TWI364523B - - Google Patents

Description

The 1364523 inkjet coating method has also been used to form a color filter layer for a color filter substrate, and a color filter substrate for a liquid crystal television has been manufactured at a low cost. It has been disclosed in Japanese Laid-Open Patent Publication No. Hei 08-1 6021 9 , Japanese Patent Application Laid-Open No. Hei No. Hei No. Hei No. Hei No. Hei No. 2002-022926 The application side of the inkjet device for polyimide film for coating a polyimide film which has been introduced into a mass production test production line is shown in the first figure and the second figure, and the coating position is shifted by a reciprocating coating method. One-half the pitch of the coating nozzle. For the nozzles, a slightly different discharge amount '# is adjusted by (4) (5) (4)) the vibration period of the component. 'Although the discharge amount per unit can be uniformized, it is difficult to make it completely equal, and the nozzle pitch is shifted by two. One of the coating methods cannot completely eliminate the strip mura which occurs in the same direction as the traveling direction of the substrate.

Although it can be properly coated without strips of moiré, when the solvent of the solution of the polyimine alignment film coating solution is dried, as shown in the fourth figure, the film thickness of the outermost portion of the coating increases, which cannot be avoided. The occurrence of edge moiré. Although there are several methods using an inkjet coating method in which spacer beads are disposed on a ruthenium (transparent light film), the method is as shown in the third figure, and the spacer beads are formed after the formation of the alignment film. Coated on the alignment film. This (4) leaves a spot (heart) on the alignment film, which becomes the cause of the alignment (4). In addition, the separation of the beads

The strength of the receiver is very weak. If it is used for large I = TV, there will be a problem that the spacer bead is moving in the process. ( ^ 4 15 method, the liquid crystal cell gap (cellgap) of the optical spacer element is formed in the cell gap of the micrometer. Although there is no problem in the 0DF process, and in the case of a narrow cell gap of + micron, the amount of stress displacement due to the height of the optical spacer element is not large enough for the optical spacer element, and the 1' package and Gravity moiré can occur frequently. The case of using spacer beads is the same as shown in Figure 29. The spacer beads with small spherical diameter cannot receive a large amount of stress change. In the case where the color substrate is produced by the inkjet coating method, as shown in the figure, the area defined by the pattern of the BM (light-shielding film) is filled with the material without dropping a gap. In order to make the color filter ink, Reducing the surface tension of the filter ink, or mixing it in order to prevent it from crossing the BM® shape, so the film has a water-repellent processor. These methods cannot completely eliminate the gap. Inkjet coating For the case where, although the swatch with suddenly bent shape, the ink-jet head shifted, but the coating speed later

Slow, can not be used for mass production. In order to speed up the coating speed, as shown in the twentieth, although a method of arranging a plurality of ink jet heads in series to form a enamel panel has been proposed, the (four) board in which the configuration is performed is How can #. SUMMARY OF THE INVENTION In order to solve the above problems, the present invention employs the following means. [Means 1] Regarding the process of forming a functional film only in the local 〇 region of the μ earth plate by the inkjet coating method, after applying the organic ink-soluble film to the 1364523* substrate, The temperature of the substrate rises, the viscosity of the solution is lowered, and the unevenness of the surface of the liquid is leveled and flattened, and then the substrate is cooled to room temperature or lower to increase the viscosity of the coating liquid, and then the pressure is reduced. The solvent of the coating solution is volatilized while the substrate is cooled. [Means 2] A process of forming a functional film only in a partial region of a substrate by an inkjet coating method, and applying a solution of the organic-soluble film to the substrate by an inkjet coating device, thereby increasing the substrate temperature and lowering After the viscosity of the solution is adjusted to flatten the unevenness of the surface of the liquid, the substrate is cooled to a temperature lower than the freezing point temperature of the bath of the coated substrate. After the applied solution is solidified, the solvent of the coated solution is sublimed in a vacuum environment. [Means 3] Regarding the unit process of the liquid crystal display element, an inkjet coating method is used on the color filter substrate side, and a liquid which disperses the heat-resistant plastic spacer beads is placed on the light-shielding film of the scanning line color filter substrate corresponding to the active array substrate. The formed concave surface • After processing, the dispersion is dropped at a specific position. The substrate is heated by an ir lamp (infrared lamp) from the upper side thereof to volatilize the solvent of the dispersion, and the heat-resistant plastic spacer beads are fixed to the concave portion of the BM (light-shielding film) to have a function of aligning the liquid crystal molecules. The solution was applied locally by an inkjet coating method only locally in an effective display area. Then, the temperature of the substrate is raised, the viscosity of the solution is lowered, and the unevenness of the surface of the liquid is leveled and flattened, and then the substrate is cooled to room temperature or lower to increase the viscosity of the coating liquid, and the substrate is simultaneously cooled and coated in a reduced pressure environment. The solvent of the solution is volatilized. [Means 4] 6 1364523 Regarding the unit process of the liquid crystal display element, the ink is applied on the side of the color filter substrate by using a spray coating method, and the liquid which disperses the heat-resistant plastic spacer beads is applied to the scanning line of the active array substrate. The concave portion formed on the light-shielding film of the substrate is dropped with a dispersion at a specific position where it is processed. The substrate is heated by IR' from the upper side thereof to volatilize the solvent of the fractional liquid, and the heat-resistant plastic spacer beads are fixed to the concave portion of the BM (light-shielding film), and the same molecular solution having the mechanism of aligning the liquid crystal molecules The coating was applied only locally in the effective display area by the inkjet coating method. Then, the temperature of the substrate is raised, the unevenness of the surface of the liquid is leveled, and the substrate is flattened, and then the substrate is cooled to a freezing point temperature of the coating liquid. The substrate is then allowed to sublime in a vacuum environment with the solidified coating liquid. [Means 5] The process of forming the organic film only in a partial region of the substrate by the inkjet coating method is performed by at least one of the substrate or the head of the inkjet coating device at least once. In the reciprocating motion, when the functional film is coated on the substrate by the target area, the coating area of the reciprocating motion and the coating area of the return path are only separated by the inkjet nozzle (n + 1/ 2) times (but n is an integer of 1 or more) is applied by being translated in a direction orthogonal to the reciprocating motion. [Means 6] The process of forming a color filter layer of a color filter substrate by an inkjet coating method is performed by reciprocating at least one of at least one of a substrate or a head of an inkjet coating device The movement 'when one type of the color filter layer is applied' is to apply the reciprocating outwardly-coated area and the return-coated area to an integer multiple of the interval of 7 丄:564523 嗔 ink nozzle in the direction orthogonal to the reciprocating motion Apply by shifting. [Means 7] In the inkjet coating solution for forming a functional film, the content of at least one of ethyl carbonate (EC) or dimercaptocarbonic acid (DMC) in the adjustment solution is 5 wt% or more, at 40 The viscosity at °C is 30 cp (centipoise) or less, and the freezing point temperature is 35 ° C or lower and negative 20 . (:the above.

