TWI375866B - Radiation curable and developable polyurethane and radiation curable and developable photoresist composition containing the same - Google Patents

Radiation curable and developable polyurethane and radiation curable and developable photoresist composition containing the same Download PDF

Info

Publication number
TWI375866B
TWI375866B TW097102304A TW97102304A TWI375866B TW I375866 B TWI375866 B TW I375866B TW 097102304 A TW097102304 A TW 097102304A TW 97102304 A TW97102304 A TW 97102304A TW I375866 B TWI375866 B TW I375866B
Authority
TW
Taiwan
Prior art keywords
weight
photoresist composition
component
bis
group
Prior art date
Application number
TW097102304A
Other languages
Chinese (zh)
Other versions
TW200932829A (en
Inventor
Wei Hsiang Huang
Ying Jen Chen
Jui Ming Chang
Chun Hung Kuo
Hong Ye Lin
Li Chung Chang
Original Assignee
Agi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agi Corp filed Critical Agi Corp
Priority to TW097102304A priority Critical patent/TWI375866B/en
Priority to US12/076,597 priority patent/US7935776B2/en
Priority to JP2008085525A priority patent/JP2009173848A/en
Priority to KR1020080030094A priority patent/KR100939137B1/en
Publication of TW200932829A publication Critical patent/TW200932829A/en
Application granted granted Critical
Publication of TWI375866B publication Critical patent/TWI375866B/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40High-molecular-weight compounds
    • C08G18/42Polycondensates having carboxylic or carbonic ester groups in the main chain
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/08Processes
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L75/00Compositions of polyureas or polyurethanes; Compositions of derivatives of such polymers
    • C08L75/04Polyurethanes
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/035Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyurethanes

Description

九、發明說明: 【發明所屬之技街領域】 本f明有關-種可輕射固化顯影之聚胺醋以及 酯之可輻射固化顯影之光阻組成物。 I胺 【先前技術】 液曰2膜ΐίίί晶顯示器⑽的彩色濾光片為-般 Λ要元件之―’其為可用於液晶顯示裝置所顯 力!!是糾色背-換為紅色 監色()等二原色,得以形成顯示器全彩化目的。 斗》色遽光片圖案層的製作,大都是以旋轉塗佈的方 阻ΐ予以均勾塗胁基材上,且先經由預烘烤方式將 ‘加ϊΐ過光罩將欲硬化之區域選擇性曝光、隨後以驗 ί硬化的製程’如此重複三次後依序將RGB 二種顏色蝕刻於基材上。 =前彩色液晶顯示裝置主要是使用玻璃作為基板,但其有 重等問題。而為解決此問題,軟性顯示器的材料開 入相當程度的研究,以致可以達到輕量化、不易^ 八絲由方ί及可捲繞性等優點。在日本特開平ιι_271736號 二itt ’士有討論細使用塑膠基板之研究,但一般而言,並 塑膠基板存在有無法於高溫處理之問題;而在日本^ m1。4468號絲魄巾,錢錢龍縣狀低溫硬化 ㈣ΐίΐ上述技術之情形’本發明人等對可輕射固化顯影樹 被r九’並開發其應用於玻璃基板触膠基板,於高 板)或低溫製程(塑膠基板)二種皆可之彩色 巧光片用可翻固化聽組合物,_完成本發明。 【發明内容] “if明有關—種可輻射固化顯影之聚胺酯以及含其之可 輻射固化顯影光阻組成物。 TP070389 1375866 詳言之,本發明有關一種包括主鏈具有羧酸基且侧鏈具 丙烯醯基及羧酸基之重複單元且以無規排刿所構成之^ 固化顯影之聚胺酯。 福射 本發明之可輻射固化顯影之聚胺酯,其特徵為在主鏈具 羧酸基且侧鏈具有丙烯醯基與羧酸基,且由下述重複單元 (Π)及(ΠΙ)以無規排列所構成:Nine, invention description: [Technology street field to which the invention belongs] This is a photo-resist composition of a radiation curable development of a polyamine vinegar and an ester which can be lightly cured and developed. I Amine [Prior Art] The color filter of the liquid crystal display (10) is a general-purpose component - it can be used for liquid crystal display devices! It is the color correction back - changed to red, the color () and other two primary colors, to form the full color of the display. The production of the color film pattern layer of the bucket is mostly applied to the base material by spin coating, and the surface to be hardened is selected by pre-baking. The exposure, followed by the hardening process, is repeated three times, and the two colors of RGB are sequentially etched onto the substrate. The front color liquid crystal display device mainly uses glass as a substrate, but it has problems such as weight. In order to solve this problem, the material of the flexible display has been studied to a considerable extent, so that it is possible to achieve the advantages of light weight, difficulty in the eight-wire, and windability. In Japan, the special opening ιι_271736 two itt's have discussed the use of plastic substrates, but in general, and plastic substrates have problems that cannot be treated at high temperatures; and in Japan ^ m1. 4468 silk crepe, money Longxian-like low-temperature hardening (4) ΐ ΐ ΐ ΐ ΐ ΐ ΐ ' ' ' ' ' ' ' 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本The present invention can be completed by using a reversible curing composition. SUMMARY OF THE INVENTION "Is a radiation-curable developed polyurethane and a radiation-curable and developed photoresist composition comprising the same. TP070389 1375866 In particular, the present invention relates to a backbone comprising a carboxylic acid group and a side chain A urethane-based and carboxylic acid-based repeating unit which is composed of a random enthalpy to form a cured polyurethane. The radiation-curable developed polyurethane of the present invention is characterized by having a carboxylic acid group and a side chain in the main chain. It has an acryloyl group and a carboxylic acid group, and is composed of the following repeating units (Π) and (ΠΙ) in a random arrangement:

(m) =〇 J L ο 〇 ΛΊ ⑻ Υ° H^C=i Ο R* (ΐ) 其中: —R1為C^2直鏈或分支伸烷基、&環狀伸烷基、伸苯基、聯 苯基、伸萘基、伸二甲苯基、伸甲苯胺基、-Ph-A-Ph-基(其中 A為2 (¾、-NH-或’該等基又可視情況經q_6烷基取代; R為二價脂族基,其上又可具有一或多個OH取代基,該 0H取代基又可視情況進而與二異氰酸酯反應;且R3為具有一 或多個0H取代基之直鏈或分支鏈之Ci 6烷基,該〇Ή取代基 又可視情況進而與二異氰酸酯反應;R4代表Η或CH3 ;且Τ 代表選自下列所組成組群之一或多個取代基: —c=c—n 0 及 0。 旦該聚胺^以GPC (凝膠滲透層析)所測定之重量平均分子 7 1 (以下簡稱Mw)在3,〇〇〇〜4〇〇,〇〇〇之範圍;且酸值為5〜120 2 mg KOH/g 〇 3 本發明之主鏈具有羧酸基且侧鏈具有丙烯醯基與羧酸基 4 ΤΡ070389 1375866 製備方法,係使 多7^醇(較好為二元醇)與二異氰酸醋反應, 酸官r麻a??基官能基之雜s旨’然後又藉㈣主鏈上幾 岸後3㈣基之㈣酸料11進行開環反應,其開環反 Ξίί 祕官能基後再顧其絲官能基與酸肝反應 其反應示意流程如下: 反應不意圖 HO—rz^-oh(m) =〇JL ο 〇ΛΊ (8) Υ° H^C=i Ο R* (ΐ) where: —R1 is C^2 straight or branched alkyl, & cycloalkyl, phenyl , biphenyl, anthranyl, xylylene, toluidine, and -Ph-A-Ph-yl (wherein A is 2 (3⁄4, -NH- or 'the group may be optionally substituted by q_6 alkyl) R is a divalent aliphatic group which may have one or more OH substituents, which in turn may be further reacted with a diisocyanate; and R3 is a straight chain having one or more 0H substituents or a Ci 6 alkyl group of a branched chain which, in turn, may further react with a diisocyanate; R4 represents hydrazine or CH3; and Τ represents one or more substituents selected from the group consisting of: -c=c —n 0 and 0. Once the polyamine is determined by GPC (gel permeation chromatography), the weight average molecule 7 1 (hereinafter referred to as Mw) is in the range of 3, 〇〇〇 4 4 〇〇, 〇〇〇; And the acid value is 5 to 120 2 mg KOH / g 〇 3 The main chain of the present invention has a carboxylic acid group and the side chain has a propylene fluorenyl group and a carboxylic acid group 4 ΤΡ 070389 1375866, a method for preparing a polyhydric alcohol (preferably Glycol) and diisocyanate The reaction, the acidity of the sulphate, the singularity of the singularity of the singularity of the singularity of the singularity of the singularity of the singularity of the singularity of the singularity of the sulphate The reaction scheme of the reaction between the silk functional group and the acid liver is as follows: The reaction is not intended to be HO-rz^-oh

OCN—Ri—NCO + HO-C—j—C-OHOCN-Ri-NCO + HO-C-j-C-OH

COOH R3 -c^-o- =0COOH R3 -c^-o- =0

UU

COOH R< -CHj-O- =0 丄。-卜。七 _μ_υi〇_ 叫十 CH^-O COOH *COOH R<-CHj-O- =0 丄. - Bu. Seven _μ_υi〇_ called ten CH^-O COOH *

°<s^O Η,〇=( · Ο t U 丄。-CHr|〇 Λη CH^O- 0 OH HO JL^-^JLo. -N—R “ 2i〇-CH+°<s^O Η,〇=( · Ο t U 丄.-CHr|〇 Λη CH^O- 0 OH HO JL^-^JLo. -N-R “ 2i〇-CH+

