TWI378117B - Composite abrasive/polishing pad and method for manufacturing the same - Google Patents

Description

1378117 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a polishing abrasive crucible, and more particularly to a composite polishing abrasive nonwoven fabric. [Prior Art]

When processing various crafts and high-tech products, polishing and grinding techniques are often used to produce a smooth surface. The above-mentioned handicrafts such as metal, glass, gemstone, stone, wood or handicraft; the above-mentioned high-tech products such as hard disks, wafers or glass panels. In particular, high-tech products have very high requirements for the fineness and stability of polishing. There are two main ways to perform polishing and/or mirror processing. The first one is to use a slurry with abrasive particles to grind with a ground fiber; the second is to use grinding with a ground. particle

The polishing pad is used for grinding', wherein the impregnation is used so that the polishing pad can carry the abrasive particles. Prior art abrasive base fabrics and/or abrasive rafts typically undergo a surface cut process to form a trench to accommodate debris generated during the polishing process. Regardless of the method used for the grinding, the water absorption, cushioning elasticity, compressibility, and wear resistance of the polishing base fabric and/or the polishing pad are very important, and the surface precision of the grinding is more critical to the quality of the product. SUMMARY OF THE INVENTION Accordingly, one aspect of the present invention is to provide a method of manufacturing a composite polishing non-woven fabric for providing excellent polishing quality. The above method 1378117 comprises forming an abrasion resistant composite masterbatch comprising a plurality of abrasion resistant particles and a first thermoplastic polymer; forming the abrasion resistant composite masterbatch into a polishing layer; forming an elastic buffer a layer comprising a second thermoplastic polymer; and a bonding polishing layer and an elastic buffer layer. Another aspect of the present invention is to provide a composite polishing abrasive nonwoven fabric comprising a polishing abrasive layer and an elastic buffer layer. The polishing layer comprises a first thermoplastic polymer and a plurality of abrasive particles; the elastic buffer layer comprises a second thermoplastic south molecule & is located below the drag polishing layer. [Embodiment] The embodiment clarifies a composite polishing polishing pad and a method of manufacturing the same according to an embodiment of the present invention. In addition, various properties of the above composite polishing pad, including its abrasion resistance, compressibility, and polishing quality, are clarified in various experimental examples. One aspect of the present invention provides a method of making a composite polishing non-woven fabric. The above comprises forming a wear-resistant composite masterbatch comprising a plurality of wear-resistant particles and a first thermoplastic polymer; forming the wear-resistant composite masterbatch into a polishing layer; forming an elastic buffer layer, It comprises a first thermoplastic face molecule; and a bonded polishing layer and an elastic buffer layer. The above-mentioned abrasion resistant particles have a particle size of from about 2 〇 ηηι to about 1 〇〇〇 nm ′ in the preferred embodiment from about 1 〇〇 nm to about 300 nm. The above abrasion resistant particles may be α-type alumina (α_Α12〇3), γ-type alumina (γ_Αΐ2〇3), Oxidation Dream (Si〇2), Cerium oxide (Ce〇2), Tantalum carbide (SiC), oxidation.鍅 (Zr〇2), single 曰a diamond or polycrystalline diamond. The above abrasion resistant particles account for from about 0% by weight to about 7% by weight of the above abrasion resistant composite masterbatch. ¢: S > 7 1378117 The first thermoplastic polymer may be a polyamide such as nylon (PA6); or a polyester such as polyethylene terephthalate (PET). ). The second thermoplastic ruthenium molecule may be a thermoplastic polyurethane (TPU). The polishing abrasive layer has a thickness of from about 0.1 mm to about 2.0 mm, and the elastic buffer layer has a thickness of from about 1. mm to about 5.0 mm. Point or face bonding or dissolution can be utilized to bond the polishing layer to the elastic buffer layer. When bonding in a dazzling manner, a suitable pressure is about 0.5 to 5 kg/cm2, and an appropriate temperature is about 100 to 16 inches. (0. When bonding by bonding method, various appropriate adhesives or adhesive means, such as double-sided tape (for example, 3M-467 or 3M-442 manufactured by 3M Company) can be utilized. Fig. 1 illustrates a specific embodiment according to the present invention. A cross-sectional view of the composite buffing non-woven fabric 100 of the embodiment. The composite buffing non-woven fabric has a polishing abrasive layer 104 and an elastic buffer layer 1〇6. The above-mentioned buffing layer ι4 includes 3 first thermoplastic polymer (not shown) And the plurality of abrasive particles 102 « the elastic buffer layer 1 〇 6 includes a second thermoplastic polymer (not shown) and is located below the polishing layer. According to an embodiment of the invention, the composite polishing The manufacturing method of the non-woven fabric 1 is as follows. The α-type alumina particles 1〇2 and the Nylon powder are mixed to obtain a mixed powder. Thereafter, the mixed powder is kneaded to obtain an abrasion-resistant composite mother. Then, the above abrasion-resistant composite master batch is formed into a polishing layer 104 by a melt blown, and has a thickness of about 〇5 nm to about a large particle diameter of the α-type alumina particle 1〇2.From about 100 nm to about 300 nm, and the α-type aluminum oxide particles by weight 81378117 1〇2 accounting wear composite masterbatch percentages shown in Table 1 below Table Shu

