1358727 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種積體化(integrated)之高密度微型(smau form factor，SFF)光學讀寫頭(optical pickup head，ΟΡΗ)技術，特 別是利用各種微光學元件取代傳統光學讀寫頭内部之光學元 件’進而減少光學讀寫頭之光學元件數量，具有縮小光學讀寫 頭之體積與重量，易於生產與組裝等之特點。本發明並提出一 用於光學項寫頭之新式棱鏡型全像光學元件(prism-type holographic optical element, PT-HOE)設計，可簡化光學系統架 構，使光學讀寫頭大幅積體化。另外，本發明更揭露出特殊之 製程技術’結合微製造與精密切割之方法，可容易地製作出本 發明所提出之新式稜鏡型全像光學元件。故本發明主要之技術 領域涵蓋有光儲存技術、微光機電系統、光學設計與光學元件 製作等相關技術領域。 【先前技術】 光學讀寫頭以半導體雷射二極體(laserdiode，LD)為光源，並 搭配物鏡(objective lens)而使光束聚焦在光碟片資料層上’進 行資料之記錄或讀出的動作。其雷射之波長與物鏡之數值孔徑 (numerical aperture，NA)決定光碟片的容量密度，並且是光碟機 /臾進之重大關鍵。1980年代提出的CD(compactdisk)系統，其 光學讀寫頭採用的是紅外光(780 nm)的雷射二極體，並搭西^ NA為0.45的物鏡’對應的光碟片儲存容量是65〇MB。19% 年起推出的DVD( digital versatile disk)系統，其光學讀寫頭採 用的是紅光(650 nm)的雷射二極體，並搭配NA為〇 6〇的物 鏡，對應的碟片儲存容量是單層單面4.7GB。近年來推出的 BD(blu-ray 出⑻或 ro-DVD(high_density 咖⑸侧. 其光學讀寫頭採用的是藍光(405 nm)的雷射二極體，並搭配 5 ΝΑ為0.85或0.65的物鏡，對應的碟片儲存容量則是單層 面25GB或20GB。由此可知，容量密度之提升是光學& 發展之一重要方向。 ，除Τ谷置之提升外’近年來為因應行動通訊與可攜式資訊戋 /肖費性產品之需求’儲存裝置之發展逐漸朝向體積輕薄短小之 趨勢，其中光碟機之微型化便扮演關鍵之角色，更帶動光學讀 寫頭朝簡單、質輕、體積小、成本低與易於生產的方向發展， 於是積體化光學頭漸漸取代傳統型光學頭，成為光學讀寫頭發 展之另一重要目標。例如美國之Dataplay公司已有用於mp3 撥放器之微型光碟機產出’而日本Sony公司更是推屮以 DVD-R/RW碟片為主之數位攝影機(digital vide〇 camm， DVC)。而在光儲存產品微型化之過程中，光學頭之積體化更 是佔有舉足輕重之關鍵。一般而言，光學讀寫頭之積體化主要 是將傳統型光學頭内重要的光學元件以微光學元件替換，並以 相臨很小且精準的位置距離包裝在同一個封裝當中，或者以積 體化製程技術整合在同一半導體晶片上，構成一個簡單而重要 之光學模組，並提供光學頭發出雷射光及接收訊號之主要來 源。傳統型的光學讀寫頭，因採用各種分離式光學元件，所以 ^寸、體積與重量皆較為龐大，製作價格亦高；為使光學系統 微小化’以微稜鏡(microprism)、微透鏡(micr〇iens)、微反射鏡 ，ciOmirr〇r)或繞射光學元件(diffractive optical dements，DC)E) 等為主之微光學元件逐漸被光學讀寫頭之光學系統所採用，歷 年來已有許多相關技藝紛紛被提出。最早是在美國US4731772 專利公報中揭露出利用全像光學元件取代傳統光學頭内如分 光鏡(beam-splitter)與圓柱透鏡(cylindrical iens)等之光學元 件’並縮短雷射二極體與光彳貞測器(photo-detector)間之距離， 將所有元件壓縮在一個小型化之包裝當中，稱為積體化光學模 組(integrated optical unit，I0U)，此模組具有體積小、重量輕、 價格低與組裝易等優點’並且是光學讀寫頭之核心。請參照「第 1圖」’其圖示為（a)傳統型光學讀寫頭與（ 讀寫頭及光學模組之基本架構比較。從圖中 统二1358727 IX. Description of the Invention: [Technical Field] The present invention relates to an integrated high-density smau form factor (SFF) optical pickup head (ΟΡΗ) technology, in particular The use of various micro-optical components to replace the optical components inside the conventional optical pickup head', thereby reducing the number of optical components of the optical pickup head, has the characteristics of reducing the size and weight of the optical pickup head, and is easy to produce and assemble. The present invention also proposes a novel prism-type holographic optical element (PT-HOE) design for an optical write head, which simplifies the optical system architecture and greatly integrates the optical pickup. Further, the present invention further discloses a special process technology. In combination with microfabrication and precision cutting, the novel holographic holographic optical element proposed by the present invention can be easily fabricated. Therefore, the main technical fields of the present invention cover related technical fields such as optical storage technology, micro-optical electromechanical systems, optical design and optical component fabrication. [Prior Art] The optical head uses a semiconductor laser diode (LD) as a light source, and an objective lens is used to focus the light beam on the optical disc data layer to record or read data. . The wavelength of the laser and the numerical aperture (NA) of the objective lens determine the capacity density of the optical disc and are a major key to the optical disc drive/intrusion. In the CD (compactdisk) system proposed in the 1980s, the optical read/write head uses an infrared light (780 nm) laser diode, and the objective lens with a west NA of 0.45' corresponds to a storage capacity of 65 光. MB. The digital versatile disk system (DVD), which was launched in 19%, uses a red (650 nm) laser diode with an optical lens of NA 〇6〇, corresponding to the disc storage. The capacity is 4.7GB on a single layer and single side. BD (blu-ray out (8) or ro-DVD (high_density coffee (5) side) introduced in recent years. Its optical head uses a blue (405 nm) laser diode with a ΝΑ of 0.85 or 0.65. The objective lens, the corresponding disc storage capacity is a single layer of 25GB or 20GB. It can be seen that the increase in capacity density is an important direction for the development of optical & development, in addition to the promotion of Shibuya, in recent years, in response to the mobile communication With the demand for portable information/portable products, the development of storage devices is gradually moving toward a thin and light volume. The miniaturization of optical disc drives plays a key role, and the optical read/write heads are simpler and lighter. Small size, low cost and easy to produce, the integrated optical head has gradually replaced the traditional optical head, which has become another important target for the development of optical heads. For example, Dataplay has been used in the United States for mp3 players. The micro-disc machine produces 'the Sony company in Japan is pushing the digital video camera (digital vide〇camm, DVC) based on DVD-R/RW discs. In the process of miniaturization of optical storage products, the optical head Integrated body In particular, the integration of optical heads is mainly to replace the important optical components in the traditional optical head with micro-optical components, and package them in small and precise position distances. In the same package, or integrated process technology integrated on the same semiconductor wafer, constitute a simple and important optical module, and provide the main source of optical hair laser light and receive signals. Traditional optical reading and writing Head, because of the use of a variety of separate optical components, so the size, volume and weight are relatively large, the production price is also high; in order to make the optical system miniaturized 'microprism, micro lens (micr〇iens), micro Micro-optical components such as mirrors, ciOmirr〇r) or diffractive optical de- ss (DC) E) are gradually adopted by optical systems of optical heads. Many related techniques have been proposed over the years. . The use of holographic optical elements to replace optical components such as beam-splitters and cylindrical iens in conventional optical heads and shortening laser diodes and apertures was first revealed in US Pat. No. 4,731,772. The distance between the photo-detectors, which compresses all components into a compact package called the integrated optical unit (I0U), which is small and lightweight. The advantages of low price and easy assembly are the core of the optical head. Please refer to "Figure 1". The illustration is (a) comparison between the traditional optical head and the basic structure of the head and optical module.
iilf 16整合多數光學耕以組成了=匕S 離裝當中’或者以積趙化之製程=== +導體4上’以構成—簡單*重要之模組。此積體化光 配以致動11及物鏡11，經賴單的組裝調整即構 成先子讀寫頭，使得光學讀寫頭的輕小化 5ίίίίΐ3使用全像光學耕16碰可以降低 先學兀件之數量以得騎簡之、轉，並且可 參”，、圖」，6提出利用蟲晶、微影與侧等之半 將反射鏡與全像絲元件結合成為反射式 牛 並將㈣元件13與光偵測器17整合在同 -半導體基板上，大幅簡化光學讀寫頭之架構與元件數量，達 成積體化之目的。但是，此架構因具有眾多缺點，製作上有極 難’並無法真正實現。第―’其採料導舰刻之方式 製作斜面反射鏡，在此架構中，其斜面之深度至少需要imm， J斜，面魏^，其光學平整度幾乎無法制絲讀寫頭之規 色一目剛並無任何技術揭露以微影與飾刻的方式將全像 射圖案製作在凹槽斜面上，此專利提出將反射鏡 /、王像光子兀件縴射圖案整合在經蝕刻後之半導體基板的凹 ，斜，上’其可行性甚低。第三，一般雷射元件揉用如嫁碎等 二五族材料之半導體基板，而光制細是制卿為主之半 ，體基板’二者並無法整合直接製作在包含纽射式全像光學 ，件、16a之半導體基板上。第四，由於光學讀寫頭返回光束會 落在光偵湘Π之*光區上，在此專利巾光侧器之受光 區是在基板之側面，一般來說，受光區之面積至少需要邊長為 100 μιη以上之方形面積，故此架構之光偵測器必須具有1〇〇 μιη.]^上厚度之垂直磊晶夾層na，方可提供需要之受光區面 積上這對一般僅數μιη之磊晶夾層厚度的光偵測器製作而言， 相單困難。第五，此專利除將斜面反射鏡與全像光學元件繞射 圖案整合在半導體基板上，另需在上部另製作- Fresnel透鏡 以完成整體積體化光學模組之功能；在同一光學系統中使用兩 個繞^光學元件’會大鱗健體來回絲之實際能量利用效 率。综合上述，JP1303638公報雖提出一簡單之積體化光學讀 寫頭架構，但可行性卻甚低。在其公報内容中， ^困難，並未提出任何之解決方法；其設計概念在實際之實 施應用上，幾乎是無法實現的。 