200816256 九、發明說明： t ffr Λ ^ 發明領域 本發明係有關於一種光源裝置，特別是有關於一種可 5 檢測燈之金屬基部安裝於金屬基部支持座之狀態之光源裝 置。 發明背景 • 在半導體或液晶基板等之曝光用光照射裝置中，係使 10 用短弧型放電燈與凹面鏡組合之光學系統，以有效率地利 用放射光。例如，該構成係於中央部具有開口之凹面鏡安 裝有短弧型放電燈者。點光源之燈與凹面鏡組合使用時， 可在旋轉楕圓體鏡將光集中在1點，並可在放物面鏡為平行 光’因此可廣為利用（參照專利文獻1)。要得到此種特性， 15 必須將短弧型放電燈之亮點正確地置於凹面鏡的焦點。當 安裝規袼不同之燈且亮燈時，短弧型放電燈之亮點的位置 • 會偏離凹面鏡的焦點，無法得到所期望的光學性能。不僅 如此，還會有因為在過輸入電力狀態下亮燈而放電燈破裂 之情況。 ‘ 20 因此，使用一種方法是在燈的金屬基部與光源裝置之 ， 金屬基部支持座相對之位置設置凹凸，藉由使該凹凸的位 置關係依燈的種類而不同，以防止無法使用之燈在光源裝 置梵燈（參照專利文獻2)。藉由該方法，將燈安裝於光源裝 置之作業者若確認金屬基部與金屬基部支持座之凹凸未嵌 5 200816256 合’則可知道是不適合之燈安裝於光源裝置。 本申請人在日本專利公開公報特願2006-100000中，提 出一發明係於金屬基部支持座設置用以讀取顯示於金屬基 部之燈•資料之讀取裝置。可自動判斷安裝於光源裝置之 5燈是否為適合之燈，若為適合之燈，則進行燈之使用狀態 及使用記錄的管理。 【專利文獻1】日本專利公開公報特開2001-135134 【專利文獻2】實全昭59-181576號公報 【專利文獻3】日本專利公開公報特願2〇〇6_1〇〇〇〇〇說 10 明書 【明内容j 發明概要 15 20 、 写知之光源裝置有以下的問題。在將燈資訊傳 達到光源裝置之方法巾，由於放電燈在亮料金屬基部支 2座為间溫狀態，因此必須使用耐高溫性之讀取裝置、或 7 ^造後雜之讀取裝置。又，燈在亮燈時、特別是亮燈 汗始0守’金屬基部支持座為高電壓狀態，因此讀取部與金 ^部支持座之_電絕緣必須要確實。如此構成之讀取 :置相當高價，且長期使用下來，讀取裝置要維持正常動 對也=難U卩使在金屬基部及金屬基部支持座之相 燈之伴又置凹凸’也會有在凹凸未完全後合之狀態下也亮 :裂^況。®此，當在過輸人電力狀態下亮燈，放電燈會 本發明之目 的係欲解決上述習知之問題，簡單且正確 6 200816256 地檢測出燈座安裝於光源裝置之安裝狀態。 .為解決上述課題，本發明中，光源裝置係構成為包含 有·燈，係具有-金屬基部者，該金屬基部係可機械性地 保持構成用以放射光之發光部之燈泡，且可供給電力者·， 1 5金屬基部支持座，係經由前述金屬基部而保持前述燈者； 、 及燈檢測機構，係利用光檢測前述金屬基部已安裝到前述 金屬基部支持座之狀態。更具有一依據燈檢測機構之輸出 ^ 來控制燈之亮燈•不亮燈之控制機構。燈檢測機構具有·· 檢測用光源；光傳送路，係用以將來自前述檢測用光源之 10光導向前述金屬基部者；及受光部，係用以感測來自前述 檢測用光源之光因前述金屬基部之存在而產生變化的情況 者。 金屬基部支持座更具有··可動銷，係受前述金屬基部 t且了動作者，光调變部，係設置於前述可動銷，並且 田别述金屬基部安裝於前述金屬基部支持座時，用以調變 • 來自11述檢測用光源之光者。可動銷具有複數光調變部， 4複數光調變部係可因應於前述金屬基部的種類，而改變 來自可述檢測用光源之光照射之部分。金屬基部與前述金 • 屬基部支持座具有一凹凸部，可使兩者之抵接部互相嵌 20合。光傳送路係光纖。 藉由上述構成，可以低價且可長期穩定地檢測燈安裝 於光源裝置之安裝狀態。 I實施冷式】 較佳實施例之詳細說明 7 200816256 以下，苓照第1圖〜第8圖詳細說明實施本發明之最佳 形態。 【實施例1】 本卷月之貝鉍例1係藉由光為透過或被隔絕之狀態，來 檢測燈之金屬基部安胁金屬基部it持紅狀態之光源裝 置。 10 15 20 弟1圖係顯示在本發明之實施例1中之光源農置，燈安 衣於’、有光傳送路之金屬基部支持座之狀態之外觀圖。第 2(A)圖係具有光傳送路之金屬基部支持座之縱截面圖。第 ()圖係n光傳送路之金屬基部支持座安I燈之金屬 基部之狀態之縱截面圖。第i圖與第2圖中，陽極丨為正_ 之電極。陰極2為負_之電極。内部引轉3係支撐電極 蝴生連接之構件。金屬箔彻以電性連接内部引線棒斑 2引線棒之構件。填封管部5偏輯封使 放 電空間與外部隔絕之部分。外部引線棒7係用以電性連接= 屬基部與金㈣之構件。轉8係以機械式將 外 部引線棒電性連接之構件。 叫與外 發光部9係藉由電極間之放電而發光之 係由發光部與填封管部構成之燈管。金屬基部^H 械式地保持燈管與用以電 _係用以機 基部之大徑部。端面22= 圓筒部21為金屬 部23為金屬基部之小圓筒部的端部。突出 J仫邛。金屬基部支持座3〇 保持金屬基部且連接之構件。孔部 式地 突出部進μ金以部料座之㈣。光料 8 200816256BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light source device, and more particularly to a light source device in which a metal base of a lamp can be mounted to a metal base support. Background of the Invention In an exposure light irradiation device such as a semiconductor or a liquid crystal substrate, an optical system in which a short arc type discharge lamp and a concave mirror are combined is used to efficiently utilize the emitted light. For example, the configuration is such that a concave mirror having an opening at the center is provided with a short arc type discharge lamp. When a point light source is used in combination with a concave mirror, the light can be concentrated at one point in the rotary dome mirror and can be used as a parallel light in the discharge mirror. Therefore, it can be widely used (refer to Patent Document 1). To achieve this characteristic, 15 the highlight of the short arc discharge lamp must be correctly placed in the focus of the concave mirror. When a different lamp is installed and lit, the position of the bright spot of the short arc discharge lamp • will deviate from the focus of the concave mirror and the desired optical performance will not be obtained. Not only that, but also because the discharge lamp is broken due to lighting in the state of input power. Therefore, in one method, unevenness is provided at a position opposite to the metal base support at the metal base of the lamp and the light source device, and the positional relationship of the unevenness is different depending on the type of the lamp to prevent the unusable lamp from being Light source device Brahma lamp (refer to Patent Document 2). According to this method, the operator who mounts the lamp to the light source device can confirm that the unsuitable lamp is attached to the light source device if it is confirmed that the metal base portion and the metal base support block are not embedded. In the Japanese Patent Laid-Open Publication No. 2006-100000, the present invention proposes an invention in which a metal base support is provided for reading a lamp/data display device displayed on a metal base. It can automatically judge whether the 5 lamps installed in the light source device are suitable lamps, and if it is a suitable lamp, manage the use state of the lamps and the usage record. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2001-135134 [Patent Document 2] Japanese Patent Laid-Open Publication No. Hei 59-181576 (Patent Document 3) Japanese Patent Publication No. 2〇〇6_1〇〇〇〇〇 Book [Ming Content j Summary of Invention 15 20] The light source device of the writing has the following problems. In the method of transferring the lamp information to the light source device, since the discharge lamp is in a temperature state in the base of the bright metal base, it is necessary to use a high temperature reading device or a reading device. In addition, when the lamp is turned on, especially when the light is on, the metal base support is in a high voltage state, so the electrical insulation of the reading portion and the gold support must be confirmed. The reading of this configuration: the price is quite high, and the long-term use, the reading device should maintain the normal movement pair = also difficult to make the metal lamp and the base of the metal base support seat and the concave and convex 'will also be in The bump is also bright when it is not completely closed: the crack condition. ® This, when lighting in the state of over-consumption power, the purpose of the present invention is to solve the above-mentioned problems, and it is simple and correct to detect the installation state of the lamp holder mounted on the light source device. In order to solve the above problems, in the present invention, the light source device is configured to include a lamp having a metal base, and the metal base can mechanically hold a bulb constituting a light-emitting portion for emitting light, and can be supplied. The electric power supplier, the 1 5 metal base support holder holds the lamp through the metal base portion, and the lamp detecting mechanism detects the state