TWI368533B - Trap device - Google Patents

Trap device

Info

Publication number
TWI368533B
TWI368533B TW095103310A TW95103310A TWI368533B TW I368533 B TWI368533 B TW I368533B TW 095103310 A TW095103310 A TW 095103310A TW 95103310 A TW95103310 A TW 95103310A TW I368533 B TWI368533 B TW I368533B
Authority
TW
Taiwan
Prior art keywords
trap device
trap
Prior art date
Application number
TW095103310A
Other languages
Chinese (zh)
Other versions
TW200631643A (en
Inventor
David Engerran
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of TW200631643A publication Critical patent/TW200631643A/en
Application granted granted Critical
Publication of TWI368533B publication Critical patent/TWI368533B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
    • B01D45/16—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by the winding course of the gas stream, the centrifugal forces being generated solely or partly by mechanical means, e.g. fixed swirl vanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2273/10—Allowing a continuous bypass of at least part of the flow, e.g. of secondary air, vents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2275/00—Filter media structures for filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2275/10—Multiple layers
    • B01D2275/105—Wound layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2275/00—Filter media structures for filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2275/30—Porosity of filtering material
TW095103310A 2005-02-02 2006-01-27 Trap device TWI368533B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0502148A GB0502148D0 (en) 2005-02-02 2005-02-02 Trap device

Publications (2)

Publication Number Publication Date
TW200631643A TW200631643A (en) 2006-09-16
TWI368533B true TWI368533B (en) 2012-07-21

Family

ID=34307859

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095103310A TWI368533B (en) 2005-02-02 2006-01-27 Trap device

Country Status (3)

Country Link
GB (1) GB0502148D0 (en)
TW (1) TWI368533B (en)
WO (1) WO2006082367A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007122418A1 (en) * 2006-04-21 2007-11-01 Edwards Limited Method of treating a gas stream

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2507818A (en) * 1949-08-06 1950-05-16 Sager Victor Oil filter
US4668393A (en) * 1985-05-14 1987-05-26 Parker-Hannifin Corporation Semipermeable baffle fuel filter
US5120331A (en) * 1990-02-06 1992-06-09 Keith Landy Composite gas filtering unit
US6332925B1 (en) * 1996-05-23 2001-12-25 Ebara Corporation Evacuation system
US6354241B1 (en) * 1999-07-15 2002-03-12 Applied Materials, Inc. Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing
CA2366066A1 (en) * 2001-12-21 2002-07-30 Adolf Eberl Absorbent filter material matrices and their arrangements in filter cartridges
US6936086B2 (en) * 2002-09-11 2005-08-30 Planar Systems, Inc. High conductivity particle filter

Also Published As

Publication number Publication date
TW200631643A (en) 2006-09-16
GB0502148D0 (en) 2005-03-09
WO2006082367A1 (en) 2006-08-10

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