弁in露之f藝是將部分光學元件積體化而組成積體化 ίίϋ 縮小光學讀寫頭體積，但仍無法達成光學 體積體化之目的。於是又有如揭露於美國us67i7893 專^報，請參照「第3圖」，以及發表於IEEE T聰actions 年等以=頁; ㈡=設計架;之缺點 子較1^，組裝過程困難，並且精度亦難掌控。 计，便成為本發明創作之最主要目的。 裝置叹 【發明内容】 基於前述之討論，提高光儲存容餘度與 學讀寫頭之重要發展方向。因此，本發明提出多種 稜像光學元件之高密度微型絲讀寫職計= 冓反= 到提升谷量與簡化光學祕之目的。此反射式稜鏡型全像光學 兀件結合四種功能於-體，其具有—般傳統光學讀寫頭所需的 反射鏡、分光鏡、像差修正元件與伺服訊號產生元件等之功 能，並大幅簡化光學讀寫頭之系統複雜度與組裝方法。 第一種設計架構是採用邊射型雷射二極體(edge emitting laserdiode)，其水平方向射出的雷射光束，在經由反射式稜鏡 型全像光學元件之反射後垂直進入聚焦物鏡，並為聚焦物鏡所 聚焦於光碟片上。由於反射式稜鏡型全像光學元件結合反射棱 鏡與全像光學元件兩者之功能，稜鏡之斜面上製作有反射式繞 射圖案，可對入射光束產生反射與繞射之作用。於去光路時， 僅沒有被繞射之第零繞射階可進入聚焦物鏡^在讀取或寫入光 碟片上資料層之資料後’雷射力束為光碟片所反射，循回光路 穿透聚焦物鏡後到達原稜鏡型全像光學元件，並為此稜鏡型全 像光學元件所反射與繞射。其第一繞射階在反射後入射至另一 反射稜鏡，並為此反射稜鏡所反射後落在光偵測器之受光區 上。由於此架構採用一反射式棱鏡型全像光學元件，其取代了 一般習知架構中之反射稜鏡、透鏡、分光鏡與穿透型全像光學 元件4，減少元件之數量，並使系統大幅簡化，是本發明内容 之主要特點。第二種設計架構是建立在以第一種設計架構為基 礎，但為使雷射光束之極化方向與第一實施例不同，採用一較 小之反射稜鏡以改變雷射出射光束之方向。第三種設計架構採 用面射型雷射二極體(surface emitting laser di〇de)為系統光 源。第四與第五種設計架構則進一步將基板與物鏡承座結合， 分別使用邊射型與面射型雷射二極體作為系統之光源。 此外，本發明亦揭露一結合微製造與精密機械切割兩種技術 之特殊方法，用以製作本發明所提出之反射式稜鏡型全像光學 ，件。此方法提供在微稜鏡之斜面上製作繞射圖案之可能性， 藉由此方法製作出之反射式稜鏡型全像光學元件，可使高密度 積體化光學讀t頭之實現成為具體可行，I本剌Θ容之另一 有關本發明之詳細0容及技術，賊配傾錢明如下： 【實施方式】 凊參照「第5a圖」，其繪示本發明所提出之積體化光學讀 寫系統光路設計架構之第一種實施例。圖中邊射型雷射二極體 13a以水平方向射出的雷射光束，在經由反射式稜鏡型全像光 學元件16b之反射後垂直進入聚焦物鏡u，並為聚焦物鏡u 所聚焦於光碟1G上。由於反射式稜麵全像光學元件16b 結合反射稜鏡21與全像光學元件16兩者之功能，元件斜面上 製作有反射式繞射圖案l6d，可對入射光束產生反射與繞射之 作用。於去光路18a時’僅迓有被繞射之第零繞射階可進入聚 ，物鏡11。在讀取或寫入光碟片1〇上資料層之資料後，雷射 光束為光制所反射’循回光路18b穿透聚焦物鏡u並 原反射式稜鏡型全像光學元件16b，並為此稜鏡型全 件16b所反射與繞射。其第一繞射階在反射後入射至另一反射 棱鏡2卜並為此反射稜鏡21所反射後落在光_裝17夕总The illf 16 integrates most of the optical cultivating to form a module that is 匕 离 离 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = The integrated light is combined with the actuating 11 and the objective lens 11, and the assembly and adjustment of the singular sheet constitutes the syllabic read/write head, so that the optical head is lightened by 5 ίίίί 3 using the holographic optical ploughing 16 touch can reduce the learning element The number can be used to ride the simple, turn, and can be referred to, ",", 6 proposed the use of insect crystal, lithography and side half to combine the mirror with the full-image element into a reflective cow and (four) component 13 Integrating with the photodetector 17 on the same-semiconductor substrate greatly simplifies the structure and component number of the optical pickup, and achieves the purpose of integration. However, this architecture has many drawbacks and it is extremely difficult to manufacture. In the first section, the method of engraving is to make a bevel mirror. In this structure, the depth of the bevel must be at least imm, J oblique, and face Wei. The optical flatness is almost impossible to make the color of the head. At first glance, there is no technology to expose the full-image pattern on the groove slope by means of lithography and embossing. This patent proposes to integrate the mirror/, image-image photo-figure pattern into the etched semiconductor. The concave, oblique, and upper of the substrate is very low in feasibility. Third, the general laser components use semiconductor substrates such as marrying and other two or five materials, and the light thinning is the half of the master, and the bulk substrate can not be integrated directly into the holographic hologram. Optical, member, 16a on the semiconductor substrate. Fourth, since the returning beam of the optical head will fall on the optical zone of the light-detecting area, the light-receiving area of the optical side of the patented towel is on the side of the substrate. Generally, the area of the light-receiving area requires at least a side. It has a square area of more than 100 μm, so the photodetector of this structure must have a vertical epitaxial interlayer na of 1 〇〇μιη.]