in which the metal base portion is attached to the metal base support seat by light. It also has a control unit that controls the lighting of the lamp according to the output of the lamp detecting mechanism. The lamp detecting mechanism includes a light source for detecting; the light transmitting path is for guiding the light from the detecting light source to the metal base; and the light receiving unit is configured to sense the light from the detecting light source due to the A change in the presence of a metal base. The metal base support further includes a movable pin, and is attached to the movable base by the metal base t and the light-modulating portion, and the metal base of the field is attached to the metal base support. Modulation • From the light of the 11 detection source. The movable pin has a plurality of optical modulation sections, and the plurality of optical modulation sections can change the portion of the light irradiated from the detection light source depending on the type of the metal base. The metal base and the gold base support have a concavo-convex portion, and the abutting portions of the two can be fitted to each other. Optical transmission path is an optical fiber. According to the above configuration, it is possible to stably detect the mounting state of the lamp mounted on the light source device at a low cost and for a long period of time. I implement the cold type. Detailed Description of the Preferred Embodiments 7 200816256 Hereinafter, the best mode for carrying out the invention will be described in detail with reference to Figs. 1 to 8 . [Embodiment 1] Example 1 of the present month is a light source device in which the metal base portion of the lamp is held in a red state by a state in which light is transmitted or isolated. 10 15 20 FIG. 1 is an external view showing a state in which the light source is placed in the embodiment 1 of the present invention, and the lamp is mounted on the metal base support of the optical transmission path. Fig. 2(A) is a longitudinal sectional view of a metal base support having an optical transmission path. The () figure is a longitudinal cross-sectional view showing the state of the metal base of the metal base of the n-light transmission path. In the first and second figures, the anode 丨 is the positive electrode. Cathode 2 is a negative electrode. Internally diverting the 3 series support electrode. The metal foil is electrically connected to the inner lead rod spot 2 member of the lead rod. The sealing tube portion 5 biases the portion of the discharge space from the outside. The outer lead bar 7 is used for electrically connecting the member of the base and the gold (four). The 8 series is a mechanically connected member for electrically connecting the outer lead bars. The external light-emitting portion 9 is a light-emitting unit composed of a light-emitting portion and a sealing tube portion, which emit light by discharge between electrodes. The metal base mechanically holds the tube and the large diameter portion for the base of the machine. End surface 22 = The cylindrical portion 21 is an end portion of the small cylindrical portion where the metal portion 23 is a metal base portion. Highlight J仫邛. The metal base support 3 is a member that holds the metal base and is connected. The hole-shaped protrusion is inserted into the gold (4). Light material 8 200816256
ι〇棒7且填封成氣密狀之填封管部5。又 〜吻他i及陰極2、支持 内部引線棒3、外部引線 勺部引線棒3與外部引線 又’金屬基部2〇固定於 兩端之填封管部5。金屬基部2〇由固定於填封管部5之圓筒 部2卜及連設於圓筒部21之突出部23構成。金屬基部支持 座30固定於光源裝置。檢測用錢41A與受光部4ib構成之 燈檢測裝置41係經由光傳送路4〇而連接於金屬基部2〇。 15 如第2圖所示，設有通過金屬基部支持座30之第一光傳 送路40A。於該光傳送路4G之其中—端面連接有檢測用光源 41A。另一端面40AA朝金屬基部支持座3〇之孔部31開放。 設有通過金屬基部支持座3〇之第二光傳送路4〇B,使其中一 端面40BB與端面40AA對向。另一端則與受光部41B連接。 20兩光傳送路40A、40B宜為光傳送良好且電絶緣性良好之光 纖，但亦可為玻璃棒。往光傳送路放射光之燈檢測裝置之 檢測用光源41A為LED (lignt-emitting diode)等。檢測用 光源41A使用單色光(如紅色）之LED，以便於不會和燈光等 之外部光混淆。又，由檢測用光源41A發出之光可為一定之 9 200816256 單色光，但亦可為複數色之光或脈衝狀之光，以防止與外 部光混淆。 接著說明如上述所構成之本發明之實施例k光源裝 置的機能與動作。首先，參照第丨圖說明光源裝置之機能的 5概要。使金屬基部20之突出部23嵌合於金屬基部支持座3〇 之孔部31，並在光源裝置保持燈。來自檢測用光源41A之光 會通過光傳送路40A到達金屬基部支持座3〇之孔部31。若金 屬基部支持座30未安裝金屬基部2〇，則光會通過光傳送路 40B而到達受光部41B。受光部41B將來自光傳送路之光變 10換成電氣彳5號。右金屬基部支持座30安裝有金屬基部2〇， 由於光不會到達受光部41B，因此可檢測出金屬基部支持座 30女裝有金屬基部20。當受光部41B受到燈之高能量之光的 照射時，受光性能會劣化。因此，可藉由於光傳送路使用 光纖專’隔絕外部光進入受光部41B，防止受光部41B的劣 15化。又，防止成為干擾之外部光，並可更精確地進行檢測。 其次’參照第2圖說明金屬基部之檢測方法。如第2(a) 圖所示，若金屬基部支持座30未安裝金屬基部2〇，則來自 燈檢測裝置之檢測用光源41A之光會傳過光傳送路4〇a，由 端面40AA放射到金屬基部支持座3〇之孔部31内。藉由光通 20過金屬基部支持座30之孔部31的空間，由端面40BB入設於 光傳送路40B，引導至燈檢測裝置之受光部41B。藉由在受 光部41B檢測光，可測知金屬基部20未安裝。 如第2(B)圖所示，若金屬基部支持座3〇安裝有金屬基 部20，由於金屬基部20之突出部23會進入金屬基部支持座 200816256 30之孔部31的空間，因此經由光傳送路40A傳導之光會被金 屬基部20之突出部23遮擔而不入射到光傳送路4〇B。如此， 可藉由受光部41B未檢測到光而測知到燈之金屬基部20有 安裝於光源裝置之金屬基部支持座30。又，藉由作成僅在 . 5金屬基部20有確實地安裝於金屬基部支持座3〇之狀態（金 屬基部20之圓筒部21之端面22抵接於金屬基部支持座3〇端 面之狀態）時，光不會被金屬基部20之突出部23遮擋之構 成，可檢測到金屬基部20確實安裝於金屬基部支持座3〇之 鲁 狀態。如此，金屬基部20之突出部23具有將入射之光調變 10 之光調變機構之作用。此種情況之調變係指隔絕來自檢測 用光源之光或使光通過。 其次，參照第3圖說明檢測燈之安裝狀態，並判斷可否 亮燈之方法。 (A)當光源裝置為燈之交換待機狀態時，根據來自系統 15 部之輸出信號，來自燈檢測裝置之檢測用光源41A之光會經 由光傳送路40A而傳送到金屬基部支持座30。光由光傳送路 肇 40A之端面40AA照射到金屬基部支持座30之孔部31内。若 燈未安裝於光源裝置，則會通過金屬基部支持座30之孔部 31的空間，而由端面40BB入射到光傳送路4〇B，傳導至受 ， 20 光部41B。藉由受光部41B之光感測器，光會變換成電氣信 〜 號。另一方面，若燈安裝於光源裝置，由於金屬基部20之 突出部23會進入金屬基部支持座30之孔部31的空間，因此 經由光傳送路40A傳導之光會被金屬基部2〇之突出部23遮 擋而不入射於光傳送路40B，不會有由受光部41B顯示檢測 11 200816256 到光之電氣信號。 (B)來自受光部40B之輸出會輸入到系統部，系統部藉 有無來自受光部40B之光檢測信號，判斷燈可否亮燈。若由 燈檢測裝置之檢測用光源41A發出複數色之光或脈衝狀之 5 光，則在系統部比較由系統部往檢測用光源41A送出之輸出 信號、與來自受光部41B之輸入信號，藉此可排除外部之干 擾光所致之輸入信號而防止錯誤動作。