TWI370874B - Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same - Google Patents

Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same

Info

Publication number
TWI370874B
TWI370874B TW094106978A TW94106978A TWI370874B TW I370874 B TWI370874 B TW I370874B TW 094106978 A TW094106978 A TW 094106978A TW 94106978 A TW94106978 A TW 94106978A TW I370874 B TWI370874 B TW I370874B
Authority
TW
Taiwan
Prior art keywords
same
pumping system
vacuum pumping
transferring substrate
driving method
Prior art date
Application number
TW094106978A
Other languages
English (en)
Chinese (zh)
Other versions
TW200602561A (en
Inventor
Hong-Seub Kim
Hyun-Soo Park
Soon-Bin Jung
Sung-Ho Cha
Dong-Jin Kim
Wook-Jung Hwang
Jin-Hyuk Yoo
Original Assignee
Jusung Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jusung Eng Co Ltd filed Critical Jusung Eng Co Ltd
Publication of TW200602561A publication Critical patent/TW200602561A/zh
Application granted granted Critical
Publication of TWI370874B publication Critical patent/TWI370874B/zh

Links

Classifications

    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K69/00—Stationary catching devices
    • A01K69/06—Traps
    • A01K69/08—Rigid traps, e.g. lobster pots
    • E—FIXED CONSTRUCTIONS
    • E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02B—HYDRAULIC ENGINEERING
    • E02B8/00—Details of barrages or weirs ; Energy dissipating devices carried by lock or dry-dock gates
    • E02B8/08—Fish passes or other means providing for migration of fish; Passages for rafts or boats
    • E02B8/085—Devices allowing fish migration, e.g. fish traps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A40/00—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production
    • Y02A40/60—Ecological corridors or buffer zones

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental Sciences (AREA)
  • Marine Sciences & Fisheries (AREA)
  • Mechanical Engineering (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Animal Husbandry (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW094106978A 2004-03-08 2005-03-08 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same TWI370874B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20040015544 2004-03-08
KR20040017627 2004-03-16
KR20040017832 2004-03-17
KR1020050014819A KR101118914B1 (ko) 2004-03-08 2005-02-23 진공펌핑 시스템 및 방법과 이를 이용하는 공정장치

Publications (2)

Publication Number Publication Date
TW200602561A TW200602561A (en) 2006-01-16
TWI370874B true TWI370874B (en) 2012-08-21

Family

ID=37148687

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094106978A TWI370874B (en) 2004-03-08 2005-03-08 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same

Country Status (2)

Country Link
KR (1) KR101118914B1 (ko)
TW (1) TWI370874B (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100790789B1 (ko) * 2006-07-03 2008-01-02 코닉시스템 주식회사 반도체 공정장치
KR100839189B1 (ko) * 2007-03-06 2008-06-17 세메스 주식회사 반도체 제조장치 및 반도체 제조장치의 공정챔버에 기판을이송하는 방법
US20180061679A1 (en) * 2016-08-25 2018-03-01 Applied Materials, Inc. Multi chamber processing system with shared vacuum system
KR102241606B1 (ko) * 2019-06-27 2021-04-20 세메스 주식회사 기판 처리 장치 및 방법
CN113161264A (zh) * 2021-04-13 2021-07-23 上海广川科技有限公司 一种用于晶圆传送的密封抽放气系统及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100274308B1 (ko) * 1994-05-23 2001-01-15 히가시 데쓰로 멀티 챔버 처리시스템
KR100252213B1 (ko) * 1997-04-22 2000-05-01 윤종용 반도체소자제조장치및그제조방법
KR100417245B1 (ko) * 2001-05-02 2004-02-05 주성엔지니어링(주) 웨이퍼 가공을 위한 클러스터 툴

Also Published As

Publication number Publication date
TW200602561A (en) 2006-01-16
KR101118914B1 (ko) 2012-02-27
KR20060043107A (ko) 2006-05-15

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees