JP5381605B2 - Color filter manufacturing method and color filter - Google Patents

Description

  The present invention relates to a color filter manufacturing method and a color filter capable of obtaining a color filter with good display quality when a liquid crystal display device is used.

In recent years, with the development of personal computers, particularly portable personal computers, the demand for liquid crystal displays has increased. In recent years, the penetration rate of home-use liquid crystal televisions has been increasing, and the market for liquid crystal displays is expanding. Furthermore, liquid crystal displays that have become widespread in recent years tend to have larger screens, and this tendency is particularly strong for home-use liquid crystal televisions.
Under such circumstances, it is desired to manufacture a high-quality member at a lower cost as a member constituting the liquid crystal display. In particular, a color filter having a function of color-displaying a liquid crystal display has been highly demanded since it has been conventionally expensive.

Here, a color filter used for a general liquid crystal display is usually a substrate, a light-shielding portion formed on the substrate and having a plurality of openings, and red (R) and green formed in the openings. (G) and blue (B) It has a colored layer of each color.
Then, by turning on and off the electrodes corresponding to the R, G, and B colors of the color filter, the liquid crystal operates as a backlight shutter, and light passes through the R, G, and B pixels. Color display.

  As a method for producing such a color filter, a method of repeating the same process three times in order to color three colors of R, G, and B such as a dyeing method and a pigment dispersion method has been conventionally used. However, such a manufacturing method is useful in that it can form a color filter on which high-precision R, G, and B patterns are formed, but it is not always highly productive. In this regard, Patent Document 1 discloses a method of manufacturing a color filter using an ink jet method. The ink jet method is effective in that a large area color filter can be manufactured with high productivity, and has attracted attention as a method capable of manufacturing a color filter at low cost.

  As a method for forming a colored layer using such an ink jet method, first, a colored layer forming coating solution containing a solvent is applied to the opening on the substrate to form a colored layer before drying. Then, after drying and removing the solvent contained in the colored layer before drying, the colored layer is formed by heating.

  However, the colored layer formed by the above-described inkjet method is formed in the opening surrounded by the light shielding portion because of the relationship between the ejected ink and the surface of the light shielding portion, the height of the light shielding portion, the amount of ink to be ejected, and the like. The shape of the pixel is such that it has a thin portion at or near the outer edge of the pixel and has the thickest portion on the center side of the pixel relative to the thin portion. There is a case. When the difference in thickness between the thin part and the thick part is large, there is a problem that the surface quality may be adversely affected when the liquid crystal display device is used.

  As a method for solving such a problem, for example, by leaving the colored layer before drying in a state where it has a certain degree of fluidity, or by heating at a predetermined temperature to leave the colored layer, the film is allowed to stand. A method for reducing the thickness difference is conceivable. For example, in the case of using a reduced-pressure drying apparatus (Patent Documents 2 to 6) that has recently started to be used in a color filter manufacturing method and is dried in a reduced-pressure environment, it is not completely dried but dried in the middle of drying. A method of reducing the film thickness difference and flattening the film by stopping the process and heating it can be considered.

However, when flattening is performed by such a method, the following problems may occur.
That is, as described above, the color filter is usually formed by three colored layers of red, green, and blue. However, depending on the type of liquid crystal display device used, the wavelength dispersion of the driving liquid crystal can be reduced. In some cases, it is required to increase the blue film thickness particularly for the reason that the viewing angle characteristics deteriorate due to the influence. In such a case, when flattening as described above is performed, it is necessary to increase the amount of ink of the blue pixels, which may cause a problem of mixing with other colors. . In general, the ink for forming the blue pixel may be an ink having a low pigment concentration and a high fluidity. In such a case, when the above-described flattening process is performed in the same manner, There is a possibility that problems such as color mixing with other colors occur.

JP 2000-187111 A JP 2000-1112252 A Japanese Patent Laid-Open No. 10-2665 Japanese Patent Laid-Open No. 9-320949 Japanese Patent Laid-Open No. 7-8704 JP-A-6-97061

  The present invention has been made in view of the above circumstances, and since the thickness difference between the colored layers in the pixel region is small and color mixing does not occur, the display quality when the liquid crystal display device is obtained is good. The main object of the present invention is to provide a color filter manufacturing method and such a color filter.

  In order to solve the above-mentioned problems, the present invention makes a liquid-repellent treatment by applying a liquid-repellent treatment to a black matrix substrate having a substrate and a light-shielding portion formed on the substrate and having an opening. By applying a first colored layer forming coating solution by an inkjet method to a part of the opening of the black matrix substrate subjected to the first liquid repellent treatment step and the first liquid repellent treatment step, the opening A first inkjet process for forming a first color filter substrate in which a colored layer before first drying is formed in a part of the part; a first reduced-pressure drying treatment process for subjecting the first color filter substrate to a reduced-pressure drying process; A first baking process for obtaining a baking substrate after performing a pre-baking process on the first color filter substrate on which the first vacuum drying process has been performed. Then, by applying a lyophobic process to the bake-treated substrate, a second lyophobic process step for lyophobing the light-shielding portion again, and the rest of the bake-treated substrate on which the second lyophobic process step has been performed. A second ink jet process for forming a second color filter substrate in which the second pre-drying colored layer is formed in the remaining opening by applying a second colored layer forming coating solution to the opening by an ink jet method. And, after performing a pre-baking process on the second color filter substrate on which the second reduced pressure drying process is performed, and a second reduced pressure drying process for performing the second reduced pressure drying process on the second color filter substrate, A second baking treatment step for performing a post-bake treatment to obtain a color filter, and each of the first colored layer forming coating solution and the second colored layer forming coating solution is a red colored layer. A coating liquid for forming a green colored layer and a coating liquid for forming a blue colored layer, and a coating liquid for forming a red colored layer and a coating liquid for forming a green colored layer. In the vacuum drying process after the ink jet process using the combination with the above, the vacuum drying process is completed in the state of the first equilibrium pressure, which is the first equilibrium pressure observed when the vacuum drying process is performed, and the blue color In the reduced-pressure drying treatment step after the ink jet step using the colored layer forming coating liquid, the reduced-pressure drying treatment step is terminated in a state where the pressure is lower than the first equilibrium pressure. Provide a method.

  According to the present invention, as described above, the red colored layer forming coating layer and the green colored layer forming coating solution are respectively formed by the inkjet method using the red colored layer forming coating solution and the green colored layer forming coating layer. The process of baking under reduced pressure and baking is performed separately from the process of baking with the coating liquid for forming the blue colored layer, forming the colored layer before blue drying by the inkjet method and performing the drying under reduced pressure. Do. Then, the reduced-pressure drying treatment of the colored layer before red drying and the colored layer before green drying is terminated in the state of the first equilibrium pressure, which is the first equilibrium pressure observed when the reduced-pressure drying treatment is performed. The prebaking process performed after that is performed in a state where it remains to some extent in the colored layer, that is, in a state where the fluidity is relatively high. This makes it possible to flatten the red colored layer and the green colored layer. In addition, since the blue colored layer finishes the reduced-pressure drying process in a state where the pressure is lower than the first equilibrium pressure, the pre-baking process that is performed thereafter is performed with the solvent almost removed from the blue colored layer. As a result, as described above, even when the amount of the blue colored layer is large or the fluidity of the blue colored layer is high, color mixing with other colors can be prevented.

  In the present invention, it is preferable that the post-baking temperature in the first baking process is lower than the post-baking temperature in the second baking process. According to the method for producing a color filter of the present invention, the colored layer formed by applying in the first ink jet process is finally subjected to post-baking treatment twice. For this reason, if the post-baking temperature in the first baking process is equal to the normal post-baking temperature, the colored layer is deteriorated, and a problem such as yellowing may occur.

  In the present invention, the first colored layer forming coating solution is a combination of the red colored layer forming coating solution and the green colored layer forming coating solution, and the second colored layer forming coating solution. The liquid is preferably a blue colored layer forming coating liquid. This is because the blue colored layer is usually more susceptible to deterioration such as yellowing than the red colored layer and the green colored layer.

  In the present invention, as described above, the first colored layer forming coating liquid is a combination of the red colored layer forming coating liquid and the green colored layer forming coating liquid, and the second colored layer When the forming coating solution is a blue colored layer forming coating solution, the first liquid repellent treatment and the second liquid repellent treatment are performed by performing plasma treatment using fluorine as an introduction gas. Preferably, the fluorine plasma treatment strength in the first liquid repellency treatment step is lower than the fluorine plasma treatment strength in the second liquid repellency treatment step. By doing so, the red colored layer and the green colored layer can be formed in a state where the liquid repellency of the light shielding portion is relatively low, and the red colored layer and the green colored layer having higher flatness are formed. Can do. Further, since the blue colored layer can be formed in a state where the liquid repellency of the light shielding portion is relatively high, as described above, when the amount of the blue colored layer is large or the fluidity of the blue colored layer is high Even in this case, color mixing with other colors can be further prevented.

  The present invention is also a color filter formed by an inkjet method, wherein each pixel region defined by the light-shielding portion of the color filter has a rectangular shape having a short side and a long side in plan view, The cross-sectional shape in the pixel region long side direction of the colored layer formed in each pixel region is that the difference between the film thickness of the maximum film thickness portion T and the film thickness of the minimum film thickness portion B is 0.5 μm or less. A characteristic color filter is provided. According to the present invention, since the difference in height of the colored layer in the pixel region is small, it is possible to provide a color filter that does not adversely affect display quality when a liquid crystal display device is used.

  Since the color filter of the present invention can form a colored layer having excellent flatness and no color mixing even when a colored layer is formed by an inkjet method, display quality is improved when used in a liquid crystal display device. The effect that it can be made favorable is produced.

It is process drawing which shows the manufacturing method of the color filter of this invention. It is a graph which shows the outline of the relationship between time and a pressure in the reduced-pressure drying process used for this invention. It is a schematic sectional drawing which shows the film thickness of the colored layer in the color filter of this invention.

  Hereinafter, the manufacturing method of the color filter of the present invention and the color filter will be described in detail.

A. First, a method for producing a color filter of the present invention will be described. The method for producing a color filter of the present invention includes a first step in which a black matrix substrate includes a first liquid repellent treatment step, a first inkjet step, a first reduced-pressure drying treatment step, and a first baking treatment step, A second baking process substrate obtained by the first baking process of the first process has a second liquid repellent process, a second ink jet process, a second vacuum drying process, and a second baking process as essential processes. It has a process. And in the said 1st process, a red coloring layer and a green coloring layer are formed, and a blue coloring layer is formed in the said 2nd process (henceforth a 1st aspect), or blue coloring in the said 1st process. Forming a layer, forming a red colored layer and a green colored layer in the second step (hereinafter referred to as a second embodiment), and further drying under reduced pressure in the step of forming the red colored layer and the green colored layer In the processing step, the vacuum drying processing step is terminated in the state of the first equilibrium pressure that is the first equilibrium pressure observed when the vacuum drying processing is performed, and in the vacuum drying processing step in the step of forming the blue colored layer, The vacuum drying treatment step is terminated in a state where the pressure is lower than the first equilibrium pressure.

  Hereinafter, such a method for producing a color filter of the present invention will be described by dividing it into the first aspect and the second aspect described above.

(First aspect)
As described above, the first aspect of the present invention is an aspect in which the red colored layer and the green colored layer are formed in the first step, and the blue colored layer is formed in the second step.
Since this embodiment is a configuration in which the blue colored layer is formed later, it can be said that it is preferable in that the baking process applied to the blue colored layer, which is generally considered to easily yellow, can be performed once. .
The first aspect of the present invention will be specifically described with reference to FIG.
FIG. 1 is a process diagram showing an example of a method for producing a color filter of this embodiment. In this example, first, a black matrix substrate (a BM substrate in the figure, hereinafter sometimes referred to as a BM substrate) in which a light shielding portion called a black matrix is formed on a substrate is prepared. In this example, the light shielding portion formed on the BM substrate is a resin light shielding portion. And after washing this BM board | substrate with a water washing process, the 1st fluorine plasma process which is a 1st liquid-repellent treatment process is performed. By the first fluorine plasma process, the resin light-shielding portion is subjected to water repellent treatment. Next, the first ink jet process shown in the first IJ process in the drawing is performed. In this example, since the first aspect is illustrated, in the first ink jet process, the red (R) and green (G) colored layer forming coating liquid is made liquid-repellent by the ink jet method. The first color filter substrate is formed by being discharged into the opening of the light shielding portion.

  Next, a first reduced-pressure drying treatment step is performed on the first color filter substrate as shown in the drawing. In this embodiment, the solvent is left in the colored layer to some extent, thereby ensuring the fluidity of the red colored layer and the green colored layer. In the reduced-pressure drying process, the reduced-pressure drying process is completed in the state of the first equilibrium pressure that is the first equilibrium pressure observed when the reduced-pressure drying process is performed.

  Next, a pre-baking process and a post-baking process are sequentially performed on the first color filter substrate that has been subjected to the vacuum drying process, in the first baking process shown in the first baking process in the drawing. Planarization is performed in the first baking process, and among these, the planarization is largely performed particularly in the pre-bake process in which a solvent remains to some extent.

  In the example shown in the figure, the baking substrate subjected to the first baking process is subjected to a water washing process and then a second fluorine plasma process which is a second liquid repelling process. The second fluorine plasma process is performed so that the processing intensity is higher than that of the first fluorine plasma process. This is because the first fluorine plasma process is a lyophobic treatment for forming the red colored layer and the green colored layer, so that the increase in the liquid repellency of the resin light shielding part is not so great, so that the resin light shielding This suppresses a decrease in film thickness in the vicinity of the boundary between the portion and the colored layer, thereby improving flatness. On the other hand, the second fluorine plasma process is a lyophobic treatment for forming the blue colored layer. This is to provide high liquid repellency to prevent it.

  Thereafter, in the second ink jet process shown in the second IJ process in the figure, the blue colored layer forming coating liquid is discharged into the remaining openings to form a red colored layer, a green colored layer, and a blue colored layer before drying. A second color filter substrate is formed, and a second reduced-pressure drying process is performed as shown in the figure. In the second reduced pressure drying treatment step, the solvent component in the blue colored layer is removed and the fluidity is suppressed, and the drying is performed from the first equilibrium pressure state to a state where the pressure is further lowered.

Next, a second baking process is performed on the second color filter substrate as shown in the drawing, and a color filter is formed by forming ITO as a transparent electrode.
Hereinafter, the essential steps of the method for producing a color filter according to this aspect will be described in the order of steps.

1. First liquid repellency treatment step In the first liquid repellency treatment step in this aspect, a liquid repellent treatment is performed on a BM substrate that includes a substrate and a light shielding portion that is formed on the substrate and has an opening. It is the process of liquefying.
In this step, first, a BM substrate having a substrate and a light shielding portion formed on the substrate is prepared.

(1) Substrate The substrate used in this step is not particularly limited as long as it is a transparent substrate capable of forming the light-shielding portion and the colored layer, and those conventionally used for color filters can be used. it can. Examples of such substrates include non-flexible transparent inorganic substrates such as quartz glass, Pyrex (registered trademark) glass, and synthetic quartz plates, and flexibility such as transparent resin films and optical resin plates. Examples thereof include those in which an inorganic film such as SiO ₂ is formed on the surface of a transparent resin substrate. Among these, it is preferable to use an inorganic substrate in this step. By using an inorganic material as the substrate, in the case where this step is a step of making the liquid repellent by fluorine plasma treatment described later, it becomes easy to make the light shielding portion liquid repellent by using the light shielding portion as a resin light shielding portion. Because.

  Further, in this step, it is preferable to use a glass substrate among the inorganic substrates, and it is preferable to use an alkali-free type glass substrate among the glass substrates. The alkali-free glass substrate is excellent in dimensional stability and workability in high-temperature heat treatment, and contains no alkali component in the glass, so it is suitable for color filters for color liquid crystal display devices using an active matrix method. This is because it can be used.

(2) Shading part The shading part used for this process is formed on the board | substrate mentioned above, and is provided with an opening part.
As the light-shielding portion used in this step, those in which openings are regularly formed at regular intervals are usually used. Here, the specific size and arrangement mode of the opening are not particularly limited, and can be arbitrarily determined according to the use of the color filter manufactured by the present invention.

  Such a light-shielding part is not particularly limited as long as it has a desired light-shielding property and is formed from a material that can be imparted with liquid repellency in the liquid repellency treatment performed in this step. For example, it may be a light-shielding portion formed by laminating a metal such as chromium and a metal oxide, but is preferably made of a material that can have liquid repellency by a fluorine plasma treatment described later. Specifically, a material composed of a light shielding material and a resin is used.

  In the case where the light shielding part is composed of a light shielding material and a resin, a material used for a resin light shielding part of a general color filter can be used as the light shielding material. Examples of such a light-shielding material include light-shielding particles such as carbon fine particles, metal oxides, inorganic pigments, and organic pigments.

  Examples of the resin include ethylene-vinyl acetate copolymer, ethylene-vinyl chloride copolymer, ethylene-vinyl copolymer, polystyrene, acrylonitrile-styrene copolymer, ABS resin, polymethacrylic acid resin, ethylene. -Methacrylic acid resin, polyvinyl chloride resin, chlorinated vinyl chloride, polyvinyl alcohol, cellulose acetate propionate, cellulose acetate butyrate, nylon 6, nylon 66, nylon 12, polyethylene terephthalate, polybutylene terephthalate, polycarbonate, polyvinyl acetal, Polyether ether ketone, polyether sulfone, polyphenylene sulfide, polyarylate, polyvinyl butyral, epoxy resin, phenoxy resin, polyimide resin, polyamid Imide resins, polyamic acid resins, polyether imide resins, phenolic resins, and urea resins.

  The method for forming the light shielding part is not particularly limited as long as it is a method capable of forming the light shielding part in which the opening is arranged in a desired manner. Examples thereof include a photolithography method using a resin composition containing light-shielding particles, a thermal transfer method using the resin composition, and the like. As a specific method for forming such a light-shielding portion, a method similar to the method for forming the light-shielding portion generally used for color filters can be used, and thus detailed description thereof is omitted here.

(3) Liquid repellent means The liquid repellent means in this step is not particularly limited as long as it is a means capable of performing liquid repellent with respect to the light shielding portion of the BM substrate. For example, in order to form a liquid repellent layer having liquid repellency only on the light shielding portion, a method of forming a liquid repellent layer by a photolithography method or the like in a pattern, or plasma treatment using a metal mask or the like is performed on the light shielding portion. For example, a method of making liquid only repellent may be used.

However, in the present invention, since the light shielding part can be made liquid repellent easily and with high precision, a fluorine plasma process for performing liquid repellent of the light shielding part by fluorine plasma treatment, which is a plasma treatment using fluorine as an introduction gas, can be performed. preferable. When this fluorine plasma treatment is performed, as described above, a resin light-shielding part is used as the light-shielding part, and an inorganic substrate is preferably used as the substrate. This is because this fluorine plasma treatment can selectively attach fluorine to an organic substance.
In such a fluorine plasma treatment, examples of the fluorine compound used for the introduced gas include CF ₄ , SF ₆ , CHF ₃ , C ₂ F ₆ , C ₃ H ₈ , and C ₅ F _8. .

Further, the introduced gas may be a mixture of the fluorine gas and another gas. Examples of the other gas include nitrogen, oxygen, argon, helium, etc. Among them, nitrogen is preferably used. Further, when nitrogen is used as the other gas, the mixing ratio of nitrogen is preferably 50% or more.
In addition, the method of performing the plasma irradiation is not particularly limited as long as it can improve the liquid repellency of the light shielding portion. For example, the plasma irradiation may be performed under reduced pressure, or the atmospheric pressure Plasma irradiation may be performed below. Among these, in this step, it is particularly preferable to perform plasma irradiation under atmospheric pressure. This is because an apparatus for decompression or the like is not necessary, which is advantageous in terms of cost, manufacturing efficiency, and the like.

In addition, the presence of fluorine in the light-shielding part after the plasma irradiation is present in all elements detected from the surface of the light-shielding part in the analysis by an X-ray photoelectron spectrometer (XPS: ESCALAB 220i-XL). This can be confirmed by measuring the ratio of the fluorine element.
The “liquid repellency” means that the contact angle with a coating solution for forming a colored layer described later is large.

  Specifically, the contact angle with the colored layer forming coating solution on the surface of the light shielding portion may be larger than the contact angle of the substrate surface. In particular, in this step, it is preferable that the contact angle of the surface of the light-shielding part with a liquid of 40 mN / m is 10 ° or more, and particularly the contact angle of a liquid with a surface tension of 30 mN / m is 10 °. It is preferable that the above is achieved, and it is further preferable that the contact angle with a liquid having a surface tension of 20 mN / m is 10 ° or more. Moreover, it is preferable that the contact angle with pure water is about 11 ° or more.

(4) Degree of liquid repellency In this embodiment, in the first inkjet process described later, a red colored layer forming composition for forming a red colored layer and a green colored layer forming composition for forming a green colored layer are inkjet methods. The two colored first colored layers before drying are formed. At this time, if the degree of liquid repellency in this step is high, the effect of preventing color mixing increases, but when the two-color colored layer forming composition is discharged into the opening of the resin-made light-shielding part, Since the affinity is extremely low, the thickness of the pre-drying colored layer at the contact portion of the pre-drying colored layer formed by discharging with the resin light-shielding part, that is, the peripheral part of the pixel region defined by the resin-made light shielding part is Thinly formed. Therefore, when the first reduced pressure drying process and the first baking process described below are performed in such a state, the difference between the maximum film thickness and the minimum film thickness of the red colored layer and the green colored layer becomes large, which will be described later. Even if the pre-bake process is performed in such a way that the flattening process is performed, that is, in the first reduced-pressure drying process step with the solvent remaining to some extent, it is difficult to finally obtain a flattening effect. Therefore, it can be said that the degree of lyophobicity in this step is preferably as low as possible as long as color mixing does not occur.

On the other hand, in the second liquid repellent step described later, a blue colored layer forming composition for forming a blue colored layer is discharged to form a second pre-drying colored layer. As described above, the blue colored layer is often required to have a large amount of filling, or the pigment concentration is relatively low and the fluidity is often high, and is usually flattened as compared with the above-described red colored layer and green colored layer. The demand is low. On the other hand, as described above, there is a high demand for avoiding the problem of color mixing with other colors when the amount of filling is large or the fluidity is high. Therefore, it can be said that the degree of liquid repellency in the second liquid repellency step is preferably as high as possible.
From the above, in this aspect, it is preferable that the degree of lyophobicity in the first lyophobic process, which is the present process, is lower than the degree of lyophobicity in the second lyophobic process described later.

  In this aspect, as a method for comparing the degree of liquid repellency in the first liquid repellency step and the degree of liquid repellency in the second liquid repellency step, specifically, the formation of the colored layer on the surface of the light shielding portion as described above. In the case of fluorine plasma treatment, as described above, the amount of fluorine present on the surface of the light-shielding portion can be determined by an X-ray photoelectron spectrometer ( In the analysis by XPS: ESCALAB 220i-XL), it may be confirmed by measuring the ratio of the fluorine element in all the elements detected from the surface of the light shielding part. In the case of fluorine plasma treatment, it is also possible to make a judgment by comparing the plasma intensity and the concentration of the introduced gas in the treatment.

2. First Inkjet Step The first inkjet step in this aspect is a red colored layer forming coating solution and a green colored portion on the part of the opening of the BM substrate on which the first liquid repellent treatment step has been performed by an inkjet method. This is a step of forming a first color filter substrate in which red and green pre-drying colored layers are formed in a part of the opening by applying a layer forming coating solution.

The ink jet method used in this step may be any method that can accurately discharge the colored layer forming coating solution to the opening, and is usually a nozzle that can apply the colored layer forming coating solution. Inkjet heads having a plurality of are used.
The discharge method in which the inkjet head used in this step discharges the colored layer forming coating solution is not particularly limited as long as it can discharge a predetermined amount of the colored layer forming coating solution. Examples of such a discharge method include a method in which a charged colored layer forming coating solution is continuously discharged and the discharge amount is controlled by a magnetic field, and a colored layer forming coating solution is intermittently formed using a piezoelectric element. Examples thereof include a method of discharging, a method of heating a colored layer forming coating liquid, and intermittently discharging using the foaming phenomenon. In particular, in this step, it is preferable to use a method in which a colored layer forming coating solution is intermittently discharged using a piezoelectric element as the discharge method. This is because such a discharge method can control a small amount of discharge with relatively high accuracy.

  The colored layer forming coating solution used in this step is a red colored layer forming coating solution and a green colored layer forming coating solution as described above, and any coating solution that can be ejected by the inkjet method is used. It is not limited. Specifically, a pigment, a pigment dispersant, a binder component, and a solvent that are used when forming a colored layer of a color filter by a normal ink jet method, and a surfactant or the like as required are used. .

3. First reduced-pressure drying treatment step The first reduced-pressure drying treatment step in this aspect is a step of subjecting the first color filter substrate to a reduced-pressure drying treatment, and is a first equilibrium pressure observed when the reduced-pressure drying treatment is performed. The reduced-pressure drying process is completed at a certain first equilibrium pressure.
As described above, the vacuum drying treatment process is terminated in the state of the first equilibrium pressure by removing the solvent in the present process from the red and green pre-drying colored layers obtained in the first inkjet process. When the layer and the green colored layer are formed, the reduced-pressure drying treatment process is completed in a state in which a predetermined amount of residual solvent remains in the red colored layer and the green colored layer, and thereby the pre-baking in particular in the subsequent first baking process. This is to increase the fluidity in the treatment and thereby promote flattening.

(1) First Equilibrium Pressure Hereinafter, the first equilibrium pressure will be described.
When a color filter substrate having a pre-drying colored layer is subjected to reduced-pressure drying using a reduced-pressure drying apparatus, the pressure in the chamber varies with time. Specifically, the pressure fluctuation in the chamber is gradually increased from the start of pressure reduction when the horizontal axis is the drying time and the vertical axis is the pressure in the chamber, as in the pressure profile illustrated in FIG. A decrease in the pressure is observed, and the state in which the pressure fluctuation is small (the first equilibrium pressure, t ₁ to t 2 in FIG. ₂ ) is eventually reached. Thereafter, it begins to decrease the pressure, a small state change of pressure again (a second equilibrium pressure, t ₃ or later in FIG. 2), and thereafter, the pressure constant state is maintained. Note that t _{4 in} FIG. 2 is the middle of the first equilibrium pressure state (= t ₁ + (t ₁ + t ₂ ) / 2), and t ₅ is lower than the first equilibrium pressure and is equal to the second equilibrium pressure. It shows the time when the pressure is higher.

  Here, the state of the first equilibrium pressure is a state where the amount of solvent volatilized from the colored layer is constant, and indicates a state where a predetermined amount of solvent still remains in the colored layer. . In general, when a solvent is removed from the colored layer before drying by carrying out a vacuum drying treatment, the solvent is removed until the second equilibrium pressure is reached where it is expected that the solvent will hardly remain in the colored layer. However, in this process, this process is completed in the state of the first equilibrium pressure for the reason described above.

In the present embodiment, the state of the first equilibrium pressure, in FIG 2, but shows the condition of t ₁ ~t _2, in the state of the t ₂ state of t _1, remaining the colored layer The amount of solvent varies greatly. Therefore, in the state close to t _1, but since the residual solvent content is often advantageous for flattening the subsequent first baking step, a problem may arise in terms of color mixing with other colors. On the other hand, since the amount of residual solvent is small in a state close to t _2, it is advantageous from the viewpoint of color mixing with other colors, it is disadvantageous for flattening in the subsequent first baking step.

In this embodiment, considering the composition of the red colored layer and the green colored layer, the degree of liquid repellency of the light-shielding portion, etc., the range where flattening is possible and no color mixing occurs is selected by experimentation and determined. However, it is preferable to finish the reduced pressure drying process within this range.
The range to end such a vacuum drying process, the kind of solvent that colored layer and used as described above, but is different from large liquid-repellent light shielding part, the t ₁ 0, t _{when 4} was a 50, _{t 2} and 100, is preferably in the range of 20 to 80, are particularly preferred in the range of 30 to 70.

(2) Processing temperature in the reduced-pressure drying treatment step The treatment temperature in this step is not particularly limited as long as it is within the range where the pressure profile is generated. However, if the temperature is low, the reduced-pressure drying treatment takes too much time. Further, if the temperature is high, the removal of the solvent occurs at a stretch, which may cause problems such as color mixing, which is not preferable. Accordingly, a preferable treatment temperature in this step is preferably in the range of 30 ° C. to 60 ° C., and particularly preferably in the range of 35 ° C. to 55 ° C., particularly 40 ° C. to 50 ° C.

(3) Reduced pressure drying apparatus As the reduced pressure drying apparatus used in this step, those generally used for the production of color filters can be used.
Specifically, a heating means for heating the color filter, a chamber for storing the heating means, and a decompression means for reducing the pressure in the chamber to a desired pressure can be given.

(A) Heating means Any heating means may be used as long as it can heat the color filter substrate to a desired temperature.
Examples of such heating means include a hot plate, a heating wire, a lamp, and an infrared radiation device. In this step, a hot plate is particularly preferable. Since the entire hot plate is heated, there is no specific location with a low temperature as in other heating means, and the volatilized solvent is rapidly cooled at that portion, resulting in condensation. This is because there is no inconvenience such as dripping on the color filter substrate and causing color mixture due to breakdown. Furthermore, it is easy to heat the color filter substrate uniformly in plan view, and the colored layer formed by drying the pre-drying colored layer can be made to have excellent flatness. .

  The heating capability of the heating means used in this step may be any as long as the color filter substrate can be heated to a desired temperature. Specifically, it is preferable that the color filter substrate can be heated within a range of 35 ° C. to 80 ° C., particularly within a range of 40 ° C. to 50 ° C. It is because the said solvent can be removed efficiently by being in the said range. The above temperature does not indicate the temperature of the color filter substrate itself, but indicates the processing temperature by the heating means.

  The heating means may be arranged with respect to the color filter substrate so that the heating means is arranged below the color filter substrate so as to heat the color filter substrate from below. The heating means may be disposed above the color filter substrate so as to heat the color filter substrate from above. In the present invention, it is particularly preferable that the color filter substrate is disposed below and above the color filter substrate so that the color filter substrate is heated from both the upper and lower sides. As described above, there is no inconvenience such as causing color mixture due to breakdown, and further, the color layer can be made excellent in flatness by being able to uniformly heat the color filter substrate in plan view. is there.

(B) Chamber Any chamber may be used as long as the chamber can accommodate the heating means and can have high sealing properties when dried.
The shape and size of the chamber are appropriately set according to the size of the color filter substrate to be dried.

(C) Depressurization means The decompression means in this step is for depressurizing the inside of the chamber. As such pressure reducing means, a general pressure reducing device such as a vacuum pump can be used.

  The pressure reducing capability of the pressure reducing means used in this step is not particularly limited as long as the inside of the chamber can be set to a pressure capable of drying the color filter substrate at a desired speed. Specifically, the steady pressure under reduced pressure in the chamber is preferably one that can be set to a range of less than 4 Pa, and particularly preferably one that can be set to a range of less than 1 Pa. It is because the said solvent can be easily removed because it is the said range.

  The steady pressure under reduced pressure refers to the equilibrium pressure that is reached when vacuum drying is performed in a state where the chamber of the heating vacuum drying apparatus is emptied, that is, without any color filter substrate or condensed solvent. Is. Further, the equilibrium pressure is a pressure that is in a constant state, and more specifically, in a state in which the pressure for 90 seconds is included within 10% above and below the average pressure based on the average pressure for 90 seconds. It means the average pressure.

4). First baking process step The first baking process step in this embodiment is a pre-baking process for the first color filter substrate on which the first reduced-pressure drying process process has been performed, followed by a post-bake process. This is a step of obtaining a baked substrate.
In this embodiment, since the pre-baking process is performed in a state where a predetermined amount of residual solvent is present in the red colored layer and the green colored layer, heating is performed in a state having a predetermined fluidity. Flattening is possible.

(1) Pre-baking process The pre-baking process in this process is a process which removes the solvent which remains in a red colored layer and a green colored layer, and at the same time performs a larger flattening as described above.
The temperature of this prebaking treatment is the same as that of the normal prebaking treatment, and specifically, it is preferably in the range of 60 ° C to 140 ° C, particularly 80 ° C to 120 ° C, and particularly preferably in the range of 80 ° C to 100 ° C. Further, the treatment time is preferably within a range of 10 minutes to 100 minutes, particularly within a range of 20 minutes to 80 minutes. This is because when the processing temperature is lower than the above temperature range, it is difficult to completely remove the solvent, and when the processing temperature is higher than the above processing temperature, the shape of the colored layer tends to deteriorate.
Such a pre-baking process usually uses a clean oven or the like.

(2) Post-bake treatment The post-bake treatment in this step is performed to cure the colored layer from which the solvent has been completely removed by the post-bake treatment, and even in this treatment, a certain degree of flattening is performed.
The post-bake treatment in this step is preferably performed at a temperature lower than the normal post-bake treatment temperature. This is because the red colored layer and the green colored layer that are post-baked in this step are subjected to post-baking again in the second baking step described later, and there is a risk of deterioration in color performance.
Such a post-baking treatment temperature in this step is preferably in the range of 100 ° C. to 200 ° C., particularly in the range of 120 ° C. to 180 ° C., and particularly in the range of 140 ° C. to 160 ° C. The treatment time is preferably in the range of 10 minutes to 120 minutes, particularly in the range of 20 minutes to 80 minutes.
A clean oven or the like is usually used for such post-bake treatment.

5. Second liquid repellency treatment step The second liquid repellency treatment step in this aspect is a step in which the light shielding portion is made liquid repellant again by performing a liquid repellency treatment on the bake treatment substrate obtained by the first bake treatment step. It is.
The second liquid repellency treatment step in this aspect is the same as the first liquid repellency except that the target substrate is changed from a BM substrate to a baked substrate in which a red colored layer and a green colored layer are formed on the BM substrate. Since it is the same as the processing step, the description of the lyophobic treatment method and the degree of the lyophobic treatment is omitted.
Note that, as described in the section of the degree of lyophobic treatment in the first lyophobic process, the degree of lyophobicity of the light-shielding portion in this process imparts higher lyophobic properties than the first lyophobic process. It is preferable.

6). Second inkjet process In the second inkjet process in this embodiment, the remaining openings of the baked substrate that has been subjected to the second lyophobic treatment process, specifically, the red colored layer and the green colored layer are not formed. In this step, a blue colored layer forming coating liquid is formed in the remaining openings by applying a blue colored layer forming coating solution to the openings by an ink jet method to form a second color filter substrate.
The second ink jet process in this embodiment is the same as the first ink jet process except that the color layer forming coating liquid to be applied is changed from red and green to blue. Therefore, the description thereof is omitted here. To do.

7). Second reduced-pressure drying treatment step The second reduced-pressure drying treatment step in this aspect is a step of subjecting the second color filter substrate to a reduced-pressure drying treatment, and is finished in a state where the pressure is lower than the first equilibrium pressure. This is a characteristic process.
In this step, unlike the first reduced-pressure drying treatment step, it is preferable that the residual solvent in the colored layer before drying for blue is as small as possible. Therefore, the first equilibrium in which the solvent is removed in a certain amount is used. This is because the residual solvent in the blue colored layer can be reduced by ending the process in a state where the pressure state has passed and the pressure is lower than the first equilibrium pressure.

Here, the state where the pressure is lower than the first equilibrium pressure indicates a state after t ₂ in the pressure profile shown in FIG. 2, and the state of t _{5 or} the state of the second equilibrium pressure. It shows a state beyond the t ₃ is.
In the present embodiment, it is preferable to end the second vacuum processing step in a state exceeding the t ₃ is inter alia the second equilibrium. This is because the residual solvent in the blue colored layer can be reduced more completely, and problems such as color mixing caused by the blue colored layer can be prevented.
Since other matters relating to the reduced pressure drying process in this step are the same as those described in the first reduced pressure drying process, description thereof is omitted here.

8). Second baking process In the second baking process in this aspect, the second color filter substrate on which the second decompression process is performed is pre-baked and then post-baked to obtain a color filter. It is the process of obtaining.

(1) Pre-baking process Since the pre-baking process in this process is the same as the said 1st baking process, description here is abbreviate | omitted.
(2) Post-bake treatment The post-bake treatment in this step is performed at the same temperature and time as the normal post-bake treatment. Specifically, at a temperature in the range of 180 ° C. to 260 ° C., preferably in the range of 220 ° C. to 240 ° C., in the range of 10 minutes to 120 minutes, preferably in the range of 30 minutes to 80 minutes. Done.
The apparatus used for the post-baking process in this step is the same as the first baking process.

9. Other Steps In this embodiment, other steps may be performed as necessary. Specifically, a water washing step may be performed before the first liquid repellent treatment step and the second liquid repellent treatment step. Moreover, the ITO film | membrane formation process for forming a transparent electrode may be performed after the said 2nd baking process. Furthermore, the process etc. which form the protective layer and columnar spacer which are formed on a colored layer may be performed.

(Second aspect)
In the second aspect of the present invention, a blue colored layer is formed in the first step, and a red colored layer and a green colored layer are formed in the second step.
Hereinafter, the second aspect of the present invention will be described focusing on the differences from the first aspect described above.

1. First liquid repellency treatment step The difference between the first liquid repellency treatment step in this embodiment and the first liquid repellency treatment step in the first embodiment is that in the first embodiment, a red colored layer and a green colored layer are formed. However, in this embodiment, the light-shielding part for forming the blue colored layer is made liquid-repellent. Therefore, it is preferable that the degree of lyophobicity of the light-shielding portion is the same as that in the second lyophobic treatment step in the first aspect, but the other points are the same as in the case of the first aspect. The description in is omitted.
In addition, from the difference from the first aspect, in this aspect, the degree of lyophobicity in the first lyophobic process, which is this process, is preferably higher than the degree of lyophobicity in the second lyophobic process described later. It will be.

2. 1st inkjet process The difference between the 1st inkjet process in this mode and the 1st inkjet process in the 1st mode is only a point by which the ink discharged becomes the coating liquid for blue colored layer formation. Since other points are the same as those of the first ink jet process of the first aspect, description thereof is omitted here.

3. First reduced pressure drying treatment step The first reduced pressure drying treatment step in this embodiment is different from the first reduced pressure drying treatment step in the first embodiment in that the reduced pressure drying treatment step is performed at a pressure lower than the first equilibrium pressure. It is a point to end. In addition, in this aspect, according to the type of composition of the blue colored layer forming coating solution, as in the first aspect, the vacuum drying treatment process is terminated in the first equilibrium pressure state in this process. There is also.
The other points are the same as in the case of the first aspect, and the description thereof is omitted here.

4). 1st baking process The 1st baking process in this aspect is the same as the 1st baking process in a 1st aspect.

5. Second liquid repellency treatment step The difference between the second liquid repellency treatment step in this aspect and the second liquid repellency treatment step in the first aspect is that, in the first aspect, the light shielding part for forming a blue colored layer is used. In contrast to the lyophobic process, the present embodiment is a lyophobic process for the light shielding portion for forming the red colored layer and the green colored layer. Therefore, it is preferable that the degree of lyophobicity of the light-shielding portion is the same as that in the first lyophobic treatment step in the first aspect, but the other points are the same as in the case of the first aspect. The description in is omitted.

6). Second ink jet process The difference between the second ink jet process in this aspect and the second ink jet process in the first aspect is that the discharged ink becomes the red colored layer forming coating liquid and the green colored layer forming coating liquid. It is only a point. Since other points are the same as those of the second ink jet process of the first aspect, description thereof is omitted here.

7). Second reduced-pressure drying treatment step The second reduced-pressure drying treatment step in this aspect is different from the second reduced-pressure drying treatment step in the first aspect in that the reduced-pressure drying treatment step is terminated in the state of the first equilibrium pressure. . The other points are the same as in the case of the first aspect, and the description thereof is omitted here.

8). Second Baking Process The second baking process in this aspect is the same as the second baking process in the first aspect.
9. Other Steps Other steps are also equivalent to the first aspect.

B. Color Filter The color filter in the present invention is a color filter formed by an ink jet method, and each pixel region defined by the light shielding portion of the color filter has a rectangular shape having a short side and a long side in plan view. The cross-sectional shape in the pixel region long side direction of the colored layer formed in each pixel region is such that the difference between the film thickness of the maximum film thickness portion T and the film thickness of the minimum film thickness portion B is 0.5 μm or less. It is characterized by being.

  In the color filter of the present invention, the difference between the film thickness of the maximum film thickness portion T and the film thickness of the minimum film thickness portion B in the cross-sectional shape in the long side direction of the pixel region is 0.5 μm or less. In this case, it is possible to obtain a good display quality.

  FIG. 3 is a schematic cross-sectional view showing the cross-sectional shape of the color filter of the present invention in the long side direction of the pixel region, and shows the maximum film thickness portion T and the minimum film thickness portion B of the colored layer 1 formed in the pixel region. Is. This pixel region is defined by the light shielding portion 2.