The 〇 bar 7 is filled and sealed into a hermetic tube portion 5. Further, the kisser and the cathode 2 are supported, and the inner lead bar 3, the outer lead, the scoop lead rod 3, and the outer lead, and the metal base 2, are fixed to the sealed tube portion 5 at both ends. The metal base portion 2 is composed of a cylindrical portion 2 fixed to the sealing tube portion 5 and a protruding portion 23 connected to the cylindrical portion 21. The metal base support 30 is fixed to the light source unit. The lamp detecting device 41 composed of the detecting money 41A and the light receiving portion 4ib is connected to the metal base portion 2 via the optical transmission path 4A. As shown in Fig. 2, a first light transmission path 40A that passes through the metal base support base 30 is provided. A detection light source 41A is connected to the end surface of the optical transmission path 4G. The other end face 40AA is opened toward the hole portion 31 of the metal base support seat 3'. A second optical transmission path 4B through the metal base support 3 is provided such that one of the end faces 40BB faces the end face 40AA. The other end is connected to the light receiving unit 41B. The two optical transmission paths 40A and 40B are preferably optical fibers having good light transmission and good electrical insulation, but may be glass rods. The detection light source 41A to the light transmission path light detecting device is an LED (lignt-emitting diode) or the like. The detecting light source 41A uses an LED of a monochromatic light (e.g., red) so as not to be confused with external light such as a light. Further, the light emitted from the detecting light source 41A may be a certain amount of 9 200816256 monochromatic light, but may be a plurality of colors of light or pulsed light to prevent confusion with external light. Next, the function and operation of the light source device of the embodiment of the present invention constructed as described above will be described. First, an outline of the function of the light source device will be described with reference to the drawings. The protruding portion 23 of the metal base portion 20 is fitted to the hole portion 31 of the metal base supporting seat 3'', and the light source device holds the lamp. The light from the detecting light source 41A passes through the light transmitting path 40A to reach the hole portion 31 of the metal base supporting seat 3A. If the metal base 2 is not attached to the metal base support 30, the light passes through the optical transmission path 40B and reaches the light receiving portion 41B. The light receiving unit 41B changes the light from the light transmission path to electric number 5. The right metal base support base 30 is mounted with the metal base portion 2, and since the light does not reach the light receiving portion 41B, it is possible to detect that the metal base support base 30 has a metal base portion 20. When the light receiving portion 41B is irradiated with light of high energy of the lamp, the light receiving performance is deteriorated. Therefore, it is possible to prevent the light receiving portion 41B from being inferior by using the optical fiber to block the external light from entering the light receiving portion 41B. Moreover, it is prevented from being an external light that interferes, and detection can be performed more accurately. Next, the method of detecting the metal base will be described with reference to Fig. 2 . As shown in Fig. 2(a), if the metal base 2 is not attached to the metal base support 30, the light from the detection light source 41A of the lamp detecting device passes through the optical transmission path 4A, and is radiated from the end face 40AA. The metal base supports the inside of the hole portion 31 of the seat 3 . The light passage 20 passes through the space of the hole portion 31 of the metal base support base 30, and is guided by the end surface 40BB to the light transmission path 40B, and guided to the light receiving portion 41B of the lamp detecting device. By detecting the light in the light receiving portion 41B, it can be detected that the metal base portion 20 is not mounted. As shown in FIG. 2(B), if the metal base portion 20 is mounted with the metal base portion 20, since the protruding portion 23 of the metal base portion 20 enters the space of the hole portion 31 of the metal base support holder 200816256 30, it is transmitted via light. The light conducted by the path 40A is shielded by the protruding portion 23 of the metal base 20 without being incident on the light transmitting path 4B. Thus, the light-receiving portion 41B detects that the metal base portion 20 of the lamp is attached to the metal base support base 30 of the light source device. Further, the metal base portion 20 is reliably attached to the metal base support 3 (only the end surface 22 of the cylindrical portion 21 of the metal base 20 abuts against the end surface of the metal base support 3). At this time, the light is not blocked by the protruding portion 23 of the metal base portion 20, and it can be detected that the metal base portion 20 is surely attached to the metal base supporting seat. Thus, the protruding portion 23 of the metal base 20 functions as a light modulation mechanism that modulates the incident light by 10. Modulation in this case means isolating or passing light from a source for detection. Next, a method of detecting the mounting state of the lamp and determining whether or not the lamp can be turned on will be described with reference to Fig. 3. (A) When the light source device is in the standby state of the lamp exchange, the light from the detection light source 41A of the lamp detecting device is transmitted to the metal base support base 30 via the optical transmission path 40A based on the output signal from the system 15 portion. The light is irradiated into the hole portion 31 of the metal base support base 30 by the end surface 40AA of the light transmission path 肇 40A. When the lamp is not attached to the light source device, it passes through the space of the hole portion 31 of the metal base supporting seat 30, and enters the light transmitting path 4B through the end surface 40BB, and is conducted to the receiving portion 20 of the light portion 41B. The light is converted into an electrical signal by the light sensor of the light receiving portion 41B. On the other hand, if the lamp is attached to the light source device, since the protruding portion 23 of the metal base portion 20 enters the space of the hole portion 31 of the metal base supporting seat 30, the light transmitted through the optical transmitting path 40A is protruded by the metal base portion 2 The portion 23 is shielded from being incident on the optical transmission path 40B, and the electrical signal of the detection 11 200816256 to light is not displayed by the light receiving portion 41B. (B) The output from the light receiving unit 40B is input to the system unit, and the system unit determines whether or not the lamp can be turned on by the light detecting signal from the light receiving unit 40B. When the detection light source 41A of the lamp detecting device emits light of a plurality of colors or pulses, the system unit compares the output signal sent from the system unit to the detecting light source 41A and the input signal from the light receiving unit 41B. This eliminates input signals from external disturbance light and prevents malfunction.
10 1510 15
20 (C)若藉由無來自受光部40B之光檢測信號，且也確認 了光源裝置之其他安全(例如，光源裝置之門非為打開之狀 態等），而系統部判斷為可使燈亮燈時，則顯示•動作部可 允許燈之亮燈，並且可為自動亮燈或由作業者亮燈。當有 來自受光部40B之光檢測信號，並且系統部判斷不可使燈亮 燈時，則會強制使燈不可紐，或者對作㈣發出警告\ 防止在不適當之狀態下使燈亮燈。 金屬基部支持座3〇與燈檢測裝置之檢測用光源似斑 受光部4職在光傳送路連接。藉將光傳送路充分地延伸， 可將由檢測職源41A或受光部41B構成之燈檢測裝置置 於隔離燈亮燈時之高溫環境或高能源之光(也包含紫外線 或紅外線)等環境。即使金屬基部支持座3G為高溫狀態或高 電壓狀態，光㈣置也不會受郎響，因此可正確地進行 光之接收《。因此’則可不需要如耐高溫性且耐高電壓 性之高價位的燈檢測裝置、⑽冷卻燈檢測裝置之裝置。 又，由於可防止熱等造成燈檢料置之劣化，因此可長期 維持信賴性且檢測出燈之金屬基部已安裝於光源裝置之金 12 200816256 屬基部支持座之狀態。 如上所述，本發明之實施例丨中，係將光源裝置作為可 藉由光為透過或被隔絕來檢測燈之金屬基部安裝於金屬基 部支持座之狀態，因此可簡單、容易且確實地檢測燈之安 ^ 5 裝狀態。 【實施例2】 本發明之實施例2係在燈之金屬基部與光源裝置之金 屬基部支持座之間相對之位置設置凹凸，且使其凹凸位置 • 關依燈之種類而有所不同之光源裝置。 10 第4圖係顯示在本發明之實施例2之光源裝置，於具有 凹部之金屬基部支持座安裝具有凸部之金屬基部之狀態之 縱截面圖。第4圖中，凸部25係設置於金屬基部之端面者。 端面32係金屬基部支持座之金屬基部側之端面。凹部35係 設置於金屬基部支持座之金屬基部側之端面者。其他之基 15 本構成則與實施例1相同。 如第4圖所示，在金屬基部20之圓筒部21之端面22具有 # 凸部25。金屬基部支持座30之端面32具有凹部35。由於金 屬基部20之凸部25未進入金屬基部支持座3〇之凹部35，因 此金屬基部20之凸部25抵接於金屬基部支持座30之端面 . 20 32。圓筒部21之端面22與金屬基部支持座30之端面32未抵 接。因此，燈未正確地安裝於光源裝置。 相對於此，當燈正確地安裝於光源裝置時，藉由金屬 基部20之凸部25進入金屬基部支持座30之凹部35，圓筒部 21之端面22與金屬基部支持座30之端面32抵接。藉由構成 13 200816256 為僅在金屬基部20之圓筒部21的端面22抵接金屬基部支持 座30之端面32之狀態下會遮擋光，可檢測出金屬基部2〇確 貝地女裝於金屬基部支持座30之狀態，可防止在不適當之 安裝狀態下之亮燈。又，當安裝無法使用於光源裝置之燈 5時，由於凹凸不會嵌合，因此可防止不適合之燈的亮燈。 此例中，係於金屬基部側設置凸部，於金屬基部支持 座側設置凹部，但亦可於金屬基部側設置凹部，於金屬基 部支持座侧設置凸部。又，亦可設置複數之凹部或凸部， 或設置外形相異之凸部或凹部，或者其等之組合。 10 如上所述，本發明之實施例2中，由於光源裝置係構成 為於燈之金屬基部與光源裝置之金屬基部支持座之相對位 置設置凹凸，且其凹凸之位置關係依燈之種類而異，因此 可檢測出安裝了不適合之燈的情況，可防止不適合之燈亮 燈。 15【實施例3】 本發明之實施例3係一種藉由經設置於金屬基部之光 調變部所調變之光，檢測燈之安裝之光源裝置。 第5圖係顯示在本發明之實施例3之光源裝置中，於具 有光傳送路之金屬基部支持座安裝有具有光調變部之金屬 2〇基部之狀態之縱截面圖。第5圖中，光調變部24係用以反射 光之構件。其他基本構成與實施例1相同。 如第5圖所示，金屬基部20之突出部23設有光調變部 24光傳送路40僅設置—個於金屬基部支持座30。光傳送 路40之其中一端係與燈檢測裝置之檢測用光源41 a與受光 14 200816256 »Μ1Β連接。光傳送路4Q之另—端朝金屬基部支持座之孔 部31内開放。 、，在此，所謂光進行調變係意指反射來自檢測用光源之 光、不反射光(非反射）、改變光之反射量（包含散亂）、及 5將反射光之特性改變為入射光(改變光之波長分布）。而且， 所謂的光調變部，係指使來自檢測用光源之光反射、使之 不反射、改變反射量或改變反射光之頻譜特性之部分。亦 可為發出螢光之光調變部。受光部4m作為具有對應於光調 變方法之檢測能力之光感測器。 1〇 冑燈安裝於光源裝置’使金屬基部支持座30之端面與 金屬基部20之圓筒部21之端面η抵接時，金屬基部2〇之突 出部23與光調變部24對光具有不同之調變特性，因此，受 先部仙可根據經由光傳送路仙傳來之光，檢測紐相對於 金屬基部支持座30安裝在哪—圓周方向之方位上安裝。 15 當光調變部24與光傳送路40之端面相對時，由^由燈 仏測裝置之檢測用光源41A送出之光會照射於光調變部 24,因此經光調變部24所調變之光係由受光部41B接收。當 光調變部24未與光傳送路40之端面相對時，由燈檢測裝^ 之檢測用光源41A送出之光會照射於光調變部以以外之突 20出部23,因此由突出部23所調變之光會送出到燈檢測裝置 之受光部41B。如上所述，由於受光部可因應於接收之 光，來檢測是光調變部24或突出部23之任一者與光傳送路 4〇之端面對面，因此也可判斷燈之圓周方向的方位。 對此，當金屬基部20未安裝於金屬基部支持座時， 15 200816256 來自檢測用光源41A之光會傳過光傳送路4〇，放射於金屬基 部支持座30之孔部31。放置於金屬基部支持座3〇之孔部31 内之光在孔部31内會散亂，因此光無法送到受光部41 b。藉 匕光源I置可檢測到未安裝有燈。亦可藉由接收在孔部 5 31調變之光，來檢測出燈未安裝於光源裝置。 其次，說明實施例3之變形例。若於金屬基部全體使用 光反射率高且耐熱性與導電性良好之材質，可藉由僅令光 調變部24為光反射率低之材質，成為一耐熱性與導電性良 好之金屬基部。又，藉由設置光之調變特性可依燈之種類 10而異之光調變部，也可檢測燈的種類。當金屬基部之材質 與光調變部之材質相同時，會接收因應於金屬基部之材質 之光反射特性所調變之光。光源裝置以受光部產生電氣= 號而判斷為燈有正常安裝。 w 在此，顯示光調變之例。當光調變部24使用具有可將 15白色光全反射之特性之材質，並在檢測用光源發出白色光 ^射到光調變部時，會保持在白色光之狀態下送返受光 部:當光調變部24使用具有可將白色光調變為青色光之光 調變特性之材質時，來自檢測用光源之白色光會調變為青 色光而送到受光部。當光調變部24使用具有可使白色光^ 2〇 且吸收之特性之材質時，即使來自檢_錢之白色L 照=光調變部，光也*會傳制受光邹。在此種情況下， 未安裝燈時’經全反射之光會傳送到受光部。 #如上所述，在本發明之實施例3中，光源裝置係構成為 糟由設置於金屬基部之光調變部所調變之光來檢測橙，因 16 200816256 此也可檢測出燈的種類，並可防止安裝不適於光源裝置之 燈。 【實施例4】 本發明之實施例4係於當金屬基部後合於金屬基部支 5 持座時會移動之可動銷設置光調變部之光源裝置。 第6圖係顯示在本發明之實施例4之光源裝置中，於設 有光調變機構之金屬基部支持座安裝有燈之狀態之縱截面 圖。第7圖係連接光傳送路之金屬基部支持座之光調變機構 之部分放大縱截面圖。第6圖與第7圖中，可動銷44係設置 10於金屬基部支持座之銷，其安裝有光調變部，並藉由金屬 基部而動作。彈簧部45係將可動銷推出之彈簧。開關孔46 係供可動銷可動作之孔。其他基本構成與實施例1相同。 如第6圖所示，金屬基部支持座3〇由孔部31、光傳送路 40、及光調變機構42構成。孔部31係藉由使燈之金屬基部 15 21之突出部23進入而將燈保持於光源裝置之部分。光調變 機構42係因應於燈之安裝狀態，用以調變來自檢測用光源 之光之機構。所謂調變光係意指使來自檢測用光源之光反 射、使光不反射（非反射）、改變光之反射量（包含散亂）、及 改欠反射光之特性（改變光之波長分布）。所謂光調變機構， 20係使來自檢測用光源之光反射、不反射、改變反射量、或 者改k反射光之頻譜特性之機構。由於係因應於燈之安 裝，光調變部移動成與光傳送路4〇之端面4〇c相對面，因此 光源裝置可檢測燈之安裝狀態。 參知、第7圖說明光調變機構。光調變機構42係由開關孔 17 20081625620 (C) If there is no light detection signal from the light receiving unit 40B, and other safety of the light source device is also confirmed (for example, the door of the light source device is not turned on, etc.), the system unit determines that the light is on. When the lamp is on, the display • action section allows the light to be lit, and can be automatically lit or illuminated by the operator. When there is a light detecting signal from the light receiving portion 40B, and the system portion judges that the light is not turned on, it will forcibly cause the light to be turned on, or warn (4) to prevent the light from being turned on in an inappropriate state. The metal base support 3 is similar to the detection light source of the lamp detecting device. The light receiving unit 4 is connected to the optical transmission path. By sufficiently extending the optical transmission path, the lamp detecting device composed of the detecting source 41A or the light receiving portion 41B can be placed in an environment such as a high-temperature environment when the lamp is turned on or a high-energy light (including ultraviolet rays or infrared rays). Even if the metal base support 3G is in a high temperature state or a high voltage state, the light (four) is not subject to a loud sound, so that light reception can be performed correctly. Therefore, it is possible to eliminate the need for a high-quality lamp detection device that is resistant to high temperature and high voltage, and (10) a device for cooling the lamp detection device. Further, since the deterioration of the lamp inspection material can be prevented by heat or the like, it is possible to maintain the reliability for a long period of time and detect that the metal base of the lamp is mounted on the light source device, and the state is a base support. As described above, in the embodiment of the present invention, the light source device is mounted on the metal base support as a metal base that can be detected by light to be transmitted or isolated, and thus can be easily, easily and reliably detected. Lamp safety ^ 5 installed state. [Embodiment 2] In the second embodiment of the present invention, the concave and convex portions are provided at positions opposite to each other between the metal base of the lamp and the metal base support of the light source device, and the concave and convex positions are made different