CHj-0-COOHCHj-0-COOH

H O R4 其中: (i) (n) (Π) TP070389 8 1375866 μ R1為CH2直鏈或分支伸烷基、& 8環狀伸烷基、伸苯基、聯 本基、伸萘基、伸一曱笨基、伸甲苯胺基、-Ph—A—ph-基(其中 A為2 0¾、-NH-或-〇_),該等基又可視情況經c]4絲取代; R為二價·脂族基,其上又可具有一或多個〇H取代基,該 0H取代基又可視情況進而與二異氰酸酯反應;且R3為具有一 或多個0H取代基之直鏈或分支鏈之ο 6烷基,該〇H取代基 又可視情況進而與二異氰酸酯反應;R4代表Η或CH3 ;且τ 代表選自下列所組成組群之一或多個取代基: —㈣-,&’ X),¢)及 0。 、,本發明之聚胺酯具有以GPC (凝膠滲透層析)測定之重量 平均分子量(以下簡稱Mw)在3,000〜400,000 ;較佳為 6,000〜8〇,〇0〇之範圍;且酸值為5〜12〇 mgK〇R/g,較佳為1〇〜6〇 mgKOH/g 〇 本發明又有關一種可輻射固化顯影之光阻組成物,其包括 .(A)由式(I)、(π)及(in)所示之重複單元所構成之本發明之聚胺 酯、(B)丙烯酸單體、及(〇光起始劑。 …时本發明光阻組成物中,該(A)由式①、(Π)及即)所示之重 複,元所構成之聚胺酯(後文簡稱聚胺酯(A))與出)丙烯酸酯單 體(後文簡稱丙烯酸酯單體(B))的重量比例:⑼)為4〇〜9〇 : 10〜60。而相對於成分⑷及成分(B)總重1〇〇重量%計,(c)光 起始劑(後文簡稱光起始劑(〇)之含量為1〜5〇重量〇/〇。 本發明之組成物又可視情況包括接著助劑①)、著色劑 ⑹、分政劑(F)以及溶劑(G)中之一或多種。該等成分之使用量 只要對本發明所欲達成之目的無不良影響,即可在廣範圍内變 化。 【實施方式】 本發明中用以製備主鏈具有羧酸基且侧鏈具有丙烯醯基 TP070389 9 與,酸基且由重複單元①、及所構成之聚胺酯中,該二 異氰酸酯^指一分子具有兩個異氰酸酯官能基之化合物,可使 用,如二苯基甲烷二異氰酸酯_0、丨,4_苯二異氰酸酯、4,4,_ 聯苯二異氰酸酯、1,5_萘二異氰酸酯、4,4,_二苯基甲烷二異氰 駿^旨、2^4-或2,6-二甲苯基二異氰酸醋、對甲苯胺二異氰酸醋、 I4’]二苯基,二異氰酸酯、l3-或^4-二甲苯二異氰酸酯、L3-,戊基二異氰#酸酯、1,4·環己烷二異氰酸酯、1>3_環己烷二異 氛酸醋、3_異氰酸醋基甲基_3,5,5_三f基環己基異嫌醋(異氟 爾_二異氰酸S旨)、甲基_2,4·環己;^二異氰酸g旨、甲基_2,6_環 ^烷二異氰酸酯、三亞甲基二異氰酸酯、四亞甲基二異氰酸 ,、六亞曱基二異氰_旨、五亞甲基二異氰酸g|、丨,2_伸丙基 「異氰酸g旨、1,2·伸丁基二異氰酸、2,3_伸丁基二異氰酸醋、 伸丁基二異氰_旨、2,4,4•或2,2,4_三y基六亞y基二異氰 酸酯。 ^發明+用以製備主鏈具有魏基且側鏈具有丙稀酿基 :、$酸基且由重複單元w、(11)及(m)所構成之聚細旨中,該多 =醇Τ使用平均分子1為4〇〇〜5,〇〇〇的多元醇,例如聚鍵多 =如聚(乙二醇)、聚(丙二醇)、聚(丁二醇)(pTMEG);聚醋多 =如聚(己二酸乙二醇酷)二醇、聚(癸二酸丁二醇醋)二醇、 ίΪ二ίί二Ϊ酉旨)二醇、聚(己二酸3_甲基-1,5.伸戊二醇酉旨) ί (β 3 3_甲基_1,5_伸戊二醇醋)二醇、聚己内酯二醇 及米(Ρ-Τ基-δ-戊内醋)二醇;聚碳酸醋(為 ί H曰ί ^ ^ f煙多元醇如聚乙稀多元醇、聚丙烯多元 產物it、戍二烯多元醇及聚異戊二烯多元_之氫化產物。 血羧鏈具有魏基且側鏈具有丙烯醯基 由重複早凡®、⑼及㈣所構成之聚胺醋中,且右 至少兩健基之竣酸化合物可舉例如二(f;曰 TP070389 10 1375866 (Dime^iylol propionic acid ’ 簡稱 DMPA ’ 英國 Lancaster 產品)、 CAPA HC1100 (具有側鏈羧酸官能基之聚己内酯,德國 SOLVAY公司產品)、2-乙二醇基·2_甲基_2•羥基乙酸。 本發明中用以製備主鏈具有羧酸基且侧鏈具有丙烯醯基 ^酸基且^重料元(I)、(H)及⑽所構奴聚賴中,含有 環氧基之丙烯酸酯單體可舉例如甲基丙烯酸縮水甘油酯 (Glycidylmethaciylate,簡稱 GMA,美國 D〇wChemica 公司 產品)。 本發明中用以製備主鏈具有羧酸基且侧鏈具有丙烯醯基 與羧酸基且由重複單元(I)、(Π)及0Π)所構成之聚胺酯中,酸酐 可舉例如偏苯三甲酸酐(Trimellitic anhydride,簡稱TMA,美 國Aldrich公司產品)及四氫鄰苯二甲酸酐(Tetrahydr〇phthalk . anhydride ’簡稱THPA ’美國Aldrich公司產品)、丁二酸軒及 二氫鄰苯二甲酸酐。 - 本發明之主鏈具有羧酸基且侧鏈具有丙烯醯基與羧酸基 且由重複單元(Ι)、(Π)及(III)所構成之聚胺酯,由於具有較高分 子量以及較多的易形成氫鍵之胺酯基且具有丙烯酸基供輻射 固化並父聯,故可提高固化後產物之耐化學品、耐熱及耐黃變 性。 本發明有關之可輻射固化顯影之光阻組成物,係包括(Α) 主鏈具有鼓酸基且侧鏈具有丙烯酿基與叛酸基且由重複單元 (I)、(II)及(ΙΠ)所構成之聚胺酯、(Β)丙烯酸g旨單體、及(c)光起 始劑。 本發明光阻組成物中所用聚胺自旨(A),為本發明前文所述 者。 本發明光阻組成物中所用的丙烯酸酯單體(B),可舉例如 單、二·、三-或多-丙烯酸官能基單體。單丙烯酸官能基單體可 舉例如丙烯酸2-苯氧基乙基酯、丙稀酸四氫呋喃基酯、丙烯酸 異冰片酯、甲基丙烯酸異冰片酯、丙烯酸2-(2-乙氧基乙氧基) TP070389 11 1375866 =曰一、丙癸醋„、丙埽酸月桂基醋及甲基丙烯酸月桂基 一丙稀酸8祕軍體可舉例如二丙婦酸三丙二醇醋、一丙 己二醇醋、二編烯叫己二醇醋、二二 ί了 ^ ^基丙稀酸二乙二醇醋、二甲基丙烯酸乙二醇 ^ 一丙烯I二乙二醇g旨、二甲基丙烯酸三乙二醇酯、二丙稀 ,四^二醇醋、二甲基丙稀酸四乙二醇酯。三丙稀酸官能基或 $丙巧酸^能基單體可舉例如三丙烯酸三(舒基)丙醋、三甲 二二(幾甲基)丙醋、四丙婦酸雙(三(解基)丙醋)、五丙 單^及六丙稀酸二季戍四醇醋等。此等丙婦酸酯 早體可早獨使用或混合兩種以上使用。其使用 且 有丙烯醯基及羧酸基之聚胺醋’丙烯‘ 酉曰早體(Β)的重置比例在4〇〜9〇 : 1〇〜6〇之範圍。 —本發明光阻組成物中所用的光起始劑(〇為在受到可見 紫外光、遠紫外光、電子束以及χ射線等輻射光照射下, 八为子結構會發生裂解產生如游離基、陽離子或陰離子等活性 tmVeSite),而可與主鏈具有_基及侧鏈具有丙烯醯 土 基之聚胺酯(A)及丙烯酸酯單體⑻進行聚合反應者。 光起始劑(C)實例可舉例如咪唑類如2,2,_雙(2了氯苯 •^) 4’4 ’5,5 -肆(4-甲氧基幾基苯基)_ι,2’_二咪嗤、2,2,_雙(2_氯 ,5,5 -_(4-乙氧基幾基苯基)_ι,2’_二。米嗤、2,2,_雙(;_ 氯苯基)-4,4,,5,5,-肆(4-苯氧基羰基苯基)_U,_二咪唑i 雔 (2,4·二氣苯基)_4,4,,5,5,_肆(4_甲氧基羰基苯基M,2,c^唑, 2,2’-雙(2,4-二氣苯基)_4,4’,5,5,-肆(4_乙氧基羰基苯基H,2,-二 味唾、2,2’-雙(2,4-二氯苯基)-4,4’,5,5’_肆(4-苯氧基幾基苯 基)_1,2’-二咪唑、2,2,-雙(2,4,6·三氯苯基)-4,4,,5,5,-肆(4-甲 ί 其 羰基苯基)-以二咪唾、2,2,_雙(2,4,6_三氯苯基)_4,4,,5,5,肆& 乙氧基羰基苯基)-l,2V二咪唑、2,2,·雙(2,4,6- ’三氯苯 ^)_4,4’,5,5’-肆(4-苯氧基羰基苯基)-1,2’-二咪唑、2\2,_雙(2_漠 苯基M,4’,5,5’-肆(4-甲氧基羰基苯基)-1,2,-二咪唑、2,2t雙 TP070389 12 r9、55)甘4’4,5’5 -肆(4_乙氧基幾基苯基Η,2’-二味嗤、2,2,-雙 本基…’々,-肆…苯氧基羰基苯基从广二咪唑、“,· 苯基K4’,5,5’-肆(4々氧基Μ基苯基Η,2’·二咪 二啐1/又(2,,4-二漠苯基)·4,4,,5,5,·肆(4·乙氧基裁基苯基)"*1,2,-ϋ 9,、-2,f’_雙(2,4-二溴苯基>4,4,,5,5,-肆(4_苯氧基羰基苯 :其“其7巧、2,2’-雙(2,4,6·三漠苯基>4,4,,5,5,-肆(4_甲氧基 味唾、2,2,_ 雙(2,4,6·三漠苯基)-4,4,,5,5,-肆(4_ 美V4 4%^本基>U’-二咪唑、2,2,_雙(2,4,6_三溴苯 ^“、,二:肆(4-笨氧基絲苯基)-1,2,-二咪啥、2,2,-雙(2-氰 二14,4,5,5’_肆(4-甲氧基羰基苯基)-1,2’_二咪唑、2,2,-雙 ί ί;^)·4/,5,5’·肆(4·乙氧基羰基獨W,·二味^ 二又(亂基笨基卜从^’碑⑷苯氧基羰基苯基丨^二咪 2’2 -雙(2_甲基苯基>4,4’,5,5’肆0甲氧基羰基苯基)-0 、2,2’_雙(2_甲基苯基Μ,4,,5,5,-肆(4-乙氧基幾基苯 ί、2,2’·雙(2·甲基苯基>4,4’,5,5’_肆(4-苯氧基羰 基Ζ·1,2 —二咪唑、2,2,-雙(2-乙基苯基)_4,4,,5,5,-肆(4-甲氧 基碳基^基)^1,2,-二咪唑、2,2,-雙(2_乙基苯基)_4,4,,5,5,·肆(4-乙氧基羰基苯基)-1,2’-二咪唑、2,2,-雙(2-乙基苯基)_4,4,,5,5,_ 肆(4-苯氧基羰基笨基)义厂二咪唑、2,2,·雙(2_苯^笨 基^4,4’,5,5’-肆(4_甲氧基羰基苯基)-1,2,-二咪峻、2,2,_雙(2·苯 基^基)-4,4’,5,5’-肆(4-乙氧基羰基苯基)七广二咪唑、2,2,_雙 ^苯基苯基:^’^’-肆…苯氧基羰基苯基^广二咪唑, 2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基-ΐ,2,_二咪唑、2,2,-雙(2,4-二 氯本基)-4,4’,5,5’-四苯基_!,2’_二_0坐、之,2,雙(2,4,6_三氣苯 基):4,4’,5,5’-四苯基-1,2’-二咪唑、2,2,-雙(2-溴苯基)-4,4,,5,5,- 四苯基-1,2’-二咪唑、2,2,-雙(2,4-二溴苯基)-4,4,,5,5,-四苯基 1’2 -一味〇坐、2,2 _雙(2,4,6-三溴苯基)_4,4’,5,5’·四苯基-l,2,_二 哮嗤、2,2,-雙(2-氰基苯基)_4,4’,5,5’-四苯基-1,2,-二口米唾、2,2,-雙(2,4-二氰基苯基)_4,4,,5,5,-四苯基_1,2,-二。米唑、2,2,_雙 ΤΡ070389 13 ^«66 (2,4,6-三氰基苯基)-4,4, 5 s,πη & 甘 基笨基>4,4,,5,5,-四苯A,"四笨J-1,2,-二味唾、2,2,_雙Μ 基)-44,55,-四苯其^,,咪唑、2,2’_雙(2,4_二甲基苯 基k4,,5’5,-四笨基义t—4'、二;?4(2-乙基笨 j);⑽四苯基‘= 基Κ4,,5,5,-四苯基q 2,— a ,,又(,,0 —乙基本 基H4,55,-四苯A ^ 味唑、2,2,_雙(2_苯基苯 基>4 4, 5 5,-四苯美j 味唑、2,2,-雙(2,4,6-三苯基笨 ^ 2 2- 2 lit ;4;r^ ; ^ ^ Ια^ϊΖ;:^ 笨基 Κ4’,5,5:苯 1,4,6_二乳本基)-4,4,5,5’_四苯基,_ 咪一,= =因異T基醚、曱基·2·苯情基苯?_旨等以及其類似街 光起始劑(C)實例又可舉例如苯乙酮類結構例如22_二 氧基_2-苯基苯乙酮、2_經基_2_甲基小苯基丙]_闕、Η4_異丙 基苯基)_2_經基-2_甲基丙小_、4_(2_經基乙氧基)苯基_(2_經基 2-丙基)_、2,2-—甲氧基本乙酮、2,2_二乙氧基苯乙酮、2_甲 基_(4_甲硫基苯基)-2-嗎琳基-1-丙_ι_酮、2_节基_2_二甲胺某 嗎琳基本基)丁_1_嗣、1_經基壞己基苯基嗣、2 2’-二曱氧 基-1,2-二苯基乙-1-酮、4-豐氮基苯乙嗣、4-疊氮基亞爷某苯乙 酮等以及類似衍生物。 光起始劑(C)實例又可舉例如二苯曱酿I類如二苯甲酮、 TP070389 14 1375866 4,4,-雙(二m基)二苯甲酮、4,4,-雙(二乙胺基)二笨甲_、3 3, 二甲基-4-甲氧基二苯甲酮等及其類似衍生物。 ,_HO R4 where: (i) (n) (Π) TP070389 8 1375866 μ R1 is CH2 straight or branched alkyl, & 8 cyclic alkyl, phenyl, phenyl, naphthyl, and曱 stupyl, toluidine-based, -Ph-A-ph-based (wherein A is 2 03⁄4, -NH- or -〇_), which may be optionally substituted by c]4 silk; R is divalent An aliphatic group, which in turn may have one or more hydrazine H substituents, which in turn may be further reacted with a diisocyanate; and R3 is a straight or branched chain having one or more 0H substituents. ο 6 alkyl, the hydrazine H substituent may in turn be reacted with a diisocyanate; R4 represents hydrazine or CH3; and τ represents one or more substituents selected from the group consisting of: -(tetra)-, &' X), ¢) and 0. The polyamine ester of the present invention has a weight average molecular weight (hereinafter referred to as Mw) measured by GPC (gel permeation chromatography) in the range of 3,000 to 400,000; preferably 6,000 to 8 Å, 〇0 ;; and an acid value of 5 〜12〇mgK〇R/g, preferably 1〇~6〇mgKOH/g 〇 The invention further relates to a radiation curable developed photoresist composition comprising: (A) from formula (I), (π) And the polyamine ester of the present invention comprising (b) the repeating unit represented by (in), (B) an acrylic monomer, and (the photoinitiator of the present invention, the (A) is represented by Formula 1 , (Π) and ie) repeated, the weight ratio of the polyurethane (hereinafter referred to as polyurethane (A)) and the acrylate monomer (hereinafter referred to as acrylate monomer (B)): (9) ) for 4〇~9〇: 10~60. With respect to the total weight of the component (4) and the component (B) of 1% by weight, (c) the photoinitiator (hereinafter referred to as the photoinitiator (〇) is 1 to 5 〇 〇 / 本. The composition of the invention may optionally include one or more of the auxiliary 1), the colorant (6), the sub-agent (F), and the solvent (G). The amount of these components to be used can be varied within a wide range as long as it does not adversely affect the object to be achieved by the present invention. [Embodiment] In the present invention, in the preparation of a polyurethane having a carboxylic acid group and a side chain having a propylene fluorenyl group TP070389 9 and an acid group, and the repeating unit 1 and the polyurethane compound, the diisocyanate has a molecule A compound of two isocyanate functional groups, such as diphenylmethane diisocyanate_0, oxime, 4-phenylene diisocyanate, 4,4, _biphenyl diisocyanate, 1,5-naphthalene diisocyanate, 4, 4 , _ diphenylmethane diisocyanate, 2^4- or 2,6-dimethylphenyl diisocyanate, p-toluidine diisocyanate, I4'] diphenyl, diisocyanate, L3- or ^4-xylene diisocyanate, L3-, pentyl diisocyanate #1,4·cyclohexane diisocyanate, 1> 3_cyclohexane diiso-acid vinegar, 3-isocyanide Acid vinegar methyl _3,5,5_trif-cyclohexyl isopropyl vinegar (Isofluran-diisocyanate S), methyl 2,4·cyclohexane; ^diisocyanate , methyl 2,6-cyclo-dialkyl diisocyanate, trimethylene diisocyanate, tetramethylene diisocyanate, hexamethylene diisocyanate, methylene methylene diisocyanate g | , 丨, 2_ stretch propyl "isocyanate g, 1, 2 Butyl diisocyanate, 2,3_butyl butyl diisocyanate, butyl diisocyanide, 2,4,4• or 2,2,4_three y hexa y Diisocyanate. ^Inventive + used to prepare a polyether with a main chain having a Wei group and a side chain having an acrylic acid group: an acid group and consisting of repeating units w, (11) and (m) = alcohol oxime using an average molecular 1 of 4 〇〇 ~ 5, hydrazine polyols, such as poly-bonds = such as poly (ethylene glycol), poly (propylene glycol), poly (butanediol) (pTMEG); Vinegar = diol (poly(ethylene glycol adipate) diol, poly (butylene phthalate) diol, diol, diol, poly(adipate 3 - methyl) -1,5. pentylene glycol )) ί (β 3 3_methyl_1,5_pentylene glycol vinegar) diol, polycaprolactone diol and rice (Ρ-Τ-δ-δ- Ethylene glycol vinegar; polycarbonate (hydrogenation of ί H曰ί ^ ^ f tobacco polyol such as polyethylene monomer, polypropylene multi-product it, decadiene polyol and polyisoprene) a product. The blood carboxyl chain has a Wei group and the side chain has an acryl fluorenyl group in the polyamine vinegar composed of the repeating yam, (9) and (4), and the phthalic acid compound of at least two right bases can be mentioned. For example, two (f; 曰 TP070389 10 1375866 (Dime ^ iylol propionic acid 'referred to as DMPA 'Lancaster products in the UK), CAPA HC1100 (polycaprolactone with side chain carboxylic acid functional groups, products of SOLVAY, Germany), 2-B Alcohol group 2-methyl-2•hydroxyacetic acid. In the present invention, the main chain has a carboxylic acid group and the side chain has an acryloyl group and the heavy elements (I), (H) and (10) The acrylate monomer containing an epoxy group may be, for example, Glycidylmethaciylate (GMA, a product of D〇w Chemica, USA). In the present invention, in the preparation of a polyurethane having a carboxylic acid group and a side chain having an acryloyl group and a carboxylic acid group and having a repeating unit (I), (Π) and 0Π, the acid anhydride may, for example, be trimellitic. An acid anhydride (Trimellitic anhydride, TMA, a product of Aldrich, USA) and tetrahydrophthalic anhydride (Tetrahydr〇phthalk. anhydride, referred to as THPA 'Aldrich Company, USA), succinic acid and dihydrophthalic anhydride. - a polyurethane having a carboxylic acid group and a side chain having an acryloyl group and a carboxylic acid group and having a repeating unit (Ι), (Π) and (III), having a higher molecular weight and more It is easy to form a hydrogen bond amine ester group and has an acrylic group for radiation curing and parenting, so that the chemical resistance, heat resistance and yellowing resistance of the cured product can be improved. The photocurable composition for radiation curable development according to the present invention comprises (Α) a main chain having a drum acid group and a side chain having an acryloyl group and a tick acid group and consisting of repeating units (I), (II) and (ΙΠ) And a (meth) photoinitiator. The polyamine used in the photoresist composition of the present invention is intended to be the one described above in the present invention. The acrylate monomer (B) used in the photoresist composition of the present invention may, for example, be a mono-, di-, tri- or poly-acrylic functional monomer. The monoacrylic acid functional monomer may, for example, be 2-phenoxyethyl acrylate, tetrahydrofuranyl acrylate, isobornyl acrylate, isobornyl methacrylate, 2-(2-ethoxyethoxy) acrylate. ) TP070389 11 1375866 = 曰 、, 癸 癸 vinegar „, propylene glycol lauric acid vinegar and methacrylic acid lauryl-acrylic acid 8 secret army can be, for example, dipropylene glycol tripropylene glycol vinegar, propylene glycol vinegar The second olefin is called hexane diol vinegar, the second glutinous glutinous acid, the propylene glycol diethylene glycol vinegar, the propylene diethylene glycol glycol, the propylene diethylene glycol g, the trimethacrylate a glycol ester, a dipropylene, a tetraglycol vinegar, a tetraethylene glycol dimethacrylate, a tripropylene acid functional group or a propylene acrylate monomer, for example, a triacrylate Base) propylene vinegar, trimethyl bis (monomethyl) propyl vinegar, tetrapropyl benzoic acid bis (tris(propyl) propyl vinegar), penta propyl acetonide and hexamethylene diacetate diquaternary quinone vinegar vinegar, etc. The progesterate can be used alone or in combination of two or more. The reset ratio of the polyamine vinegar 'propylene' 酉曰 酉曰 (Β) which is used with the acryl fluorenyl group and the carboxylic acid group is 4 〇 9 : a range of 1 〇 to 6 。. - a photoinitiator used in the photoresist composition of the present invention (the enamel is irradiated with visible ultraviolet light, far ultraviolet light, electron beam, and xenon ray, etc. The structure may be cleaved to produce an active tmVeSite such as a radical, a cation or an anion, and may be polymerized with a polyamine ester (A) having a phenyl group in the main chain and a propylene bauxite group in the side chain, and an acrylate monomer (8). Examples of the initiator (C) include, for example, imidazoles such as 2,2,_bis(2 chlorobenzene•^) 4'4 '5,5-indole (4-methoxyphenylphenyl)_ι, 2 '_二咪嗤, 2,2,_双双(2_氯,5,5 -_(4-ethoxydylphenyl)_ι,2'_二. rice bran, 2,2,_double ( ;_ chlorophenyl)-4,4,,5,5,-indole (4-phenoxycarbonylphenyl)_U,_diimidazole i 雔(2,4·diphenyl)_4,4,, 5,5,_肆(4_methoxycarbonylphenyl M,2,c^azole, 2,2'-bis(2,4-diphenyl)-4,4',5,5,-肆(4_ethoxycarbonylphenyl H,2,-di-saliva, 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5'-肆(4-benzene Oxyphenylphenyl)_1,2'-diimidazole, 2,2,-bis(2,4,6-trichlorophenyl)-4 ,4,,5,5,-肆(4-methyl 其 carbonyl phenyl)--dimethicillin, 2,2,_bis(2,4,6-trichlorophenyl)_4,4,,5 ,5,肆&ethoxycarbonylphenyl)-l,2V diimidazole, 2,2,·bis(2,4,6- 'trichlorobenzene^)_4,4',5,5'-肆(4-Phenoxycarbonylphenyl)-1,2'-diimidazole, 2\2,_bis(2_Molyphenyl M,4',5,5'-indole (4-methoxycarbonylbenzene) 1,1,2,-diimidazole, 2,2t double TP070389 12 r9, 55) gan 4'4,5'5-indole (4-ethoxylated phenyl hydrazine, 2'-dimiso, 2,2,-double base...'々,-肆...phenoxycarbonylphenyl from broadly diimidazole, ", · phenyl K4', 5,5'-fluorene (4々 oxydecylphenyl hydrazine) , 2'·二咪二啐1/又(2,4-二漠苯)·4,4,,5,5,·肆(4·ethoxylated phenyl)"*1, 2,-ϋ 9,,-2,f'_bis(2,4-dibromophenyl)4,4,5,5,-indole (4-phenoxycarbonylbenzene: its "7" , 2,2'-double (2,4,6·three desert phenyl>4,4,,5,5,-肆(4_methoxy odor saliva, 2,2, _ double (2,4 ,6·三漠phenyl)-4,4,,5,5,-肆(4_美V4 4%^本基>U'-diimidazole, 2,2,_double (2,4,6_ Tribromobenzene ^,,, two: (4-Anooxysilylphenyl)-1,2,-diimidine, 2,2,-bis(2-cyanodi14,4,5,5'-肆(4-methoxycarbonylphenyl) )-1,2'_diimidazole, 2,2,-double ί;^)·4/,5,5'·肆(4·ethoxycarbonyl alone W,·二味^二又(乱基Stupid base from ^' monument (4) phenoxycarbonylphenyl hydrazine ^ dim 2'2 - bis (2-methylphenyl > 4,4',5,5'肆0 methoxycarbonylphenyl) -0, 2, 2'_ bis (2_methylphenyl hydrazine, 4, 5, 5, - fluorene (4-ethoxy phenylene, 2, 2' bis (2. methyl benzene) Base >4,4',5,5'_肆(4-phenoxycarbonylindole·1,2-diimidazole, 2,2,-bis(2-ethylphenyl)_4,4,,5 ,5,-肆(4-methoxycarbenyl)^1,2,-diimidazole, 2,2,-bis(2-ethylphenyl)_4,4,5,5,·肆(4-ethoxycarbonylphenyl)-1,2'-diimidazole, 2,2,-bis(2-ethylphenyl)-4,4,5,5,- 肆(4-phenoxy Carbonyl stupid base) Yizi diimidazole, 2,2,·bis (2_benzene^ stupyl^4,4',5,5'-indole (4-methoxycarbonylphenyl)-1,2,-二米峻, 2,2,_bis(2·phenyl)yl-4,4',5,5'-indole (4-ethoxycarbonylphenyl)-7-diimidazole, 2,2,_ Biphenylphenyl: ^ '^'-肆...phenoxycarbonylphenyl^glyimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-anthracene, 2,_ Diimidazole, 2,2,-bis(2,4-dichlorobenzyl)-4,4',5,5'-tetraphenyl _!, 2'_two_0 sit, 2, double ( 2,4,6_trisylphenyl): 4,4',5,5'-tetraphenyl-1,2'-diimidazole, 2,2,-bis(2-bromophenyl)-4, 4,5,5,-tetraphenyl-1,2'-diimidazole, 2,2,-bis(2,4-dibromophenyl)-4,4,5,5,-tetraphenyl 1'2 - squat, 2,2 _bis(2,4,6-tribromophenyl)_4,4',5,5'·tetraphenyl-l,2,_two croup, 2, 2,-bis(2-cyanophenyl)_4,4',5,5'-tetraphenyl-1,2,-di-n-butyl salic, 2,2,-bis(2,4-dicyano Phenyl)_4,4,,5,5,-tetraphenyl-1,2,-di. Mazole, 2, 2, _ biguanium 070389 13 ^ «66 (2,4,6-tricyanophenyl)-4,4, 5 s,πη & glycyl stupid base>4,4,,5 ,5,-Tetrabenzene A,"four stupid J-1,2,-two-flavor saliva, 2,2,_bis-bisphthyl)-44,55,-tetraphenyl-,-,imidazole,2,2' _ bis (2,4-dimethylphenyl k4,, 5'5,-tetraphenylidene t-4', two; ?4(2-ethyl stupid); (10) tetraphenyl'=ylindole 4 ,,5,5,-tetraphenyl q 2,- a ,, and (,, 0 -ethyl-based H4,55,-tetraphenyl A ^ oxazole, 2, 2, bis (2-phenylene) Base >4 4, 5 5,-tetraphenylene j oxazole, 2,2,-bis(2,4,6-triphenyl phenyl 2 2 2 2 ; 4;r^ ; ^ ^ Ια^ ϊΖ;:^ Stupid base 4',5,5: benzene 1,4,6_two-milk base)-4,4,5,5'-tetraphenyl, _ imi, = = iso-T-ether And an example of a succinyl-based initiator (C), such as an acetophenone-based structure such as 22-dioxy-2-phenylacetophenone, 2_Phenyl-2-methyl-phenylphenyl]-indole, Η4_isopropylphenyl)_2_transyl-2-methylpropanoid _, 4-(2-cyanoethoxy)phenyl _(2_carbyl 2-propyl)-, 2,2-methoxybenketone, 2,2-diethoxyacetophenone, 2_Methyl_(4_Methylthiophenyl)-2-morphinyl-1-propanyl-I- ketone, 2-pyramidyl-2-dimethylamine, a certain base, butyl __嗣, 1_Phenyl hexyl phenyl hydrazine, 2 2 '-didecyloxy-1,2-diphenylethan-1-one, 4-azathiophenyl hydrazine, 4-azido-based benzene Ethyl ketone and the like and similar derivatives. Examples of the photoinitiator (C) may, for example, be diphenyl hydrazine, such as benzophenone, TP070389 14 1375866 4,4,-bis(di-m-)benzophenone. , 4,4,-bis(diethylamino) bis-methyl, 3 3, dimethyl-4-methoxybenzophenone and the like and the like.

