TWI365805B - A unit lifter assembly - Google Patents
A unit lifter assemblyInfo
- Publication number
- TWI365805B TWI365805B TW096141728A TW96141728A TWI365805B TW I365805 B TWI365805 B TW I365805B TW 096141728 A TW096141728 A TW 096141728A TW 96141728 A TW96141728 A TW 96141728A TW I365805 B TWI365805 B TW I365805B
- Authority
- TW
- Taiwan
- Prior art keywords
- lifter assembly
- unit lifter
- unit
- assembly
- lifter
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Automatic Assembly (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200607666-5A SG142198A1 (en) | 2006-11-03 | 2006-11-03 | A unit lifter assembly |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200836901A TW200836901A (en) | 2008-09-16 |
TWI365805B true TWI365805B (en) | 2012-06-11 |
Family
ID=39344730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096141728A TWI365805B (en) | 2006-11-03 | 2007-11-05 | A unit lifter assembly |
Country Status (3)
Country | Link |
---|---|
SG (1) | SG142198A1 (en) |
TW (1) | TWI365805B (en) |
WO (1) | WO2008054332A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG161133A1 (en) * | 2008-11-04 | 2010-05-27 | Rokko Systems Pte Ltd | System and method for engaging singulated substrates |
WO2016041731A1 (en) | 2014-09-15 | 2016-03-24 | Asml Netherlands B.V. | Object table, lithographic apparatus and device manufacturing method |
TWI820522B (en) * | 2020-12-15 | 2023-11-01 | 新加坡商洛克系统私人有限公司 | Method and system for ic unit singulation and sorting |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4950011A (en) * | 1988-10-24 | 1990-08-21 | Nicky Borcea | Tool for precisely positioning a workpiece |
WO2006022597A2 (en) * | 2004-08-23 | 2006-03-02 | Rokko Systems Pte Ltd | Supply mechanism for the chuck of an integrated circuit dicing device |
SG126801A1 (en) * | 2005-04-28 | 2006-11-29 | Rokko Systems Pte Ltd | Improved net block assembly |
-
2006
- 2006-11-03 SG SG200607666-5A patent/SG142198A1/en unknown
-
2007
- 2007-11-05 TW TW096141728A patent/TWI365805B/en active
- 2007-11-05 WO PCT/SG2007/000372 patent/WO2008054332A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
SG142198A1 (en) | 2008-05-28 |
WO2008054332A3 (en) | 2008-07-10 |
TW200836901A (en) | 2008-09-16 |
WO2008054332A2 (en) | 2008-05-08 |
WO2008054332A8 (en) | 2008-08-28 |
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