depending on the type of the lamp. Device. Fig. 4 is a longitudinal cross-sectional view showing a state in which a light source device according to a second embodiment of the present invention is mounted on a metal base support having a concave portion and a metal base having a convex portion is attached. In Fig. 4, the convex portion 25 is provided on the end surface of the metal base. The end face 32 is an end face on the metal base side of the metal base support. The recess 35 is provided on the end surface of the metal base support on the metal base side. Other bases 15 This configuration is the same as that of the first embodiment. As shown in Fig. 4, the end surface 22 of the cylindrical portion 21 of the metal base portion 20 has a # convex portion 25. The end face 32 of the metal base support seat 30 has a recess 35. Since the convex portion 25 of the metal base 20 does not enter the concave portion 35 of the metal base support 3, the convex portion 25 of the metal base 20 abuts against the end surface of the metal base support 30. The end surface 22 of the cylindrical portion 21 is not in contact with the end surface 32 of the metal base support seat 30. Therefore, the lamp is not properly mounted to the light source device. On the other hand, when the lamp is correctly mounted on the light source device, the convex portion 25 of the metal base portion 20 enters the concave portion 35 of the metal base support seat 30, and the end surface 22 of the cylindrical portion 21 abuts against the end surface 32 of the metal base support seat 30. Pick up. By constituting 13 200816256, only when the end surface 22 of the cylindrical portion 21 of the metal base portion 20 abuts against the end surface 32 of the metal base support seat 30, the light can be blocked, and the metal base portion 2 can be detected. The state of the base support seat 30 prevents illumination in an improperly mounted state. Further, when the lamp 5 which cannot be used for the light source device is mounted, since the unevenness is not fitted, the lighting of the unsuitable lamp can be prevented. In this example, a convex portion is provided on the metal base side, and a concave portion is provided on the metal base support side. However, a concave portion may be provided on the metal base side, and a convex portion may be provided on the metal base support side. Further, a plurality of concave portions or convex portions may be provided, or convex portions or concave portions having different shapes may be provided, or a combination thereof. As described above, in the second embodiment of the present invention, the light source device is configured such that irregularities are provided at the relative positions of the metal base of the lamp and the metal base support of the light source device, and the positional relationship of the unevenness varies depending on the type of the lamp. Therefore, it is possible to detect that an unsuitable lamp is installed, and it is possible to prevent an unsuitable lamp from being lit. [Embodiment 3] Embodiment 3 of the present invention is a light source device for detecting the mounting of a lamp by light modulated by a light modulation portion provided at a metal base. Fig. 5 is a longitudinal cross-sectional view showing a state in which a metal base support having a light-modulating portion is attached to a metal base support having an optical transmission path in the light source device according to the third embodiment of the present invention. In Fig. 5, the light modulation portion 24 is a member for reflecting light. The other basic configuration is the same as that of the first embodiment. As shown in Fig. 5, the protruding portion 23 of the metal base portion 20 is provided with a light modulation portion. 24 The optical transmission path 40 is provided only for the metal base support portion 30. One end of the optical transmission path 40 is connected to the detection light source 41a of the lamp detecting device and the light receiving light 14 200816256 »Μ1Β. The other end of the optical transmission path 4Q is open to the inside of the hole portion 31 of the metal base support. Here, the term "modulation of light" means reflecting light from a source for detection, not reflecting light (non-reflection), changing the amount of reflection of light (including scattering), and changing the characteristic of reflected light to incident. Light (changes the wavelength distribution of light). Further, the optical modulation unit refers to a portion that reflects light from the detection light source, does not reflect it, changes the amount of reflection, or changes the spectral characteristics of the reflected light. It can also be a fluorescent light modulation unit. The light receiving portion 4m serves as a photosensor having a detection capability corresponding to the light modulation method. When the xenon lamp is attached to the light source device 'the end surface of the metal base support 30 abuts against the end surface η of the cylindrical portion 21 of the metal base portion 20, the protruding portion 23 of the metal base portion 2 and the light modulation portion 24 have light for the light. Different modulation characteristics, therefore, according to the light transmitted through the light transmission path, the detection button is mounted with respect to the circumferential direction of the metal base support 30. When the light modulation portion 24 faces the end surface of the light transmission path 40, the light emitted from the detection light source 41A of the lamp detecting device is irradiated to the light modulation portion 24, and thus is modulated by the light modulation portion 24. The changed light is received by the light receiving unit 41B. When the light modulation portion 24 is not opposed to the end surface of the light transmission path 40, the light emitted from the detection light source 41A of the lamp detecting device is irradiated to the light output portion other than the light output portion 23, so that the protruding portion is formed. The 23 modulated light is sent to the light receiving portion 41B of the lamp detecting device. As described above, since the light receiving unit can detect that either the light modulation