TWI372316B - Prediction model and prediction method for exposure dose - Google Patents

Prediction model and prediction method for exposure dose

Info

Publication number
TWI372316B
TWI372316B TW096133472A TW96133472A TWI372316B TW I372316 B TWI372316 B TW I372316B TW 096133472 A TW096133472 A TW 096133472A TW 96133472 A TW96133472 A TW 96133472A TW I372316 B TWI372316 B TW I372316B
Authority
TW
Taiwan
Prior art keywords
prediction
exposure dose
prediction model
model
prediction method
Prior art date
Application number
TW096133472A
Other languages
Chinese (zh)
Other versions
TW200912547A (en
Inventor
Ju Te Chen
Chung An Chen
Chi Ching Huang
Wen Tsung Wu
Shih Ming Yen
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW096133472A priority Critical patent/TWI372316B/en
Publication of TW200912547A publication Critical patent/TW200912547A/en
Application granted granted Critical
Publication of TWI372316B publication Critical patent/TWI372316B/en

Links

TW096133472A 2007-09-07 2007-09-07 Prediction model and prediction method for exposure dose TWI372316B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096133472A TWI372316B (en) 2007-09-07 2007-09-07 Prediction model and prediction method for exposure dose

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096133472A TWI372316B (en) 2007-09-07 2007-09-07 Prediction model and prediction method for exposure dose

Publications (2)

Publication Number Publication Date
TW200912547A TW200912547A (en) 2009-03-16
TWI372316B true TWI372316B (en) 2012-09-11

Family

ID=44724923

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096133472A TWI372316B (en) 2007-09-07 2007-09-07 Prediction model and prediction method for exposure dose

Country Status (1)

Country Link
TW (1) TWI372316B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115343919B (en) * 2022-10-20 2023-02-03 合肥新晶集成电路有限公司 Method and apparatus for determining exposure energy, and manufacturing system

Also Published As

Publication number Publication date
TW200912547A (en) 2009-03-16

Similar Documents

Publication Publication Date Title
HK1252345A1 (en) Exposure apparatus and exposure method
HK1220514A1 (en) Exposure appratatus, exposure method and device manufacuring method
HK1193879A1 (en) Exposure apparatus and exposure method
HK1197695A1 (en) Exposure apparatus and exposure method
EP2351871A4 (en) Mask and method for forming film using mask
HK1142688A1 (en) Projection apparatus and projection method
HK1199108A1 (en) Exposure apparatus, exposure method
HK1135477A1 (en) Exposure apparatus
HK1199771A1 (en) Exposure apparatus and method
TWI348596B (en) Exposure apparatus and method
EP2096169A4 (en) Nuclear reprogramming method
HK1158811A1 (en) Device and method for producing medical isotopes
HK1152996A1 (en) Exposure apparatus, exposure method and method for making assembly
EP2269511A4 (en) Multi-x-ray photography device and control method thereof
EP2219206A4 (en) Control device, exposure method, and exposure device
GB2465536B (en) A method and apparatus for disinfecting enclosed spaces
EP2432968A4 (en) Apparatus and method for modeling well designs and well performance
GB2447979B (en) Projection method
HK1163824A1 (en) Panomaric projection device and method implemented by said device
IL193705A0 (en) Apparatus and method for modeling respiratory disease
GB0807649D0 (en) Photosensitive structure and apparatus including such a structure
EP2260901A4 (en) Device and method for hair-growing
IL204728A0 (en) Methods and compounds for treating retinol-related diseases
EP2440409A4 (en) Developer unit and method thereof
EP2362785A4 (en) Apparatus and methods for disinfecting spaces