TWI372789B - Chemical vapor deposition assembly - Google Patents

Chemical vapor deposition assembly

Info

Publication number
TWI372789B
TWI372789B TW097102802A TW97102802A TWI372789B TW I372789 B TWI372789 B TW I372789B TW 097102802 A TW097102802 A TW 097102802A TW 97102802 A TW97102802 A TW 97102802A TW I372789 B TWI372789 B TW I372789B
Authority
TW
Taiwan
Prior art keywords
vapor deposition
chemical vapor
deposition assembly
assembly
chemical
Prior art date
Application number
TW097102802A
Other languages
English (en)
Other versions
TW200932940A (en
Inventor
Hung Tien Chung
Shang Min Lin
Sheng Te Hsu
Original Assignee
Inotera Memories Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inotera Memories Inc filed Critical Inotera Memories Inc
Priority to TW097102802A priority Critical patent/TWI372789B/zh
Publication of TW200932940A publication Critical patent/TW200932940A/zh
Application granted granted Critical
Publication of TWI372789B publication Critical patent/TWI372789B/zh

Links

TW097102802A 2008-01-25 2008-01-25 Chemical vapor deposition assembly TWI372789B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097102802A TWI372789B (en) 2008-01-25 2008-01-25 Chemical vapor deposition assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097102802A TWI372789B (en) 2008-01-25 2008-01-25 Chemical vapor deposition assembly

Publications (2)

Publication Number Publication Date
TW200932940A TW200932940A (en) 2009-08-01
TWI372789B true TWI372789B (en) 2012-09-21

Family

ID=44865706

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097102802A TWI372789B (en) 2008-01-25 2008-01-25 Chemical vapor deposition assembly

Country Status (1)

Country Link
TW (1) TWI372789B (zh)

Also Published As

Publication number Publication date
TW200932940A (en) 2009-08-01

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