[Means 8] Regarding the inkjet coating solution for forming a functional film, the content of at least one of diterpene-based milling (DMSO) or dioxane in the conditioning solution is 5 wt% or more, at 401 The viscosity at the time is 30 cp (centipoise) or less, and the freezing point temperature is positive 17. (: below, minus 201 or more. [Means 9] For the inkjet coating solution for forming a functional film, adjust the 1,6-hexanediol (1,6-]^ and 3116 (^〇1) in the solution, or Is 2,3-butanediol, or 1,4-butanediol, or glycerin, or ethylene glycol mono-phenyl ether ( The content of at least one of ethylene glycol monophenyl ether) is 5% by weight or more, the viscosity at 40 ° C is 30 cp (centipoise) or less, and the freezing point temperature is 20 ° C or lower and minus 20 ° C or higher. Means 10] For an inkjet coating solution for forming a functional film, adjusting a veratrole in a solution, or at least one of heliotropin' or dimethyl phthalate The content of 8 1364523 is 5 wt% or more, the viscosity at 40 ° C is 30 cp (centipoise) or less, and the freezing point temperature is 35 ° C or lower and minus 20 ° C. [Means 11 ] About functional film formation An inkjet coating solution, the solution is adjusted to contain at least one of soluble polyimine or polylysine, and The content of at least one of the ethyl carbonate (EC) or the dimercaptocarbonic acid (DMC) in the solution is more than 5% by weight, the viscosity at 40 ° C is 30 cp or less, and the freezing point temperature It is 35 ° C or less and negative 2 (TC or more.

[Means 12] Regarding an inkjet coating solution for forming a functional film, adjusting the solution to contain at least one of soluble polyimine or polylysine, and dimethylhydrazine (DMSO) in the solution or The content of at least one of the dioxins is 5 wt% or more, the viscosity at 40 ° C is 30 cp (centipoise) or less, and the freezing point temperature is 17 ° C or lower and minus 20 ° C or higher. [Means 13] Regarding an inkjet coating solution for forming a functional film, the solution is adjusted to contain at least one of soluble polyimine or polylysine, and 1,6-hexanediol in the solution' or Is 2,3-butanediol (2,3-1) 1^3116 (11〇1), or 1'4-butanediol (1,4-butanediol), or glycerol, or B> The content of at least one of the leaven monophenyl ether is 5 wt% or more 'the viscosity at 40 ° C is 3 Ocp (centipoise) or less, and the freezing point temperature is 2 〇 ° C or lower and minus 20 ° C or higher. [Means 14] Regarding the inkjet coating solution for forming a functional film, the solution is adjusted so that 1364523 contains less one of soluble polyimine or polylysine, and the cucurbit ether in the solution, or The content of at least one of eucalyptus aldehyde or dimethyl citrate is 5 wt% or more, the viscosity at 40 ° C is 3 〇 Cp (centipoise) or less, and the freezing point temperature is 35 ° C or less. Negative 2 (TC or more. [Means 15] In the solution of means 11, 12, 13, and 14 'at least one of a carbon nanotube, a carbon nano horn, or a fullerene (fuUeren) is dispersed. As described above, after coating, the film resistance value of the film which is dried and fired is in the range of 1 〇 11 to 1 013 ohms. [Means 16] Inkjet coating for formation of a flat layer of a color filter substrate and a TFT array substrate The cloth solution is adjusted to contain Perhydropolysi lazane' and at least one of the carbonic acid excipients (ec) or dimethyl carbonate (DMC) in the solution contains 5 Above 10% by weight, the viscosity at 40 ° C is 30 cp (μ &,,, ρ / to, 曰) U, and The solid point temperature is 35° C. or lower and negative 20° C. or higher. [Means 17] The flat coating solution for the color filter substrate and the TFT array substrate is adjusted to contain a one-layer inkjet (Perhydropolysilazane). And the content of at least one of the dioxins in the solution is in the range of 5 dans. The viscosity at 40 ° C is 30 cp (centipoise) or less, B & 1 and solidification 17. (: , minus 20 ° C or more. Peroxypolyazoxide methyl milling (DMS0) or point temperature is positive [Means 18] 1364523 Inkjet coating solution for forming a flattening layer of a color filter substrate and a TFT array substrate Adjusted to contain perhydrazin P〇lysilazane, and the content of at least one of the cucurbits in the solution or the sputum = fragrant, or dimethyl citrate is 5 weight = Above the percentage, the viscosity at 4 (TC is 30 cp (centipoise) or less and = the solid temperature is 35 ° C or lower, minus 20 ° C or higher. [Means 19] In the solution of means 1, 6, 7, and 18, At least dispersed carbon nanotubes

Among the carbon nanohorns or fullerenes, the thin layer resistance of the coating, dry-fired tantalum is in the range of 丨〇丨丨~丨〇丨3 ohms. [Means 20] In the solution of the means 16, 17, 18, at least a carbon nanotube, a carbon nanohorn or a fullerene is dispersed - the above - coating I, the thin layer impedance value of the dried fired film Between the range of 1〇2~1〇6 ohms. [Means 21] At least a transparent conductive nanoparticle such as zinc oxide (z丨nc Oxide) or indium kick oxide (in (jiuin Tin Oxide, ιτο) is dispersed in the solution of the means 1 6, 17, and 18. The thin layer resistance value of the film after dry coating is between 10 and 105 ohms. [Means 22] At least the zinc oxide (zinc) is dispersed in the solution of the means 16, 17, and 18.

