TWI366673B - Apparatus for detecting a probe location in a probe card - Google Patents

Apparatus for detecting a probe location in a probe card

Info

Publication number
TWI366673B
TWI366673B TW097113700A TW97113700A TWI366673B TW I366673 B TWI366673 B TW I366673B TW 097113700 A TW097113700 A TW 097113700A TW 97113700 A TW97113700 A TW 97113700A TW I366673 B TWI366673 B TW I366673B
Authority
TW
Taiwan
Prior art keywords
probe
detecting
location
card
probe card
Prior art date
Application number
TW097113700A
Other languages
English (en)
Other versions
TW200900702A (en
Inventor
Si-Yong Choi
Gyun Jeong
Original Assignee
Secron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Secron Co Ltd filed Critical Secron Co Ltd
Publication of TW200900702A publication Critical patent/TW200900702A/zh
Application granted granted Critical
Publication of TWI366673B publication Critical patent/TWI366673B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
TW097113700A 2007-06-27 2008-04-15 Apparatus for detecting a probe location in a probe card TWI366673B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070063575A KR100878213B1 (ko) 2007-06-27 2007-06-27 프로브카드 탐침 위치인지 장치

Publications (2)

Publication Number Publication Date
TW200900702A TW200900702A (en) 2009-01-01
TWI366673B true TWI366673B (en) 2012-06-21

Family

ID=40197026

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097113700A TWI366673B (en) 2007-06-27 2008-04-15 Apparatus for detecting a probe location in a probe card

Country Status (3)

Country Link
KR (1) KR100878213B1 (zh)
CN (1) CN101334265A (zh)
TW (1) TWI366673B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102386462B1 (ko) 2020-09-02 2022-04-15 (주)티에스이 프로브 카드 및 이의 얼라이닝 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2913609B2 (ja) * 1991-03-08 1999-06-28 東京エレクトロン株式会社 プロービング装置、プロービング方法およびプローブカード
JP3156192B2 (ja) * 1994-04-19 2001-04-16 東京エレクトロン株式会社 プローブ方法及びその装置
JP2004152916A (ja) 2002-10-29 2004-05-27 Nec Corp 半導体デバイス検査装置及び検査方法
JP2004265895A (ja) * 2003-01-20 2004-09-24 Tokyo Electron Ltd 光学的測長器を備えたプローブ装置及びプローブ検査方法

Also Published As

Publication number Publication date
KR20080114224A (ko) 2008-12-31
KR100878213B1 (ko) 2009-01-13
CN101334265A (zh) 2008-12-31
TW200900702A (en) 2009-01-01

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