^, in order to provide the required area of the light receiving area, which is generally only a few μηη In the fabrication of a photodetector with an epitaxial interlayer thickness, it is difficult to make it. Fifth, in addition to integrating the bevel mirror and the holographic optical element diffraction pattern on the semiconductor substrate, the patent also needs to be fabricated on the top - Fresnel lens to complete the function of the whole volume optical module; in the same optical system The use of two winding optics 'there will be the actual energy utilization efficiency of the large and small body. In summary, the JP1303638 publication proposes a simple integrated optical read/write head architecture, but the feasibility is very low. In the content of its bulletin, it is difficult to propose any solution; its design concept is almost impossible to implement in practical application.弁inlu's art is the integration of some optical components to form a compact ίίϋ to reduce the size of the optical head, but still can not achieve the purpose of optical volume. Therefore, it is also disclosed in the US us67i7893 special report, please refer to "3rd picture", and published in IEEE T Cong actions years, etc. = (page) = design frame; the disadvantages are more than 1 ^, the assembly process is difficult, and the accuracy It is also difficult to control. It has become the main purpose of the creation of the present invention. Device sigh [Summary of the Invention] Based on the foregoing discussion, the optical storage tolerance and the important development direction of the learning head are improved. Accordingly, the present invention proposes a high density microfilament read/write job for a variety of prismatic optical elements = 冓 反 = to enhance the amount of grain and to simplify the optical secret. The reflective holographic holographic optical element combines four functions into a body, and has the functions of a mirror, a beam splitter, an aberration correcting element, and a servo signal generating element required for a conventional optical head. And greatly simplify the system complexity and assembly method of the optical head. The first design architecture uses an edge-emitting laser diode, and the horizontally emitted laser beam enters the focusing objective vertically after being reflected by the reflective holographic holographic optical element. Focusing on the disc for focusing the objective. Since the reflective holographic holographic optical element combines the functions of both the reflective prism and the holographic optical element, a reflective diffraction pattern is formed on the slope of the cymbal to reflect and diffract the incident beam. When going to the optical path, only the zeroth diffraction order that is not diffracted can enter the focusing objective lens. ^ After reading or writing the data of the data layer on the optical disc, the laser beam is reflected by the optical disc, and the optical path is penetrated. After focusing the objective lens, it reaches the original holographic holographic optical element, and is reflected and diffracted by the holographic holographic optical element. The first diffraction step is incident on the reflection pupil after reflection, and is reflected by the reflection pupil and falls on the light receiving region of the photodetector. Since this architecture uses a reflective prism-type holographic optical element, which replaces the reflective 稜鏡, lens, beam splitter and penetrating holographic optical element 4 in the conventional architecture, the number of components is reduced, and the system is greatly Simplification is the main feature of the content of the present invention. The second design architecture is based on the first design architecture, but to make the polarization