Oxide) or indium tin oxide (丨^丨(10)fin Oxide, ιτο), in addition to the moon-transparent nanoparticle, is also dispersed with a carbon nanotube, and the thin layer impedance of the dried fired film after coating Values range between 1 〇 and 105 ohms. 1364523 [Means 23] When a color filter substrate for a display element is produced, 'on a substrate having a thickness of 1 to 5 μm (light-shielding film) is formed. 'The ink-dispersed coating liquid is surrounded by BM by an inkjet coating method. The opening of the pixel ^: After coating separately, the solvent is dried by heating or under a reduced pressure environment, and the volume of the solution formed in the 1 昼 color layer coated by the BM is close to hh (S system 1 pixel) When the area of the opening portion is the thickness of the h-based BM, the applied liquid is flattened by a roll press at a pressure of two times to flatten the color filter layer. Next, the substrate was cooled, and the residual solvent was evaporated to dryness in a reduced pressure atmosphere, and then returned to normal pressure to be heated and hardened. [Means 24] When a color filter substrate for a display element is produced, a substrate having a thickness of 1 mm to 5 μm (light-shielding film) is formed, and a pigment dispersion coating liquid of three colors of r, 〇, and B is applied by an inkjet coating method. After being coated by the opening portions surrounded by the BM, the solvent is dried by heating or under a reduced pressure environment, and the volume of the color filter layer forming solution applied to the 1 pixel surrounded by bm is close to Sxh (s system 1) When the area of the opening portion of the pixel is the thickness of the h-based BM, the applied liquid is flattened by a rolling press at a pressure different from that of the reciprocating force to flatten the enamel layer. Then, the substrate was cooled and the residual solvent was allowed to evaporate and dry in a vacuum atmosphere, and then returned to normal pressure and then heat-hardened. [Means 25] When a color filter substrate for a display element is produced, a plurality of ink jet nozzles having a buckling shape arranged in a line are arranged in a shape of a buckling 12 1364523' by a plurality of ink jet nozzles. The inkjet nozzles respectively apply different driving waveforms, and at the same time, one of the inkjet heads and the substrate is moved toward the alignment of the enamel layer, so that the BM shape of the inkjet nozzle does not need to be flexed. The alignment direction of the color layers is shifted by one pass each time, that is, the buckling color filter layer is formed by coating. [Means 26] For a plurality of inkjet heads coated with a color filter layer, one position of the (10) (light-shielding film) pattern of the substrate is set before the color filter layer is applied to one of the microscope CCD cameras After being read by the microscope CCD camera and stored in the memory, based on the position information of the BM pattern, the inkjet head ejection signal and the color ink inking position are respectively controlled by individual inkjet nozzles, and the filter is filtered. The color layer is formed by coating. [Means 27] For a plurality of inkjet heads coated with a color filter layer, one or more microscope CCD cameras are provided on the front and rear portions of the head along the application movement direction of the inkjet head, and the substrate is placed. After the alignment is aligned with the camera to the predetermined position, the inkjet head is moved to the position where the coating is started. The nozzle moves from the starting point _, set in front of the inkjet head. #(10) The camera detects the pattern position of the BM (light shielding film), and the position of the dynamic control panel and the inkjet nozzle is simultaneously coated to form a color crossing. The ink used in the layer. The CCD camera installed at the rear of the inkjet head detects the pattern position of the 胄 (shading film) and applies it to a predetermined range, and separates the ejection signal of the inkjet head from the position of the nozzle. The inkjet head is controlled by feedback, and the enamel layer is applied. In the coating process of the forward and return strokes, the roles of the microscope CCD cameras which are placed before and after the ink jet head are interchanged and coated. Month [Means 28], 装载, Υ, Θ of the substrate on which the functional film is formed can be adjusted to adjust the gas sliding of the alignment machine, and the inkjet nozzle for coating the mobile film (heart factory: 1* The bearing 'is composed on the same-base; the gas/moon bearing that moves the inkjet head, and the gas sliding bearing that moves the ink supply tank and the control circuit block for the inkjet head drive, They are separately separated and driven by individual linear motors; and the base of the alignment machine and the gas sliding bearing, and the base of the fixed magnet part supporting the linear motor are respectively disposed on separate independent foundations. In the above configuration, the stress acting on the fixed magnet portion of the linear motor generated by moving the ink jet head, the ink supply tank, and the ink jet head drive control circuit block, and the power The stress on the system cable is absorbed by an individual damper to operate the inkjet head. When the solution of the functional film is coated on the substrate, the rate of change of the relative speed of the alignment machine and the inkjet head is Coating was carried out under conditions of 3% or less. [Means 29] At the position of the machine table of the field of view of the microscope CCD camera provided on the corresponding ink jet head of the ink jet coating device used in the means 26, the means 27, and the means 28, along the ink jet The moving direction of the head is set to be continuous and elongated, and the LED lamp used as a backlight switches the R, G, and B primary colors in accordance with the applied color. [Means 30] 1364523 When the spacer beads are arranged using an inkjet coating legal point, it is good for the application of the ink containing the spacer beads! Sore 5S . /V W.丨π 1 -

Position of the field of view of the camera, along with the direction of movement of the inkjet head, a continuous and elongated LED lamp for backlighting, before applying the ink containing the spacer beads, first position the pattern of the BM (light-shielding film) of the color filter substrate The information is read by the microscope CCD camera and stored in the memory. Based on the position information of the graphic, the inkjet head ejection signal and the color ink inking position are respectively controlled by individual inkjet nozzles. The ink containing the spacer beads was spot-coated. By using the means 1, as shown in the fourth figure, it is possible to prevent the film thickness of the outermost peripheral portion of the coating from being increased to cause the occurrence of edge moiré, and a uniform coating film thickness can be obtained. Therefore, the element gap is bad. On the light-emitting surface of organic EL. In the case where the liquid crystal display element can be prevented from being single, it is possible to obtain a recessed region formed entirely inside the (light-shielding film) by using the means 3, 4, 30 as shown in the thirtieth and fourteenthth drawings. On the upper side, the spacer beads can be gathered. As shown in the twenty-ninth figure, since the spacer beads larger than the liquid crystal cell can be used, the amount of deformation of the spacer beads with respect to stress can be increased. Therefore, it is possible to prevent the generation of residual air bubbles and the prevention of the occurrence of gravity moire in the ODF process, thereby improving the yield. By using means 5, as shown in the ninth and tenth figures, by shifting the nozzle only by its interval (n + l / 2) (but n is a natural number), the nozzle characteristics of 15 1364523 • the difference Averaging is done. In the case of the transfer method, which only shifts the nozzle interval by 1/2, as shown in the second figure, the difference in nozzle characteristics is not averaged, but is more emphasized. Although the occurrence of strip moiré can not be reduced by the conventional method/remaining cloth, by means of means 5, the strip-shaped moiré of the reciprocating coated hair strand can be greatly reduced. By using means 6, as shown in the twelfth and thirteenth drawings, the averaging of the difference in the characteristics of the two nozzles can be made. Although the conventional reciprocating coating, as shown in Fig. 10, shows that although the difference in nozzle characteristics is not averaged, it is more powerful: it is emphasized, so the occurrence of strip moiré cannot be reduced' but by hand &; 6 ' can greatly reduce the strip of moiré caused by reciprocating coating. By means of means 7, 8, 9, 10, U, 12, 13, 14, 16, i7, the vacuum drying of the bundle can be easily performed. (4) The ink jet clogging is not easy to occur. The inkjet coating residual image can be used to reduce the residual electric star and prevent the use of means 7, 8, 9 such as the M $17 image of the second color filter substrate. 1^ soap purification, and can reduce costs. Benefits and means 23, 24, as shown in the twentieth and twentieth-graphs 'two:: two (light-shielding film) water treatment, that is, the color layer can be filled to fill the requirements and can form a uniform crossing Color layer. Since the positional accuracy can be suppressed even if it is not strict, the enamel layer can be flattened, and the generation of moiré can be suppressed, and the yield can be greatly improved. With the flat::: means 25, even if the shape of the filter or the color layer is buckling, the color substrate can be produced at the same speed as the color layer. By combining 16 1364523 means 25 and tilting 23, 24, even if the shape of the enamel layer is buckling, the color filter layer can be filled in the opening area to suppress the occurrence of moiré. By using the means 26 and 27, since the ink droplets can be accurately formed in the opening region of the BM (light-shielding film), the absolute size of the color filter ❶BM which does not generate color moiré can be produced with high yield. The error is in the size of 4 inches, 'although a few micrometers occur', since the size error is dispersed by a plurality of inkjet heads by means (9)," the color filter layer forms ink. The accuracy of the inking of the material does not deteriorate. By using the means 28, the frequently occurring scanning moiré is reduced by moving the ink jet head. As shown in the thirty-seventh figure, the base and support of the fixed magnet of the linear motor The bases of the machine bases of the glass substrates are individually disposed on a completely separate basis, and the stress/reaction stress generated by the gantry crane provided with the ink jet heads during scanning is not directly As shown in Figure 37, since the cable of the power system is also connected to other overhead cranes other than the inkjet nozzle, the vibration and stress caused by pulling the cable of the power system, It is not directly supported by an overhead crane provided with an ink jet head. For these reasons, the variation of the scanning speed of the ink jet head can be suppressed below Μ. Μ By using means 29, the BM pattern is CCD camera The recognition rate is improved, and the ink-catching position recognition rate of the color filter layer forming ink at the time of ink-jet coating is also improved. For example, the thirty-third, thirty-fourth, thirty-sixth, and thirty-seventh drawings As shown, by providing an elongated and continuous backlight along the moving direction of the inkjet head in the inside of the machine supporting the substrate, even if the applied screen size is different, the switch table is not required, so that it can be improved. The operating rate of the 1364523' is set. By using the means 29, it is easier to identify the dropping position of the color filter layer forming solution by using the LEDs corresponding to R, G, and B. Let G be dropped by dropping the solution of the R color LED light of B color and B color, LED light of R color and B color when the solution of G color is dropped, and LED light of G color and G color when the solution of 8 colors is dropped, can be considered for M ^ The dropping position of the color layer forming solution is correctly counted It makes the feedback easier to achieve. Because compared with the fluorescent lamp, the heat of the LED is small, the temperature change of the machine is small, and the discharge noise does not occur, the control circuit will not cause wrong action. According to the means 30, the accuracy of the dropping position of the solution containing the spacer beads of the BM can be improved, and the contrast of the display screen can be improved. [Embodiment] [Example 1] * As shown in the fifth and sixth drawings, the present invention is The flow chart of the functional film formation method using inkjet coating using the bed knot vacuum drying method is as follows. The conventional method, as shown in the first figure and the second figure, only shifts the ink jet nozzle by 1/ of its interval. 2, to form a mask (1 ^ 1 ^ film). This method is shown in the second figure, if the discharge amount of the nozzle is different 'Bei 1j will produce the effect of emphasizing the difference, so stripe moiré is easy to occur. In the present invention, a mode in which (1 + 1/2) or (2 + 1/2) intervals of ink jet nozzles are shifted is employed. As shown in Fig. 9 and Fig. 10, in the case of the present invention, since the difference in the discharge amount of the nozzles is averaged, the occurrence of stripe moiré can be reduced. 18 1364523 Further, in the present invention, as shown in Fig. 16, since the solvent is dried by using a special dryer, as shown in Fig. 15, no morphological change with drying is caused. As shown in the fourth figure, it is possible to prevent an edge moiré phenomenon which is increased in the outermost peripheral region of the coating film. Conventionally, using a hot plate and a solvent drying method at a temperature of around 50 to 70 t, the film thickness of the polyimide is 800 angstroms in the center portion (Angstr0m, imaginary, the thickest portion of the outermost portion reaches 3000). ~6_ ang, it is difficult to form a uniform cell gap. Under the mud formed by the inkjet blasting method, > fruit does not correctly adjust the ejection 一个 of one nozzle, then the strip cloud will inevitably occur In the present invention, as for the method (4) in which the crucible is reciprocated, a two-reciprocating coating method may be employed to make the difference in the discharge amount of the nozzles 'average'. In the forty-eighth diagram, 2. Example of the reciprocating coating method. In the inkjet coating method, after coating, it is necessary to heat the substrate to lower the viscosity of the coating liquid, and to flatten the coating liquid surface, although 4Q to 60 degrees. The degree of temperature is 1": heating flattening treatment to the extent of 20 seconds, but if the solvent is evaporated and dried in this state, 'dry moiré will occur, and it will easily become a cause of display cloud. After the heating flattening process is finished, By cooling the substrate; the viscosity of the solution is increased #Decompressing the solvent in a decompressing environment, the occurrence of moiré can be suppressed considerably. Depending on the type of solution, some solutions do not have a viscosity even at low temperatures. In this case, by using cooling The method of sublimating the solvent from the substrate to the freezing point of the solvent and after vacuuming, can completely dry the moiré and the edge moiré to prevent the solvent from being completely volatilized, and then returning the substrate to the normal pressure by 1364523 and then performing the heat hardening reaction treatment. ^ An aligning film of the amic acid type is heated at 220 to 230 Torr for about 20 to 30 minutes to cause an imide reaction to form a polyimide film. (Embodiment 2) FIG. 14 is an explanatory diagram of a procedure for positioning a spacer bead using an inkjet coating method according to a second embodiment of the present invention. Conventionally, a spacer bead is disposed using an inkjet coating method. The procedure is based on an alignment film formed on bm (light-shielding film), and the spacer beads are dripped with a liquid. In this case, the solvent is pure water, 1 or the like, and is dropped onto the alignment film. It is prone to poor alignment. In order to suppress spots and moiré, only pure water and 1PA can be used. In vertical alignment mode (m〇de), IPA cannot be used. Pure water and IPA have low boiling point and are easy to use. In the case where the LCD TV and other sophomores are blocked, and the screen is not available, if the solid force of the spacer beads is weak, the spacer beads will move to the current position during the unit formation process. The mainstream cost of the sequence is smaller than the spacing of the beads into optical spacer elements compared to the spacer beads, when the amount of change in height is small, in the liquid sputum: for the application of (four) stress retention crevice and gravity moiré easily occur. If you have a problem with the residual ## 疋β〗 If the gap is below 3 microns, the door shout will happen frequently. Even if the amount of deformation for the compressive stress is small, as shown in the nineteenth aspect, the tendency is small. In the present invention, there may be a π 以下 跟 了 了 了 了 了 了 让 让 让 让 让 让 让 让 让 让 让 让 让 让 让 让 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂 皂A region where the recess is formed; in this region, the spacer is fixed and arranged. The dispersion solvent of the spacer beads is the same solvent as the alignment film, and the / gluten solution contains the same two molecules as the alignment film. In the present invention, a method of re-forming an alignment film after the spacer beads are disposed at a fixed point is employed. By this method, the fixing strength of the spacer beads becomes very strong, and the displacement and movement of the spacer beads can be completely prevented. Even if an optical spacer element is used, as shown in the forty-fifth figure, a concave portion is formed in the central portion of the bm, and by arranging the spacer beads on the concave portion, even if the cell gap is reduced to 3 μm or less, the optical spacer element can be set. The effect is 5 microns. Since the amount of displacement of the height of the compressive stress can be increased, the defects of residual air bubbles and gravity moiré can be reduced. After the spacer beads were placed in a fixed position and fixed, in the case where the alignment film was formed by an inkjet coating method, the bundle knot vacuum drying method used in the example was used. In the case of the pre-bake drying method using a conventional hot plate, the drying of the periphery of the spacer beads is delayed, and the film thickness of the alignment film around the spacer beads becomes abnormally thick and is likely to become spots. The reason for the poor spacing between the cells and the "freezing vacuum drying method used in the present invention" can prevent the film thickness abnormality of the alignment film around the spacer beads. Since the soluble polyimide intermediate polymer and the polyamic acid polymer which are the same as the alignment film are contained in the dispersion of the spacer beads, the spacer beads can be stably dispersed. The solid content of the polymer is in the range of 〇. i~5% is very sufficient. The boiling point of the solvent was also used at 200. (: The above solvent can prevent clogging of the nozzle. When the spacer beads are arranged by inkjet coating, the method of drying the solvent is very important. As shown in Fig. 30, from the upper 21 1364523 side of the substrate In the invention, infrared (IR) is used for heating. It is important here that the BM (light-shielding film) selectively absorbs infrared rays to raise the temperature, and it is necessary to start the evaporation of the solution from the contact with the BM. It is also possible to irradiate the infrared rays from the lower side of the substrate. Only the BM is heated. If the concave portion of the central portion of the BM can be finally dried (four), the spacer beads can be gathered in the concave portion. The specific gravity of the spacer beads is slightly smaller than that of the solution, and the spacer beads can be surely gathered in the concave portion. 3] % as shown in the seventh, eighth, twenty-second, twenty-third, thirty-ninth, fortieth, and forty-first maps, forty-two, forty FIG. 3 is a flow chart showing a method of manufacturing a color filter substrate by an inkjet coating method according to a third embodiment of the present invention. In the case of forming a color filter layer by a conventional inkjet coating method, as in the tenth- Figure shows 'reciprocating in the same position The same tip-coating color filter layer. With this method, the difference in the discharge amount of the nozzle is emphasized and the vertical strip-like moiré is often generated. In the present invention, as in the twelfth and thirteenth _ The figure shows the way to average the difference in the amount of discharge by shifting the position of the coating nozzle by an integral multiple of the interval at which the coating position is shifted in the forward and return strokes, because the nozzle output is adjusted even if the nozzles are individually controlled. In order to be uniform, the amount of discharge will still vary. If the characteristics of the nozzle are not averaged, the occurrence of longitudinal stripe moiré cannot be prevented. In the present invention, although only the reciprocating coating by Yuci will be mentioned The manner in which the position of the nozzle is translated can be further averaged by differentiating the characteristics of the nozzle by applying the nozzle position by two times of reciprocating coating to the position of the nozzle for three times. Figure 47 is a diagram illustrating the translation of the coating position by two reciprocating coatings. 22 1364523 In the seventh and eighth figures, the substrate is heated to reduce the inkjet coating; Layer opening > viscosity of the solution, surrounded by BM In the opening area, the solution forming the enamel layer can be expanded without leaving a gap. In this case, not only the viscosity of the solution but also the surface tension must be lowered. Further, the BM must have a water plucking function. The cost of materials and procedures has become a problem. The thirty-eighth figure is a cross-sectional view of a conventionally performed procedure for forming a color filter layer by a wide ink coating method. The color filter layer is flattened, and as actually explained in the fourth figure, edge moiré occurs, and large unevenness is generated on the surface of the color filter layer. In order to eliminate surface unevenness on the color filter for liquid crystal display devices Then, it is necessary to further form a planarization layer on the upper surface of the color filter layer.

