1374607 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種壓電發電機之複合壓電構造，特別是關於一種 壓電發電機之複合壓電構造，其利用至少二壓電薄膜層配置於—基板 之二側，以堆疊形成該複合壓電構造。 【先前技術】 一般而言，壓電材料〔piezoelectric material〕可產生正壓電效廊1374607 IX. Description of the Invention: Technical Field of the Invention The present invention relates to a composite piezoelectric structure of a piezoelectric generator, and more particularly to a composite piezoelectric structure of a piezoelectric generator using at least a piezoelectric film layer The composite piezoelectric structure is formed by stacking on both sides of the substrate. [Prior Art] In general, a piezoelectric material can produce a positive piezoelectric effect gallery.
及逆壓電效應。目前壓電材料可應用於製造壓電發電機，其主要係利 用正壓電作用產生電力，將機械能轉換為電能，即利用外加機械力進 行發電。 麼電材料亦應用於南頻通訊元件、感測元件'微致動器等，其主 要心、利用逆壓電作用產生機械動作，即外加電場可侧於壓電薄膜材 料〔Piezoelectric thin-film material〕，使該魏薄膜材料本身產生機械 β舉例而吕’南頻共振器係由壓電薄膜材料製成。利用交流電場 控壓電細之電偶極產生高頻共振1雜電細之電偶極方向 =讀電場之電場方向相同時，該壓電細具有極大阻抗值。反之， W壓電薄膜之電偶極方向與交流電場之電場方向相反時，該壓電薄 /有極刚几值。在傳統上最普遍利用氮化紹〔姻〕及氧化辞〔 η〕做為魏_材料，以製成各種壓電元件。 遞型態C，二，厂*够繩賴料中聲波之縱波沿縱向傳 ζ細方a 丁㉕、麵波之傳祕沿麵€細之垂直方向〔即 聲坡1:蝴電材料中 平方向圖，其帽剪波之傳遞係'沿著水 _ 1〕前進°因此’ _發紐财必要結合該縱波 5 1374*607 及剪波之機械翻’以利於提升該壓麵電技術之發電效率。 事實上’諸多壓電發電及其他相關技術揭示於諸 術内容。舉例而言，中華民國專利公報之第12獅8號之、、==And inverse piezoelectric effect. At present, piezoelectric materials can be applied to the manufacture of piezoelectric generators, which mainly use positive piezoelectric action to generate electricity, and convert mechanical energy into electrical energy, that is, using external mechanical force to generate electricity. The galvanic material is also applied to the south frequency communication component, the sensing component 'microactuator, etc., the main purpose of which is to use the reverse piezoelectric action to generate mechanical action, that is, the applied electric field can be side to the piezoelectric film material [Piezoelectric thin-film material] In the case where the Wei film material itself produces mechanical β, the Lu's south frequency resonator is made of a piezoelectric film material. The electric field is controlled by an alternating electric field to generate a high frequency resonance. The electric dipole direction of the micro electric power is fine. When the electric field direction of the electric field is the same, the piezoelectric thin has a maximum impedance value. On the other hand, when the electric dipole direction of the W piezoelectric film is opposite to the electric field direction of the alternating electric field, the piezoelectric thin/having a very small value. Traditionally, the use of nitriding and oxidizing [η] as the material of Wei is most commonly used to make various piezoelectric elements. The type C, the second, the factory* is sufficient for the longitudinal wave of the sound wave in the longitudinal direction to pass through the fine square a. 25, the surface wave of the secret surface along the fine side of the fine direction (ie, the sound slope 1: the square of the butterfly material) In the figure, the transmission of the cap shear wave is proceeding along the water_1. Therefore, it is necessary to combine the longitudinal wave 5 1374*607 and the shear wave mechanical turn to facilitate the power generation of the pressure surface electric technology. effectiveness. In fact, many piezoelectric power generation and other related technologies are revealed in various contents. For example, the 12th Lion of the Republic of China Patent Gazette, No. 8, ==
