1380346 *正本 九、發明說明： 【發明所屬之技術領域】 本發明係關於用以烘烤例如液晶顯示器、電漿顯示器 等所使用的玻璃板那樣的基板之烘烤裝置。 【先前技術】 此種烘烤裝置可知有稱爲滾軸式連續烘烤裝置者，其 係具備烘烤爐以及在烘烤爐的爐內長度方向連續地排列的 複數個陶瓷製成的滾軸；基板隔著鑲嵌玻璃（setter glass) 而載放於搬運滾軸上，在這狀態下執行基板的熱處理（例如 ，參照專利文獻1 )。 該以往的烘烤裝置有以下的問題點。第1是必須使用 熱容量大的鑲嵌玻璃，故其鑲嵌玻璃的溫昇是消耗很多的 電力。第2是裝置的橫向尺寸係受鑲嵌玻璃玻璃之橫向尺 寸所限制，因此，在使裝置的橫向尺寸縮小上有其限度。 第3是零件成本因爲必須使用高價的陶瓷滾軸，而難以裝 置成本的降低。 [專利文獻1 :日本專利特開2〇〇3 -26247號] 【發明內容】 (發明要解決的課題） 本發明的目的是爲解決上述全部的問題點，而在提供 一種可降低消耗電力、可縮小裝置的橫向尺寸、進而削減 裝置成本的烘烤裝置。 (課題的解決手法） 本發明之烘烤裝置，其備具有：烘烤爐；於烘烤爐內 -5- 1380346 修正本 的兩側面各自具有的加熱器；具有沿爐長方向延伸相互間 隔的2個搬運路徑、且在各搬運路徑上將基板與搬運方向 呈平行豎立狀態予以搬運的搬運裝置；及延伸於兩搬運路 徑之間的進氣管與排氣管。 經由本發明的供烤裝置，由於不必使用鑲嵌玻璃，故 可將消耗電力降低。進一步的，基板是在豎立的狀態下被 搬運著，故可縮小裝置的橫向尺寸。進一步的，因不需要 使用到陶瓷製品的滾軸，裝置的成本可降低。此外，搬運 中的基板係由外側的加熱器來加熱，而可由其內側的進氣 管及排氣管來排塵、換氣。又基板如果像電漿顯示器用之 面板會有黏合劑（binder)等附著，則黏合劑會隨著氣化的氣 體而被排出。進一步的，進氣管及排氣管的兩側，有2個 基板搬運路徑被形成，可使排塵、換氣的效果良好外，基 板也可以2列、可在搬運效果良好情形下被搬運。 進一步的，進氣管是由進氣主管和從進氣主管所分歧 出來的複數的進氣支管所形成的，而進氣支管的管長方向 形成有複數的進氣口；排氣管是由排氣主管和從排氣主管 分歧出來的排氣支管所形成的，而排氣支管的管長方向形 成有複數的排氣口。進氣與排氣，可由複數個場所來進行 〇 又，進氣主管和排氣主管是在基板搬運路方向以指定 的距離在上下的方向延伸著，進氣支管及排氣支管是上下 鄰接著在搬運方向或其反方向延伸著，進氣支管及排氣支 管是緊密的配置排列著。 -6- 1380346 fe本 又，在烘烤爐內的兩個側面設置了向內方凸出格子的 熱障；加熱器係被配置於各熱障所在，相當於格子面的部 分之處，各個加熱器都是可溫控的發熱體，因此爐內各部 分的溫度可控制性能高，在爐內各部分可被加熱到所期待 的溫度。 又，該搬運裝置，其具備有：支撐基板下緣部分的搬 運體；及導引基板上緣部分移動的導桿，因基板的不受自 重作用故可予以搬運。 又，該搬運裝置，其具備有：將基板上緣部分吊起的 吊具：安裝吊具的搬運鏈條：及導引基板下緣部分移動的 導桿。可如此簡單構成搬運裝置。 又，該搬運裝置，其具備有：搬運鏈條；在搬運鏈條 的上方將基板上緣部分吊起的吊具；及介於搬運鏈條與吊 具之間的支撐體。由於不要導引基板下緣部分的導桿，故 可如此簡單構成搬運裝置。 (發明的效果） 經由本發明可以提供一種烘烤裝置，其可達成降低消 耗電力、縮小裝置的橫向尺寸、進而削減裝置成本之目的 【實施方式】 本發明的實施形態’參照圖式加以說明。 於以下的說明，所謂前後方者，基板搬運進入的這邊 (第1圖的右方）爲前方’該反方面爲後方；而所謂左右方 者，係從後方來看，在其左者爲左方，在其右者爲右方。 1380346 _正本 第1圖係表示烘烤爐11的全體構造。從烘烤爐11的 入口 11A到出口 11B，爐內劃分爲4個區段。4個區段分 別爲預熱（burn out)區段、烘烤區段、降溫區段及冷卻區段 。這4個區段的溫度之溫度剖析圖一倂在第1圖中所示。 以下是預熱（burn out)區段構成的詳細說明 參照第2圖及第3圖，烘烤爐其具備有：烘烤爐11; 在烘烤爐11之內加熱用的加熱器12;及在烘烤爐11內用 來將基板P呈豎立狀態沿搬運方向作平行搬運的搬運裝置 13° 烘烤爐11’其係一種橫斷面呈長方形狀而向前後方向 延伸的水平角筒狀物體，係由頂壁21、底壁22及左右壁 23、24所形成的。爐壁21〜24，則係由陶瓷纖維一體成型 隔熱材所構成的。又’於爐壁21〜24內面有必要的地方， 實行特殊被覆（coating)以抑制發塵。 在烘烤爐11內’前後方向連續形成有多數區域（zone) Zn『n爲整數’圖中有Z2、Z3、Z4』。進一步的，在各區 域Zn內上下方向並列著形成多數區段，這裡劃分爲3個區 段爲 D !、D 2、D 3。 在烘烤爐內的左右兩側面’各自設置了向內方凸出 格子狀的熱障2 5。熱障2 5，其係使用形成烘烤爐丨丨的爐 壁21〜24的隔熱材相同的材料。熱障25的所在格子之縱 線，緊鄰著2個區域Zn而延伸著，而其橫線，則在各區域 Zn內緊鄰的區段Dn『n爲整數Dl、d2、D3』的邊界而延 伸。 1380346 修正本 加熱器12，其係被配置於各熱障所在，相當於格子面 之處，係由多數的發熱體26所構成。各發熱體26的形成 是以蛇形狀的阻抗之金屬線且整體的埋設在對應的側壁33 、3 4內面》 在各區域Zn內，具備進氣管31及排氣管32。 進氣管31，其由垂直的進氣主管41、和沿進氣主管 41的長方向3處所分歧出來的3個水平進氣支管42所構 成。進氣主管41爲在各區域Zn前端部分於左右方向中央 部的頂壁21貫通上下延伸著。各進氣支管42係具有橫剖 面呈倒三角形狀的周圍壁面且朝後延伸於對應的D2、 〇3區劃的上端附近之範圍。在周圍壁面的V字狀底部的長 度方向的複數處所，形成有朝下之2個成一對的複數對進 氣口 43。成對的2個進氣口 43係具有相對於垂直線互朝 反向的45度角。 排氣管32，其由垂直狀排氣主管44、和沿排氣主管 44的長方向4處所分歧出來的4個水平排氣支管45所構 成。排氣主管44爲在各區域Zn的後端部分於左右方向中 央部的頂壁2 1貫通上下延伸著。各排氣支管45，具有橫 向剖面正方形狀的周圍壁面，且向前延伸。4個排氣支管 45之中，位於最上方的排氣支管45與頂壁21下面接觸 ’由上算來第2和第3排氣支管45係與對應的進氣支管 42的上面接觸，而位於最下方的排氣支管45則與底壁22 的上面接觸。再者，4個排氣支管45之中，位於最上方 的排氣支管45周圍壁面的平坦狀的底部，形成有朝下之 兩兩成對的' 複數對排氣口 46，此外的第2〜4個的排 -9- 1380346 修正本 氣支管45周圍壁面平坦狀的頂部，則形成有兩兩成對、複 數對向上的排氣口 46。每2個成對的排氣口 46’以垂直線 互相保持反向45角度。 搬運裝置13，其具備有：在烘烤爐11內底部附近配 置著的前後方向延伸的一組的搬運滾軸組5 1 ;和在烘烤爐 11內頂部附近配置的前後方向延伸左右一對的導引滾軸組 52 ° 搬運滾軸組51，其係由複數的水平搬運滾軸5 3所構 成，而該等滾軸53係在前後方向以一定間隔排成一列且向 左右延伸者。各搬運滾軸53的兩端部分，位於最下面發熱 體26的下方，橫跨最下面排氣支管45之上方，且貫通兩 側壁2 3、2 4而由側邊凸出。在搬運滾軸5 3外面，而在燒 成爐11內的某一部分，形成有左右一對的環狀基板承受溝 54。兩個基板承受溝54將進氣管31和排氣管32挾住，且 位於彼等之兩側。 左右的導引滾軸組52，具有相同構造，且以與兩基板 承受溝5 4的間隔相同的間隔並列著。