In the present invention, as in the twentieth, twenty-first, and twelfth drawings, the color filter layer forming solution is dropped by the inkjet coating method in the opening region of the BM, and then rolled. The machine flattens the dripped solution in the opening area of the BM, so that the color filter layer forming solution can be expanded without leaving a gap. As shown in Fig. 44, by reciprocating the color filter layer forming solution by a roller press, it is preferable to concentrate the dropping position at the time of ink jet coating on the opening of the BM. Near the center of the crucible, as long as the amount of dripping is controlled, a color filter layer without moiré can be formed. In the case of the inkjet coating method, it is only necessary to pay attention to the necessary viscosity and surface tension. Eliminating the need for the BM to have a water-repellent function reduces program cost and material costs. As shown in Fig. 21, the pressurizing load at the time of the rolling process is changed by the forward stroke and the return stroke. The solution can be formed in the filled color filter layer without leaving a gap in the opening portion. As shown in Fig. 19, the amount of dripping is adjusted in consideration of the area of the opening portion surrounded by βΜ and the height of BM 23 1364523.

It is necessary to apply water-repellent treatment and oil-repellent treatment on the rolled surface so as not to allow the color filter layer forming solution to adhere to the rolling surface. For the shape of the rolling element, a sliding roller (flatr〇u) as shown in Fig. 20 may be used, or a rolling element formed with a convex portion in accordance with the BM spacing as shown in Fig. 30 may be used. In the thirty-ninth, twenty-fourth, forty-first, forty-second, and forty-third, after the color filter layers of the R, G, and B colors are formed into a solution, Further, the flattening treatment is carried out by a roller press, but it may be flattened by a roller press every time one color is dropped. It is also possible to have a heating function for the roller press. [Embodiment 4] A thirty-third diagram, a thirty-fourth diagram, and a thirty-seventh diagram are apparatuses for forming a functional film by inkjet coating only in a specific region of a substrate according to a fourth embodiment of the present invention. Top view and section view. In the thirty-third figure, two sets of long-sized inkjet heads are used. In the thirty-fourth figure, six sets of short spring size ink jet heads are used. Each of the ink jet heads is provided with a CCJ or more camera: in order to make the scanning moving direction of the ink jet head and the arrangement direction of the color filter layers of the coloring substrate completely parallel, the machine supporting the substrate can be X, Y, W to adjust. #图六图图, the machine platform of the branch floor is provided with a plurality of long back % LEDs "sources" corresponding to the position where the CCD camera moves. As for the apparatus for applying the alignment film, a device in which a white color source can be used and a color filter layer is applied is used, and an LED light source corresponding to three primary colors of R, G, and B of the color filter layer is used, and the luminescent color thereof is switched. In the case of masks such as alignment films, planarized germanium, and passivation protective films, etc. 24 1364523 'The X, Y, and one adjustment of the coated substrate do not require high precision, but are coated in the color filter layer. In the case of cloth, the adjustment accuracy of X, Υ, and Θ is very strict. In the ink jet coating method, the distance from the tip end of the nozzle to the substrate is 0.3 with a degree of 〜1. 〇mm, and the ink accuracy is ±1 〇 micrometer to ±3 微米 micrometer. Therefore, it is preferable that the alignment accuracy of the position of the BM of the color filter substrate and the position of the ink jet nozzle is increased to ±5 μm. In the thirty-fourth and thirty-seventh drawings, a CCD camera is disposed in front of and behind the ink jet head, and the ink inking position at the time of reciprocating coating can be measured. The G color and the B color of the LED backlight are caused to illuminate when the R color color layer forming solution is applied to measure the ink position of the R color ink for the BM. When the color filter layer of the G color is applied as a solution, the R color and the B color of the LED backlight are caused to emit light, and when the μ layer of the B color is formed into a solution, the R color and the g color of the LED backlight are caused to emit light. [Embodiment 4] Fifteenth Embodiment A fifth embodiment of the present invention is a plan view of an ink jet nozzle in which a zigzag buckling color filter layer is formed. The twenty-fourth embodiment is a configuration explanatory diagram of an ink jet head nozzle for forming a buckling color filter layer for a vertical alignment mode. Both of them are characterized in that a plurality of nozzles are grouped in order to apply the zigzag buckling color filter layer of the i-row. With such an arrangement, it is not necessary to apply the color filter layer forming solution to the ink jet head in the direction orthogonal to the scanning direction, so that it can be used in the same manner as the tanted substrate of the in-line arrangement structure. The speed of the coating is greatly increased and the productivity is greatly improved. The twenty-sixth figure is a nozzle of a conventionally proposed ink jet head in which the nozzles of three ink jet heads correspond to the color filters of one column in order to enable high-speed coating of the 25 1364523 color filter substrate of the in-line arrangement structure. Configuration top view. The three nozzles, although grouped, are arranged in series. In the present invention, although a plurality of nozzles are grouped, they are not arranged in series. In the twenty-sixth embodiment, although the ink jet head is driven by the same signal waveform whose phases are shifted, in the case of the ink jet head of the present invention in the twenty-fifth diagram, the grouped ink jet head The system must be driven by a different signal waveform.

