TWI372403B - Structure of thin film resistor and method of fabricating the same - Google Patents

Structure of thin film resistor and method of fabricating the same

Info

Publication number
TWI372403B
TWI372403B TW096132339A TW96132339A TWI372403B TW I372403 B TWI372403 B TW I372403B TW 096132339 A TW096132339 A TW 096132339A TW 96132339 A TW96132339 A TW 96132339A TW I372403 B TWI372403 B TW I372403B
Authority
TW
Taiwan
Prior art keywords
fabricating
thin film
same
film resistor
resistor
Prior art date
Application number
TW096132339A
Other languages
Chinese (zh)
Other versions
TW200910388A (en
Inventor
Yu Chung Chen
Hung Kun Lee
Jung Chou Oung
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW096132339A priority Critical patent/TWI372403B/en
Publication of TW200910388A publication Critical patent/TW200910388A/en
Application granted granted Critical
Publication of TWI372403B publication Critical patent/TWI372403B/en

Links

TW096132339A 2007-08-30 2007-08-30 Structure of thin film resistor and method of fabricating the same TWI372403B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096132339A TWI372403B (en) 2007-08-30 2007-08-30 Structure of thin film resistor and method of fabricating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096132339A TWI372403B (en) 2007-08-30 2007-08-30 Structure of thin film resistor and method of fabricating the same

Publications (2)

Publication Number Publication Date
TW200910388A TW200910388A (en) 2009-03-01
TWI372403B true TWI372403B (en) 2012-09-11

Family

ID=44724361

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096132339A TWI372403B (en) 2007-08-30 2007-08-30 Structure of thin film resistor and method of fabricating the same

Country Status (1)

Country Link
TW (1) TWI372403B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI497535B (en) 2011-07-28 2015-08-21 Cyntec Co Ltd Micro-resistive device with soft material layer and manufacture method for the same
CN106449581A (en) * 2015-08-04 2017-02-22 三垦电气株式会社 Semiconductor device

Also Published As

Publication number Publication date
TW200910388A (en) 2009-03-01

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