㈣=上安裝壓電換能器的裝置及方法之發明專利，其揭示利用 问又刀型夾結構改變懸臂標的振動模態，以便壓電換能器符 種振動模態，以提頒紐電_ ;中華民國專利公報之第刪咖 说之非對稱驅動型壓電陶竟變壓器"之發明專利，其揭示將一矩形 壓電體沿著長度方向〔縱向〕分為三個區，其包含··第—區為長度可 調__節點可雛，第二區為輸人驅舰，第三區為輸出發電區 藉》亥矩形壓電體之結構提升壓電發電效率；中華民國專利公開公報 之第2(X)644414 H電裝置及電子機ϋ 〃之發明公财利，其揭 示數個封錢，各鑛封㈣之内部具树定制方向之魏元件， 以檢測不同方向的機械振動。前述諸中華民國專利僅為本發明技術背 景之參考及說明目前技術發展狀態而已，其並非用以限制本發明之範 圍。(4) The invention patent of the device and method for mounting the piezoelectric transducer, which discloses that the vibration mode of the cantilever target is changed by using the knife-clamp structure, so that the piezoelectric transducer can be used to provide a vibration mode. _ ; the invention patent of the asymmetrically driven piezoelectric ceramic transformer of the Republic of China Patent Gazette, which discloses that a rectangular piezoelectric body is divided into three zones along the length direction (longitudinal direction), which includes · The first zone is adjustable in length __ node can be young, the second zone is the input manned ship, and the third zone is the output power generation zone borrowing the structure of the rectangular piezoelectric body to improve the piezoelectric power generation efficiency; the Republic of China patent disclosure The 2nd (X)644414 H electric device and the electronic machine 公报 〃 公 公 公 公 , , , , , , , , , , , , 揭示 揭示 揭示 揭示 揭示 揭示 揭示 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明. The above-mentioned patents of the Republic of China are only for the purpose of reference to the technical background of the present invention and the state of the art is not intended to limit the scope of the present invention.
另外，諸多壓電發電技術亦揭示於諸多各國專利之技術内容。舉 例而言’美國專利第6909224號之、、PiezoelectricGenerat(〆及美國專 利第6655035號之'"Piezoelectric Generator’’，其揭示利用至少二感測 器〔transducer〕將一彈性部〔elastic porti〇n〕之能量在該二感測器進 行傳遞，以提升收集能量效率◊前述諸美國專利僅為本發明技術背景 之參考及說明目則技術發展狀態而已’其並非用以限制本發明之範圍 有鑑於此’本發明為了改良上述缺點，其提供一種壓電發電機之 複合壓電構造，利用至少二壓電薄膜層配置於一基板之二側，該二壓 6 1374607 本發明較佳實施例之該第—虔電薄膜層及第二麼電薄膜層之形 成方法係選自射賴鍍法、錢麟法、溶膠娜法、減法網印 法、化學氣_積法、電子束蒸鍍歧雷射沉積法。 【實施方式】 為了充分瞭解本發明’於τ文將崎擁實細並配合所附圖式 作詳細說明，且其並非用以限定本發明。 本發明較佳實施例之壓電發電機之複合壓電構造可應用於壓電 發電及其侧技術領域’即壓電發電系·以做為可狱電子產品〔 portable electromc device〕或其他電子元件之供電系統，但其並非用以 限疋本U之壓電發電機之複合壓電構造之應用範圍。 第2圖揭示本發明較佳實施例之壓電發電機之複合壓電構造之 立體圖。請參照帛2 ®所示’本發徽佳實關之壓電發電機之複合 壓電構造包含一基板！、至少一第一壓電薄膜層2及至少一第二壓電 薄膜層3。本發明触實施狀該驗丨之雜紐方形，且該基板i 具有-預定厚度’但其形狀及厚度並非用以限定本發明。該基板】具 有第表面及-第二表面〔未標示〕，該第一表面及第二表面位於 该基板1之二側’其用以結合該第—壓電薄膜層2及第二壓電薄膜層 3於該基板1之二側’即該基板1隔離該第-壓電薄膜層2及第二壓 電薄膜層3。 本發明較佳實施例之該第-壓電細層2及第二壓電薄膜層3之 數量可依設計需求增加設置’其數量並非用靖定本發明較佳實施例 之該第-壓電薄膜層2及第二壓電薄膜層3之組合數量。 請再參照第2圖所示，本發明較佳實施例之該第—壓電薄膜層2 及第二壓電辅層3亦為長方形，其對應於該基板丨之形狀，且該第 8 1374607 -厘電薄膜層2及第二__層3亦具有―預定厚度 厚度並非用以限定本發明。 請再參照P ®麻’本伽較佳實關之轉—㈣麵声2 係屬-縱波振動模態。該第一麼電薄膜層2具有一第—電極 電薄膜22及—第二電極23。該第—電極21及第二電㈣位於該麼 電薄膜22之二側。當雌電_ 22受縱波之縱向振動〔丨。咕_In addition, many piezoelectric power generation technologies are also disclosed in the technical content of many national patents. For example, 'U.S. Patent No. 6,909,224, Piezoelectric Generat (〆 and U.S. Patent No. 6,650,035, "Piezoelectric Generator'', discloses the use of at least two transducers to provide a resilient portion [elastic porti〇n] The energy is transmitted in the two sensors to improve the energy collection efficiency. The foregoing US patents are only for the purpose of the technical background of the present invention and the state of the art has been developed, and it is not intended to limit the scope of the present invention. In order to improve the above disadvantages, the present invention provides a composite piezoelectric structure of a piezoelectric generator, which is disposed on two sides of a substrate by using at least two piezoelectric film layers, and the second pressure 6 1374607 is preferred in the preferred embodiment of the present invention. The method for forming the first-electrode thin film