各導引滾軸組5 2， 其係由複數的垂直導引滾軸55所構成，而該等導引滾軸 5 5係前後及左右方向以一定間隔2列並排著的。左右的導 引滾軸5 5，以彼此的間隔僅比基板P的厚度大一點點，而 被安裝於垂直滾軸56。滚軸56，則係貫通頂壁21。 2個基板P的下緣部分進入基板承受溝54，其上緣部 分則由左右導引滾軸55挾住，如此2個基板P同時在烘烤爐 11內向前被搬運。這時候，經由未圖示出來的驅動裝置則 -10* 1380346 修正本 全部的搬運滾軸53會被驅動而依第2圖中的順時鐘方向等 速度回轉。基板P如果是電漿顯示器用的面板’塗在其表 面的黏合劑（binder)會因基板P被搬運到預熱區段時內側 表面的黏合劑會氣化；經由進氣管31及排氣管32，該等 氣化物會效率良好的被引導到爐外。 其次，關於搬運裝置13的種種變形將加以說明。以下 的說明，關於對應的部分，爲方便起見將附上相同的符號 〇 第4圖係表示，將1個基板P的下緣部分予以支撐的 搬運滾軸61，和將同基板P的上緣予以導引的導引滾軸62 。在搬運滾軸61的外面，形成有1個的環狀基板承受溝 63。在導引滾軸62的外面，形成有1個的環狀基板承受溝 64 ° 第5圖係表示，同時搬運2個基板P之例舉。與第4 圖所表示的搬運滾軸61同樣的搬運滾軸61，在其外面形 成有2個基板承受溝63。同樣的，在導引滾軸62的外面 形成有2個的環狀基板承受溝64。 第6圖係表示，基板P的下緣部分由一搬運體71來承 受。搬運體71係爲陶瓷輸送鏈條，或是網狀帶輸送帶（Mesh belt conveyor)的帶子。於搬運體71上安裝著門形棒狀掛 具72的下端部。在掛具72的頂部，形成有向上的基板支 撐槽73’可讓基板P的下緣部進入槽中。基板p的上緣部 ，被左右一對的導引滾軸74挾住。 第7圖係爲和第6圖所示的掛具72同樣的掛具72， -11- 1380346 •正本 在其左右形成有一對的基板支撐槽73。而2個基板P的上 緣部分，被左右二對的導引滾軸74各自挾住。 第8圖係表示配置在烘烤爐11的頂部之移動搬運體 71的構成，在搬運體71裝有吊具81，而由吊具81來吊持 基板P的上緣部。而基板P的下緣部被左右一對的導引滾 軸74挾住。第9圖則係以第8圖爲基本構造的兩組搬運構 造物。在搬運體71裝有2個吊具81。2個基板P的下緣部 分被左右二對的導引滾軸74各自挾住。 參照第10圖及第11圖，在搬運體71安裝有基板支撐 體9 1。基板支撐體9 1，其係由：前後一對的橫斷面3字形 狀的垂直縱材92;橫斷面3字形狀水平橫材93;及吊具 81所構成。其中：前後一對橫斷面3字形狀的垂直縱材92 ，彼此的間隔比豎立狀態的基板P之前後方向的長度還大， 而由搬運體71以開口彼此相向豎立，且彼等之高度比同基 板P的上下方向的長度還高者；又橫斷面；3字形狀水平橫 材93，其係開口向下且將兩縱材92的上端彼此連結者； 又吊具81，其係由橫材93吊下且將基板p的上緣部吊起 者。 第12圖係爲第10圖及第11圖所示基板支撐體91同 時可搬運2個基板P而構成者。在基板支撐體91的橫材 93處，左右並列安裝有2個吊具81。 【圖式簡單說明】 第1圖係說明根據本發明的烘烤裝置之烘烤爐的說明 圖。 第2圖係根據本發明的烘烤裝置之預熱區段的垂直縱 -12- 1380346 修正本 剖面圖。 第3圖係爲同烘烤裝置的橫剖面圖。 第4圖係表示同烘烤裝置的搬運裝置的變形說明圖。 第5圖係表示同搬運裝置之其他的變形說明圖。 第6圖係表示同搬運裝置之其他變形的說明圖^ 第7圖係表示同搬運裝置其他變形的說明圖。 第8圖係表示同搬運裝置其他變形的說明圖。 第9圖係表示同搬運裝置其他變形的說明圖。 第10圖係表示同搬運裝置其他變形的說明圖。 第1 1圖係爲第1 0圖的側視圖。 第12圖係表示同搬運裝置其他變形的說明圖。 【主要元件符號說明】 11 烘烤爐 12 加熱器 13 搬運裝置 25 熱障 26 發熱體 3 1 進氣管 32 排氣管 5 1 搬運滾軸組 52 導引滾軸組 P 基板 Ζ η 區域 Dn 區段 -13-1380346 * Original Note: [Technical Field of the Invention] The present invention relates to a baking apparatus for baking a substrate such as a glass plate used for a liquid crystal display, a plasma display or the like. [Prior Art] This type of baking apparatus is known as a roller type continuous baking apparatus, and is provided with a baking furnace and a plurality of ceramic rollers continuously arranged in the longitudinal direction of the baking furnace. The substrate is placed on the transport roller via a setter glass, and heat treatment of the substrate is performed in this state (for example, see Patent Document 1). This conventional baking apparatus has the following problems. The first is that it is necessary to use a mosaic glass with a large heat capacity, so the temperature rise of the mosaic glass consumes a lot of power. The second is that the lateral dimension of the device is limited by the lateral dimensions of the inlaid glass, and therefore there is a limit to reducing the lateral dimension of the device. The third is the cost of parts because it is necessary to use expensive ceramic rollers, which makes it difficult to reduce the cost of the device. [Problem to be Solved by the Invention] [Problem to be Solved by the Invention] An object of the present invention is to provide a method for solving the above problems, and to provide a power consumption reduction, A baking device that can reduce the lateral size of the device and further reduce the cost of the device. (Resolving method of the