光起始劑(C)實例又可舉例如具有α_二酮結構之光 劑’例如二乙醯基甲酸酯、二苯甲醯基甲酸酯、甲基苯甲醯^ 甲酸酯等以及類似衍生物;具有多核醌結構之光^始劑如^ 醌、2-乙基gg昆、2-第三丁基蒽酿、i,4_萘醌等及類似衍生物1 黃酮類(xanthone)結構之光起始劑如黃酮、硫代黃酮、2 4_二乙 基硫代黃酮、2-氣硫代黃蚵等及類似衍生物;具有重氮社&之 ,,始劑如4-重氮二苯基胺、4-重氮-4,-甲氧基二苯基^、4_ 受氮基-3-甲氧基一本基胺等以及類似衍生物;具有三嗅结構 之光起始劑如2-(2,-呋喃基亞乙基)_4,6-雙(三氯甲基)、 2_(3’,4’_二〒氧基苯乙烯基)_4,6_雙(三氣甲暴)_s三嗪、2_0〔甲 氧基萘基M,6-雙(三氯甲基)-s_三嗪、2_(2’·漠甲基苯基)_4,6_ 雙(二氯甲基)-s-二嘻、2-(2’-嘆吩基亞乙基)_4,6-雙(三氯甲基)_s_ 三嗪等以及類似衍生物。 'Examples of the photoinitiator (C) include, for example, a photo-agent having an α-diketone structure such as diisopropyl carbazate, benzoyl carbazate, methotrexate, etc. And similar derivatives; light-emitting agents with a polynuclear fluorene structure such as 醌, 2-ethyl gg Kun, 2-t-butyl butyl, i, 4-naphthoquinone, etc. and similar derivatives 1 flavonoids (xanthone) a light initiator of the structure such as flavonoids, thioflavones, 24 4 -diethylthioflavonoids, 2-gas thioxanthine, and the like; and having a diazotide & -diazodiphenylamine, 4-diazo-4,-methoxydiphenyl^, 4-nitro--3-methoxy-monoamine, and the like; and light having a tristimulus structure Starting agents such as 2-(2,-furylethylidene)_4,6-bis(trichloromethyl), 2_(3',4'-dimethoxyoxystyryl)_4,6-bis ( Tri-gas violent) _s triazine, 2_0 [methoxy naphthyl M, 6-bis(trichloromethyl)-s-triazine, 2_(2'·m-methylphenyl)_4,6_ double (two Chloromethyl)-s-diindole, 2-(2'-thinylethylene)_4,6-bis(trichloromethyl)_s_triazine, and the like, and similar derivatives. '

除了上述所列舉之光起始劑以外’亦可使用重氮基苯甲 醛、疊氮基芘、雙(2,6·二甲氧基苯曱醯基)2,4,4_三甲基^基罐 氧化物、N-苯基硫代吖啶酮、三苯基芘鑌高氯酸鹽 (triphenylpyrenyliumperchlorate)等以及類似衍生物。該等光起 始劑可單獨使用亦可混合兩種以上使用。相對於成分(A)及成 分(B)總重100重量%計,該光起始劑(C)之使用量為重 量%。 本發明之光阻組成物中又可含有接著助劑,其實例包 含具有乙烯基官能基之矽烷類如乙烯基三氯矽烷、乙烯基三甲 氧基石夕炫、乙烯基三乙氧基石夕娱^含環氧官能基之石夕炫類如 2-(^,4-環氧基環己基)_乙基三甲氧基矽烷、3_縮水甘油氧基丙 基三曱氧基石夕烷、3-縮水甘油氧基丙基甲基二乙氧基矽烷、3_ 縮水甘油氧基丙基三乙氧基石夕烷;含甲基丙烯醯氧基之石夕烷類 例如3-甲基丙烯醯氧基丙基甲基二甲氧基矽烷、3_曱基丙烯醯 TP070389 15 1375866 氧基丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基甲基二乙氧基 矽烧、3-曱基丙烯醯氧基丙基三乙氧基石夕烷;含丙烯醯氧基之 石夕烧類如3·丙稀醯氧基丙基三甲氧基石夕烧;含胺基官能基之矽 炫類如N-(2-胺基乙基)-3-胺基丙基甲基二甲氧基矽烷、Ν_(2· 胺基乙基>3-胺基丙基三曱氧基石夕烷、Ν_(2_胺基乙基)_3_胺基 丙基二乙氧基矽烧、3-胺基丙基三甲氧基矽烧、3-胺基丙基三 乙氧基矽烷、3-三乙氧基矽烷基-N-(l,3-二甲基亞丁基)丙基 胺、Ν-苯基-3-胺基丙基三甲氧基矽烧、Ν-(乙烯基苄基)_2-胺基 丙基二甲氧基石夕院鹽酸鹽;含脲基官能基之石夕烧類如3-脲基丙 基三乙氧基石夕烷;含氯丙基官能基之矽烷類如3_氯丙基三甲氧 基矽烷;含氫硫基官能基之矽烷類如3_氫硫基丙基甲基二甲氧 基石夕烧、3-氫硫基丙基三甲氧基石夕燒;含硫驗官能基之石夕烧類 如雙(二乙氧基石夕烧基丙基)四硫喊;含異氰酸g旨基官能基之梦 烷類如3-異氫酸酯基丙基三乙氧基矽烷。相對於成分(A)及成 分(B)總重1〇〇重量%計,該接著助劑p)之使用量為〇丨〜5重 量%。In addition to the above-mentioned photoinitiators, it is also possible to use diazobenzaldehyde, azidopurine, bis(2,6-dimethoxybenzohydrazyl) 2,4,4-trimethyl^ Base can oxide, N-phenylthioacridone, triphenylpyrenylperchlorate, and the like, and similar derivatives. These light starters may be used singly or in combination of two or more. The photoinitiator (C) is used in an amount of 5% by weight based on 100% by weight of the total weight of the component (A) and the component (B). The photoresist composition of the present invention may further contain a secondary auxiliary agent, and examples thereof include a decane having a vinyl functional group such as vinyltrichloromethane, vinyltrimethoxyxanthene, vinyltriethoxyxanthene^ An epoxy-containing functional group such as 2-(^,4-epoxycyclohexyl)-ethyltrimethoxydecane, 3-glycidoxypropyltrimethoxyoxy-naphthene, 3-shrinkage Glycidoxypropylmethyldiethoxydecane, 3_glycidoxypropyltriethoxy oxetane; methacryloxyl-containing alkane such as 3-methylpropenyloxypropyl Methyldimethoxydecane, 3_mercaptopropene 醯 070070389 15 1375866 oxypropyltrimethoxydecane, 3-methylpropenyloxypropylmethyldiethoxy oxime, 3-mercaptopropene a methoxy propyl triethoxy oxalate; a ruthenium containing propylene oxime such as 3 · propylene methoxy propyl trimethoxy sulphide; an amine group containing an amine group such as N - (2-Aminoethyl)-3-aminopropylmethyldimethoxydecane, Ν-(2·Aminoethyl>3-Aminopropyltrimethoxy-oxyxanthene, Ν_(2_ Aminoethyl)_3_amine Propyldiethoxy oxime, 3-aminopropyltrimethoxysulfonium, 3-aminopropyltriethoxydecane, 3-triethoxydecyl-N-(l,3-di Methylbutylene)propylamine, fluorenyl-phenyl-3-aminopropyltrimethoxysulfonium, hydrazine-(vinylbenzyl)_2-aminopropyldimethoxyxanthine hydrochloride; a urethane-containing functional group such as 3-ureidopropyltriethoxy oxane; a chloropropyl-functional decane such as 3-chloropropyltrimethoxynonane; a thiol-containing functional group a decane such as 3-hydrothiopropylmethyldimethoxy zeoxime, 3-hydrothiopropyltrimethoxy sulphur; a sulfur-containing functional group such as bis (diethoxy stone) Ethyl propyl) tetrasulfide; a cycloalkane containing an isocyanic acid group, such as 3-isohydroester propyl triethoxy decane, relative to component (A) and component (B) The amount of the auxiliary aid p) used is 〇丨5 to 5% by weight based on the total weight of 1% by weight.

本發明之光阻組成物中又可含有著色劑(E),其可使用具 有耐熱性之有機顏料,例如C.I.顏料黃(Pigment Ye〗〗ow) 83、 C.I.顏料黃110、C.I.顏料黃138、C.I·顏料黃139、C.I.顏料黃 150及C.I.顏料黃155 ; C.I.顏料橙71 ; C.I.顏料紫19及C.L 顏料紫23,C.I.顏料紅48:1、C.I.顏料紅48:2、C.I.顏料紅48:3、 C.I.顏料紅48:4、C.I.顏料紅122·、C.I.顏料紅l7/、c丄顏料紅 202、C.I.顏料紅206、C.I.顏料紅207、C.I.顏料红209、CI顏 料紅224及CI•顏料紅254;以顏料藍 及C.I.顏料藍15:6 ; C.I.顏料綠7及C.I.顏料綠36 ; c丄顏料掠 23及C.I_顏料棕25 ; C.I.顏料黑1及C.I.顏料黑7。(c/為jhe Society f Dyers _ Colourists Co.所制定公佈)。上述著色劑 (E)可單獨使用或可組合兩種以上使用。相對於成分 成 分(B)總重100重量%計’該著色劑之使用量為7〇〜6〇〇 TP070389 16 1375866 重量%。 本發明之光阻組成物中又可含有分散劑(F),其實例包含 例如美國Avecia公司所生產的S32000,其為一種陽離子型聚 (烷基亞胺)與具有游離羧基之羥基硬脂酸酯反應形成之醯胺 型界面活性劑,添加後經砂輪機研磨可幫助著色劑穩定分散。 相對於成分(A)及成分⑻總重100重量%計,該分散劑(F)使用 !為3〜15重量%。The photoresist composition of the present invention may further contain a coloring agent (E), which may use an organic pigment having heat resistance, such as CI Pigment Yellow (Pigment Ye), 83, CI Pigment Yellow 110, CI Pigment Yellow 138, CI·Pigment Yellow 139, CI Pigment Yellow 150 and CI Pigment Yellow 155; CI Pigment Orange 71; CI Pigment Violet 19 and CL Pigment Violet 23, CI Pigment Red 48:1, CI Pigment Red 48:2, CI Pigment Red 48: 3, CI Pigment Red 48:4, CI Pigment Red 122·, CI Pigment Red l7/, c丄 Pigment Red 202, CI Pigment Red 206, CI Pigment Red 207, CI Pigment Red 209, CI Pigment Red 224, and CI•Pigment Red 254; Pigment Blue and CI Pigment Blue 15:6; CI Pigment Green 7 and CI Pigment Green 36; c丄 Pigment Grab 23 and C.I_Pigment Brown 25; CI Pigment Black 1 and CI Pigment Black 7. (c/ is an announcement made by jhe Society f Dyers _ Colourists Co.). The above colorants (E) may be used singly or in combination of two or more. The amount of the coloring agent used was 7 〇 to 6 〇〇 TP070389 16 1375866% by weight based on the total weight of the component (B). The photoresist composition of the present invention may further contain a dispersing agent (F), and examples thereof include, for example, S32000 produced by Avecia, Inc., which is a cationic poly(alkylimine) and a hydroxystearic acid having a free carboxyl group. The indole-type surfactant formed by the ester reaction, after being added and grinded by a grinder, can help the colorant to stably disperse. The dispersant (F) is used in an amount of 3 to 15% by weight based on 100% by weight of the total weight of the component (A) and the component (8).

‘本發明之光阻組成物中,視需要亦可包含溶劑(G),係用 以獲知保持液態並控制組成物在適於喷霧之黏度。所用的溶劑 只要疋可溶解或分散上述組成物中所含之成分、不參與反應且 具有適當揮發性即可。The photoresist composition of the present invention may optionally contain a solvent (G) for knowing that it remains liquid and controls the viscosity of the composition at a suitable spray. The solvent to be used is that the hydrazine can dissolve or disperse the components contained in the above composition, does not participate in the reaction, and has appropriate volatility.

一 y使用的溶劑(g)舉例如:(聚)伸烷二醇單烷基醚如乙 二醇單甲基趟、乙二醇單乙基越、乙二醇單正丙基趟、乙二醇 單士丁基醚、二乙二醇單甲基醚、二乙二醇單乙基醚、二乙二 醇基鱗、二乙二醇單正丁基趟、三乙二醇單甲基喊、三 ^二醇單乙基醚、丙二醇單曱基醚、丙二醇單乙基醚、丙二 單士丙基醚、丙二醇單正丁基醚、二丙二醇單f基醚、二丙二 醇,乙細、二丙二醇單正丙基㈣、二丙二醇單正丁基驗、三 ,二醇單甲基醚以及三丙二醇單乙基酸;(聚)伸燒二醇單燒^ 鱗乙酸自旨,,乙二料甲細乙_旨、乙二醇單乙基鱗乙酸 酯、=二醇單甲基趟乙酸醋及丙二醇單乙基謎乙酸醋,·其他如 基醚、二乙二醇甲基乙基醚、二乙二醇二乙基醚 及四虱咬喃_類’·峨例如甲基乙基酮、環己酮、2_庚嗣及 ;乳^烧醋類如2•經基丙酸甲醋及2_經基丙酸乙醋;醋 =3 2-祕-2-甲基丙酸乙醋、3_甲氧基丙酸甲醋、3_〒氧基 ,乙酯、3·乙氧基丙酸甲g旨、·3_乙氧基 、2傭3_甲基丁酸甲醋、乙酸S ^丙酸3_甲基_3_甲氧基丁基醋、乙酸乙®旨、 乙I正丁 1日、乙酸異丁醋、甲酸異摘、乙酸異摘、丙酸正 TP070389 17 1375866 丁酯、丁酸異丙酯、丁酸乙酯、丁酸正丁酯、丙酮酸甲酯、丙 酮酸乙酯、丙酮酸正丙酯、乙醯乙酸曱酯、乙醯乙酸乙酯及 2-氧代丁酸乙酯;芳香族碳氫化物如曱笨及二曱苯;醯胺類如 N-甲基啦咯院酮(NMP)、N,N-二甲基甲醯胺及N,N-二曱基乙 醯胺等。 亡述溶劑(G)可單獨使用或組合兩種以上使用。溶劑之 添加量並無特別限制’只要可達所需黏度即可。相對於成分(A) 及成分(B)總重100重量%計,溶劑(G) 一般較好使用量為 200〜2500重量%。,本文中所謂溶劑(G)的量係包含額外添 加的溶劑以及聚胺酯(A)以及著色劑(E)中原本所存在之溶劑 量的總計。 本發明將以下列實施例以進一步說明本發明,惟該等實施 例僅用以說明本發明而不用以限制本發明之範圍。 下列實施例中,所用之二苯基甲烷二異氰酸酯 (DiPhenylmethaneDiisocyanate,簡稱MDI)為購自 BASF 公司; 其中聚丙二醇(Polypropylene GlyC〇l,簡稱 PPG) PPG4 為購自穩好高分子化學工業(股)公司,分子量為100〇克/莫 耳;聚己内酯二醇(Polycaprolactone diol,簡稱 PCL di〇l)CAPA®2101A為SOLVAY公司產品,分子量約為1000克 /莫耳’羥價為110毫克KOH/克;聚碳酸酯二醇(p〇lycarb〇nate dio卜簡稱PC diol) PC-diol-1000為購自日本旭化成公司之產 品’分子量約為1000克/莫耳’羥價為1〇〇〜12〇毫克KOH/克; 聚四甲基趟二醇(PolyTetramethylene-ether-Glycol,簡稱 PTMEG) PTMEG- 1000為BASF公司產品,分子量約為1000 克/莫耳,羥價為107〜118毫克KOH/克;、為具有二個羥基之幾 酸化合物的二(經甲基)丙酸(Dimethylol propionic acid,簡稱 DMPA)係蹲自Lancaster產品,為含環氧基之丙稀酸醋單體的 甲基丙浠酸縮水甘油醋(Glycidol methacrylate,簡稱GMA)為 Dow CHEMICAL公司產品,分子量為142克/莫耳;而所用之 TP070389 18 1375866 酸酐化合物四SL鄰本一甲酸Sf (Tetrahydrophthalicanhydride, 簡稱THPA)係購自Aldrich公司;另一酸酐化合物偏苯三甲 酸酐(Trimellitic anhydride,簡稱 TMA )則購自 Aldrich 公司; 另外所用之溶劑丙一醇早甲基越乙酸醋^pr0pylene GlycolThe solvent (g) used in one y is, for example, a (poly)alkylene glycol monoalkyl ether such as ethylene glycol monomethyl hydrazine, ethylene glycol monoethyl phthalate, ethylene glycol mono-n-propyl hydrazine, ethylene two Alcohol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol based scale, diethylene glycol mono-n-butyl anthracene, triethylene glycol monomethyl group , triglycol monoethyl ether, propylene glycol monodecyl ether, propylene glycol monoethyl ether, propylene di monopropyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol mono-f-ether, dipropylene glycol, Dipropylene glycol mono-n-propyl (tetra), dipropylene glycol mono-n-butyl test, tri-, diol monomethyl ether and tripropylene glycol monoethyl acid; (poly) extended diol diol single burning squamous acid from the purpose,甲甲乙乙, 乙 glycol monoethyl sulphate acetate, = diol monomethyl hydrazine acetate vinegar and propylene glycol monoethyl acetal acetate, · other such as phenyl ether, diethylene glycol methyl ethyl Ether, diethylene glycol diethyl ether and tetraterpene ketones such as methyl ethyl ketone, cyclohexanone, 2 g gem and emulsified vinegar such as 2 • thioglycolate Vinegar and 2_acetic acid ethyl vinegar; vinegar = 3 2- -2-methylpropionic acid ethyl vinegar, 3-methoxypropionic acid methyl vinegar, 3- methoxy group, ethyl ester, 3 · ethoxy propionic acid methyl ke, · 3 ethoxy, 2 maid 3 _ Methyl butyl butyrate, acetic acid S ^ propionic acid 3 - methyl _ 3 - methoxy butyl vinegar, acetic acid ethyl acetate, ethylene I n = 1 day, acetic acid isobutyl vinegar, formic acid equivalent, acetic acid Propionic acid TP070389 17 1375866 Butyl ester, isopropyl butyrate, ethyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, decyl acetate, B Ethyl acetate and ethyl 2-oxobutanoate; aromatic hydrocarbons such as anthraquinone and diphenylbenzene; guanamines such as N-methyl benzoprotamine (NMP), N, N-dimethyl Formamide and N,N-dimercaptoacetamide and the like. The solvent (G) may be used singly or in combination of two or more. The amount of the solvent to be added is not particularly limited as long as the desired viscosity can be obtained. The solvent (G) is generally preferably used in an amount of from 200 to 2,500% by weight based on 100% by weight based on the total weight of the component (A) and the component (B). The amount of the solvent (G) herein is the total amount of the solvent to be added and the amount of the solvent originally present in the polyurethane (A) and the color former (E). The invention is further illustrated by the following examples, which are not intended to limit the scope of the invention. In the following examples, DiPhenylmethaneDiisocyanate (MDI) was purchased from BASF Corporation; Polypropylene GlyC〇l (PPG) PPG4 was purchased from Stable Polymer Chemical Industry Co., Ltd. The company has a molecular weight of 100 gram/mole; polycaprolactone diol (PCL di〇l) CAPA® 2101A is a product of SOLVAY with a molecular weight of about 1000 g/mole and a hydroxyl value of 110 mg KOH. / gram; polycarbonate diol (p〇lycarb〇nate diob referred to as PC diol) PC-diol-1000 is a product purchased from Japan Asahi Kasei Corporation 'molecular weight is about 1000 g / mol' hydroxy price is 1 〇〇 ~ 12〇 KOH/g; PolyTetramethylene-ether-Glycol (PTMEG) PTMEG-1000 is a product of BASF with a molecular weight of about 1000 g/mole and a hydroxyl value of 107-118 mg KOH/ a dimethylol propionic acid (DMPA) system derived from a Lancaster product, which is a methyl group of an epoxy group-containing acetoacetate monomer. Propionate glycidol vinegar (Gl Ycidol methacrylate (GMA) is a product of Dow Chemical Company with a molecular weight of 142 g/mole; and TP070389 18 1375866 anhydride compound SiSL (Tetrahydrophthalicanhydride, THPA) is purchased from Aldrich; The compound trimellitic anhydride (TMA) was purchased from Aldrich; the other solvent used was propanol early methyl acetate vinegar ^pr0pylene Glycol

Monomethyl Ether Acetate,簡稱 pma)則為 DOW CHEMICAL 公司的產品,溶劑1^-甲基11比嘻咬酮讲_111她丫1_2*^111〇而〇116, 簡稱NMP)則為BASF公司的產品。 [實施例1] 將31.9克MDI(二苯基甲烷二異氰酸醋)及80克PMA(丙 二醇單甲基醚乙酸酯)置於500mL之四頸可分離式反應瓶中, 使溫度升溫至60°C並以機械攪拌器攪拌直至MDI完全溶解。 隨後,開始滴入事先已完全混合於50克NMP(N-甲基吼洛咬 酮)之16.2克DMPA〇(經甲基)丙酸)及克PPG-1000 (分 子里為1000)’並待滴完後以FTIR (傅立葉轉換紅外線光譜 儀)判斷NCO (異氰酸酯官能基)是否已完全反應。反應^ 全後’最後升溫至100。(:並加入8.3克GMA(甲基丙烯酸縮水 甘油醋)’維持溫度直至溶液酸價逹約18 mg KOH/g時,再加 入6.7克TMA (偏苯三甲酸酐)且升高反應溫度至11〇。〇及J 小時後即完成合成,此時溶液酸價約為39 mg KOH/g。獲得本 發明之可輻射固化顯影之聚胺酯1,其由下述之重複單元以無 規排列所構成,且以GpC (凝膠滲透層析)所測定之重量^ 均分子量(Mw)為8,700。 TP070389 19 1375866Monomethyl Ether Acetate (pma) is a product of DOW CHEMICAL. The solvent 1^-methyl 11 is more than the bite ketone. _111 her 丫1_2*^111〇 and 〇116, referred to as NMP) is the product of BASF. [Example 1] 31.9 g of MDI (diphenylmethane diisocyanate) and 80 g of PMA (propylene glycol monomethyl ether acetate) were placed in a 500 mL four-neck separable reaction flask to raise the temperature. Stir to 60 ° C with a mechanical stirrer until the MDI is completely dissolved. Subsequently, the instillation of 16.2 g of DMPA 〇 (methyl) propionic acid and PG PPG-1000 (1000 in the molecule) which had been thoroughly mixed with 50 g of NMP (N-methyl guanoxarone) was started. After the completion of the dropping, it was judged whether or not the NCO (isocyanate functional group) was completely reacted by FTIR (Fourier Transform Infrared Spectrometer). After the reaction is completed, the temperature is finally raised to 100. (: and add 8.3 g of GMA (glycidyl methacrylate)' to maintain the temperature until the acid value of the solution is about 18 mg KOH/g, then add 6.7 g of TMA (trimellitic anhydride) and raise the reaction temperature to 11 〇. The synthesis is completed after 小时 and J hours, at which time the acid value of the solution is about 39 mg KOH/g. The radiation curable developed polyurethane 1 of the present invention is obtained, which is composed of the following repeating units in a random arrangement, and The weight average molecular weight (Mw) determined by GpC (gel permeation chromatography) was 8,700. TP070389 19 1375866

(a) u) B 0(N68sz.odl [實施例2] 將31.9克MDI及80克PMA置於500mL之四頸可分離 式反應瓶中’使溫度升溫革60°C並以機械攪拌器擾拌直至 MDI完全溶解。隨後,開始滴入事先已完全混合於5〇克N^p 之 16.2 克 DMPA 及 13.6 克 CAPA®2101A (分子量為 1000), 並待滴完後以FTIR判斷NCO是否完全反應。反應完全後, 最後升溫至100°C並加入8.3克GMA,維持溫度直至溶液酸價 達約18mgKOH/g時,再加入6.7克TMA且升高反應溫度至 110 C及1小時後即完成合成,此時溶液酸價約為39 mg KOH/g。獲得本發明之可輻射固化顯影之聚胺酯2,且以GPC (凝膠滲透層析)所測定Mw為芬〇〇〇。 [實施例3] 將31.9克MDI及80克PMA置於500mL之四頸可分離 式反應瓶中,使溫度升溫至60°C並以機械攪拌器擾拌直至 MDI完全溶解。隨後’開始滴入事先已完全混合於邓克^^ 之16.2克DMPA及13.6克PC-diol (分子量為1000),並待滴 完後以FTIR判斷是否NCO已完全反應。反應完全後,最後 升溫至100°C並加入8.3克GMA,維持溫度直至溶液酸價達約 18 mg KOH/g時,再加入6.7克TMA且升高反應溫度至u〇 及1小時後即完成合成,此時溶液酸價約為39mgKOH/g。 獲得本發明之可輻射固化顯影之聚胺酯3,且以GPC (凝膠渗 透層析)所測定Mw為45,000。 [實施例4] 將31.9克MDI及80克PMA置於500mL之四頸可分離 式反應瓶中,使溫度升溫至60°C並以機械攪拌器攪拌直至 MDI完全溶解。隨後’開始滴入事先已完全混合於50克]S|]Mp 之16.2克DMPA及13.6克PTMEG (分子量為1〇〇〇) ’並待 滴完後以FTIR判斷是否NCO已完全反應。反應完全後,最 TP070389 21 1375866 後升溫至100°C並加入8.3克GMA,維持溫度直至溶液酸價達 約18mgKOH/g時,再加入6.7克TMA且升高反應溫度至n〇 °0及1小時後即完成合成,此時溶液酸價約為39mgKOH/g。 獲得本發明之可輻射固化顯影之聚胺酯4,且以GPC (凝膠滲 透層析)所測定Mw為68,000。 [實施例5] 將31克MDI及80克PMA置於500mT.之四頸可分離 式反應瓶中,使溫度升溫至60°C並以機械攪拌器攪拌直至 MDI完全溶解。隨後,開始滴入事先已完全混合於5〇克NMP 之16.2克DMPA.及13.6克PPG-1000(分子量為1〇〇〇),並待滴 完後以FTIR判斷NCO是否完全反應。反應完全後,最後升 溫至100°C並加入8.3克GMA,維持溫度直至溶液酸價達約 18 mg KOH/g時,再加入5.3克THPA (四氫鄰苯二曱酸酐) 且升高反應溫度至11(TC及1小時後即完成合成,此時溶液酸 價約為29 mg KOH/g。獲得本發明之可輻射固化顯影之來胺酯 5,且以GPC (凝膠滲透層析)所測定Mw為11,000。(a) u) B 0 (N68sz.odl [Example 2] 31.9 g of MDI and 80 g of PMA were placed in a 500 mL four-neck separable reaction flask. The temperature was raised to 60 ° C and disturbed with a mechanical stirrer. Mix until the MDI is completely dissolved. Then, start to drip 16.2 g of DMPA and 13.6 g of CAPA® 2101A (molecular weight 1000) which have been thoroughly mixed before 5 g of N^p, and judge whether the NCO is completely reacted by FTIR after the completion of the drop. After the reaction is completed, the temperature is finally raised to 100 ° C and 8.3 g of GMA is added, and the temperature is maintained until the acid value of the solution reaches about 18 mg KOH/g, and then 6.7 g of TMA is added and the reaction temperature is raised to 110 C and 1 hour to complete the synthesis. At this time, the acid value of the solution was about 39 mg KOH/g. The radiation-curable developed polyurethane 2 of the present invention was obtained, and Mw was determined by GPC (gel permeation chromatography) as fentanyl. [Example 3] Place 31.9 g of MDI and 80 g of PMA in a 500 mL four-neck separable reaction flask, warm the temperature to 60 ° C and stir with a mechanical stirrer until the MDI is completely dissolved. Then 'start the infusion before it is completely mixed Dunke ^^ of 16.2 g of DMPA and 13.6 g of PC-diol (molecular weight of 1000), and judged by FTIR after dripping No NCO has completely reacted. After the reaction is completed, finally heat up to 100 ° C and add 8.3 g of GMA, maintain the temperature until the acid value of the solution reaches about 18 mg KOH / g, then add 6.7 g of TMA and raise the reaction temperature to u〇 The synthesis was completed after 1 hour, at which time the acid value of the solution was about 39 mgKOH/g. The radiation-curable developed polyurethane 3 of the present invention was obtained, and the Mw was 45,000 as determined by GPC (gel permeation chromatography). 4] Place 31.9 g of MDI and 80 g of PMA in a 500 mL four-neck separable reaction flask, warm the temperature to 60 ° C and stir with a mechanical stirrer until the MDI is completely dissolved. Then 'start the infusion before mixing completely At 50 g]S|]Mp, 16.2 g DMPA and 13.6 g PTMEG (molecular weight 1 〇〇〇)' and after the completion of the drop, judge whether the NCO has completely reacted by FTIR. After the reaction is completed, the temperature is raised to TP070389 21 1375866. At 100 ° C and adding 8.3 g of GMA, maintaining the temperature until the acid value of the solution reaches about 18 mg KOH / g, adding 6.7 g of TMA and increasing the reaction temperature to n 〇 ° 0 and 1 hour, the synthesis is completed, at this time the acid value of the solution About 39 mg KOH / g. The radiation curable developed polyurethane of the present invention is obtained. 4, and the Mw was 68,000 as determined by GPC (gel permeation chromatography). [Example 5] 31 g of MDI and 80 g of PMA were placed in a four-neck separable reaction flask of 500 mT, and the temperature was raised to 60. °C and stir with a mechanical stirrer until the MDI is completely dissolved. Subsequently, 16.2 g of DMPA. and 13.6 g of PPG-1000 (having a molecular weight of 1 Å) which had been completely mixed with 5 g of NMP beforehand were started to be dropped, and it was judged by FTIR whether or not the NCO was completely reacted after the dropwise addition. After the reaction is completed, the temperature is finally raised to 100 ° C and 8.3 g of GMA is added, and the temperature is maintained until the acid value of the solution reaches about 18 mg KOH / g, and then 5.3 g of THPA (tetrahydrophthalic anhydride) is added and the reaction temperature is raised. Synthesis was completed to 11 (TC and 1 hour later, at which time the acid value of the solution was about 29 mg KOH/g. The radiation-curable developed amine ester 5 of the present invention was obtained, and GPC (gel permeation chromatography) was used. The Mw was determined to be 11,000.