direction of the laser beam different from that of the first embodiment, a smaller reflection 稜鏡 is used to change the direction of the laser exit beam. . The third design architecture uses a surface emitting laser di〇de as the system light source. The fourth and fifth design architectures further combine the substrate with the objective holder, using edge-emitting and surface-emitting laser diodes as the source of the system. In addition, the present invention also discloses a special method combining the two techniques of microfabrication and precision mechanical cutting for fabricating the reflective holographic holographic optics of the present invention. The method provides the possibility of fabricating a diffraction pattern on the slope of the micro-turn, and the reflective holographic holographic optical element produced by the method can realize the realization of the high-density integrated optical read t-head. </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> <RTIgt; A first embodiment of an optical path design architecture for an optical read/write system. The laser beam emitted from the edge-emitting laser diode 13a in the horizontal direction vertically enters the focusing objective u after being reflected by the reflective holographic holographic optical element 16b, and is focused on the optical disk for the focusing objective u. On 1G. Since the reflective prismatic holographic optical element 16b combines the functions of both the reflective yoke 21 and the holographic optical element 16, a reflective diffraction pattern 16d is formed on the element slope to provide reflection and diffraction to the incident beam. When the light path 18a is removed, only the zeroth diffraction order which is diffracted can enter the poly objective lens 11. After reading or writing the data of the data layer on the optical disc 1 , the laser beam is reflected by the light, and the return optical path 18 b penetrates the focusing objective u and the original reflective holographic holographic optical element 16 b is This 稜鏡-type full piece 16b is reflected and diffracted. The first diffraction order is incident on the other reflective prism 2 after reflection and is reflected by the reflection 稜鏡 21 and falls on the light.
于/υπ 种囬上之現射圖案16d可藉由二 optics)技術，將其光學波面处表示成如式 可藉由二元光學(binary 成如式(1)之相位多項式 並經由優化之鞋庠之The illuminating pattern 16d on the υ 种 π back can be represented by the two optics technology, and can be represented by the binary optical (binary into the phase polynomial of the equation (1) and optimized shoes庠之
線 -· / U -X- 光點有適當的形狀，可產生聚焦與循軌控制所需之伺服訊號與 資料讀取之檢出訊號。.、 n、 W=〇 «=〇 V^/ 本實施例之詳細設計架構可進一步參照「第5b圖」與「第5c 圖」，其分別繪示本設計之立體圖與元件分解圖。至於各元件 在，板17b上之配置，請參照「第5d圖」。有關本設計之光 學系統模擬請參照「第如圖」之光路圖，其採用观降雷射 波長為設計參考’對應的聚焦誤差訊號(focus err〇r signal， 模擬則參照「第6b圖」之所謂的S曲線(S-curve)。 另請參照「第7圖」，其繪示本實施例中所揭露的反射式稜 鏡型全像光學元件16b之製程方法。首先經由微影 (photolithography)與钱刻(etching)之製程蔣光罩上重複排列之 全像光學元件的繞射圖案複製於基板材料(例如半導體基板或 玻璃基板)上，並於基板表面鍍製上高反射率之反射層，如「第 7a圖」所示。接下來將基板進行直線切割，切割完後呈現多 根長條狀之直棒，其表面具有多個高反射之繞射圖案，如「第 7b圖」所示。再將每一長條狀之直棒翻轉9〇度，使繞射圖案 呈現在側邊，並將所有直棒貼齊並排，以可洗除之膠著物(如 熔蠟等)將所有直棒固定，如「第7c圖」。經固定後之所有貼 齊的直棒，呈現如切割前之平面基板形狀；最後針對所欲得到 木最終稜鏡外型再做直線切割，切割之方向根據最終稜鏡之傾 斜角度而定，如「第7d圖」。再經去除膠著物之過程，即可 得到如「第7e圖」之反射式稜鏡型全像光學元件16b，其繞 射圖案16d呈現在稜鏡之斜面上。 請參照「第8a圖」’其繪示本眘明所提出之積體化光學讀 寫系統光路設計架構之第二種實施例。其與第一種實施例最主 要之不同處是邊射型雷射二極體13a以水平方向射出的雷射 光束先經由一較小之反射稜鏡21反射後垂直入射至另一較大 之反射稜鏡21，並為其反射後以水平方向入射反射式稜鏡型 1358727 全像光學元件16b 〇經反射式稜鏡型全像光學元件16b反射後 直到最後到達光偵測器17受光區之光路皆與第一實施例同。 此設計架構之目的是在產生與第一實施例互為垂直之出射光 源的極化方向。本實施例之詳細設計架構可進一步參照「第 8b圖」與「第8c圖」，其分別繪示本設計之立體圖與元件分 解圖。' 請參照「第9a圖」，其繪示本發明所提出之積體化光學讀 寫系統光路設計架構之第三種實施例。其與第一種實施例最主 要之不同處是採用面射担.雷射二極體13b取代邊射型雷射二 極體13a，以垂直方向射出的雷射光束直接入射至反射稜鏡 21，並為其反射後以水平方向入射反射式稜鏡型全像光學元件 16b。經反射式稜鏡型全像光學元件1沾反射後直到最後到達 光偵測器17受光區之光路皆與第一實施例同。此設計架構之 目的是在提供以面射型雷射二極體13b為光源之設計參考。