TWI368968B - Interconnection process - Google Patents

Interconnection process

Info

Publication number
TWI368968B
TWI368968B TW096126886A TW96126886A TWI368968B TW I368968 B TWI368968 B TW I368968B TW 096126886 A TW096126886 A TW 096126886A TW 96126886 A TW96126886 A TW 96126886A TW I368968 B TWI368968 B TW I368968B
Authority
TW
Taiwan
Prior art keywords
interconnection process
interconnection
Prior art date
Application number
TW096126886A
Other languages
Chinese (zh)
Other versions
TW200905796A (en
Inventor
Hong Ma
Frank Bai
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW096126886A priority Critical patent/TWI368968B/en
Publication of TW200905796A publication Critical patent/TW200905796A/en
Application granted granted Critical
Publication of TWI368968B publication Critical patent/TWI368968B/en

Links

TW096126886A 2007-07-24 2007-07-24 Interconnection process TWI368968B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096126886A TWI368968B (en) 2007-07-24 2007-07-24 Interconnection process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096126886A TWI368968B (en) 2007-07-24 2007-07-24 Interconnection process

Publications (2)

Publication Number Publication Date
TW200905796A TW200905796A (en) 2009-02-01
TWI368968B true TWI368968B (en) 2012-07-21

Family

ID=44722861

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096126886A TWI368968B (en) 2007-07-24 2007-07-24 Interconnection process

Country Status (1)

Country Link
TW (1) TWI368968B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111211095B (en) * 2020-03-02 2024-05-10 合肥晶合集成电路股份有限公司 Method for manufacturing conductive interconnection line

Also Published As

Publication number Publication date
TW200905796A (en) 2009-02-01

Similar Documents

Publication Publication Date Title
GB0715101D0 (en) Process
GB0711624D0 (en) Process
GB0706978D0 (en) Process
GB0700074D0 (en) process
EP2152631A4 (en) Nickel-laterite process
GB0716126D0 (en) Process
GB0706709D0 (en) Methods
GB0711680D0 (en) Process
GB0714602D0 (en) Process
EP2129642A4 (en) Integrated alkylation-isomerization process
GB0715496D0 (en) Novel process
GB0714390D0 (en) Process
PL2173197T3 (en) Process
GB0700878D0 (en) Process
GB201003018D0 (en) Process
GB0724716D0 (en) Process
GB0724232D0 (en) Process
GB0716783D0 (en) New Process
PL2152091T3 (en) Process
TWI349330B (en) Interconnection process
GB0719251D0 (en) Process
GB0707735D0 (en) Methods
TWI368968B (en) Interconnection process
GB0701966D0 (en) Process
GB0713673D0 (en) Methods