TP070389 22 1375866TP070389 22 1375866

1375866 [實施例6] 將31.9克MDI及80克PMA置於500mL之四頸可分離 式反應瓶_,使溫度升溫至60°C並以機械攪拌器擾拌直至 MDI完全溶解。隨後’開始滴入事先已完全混合於5〇克nmp 之 16.2 克 DMPA 及 13.6 克 CAPA®2101A (分子量為 1000), 並待滴完後以FTIR判斷是否NCO已完全反應。反應完全後, 最後升溫至1〇〇°C並加入8.3克GMA’維持溫度直至溶液酸價 達約18 mg KOH/g時’再加入5.3克THPA且升高反應溫度至 110°C及1小時後即完成合成,此時溶液酸價約為29 mg KOH/g。獲得本發明之可輻射固化顯影之聚胺酯6,且以GPc (凝膠滲透層析)所測定Mw為28,500。 [實施例7] 將31.9克MDI及80克PMA置於500mL之四頸可分離 式反應瓶中’使溫度升溫至60°C並以機械攪拌器攪拌直至 MDI完全溶解。隨後’開始滴入事先已完全混合於5〇克NMP 之16.2克DMPA及13.6克PC-diol (分子量為1〇〇〇),並待滴 完後以FTIR判斷是否NCO已完全反應。反應完全後,最後 升溫至100°C並加入8.3克GMA’維持溫度直至溶液酸價達約 18 mg KOH/g時,再加入5.3克ΤΕΡΑ且升高反應溫度至11〇 °〇及1小時後即完成合成,此時溶液酸價約為29 mg KOH/g。 獲得本發明之可輻射固化顯影之聚胺酯7,且以GPC (凝膠滲 透層析)所測定Mw為43,000。| [實施例8] 將31.9克MDI及80克PMA置於500mL之四頸可分離 式反應瓶中’使溫度升溫至6(TC並以機械攪拌器攪拌直至 MDI完全溶解。P遺後,開始滴入事先已完全混合於50克 之16.2克DMPA及13.6克PTMEG (分子量為1000),並待 滴完後以FTIR判斷是否NC0已完全反應。反應完全後,最 後升溫至100°C並加入8.3克GMA,維持溫度直至溶液酸價達 TP070389 24 1375866 約1。8 mg KOH/g時,再加入5.3克ΧΗΡΑ且升高反應溫度至 ii〇°c及1小時後即完成合成,此時溶液酸價約為29 mg KOH/g。獲得本發明之可輻射固化顯影之聚胺酯8,且以Gpc (凝膠滲透層析)所測定Mw為59,00(^ [實施例9至16] 將上述實施例1、2、3、4、5、6、7及8中所製得之聚胺 醋卜2、3、4、5、6、7及8以下表丨及表2所示的量及成份 中所示的量係使成份(A)及成分(B)的合計量為1〇〇重量% 表示,且其餘成份的量係相對於⑷及⑻總重1〇〇重量%計) 經充分混合後’經砂輪機研磨辅以適當分散劑將粒徑分佈控制 在200nm以下’獲得光阻組成物j、2、3、4、5、6、工 表1 '1375866 [Example 6] 31.9 g of MDI and 80 g of PMA were placed in a 500 mL four-neck separable reaction flask, and the temperature was raised to 60 ° C and scrambled with a mechanical stirrer until the MDI was completely dissolved. Subsequently, the dropwise addition of 16.2 g of DMPA and 13.6 g of CAPA® 2101A (molecular weight of 1000) which had been thoroughly mixed in advance to 5 g of nmp was started, and after the completion of the dropping, the FTIR was used to judge whether or not the NCO was completely reacted. After the reaction is completed, the temperature is finally raised to 1 ° C and 8.3 g of GMA' is added to maintain the temperature until the acid value of the solution reaches about 18 mg KOH/g. 'Additional 5.3 g of THPA and raise the reaction temperature to 110 ° C and 1 hour. The synthesis is completed immediately after the acid value of the solution is about 29 mg KOH/g. The radiation curable developed polyurethane 6 of the present invention was obtained, and the Mw was 28,500 as determined by GPC (gel permeation chromatography). [Example 7] 31.9 g of MDI and 80 g of PMA were placed in a 500 mL four-neck separable reaction flask. The temperature was raised to 60 ° C and stirred with a mechanical stirrer until the MDI was completely dissolved. Subsequently, 16.2 g of DMPA and 13.6 g of PC-diol (having a molecular weight of 1 Å) which had been previously thoroughly mixed with 5 g of NMP were added dropwise, and after the completion of the dropping, it was judged by FTIR whether or not the NCO was completely reacted. After the reaction was completed, the temperature was finally raised to 100 ° C and 8.3 g of GMA' was added to maintain the temperature until the acid value of the solution reached about 18 mg KOH / g, and then 5.3 g of hydrazine was added and the reaction temperature was raised to 11 ° C and 1 hour later. That is, the synthesis is completed, and the acid value of the solution is about 29 mg KOH/g. The radiation curable developed polyurethane 7 of the present invention was obtained, and the Mw was 43,000 as determined by GPC (gel permeation chromatography). [Example 8] 31.9 g of MDI and 80 g of PMA were placed in a 500 mL four-neck separable reaction flask. The temperature was raised to 6 (TC and stirred with a mechanical stirrer until the MDI was completely dissolved. After P was started, The drops were previously thoroughly mixed with 50 g of 16.2 g of DMPA and 13.6 g of PTMEG (molecular weight of 1000), and after the completion of the dropwise addition, it was judged by FTIR whether or not NC0 was completely reacted. After the reaction was completed, the temperature was finally raised to 100 ° C and 8.3 g was added. GMA, maintaining the temperature until the acid value of the solution reaches TP070389 24 1375866, about 1.8 mg KOH/g, adding 5.3 g of hydrazine and increasing the reaction temperature to ii 〇 ° C and 1 hour later, the synthesis is completed. Approximately 29 mg KOH/g. The radiation curable developed polyurethane 8 of the present invention was obtained, and the Mw was determined by Gpc (gel permeation chromatography) to be 59,00 (^ [Examples 9 to 16]. 1, 2, 3, 4, 5, 6, 7, and 8 of the amount of polyamine vinegar 2, 3, 4, 5, 6, 7, and 8 and the amounts and ingredients shown in Table 2 The amount shown is such that the total amount of the component (A) and the component (B) is 1% by weight, and the amount of the remaining components is 1% by weight relative to the total weight of (4) and (8). ) Was sufficiently mixed 'by grinding the grinding wheel with appropriate control of the particle size distribution dispersant 200nm or less' obtained resist composition j, 2,3,4,5,6, Table 1 workers'

TP070389 25 1375866 表2 實施例13 實施例14 實施例15 實施例16 光阻組成 物5 光阻組成 物6 光阻組成 物7 光阻組成 物8 聚胺酯5 ㈧ 67 - _ . 聚胺酯6 - 67 一 聚胺酯7 - - 67 聚胺酯8 - - 67 IPGDA (B) 33 33 33 33 Igacure 907 (C) 16.7 16.7 16.7 16.7 KBM503 (D) 3.3 3.3 3.3 3.3 C.I.顏料 綠36 (E) 150 150 150 150 S32000 (F) 10 10 10 10 PMA (G) 800 800 800 800 黏度(cps/25°C) 6.2 7.9 11.3 13.8 註:TP070389 25 1375866 Table 2 Example 13 Example 14 Example 15 Example 16 Photoresist composition 5 Photoresist composition 6 Photoresist composition 7 Photoresist composition 8 Polyamine 5 (8) 67 - _ . Polyurethane 6 - 67 Polyurethane 7 - - 67 Polyurethane 8 - - 67 IPGDA (B) 33 33 33 33 Igacure 907 (C) 16.7 16.7 16.7 16.7 KBM503 (D) 3.3 3.3 3.3 3.3 CI Pigment Green 36 (E) 150 150 150 150 S32000 (F) 10 10 10 10 PMA (G) 800 800 800 800 Viscosity (cps/25°C) 6.2 7.9 11.3 13.8 Note:

(C)、(D)、(E)、(F)、(G)重量%皆是相對於(A)+(B)成分之總重 100重量%計(即以(A)+(B)成分做為基準時的比例)。 TPGDA :三丙二醇二丙烯酸酯,新力美科技股份有限公司產 品。 KBM503 : 3-甲基丙烯醯氧基丙基三乙氧基矽烷,日本信越公 司產品。(C), (D), (E), (F), (G)% by weight are based on 100% by weight of the total weight of the component (A) + (B) (ie, (A) + (B) The ratio of the ingredients as a benchmark). TPGDA: Tripropylene glycol diacrylate, manufactured by Xinlimei Technology Co., Ltd. KBM503: 3-methacryloxypropyltriethoxydecane, a product of Japan Shin-Etsu Corporation.

Igacure 907 : 2-甲基-(4-甲基噻吩基)-2-嗎啉基·丙小酮,ciba 公司產品。 S32000 :分散劑’為Avecia公司產品 PMA :丙二醇單甲基醚乙酸醋。 試驗例-耐化性測試、耐熱性測試及耐黃變性試驗 TP070389 26 1375866Igacure 907 : 2-methyl-(4-methylthienyl)-2-morpholinylpropanone, product of ciba. S32000: Dispersant' is a product of Avecia PMA: propylene glycol monomethyl ether acetate vinegar. Test Example - Chemical resistance test, heat resistance test and yellowing resistance test TP070389 26 1375866

Lu

將上述所得之光阻組成物1、2、3、4、5、6、7及8以厚 ,1〜3μιη塗佈在玻璃片上,經預烘烤1〇〇〜3〇〇秒, 、·! 50〜200mJ/Cm2曝光’經Na〇H顯影液顯影2〇〜15〇秒後,再 ^ 200〜250°C進行後烘烤20〜40分鐘,並將經塗佈之玻璃片含 汉在各種溶劑(8G°C水、丙二醇單甲基哪⑽、Nn比咯燒 ,_〇>)或氫氧化四甲銨(TMAH) 2.38%)中歷時5〜2〇分鐘(即 為耐化性測試)或暴露在各種環境下(空氣中17〇。〇,1〇小時, 即為耐熱性測試)’測試其耐黃變性,其結果列於下表 3及表4。 、 表3 光阻組成物 4 光阻組成物 1 (△E*ab) 光阻組成物 2 (△E*ab) 光阻組成物 3 (△E*ab)The photoresist compositions 1, 2, 3, 4, 5, 6, 7, and 8 obtained above are applied to a glass sheet in a thickness of 1 to 3 μm, and pre-baked for 1 to 3 seconds, ! 50~200mJ/cm2 exposure 'developed by Na〇H developer 2〇~15〇 second, then ^200~250°C for post-baking 20~40 minutes, and the coated glass piece contains various kinds in Han The solvent (8G °C water, propylene glycol monomethyl (10), Nn ratio argon, _ 〇 gt) or tetramethylammonium hydroxide (TMAH) 2.38%) lasted 5~2 〇 minutes (that is, the chemical resistance test) ) or exposed to various environments (17 〇 in air, 〇, 1 hour, that is, heat resistance test) 'test its yellowing resistance, the results are shown in Table 3 and Table 4 below. Table 3 Photoresist composition 4 Photoresist composition 1 (ΔE*ab) Photoresist composition 2 (ΔE*ab) Photoresist composition 3 (△E*ab)