subject) The baking apparatus of the present invention comprises: a baking furnace; a heater in each of the two sides of the correction in the baking oven - 5 - 1380346; having a spacing extending along the length of the furnace Two transport paths, a transport device that transports the substrate in parallel with the transport direction on each transport path; and an intake pipe and an exhaust pipe that extend between the two transport paths. According to the grilling device of the present invention, since it is not necessary to use the inlaid glass, the power consumption can be reduced. Further, since the substrate is carried in an upright state, the lateral dimension of the device can be reduced. Further, since the roller for the ceramic product is not required to be used, the cost of the device can be reduced. Further, the substrate being conveyed is heated by the heater outside, and the intake pipe and the exhaust pipe on the inner side can be exhausted and ventilated. Further, if the substrate is attached to a panel for a plasma display, such as a binder, the adhesive is discharged along with the vaporized gas. Further, two substrate conveyance paths are formed on both sides of the intake pipe and the exhaust pipe, and the effect of dust removal and ventilation can be improved, and the substrate can be transported in two rows and can be carried in a good conveyance effect. . Further, the intake pipe is formed by the intake main pipe and a plurality of intake manifold branches diverging from the intake main pipe, and the intake branch pipe has a plurality of intake ports formed in the longitudinal direction; the exhaust pipe is arranged by the exhaust pipe The gas main pipe and the exhaust pipe branch which are branched from the exhaust main pipe are formed, and the exhaust pipe has a plurality of exhaust ports formed in the pipe length direction. The intake and exhaust may be carried out by a plurality of places. The intake main pipe and the exhaust main pipe extend in the upper and lower directions at a predetermined distance in the direction of the substrate conveyance path, and the intake branch pipe and the exhaust branch pipe are vertically adjacent to each other. Extending in the direction of transport or in the opposite direction, the intake manifold and the exhaust manifold are arranged in a tight arrangement. -6- 1380346 feben, in the two sides of the baking furnace is provided with a thermal barrier protruding inward from the lattice; the heater is arranged in each thermal barrier, corresponding to the part of the lattice surface, each The heaters are temperature-controlled heating elements, so the temperature of each part of the furnace can be controlled to a high degree, and the various parts in the furnace can be heated to the desired temperature. Further, the transporting apparatus includes: a transporting body that supports a lower edge portion of the substrate; and a guide bar that moves the upper edge portion of the guiding substrate, and the substrate can be transported without being subjected to a self-weight. Further, the transporting apparatus includes a spreader for lifting the upper edge portion of the substrate: a transport chain for attaching the spreader: and a guide bar for moving the lower edge portion of the guide substrate. The handling device can be constructed in such a simple manner. Further, the transporting apparatus includes: a transport chain; a spreader that lifts the upper edge portion of the substrate above the transport chain; and a support body interposed between the transport chain and the hanger. Since the guide bar of the lower edge portion of the substrate is not guided, the handling device can be configured as simply. (Effect of the Invention) According to the present invention, it is possible to provide a baking apparatus which can reduce the power consumption, reduce the lateral size of the apparatus, and further reduce the cost of the apparatus. [Embodiment] An embodiment of the present invention will be described with reference to the drawings. In the following description, the front and rear sides, the side where the substrate conveys (the right side of the first figure) is the front side, and the opposite side is the rear side; the so-called left and right sides are seen from the rear, and the left side is On the left, on the right is the right. 1380346 _ Original FIG. 1 shows the overall structure of the baking oven 11. From the inlet 11A to the outlet 11B of the baking oven 11, the furnace is divided into four sections. The four sections are a burn out section, a toasting section, a cooling section, and a cooling section. The temperature profile of the temperature of these four sections is shown in Figure 1. The following is a detailed description of the structure of the burn-out section. Referring to FIGS. 2 and 3, the baking furnace is provided with a baking oven 11 and a heater 12 for heating in the baking oven 11; A conveying device 13 for holding the substrate P in an upright state in parallel in the conveying direction in the baking furnace 11 is a horizontal angle cylindrical body extending in a rectangular shape in the front and rear directions. It is formed by the top wall 21, the bottom wall 22, and the left and right walls 23, 24. The furnace walls 21 to 24 are composed of ceramic fibers integrally molded with a heat insulating material. Further, special coating is applied to the inner surfaces of the furnace walls 21 to 24 to suppress dust generation. In the baking furnace 11, a plurality of zones are continuously formed in the front-rear direction. Zn "n is an integer", and Z2, Z3, and Z4 are shown in the figure. Further, a plurality of sections are formed in parallel in the vertical direction in the respective areas Zn, and are divided into three sections of D!, D2, and D3. A thermal barrier 25 projecting in a lattice shape inwardly is provided in each of the left and right side faces ' in the baking oven. The thermal barrier 25 is made of the same material as the heat insulating material forming the furnace walls 21 to 24 of the baking furnace. The vertical line of the grid of the thermal barrier 25 extends adjacent to the two areas Zn, and the horizontal line thereof extends in the vicinity of the section Dn "n is the integer D1, d2, D3" in each area Zn. . 