Hereinafter, the color filter of the present invention will be described in detail. As described above, in the color filter of the present invention, in the cross-sectional shape in the long side direction of the pixel region, the difference between the film thickness of the maximum film thickness portion T and the film thickness of the minimum film thickness portion B is 0.5 μm or less. However, in the present invention, it is particularly preferably 0.4 μm or less. This is because by setting this range, the display quality can be improved when a liquid crystal display device is obtained.
The film thickness of the maximum film thickness portion T and the film thickness of the minimum film thickness portion B are values measured by an optical interference type three-dimensional non-contact surface shape measuring device (for example, product name Micromap557N manufactured by US Micromap). Will be used.

The light-shielding portion and the colored layer used in the color filter of the present invention are the same as those described in the above section “A. Method for manufacturing color filter”, and thus the description thereof is omitted here. The light-shielding portion and the colored layer are formed on a transparent substrate, and this transparent substrate is the same as that described as the substrate in the section “A. Color filter manufacturing method”.
Furthermore, the color filter of the present invention may be formed with various members that may be required as long as they are ordinary color filters such as a protective layer, a columnar spacer, and a transparent electrode.

  The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has substantially the same configuration as the technical idea described in the claims of the present invention, and any device that exhibits the same function and effect is the present invention. It is included in the technical scope of the invention.

Hereinafter, the present invention will be specifically described using examples and comparative examples.
(Example)
1. Preparation of BM Substrate A photosensitive resin composition containing a light-shielding black pigment on a glass substrate (horizontal length 2850 × longitudinal length 3050 × thickness 0.7 mm, manufactured by Corning Japan) was used to produce a 40-inch screen 18 by photolithography. Surface formation. Each surface is formed with a horizontal pitch of 160 μm, a vertical pitch of 465 μm, an opening size of 145 μm × 450 μm, and a light-shielding portion line width of 15 μm, a horizontal direction of 154 μm pitch, 5525 pixels, and a vertical direction of 462 μm pitch. A pixel pattern (chip) arranged to line up 1070 pixels was formed. The thickness of the light shielding layer finally obtained when the color filter was obtained was 2.3 μm on the average of 20 pixels.

2. Water washing step A washing device that blows pure water by high-pressure spray while carrying the BM substrate was used, and water was blown off using an air knife after the water was sprayed.

3. First water repellency treatment step Next, the BM substrate was subjected to an atmospheric pressure plasma treatment in which fluorine gas was introduced to make the light shielding layer surface liquid-repellent and the glass surface portion lyophilic. The atmospheric pressure plasma treatment was performed under the following conditions. In this way, a color filter forming substrate was produced. In addition, the contact angle of the obtained color filter forming substrate with a liquid of 40 mN / m was 60 ° on the average of 20 measured values on the surface of the light shielding layer and 10 ° on the glass surface. In addition, this contact angle is measured using a contact angle measuring device (CA-Z type manufactured by Kyowa Interface Science Co., Ltd.) (after 30 seconds from dropping a droplet from a microsyringe), and from the result or The results are obtained in a graph.

<Plasma irradiation conditions>
-Introduced gas: CF ₄ ... 17.1 L / min, N ₂ ... 97.3 L / min
・ Frequency: 29Hz
・ Power output: 420V-5A

4). First ink jet process A red colored layer forming coating liquid and a green colored layer forming coating liquid are discharged into the opening by an ink jet apparatus on the BM substrate subjected to the water repellent treatment, and the first color filter A substrate was formed.
In each of the colored layer forming coating liquids, red and green pigment-dispersed inks composed of a color filter pigment and a thermosetting resin are used, and the concentration is adjusted so that a desired color filter color can be expressed. A thing was used. The coating amount at this time was such that the film thickness after final post-baking was 1.9 μm.

In addition, the prescription of the coating liquid for red colored layer formation and the coating liquid for green colored layer formation is as follows.
(Red colored layer forming coating solution)
Pigment: R254 / R242 / Y150 ... 7.04% by mass
・ Dispersant: Azisper Pb821 (Ajinomoto Fine Chemicals) ... 4.22% by mass
Main solvent: Diethylene glycol monobutyl ether acetate 73.20% by mass
・ Solvent: Ethyl 3-ethoxypropionate ... 10.00 mass%
・ Binder: GMA acrylic resin ... 5.54% by mass
・ Leveling agent: LHP-90 (Enomoto Kasei) ... 0.09 mass%
The P / V ratio was 0.73, the solid content concentration was 16.8%, and the viscosity was 9.8 CPS. The viscosity is a value measured at room temperature (23 ° C.) using a falling ball viscometer.

(Green colored layer forming coating solution)
・ Pigment: G36 / Y150 / R254 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ 8.11% by mass
・ Dispersant: Azisper Pb821 (Ajinomoto Fine Chemicals) ... 4.87% by mass
・ Main solvent: Diethylene glycol monobutyl ether acetate: 65.30% by mass
・ Solvent: Ethyl 3-ethoxypropionate ... 15.00% by mass
・ Binder: GMA acrylic resin ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ 6.72% by mass
・ Leveling agent: LHP-90 (Enomoto Kasei) ... 0.09 mass%
The P / V ratio was 0.70, the solid content concentration was 19.7%, and the viscosity was 9.8 CPS. The viscosity is a value measured at room temperature (23 ° C.) using a falling ball viscometer.

5. First vacuum drying treatment step The first color filter substrate on which the red and green pre-drying colored layers were formed was subjected to a vacuum drying treatment using a vacuum drying apparatus using a hot plate.
A pressure profile as shown in FIG. 2 at 40 ° C. is obtained in advance using the first color filter substrate on which the red and green pre-drying colored layers are formed in advance, and then the pressure is reduced in 130 seconds from t1. The drying process was finished. Here, t2 in the pressure profile is 240 seconds after t1, and after 130 seconds from t1, the state is the first equilibrium pressure.

6). First baking processing step The first color filter substrate is pre-baked at 100 ° C. for 20 minutes in a clean oven, and then post-baked at 150 ° C. for 40 minutes in a clean oven. Got.

7). Second liquid repellency treatment step The same rinsing treatment as in "2. Water washing step" was performed on the baked substrate, followed by a second liquid repellency treatment step. The second lyophobic treatment process was also performed by atmospheric pressure plasma treatment using fluorine gas as in the first lyophobic treatment process, and the plasma irradiation conditions were also the same.

8). Second ink jet process The blue colored layer forming coating liquid is discharged into the remaining openings by the ink jet apparatus on the water-repellent baked substrate to form a second color filter colored layer. It was.
The blue colored layer-forming coating liquid is a blue pigment-dispersed ink made of a color filter pigment and a thermosetting resin, and the concentration of which is adjusted so that a desired color filter color can be expressed. Using. The coating amount at this time was such that the film thickness after final post-baking was 2.2 μm.

(Blue green colored layer forming coating solution)
-Pigment: B156 / V23 ... 2.85 mass%
・ Dispersant: Azisper Pb821 (Ajinomoto Fine Chemical) ... 1.71% by mass
・ Main solvent: Diethylene glycol monobutyl ether acetate: 69.00% by mass
・ Solvent: Ethyl 3-ethoxypropionate ... 10.00 mass%
-Binder: GMA acrylic resin ... 16.45% by mass
・ Leveling agent: LHP-90 (Enomoto Kasei) ... 0.06 mass%
The P / V ratio was 0.20, the solid content concentration was 21.0%, and the viscosity was 10.0 CPS. The viscosity is a value measured at room temperature (23 ° C.) using a falling ball viscometer.

