TWI365805B - A unit lifter assembly - Google Patents

A unit lifter assembly

Info

Publication number
TWI365805B
TWI365805B TW096141728A TW96141728A TWI365805B TW I365805 B TWI365805 B TW I365805B TW 096141728 A TW096141728 A TW 096141728A TW 96141728 A TW96141728 A TW 96141728A TW I365805 B TWI365805 B TW I365805B
Authority
TW
Taiwan
Prior art keywords
lifter assembly
unit lifter
unit
assembly
lifter
Prior art date
Application number
TW096141728A
Other languages
Chinese (zh)
Other versions
TW200836901A (en
Inventor
Nee Seng Ling
Soo Loo Ang
Chong Chen Lim
Seung Ho Baek
Jong Jae Jung
Yun Suk Shin
Original Assignee
Rokko Systems Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rokko Systems Pte Ltd filed Critical Rokko Systems Pte Ltd
Publication of TW200836901A publication Critical patent/TW200836901A/en
Application granted granted Critical
Publication of TWI365805B publication Critical patent/TWI365805B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Automatic Assembly (AREA)
TW096141728A 2006-11-03 2007-11-05 A unit lifter assembly TWI365805B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200607666-5A SG142198A1 (en) 2006-11-03 2006-11-03 A unit lifter assembly

Publications (2)

Publication Number Publication Date
TW200836901A TW200836901A (en) 2008-09-16
TWI365805B true TWI365805B (en) 2012-06-11

Family

ID=39344730

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096141728A TWI365805B (en) 2006-11-03 2007-11-05 A unit lifter assembly

Country Status (3)

Country Link
SG (1) SG142198A1 (en)
TW (1) TWI365805B (en)
WO (1) WO2008054332A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG161133A1 (en) * 2008-11-04 2010-05-27 Rokko Systems Pte Ltd System and method for engaging singulated substrates
WO2016041731A1 (en) 2014-09-15 2016-03-24 Asml Netherlands B.V. Object table, lithographic apparatus and device manufacturing method
TWI820522B (en) * 2020-12-15 2023-11-01 新加坡商洛克系统私人有限公司 Method and system for ic unit singulation and sorting

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4950011A (en) * 1988-10-24 1990-08-21 Nicky Borcea Tool for precisely positioning a workpiece
WO2006022597A2 (en) * 2004-08-23 2006-03-02 Rokko Systems Pte Ltd Supply mechanism for the chuck of an integrated circuit dicing device
SG126801A1 (en) * 2005-04-28 2006-11-29 Rokko Systems Pte Ltd Improved net block assembly

Also Published As

Publication number Publication date
SG142198A1 (en) 2008-05-28
WO2008054332A3 (en) 2008-07-10
TW200836901A (en) 2008-09-16
WO2008054332A2 (en) 2008-05-08
WO2008054332A8 (en) 2008-08-28

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