layer and the second electro-optical film layer is selected from the group consisting of a ray plating method, a Qianlin method, a sol method, a subtractive screen printing method, a chemical gas-product method, and an electron beam evaporation laser beam. [Description] In order to fully understand the present invention, the present invention will be described in detail in conjunction with the drawings, and is not intended to limit the invention. The composite piezoelectric structure of the piezoelectric generator of the preferred embodiment of the present invention can be applied to piezoelectric power generation and its side technical field, that is, piezoelectric power generation system, as a portable electromc device or other electronic components. Power supply system, but it is not intended to limit the application range of the composite piezoelectric structure of the piezoelectric generator of the present invention. Fig. 2 is a perspective view showing the composite piezoelectric structure of the piezoelectric generator of the preferred embodiment of the present invention. Referring to the 帛2®, the composite piezoelectric structure of the piezoelectric generator of the present invention includes a substrate!, at least a first piezoelectric film layer 2 and at least a second piezoelectric film layer 3. The present invention Touching the donut square of the test, and the substrate i has a predetermined thickness 'but the shape and thickness thereof are not intended to limit the invention. The substrate has a first surface and a second surface (not labeled), the first a surface and a second surface are located on two sides of the substrate 1 for bonding the first piezoelectric film layer 2 and the second piezoelectric film layer 3 to the two sides of the substrate 1 Piezoelectric thin film layer 2 and second piezoelectric thin film layer 3. In the preferred embodiment of the present invention, the number of the first piezoelectric thin layer 2 and the second piezoelectric thin film layer 3 can be increased according to design requirements. The number is not the same as the first piezoelectric film layer of the preferred embodiment of the present invention. 2 and the number of combinations of the second piezoelectric film layers 3. Referring to FIG. 2 again, the first piezoelectric film layer 2 and the second piezoelectric auxiliary layer 3 of the preferred embodiment of the present invention are also rectangular, Corresponding to the shape of the substrate, and the 8th 1374607-PCT film layer 2 and the second layer 3 also have a predetermined thickness, which is not intended to limit the invention. Please refer to P ® The turn of the real - (four) surface sound 2 system - longitudinal vibration mode. The first electro-optic film layer 2 has a first electrode electrode film 22 and a second electrode 23. The first electrode 21 and the second electric (four) are located on two sides of the electro-optical film 22. When the female _ 22 is subjected to longitudinal vibration of the longitudinal wave [丨.咕_
引起形變（def_i〇n〕而產生電位差時，該第—電極η 及第二電極23可用以適當手段輸出該壓電_22之電位差之電能。 本發月之縱向定義為沿著該第一麼電薄膜層2之表面之垂直轴 方向，即平行於Z轴方向，如第2圖之座標所示。When a potential difference is generated (def_i〇n), the first electrode η and the second electrode 23 can output electric energy of the potential difference of the piezoelectric element 22 by an appropriate means. The longitudinal direction of the month is defined as the first The direction of the vertical axis of the surface of the electro-membrane layer 2, that is, parallel to the Z-axis direction, is indicated by the coordinates of Fig. 2.