As shown in the thirty-eighth drawing, it is extremely difficult to form a zigzag-shaped buckling color filter layer as shown in Figs. 24 and 25 in the conventional ink-jet coating method. This is because it is difficult to form a solution by filling the color filter layer without leaving a gap in the opening portion of the BM. However, if the rolling press used in the twentieth embodiment of the present invention is used to flatten the coating solution to flatten it, the filling filter layer can be left in the region of the opening of the buckling without leaving a gap. In the present invention, when the height of the film thickness of the buckling BM is 1.25 μm or more and the coating solution is flattened by a roller press, it is easy to fill the opening of the BM without leaving a gap, and Will not seep into the side. [Embodiment 6] A fortieth diagram and a fiftyth diagram are flowcharts of an alignment film formation method using an inkjet coating method according to a sixth embodiment of the present invention. In the same manner as in the embodiment, in order to average the difference in the discharge amount of the nozzle, the position of the nozzle is shifted only by (n + 1/2) of the inkjet nozzle pitch during the overcoat coating and the return coating (but the η system) Apply for natural numbers). In the sixth embodiment, instead of the treatment for flattening the unevenness of the surface of the coating solution by the heat treatment for the first embodiment, the forty-fourth and fifty-first graphs are performed to roll. Press 26 1364523 Flattening the flattening of the alignment film forming solution. The fourth i T eight diagram is the program diagram of the program. Prisoner von is used for inkjet coating of the grain thickness of the grain grazing system of 5 cp to 30 cp, and the surface of the coating liquid is flattened by a roller press. Adding at least one of the substrate or the rolling element if the solution is heated to reduce the dot of the solution

The heat 'when pressed by the rolling elements' makes the flattening easy. In general, it is better to heat the rolling elements to pressurize to obtain a uniform flat surface. In order to flatten the liquid surface by a conventional coating liquid level flattening treatment by heating after inkjet coating, it is necessary to select a solvent to reduce the surface tension and viscosity of the coating liquid. In order to suppress clogging of the ink jet nozzle, it is necessary to use a solvent having a high boiling point. It is very difficult to find a solvent that meets all the conditions. The method of flattening the coating liquid level by the roller press used in the sixth embodiment of the present invention can be used in combination with the solvent drying method using a reduced pressure environment and a vacuum environment to expand the degree of freedom in selecting the solvent. Since the difference in the discharge amount of the ink jet and the difference in the discharge direction occur in the alignment film coating process using the inkjet coating method, it is impossible to completely suppress the strip moiré in the coating direction. By using the flat boring process of the roller compactor, it is possible to eliminate variations in the coating film thickness at close distances, which makes the occurrence of the stripe moiré inconspicuous. After eliminating the variation of the coating film thickness between close distances, '# by the freeze vacuum drying method of the present invention, the solvent is sublimated by 13⁄4, and the pressure drops.. ^ You can completely prevent the occurrence of edge moiré, so it is possible to remove the U The moiré of the liquid crystal cell gap is poor. [Embodiment 7] 27 1364523 The seventeenth and fifty-firstth drawings are a plan view and a cross-sectional view of the inkjet coating of the present invention: a press. The position of the enamel layer is controlled by the inkjet coating method. The positional accuracy must reach the distance measurement method of the soil 3~±5 micrometer Si ί head meter and the glass ruler to measure the inkjet

: In the case of ζ ζ, it is necessary to minimize vibration or shock. ::,it causes the inkjet head to operate. When the variation of the scanning speed of the scanning movement of the head is not reduced to 〇·3% or less, coating and patterning occur. The same applies to the rolling machine. - " In the case of the conventional inkjet coating apparatus, the fixed magnet of the linear motor is moved by the gas sliding bearing of the overhead crane to the base of the machine supporting the glass substrate. In this case, when the overhead machine is started to scan, the reaction force is generated on the base of the machine supporting the substrate, and vibration or shock cannot be avoided. In addition, in the case where the cable of the power supply system is directly connected to the overhead crane provided with the inkjet nozzle, the vibration and stress of the cable of the power supply system may cause the scanning speed of the overhead crane during the scanning movement. Change. The same applies to the rolling machine. In the present invention, as shown in the thirty-seventh embodiment, the overhead crane is provided as an overhead crane provided with an ink jet head, and an overhead crane provided with a coating system tank, a solution supply system, and a drive system circuit of the ink jet head, respectively Scanning is performed by an individual linear motor. The cable of the power supply system is connected to an overhead crane provided with a coating solution tank and a solution supply pump. The base of the fixed magnet of the linear motor and the machine provided with the supporting glass substrate 28 1364523. The base of the table is completely separated and independent. In order to absorb the vibration and the shock of the reaction force of the fixed magnet of the linear motor, the dampers are respectively provided on the fixed magnets of the respective linear motors. The rolling machine of the fifty-first figure is also of the same construction. If the power system cable is directly connected to the overhead crane provided with the rolling elements, the moiré due to the moving speed of the rolling elements will easily occur, so it is necessary to provide other linear motors for moving the power system cable as in the present invention. . In the case where it is necessary to heat the rolling element, an induction heating method may be used. [Embodiment 8] The solvent described in the seventeenth, thirty-fifth, and fifty-secondth drawings is used for the alignment film 'flattening film, the color filter layer, the positive photoresist film, and the like used in the present invention. An inkjet coating solution of a functional film of a negative photoresist film or the like. Since the heat-resistant temperature of the amorphous Si licon TFT substrate is at most +280 degrees, the solvent described in these tables can be used as long as the functional film can be dissolved. However, in the case of the color filter layer and the alignment film, since the heat resistance temperature of the pigment of φ color is around 230 to 240 degrees, it is necessary to dry the solvent in a normal pressure environment, and the solvent having a boiling point of 2501 or more tends to remain in the ruthenium. I need to pay attention to it. In the present invention, since the freeze-vacuum dry-drying method shown in Fig. 16 is used, even if the solvent having a high boiling point does not easily remain in the film, the degree of freedom in the selection of the + medium is extremely large. Although the clogging of the nozzle nozzle is a big problem in mass production in the inkjet coating method, the problem of nozzle clogging can be solved by using the high-boiling solvent used in the present invention. The solvent of the conventional alignment film is as shown in Fig. 18, and the solvent of the inkjet nozzle is not easily generated although the solvent is used at 2 〇〇C in the right side, but the liquid level after the dropping is not easy. The planarization is carried out by heat treatment, and the flattening of the liquid surface and the evaporation of the solvent are carried out in the same process. Therefore, since the drying is performed under the condition that the surface tension and the viscosity of the solution are lowered, the film thickness of the outermost peripheral portion of the coating is 跫 ,, and the '* thick edge moiré phenomenon is avoided by the helmet method. As shown in Figure 18, '", </combined media because its freezing point temperature is below _2 〇 C, the solution will be coated with the cold part of the substrate, and the viscosity of the solution will increase 'or It takes a long time for the solution to solidify. In the present invention, as shown in the seventeenth, thirty-fifth, and fifty-secondth drawings, since the freezing point temperature is above, the solvent of C or higher can be: The solution on the substrate is solidified in a short time. By allowing the solution coated on the substrate to solidify and lifting the solvent in a vacuum environment, the phenomenon of edge moiré can be completely prevented. It is used in a liquid crystal display device. In the case of the alignment film and the flattening film 'color layer, the uniformity of the coating film thickness between the close distances is not limited to the inside of the 〇*, and the strip-shaped moiré will be formed to appear. Cloth moiré, must be sturdy and solid yoke can be put into practical use. In the case of application of positive photoresist and negative Μ ^, and nine resistance by inkjet coating method, the system cannot be used in the conventional gap. ,. Ί 1 permanent chrome plating machine (si 11 coater) and rotary film machine The low pools such as methyl ethyl ketone and propylene glycol monomethyl ether used in spin coater and μ ter) are used as w-point solvent. This is because nozzle clogging often occurs. For positive photoresist and negative first resistance, use high-boiling solvent such as the seventeenth, twenty-fifth, and fifty-second 二0 a 5 loadings, if 30 dong, '·° vacuum drying The method of preventing the edge of the moiré phenomenon, the combination of the solvents described in 7, 8, 9, and jnji is the combination of the present invention, 12, 13, 14, 16, 17 '18. For example, the flute is not limited to the freezing point temperature of the invention, and the content of the solvent on the coating 2:: is equal to or greater than (5). Drying. The vacuum drying method used in Ming is in a short time [Example 9] In the case where a conductive film is formed by the t-ink coating method, the fringe cloud 2 edge moiré is also likely to occur. Blockage of the nozzle of the inkjet squeegee: can be used as The seven-figure, thirty-fifth, and fifty-second maps contain the high-seat media, which are compared with the cold liquid knife-shaped carbon nanotubes and the rear nano-angles of metal oxides such as IT〇 and IZ〇. It is better to form a high-resistance film with good reproducibility, and especially in the (10) mode and FFS mode alignment film and planarization film, with "n~wig ohm impedance value". The situation is very effective. In the IPS mode and the FFS mode, liquid crystal molecules need to be aligned in parallel in one direction. Therefore, rubbing alignment processing and ion beam alignment processing are necessarily necessary. Materials containing most carbon divalent bonds, such as carbon nanotubes, can be excellent in alignment characteristics during ion beam alignment treatment. In the IP S mode and the F F S mode, the afterimage phenomenon can be prevented by the use of the alignment film having a resistance value of 1 〇 11 〜 1 〇 13 ohms. 31 1364523 In TN mode and MVA mode, by containing carbon nanotubes, carbon nanohorns and fullerenes on bm (light-shielding film), the sheet resistance of BM can be in the range of 10~102 ohms. between. After the low-impedance BM is formed, as shown in the first seventeenth and twenty-eighthth drawings, after the color filter layer is coated by the inkjet method, the conductive alignment film is coated to allow low-impedance BM and conductivity. Electrical connection between the alignment films. By allowing the polyphthalic acid alignment film to form a solution containing a carbon nanotube, the sheet resistance can be made between 1 〇 3 and 1 〇 6 ohms. The visible light transmittance at this time is 9% or more. In the TN mode, although the brush-type alignment treatment and the ion beam alignment treatment are necessary, a material containing a majority of carbon divalent bonds such as a carbon nanotube has good alignment characteristics in the ion beam alignment treatment. Under the 纟MVA mode, the vertical alignment characteristic is spontaneously played by the molecular structure of the alignment film itself to exert the vertical alignment function so that even if the carbon nanotubes are dispersed in the alignment film, the vertical alignment machine ih is not lost. The construction of the color filter shown in the figure eliminates the need for a conventional T-transparent conductive film to significantly reduce the cost of the program. Process diagram [Simple description of the diagram] The first diagram shows the 1/2 shift of the interval of the flow from the step of the conventional alignment film formation method. The nozzle of the conventional inkjet nozzle is reciprocally coated. An illustration of the method. Use - rumored - spray t-coating - cloth I will be - interval - bead set point. Third figure: system section of the process. ...-π heart station with 'distribution alignment' Fig. 4 is an illustration of the + k t J joint cloud pattern when the inkjet coating 32 film is dried using a conventional heat drying method. Fig. 5 is a flow chart showing the alignment of the present invention. Figure 7 Flowchart. The process step of the film formation method is shown in the eighth step of the process step of the color filter layer formation method of the present invention, showing a process step of the alignment film formation method of the present invention. The ninth m. 7 of the treatment step of the color filter layer forming method of the present invention, and the reciprocating alignment film of the alignment film of the alignment film are shown in the inkjet coating method of the present invention. Fig. 10 is an explanatory view showing a coating method using an inkjet coating method of the present invention. Fig. is an explanatory view showing a conventional reciprocating coating method using a color filter layer of an inkjet coating method. Twelfth - Fig.: is an explanatory view of a recoating method of the color filter layer using the inkjet coating method of the present invention. Fig. 2 is an explanatory view showing a method of recoating a color filter layer using an inkjet coating method of the present invention. Fig. 14 is a view showing a position of a fixed point arrangement of the spacer beads of the present invention and a sectional view thereof. Figure: Comparison of freeze drying and normal drying. Flute-4* ", Fig.: Description of the freeze dryer used in the present invention Fig. 0 33 1364523 Fig. 17 shows the freezing point temperature and boiling point temperature of the solvent used in the present invention. degree. Figure 18: The freezing point of the solvent used in the tradition and the sea point temperature. Figure 19: Display element and section view. Fig. 20 is a cross-sectional view showing the manufacture of a color filter substrate for a display element of the present invention. First Η Figure: A cross-section of the program description. Figure 12: Flow chart of the system. The top view of the light-shielding film of the color filter plate of the present invention shows the process step of the color filter layer formation method of the present invention in the manufacture of the color filter substrate for a display element of the present invention. Figure 23 shows the color filter layer formation method of the present invention. Processing step