1380346 Correction The heater 12 is disposed in each of the thermal barriers, and corresponds to a lattice surface, and is composed of a plurality of heating elements 26. Each of the heating elements 26 is formed by a metal wire of a snake-shaped impedance and is entirely embedded in the inner faces of the corresponding side walls 33 and 34, and is provided in each of the regions Zn, and includes an intake pipe 31 and an exhaust pipe 32. The intake pipe 31 is constituted by a vertical intake main pipe 41 and three horizontal intake manifolds 42 which are branched along the longitudinal direction 3 of the intake main pipe 41. The intake main pipe 41 extends vertically upward through the top wall 21 at the center portion of the Zn front end portion in the left-right direction. Each of the intake branch pipes 42 has a peripheral wall surface having an inverted triangular shape in a transverse cross section and extending rearward in the vicinity of the upper end of the corresponding D2 and 〇3 divisions. In the plural position in the longitudinal direction of the V-shaped bottom portion of the surrounding wall surface, a pair of plural pairs of inlet ports 43 which are formed downward are formed. The pair of two air inlets 43 have an angle of 45 degrees which are opposite to each other with respect to the vertical line. The exhaust pipe 32 is constituted by a vertical exhaust main pipe 44 and four horizontal exhaust branch pipes 45 which are branched along the longitudinal direction 4 of the exhaust main pipe 44. The exhaust main pipe 44 extends up and down through the top wall 21 of the center portion of the left and right direction at the rear end portion of each region Zn. Each of the exhaust branch pipes 45 has a peripheral wall surface having a lateral cross-sectional shape and extends forward. Among the four exhaust branch pipes 45, the uppermost exhaust branch pipe 45 is in contact with the lower surface of the top wall 21. From the above, the second and third exhaust branch pipes 45 are in contact with the upper surface of the corresponding intake branch pipe 42, and The exhaust branch pipe 45 located at the lowermost portion is in contact with the upper surface of the bottom wall 22. Further, among the four exhaust branch pipes 45, the flat bottom portion of the wall surface around the uppermost exhaust branch pipe 45 is formed with two pairs of 'plural pairs of exhaust ports 46 facing downward, and the second portion ～4 rows -9- 1380346 Correcting the top of the wall around the gas branch pipe 45, there are two pairs of pairs, a plurality of pairs of upward exhaust ports 46. Each of the two pairs of exhaust ports 46' maintains a reverse 45 angle with respect to each other in a vertical line. The conveying device 13 is provided with a set of transport roller groups 5 1 extending in the front-rear direction disposed near the bottom of the baking oven 11 and a pair of left and right extending in the front-rear direction disposed near the top of the baking oven 11 Guide Roller Group 52° The transport roller set 51 is composed of a plurality of horizontal transport rollers 53 which are arranged in a row at a predetermined interval in the front-rear direction and extend to the left and right. Both end portions of the respective transport rollers 53 are located below the lowermost heat generating body 26, straddle the