On the other hand, the TPU master batch is made into an elastic buffer layer 106 by a dazzling method, and the thickness thereof is from about 1 mm to about 5 mm mM, and the surface is bonded to the surface of the polishing layer 104 and the elastic buffer layer 1〇6. Further, a composite polishing non-woven fabric 100 is formed. Further, the polishing abrasive layer 1〇4 can be calendered. The polishing layer 1→4 is heated by a roller to improve the surface flatness. In another embodiment of the present invention, the polishing abrasive layer 104 and the elastic buffer layer 1〇6 may be separately formed in the same production line, and the above two layers ' may be joined to form the composite polished abrasive nonwoven fabric 100. The abrasion resistance, compressibility, and polishing quality of the composite polishing pad 100 are exemplified below by various experimental examples.

Experimental Example I In Experimental Example 1, the abrasion resistance of the composite polishing-nonwoven fabric 100 produced in the above-described embodiment of the present invention was tested. In this experimental example, the wear resistance test of sample A, sample B, sample C and sample D was carried out under the following parameters using a precision 1378117 grinder (pM5(R) (4) Μ_η6, manufactured by Logitech, UK): ASTM D4〇 6〇; grinding wheel hi8; repeated times). Table 2 lists the average weight and average & weight loss of each set of samples before and after abrasion, wherein the number of samples per set of samples is 3. Table 2 Weight loss before abrasion weight loss Weight (g) (g) (me) Sample A 31.2842 31.2454 38 8 Sample B 35.6877 35.6597 28 0 Sample C 36.5654 36.5334 31 〇 Sample D 35.3095 35.2450 64.5, sample uD B as an example, It is found that when the weight percentage of the α-type alumina particles is about 3%, the average weight before the abrasion of the sample b is about 35.6877 g, and the average weight after the abrasion is about 35.6597. The loss weight after the sample 8 was found to be abrasion was about 28.0 mg. Furthermore, as can be seen from Table 2, the above samples A_D have good wear resistance and can be used commercially for precision surface polishing processes. This experimental example further clarifies the composite 1378117 polishing manufactured by the above embodiments of the present invention. The non-woven _ UK) is compressed. In general, a highly sturdy base fabric and/or a polishing pad can provide a smooth surface of the polished product, so that the compressibility is closely related to the quality of the composite polishing non-woven fabric. In this experimental example, the FlexiForce measurement system (Japan nitta a 'produced 'Model A201') was tested for compressibility under different compression amounts (asTM D395), and the load on each sample was relative to the amount of compression ( Μιη) Mapping. 2A illustrates the results of the compressibility test of the composite buffed nonwoven ι 〇〇 sample B; and FIG. 2B clarifies the results of the compressibility test of the buffed abrasive layer 104 of the embodiment of the present invention, wherein the „type alumina particles account for the wear resistant composite masterbatch The weight percentage is about 3%. Comparing Fig. 2A and Fig. 2B, it can be found that when the load is also 1 〇〇N, the composite polishing non-woven fabric 1 〇〇 sample B has a compression amount of about 21 〇 μηι, while polishing The compression of layer 1〇4 is about 35 μηι. That is,