unit 24 or the protruding portion 23 is opposite to the end surface of the light transmission path 4, the light receiving unit can determine the orientation of the circumferential direction of the lamp. . On the other hand, when the metal base 20 is not attached to the metal base support, the light from the detection light source 41A passes through the optical transmission path 4A and is radiated to the hole portion 31 of the metal base support 30. The light placed in the hole portion 31 of the metal base support 3 is scattered in the hole portion 31, so that light cannot be sent to the light receiving portion 41b. By using the light source I, it is detected that no light is installed. It is also possible to detect that the lamp is not mounted to the light source device by receiving the light modulated in the hole portion 53. Next, a modification of the third embodiment will be described. When a material having a high light reflectance and excellent heat resistance and conductivity is used for the entire metal base, the light-modulating portion 24 can be made of a material having a low light reflectance and a metal base having excellent heat resistance and conductivity. Further, by setting the modulation characteristic of the light, the light modulation portion can be different depending on the type of the lamp 10, and the type of the lamp can be detected. When the material of the metal base is the same as the material of the light-modulating portion, light that is modulated by the light reflection characteristics of the material of the metal base is received. The light source device determines that the lamp has a normal mounting by generating an electric=number by the light receiving portion. w Here, an example of light modulation is displayed. When the light modulation unit 24 uses a material having a characteristic of totally reflecting 15 white light, and when the detection light source emits white light to the light modulation unit, it is returned to the light receiving unit while being held in white light: When the light modulation unit 24 uses a material having a light modulation characteristic that can change white light to cyan light, the white light from the detection light source is modulated into cyan light and sent to the light receiving unit. When the light modulation unit 24 uses a material having a characteristic that the white light can be absorbed and absorbed, even if it is from the white light of the inspection, the light is transmitted to the light. In this case, when the lamp is not mounted, the total reflected light is transmitted to the light receiving portion. # As described above, in the third embodiment of the present invention, the light source device is configured to detect orange by the light modulated by the light modulation portion provided at the metal base portion, and the type of the lamp can be detected by 16 200816256. And can prevent the installation of lamps that are not suitable for the light source device. [Embodiment 4] Embodiment 4 of the present invention is a light source device in which a movable portion of a movable portion which is moved when a metal base portion is joined to a metal base portion 5 to hold a light-receiving portion. Fig. 6 is a longitudinal sectional view showing a state in which a lamp is mounted on a metal base support provided with a light modulation mechanism in a light source device according to a fourth embodiment of the present invention. Fig. 7 is a partially enlarged longitudinal sectional view showing a light modulation mechanism for connecting a metal base support of an optical transmission path. In Figs. 6 and 7, the movable pin 44 is provided with a pin of a metal base support which is attached with a light modulation portion and is operated by a metal base. The spring portion 45 is a spring that pushes the movable pin out. The switch hole 46 is a hole through which the movable pin can move. The other basic configuration is the same as that of the first embodiment. As shown in Fig. 6, the metal base support 3 is composed of a hole portion 31, an optical transmission path 40, and a light modulation mechanism 42. The hole portion 31 holds the lamp in a portion of the light source device by entering the protruding portion 23 of the metal base portion 15 21 of the lamp. The light modulation mechanism 42 is a mechanism for modulating the light from the detection light source in response to the mounting state of the lamp. The modulated light system means that the light from the light source for detection is reflected, the light is not reflected (non-reflective), the amount of reflection of the light is changed (including scattering), and the characteristic of the reflected light is changed (the wavelength distribution of the light is changed). The optical modulation mechanism is a mechanism for reflecting light from a light source for detection, not reflecting, changing the amount of reflection, or changing the spectral characteristics of light reflected by k. Since the light modulation portion is moved to face the end surface 4〇c of the light transmission path 4〇 in response to the mounting of the lamp, the light source device can detect the mounted state of the lamp. For details, Figure 7 illustrates the light modulation mechanism. The light modulation mechanism 42 is composed of a switch hole 17 200816256