但其形狀及 吻再參照第2圖所不’相對的，本發明較佳實施例之該第二壓電 薄膜層3係屬-剪波振動模態。該第二壓電薄膜層3具有—第一電極 3卜—壓電薄膜32及一第二電極33。該第—電極31及第二電極幻 位於該壓電薄膜32之二側。當該壓電_ 32受剪波之水平向振動〔 tal vibration〕引起形變而產生電位差時，該第一電極及第二 電極33可肋適當手段輪出賴電_ 32之電位差之電能。 本發明之剪波之水平方向定義為沿聽第二壓電細層3之表 面之水平方向’即平行於XY平面之方向，如第2圖之座標所示。 簡5之’壓電薄膜層2之㈣薄膜22及第二壓電薄膜層 土電/專膜32刀別對應於不同方向振動模態即縱向及水平方向振 動椒態’如此料同方向振動能量無為電能。 清再I照第2圖所示’在本發明之複合壓電構造組合上，該第— 壓電/專膜層2之第二電極23結合於該基板丨之第—表面該第二屢電 '專膜層3之第·"電極31結合於該基板1之第二表面，以堆疊形成-複 9 1374607 【圖式簡單說明】 第la圖：在壓電材料中聲波之縱波沿縱向傳遞型態之示意圖。 第lb圖：在愿電材料中聲波之剪波沿水平向傳遞型態之示意圖 第2圖：本發·佳實關之㈣發電機之複合壓f構造之立體 圖。 附照1 :本發明較佳實施例之之掃瞄式電However, the shape and the kiss are opposite to those of FIG. 2, and the second piezoelectric film layer 3 of the preferred embodiment of the present invention is a shear-wave vibration mode. The second piezoelectric film layer 3 has a first electrode 3b-piezoelectric film 32 and a second electrode 33. The first electrode 31 and the second electrode are disposed on two sides of the piezoelectric film 32. When the piezoelectric _32 is deformed by the horizontal vibration of the shear wave to cause a potential difference, the first electrode and the second electrode 33 can arbitrarily turn off the electric energy of the potential difference of the electric _32. The horizontal direction of the shear wave of the present invention is defined as the direction along the horizontal direction of the surface of the second piezoelectric thin layer 3, i.e., parallel to the XY plane, as indicated by the coordinates of Fig. 2. The thin film of the piezoelectric film layer 2 and the second piezoelectric film layer of the earth/electric film 32 are corresponding to the vibration modes of different directions, that is, the longitudinal and horizontal vibrations of the pepper state. No power. According to FIG. 2, in the composite piezoelectric structure combination of the present invention, the second electrode 23 of the first piezoelectric/film layer 2 is bonded to the first surface of the substrate 该. The 'electrode 31 of the special film layer 3 is bonded to the second surface of the substrate 1 to be stacked to form a complex 9 1374607. [Simple description of the drawing] La: In the piezoelectric material, the longitudinal wave of the acoustic wave is transmitted in the longitudinal direction. Schematic diagram of the type. Figure lb: Schematic diagram of the shear wave wave pattern of the acoustic wave in the horizontal direction. Figure 2: The stereogram of the composite pressure f structure of the generator. Attachment 1 : Scanning type electric power according to a preferred embodiment of the present invention
子顯微鏡之影像照片 【主要元件符號說明】 10 複合壓電體 21 第 ~電極 23 第' &電極 31 第 '電極 33 第, &電極 1 基板 2 第一壓電薄膜層 22壓電薄膜 3 第二壓電薄膜層 32壓電薄膜Image of submicroscope [Remarks of main components] 10 Composite piezoelectric body 21 First electrode 23 'Electrical electrode 31' Electrode 33 Electrode & Electrode 1 Substrate 2 First piezoelectric film layer 22 Piezoelectric film 3 Second piezoelectric film layer 32 piezoelectric film
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