lowermost exhaust branch pipe 45, and protrude from the side edges through the two side walls 23, 24. On the outside of the transport roller 5 3, a pair of right and left annular substrate receiving grooves 54 are formed in a part of the firing furnace 11. The two substrate receiving grooves 54 hold the intake pipe 31 and the exhaust pipe 32 on both sides. The left and right guide roller groups 52 have the same structure and are juxtaposed at the same interval as the interval between the two substrate receiving grooves 54. Each of the guide roller sets 52 is composed of a plurality of vertical guide rollers 55 which are arranged side by side at a predetermined interval in the front, rear and left and right directions. The left and right guide rollers 5 5 are attached to the vertical roller 56 at a distance from each other only a little larger than the thickness of the substrate P. The roller 56 passes through the top wall 21. The lower edge portion of the two substrates P enters the substrate receiving groove 54, and the upper edge portion thereof is caught by the left and right guide rollers 55, so that the two substrates P are simultaneously carried forward in the baking furnace 11. At this time, all of the transport rollers 53 are driven by a drive device (not shown) -10* 1380346, and are rotated at the same speed as in the clockwise direction in Fig. 2 . If the substrate P is a panel for a plasma display, a binder coated on the surface thereof will be vaporized by the adhesive on the inner surface when the substrate P is transported to the preheating section; via the intake pipe 31 and the exhaust gas Tube 32, the vapors are efficiently directed out of the furnace. Next, various modifications of the conveying device 13 will be described. In the following description, the corresponding portions will be denoted by the same reference numerals for convenience. FIG. 4 shows a transport roller 61 that supports the lower edge portion of one substrate P, and the upper substrate P. Guide roller 62 guided by the edge. One annular substrate receiving groove 63 is formed on the outer surface of the transport roller 61. On the outer surface of the guide roller 62, one annular substrate receiving groove is formed. Fig. 5 is a view showing the two substrates P being conveyed at the same time. The transport roller 61 similar to the transport roller 61 shown in Fig. 4 has two substrate receiving grooves 63 formed on the outer surface thereof. Similarly, two annular substrate receiving grooves 64 are formed on the outer surface of the guide roller 62. Fig. 6 shows that the lower edge portion of the substrate P is received by a carrier 71. The carrier 71 is a ceramic conveyor chain or a belt of a mesh belt conveyor. The lower end portion of the portal-shaped rod-shaped hanger 72 is attached to the carrier 71. At the top of the hanger 72, an upward substrate support groove 73' is formed to allow the lower edge portion of the substrate P to enter the groove. The upper edge portion of the substrate p is caught by a pair of left and right guide rollers 74. Fig. 7 is a hanger 72 similar to the hanger 72 shown in Fig. 6, -11 - 1380346. • A pair of substrate support grooves 73 are formed on the left and right sides. On the other hand, the upper edge portions of the two substrates P are held by the pair of left and right guide rollers 74. Fig. 8 shows a configuration of the transport carrier 71 disposed at the top of the baking oven 11, and the spreader 81 is attached to the transport body 71, and the upper edge portion of the substrate P is suspended by the spreader 81. On the other hand, the lower edge portion of the substrate P is caught by the pair of left and right guide rollers 74. Figure 9 is a set of two transport structures with the basic structure shown in Figure 8. Two carriers 81 are attached to the carrier 71. The lower edge portions of the two substrates P are respectively held by the pair of left and right guide rollers 74. Referring to Figs. 10 and 11, a substrate support body 9 1 is attached to the carrier 71. The substrate support body 9 1 is composed of a pair of front and rear vertical vertical members 92 having a three-dimensional cross section, a horizontal cross member 93 having a horizontal cross section, and a spreader 81. Wherein: a pair of front and rear vertical longitudinal members 92 having a cross-sectional shape of 3 are larger than the length of the substrate P in the upright state in the front and rear directions, and the carriers 71 are erected toward each other with the openings, and their heights a length higher than the length of the substrate P in the up-and-down direction; a cross-section; a 3-shaped horizontal horizontal material 93 which is open downward and connects the upper ends of the two longitudinal members 92; and a spreader 81 The upper edge portion of the substrate p is suspended by the horizontal member 93. Fig. 12 is a view in which the substrate support body 91 shown in Fig. 10 and Fig. 11 can simultaneously carry two substrates P. At the horizontal member 93 of the substrate support 91, two spreaders 81 are mounted side by side. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an explanatory view showing a baking oven of a baking apparatus according to the present invention. Fig. 2 is a cross-sectional view showing the vertical longitudinal direction of the preheating section of the baking apparatus according to the present invention -12 - 1380346. Figure 3 is a cross-sectional view of the same baking apparatus. Fig. 4 is a view showing a modification of the conveying device of the same baking device. Fig. 5 is a view showing another modification of the same conveying device. Fig. 6 is an explanatory view showing another modification of the conveying device. Fig. 7 is an explanatory view showing another modification of the conveying device. Fig. 8 is an explanatory view showing other deformations of the conveying device. Fig. 9 is an explanatory view showing other deformations of the conveying device. Fig. 10 is an explanatory view showing other deformations of the conveying device. Figure 1 is a side view of Figure 10. Fig. 12 is an explanatory view showing other deformations of the conveying device. [Main component symbol description] 11 Baking furnace 12 Heater 13 Carrier 25 Thermal barrier 26 Heating element 3 1 Intake pipe 32 Exhaust pipe 5 1 Transport roller group 52 Guide roller group P Substrate η η Area Dn area Paragraph-13-