表4 光阻組成物 5 (△E*ab) 光阻組成物 6 (△E*ab) 光阻組成物 7 (△E*ab) 光阻組成物 8 80°C水中 0.96 0.63 0.61 1 03 PM 1.04 1.38 1.25 1 78 NMP 1.16 1.55 1.49 1 68 TMAH2.38% 0.52 0.65 0.61 1 49 空氣中170°C 0.60 0.71 0.62 1.08 TP070389 27 rI375866 註:上述耐黃變性之AE*ab值,係以大塚電子製分光測光器 MCPD-3000所測定对化性及耐熱性測試前後之分光特性(由 L*a*b*表示系之色差△Ebb值)。 由上述試驗可知,本發明的實施例1〜8所得聚胺酯ι〜8 所調配之光阻組成物1〜8中,該聚胺酯比例雖僅占光阻組成物 總重量之10wt%’但聚胺酯1〜8本身結構中所具有的多個胺酯 基(提供氫鍵)及丙烯酸官能基卻可提供極佳的耐熱性、耐化 性及耐黃變性(即S3)。另外,在整個系統中均呈單一 相,顯示本發明之光阻組成物有很高相容性。 依據本發明之聚胺酯為可輻射固化高度交聯之樹脂,使用 該樹脂作為光阻組成物的主要成分,可將顏料牢固在玻璃基板 上’可提升成膜後之耐化性以及耐熱性。 另外,若同樣地將本發明之可輻射固化之高度交聯聚胺酯 樹脂作為光阻液的主要成分且又配合適當分散劑及接著助 劑’經低溫(<150°C)熟成硬化製程後,即先在70〜1〇〇。(:預 烘烤100〜300秒~>50〜200mJ/cm2曝光+NaOH顯影液顯影 20〜150秒後+再經50〜200mJ/cm2曝光·>最後以150。(:進行後 洪烤20〜60分鐘’其光阻組成物固化後具有可撓性質並可成膜 於塑膠基板(如聚酿亞胺(PI)、聚驗硬(PES)膜、聚碳酸酯(pc) 膜)上。 【圖式簡單說明】 【主要元件符號說明】 TP070389 28Table 4 Photoresist composition 5 (ΔE*ab) Photoresist composition 6 (ΔE*ab) Photoresist composition 7 (ΔE*ab) Photoresist composition 8 80 ° C water 0.96 0.63 0.61 1 03 PM 1.04 1.38 1.25 1 78 NMP 1.16 1.55 1.49 1 68 TMAH2.38% 0.52 0.65 0.61 1 49 170°C in air 0.60 0.71 0.62 1.08 TP070389 27 rI375866 Note: The above AE*ab values for yellowing resistance are classified by Otsuka Electronics. The spectral characteristics of the photodetector MCPD-3000 measured before and after the test for chemotaxis and heat resistance (the color difference ΔEbb value represented by L*a*b*). According to the above test, in the photoresist compositions 1 to 8 prepared by the polyamine esters ι 8 obtained in Examples 1 to 8 of the present invention, the ratio of the polyurethane is only 10% by weight based on the total weight of the photoresist composition, but the polyurethane 1~ The multiple amine ester groups (providing hydrogen bonds) and acrylic acid functional groups in the structure of 8 itself provide excellent heat resistance, chemical resistance and yellowing resistance (i.e., S3). In addition, it has a single phase throughout the system, indicating that the photoresist composition of the present invention has high compatibility. The polyurethane according to the present invention is a radiation-curable highly crosslinked resin, and the resin is used as a main component of the photoresist composition, and the pigment can be firmly adhered to the glass substrate to improve the chemical resistance and heat resistance after film formation. In addition, if the radiation-curable highly cross-linked polyurethane resin of the present invention is similarly used as a main component of a photoresist liquid, and further with a suitable dispersant and a subsequent auxiliary agent, after a low temperature (<150 ° C) ripening hardening process, That is, first at 70~1〇〇. (: pre-bake 100~300 seconds~> 50~200mJ/cm2 exposure + NaOH developer development 20~150 seconds + then 50~200mJ/cm2 exposure·> Finally to 150. (: After the flooding 20~60 minutes' The photoresist composition is flexible and can be formed on a plastic substrate (such as polyacrylonitrile (PI), polysulfide (PES) film, polycarbonate (pc) film). [Simple description of the diagram] [Explanation of main component symbols] TP070389 28

Claims (1)

/^866 K〇H/g 〇 . 可輻射ID化顯影之光阻組成物,其包括下列做為有效成 刀.(A)如申請專利範圍第1至3項中任一項之聚胺醋、⑻ 丙,酸酯單體及(C)光起始劑;其中該聚胺酯(A)與該丙烯酸 醋單體(B)的重量比例((A) : (B))為40〜90 : 10-60 ;且相對於 成分(A)及成分(B)總重1〇〇重量%計,該光起始劑之使用 量為1〜50重量%。/^866 K〇H/g 〇. A radiation-resistant ID-developing photoresist composition comprising the following as an effective knife-forming. (A) Polyamine vinegar according to any one of claims 1 to 3. And (8) a propane monomer, and (C) a photoinitiator; wherein the weight ratio of the polyurethane (A) to the acryl monomer (B) ((A): (B)) is 40 to 90: 10 -60; and the photoinitiator is used in an amount of 1 to 50% by weight based on the total weight of the component (A) and the component (B) of 1% by weight. 5·如申請專利範圍第4項之光阻組成物,其進一步包括接著助 劑(D),相對於成分(A)及成分(B)總重100奎量%計,該接著 助劑(D)之使用量為0.1〜5重量%。 6.如申請專利範圍第4項之光阻組成物’其進一步包括著色劑 (E) ,相對於成分(A)及成分(B)總重1〇〇重量%計,該著色劑 (E)之使用量為7〇〜6〇〇重量% ° 7.如申請專利範圍第4項之光阻組成物,其進一步包括分散劑 (F) ,相對於成分(A)及成分(B)總重100重量%計,該分散劑 (F)使用量為3〜15重量%。 如申請專利範圍第4項之光阻組成物,其進一步包括溶劑 • (G)相對於成分(A)及成分⑼總重卿重量%計,溶劑⑹ 使用量為200〜2500重量%。5. The photoresist composition according to item 4 of the patent application, further comprising a further auxiliary agent (D), which is based on a total weight of the component (A) and the component (B) of 100% by mass, and the auxiliary agent (D) The amount used is 0.1 to 5% by weight. 6. The photoresist composition of claim 4, which further comprises a colorant (E), the colorant (E) based on the total weight of the component (A) and the component (B): 1% by weight The amount of use is 7〇~6〇〇% by weight. 7. The photoresist composition according to item 4 of the patent application, further comprising a dispersant (F), relative to the total weight of the component (A) and the component (B) The dispersant (F) is used in an amount of from 3 to 15% by weight based on 100% by weight. The photoresist composition of claim 4, which further comprises a solvent. (G) The solvent (6) is used in an amount of 200 to 2500% by weight based on the total weight percent of the component (A) and the component (9). 30 TP07038930 TP070389
TW097102304A 2007-03-21 2008-01-22 Radiation curable and developable polyurethane and radiation curable and developable photoresist composition containing the same TWI375866B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW097102304A TWI375866B (en) 2008-01-22 2008-01-22 Radiation curable and developable polyurethane and radiation curable and developable photoresist composition containing the same
US12/076,597 US7935776B2 (en) 2007-03-21 2008-03-20 Radiation curable and developable polyurethane and radiation curable and developable photo resist composition containing the same
JP2008085525A JP2009173848A (en) 2008-01-22 2008-03-28 Radiation-curable and developable polyurethane and radiation-curable and developable photoresist composition containing the same
KR1020080030094A KR100939137B1 (en) 2008-01-22 2008-04-01 Radiation curable and developable polyurethane and radiation curable and developable photoresist composition containing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097102304A TWI375866B (en) 2008-01-22 2008-01-22 Radiation curable and developable polyurethane and radiation curable and developable photoresist composition containing the same

Publications (2)

Publication Number Publication Date
TW200932829A TW200932829A (en) 2009-08-01
TWI375866B true TWI375866B (en) 2012-11-01

Family

ID=41029283

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097102304A TWI375866B (en) 2007-03-21 2008-01-22 Radiation curable and developable polyurethane and radiation curable and developable photoresist composition containing the same

Country Status (3)

Country Link
JP (1) JP2009173848A (en)
KR (1) KR100939137B1 (en)
TW (1) TWI375866B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110685034B (en) * 2019-11-18 2022-06-03 华峰化学股份有限公司 Preparation method of phenolic yellowing resistant spandex fiber

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3019176B2 (en) * 1992-12-01 2000-03-13 第一工業製薬株式会社 Method for producing radiation-curable polyurethane emulsion composition
DE10357713A1 (en) * 2003-12-09 2005-07-14 Bayer Materialscience Ag coating agents
KR101536366B1 (en) * 2006-11-02 2015-07-13 토요잉크Sc홀딩스주식회사 Photosensitive resin composition, cured product thereof, and method for producing photosensitive resin

Also Published As

Publication number Publication date
KR20090080878A (en) 2009-07-27
JP2009173848A (en) 2009-08-06
KR100939137B1 (en) 2010-01-28
TW200932829A (en) 2009-08-01

Similar Documents

Publication Publication Date Title
KR101804032B1 (en) Acrylate photocurable composition
JP6977662B2 (en) Photosensitive resin composition, cured product and image display device
TWI536104B (en) A photosensitive resin composition, and a color filter and a display device using the same
WO2011162217A1 (en) Colored resin composition, color filter, liquid crystal display device, and organic el display
CN108445713B (en) Photosensitive resin composition, black pixel defining layer using same, and display device
KR20180064354A (en) Colored photosensitive resin composition, color filter and display device
TW202011117A (en) Photosensitive colorant composition, color filter film, and display device comprises a colorant agent, a polymerizable compound, a photopolymerization initiator, and a solvent
JP6095104B2 (en) Active energy ray-curable resin composition, colored spacer for display element, and black matrix
JP7312526B2 (en) Photosensitive resin composition and black pixel defining film and display device using the same
CN104298074A (en) Photosensitive resin composition for formation of transparent pixel, and color filler formed by using photosensitive resin composition
KR102582780B1 (en) Photosensitive resin composition for light-shielding film with the role of spacer, light-shielding film thereof, lcd with that film, and manufacturing process for them
CN105027003A (en) Colored photosensitive composition, color filter and method for producing color filter
JP2017126068A (en) Photosensitive resin composition, film produced therefrom, organic light emission display device comprising the film
KR20180036218A (en) Colorant, colored resin composition comprising the same and color filter
TW200949437A (en) Radiation-sensitive composition for forming coloring layer, color filter and color liquid crystal display element
TWI375866B (en) Radiation curable and developable polyurethane and radiation curable and developable photoresist composition containing the same
KR20170084681A (en) Photosensitive resin composition, film prepared the composition, and organic light emitting display device comprising the film
JP2015022307A (en) Colored photosensitive resin composition, and color filter and display device including the same
TW201039061A (en) Photosensitive composition, and color filter and display device using the same
JP5439937B2 (en) Colored radiation-sensitive composition, color filter, and color liquid crystal display element
TWI353488B (en) Radiation curable and developable polyurethane
JP7366564B2 (en) Red colored resin composition for color filters, red coloring material dispersion for color filters, cured products, color filters, and display devices
KR102371728B1 (en) Colored photosensitive resin composition, color filter prepared by using the same, and display device comprising the color filter
KR20130120394A (en) Photosensitive resin composition
CN114096640A (en) Quantum dot, curable composition including the same, cured layer using the composition, and color filter including the cured layer

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees