1362679 九、發明說明： 【發明所屬之技術領域；1 . 發明領域 • 本發明係有關於一種光源裝置，特別是有關於一種可 ' 5 檢測燈之金屬基部安裝於金屬基部支持座之狀態之光源裝 置。 I：先前技術3 發明背景 • 在半導體或液晶基板等之曝光用光照射裝置中，係使 ίο 用短弧型放電燈與凹面鏡組合之光學系統，以有效率地利 用放射光。例如，該構成係於中央部具有開口之凹面鏡安 裝有短弧型放電燈者。點光源之燈與凹面鏡組合使用時， 可在旋轉楕圓體鏡將光集中在1點，並可在放物面鏡為平行 光，因此可廣為利用（參照專利文獻1)。要得到此種特性， 15 必須將短弧型放電燈之亮點正確地置於凹面鏡的焦點。當 安裝規格不同之燈且亮燈時，短弧型放電燈之亮點的位置 ® 會偏離凹面鏡的焦點，無法得到所期望的光學性能。不僅 如此，還會有因為在過輸入電力狀態下亮燈而放電燈破裂 之情況。 - 20 因此，使用一種方法是在燈的金屬基部與光源裝置之 金屬基部支持座相對之位置設置凹凸，藉由使該凹凸的位 置關係依燈的種類而不同，以防止無法使用之燈在光源裝 置亮燈（參照專利文獻2)。藉由該方法，將燈安裝於光源裝 置之作業者若確認金屬基部與金屬基部支持座之凹凸未嵌 5 1362679 合’則可知道是不適合之燈安裝於光源裝置。 本申明人在日本專利公開公報特願2_1〇()_中，提 出-發明係於金屬基部支持座設置用以讀取顯示於金厲基 部之燈•資料之讀取裝置。可自動判斷安裝於光源裝置之 5燈是否為適合之燈，若為適合之燈，則進行燈之使用狀態 及使用記錄的管理。 【專利文獻1】日本專利公開公報特開蓮·135134 【專利文獻2】實全昭59-181576號公報 【專利文獻3】日本專利公開公報特願2〇〇6_则細說 10 明書 【發明内容3 發明概要 可是，習知之光源裝置有以下的問題。在將燈資訊傳 達到光源裝置之方法中’由於放電燈在亮燈時金屬基部支 15持座為高溫狀態，因此必須使用耐高溫性之讀取裝置、或 冷卻構造複雜之讀取裝置。又，燈在亮燈時、特別是亮燈 開始時’金屬基部支持座為高電壓狀態，因此讀取部與金 屬基部支持座之間的電絕緣必須要確實。如此構成之讀取 裝置相當高價’且長期使用下來，讀取裝置要維持正常動 2〇 作也很困難。又，即使在金屬基部及金屬基部支持座之相 對位置設置凹凸’也會有在凹凸未完全嵌合之狀態下也古 燈之情況。因此，當在過輸入電力狀態下亮燈，放電燈脅^ 破裂。 本發明之目的係欲解決上述習知之問題，簡單且正確 6 1362679 地檢測出燈座安裝於光源裝置之安裝狀態。 為解決上述課題，本發明中，光源裝置係構成為包含 有：燈，係具有一金屬基部者，該金屬基部係可機械性地 保持構成用以放射光之發光部之燈泡，且可供給電力者； 5 金屬基部支持座，係經由前述金屬基部而保持前述燈者； 及燈檢測機構，係利用光檢測前述金屬基部已安裝到前述 金屬基部支持座之狀態。更具有一依據燈檢測機構之輸出 來控制燈之亮燈•不亮燈之控制機構。燈檢測機構具有： 檢測用光源；光傳送路，係用以將來自前述檢測用光源之 10 光導向前述金屬基部者；及受光部，係用以感測來自前述 檢測用光源之光因前述金屬基部之存在而產生變化的情況 者。 金屬基部支持座更具有：可動銷，係受前述金屬基部 推壓且可動作者；光調變部，係設置於前述可動銷，並且 15 當前述金屬基部安裝於前述金屬基部支持座時，用以調變 來自前述檢測用光源之光者。可動銷具有複數光調變部， 該複數光調變部係可因應於前述金屬基部的種類，而改變 來自前述檢測用光源之光照射之部分。金屬基部與前述金 屬基部支持座具有一凹凸部，可使兩者之抵接部互相嵌 20 合。光傳送路係光纖。 藉由上述構成，可以低價且可長期穩定地檢測燈安裝 於光源裝置之安裝狀態。 【實施方式3 較佳實施例之詳細說明 7 ,a以下’參照第1圖〜第8圖詳細說明實施本發明之最佳 形態。 【實施例1】 本發明之實施例1係藉由光為透過或被隔絕之狀態’來 檢測燈之金屬基部安裝於金屬基部支持座之狀態之光源裝 置。 第1圖係顯示在本發明之實施例1中之光源裝置，燈安 裝於具有光傳送路之金屬基部支持座之狀態之外觀圖 ()圖係具有光傳送路之金屬基部支持座之_面圖。第 2(B)圖係於具有光傳送路之金屬基部支持座安裝燈之金屬 基部之狀態之縱截面圖。第i圖與第2圖中，陽極丨為正極側 之電極、。陰極2為負_之電極。内部引線棒3係支樓電極 二電性連接之構件。金屬箱4係用以電性連接内部引線棒與 雷之構件°填封管部5係肋填驗具有電極之放 屬二係^電性連接金 '金肩治之構件。㈣8係以機械式將金屬 引線棒電性連接之構件。 係由係藉由電極間之放電而發光之部分。燈泡10 械式料二真:：=:燈管。金屬基部2〇係_ 基部之大^〜電性連接之構件。圓筒部21為金屬 部叫端面22係金屬基部之㈣部的端部。突出 伴持2部之小徑部。金屬基部支持座30係機械式地 突It屬基部且電性連接之構件。孔抑係供金眉基部之 入之金屬基部支持座之空隙。光傳送路40A係由檢 1362679 單色光，但亦可為複數色之光或脈衝狀之光，以防止盘外 部光混淆。 接著說明如上述所構成之本發明之實施例匕光源裝 ‘ 置的機能與動作°首先’參照第1圖說明光源裝置之機能的 5概要。使金屬基部2〇之突出部23喪合於金屬基部支持舰 之孔部Μ，並在錢裝置保持燈。來自檢測物純a之光 會通過光傳送路佩到達金屬基部支持座π之孔部Η。若金 ㈣部支持座赚安裝金屬基侧，縣會通過光傳送路 _而到達受光部41B。受光部4m將來自光傳送路之光變 10換成電氣信號。若金屬基部支持座3〇安裝有金屬基部， 由於光不會到達受光部41B，因此可檢測出金屬基部支持座 30安裝有金屬基部2G。當受光部41B受到燈之高能量之光的 照射時，受光性能會劣化。因此，可藉由於光傳送路使用 光纖等，隔絕外部光進人受光部41B，防止受光部仙的劣 15化。又’防止成為干擾之外部光，並可更精確地進行檢測。 • 其次，參照第2圖說明金屬基部之檢測方法。如第2(A) 圖所不，若金屬基部支持座3〇未安裝金屬基部2〇，則來自 燈檢測裝Ϊ之檢则光源4丨A之光會傳過光傳送路條，由 #面40AA放射到金屬基部支持座3〇之孔部31内。藉由光通 ' 過金屬基部支持座30之孔部31的空間，由端面40BB入設於 ' 光傳送路4GB ’料至燈檢職置之受光部41B。藉由在受 光部41B檢測光，可測知金屬基部2〇未安裝。 如第2(B)圖所示，若金屬基部支持座3()安裝有金屬基 邹20,由於金屬基部2〇之突出部乃會進入金屬基部支持座 10 30之孔部31的空間，因此經由光傳送路4〇a傳導之光會被金 屬基部20之突出部23遮擋而不入射到光傳送路4〇B。如此， 可藉由受光部41B未檢測到光而測知到燈之金屬基部2〇有 安裝於光源裝置之金屬基部支持座30。又，藉由作成僅在 金屬基部20有確實地安裝於金屬基部支持座3〇之狀態（金 屬基部20之圓筒部21之端面22抵接於金屬基部支持座3〇端 面之狀態）時’光不會被金屬基部20之突出部23遮擋之構 成，可檢測到金屬基部20確實安裝於金屬基部支持座3〇之 狀態。如此’金屬基部20之突出部23具有將入射之光調變 之光調變機構之作用。此種情況之調變係指隔絕來自檢測 用光源之光或使光通過。 其次，參照第3圖說明檢測燈之安裝狀態，並判斷可否 亮燈之方法。 (A)當光源裝置為燈之交換待機狀態時，根據來自系統 部之輸出信號，來自燈檢測裝置之檢測用光源41八之光會經 由光傳送路40A而傳送到金屬基部支持座3〇。光由光傳送路 40A之端面40AA照射到金屬基部支持座3〇之孔部31内。若 燈未安裝於光源裝置’則會通過金屬基部支持座3〇之孔部 31的空間，而由端面40BB入射到光傳送路4〇b，傳導至受 光部41B。藉由受光部41B之光感測器，光會變換成電氣信 號。另一方面’若燈安裝於光源裝置，由於金屬基部2〇之 突出部23會進入金屬基部支持座30之孔部31的空間，因此 經由光傳送路40A傳導之光會被金屬基部2〇之突出部23遮 擋而不入射於光傳送路40B，不會有由受光部41b顯示檢測 1362679 屬基部支持座之狀態。 如上所述，本發明之實施例1中，係將光源裝置作為可 藉由光為透過或被隔絕來檢測燈之金屬基部安裝於金屬基 部支持座之狀態，因此可簡單、容易且確實地檢測燈之安 5 裝狀態。 【實施例2】 本發明之實施例2係在燈之金屬基部與光源裝置之金 屬基部支持座之間相對之位置設置凹凸，且使其凹凸位置 • 關依燈之種類而有所不同之光源裝置》 10 第4圖係顯示在本發明之實施例2之光源裝置，於具有 凹部之金屬基部支持座安裝具有凸部之金屬基部之狀態之 縱截面圖。第4圖中，凸部25係設置於金屬基部之端面者。 知面32係金屬基部支持座之金屬基部側之端面。凹部35係 設置於金屬基部支持座之金屬基部側之端面者。其他之基 15 本構成則與實施例1相同。 如第4圖所示，在金屬基部20之圓筒部21之端面22具有 ® 凸部25。金屬基部支持座30之端面32具有凹部35。由於金 屬基部20之凸部25未進入金屬基部支持座30之凹部35，因 此金屬基部20之凸部25抵接於金屬基部支持座30之端面 ' 20 32。圓筒部21之端面22與金屬基部支持座30之端面32未抵 接°因此’燈未正確地安裝於光源裝置。 相對於此，當燈正確地安裝於光源裝置時，藉由金屬 基部20之凸部25進入金屬基部支持座30之凹部35，圓筒部 21之端面22與金屬基部支持座30之端面32抵接。藉由構成 13 1362679 為僅在金屬基部20之圓筒部21的端面22抵接金屬基部支持 座30之端面32之狀態下會遮擋光，可檢測出金屬基部2〇確 實地安裝於金屬基部支持座30之狀態，可防止在不適當之 安裝狀態下之亮燈。又，當安裝無法使用於光源裝置之燈 5 時，由於凹凸不會嵌合，因此可防止不適合之燈的亮燈。 此例中，係於金屬基部側設置凸部，於金屬基部支持 座側設置凹部，但亦可於金屬基部側設.置凹部，於金屬武 部支持座側設置凸部。又，亦可設置複數之凹部或凸部， 或設置外形相異之凸部或凹部，或者其等之組合。 10 如上所述，本發明之實施例2中，由於光源裝置係構成 為於燈之金屬基部與光源裝置之金屬基部支持座之相對位 置設置凹凸，且其凹凸之位置關係依燈之種類而異，因此 可檢測出安裝了不適合之燈的情況，可防止不適合之燈亮 燈。 ~ 15 【實施例3】 本發明之實施例3係一種藉由經設置於金屬基部之光 調變部所調變之光，檢測燈之安裝之光源裝置。 第5圖係顯示在本發明之實施例3之光源裝置中，於具 有光傳送路之金屬基部支持座安裝有具有光調變部之金屬 20基部之狀態之縱截面圖。第5圖中，光調變部24係用以反射 光之構件。其他基本構成與實施例1相同。 如第5圖所示，金屬基部20之犬出部23設有光調變部 24。光傳送路4〇僅設置一個於金屬基部支持座3〇〇光傳送 路40之其中一端係與燈檢測裝置之檢測用光源41A與受光 14 1362679 部41B連接。光傳送路40之另一端朝金屬基部支持座3〇之孔 部31内開放。 在此’所謂光進行調變係意指反射來自檢測用光源之 光、不反射光（非反射）、改變光之反射量（包含散亂）、及 5將反射光之特性改變為入射光（改變光之波長分布卜而且， 所謂的光調變部，係指使來自檢測用光源之光反射、使之 不反射、改變反射量或改變反射光之頻譜特性之部分。亦1362679 IX. Description of the Invention: [Technical Field of the Invention] 1. Field of the Invention The present invention relates to a light source device, and more particularly to a light source capable of detecting the state in which the metal base of the lamp is mounted on the metal base support Device. I. Prior Art 3 Background of the Invention In an exposure light irradiation device such as a semiconductor or a liquid crystal substrate, an optical system in which a short arc type discharge lamp and a concave mirror are combined is used to efficiently utilize the emitted light. For example, the configuration is such that a concave mirror having an opening at the center is provided with a short arc type discharge lamp. When the light source of the point light is used in combination with the concave mirror, the light can be concentrated at one point in the rotating round mirror and can be used as a parallel light in the discharge mirror (see Patent Document 1). To achieve this characteristic, 15 the highlight of the short arc discharge lamp must be correctly placed in the focus of the concave mirror. When lamps with different specifications are installed and illuminated, the position of the bright spot of the short arc discharge lamp ® will deviate from the focus of the concave mirror and the desired optical performance will not be obtained. Not only that, but also because the discharge lamp is broken due to lighting in the state of input power. - 20 Therefore, in one method, irregularities are provided at a position where the metal base of the lamp is opposed to the metal base support of the light source device, and the positional relationship of the unevenness is different depending on the type of the lamp to prevent the unusable lamp from being in the light source. The device is turned on (see Patent Document 2). According to this method, if the operator attaching the lamp to the light source device confirms that the metal base portion and the metal base support seat are not inlaid with each other, it is known that an unsuitable lamp is attached to the light source device. In Japanese Patent Laid-Open Publication No. Hei 2_1 (), the present invention proposes a reading device for reading a lamp/data displayed on a base of a metal base. It can automatically judge whether the 5 lamps installed in the light source device are suitable lamps, and if it is a suitable lamp, manage the use state of the lamps and the usage record. [Patent Document 1] Japanese Laid-Open Patent Publication No. Sho 59-181576 [Patent Document 2] Japanese Patent Laid-Open Publication No. Hei. SUMMARY OF THE INVENTION Summary of the Invention However, conventional light source devices have the following problems. In the method of transmitting the lamp information to the light source device, the metal base portion 15 is held at a high temperature when the discharge lamp is turned on. Therefore, it is necessary to use a high temperature resistant reading device or a reading device having a complicated cooling structure. Moreover, when the lamp is turned on, especially at the start of lighting, the metal base support is in a high voltage state, so the electrical insulation between the reading portion and the metal base support must be ensured. The reading device thus constructed is relatively expensive and is used for a long period of time, and it is difficult for the reading device to maintain normal operation. Further, even if the unevenness is provided at the opposite positions of the metal base portion and the metal base support seat, there is a case where the ancient light is not fully fitted. Therefore, when the light is turned on in the state of the input power, the discharge lamp is broken. The object of the present invention is to solve the above-mentioned conventional problems, and to detect the installation state of the lamp holder mounted on the light source device simply and correctly. In order to solve the above problems, in the present invention, the light source device includes a lamp having a metal base that mechanically holds a bulb constituting a light-emitting portion for emitting light, and is capable of supplying electric power. The metal base support holder holds the lamp through the metal base portion, and the lamp detecting mechanism detects the state in which the metal base portion is attached to the metal base support by light. There is also a control mechanism for controlling the lighting of the lamp according to the output of the lamp detecting mechanism. The lamp detecting mechanism includes: a detecting light source; the light transmitting path for guiding the light from the detecting light source to the metal base; and the light receiving unit for sensing light from the detecting light source due to the metal A situation in which a change occurs in the presence of a base. The metal base support further has: a movable pin which is pressed by the metal base and is movable; the light modulation part is disposed on the movable pin, and 15 is used when the metal base is mounted on the metal base support The light from the aforementioned detection light source is modulated. The movable pin has a plurality of optical modulation sections, and the plurality of optical modulation sections can change the portion of the light from the detection light source to be irradiated depending on the type of the metal base. The metal base and the metal base