9. Second reduced-pressure drying treatment step The reduced-pressure drying treatment was performed on the colored layer for the second color filter using the same reduced-pressure drying apparatus as in the first reduced-pressure treatment step.
A pressure profile as shown in FIG. 2 at 40 ° C. is obtained in advance using the second color filter substrate on which the colored layer before blue drying is formed in advance, and then the reduced pressure drying process is performed at a reduced pressure time of 290 seconds from t1. finished. Here, t3 in the pressure profile is 260 seconds after t1, and after 260 seconds from t1, the second equilibrium pressure state is reached, and the pressure is lower than the first equilibrium pressure state.

6). Second baking processing step The second color filter substrate is pre-baked at 100 ° C. for 20 minutes in a clean oven, and then post-baked at 230 ° C. for 80 minutes in a clean oven. Obtained.

7). Evaluation The obtained color filter was free from defects such as broken color mixing in which each color was mixed beyond the light shielding portion. Further, the difference between the film thickness of the maximum film thickness portion T and the film thickness of the minimum film thickness portion B in the cross-sectional shape in the pixel region long side direction of the colored layer formed in each pixel area is determined by the three-dimensional non-interference method. As a result of measurement with a contact surface shape measuring device (product name: Micromap557N, manufactured by Micromap USA), the red colored layer was 0.40 μm, the green colored layer was 0.40 μm, and the blue colored layer was 0.28 μm.

(Comparative Example 1)
1. Liquid-repellent treatment step A BM substrate was prepared in the same manner as in the example, and a water-washing step was performed in the same manner.
2. Ink jet process For the obtained BM substrate, a red colored layer forming coating solution, a green colored layer forming coating solution, and a blue colored layer forming coating solution having the same formulation as in the example were used. The substrate was discharged in the same manner as in the inkjet process to obtain a color filter substrate.

3. Vacuum drying treatment step The color filter substrate was subjected to vacuum drying treatment using the same device as the vacuum drying device of Example 1.
After obtaining a pressure profile as shown in FIG. 2 at 50 ° C. in advance using the color filter substrate on which the red, green and blue pre-drying colored layers were previously formed, the pressure reduction time from t1 was 290 seconds. The vacuum drying process was finished. Here, t3 in the pressure profile is 270 seconds after t1, and after 290 seconds from t1, the pressure is in the second equilibrium pressure state, which is lower than the first equilibrium pressure state.

4). Bake treatment step The substrate for color filter subjected to the above-mentioned vacuum drying treatment is pre-baked at 100 ° C. for 20 minutes in a clean oven, and then post-baked at 230 ° C. for 80 minutes in a clean oven, A color filter was obtained.

5. Evaluation The obtained color filter was free from defects such as broken color mixing in which each color was mixed beyond the light shielding portion. Further, the difference between the film thickness of the maximum film thickness portion T and the film thickness of the minimum film thickness portion B in the cross-sectional shape in the pixel region long side direction of the colored layer formed in each pixel area is determined by the three-dimensional non-interference method. As a result of measurement with a contact surface shape measuring device (product name: Micromap557N, manufactured by Micromap USA), the red colored layer was 0.80 μm, the green colored layer was 0.76 μm, and the blue colored layer was 0.40 μm.

(Comparative Example 2)
In the same manner as in Comparative Example 1, a color filter substrate was obtained.
Next, a vacuum drying process was performed on the color filter substrate using the same apparatus as the vacuum drying apparatus of Example 1.
After obtaining a pressure profile as shown in FIG. 2 at 40 ° C. in advance using the color filter substrate on which the red, green and blue pre-drying colored layers are formed in advance, the pressure reduction time from t1 is 130 seconds. The vacuum drying process was finished. Here, t2 in the pressure profile is 380 seconds after t1, and the first equilibrium pressure state is after 130 seconds from t1.

The color filter substrate after the vacuum drying treatment was baked in the same manner as in Comparative Example 1 to obtain a color filter.
The obtained color filter had a broken color mixture in which the blue colored layer leaked into the other color pixel areas.

DESCRIPTION OF SYMBOLS 1 ... Colored layer 2 ... Light-shielding part T ... Maximum film thickness part B ... Minimum film thickness part

Claims (4)

A first lyophobic treatment step for lyophobic the light-shielding portion by applying a lyophobic treatment to a black matrix substrate formed on the substrate and having a light-shielding portion having an opening.
A first colored layer forming coating liquid is applied to a part of the opening of the black matrix substrate subjected to the first lyophobic treatment process by an inkjet method, whereby a first drying is applied to a part of the opening. A first inkjet process for forming a first color filter substrate on which a pre-colored layer is formed;
A first reduced-pressure drying treatment step of subjecting the first color filter substrate to a reduced-pressure drying treatment;
A first baking process for obtaining a baked substrate after performing a pre-baking process on the first color filter substrate on which the first reduced-pressure drying process has been performed;
A second lyophobic treatment step of lyophobizing the shading part again by applying a lyophobic treatment to the baking substrate;
By applying the second colored layer forming coating liquid to the remaining openings of the baked substrate that has been subjected to the second lyophobic treatment process by an inkjet method, the remaining openings are colored before the second drying. A second inkjet process for forming a second color filter substrate having the layer formed thereon;
A second reduced-pressure drying treatment step of subjecting the second color filter substrate to a reduced-pressure drying treatment;
A second baking process for obtaining a color filter by performing a post-baking process after performing a pre-baking process on the second color filter substrate subjected to the second vacuum drying process.
Each of the first colored layer forming coating liquid and the second colored layer forming coating liquid is a combination of a red colored layer forming coating liquid and a green colored layer forming coating liquid, and a blue colored layer. One of the forming coating liquids,
In the reduced pressure drying process after the inkjet process using the combination of the red colored layer forming coating liquid and the green colored layer forming coating liquid, the first equilibrium pressure observed when the reduced pressure drying process is performed Finish the reduced-pressure drying process at a certain first equilibrium pressure,
In the reduced-pressure drying treatment step after the inkjet step using the blue colored layer forming coating liquid, the reduced-pressure drying treatment step is terminated in a state where the pressure is lower than the first equilibrium pressure. Manufacturing method.   The method for producing a color filter according to claim 1, wherein the post-baking temperature in the first baking process is lower than the post-baking temperature in the second baking process.   The first colored layer forming coating solution is a combination of the red colored layer forming coating solution and the green colored layer forming coating solution, and the second colored layer forming coating solution is colored blue. The method for producing a color filter according to claim 1, wherein the color filter is a layer forming coating solution. The light shielding part is a resin light shielding part,
The first lyophobic process and the second lyophobic process are lyophobic processes performed by performing a plasma process using fluorine as an introduction gas,
The method for producing a color filter according to claim 3, wherein the fluorine plasma treatment intensity in the first liquid repellency treatment step is lower than the fluorine plasma treatment intensity in the second liquid repellency treatment step.

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