測得的量測溫度值與基礎溫度值，即可獲得綜合有待測物100與待測物100所處環境之放射率的等效放射率值，以等效放射率值為紅外線測溫儀22的放射率值，可以有效避免待測物100所處環境所產生之干擾，提高紅外線測溫儀22的量測準確性；此外，亦可使紅外線測溫儀22應用於未知放射率值之新材質或是多種覆合材質之待測物100的溫度量測上，故確實能達成本發明之目的。In summary, the infrared temperature measuring method with high accuracy of the present invention adjusts the emissivity value of the infrared thermometer 22 by using the base temperature value of the object to be tested 100 measured by the contact thermometer 21 to By measuring the measured temperature value and the base temperature value measured by the infrared thermometer 22, an equivalent emissivity value of the emissivity of the environment in which the object to be tested 100 and the object to be tested 100 are integrated is obtained, and equivalent radiation is obtained. The rate value is the emissivity value of the infrared thermometer 22, which can effectively avoid the interference generated by the environment in which the object to be tested 100 is located, and improve the measurement accuracy of the infrared thermometer 22; in addition, the infrared thermometer 22 can also be made. It is true that the new material of the unknown emissivity value or the temperature measurement of the test object 100 of a plurality of laminated materials can be used for the purpose of the present invention.
惟以上所述者，僅為本發明之較佳實施例而已，當不能以此限定本發明實施之範圍，即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾，皆仍屬本發明專利涵蓋之範圍內。The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.
11．．．基礎量測步驟11. . . Basic measurement step
12．．．初始量測步驟12. . . Initial measurement step
13．．．調整步驟13. . . Adjustment steps
14．．．量測執行步驟14. . . Measurement execution step
21．．．接觸式測溫儀twenty one. . . Contact thermometer
22．．．紅外線測溫儀twenty two. . . Infrared thermometer
100．．．待測物100. . . Analyte
圖1是一流程圖，說明本發明具高準確性之紅外線測溫方法之較佳時實施例；及1 is a flow chart showing a preferred embodiment of the infrared temperature measuring method with high accuracy of the present invention; and
圖2是一示意圖，輔助說明圖1。Figure 2 is a schematic view of the assistance of Figure 1.
13．．．調整步驟13. . . Adjustment steps
14．．．量測執行步驟14. . . Measurement execution step
11．．．基礎量測步驟11. . . Basic measurement step
12．．．初始量測步驟12. . . Initial measurement step
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW528860B (en) * | 2001-03-06 | 2003-04-21 | Tokyo Electron Ltd | Temperature measuring method and apparatus and semiconductor heat treatment apparatus |
| TW531804B (en) * | 2000-10-24 | 2003-05-11 | Tokyo Electron Ltd | Temperature measurement method, thermal processing apparatus and its method, computer program and radiation thermometer |
| CN1209606C (en) * | 1996-12-19 | 2005-07-06 | 代门动力国际股份有限公司 | Furnace gas pyrometer |
| TWI282848B (en) * | 2006-05-05 | 2007-06-21 | Tsung-Yu Huang | Infrared ray emission rate detector |
| CN100353152C (en) * | 2003-07-04 | 2007-12-05 | 北方工业大学 | Method for monitoring temperature of rotary kiln barrel through infrared scanning |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1209606C (en) * | 1996-12-19 | 2005-07-06 | 代门动力国际股份有限公司 | Furnace gas pyrometer |
| TW531804B (en) * | 2000-10-24 | 2003-05-11 | Tokyo Electron Ltd | Temperature measurement method, thermal processing apparatus and its method, computer program and radiation thermometer |
| TW528860B (en) * | 2001-03-06 | 2003-04-21 | Tokyo Electron Ltd | Temperature measuring method and apparatus and semiconductor heat treatment apparatus |
| CN100353152C (en) * | 2003-07-04 | 2007-12-05 | 北方工业大学 | Method for monitoring temperature of rotary kiln barrel through infrared scanning |
| TWI282848B (en) * | 2006-05-05 | 2007-06-21 | Tsung-Yu Huang | Infrared ray emission rate detector |
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