In contrast, the composite polished non-woven fabric sample has better compressibility. Experimental Example III This experimental example uses the German HOMMEL TESTER surface roughness measuring instrument (model T4000) to test the surface roughness (r〇ughness) of the metal sheet after the composite polishing and polishing non-woven fabric 1 〇〇 grinding and polishing the metal sheet. , where the measurement length is 1. The surface roughness can be used to quantify the smoothness of the surface of the object, and in this experimental example, the surface roughness is expressed by an arithmetic average roughness (Ra). The Ra system is based on the surface line of the surface undulation of the 1378117 work surface per unit length to measure the undulating depth of the undulating surface with respect to the center line, and the average value is obtained. The groups tested in this experimental example were composite polished non-woven fabrics, sample A, sample B, sample C, and commercial fluff polishing pads (Chemcloths-Polishing Cloths, manufactured by Logitech Ltd., model OCON-352, diameter 12"/ 300mm) 'The number of samples in each group is 3. Table 3 illustrates the test results of the above groups.

table 3

Ra(nm) sample 1 sample 2 sample 3 average sample A 11 12 15 12.7 sample B 9 10 8 9.0 sample C 12 14 17 14.3 commercial fluff polishing 塾 14 12 17 14.3 Since Ra is the surface of the polished and polished metal sheet Roughness, the smaller the roughness, the better the surface smoothness of the product. It can be found from Table 3 that the surface smoothness of the product is obtained by using the composite polishing and polishing non-woven fabric sample B (that is, the α-type alumina particles occupying about 3% by weight of the wear-resistant composite masterbatch). The best, that is, the polishing quality of the sample crucible is better. On the other hand, whether it is sample A, sample Β or sample C, the polishing quality is commercially acceptable. In the above, it can be found that the composite polishing research according to the embodiment of the present invention 12

Claims (1)

511 / Μ 卩 丨 修正 修正 替换 替换 公告 1 1 1 1 1 1 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰The wear resistant composite masterbatch comprises from about 0_5 wt% to about 7 wt❶. a plurality of wear resistant particles and a first thermoplastic polymer, wherein the wear resistant particles have a particle size of from about 2 〇 nm to about 1000 ηπι, and are selected from the group consisting of: α type Alumina, γ-type alumina, cerium oxide, cerium lanthanum, cerium carbide, zirconia, single crystal diamond and polycrystalline diamond 'The first thermoplastic polymer is polyamine or polyester; (b) by meltblowing Forming the abrasion resistant composite masterbatch into a polishing layer; (c) forming an elastic buffer layer comprising a second thermoplastic polymer 'the second thermoplastic polymer is polyurethane; and (4) joining the polishing layer with The elastic buffer layer is bonded or melted. 2. The method of claim 1, wherein the abrasion resistant particles are from 100 nm to about 300 nm. Wherein the thickness of the polishing layer is 4. If desired, the thickness is about 1. 〇 wherein the elastic buffer layer is from mm to about 5 〇 nim ° 15 1378117 |. The year of the first month of the month, the replacement of the page, the replacement of the page, and the replacement of the page. The manufacturing method of claim 1 further includes calendering the polishing layer to enhance the polishing layer. The surface is flat. 6. A composite polishing abrasive nonwoven fabric comprising: a polishing abrasive layer comprising a first thermoplastic polymer and from about 0.5 wt% to about 7 wt% of a plurality of abrasive particles, wherein the first thermoplastic polymer is polyamine or poly The ester, the abrasion resistant particles have a particle size of from about 20 nm to about 1000 nm, and are selected from the group consisting of α-type oxidized IS, γ-type oxidized, oxidized oxidized cerium, cerium oxide, a carbonized carbide, an oxidized fault, a single crystal diamond, and a polycrystalline diamond; and an elastic buffer layer comprising a second thermoplastic polymer located below the polishing layer, the second thermoplastic polymer being a polyurethane, wherein the polishing layer and The elastic buffer layers are joined together by means of bonding or fusing. 7. The composite buffed nonwoven fabric of claim 6, wherein the abrasive particles have a particle size of from about 100 nm to about 300 nm. 8. The composite buffed nonwoven fabric of claim 6 wherein the polishing abrasive layer has a thickness of from about 0.1 mm to about 2.0 mm. 9. The composite buffed nonwoven fabric of claim 6, wherein the elastic buffer layer has a thickness of from about 1.0 mm to about 5.0 mm. 16