TW200631643A - Trap device - Google Patents
Trap deviceInfo
- Publication number
- TW200631643A TW200631643A TW095103310A TW95103310A TW200631643A TW 200631643 A TW200631643 A TW 200631643A TW 095103310 A TW095103310 A TW 095103310A TW 95103310 A TW95103310 A TW 95103310A TW 200631643 A TW200631643 A TW 200631643A
- Authority
- TW
- Taiwan
- Prior art keywords
- gas stream
- cartridge
- casing
- connectable
- enclosure
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
- B01D45/16—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by the winding course of the gas stream, the centrifugal forces being generated solely or partly by mechanical means, e.g. fixed swirl vanes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
- B01D2273/10—Allowing a continuous bypass of at least part of the flow, e.g. of secondary air, vents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2275/00—Filter media structures for filters specially adapted for separating dispersed particles from gases or vapours
- B01D2275/10—Multiple layers
- B01D2275/105—Wound layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2275/00—Filter media structures for filters specially adapted for separating dispersed particles from gases or vapours
- B01D2275/30—Porosity of filtering material
Abstract
A trap device (18) is described for removing particulates from a gas stream drawn from an enclosure by a vacuum pump. The trap comprises a casing (28) having an inlet (16) connectable to the enclosure for receiving the gas stream therefrom and an outlet (20) connectable to the vacuum pump for exhausting the gas stream from the casing. A cartridge (36) removably insertable into the casing (28) has an inlet through which the gas stream enters the cartridge and an outlet through which the gas stream leaves the cartridge, the cartridge housing at least one filter element for removing particulates from the gas stream passing through the cartridge.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0502148A GB0502148D0 (en) | 2005-02-02 | 2005-02-02 | Trap device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200631643A true TW200631643A (en) | 2006-09-16 |
TWI368533B TWI368533B (en) | 2012-07-21 |
Family
ID=34307859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095103310A TWI368533B (en) | 2005-02-02 | 2006-01-27 | Trap device |
Country Status (3)
Country | Link |
---|---|
GB (1) | GB0502148D0 (en) |
TW (1) | TWI368533B (en) |
WO (1) | WO2006082367A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007122418A1 (en) * | 2006-04-21 | 2007-11-01 | Edwards Limited | Method of treating a gas stream |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2507818A (en) * | 1949-08-06 | 1950-05-16 | Sager Victor | Oil filter |
US4668393A (en) * | 1985-05-14 | 1987-05-26 | Parker-Hannifin Corporation | Semipermeable baffle fuel filter |
US5120331A (en) * | 1990-02-06 | 1992-06-09 | Keith Landy | Composite gas filtering unit |
US6332925B1 (en) * | 1996-05-23 | 2001-12-25 | Ebara Corporation | Evacuation system |
US6354241B1 (en) * | 1999-07-15 | 2002-03-12 | Applied Materials, Inc. | Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing |
CA2366066A1 (en) * | 2001-12-21 | 2002-07-30 | Adolf Eberl | Absorbent filter material matrices and their arrangements in filter cartridges |
US6936086B2 (en) * | 2002-09-11 | 2005-08-30 | Planar Systems, Inc. | High conductivity particle filter |
-
2005
- 2005-02-02 GB GB0502148A patent/GB0502148D0/en not_active Ceased
-
2006
- 2006-01-25 WO PCT/GB2006/000230 patent/WO2006082367A1/en not_active Application Discontinuation
- 2006-01-27 TW TW095103310A patent/TWI368533B/en active
Also Published As
Publication number | Publication date |
---|---|
GB0502148D0 (en) | 2005-03-09 |
WO2006082367A1 (en) | 2006-08-10 |
TWI368533B (en) | 2012-07-21 |
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