TWI373390B - - Google Patents
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- Publication number
- TWI373390B TWI373390B TW98145187A TW98145187A TWI373390B TW I373390 B TWI373390 B TW I373390B TW 98145187 A TW98145187 A TW 98145187A TW 98145187 A TW98145187 A TW 98145187A TW I373390 B TWI373390 B TW I373390B
- Authority
- TW
- Taiwan
- Prior art keywords
- micro
- movable portion
- movable
- fixing
- fixed
- Prior art date
Links
- 238000006073 displacement reaction Methods 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 10
- 239000007787 solid Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 210000002105 tongue Anatomy 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Micromachines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW098145187A TW201121696A (en) | 2009-12-25 | 2009-12-25 | Ultra-precision piezoelectric positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW098145187A TW201121696A (en) | 2009-12-25 | 2009-12-25 | Ultra-precision piezoelectric positioning platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201121696A TW201121696A (en) | 2011-07-01 |
| TWI373390B true TWI373390B (enrdf_load_stackoverflow) | 2012-10-01 |
Family
ID=45045736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098145187A TW201121696A (en) | 2009-12-25 | 2009-12-25 | Ultra-precision piezoelectric positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201121696A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI463784B (zh) * | 2012-11-21 | 2014-12-01 | Univ Nat Yunlin Sci & Tech | Quick positioning device with piezoelectric element |
| TWI470250B (enrdf_load_stackoverflow) * | 2013-08-26 | 2015-01-21 |
-
2009
- 2009-12-25 TW TW098145187A patent/TW201121696A/zh unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI463784B (zh) * | 2012-11-21 | 2014-12-01 | Univ Nat Yunlin Sci & Tech | Quick positioning device with piezoelectric element |
| TWI470250B (enrdf_load_stackoverflow) * | 2013-08-26 | 2015-01-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201121696A (en) | 2011-07-01 |
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