support have a concavo-convex portion, and the abutting portions of the two can be fitted to each other. Optical transmission path is an optical fiber. According to the above configuration, it is possible to stably detect the mounting state of the lamp mounted on the light source device at a low cost and for a long period of time. [Embodiment 3] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT 7 , a and Hereinafter The best mode for carrying out the invention will be described in detail with reference to Figs. 1 to 8 . [Embodiment 1] In Embodiment 1 of the present invention, a light source device in which a metal base of a lamp is attached to a metal base support is detected by a state in which light is transmitted or isolated. Fig. 1 is a view showing the appearance of a light source device in a first embodiment of the present invention, in which a lamp is mounted on a metal base support having an optical transmission path. Figure. Fig. 2(B) is a longitudinal sectional view showing a state in which the metal base of the metal base support lamp having the optical transmission path is mounted. In the first and second figures, the anode 丨 is the electrode on the positive electrode side. Cathode 2 is a negative electrode. The inner lead rod 3 is a member of the branch electrode and the second electrical connection. The metal box 4 is used for electrically connecting the inner lead rod and the lightning member. The sealing tube portion 5 is ribbed and the member having the electrode is connected with the two-wire electrical connection gold 'gold shoulder'. (4) 8 series members that electrically connect metal lead bars in a mechanical manner. It is a portion that emits light by discharge between electrodes. Light bulb 10 mechanical material two true::=: lamp. The metal base 2 is a member of the base of the base. The cylindrical portion 21 is an end portion of the (four) portion of the metal portion called the end surface 22 of the metal portion. Prominently accompanied by two small diameter sections. The metal base support 30 is a mechanically protruding member that is a base and is electrically connected. The hole is the gap of the metal base support seat for the base of the gold eyebrow. The optical transmission path 40A is for detecting 1362679 monochromatic light, but may also be a plurality of colors of light or pulsed light to prevent light confusing outside the disk. Next, an outline of the function of the light source device will be described with reference to Fig. 1 for the function and operation of the light source device according to the embodiment of the present invention. The protruding portion 23 of the metal base portion 2 is immersed in the hole portion of the metal base supporting ship, and the lamp is held in the money device. The light from the detector pure a will reach the hole portion of the metal base support π through the light transmission path. If the gold (4) part supports the seat to install the metal base side, the county will reach the light receiving unit 41B through the optical transmission path. The light receiving unit 4m converts the light from the optical transmission path into an electrical signal. When the metal base portion 3 is mounted with the metal base portion, since the light does not reach the light receiving portion 41B, it is possible to detect that the metal base portion 2 is attached with the metal base portion 2G. When the light receiving portion 41B is irradiated with light of high energy of the lamp, the light receiving performance is deteriorated. Therefore, it is possible to prevent the external light from entering the human light receiving portion 41B by using an optical fiber or the like due to the optical transmission path, thereby preventing the light receiving portion from being deteriorated. Also, it prevents the external light that is disturbed and can be detected more accurately. • Next, the method of detecting the metal base will be described with reference to Fig. 2 . As shown in the second (A) diagram, if the metal base support 3 does not have the metal base 2〇 installed, the light from the lamp detection device will pass through the light transmission path, and the #面40AA is radiated into the hole portion 31 of the metal base support. The light passing through the space of the hole portion 31 of the metal base support base 30 is inserted from the end surface 40BB into the light receiving portion 4B of the light transmission path 4GB. By detecting the light in the light receiving portion 41B, it can be detected that the metal base portion 2 is not mounted. As shown in FIG. 2(B), if the metal base support 3 () is attached with the metal base 20, since the protruding portion of the metal base 2〇 enters the space of the hole portion 31 of the metal base support 10 30, Light conducted through the light transmission path 4A is blocked by the protruding portion 23 of the metal base 20 without being incident on the light transmission path 4B. Thus, the light-receiving portion 41B detects that the metal base portion 2 of the lamp is attached to the metal base support base 30 of the light source device. Further, when the metal base portion 20 is reliably attached to the metal base support base 3 (the end surface 22 of the cylindrical portion 21 of the metal base portion 20 abuts against the end surface of the metal base support 3), The light is not blocked by the protruding portion 23 of the metal base portion 20, and it is detected that the metal base portion 20 is surely attached to the metal base supporting seat 3'. Thus, the projection 23 of the metal base 20 functions as a light modulation mechanism that modulates the incident light. Modulation in this case means isolating or passing light from a source for detection. Next, a method of detecting the mounting state of the lamp and determining whether or not the lamp can be turned on will be described with reference to Fig. 3. (A) When the light source device is in the standby state of the lamp exchange, the light from the detection light source 41 from the lamp detecting device is transmitted to the metal base support 3 via the optical transmission path 40A based on the output signal from the system portion. The light is irradiated into the hole portion 31 of the metal base support 3 by the end surface 40AA of the light transmission path 40A. When the lamp is not attached to the light source device, the space of the hole portion 31 of the holder 3 is passed through the metal base portion, and the end surface 40BB is incident on the light transmission path 4b and transmitted to the light receiving portion 41B. The light is converted into an electrical signal by the light sensor of the light receiving portion 41B. On the other hand, if the lamp is attached to the light source device, since the protruding portion 23 of the metal base portion 2 enters the space of the hole portion 31 of the metal base support base 30, the light transmitted through the optical transmission path 40A is blocked by the metal base portion 2. The protruding portion 23 is shielded from being incident on the optical transmission path 40B, and the state in which the detection portion 1362679 is the base supporting seat is not displayed by the light receiving portion 41b. As described above, in the first embodiment of the present invention, the light source device is mounted on the metal base support as a metal base that can be detected by light to be transmitted or isolated, so that the light source device can be easily, easily and reliably detected. Lamp security 5 installed state. [Embodiment 2] In the second embodiment of the present invention, the concave and convex portions are provided at positions opposite to each other between the metal base of the lamp and the metal base support of the light source device, and the concave and convex positions are made different depending on the type of the lamp. [Embodiment 10] Fig. 4 is a longitudinal cross-sectional view showing a state in which a light source device according to a second embodiment of the present invention is mounted on a metal base support having a concave portion and a metal base having a convex portion is attached. In Fig. 4, the convex portion 25 is provided on the end surface of the metal base. The face 32 is an end face on the metal base side of the metal base support. The recess 35 is provided on the end surface of the metal base support on the metal base side. Other bases 15 This configuration is the same as that of the first embodiment. As shown in Fig. 4, the end surface 22 of the cylindrical portion 21 of the metal base portion 20 has a convex portion 25. The end face 32 of the metal base support seat 30 has a recess 35. Since the convex portion 25 of the metal base 20 does not enter the concave portion 35 of the metal base support seat 30, the convex portion 25 of the metal base portion 20 abuts against the end surface '20 32 of the metal base support base 30. The end surface 22 of the cylindrical portion 21 is not in contact with the end surface 32 of the metal base support seat 30. Therefore, the lamp is not correctly attached to the light source device. On the other hand, when the lamp is correctly mounted on the light source device, the convex portion 25 of the metal base portion 20 enters the concave portion 35 of the metal base support seat 30, and the end surface 22 of the cylindrical portion 21 abuts against the end surface 32 of the metal base support seat 30. Pick up. By constituting 13 1362679, only when the end surface 22 of the cylindrical portion 21 of the metal base portion 20 abuts against the end surface 32 of the metal base support seat 30, it is possible to detect that the metal base portion 2 is reliably attached to the metal base portion. The state of the seat 30 prevents lighting in an improperly mounted state. Further, when the lamp 5 which cannot be used for the light source device is mounted, since the unevenness is not fitted, the lighting of the unsuitable lamp can be prevented. In this example, a convex portion is provided on the metal base side, and a concave portion is provided on the metal base support side. However, a concave portion may be provided on the metal base portion side, and a convex portion may be provided on the metal arm support side. Further, a plurality of concave portions or convex portions may be provided, or convex portions or concave portions having different shapes may be provided, or a combination thereof. As described above, in the second embodiment of the present invention, the light source device is configured such that irregularities are provided at the relative positions of the metal base of the lamp and the metal base support of the light source device, and the positional relationship of the unevenness varies depending on the type of the lamp. Therefore, it is possible to detect that an unsuitable lamp is installed, and it is possible to prevent an unsuitable lamp from being lit. [Embodiment 3] Embodiment 3 of the present invention is a light source device for detecting the mounting of a lamp by light modulated by a light modulation portion provided at a metal base. Fig. 5 is a longitudinal cross-sectional view showing a state in which a base portion of a metal 20 having a light-modulating portion is attached to a metal base support having an optical transmission path in a light source device according to a third embodiment of the present invention. In Fig. 5, the light modulation portion 24 is a member for reflecting light. The other basic configuration is the same as that of the first embodiment. As shown in Fig. 5, the dog-out portion 23 of the metal base 20 is provided with a light modulation portion 24. Only one of the optical transmission paths 4 is disposed on the metal base support 3, and one end of the optical transmission path 40 is connected to the detection light source 41A of the lamp detecting device and the light receiving portion 14 1362679 portion 41B. The other end of the optical transmission path 40 is opened to the inside of the hole portion 31 of the metal base supporting base 3. Here, the term "light modulation" means to reflect light from a detection light source, not to reflect light (non-reflection), to change the amount of reflection of light (including scattering), and to change the characteristic of reflected light into incident light ( The wavelength distribution of the light is changed. The so-called light modulation portion refers to a portion that reflects light from the light source for detection, does not reflect it, changes the amount of reflection, or changes the spectral characteristics of the reflected light.
可為發出f光之光調變部4光部41B作為具有對應於光調 變方法之檢測能力之光感測器。 15The light-modulating portion 4 light portion 41B that emits f light may be used as a light sensor having a detection capability corresponding to the light modulation method. 15
20 :燈女裝於光源裝置，使金屬基部支持座30之端面與 金屬基部20之圓筒部21之端面22抵接時，金屬基部2〇之突 出部23與光調變部24對光具有不同之調變特性，因此，受 先部4断根據_光傳送路4()傳來之光，檢測出燈相對於 金屬基部支持座30安裝在哪一圓周方向之方位上安裝。 當光調變部24與光傳送路4〇之端面相對時，由於由燈 Γ裝置之檢利光源似送出之光會照射於光調變部 〜因此經光調變部24所調變之光係由受光部4ΐβ接收。當 與繼斷叫目朴由燈檢測裝置 光源41Α送出之光會照射於光調變物以外之突 光心 由於受光部41Β可因應於接收之 光’來檢収絲變部24或^勒❹ 40之端面對面’因此也可騎燈之_方㈣方位、路 對此，當金屬基部2〇未安裝於金屬基部支持細時， 15 1362679 來自檢測用光源41A之光會傳過光傳送路40，放射於金屬基 部支持座30之孔部31。放置於金屬基部支持座30之孔部31 内之光在礼部31内會散亂’因此光無法送到受光部41B。藉 此’光源裝置可檢測到未安裝有燈。亦可藉由接收在孔部 5 調變之光，來檢測出燈未女裝於光源裝置。20: In the light source device, when the end surface of the metal base support 30 abuts against the end surface 22 of the cylindrical portion 21 of the metal base portion 20, the protruding portion 23 of the metal base portion 2 and the light modulation portion 24 have light for the light. Since the modulation characteristics are different, the light transmitted from the light transmission path 4 () is detected by the first portion 4, and it is detected in which circumferential direction the lamp is mounted with respect to the metal base support 30. When the light modulation portion 24 faces the end surface of the light transmission path 4, light emitted by the detection light source of the lamp unit is irradiated to the light modulation portion, and thus the light modulated by the light modulation portion 24 is modulated. It is received by the light receiving unit 4ΐβ. When the light sent from the lamp detecting device light source 41 继 is irradiated to the light-emitting element other than the light-modulating object, the light-receiving portion 41 can detect the filament changing portion 24 or the corresponding light. The end face of 40 is opposite to each other. Therefore, it is also possible to ride the light. The direction (4) of the lamp is used. When the metal base 2 is not mounted on the metal base for support, 15 1362679 light from the detecting light source 41A passes through the light transmitting path 40. The hole portion 31 of the metal base support base 30 is radiated. The light placed in the hole portion 31 of the metal base support base 30 is scattered in the ritual portion 31. Therefore, light cannot be sent to the light receiving portion 41B. By this, the light source device can detect that no lamp is installed. It is also possible to detect that the lamp is not worn by the light source device by receiving the light modulated in the hole portion 5.
其次，說明實施例3之變形例。若於金屬基部全體使用 光反射率高且耐熱性與導電性良好之材質，可藉由僅令光 調變部24為光反射率低之材質，成為一耐熱性與導電性良 好之金屬基部。又，藉由設置光之調變特性可依燈之種類 °而異之光調變部，也可檢測燈的種類。當金屬基部之材質 與光調變部之材質相同時，會接收因應於金屬基部之材質 之光反射特性所調變之光。光源裝置以受光部產生電氣信 號而判斷為燈有正常安裝。 15Next, a modification of the third embodiment will be described. When a material having a high light reflectance and excellent heat resistance and conductivity is used for the entire metal base, the light-modulating portion 24 can be made of a material having a low light reflectance and a metal base having excellent heat resistance and conductivity. Further, by setting the modulation characteristic of the light, the light modulation portion can be different depending on the type of the lamp, and the type of the lamp can be detected. When the material of the metal base is the same as the material of the light-modulating portion, light that is modulated by the light reflection characteristics of the material of the metal base is received. The light source device determines that the lamp is normally mounted by generating an electric signal by the light receiving portion. 15
20 ''' δ° ~ 煲用具有可將 白色光全反射之特性之材質，並在檢測用光源發出白色光 照射到光調變部時，會保持在白色光之壯〜 〈狀態下送返受光 部。當光調變部24使用具有可將白色光調變為主色光之光 調變特性之材質時，來自檢測用光源之白色光合調θ為主 色光而送到受光部。當光調變部24使用夏士 η α ，、有可使白色光散 亂且吸收之特性之材質時，即使來自檢 , 、』用光源之白色光 知射到光調變部，光也不會傳送到受光部。 土〜社. 在此種情況下， 禾文裝燈時，經全反射之光會傳送到受光部 如上所述，在本發明之實施例3中，央 Μ, %馮裴置係構成為 错由設置於金屬基部之光調變部所調變之 祀來檢測燈，因 16 1362679 此也可檢測出燈的種類，並可防止安裝不適於光源裝置之 燈。 【實施例4】 本發明之實施例4係於當金屬基部嵌合於金屬基部支 • 5持座時會移動之可動銷設置光調變部之光源裝置。 第6圖係顯示在本發明之實施例4之光源裝置中，於設 有光調變機構之金屬基部支持座安裝有燈之狀態之縱截面 圖。第7圖係連接光傳送路之金屬基部支持座之光調變機構 ® 之部分放大縱截面圖。第6圖與第7圖中，可動銷44係設置 10於金屬基部支持座之銷，其安裝有光調變部，並藉由金屬 基部而動作。彈簧部45係將可動銷推出之彈簣。開關孔46 係供可動銷可動作之孔。其他基本構成與實施例丨相同。 如第6圖所示，金屬基部支持座3〇由孔部31、光傳送路 40、及光調變機構42構成。孔部31係藉由使燈之金屬基部 15 21之突出部23進入而將燈保持於光源裝置之部分。光調變 機構42係因應於燈之安裝狀態，用以調變來自檢測用光源 ® 之光之機構。所謂調變光係意指使來自檢測用光源之光反 射、使光不反射（非反射）、改變光之反射量（包含散亂）、及 改變反射光之特性（改變光之波長分布）。所謂光調變機構， 20係使來自檢測用光源之光反射、不反射、改變反射量、或 者改變反射光之頻譜特性之機構。由於係因應於燈之安 裝’光調變部移動成與光傳送路40之端面40C相對面，因此 光源裝置可檢測燈之安裝狀態。 參照第7圖說明光調變機構。光調變機構42係由開關孔 17 1362679 部接收光調變部124所調變之光，光源裝置可僅測出燈之安 裝狀態。燈檢測裝置可藉由光調變機構之可動銷被推入之 量來檢測如燈是否已安裝、燈是否未安裝完全或燈是否正 確安裝該等之任一種安裝狀態。 5 如上所述，本發明之實施例4中，由於光源裝置係將可 變更與光傳送路之端面相對面之光調變部之光調變機構設 置於金屬基部支持座，因此可檢測金屬基部之安裝狀態。 【實施例5】 • 本發明之實施例5係一種設置於金屬基部之圓筒部端 10 面之凸部進入金屬基部支持座之光調變機構，並且在因應 於凸部之長度之光調變部進行光調變之光源裝置。 第8圖係在本發明之實施例5之光源裝置中，連接光傳 送路之金屬基部支持座之光調變機構之部分放大縱截面 圖。第8(A)圖係顯示未安裝有燈之狀態者。第8(B)圖係顯示 15 安裝有無凸部之金屬基部之燈之狀態者。圖8(C)係顯示安 裝有具有凸部之金屬基部之燈之狀態者。 • 如第8(A)圖所示，當燈之金屬基部未安裝於金屬基部 支持座時，由於光調變機構無推入，因此可動銷44由金屬 基部支持座之端面32突出。光傳送路之端面40C呈開放狀 • 20 態，且來自燈檢測裝置之檢測用光源之光照射於開關孔46 / 之内部且散亂。因此，燈檢測裝置之受光部未受光，故光 源裝置可檢測出未安裝有燈。 如第8(B)圖所示，當具有於圓筒部之端面22無凸部之 金屬基部之燈安裝於金屬基部支持座時，光調變機構之可 19 動銷44會推入到金屬基部支持座端面^。此時，由於光 迗路之端面4〇c與光調變部Du相對面，因此光照射到光 調變。P224A ’並且燈檢測裝置之受光部接受由光調變部^ 軸調變之光。藉此，光源裝置檢測出安裝了端面平坦(無凸 5 4)之燈。因此’判斷為安裝了無法在光源裝置使用之不適20 ''' δ° ~ 煲Use a material that has the property of totally reflecting white light, and when the detection light source emits white light to the light modulation section, it will remain strong in white light~ Light receiving department. When the light modulation unit 24 uses a material having a light modulation characteristic that can change the white light to the main color light, the white light from the detection light source is combined with the main color light and sent to the light receiving unit. When the light modulation unit 24 uses a material that can scatter and absorb white light, even if it is detected from the white light of the light source, the light is not emitted to the light modulation unit. Will be transmitted to the light receiving section. In this case, when the light is mounted, the totally reflected light is transmitted to the light receiving unit as described above. In the third embodiment of the present invention, the central Μ, % 裴 裴 system is constituted as a mistake. The lamp is detected by the modulating portion of the light-modulating portion provided at the metal base, and the type of the lamp can be detected as well as 16 1362679, and the lamp not suitable for the light source device can be prevented from being installed. [Embodiment 4] Embodiment 4 of the present invention is a light source device in which a light-adjusting portion is provided as a movable pin that moves when a metal base portion is fitted to a metal base portion. Fig. 6 is a longitudinal sectional view showing a state in which a lamp is mounted on a metal base support provided with a light modulation mechanism in a light source device according to a fourth embodiment of the present invention. Figure 7 is a partially enlarged longitudinal cross-sectional view of the optical modulation mechanism ® of the metal base support of the optical transmission path. In Figs. 6 and 7, the movable pin 44 is provided with a pin of a metal base support which is attached with a light modulation portion and is operated by a metal base. The spring portion 45 is a magazine that pushes the movable pin out. The switch hole 46 is a hole through which the movable pin can move. The other basic constitution is the same as that of the embodiment. As shown in Fig. 6, the metal base support 3 is composed of a hole portion 31, an optical transmission path 40, and a light modulation mechanism 42. The hole portion 31 holds the lamp in a portion of the light source device by entering the protruding portion 23 of the metal base portion 15 21 of the lamp. The light modulation mechanism 42 is a mechanism for modulating the light from the detection light source ® in response to the mounting state of the lamp. The modulated light system means that the light from the light source for detection is reflected, the light is not reflected (non-reflective), the amount of reflection of the light is changed (including scattering), and the characteristic of the reflected light is changed (the wavelength distribution of the light is changed). The optical modulation mechanism is a mechanism that reflects light from a light source for detection, does not reflect light, changes the amount of reflection, or changes the spectral characteristics of the reflected light. Since the light-modulating portion is moved to face the end surface 40C of the light-transmitting path 40 in response to the mounting of the lamp, the light source device can detect the mounted state of the lamp. The light modulation mechanism will be described with reference to Fig. 7. The light modulation mechanism 42 receives the light modulated by the light modulation unit 124 from the switch hole 17 1362679, and the light source device can measure only the installation state of the lamp. The lamp detecting device can detect any one of the mounting states such as whether the lamp is installed, whether the lamp is not fully installed, or whether the lamp is properly mounted, by the amount of the movable pin of the light modulation mechanism being pushed in. As described above, in the fourth embodiment of the present invention, since the light source device is provided with the light modulation mechanism that can change the light modulation portion opposite to the end surface of the light transmission path to the metal base support, the metal base can be detected. Installation status. [Embodiment 5] Embodiment 5 of the present invention is a light modulation mechanism provided in a convex portion of a cylindrical portion end 10 of a metal base into a metal base support, and is adjusted in accordance with the length of the convex portion. The variable part is a light source device that performs light modulation. Fig. 8 is a partially enlarged longitudinal sectional view showing a light modulation mechanism for connecting a metal base support of a light transmission path in a light source device according to a fifth embodiment of the present invention. Fig. 8(A) shows the state in which the lamp is not mounted. Fig. 8(B) shows the state of the lamp in which the metal base of the convex portion is attached. Fig. 8(C) shows the state in which the lamp having the metal base of the projection is mounted. • As shown in Fig. 8(A), when the metal base of the lamp is not attached to the metal base support, since the light modulation mechanism is not pushed in, the movable pin 44 protrudes from the end surface 32 of the metal base support. The end surface 40C of the optical transmission path is in an open state, and the light from the detection light source of the lamp detecting device is irradiated inside the switching hole 46 / and is scattered. Therefore, since the light receiving portion of the lamp detecting device is not received by the light, the light source device can detect that the lamp is not mounted. As shown in Fig. 8(B), when a lamp having a metal base having no convex portion on the end surface 22 of the cylindrical portion is attached to the metal base support, the movable pin 44 of the optical modulation mechanism is pushed into the metal base. Support seat end ^. At this time, since the end face 4〇c of the optical path is opposite to the optical modulation portion Du, the light is irradiated to the light modulation. P224A' and the light receiving unit of the lamp detecting device receive the light modulated by the optical modulation unit. Thereby, the light source device detects that the lamp having the flat end surface (no convexity 5 4) is mounted. Therefore, it is judged that the discomfort that cannot be used in the light source device is installed.
如第8(C)®所#具有凸抑之金屬基獅安裝於 金屬基部支持座30時，光調變機構之可動銷44被凸物由 金屬基部支持座端面32推入到内部。當光調變機構之可動 H)銷推入到光調變機構之孔部内部時，光傳送路之端面卿 會與光調變部224B相對面。光會照射於光調變部224b，且 由燈檢測裝置之受光部接收由光調變部224B調變之光。藉 此，光源裝置可檢測燈之安裝狀態. g 當光調變機構之可動銷更推入内部時，光傳送路之山 15When the metal lion with the convexity of the 8th (C)®# is mounted on the metal base support 30, the movable pin 44 of the light modulation mechanism is pushed into the interior by the metal base support end face 32. When the movable H) pin of the light modulation mechanism is pushed into the hole portion of the light modulation mechanism, the end face of the light transmission path is opposed to the light modulation portion 224B. The light is irradiated onto the light modulation unit 224b, and the light modulated by the light modulation unit 224B is received by the light receiving unit of the lamp detecting device. Therefore, the light source device can detect the installation state of the lamp. g When the movable pin of the light modulation mechanism is pushed into the interior, the mountain of the light transmission path 15
20 面40C會與可動銷44相對面。光會照射於可動銷 端 及反射 因應於可動銷44之光調變特性之光。藉此，可檢測出安裝 了無法使用之種類之燈β當凸部25未完全將光調變機 可動銷44推入時，光傳送路之端面4〇c會與光調變部 及光調變部224B兩方相對面。光會照射於光調變部與 光調變部224B兩方。此時，光源裝置判斷為燈的安穿狀熊 可藉由光調變機構之可動銷被推入之量，來檢、則如产 是否安裝、燈是否安裝不完全、是否安裝了不同種類之柊二 或是否有正確安裝正確種類之燈等燈的安裝狀熊一 〜、一者。 20 1362679 特別是，可就可能弄錯安裝之某種種類的燈，依每一種燈 的極性改變凸部之設計方式、或者變更凸部之高度或外 形。如此，可使不適合光源裝置之燈或有不適當安裝狀態 之燈無法亮燈。又，可警告作業者有不適合之燈或燈的極 • 5 性或種類有誤。 如上所述，本發明之實施例5中，光源裝置係構成為於 金屬基部之圓筒部端面設置凸部，且凸部可進入金屬基部 支持座之光調變機構，因此可檢測出適合之燈已安裝。 10 【産業上之可利用性】 本發明之光源裝置適合作為可簡單且正確地檢測與凹 面鏡組合，進行半導體或液晶基板等之曝光之短弧型放電 燈之安裝狀態之光源裝置。也適於作為可簡單且正確地檢 出其他燈之安裝狀態之光源裝置。 15 【圖式簡單說明：！ • 第1圖係顯示在本發明之實施例1之光源裝置中，介由 金屬基部將燈安裝於連接有光學式燈檢測裝置之金屬基部 支持座之狀態。 - 20 第2(A)、（B)圖係顯示在本發明之實施例1之光源裝 置，於連接有光學式燈檢測裝置之金屬基部支持座安裝金 ' 屬基部之狀態之縱截面圖。 第3圖係顯示在本發明之實施例1之光源裝置之光學檢 測方法之流程圖。 21 第4圖係顯示在本發明之實施例2之光源裝置中，於具 有凹部之金屬基部支持座安裝具有凸部之金屬基部之狀離 之縱截面圖。 第5圖係顯示在本發明之實施例3之光源裝置中，介由 金屬基部於軸有光學式燈制裝置之金屬基部支持座安 裝燈之狀態圖。 第6圖係顯示在本發明之實施例4之光源裝置中，介由 金屬基部於具有連接於光學式燈檢測裝置之光調變部之金 屬基部支持座安裝燈之狀態圖。 第7(A)、（B)圖係有關於本發明之實施形態4之光源裝 置之光調變機構之機構之概念圖。 第8(A)-(C)圖係有關於本發明之實施形態5之光源裝置 之光調變機構之機構之概念圖。 【主要元件符號說明】 1.··陽極 2··.陰極 3··.内部引線棒 《.·金屬箔 5···填封管部 7·..外部引線棒 8.. .銀織 9.. .發光部 10···燈泡 20…金屬基部 21.. .圓筒部 22.. .端面 23.. .突出部 24, 42, 124, 224A, 224B...光調變 部 25. ··凸部 30…金屬基部支持座 31…孔部 22 1362679 32,40AA，40BB, 40C··.端面 35.. .凹部 40,40A，40B...光傳送路 41.. .燈檢測裝置 41A...檢測用光源 41B...受光部 44.. .可動銷 46.. .開關孔The 20 face 40C will be opposite the movable pin 44. The light is incident on the movable pin end and reflects the light depending on the light modulation characteristics of the movable pin 44. Thereby, it is possible to detect that the lamp β of the type that cannot be used is mounted. When the convex portion 25 does not completely push the optical actuator movable pin 44, the end face 4〇c of the optical transmission path and the light modulation portion and the light adjustment The variable portion 224B is opposite to each other. The light is applied to both the light modulation portion and the light modulation portion 224B. At this time, the light source device determines that the wearable bear of the light can be inspected by the movable pin of the light modulation mechanism, and whether the product is installed, whether the lamp is incompletely installed, or whether a different type is installed.柊Second or whether there is a correct installation of the correct type of lights, such as the installation of the bear one ~, one. 20 1362679 In particular, it is possible to change the design of the convex portion or to change the height or shape of the convex portion depending on the polarity of each of the lamps of a certain type that may be mistakenly mounted. Thus, a lamp that is not suitable for the light source device or a lamp that is improperly mounted can be turned off. In addition, the operator can be warned that there is an error in the polarity or type of the lamp or lamp that is not suitable. As described above, in the fifth embodiment of the present invention, the light source device is configured such that a convex portion is provided on the end surface of the cylindrical portion of the metal base portion, and the convex portion can enter the light modulation mechanism of the metal base support seat, so that it can be detected that it is suitable. The light is installed. [Industrial Applicability] The light source device of the present invention is suitable as a light source device in which a short arc type discharge lamp which is combined with a concave mirror and which is exposed to a semiconductor or a liquid crystal substrate can be easily and accurately detected. It is also suitable as a light source device that can easily and correctly detect the mounting state of other lamps. 15 [Simple diagram:! Fig. 1 is a view showing a state in which a lamp is attached to a metal base support to which an optical lamp detecting device is connected via a metal base in the light source device according to the first embodiment of the present invention. - 20 (A) and (B) are longitudinal cross-sectional views showing a state in which a metal base portion of a metal base support to which an optical lamp detecting device is attached is attached to a light source device according to Embodiment 1 of the present invention. Fig. 3 is a flow chart showing an optical detecting method of the light source device of Embodiment 1 of the present invention. Fig. 4 is a longitudinal cross-sectional view showing a state in which a metal base having a convex portion is attached to a metal base support having a concave portion in the light source device according to the second embodiment of the present invention. Fig. 5 is a view showing a state in which a metal base support lamp is mounted on a metal base portion of a light-emitting device in a light source device according to a third embodiment of the present invention. Fig. 6 is a view showing a state in which a lamp is mounted on a metal base support having a light-receiving portion connected to an optical lamp detecting device in a light source device according to a fourth embodiment of the present invention. The seventh (A) and (B) drawings are conceptual diagrams of the mechanism of the light modulation mechanism of the light source device according to the fourth embodiment of the present invention. Fig. 8(A)-(C) is a conceptual diagram showing a mechanism of a light modulation mechanism of a light source device according to Embodiment 5 of the present invention. [Explanation of main component symbols] 1.··Anode 2··.Cathode 3··.Internal lead bar “.·Metal foil 5···Cleaning tube part 7·..External lead bar 8...Silver 9 .. Light-emitting part 10··· bulb 20... metal base 21.. cylindrical part 22.. end face 23.. protrusion 24, 42, 124, 224A, 224B... light modulation part 25. · convex portion 30... metal base support seat 31... hole portion 22 1362679 32, 40AA, 40BB, 40C · · end face 35.. recess 40, 40A, 40B... light transmission path 41.. lamp detection device 41A...detecting light source 41B...light receiving portion 44.. movable pin 46.. switch hole
23twenty three