本 實施例之詳細設計架構可進一步參照「第％圖」，其繪示本 設計之元件分解圖。 請參照「第10a圖」，其繪示本發明所提出之積體化光學讀 寫系統光路設計架構之第四種實施例。其與第一種實施例最主 要之不同處是將基板17b與物鏡承座1 la結合，將原置放於基 板17b之各元件改成倒向置放於物鏡承座11&上，所有光路與 與第一實施例同。此設計架構之目的是可進一步簡化系統元件 之數量。本實施例之詳細設計架構可進一步參照「第l〇b圖」， 其緣不本設計之元件分解圖0 請參照「第11a圖」，其繪示本發明所提出之積體化光學讀 寫系統光路設計架構之第五種實施例。其與第四種實施例最主 要之不同處是將邊射型雷射二極體13a以面射型雷射二極體 13b替代，垂直射出的雷射光束直接入射至反射稜鏡21，並為 其反射後以水平方向入射反射式稜鏡型全像光學元件l6b。經 反射式稜鏡型全像光學元件16b反射後直到最後到達光偵測 12 丄仰/27 觉光區之光路皆與第四實施例同。此設計架構之 在供以面射型雷射二極體Ub為光源之設計參考。施 架構可進一步參照「第仙圖」，其繪示本設計之 前述五種實施例所列述的元件在基板上之配置，僅提供最佳 ，參考，並不受限於元件之外型變化或與基板之結合方^， =相對位置變化，皆在本發明所揭露之創作所涵蓋的精神之Line -· / U -X- The spot has an appropriate shape to generate the servo signal and data readout signal required for focus and tracking control. , n, W=〇 «=〇 V^/ The detailed design structure of this embodiment can be further referred to "5b" and "5c", which respectively show a perspective view and an exploded view of the design. For the arrangement of each component on the board 17b, please refer to "Fig. 5d". For the optical system simulation of this design, please refer to the optical path diagram of the "picture", which uses the viewing laser wavelength as the design reference 'corresponding focus error signal (focus err〇r signal, the simulation refers to "6b" The so-called S-curve. Please also refer to "Fig. 7", which illustrates the process of the reflective holographic holographic optical element 16b disclosed in this embodiment. First, via photolithography. The diffraction pattern of the holographic optical element repeatedly arranged on the mask of the etching process is reproduced on a substrate material (for example, a semiconductor substrate or a glass substrate), and a reflective layer having a high reflectivity is plated on the surface of the substrate. As shown in Figure 7a, the substrate is then cut in a straight line. After the cutting, there are a number of straight strips with long strips. The surface has a number of highly reflective diffraction patterns, such as Figure 7b. Then, turn each long straight bar to 9 degrees, make the diffraction pattern appear on the side, and put all the straight bars side by side, so that all the glues (such as melted wax) can be washed out. Straight stick fixed, such as "Picture 7c". After fixing All the straight sticks are presented in the shape of a flat substrate before cutting. Finally, the final shape of the wood is cut and then cut in a straight line. The direction of the cutting depends on the tilt angle of the final twist, as shown in Figure 7d. After the process of removing the glue, the reflective hologram-type optical element 16b of "Fig. 7e" is obtained, and the diffraction pattern 16d is presented on the slope of the ridge. Please refer to "8a" 'There is a second embodiment of the optical path design architecture of the integrated optical reading and writing system proposed by Shen Shenming. The main difference from the first embodiment is the edge-emitting type laser diode 13a. The laser beam emitted in the horizontal direction is first reflected by a small reflection 稜鏡21 and then vertically incident to the other larger reflection 稜鏡21, and is reflected by the reflection 后 type 1358727 holographic image in the horizontal direction. The optical path of the optical element 16b after being reflected by the reflective holographic holographic optical element 16b until finally reaching the light receiving area of the photodetector 17 is the same as that of the first embodiment. The purpose of this design is to produce the same as the first embodiment. Vertical light The polarization direction of the source. The detailed design structure of this embodiment can be further referred to "8b" and "8c", which respectively show the perspective view and component exploded view of the design. 'Please refer to "9a". The third embodiment of the optical path design architecture of the integrated optical reading and writing system proposed by the present invention is shown. The main difference from the first embodiment is the replacement of the laser diode 13b. In the edge-emitting type laser diode 13a, the laser beam emitted in the vertical direction is directly incident on the reflection pupil 21, and is reflected by the laser beam, and is incident on the reflection type hologram-type optical element 16b in the horizontal direction. The optical path of the mirror-type holographic optical element 1 after being reflected and reflected until finally reaching the light receiving portion of the photodetector 17 is the same as that of the first embodiment. The purpose of this design architecture is to provide a reference for the design of the surface-emitting laser diode 13b as the light source. The detailed design architecture of this embodiment can be further referred to as "% of the figure", which shows an exploded view of the design of the design. Please refer to "Fig. 10a", which shows a fourth embodiment of the optical path design architecture of the integrated optical reading and writing system proposed by the present invention. The main difference from the first embodiment is that the substrate 17b is combined with the objective lens holder 1 la, and the components originally placed on the substrate 17b are placed in the reverse direction on the objective lens holder 11 & Same as the first embodiment. The purpose of this design architecture is to further simplify the number of system components. For a detailed design of the embodiment, reference may be made to the "Fig. 1b", which is not an exploded view of the design. Please refer to "11a" for the integrated optical reading and writing of the present invention. A fifth embodiment of the system optical path design architecture. The main difference from the fourth embodiment is that the edge-emitting type laser diode 13a is replaced by the surface-emitting laser diode 13b, and the vertically emitted laser beam is directly incident on the reflection 稜鏡 21, and After being reflected, the reflective hologram-type hologram optical element 16b is incident in the horizontal direction. The optical path after being reflected by the reflective holographic holographic optical element 16b until finally reaching the photodetection 12 丄/27 illuminating region is the same as that of the fourth embodiment. This design architecture is based on the design of the surface-emitting laser diode Ub as the light source. The architecture can be further referred to as "the sacred map", which shows the arrangement of the components listed in the foregoing five embodiments of the present design on the substrate, and provides only the best, reference, and is not limited to the external variation of the components. Or the combination with the substrate ^, = relative position change, all in the spirit covered by the creation of the present invention
據本發明之基本精神，徐揭露多種積體化光學讀寫裝置之 設計架構外，更包含反射式棱鏡型全像光學元件之製作&法， 可應用於各型之光碟讀寫系統上，亦不受限使用於何 ^ 存媒體與何種雷射波長之使用上β μ 雖然本發明已以較佳之實施例揭露如上，然其並非用以限定 本發明，任何熟習此技藝者，在不脫離本發明之精神和範圍 内，當可作各種之更動與潤飾，因此本發明之保 附之申請專植者鱗。 ^优俊 .【圖式簡單說明】According to the basic spirit of the present invention, Xu discloses a design structure of a plurality of integrated optical reading and writing devices, and further comprises a method for producing reflective prism type holographic optical components, which can be applied to various types of optical disk reading and writing systems. It is also not limited to the use of the storage medium and the use of the laser wavelength. β μ Although the present invention has been disclosed in the preferred embodiments as above, it is not intended to limit the invention, and anyone skilled in the art is not Without departing from the spirit and scope of the present invention, it is possible to make various changes and retouchings. ^优俊. [Simple diagram]