Flow chart. Twenty-fourth drawing: an arrangement diagram of nozzles forming the ink jet head of the present invention. (4) Spraying of the color layer in the shape Fig. 15 is a view showing the arrangement of the nozzles forming the ink jet head of the present invention. The first sixteenth figure: is the formation of the traditional tii- 5S ΑΑ ». The arrangement of the nozzles of the nozzles. " π " I ink twenty-seventh figure: is made by the Dutian, He ~ Τ ink cloth method of the present invention; the section of the color filter substrate is one piece < illusion. The process of spraying the 7L buckling color filter layer = circle: the traditional CF system... The CF process of the present invention 34 丄 523 brother twenty-nine figure: the line 05 · 〇 " m and 03 〇 at intervals of m Comparison of Stress Displacement Amount of Beads β Fig. 30: A cross-sectional view of a spacer bead placement program by the inkjet coating method of the present invention. Fig. 31: inkjet coating using the present invention The coating step of the method.

Fig. 22 is a cross-sectional view showing the manufacturing procedure of the color filter substrate for a display element of the present invention. Twenty-third drawing: a plan view of the inkjet coating apparatus of the present invention. Fig. 24 is a plan view of the inkjet coating apparatus of the present invention. Figure 35: The freezing point of the solvent used in the present invention and the boiling point temperature. Figure 36 is a plan view and a cross-sectional view showing a stage of a support substrate of the ink jet coating apparatus of the present invention. Figure 37 is a plan view and a cross-sectional view of an ink jet coating apparatus of the present invention. Fig. 28 is a cross-sectional view showing the manufacturing procedure of the color filter layer forming method using the conventional ink jet coating method. Fig. 39 is a flow chart showing the processing procedure of the color filter layer forming method of the present invention. Fig. 10 is a flow chart showing the processing procedure of the color filter layer forming method of the present invention. The tenth figure is a flow chart showing the processing procedure of the enamel layer forming method of the present invention. 35 1364523 A diagram showing a processing procedure of the color filter layer forming method of the present invention.

Fig. 42 is a flow chart showing the processing procedure of the color filter layer forming method of the present invention. Fig. 14 is a plan view and a cross-sectional view of a press machine used in the method of forming a enamel layer of the present invention. ^Fifty-fifth diagram: The arrangement position of the optical spacer element of the present invention and its sectional view. Fig. 46 is an explanatory view showing a secondary reciprocating coating method of an alignment film using an inkjet coating method of the present invention. Figure 47 is an explanatory view showing a two-time reciprocating coating method of the color filter layer using the inkjet coating method of the present invention. Forty-eighth drawing: a process chart in which a functional film is applied to a partial region $m^, after the field using the inkjet coating method of the present invention, using a roller press. Fig. 49 is a flow chart showing the processing steps of the alignment film forming method of the present invention. Fig. 50 is a flow chart showing the processing steps of the alignment film formation method of the present invention. Figure 51 is a plan view and a cross-sectional view of a rolling machine used in the functional film forming method of the present invention. Fifty-first graph: the freezing point and boiling point temperature of the solvent used in the present invention. [Description of main component symbols] 36 1364523 a The solution for forming an alignment film which is dropped from the ink-jet nozzle to the substrate. b - a solution for forming an alignment film which is dropped from the ink-jet nozzle to the substrate in a return mode.

C inkjet nozzle. d β---- Let the spacer beads disperse the solution by spacer beads.

f G K L m is in the forward η in the return Ρ body alignment film. Green color filter layer.膜 (shading film) film thickness. ~ One - transparent conductive film (ΙΤΟ and ΙΖΟ, etc.). Flatten the film. - Light-shielding film. -glass substrate. The dropping mode of the solution for forming a color filter layer in which the ink jet nozzle is dropped onto the substrate. —〜—Dropping mode of the solution for forming a color filter layer which is dropped from the nozzle ink nozzle to the substrate. Blue color layer. Red color layer. A nozzle for water-repellent rolling inkjet heads which is flattened in order to pressurize the color filter layer. The area of the opening surrounded by the light-shielding film in 1 pixel is 37 ^64523 τ low-impedance light-shielding film. υ Low-impedance flattening film and alignment film》 V A water-repellent rolling element for circular processing in which the color filter layer is pressed to flatten and the unevenness is applied. w Air slide bearing. X microscope CCD camera. γ The platform that supports the substrate. 2 LED backlight that changes the illuminating color of three colors (R, G, B). A Scan-driven linear motor for § gantry cranes without inkjet nozzles. D A linear motor that scans and drives a overhead crane equipped with an ink tank and an inkjet head drive circuit. E Shock absorption damper. F Ink tank for inkjet coating. g Inkjet nozzle drive control circuit block » H power system and control system cable. A linear motor that scan-drives an overhead crane provided with rolling elements for pressurized loads. k — Servo motor for pressurized load. 1 Rubber rolling element for pressurized load. M The load system servo motor for the rolling body with the rolling load. N Spacer (optical spacer element) made by photolithography. Seven—(X, Y, Θ) alignment adjustment mechanism. 38

Claims (1)

1364523 , Patent application Fan Yuan Bukou A drying method for drying a solution for dissolving an organic energy film by using a drying device which is used in a process of forming a functional film only in a partial region of a substrate by an inkjet coating method After the inkjet coating device is partially applied to the substrate, the temperature of the base is raised, the viscosity of the solution is lowered, and the surface of the liquid is leveled to be flattened, and then the substrate is cooled to room temperature or less to make the coating liquid After the viscosity of the body is raised, the solvent of the coating solution is volatilized while cooling the substrate in a reduced pressure environment. A drying method for coating a solution of an organic-soluble film with an inkjet coating device in a drying device used in a process of forming a functional film only in a partial region of a substrate by an inkjet coating method After the substrate is raised, the temperature of the substrate is raised, and the surface of the coating liquid is leveled, and then the substrate is rapidly cooled to a temperature lower than the freezing point temperature of the coating liquid, and the solvent of the applied solution is made in a vacuum environment. sublimation. φ XI, schema: as the next page 39 1364523 December 16, 100 revised replacement page V. Chinese invention summary: The present invention is a drying method relating to a drying apparatus used in a process of forming a functional film only in a partial region of a substrate by an inkjet coating method, and a solution of the organic solvent-soluble film is partially applied to the inkjet coating device. After being applied to the substrate, the temperature of the substrate is raised, the viscosity of the solution is lowered, and the surface of the liquid is leveled, and then the substrate is cooled to room temperature or less, and the viscosity of the coating liquid is raised, and then the pressure is reduced. While cooling the substrate, the solvent of the coating solution is volatilized. VI. Summary of English invention: VII. Designated representative map: (1) The representative representative of the case is: (16). (2) A brief description of the symbol of the representative figure: 8. If there is a chemical formula in this case, please reveal the chemical formula that best shows the characteristics of the invention: None 2