46、彈簧部45與可動銷44及光調變部124構成。彈簧部幻之 柒固疋於開關孔46之底部。在另一端可施力使可動銷44 由▲屬基部支持座之端面推出。可動銷44為圓柱狀，且進 =圓筒狀之開關孔46。當金屬基部支持座未安裝有金屬基 P 4可動銷44之一部份由金屬基部支持座之端面义推 出。田金屬基部支持座安裝有金屬基部時，藉由金屬基部 之圓筒部的端面22 ’可動銷44會被推人開關孔46的内部。 由於光調變部124與可域44連接設置，目此會與可動銷連 動，因應於可動銷之推入量來動作。 光。周ft:機構因應於可動銷44之推入量，而改變與光傳 达路之端面44C相對面之光調變部。藉由改變往燈檢測裝置 又光4送出之光’光源裝置可檢測出燈之安裝狀態。也 就是說，可使光調變機構具有作為—種光開關之作用。 ^第7(·所示，燈之金屬基部未安裝於金屬基部支 15持座時’由於沒有光調變機構的推入，因此可動銷由金 j基=p支持座之端面32突出。光傳送路之端面概呈開放狀 〜且來自燈檢測裂置之光會丨照射到開關孔46之内部而散 亂。^此，就算燈檢測裝置之受光部未受光或者僅散亂光 °又光。P ’仍可藉由文光部之輸出而判斷出非為規定量 2〇之反射光’藉此光源裝置可檢測出未安裝燈。46. The spring portion 45 is composed of a movable pin 44 and a light modulation portion 124. The spring portion is shackled to the bottom of the switch hole 46. At the other end, a force can be applied to push the movable pin 44 out of the end face of the ▲ base base. The movable pin 44 has a cylindrical shape and enters a cylindrical switch hole 46. When the metal base support is not mounted with a metal base P 4, a portion of the movable pin 44 is pushed out from the end face of the metal base support. When the metal base support is mounted with the metal base, the movable pin 44 is pushed into the interior of the switch hole 46 by the end face 22' of the cylindrical portion of the metal base. Since the optical modulation unit 124 is connected to the field 44, it is intended to operate in conjunction with the movable pin and in response to the amount of pushing of the movable pin. Light. Week ft: The mechanism changes the light modulation portion opposite to the end surface 44C of the light transmission path in response to the pushing amount of the movable pin 44. By changing the light sent to the lamp detecting device and the light 4, the light source device can detect the mounting state of the lamp. That is to say, the optical modulation mechanism can be made to function as an optical switch. ^7 (·When the base of the metal of the lamp is not attached to the base of the metal base 15), the movable pin is protruded from the end face 32 of the gold support base by the absence of the light modulation mechanism. The end surface of the transmission path is generally open-shaped, and the light from the lamp detection splicing is scattered inside the switch hole 46 and scattered. Thus, even if the light-receiving portion of the lamp detecting device is not received by light or only scattered light is light P' can still determine the reflected light that is not a predetermined amount by the output of the light portion, and the light source device can detect that the lamp is not mounted.
第7⑻圖所不’當燈之金屬基部安裝於金屬基杳 ^座時’轴Μ構之可_44會推人到金屬基部支类 &面32。此時，由於光傳送路端面40C與光調變部124木 面，因此藉域Μ於糊” 124，且燈檢齡置之S 18 200816256 部接收光調變部m所調變之光，光源袭置可僅測出燈 裝狀態。燈檢測褒置可藉由光調變機構之可動銷被推入之 量來檢測如燈是否已安裝、燈是否未安裝完全或燈是否正 確安裝該等之任一種安裝狀態。 5 如上所述’本發明之實施例4中，由於光源裝置係將可 變更與光傳送路之端面相對面之光調變部之光調變機構設 置於金屬基部支持座，因此可檢測金屬基部之安裝狀態。X 【實施例5】 “ 本發明之實施例5係一種設置於金屬基部之圓筒部端 10面之凸部進入金屬基部支持座之光調變機構，並且在因應 於凸部之長度之光調變部進行光調變之光源裝置。 第8圖係在本發明之實施例5之光源裝置中，連接光傳 送路之金屬基部支持座之光調變機構之部分放大縱截面 圖。第8(A)圖係顯示未安裝有燈之狀態者。第8(B)圖係顯示 15安裝有無凸部之金屬基部之燈之狀態者。圖8(C)係顯示安 裝有具有凸部之金屬基部之燈之狀態者。 如第8(A)圖所示，當燈之金屬基部未安裝於金屬基部 支持座時，由於光調變機構無推入，因此可動銷44由金屬 基部支持座之端面32突出。光傳送路之端面40C呈開放狀 2〇恶’且來自燈檢測裝置之檢測用光源之光照射於開關孔％ 之内部且散亂。因此，燈檢測裝置之受光部未受光，故光 源裝置可檢測出未安裝有燈。 如第8(B)圖所示，當具有於圓筒部之端面22無凸部之 金屬基部之燈安裝於金屬基部支持座時，光調變機構之可 19 200816256 動銷44會推入到金屬基部支持座端面32。此時，由於光傳 送路之端面40C與光調變部224A相對面，因此光照射到光 調變部224A ’並且燈檢測裝置之受光部接受由光調變部22 轴調變之光。藉此，光源裝置檢測出安裝了端面平坦(無凸 5部)之燈。因此，判斷為安裝了無法在光源裝置使用之不適 合之燈。 如第8(C)圖所示，當具有凸部25之金屬基部2〇安裝於 金屬基部支持座30時，光調變機構之可動銷44被凸部25由 金屬基部支持座端面32推入到内部。當光調變機構之可動 1〇銷推入到光調變機構之孔部内部時，光傳送路之端面40C 會與光調變部224B相對面。光會照射於光調變部224B，且 由燈檢測裝置之受光部接收由光調變部224]5調變之光。藉 此，光源裝置可檢測燈之安裝狀態。 當光調變機構之可動銷更推入内部時，光傳送路之端 15面40C會與可動銷44相對面。光會照射於可動銷44,且反射 因應於可動銷44之光調變特性之光。藉此，可檢測出安裝 了無法使用之種類之燈。當凸部25未完全將光調變機構之 可動銷44推入時，光傳送路之端面4〇c會與光調變部224a 及光調變部224B兩方相對面。光會照射於光調變部224a與 20光調變部224B兩方。此時，光源裝置判斷為燈的安裝狀態 不完全。 可藉由光調變機構之可動銷被推入之量，來檢測如燈 是否安裝、燈是否安裝不完全、是否安裝了不同種類之燈、 或是否有正確安裝正確種類之燈等燈的安裝狀熊任一者。 20 200816256 特別是，可就可能弄錯安裝之某種種類的燈，依每一種燈 的極性改變凸部之設計方式、或者變更凸部之高度或外 形。如此，可使不適合光源裝置之燈或有不適當安裝狀態 之燈無法亮燈。又，可警告作業者有不適合之燈或燈的極 5 性或種類有誤。 如上所述，本發明之實施例5中，光源裝置係構成為於 金屬基部之圓筒部端面設置凸部，且凸部可進入金屬基部 支持座之光調變機構，因此可檢測出適合之燈已安裝。 10【産業上之可利用性】 本發明之光源裝置適合作為可簡單且正確地檢測與凹 面鏡組合，進行半導體或液晶基板等之曝光之短弧型放電 燈之安裝狀態之光源裝置。也適於作為可簡單且正確地檢 出其他燈之安裝狀態之光源裝置。 15 L圖式簡單說明】 # 第1圖係顯示在本發明之實施例1之光源裝置中，介由 金屬基部將燈安裝於連接有光學式燈檢測裝置之金屬基部 支持座之狀態。 • 20 第2(A)、（B)圖係顯示在本發明之實施例1之光源裝 , 置，於連接有光學式燈檢測裝置之金屬基部支持座安裝金 屬基部之狀態之縱截面圖。 第3圖係顯示在本發明之實施例1之光源裝置之光學檢 測方法之流程圖。 21 200816256 第4圖係顯示在本發明之實施例2之光源裝置中，於具 有凹部之金屬基部支持座安裝具有凸部之金屬基部之狀態 之縱截面圖。 第5圖係顯示在本發明之實施例3之光源裝置中，介由 5 金屬基部於連接有光學式燈檢測裝置之金屬基部支持座安 裝燈之狀態圖。 第6圖係顯示在本發明之實施例4之光源裝置中，介由 金屬基部於具有連接於光學式燈檢測裝置之光調變部之金 屬基部支持座安裝燈之狀態圖。 10 第7(A)、（B)圖係有關於本發明之實施形態4之光源裝 置之光調變機構之機構之概念圖。 第8 (A H C )圖係有關於本發明之實施形態5之光源裝置 之光調變機構之機構之概念圖。 【主要元件符號說明】 1…陽極 20…金屬基部 2…陰極 21...圓筒部 3...内部引線棒 22…端面 4...金屬箔 23...突出部 5…填封管部 24, 42, 124, 224Α，224Β.··光調變 7...外部引線棒 部 8…銀堪 25...凸部 9…發光部 30…金屬基部支持座 10...燈泡 31···孔部 22 200816256 32,40AA，40BB，40C··.端面 35…凹部 40,40A，40B"·光傳送路 41…燈檢測裝置 41A...檢測用光源 41B...受光部 44...可動銷Figure 7 (8) does not require the metal base of the lamp to be attached to the metal base. At this time, since the end surface 40C of the light transmission path and the surface of the light modulation portion 124 are wooden, the light is modulated by the light modulation portion m, and the light source is modulated by the S 18 200816256 portion. The detection can only detect the state of the lamp. The lamp detection device can detect whether the lamp is installed, whether the lamp is not fully installed, or whether the lamp is correctly installed by the amount of the movable pin of the light modulation mechanism being pushed. In the fourth embodiment of the present invention, the light source device is provided with a light modulation mechanism that can change the light modulation portion opposite to the end surface of the light transmission path to the metal base support. Therefore, the mounting state of the metal base can be detected. X [Embodiment 5] "The embodiment 5 of the present invention is a light modulation mechanism provided in a convex portion of the cylindrical end 10 of the metal base into the metal base support, and A light source device that performs light modulation in response to a light modulation portion having a length of a convex portion. Fig. 8 is a partially enlarged longitudinal sectional view showing a light modulation mechanism for connecting a metal base support of a light transmission path in a light source device according to a fifth embodiment of the present invention. Fig. 8(A) shows the state in which the lamp is not mounted. Fig. 8(B) shows the state of the lamp in which the metal base of the convex portion is attached. Fig. 8(C) shows the state in which the lamp having the metal base of the projection is mounted. As shown in Fig. 8(A), when the metal base of the lamp is not attached to the metal base support, since the light modulation mechanism is not pushed in, the movable pin 44 protrudes from the end surface 32 of the metal base support. The end surface 40C of the optical transmission path is open and disgusted, and the light from the detection light source of the lamp detecting device is irradiated inside the switching hole % and scattered. Therefore, since the light receiving portion of the lamp detecting device is not received by