第la圖為現有習知傳統型光學讀寫頭之光學路徑基本架構。 第lb圖為現有習知積體化光學讀寫頭之光學路徑基本^構。 第2圖為現有習知利用半導體製程技術製作的積體化 組架構。 第3圖為現有習知利用多個反射稜鏡與分光鏡之積體化光學 讀寫頭之光學路徑基本架構。 第4圖為現有習知利用反射稜鏡與全像光學元件之積體化光 學讀寫頭之光學路徑基本架構。。 第5a圖為本發明之積體化光學讀寫系統第一具體實施 架構。 第5b圖為本發明之積體化光學讀寫系統第一具體實施例之立 13 體設計架構。 第5c圖為本發明之積體化光學讀寫系統第一具體實施例之元 件分解圖。 第5d圖為本發明之積體化光學讀寫系統第一具體實施例之基 板上元件配置圖。 第6a圖為本發明之積體化光學讀寫系統第一具體實施例之光 學系統模擬圖。 第6b圖為本發明之積體化光學讀寫系統第一具體實施例之聚 焦誤差訊號模擬圖。 第7圖為本發明所提出之反射式稜鏡型全像光學元件之製作 方法示意圖。 第8a圖為本發明之積體化光學讀寫系統第二具體實施例設計 架構。 第8b圖為本發明之積體化光學讀寫系統第二具體實施例之立 體設計架構。 第8c圖為本發明之積體化光學讀寫系統第二具體實施例之元 件分解圖。 第9a圖為本發明之積體化光學讀寫系統第三且體實施例設計 架構。. ' 第9b圖為本發明之積體化光學讀寫系統第三具體實施例之元 件分解圖。 第l〇a圖為本發明之積體化光學讀寫系統第四且體施例設 計架構。 "， 第l〇b圖為本發明之積體化光學讀寫系統第四具體實施例之 元件分解圖。 第11a圖為本發明之積體化光學讀寫系統第五具體實施例設 計架構。 第lib圖為本發明之積體化光學讀寫系統第五罝體 例之 元件分解圖。 〃The first drawing shows the basic structure of the optical path of the conventional conventional optical reading and writing head. Figure lb is a schematic diagram of the optical path of a conventional integrated optical pickup. Fig. 2 is a conventional integrated group structure fabricated by using semiconductor process technology. Fig. 3 is a schematic diagram showing the basic structure of an optical path of an integrated optical pickup using a plurality of reflectors and beamsplitters. Fig. 4 is a view showing the basic structure of an optical path of an integrated optical pickup using a reflective iridium and a holographic optical element. . Fig. 5a is a first embodiment of the integrated optical reading and writing system of the present invention. Fig. 5b is a perspective view of the first embodiment of the integrated optical reading and writing system of the present invention. Fig. 5c is an exploded view of the first embodiment of the integrated optical reading and writing system of the present invention. Fig. 5d is a diagram showing the arrangement of components on the substrate of the first embodiment of the integrated optical reading and writing system of the present invention. Fig. 6a is a diagram showing the optical system simulation of the first embodiment of the integrated optical reading and writing system of the present invention. Fig. 6b is a simulation diagram of the focus error signal of the first embodiment of the integrated optical reading and writing system of the present invention. Fig. 7 is a schematic view showing the manufacturing method of the reflective holographic holographic optical element proposed by the present invention. Fig. 8a is a diagram showing the design of the second embodiment of the integrated optical reading and writing system of the present invention. Fig. 8b is a perspective view showing the second embodiment of the integrated optical reading and writing system of the present invention. Figure 8c is an exploded view of the second embodiment of the integrated optical reading and writing system of the present invention. Fig. 9a is a third embodiment of the integrated optical reading and writing system of the present invention. Fig. 9b is an exploded view of the third embodiment of the integrated optical reading and writing system of the present invention. The first figure is the fourth and physical design architecture of the integrated optical reading and writing system of the present invention. ", Fig. 1b is an exploded view of the fourth embodiment of the integrated optical reading and writing system of the present invention. Fig. 11a is a fifth embodiment of the design of the integrated optical reading and writing system of the present invention. The lib diagram is an exploded view of the fifth embodiment of the integrated optical reading and writing system of the present invention. 〃