TWI372073B - Method and apparatus for treating fluids to reduce microbubbles - Google Patents

Method and apparatus for treating fluids to reduce microbubbles

Info

Publication number
TWI372073B
TWI372073B TW095114741A TW95114741A TWI372073B TW I372073 B TWI372073 B TW I372073B TW 095114741 A TW095114741 A TW 095114741A TW 95114741 A TW95114741 A TW 95114741A TW I372073 B TWI372073 B TW I372073B
Authority
TW
Taiwan
Prior art keywords
treating fluids
microbubbles
reduce
reduce microbubbles
fluids
Prior art date
Application number
TW095114741A
Other languages
English (en)
Other versions
TW200706227A (en
Inventor
Joseph Zahka
Aiwen Wu
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200706227A publication Critical patent/TW200706227A/zh
Application granted granted Critical
Publication of TWI372073B publication Critical patent/TWI372073B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0031—Degasification of liquids by filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/02—Foam dispersion or prevention

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Accessories For Mixers (AREA)
TW095114741A 2005-04-25 2006-04-25 Method and apparatus for treating fluids to reduce microbubbles TWI372073B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US67459405P 2005-04-25 2005-04-25

Publications (2)

Publication Number Publication Date
TW200706227A TW200706227A (en) 2007-02-16
TWI372073B true TWI372073B (en) 2012-09-11

Family

ID=37215083

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095114741A TWI372073B (en) 2005-04-25 2006-04-25 Method and apparatus for treating fluids to reduce microbubbles

Country Status (7)

Country Link
US (2) US8777189B2 (zh)
EP (1) EP1874446A1 (zh)
JP (2) JP5586845B2 (zh)
KR (1) KR101262410B1 (zh)
CN (1) CN101189060A (zh)
TW (1) TWI372073B (zh)
WO (1) WO2006116385A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI766995B (zh) * 2017-05-16 2022-06-11 日商東京威力科創股份有限公司 液體過濾器溼潤方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101189060A (zh) 2005-04-25 2008-05-28 恩特格里公司 用于处理流体以减少微泡的方法和装置
US8684705B2 (en) 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
US8727744B2 (en) * 2010-02-26 2014-05-20 Entegris, Inc. Method and system for optimizing operation of a pump
JP5848869B2 (ja) * 2010-08-25 2016-01-27 富士フイルム株式会社 パターン形成方法
TWI563351B (en) 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
JP5910401B2 (ja) * 2012-08-03 2016-04-27 東京エレクトロン株式会社 処理液供給装置の運転方法、処理液供給装置及び記憶媒体
US20140196604A1 (en) * 2013-01-11 2014-07-17 Shenzhen China Star Optoelectronics Technology Co., Ltd. Method and Device for Purging Bubbles in the Pipeline of Substrate Coater and Corresponding Substrate Coater
JP5728517B2 (ja) * 2013-04-02 2015-06-03 富士フイルム株式会社 化学増幅型レジスト膜のパターニング用有機系処理液の製造方法、パターン形成方法、及び、電子デバイスの製造方法
JP6013302B2 (ja) 2013-10-04 2016-10-25 東京エレクトロン株式会社 気泡除去方法、気泡除去装置、脱気装置、及びコンピュータ読み取り可能な記録媒体
TWI670417B (zh) 2014-05-28 2019-09-01 美商恩特葛瑞斯股份有限公司 活塞總成及泵抽系統
DE102016004612A1 (de) * 2016-04-19 2017-10-19 Merck Patent Gmbh Verfahren und Befüllungsvorrichtung zum Befüllen eines Transportbehälters mit einem Fluid
WO2019099157A1 (en) * 2017-11-14 2019-05-23 Fresenius Medical Care Holdings, Inc. Removal of microbubbles through drip chamber nucleation sites
US10663865B2 (en) * 2018-06-29 2020-05-26 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist recycling apparatus
JP7104599B2 (ja) 2018-09-21 2022-07-21 センクシア株式会社 補強対象物の補強構造

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FR1377537A (fr) * 1963-09-26 1964-11-06 Tissmetal Lionel Dupont élément de garnissage pour colonnes d'échange entre deux fluides
JPS60179101A (ja) * 1984-02-28 1985-09-13 Ngk Insulators Ltd 流体接触用多孔体
DE3624363C2 (de) * 1986-07-18 1995-06-08 Akzo Gmbh Vorrichtung zum Abtrennen von Gasblasen aus Infusionsflüssigkeiten oder Flüssigkeiten des menschlichen Körpers
AU647856B2 (en) * 1990-12-28 1994-03-31 Terumo Kabushiki Kaisha Transfusion filtering device
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US5569208A (en) 1995-08-01 1996-10-29 Merit Medical Systems, Inc. System for managing delivery of contrast media
US5897530A (en) 1997-12-24 1999-04-27 Baxter International Inc. Enclosed ambulatory pump
JP2001121063A (ja) 1999-10-26 2001-05-08 Tokyo Electron Ltd フィルタ装置及び液処理装置
US6402821B1 (en) 1998-08-18 2002-06-11 Tokyo Electron Limited Filter unit and solution treatment unit
JP2000185293A (ja) * 1998-12-22 2000-07-04 Sumitomo Heavy Ind Ltd 生物ろ過装置
US6210611B1 (en) * 1999-11-30 2001-04-03 Duke University Methods for producing gas microbubbles having lipid-containing shells formed thereon
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KR20060129316A (ko) * 2004-01-27 2006-12-15 엔테그리스, 아이엔씨. 액체로부터 마이크로버블을 제거하는 방법
US20050247198A1 (en) * 2004-05-07 2005-11-10 Kent Fraser C Method and apparatus for removing gas bubbles from a liquid
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US7238224B2 (en) * 2004-10-29 2007-07-03 Hewlett-Packard Development Company, L.P. Fluid-gas separator
CN101189060A (zh) 2005-04-25 2008-05-28 恩特格里公司 用于处理流体以减少微泡的方法和装置
US8696626B2 (en) * 2008-07-30 2014-04-15 Claudia F. E. Kirsch Debubbler

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI766995B (zh) * 2017-05-16 2022-06-11 日商東京威力科創股份有限公司 液體過濾器溼潤方法

Also Published As

Publication number Publication date
US20090045140A1 (en) 2009-02-19
US8777189B2 (en) 2014-07-15
JP2014208341A (ja) 2014-11-06
TW200706227A (en) 2007-02-16
JP5911526B2 (ja) 2016-04-27
WO2006116385A1 (en) 2006-11-02
KR101262410B1 (ko) 2013-05-08
US20140283684A1 (en) 2014-09-25
JP2008539075A (ja) 2008-11-13
CN101189060A (zh) 2008-05-28
EP1874446A1 (en) 2008-01-09
KR20080006627A (ko) 2008-01-16
JP5586845B2 (ja) 2014-09-10
US9333443B2 (en) 2016-05-10

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