the light, the light source device can detect that the lamp is not mounted. As shown in Fig. 8(B), when a lamp having a metal base having no convex portion on the end surface 22 of the cylindrical portion is attached to the metal base support, the light-adjusting mechanism can push the metal 44 into the metal. The base supports the end face 32. At this time, since the end surface 40C of the light transmission path faces the light modulation portion 224A, the light is incident on the light modulation portion 224A' and the light receiving portion of the lamp detecting device receives the light modulated by the light modulation portion 22. Thereby, the light source device detects that the lamp having the flat end surface (the five portions without the convex portion) is mounted. Therefore, it is judged that a lamp which is not suitable for use in the light source device is mounted. As shown in FIG. 8(C), when the metal base 2 having the convex portion 25 is attached to the metal base support 30, the movable pin 44 of the light modulation mechanism is pushed by the convex portion 25 from the metal base support end surface 32. To the inside. When the movable pin of the light modulation mechanism is pushed into the hole portion of the light modulation mechanism, the end surface 40C of the light transmission path faces the light modulation portion 224B. The light is irradiated onto the light modulation unit 224B, and the light modulated by the light modulation unit 224]5 is received by the light receiving unit of the lamp detecting device. Thereby, the light source device can detect the installation state of the lamp. When the movable pin of the light modulation mechanism is pushed into the interior, the end face 40C of the light transmitting path is opposite to the movable pin 44. The light is incident on the movable pin 44, and the light reflecting the light modulation characteristic of the movable pin 44 is reflected. By this, it is possible to detect that a lamp of a type that cannot be used is installed. When the convex portion 25 does not completely push the movable pin 44 of the light modulation mechanism, the end surface 4〇c of the light transmission path faces the light modulation portion 224a and the light modulation portion 224B. Light is applied to both of the light modulation unit 224a and the light modulation unit 224B. At this time, the light source device determines that the mounting state of the lamp is incomplete. It can be detected by the amount of the movable pin of the light modulation mechanism to detect whether the lamp is installed, whether the lamp is not installed completely, whether different types of lamps are installed, or whether the lamp of the correct type is properly installed. Any one of the bears. 20 200816256 In particular, it is possible to change the design of the convex portion or to change the height or shape of the convex portion depending on the polarity of each type of lamp, which may be mistakenly mounted. Thus, a lamp that is not suitable for the light source device or a lamp that is improperly mounted can be turned off. In addition, the operator can be warned that there is an error in the polarity or type of the lamp or lamp that is not suitable. As described above, in the fifth embodiment of the present invention, the light source device is configured such that a convex portion is provided on the end surface of the cylindrical portion of the metal base portion, and the convex portion can enter the light modulation mechanism of the metal base support seat, so that it can be detected that it is suitable. The light is installed. [Industrial Applicability] The light source device of the present invention is suitable as a light source device in which a short arc type discharge lamp which is combined with a concave mirror and which is exposed to a semiconductor or a liquid crystal substrate can be easily and accurately detected. It is also suitable as a light source device that can easily and correctly detect the mounting state of other lamps. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a state in which a lamp is attached to a metal base support to which an optical lamp detecting device is connected via a metal base in a light source device according to a first embodiment of the present invention. 20 (A) and (B) are longitudinal cross-sectional views showing a state in which a metal base is attached to a metal base support to which an optical lamp detecting device is attached, in a light source device according to Embodiment 1 of the present invention. Fig. 3 is a flow chart showing an optical detecting method of the light source device of Embodiment 1 of the present invention. 21 200816256 Fig. 4 is a longitudinal cross-sectional view showing a state in which a metal base having a convex portion is attached to a metal base support having a concave portion in the light source device according to the second embodiment of the present invention. Fig. 5 is a view showing a state in which a metal base portion is mounted on a metal base support lamp to which an optical lamp detecting device is connected, in a light source device according to a third embodiment of the present invention. Fig. 6 is a view showing a state in which a lamp is mounted on a metal base support having a light-receiving portion connected to an optical lamp detecting device in a light source device according to a fourth embodiment of the present invention. 10(A) and 7(B) are conceptual diagrams showing a mechanism of a light modulation mechanism of a light source device according to Embodiment 4 of the present invention. The eighth (A H C ) diagram is a conceptual diagram of a mechanism of a light modulation mechanism of a light source device according to Embodiment 5 of the present invention. [Description of main component symbols] 1...anode 20...metal base 2...cathode 21...cylinder section 3...internal lead bar 22...end face 4...metal foil 23...protrusion 5...filling tube 24, 42, 124, 224 Α, 224 Β.·· 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 ··· hole part 22 200816256 32,40AA,40BB,40C··.End face 35...recess 40,40A,40B"·optical transmission path 41...light detection device 41A...detection light source 41B...light receiving unit 44 ...movable
46...開關孔46...switch hole