TWI357492B - - Google Patents

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Publication number
TWI357492B
TWI357492B TW97114543A TW97114543A TWI357492B TW I357492 B TWI357492 B TW I357492B TW 97114543 A TW97114543 A TW 97114543A TW 97114543 A TW97114543 A TW 97114543A TW I357492 B TWI357492 B TW I357492B
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TW
Taiwan
Prior art keywords
measuring
light source
image
curvature
amplitude
Prior art date
Application number
TW97114543A
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English (en)
Chinese (zh)
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TW200944749A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to TW97114543A priority Critical patent/TW200944749A/zh
Publication of TW200944749A publication Critical patent/TW200944749A/zh
Application granted granted Critical
Publication of TWI357492B publication Critical patent/TWI357492B/zh

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  • Length Measuring Devices By Optical Means (AREA)
TW97114543A 2008-04-21 2008-04-21 Vertical reflective type moire measurement structure for measuring the surface curvature of an object TW200944749A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW97114543A TW200944749A (en) 2008-04-21 2008-04-21 Vertical reflective type moire measurement structure for measuring the surface curvature of an object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW97114543A TW200944749A (en) 2008-04-21 2008-04-21 Vertical reflective type moire measurement structure for measuring the surface curvature of an object

Publications (2)

Publication Number Publication Date
TW200944749A TW200944749A (en) 2009-11-01
TWI357492B true TWI357492B (ja) 2012-02-01

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ID=44869477

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97114543A TW200944749A (en) 2008-04-21 2008-04-21 Vertical reflective type moire measurement structure for measuring the surface curvature of an object

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TW (1) TW200944749A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9523572B2 (en) 2014-12-12 2016-12-20 Industrial Technology Research Institute Thin-film curvature measurement apparatus and method thereof
US9970880B2 (en) 2016-08-19 2018-05-15 Industrial Technology Research Institute Apparatus for measuring a curvature of a thin film and the method thereof

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI444587B (zh) 2011-08-03 2014-07-11 Nat Univ Tsing Hua 零耗能遙測曲度感測結構及其方法
CN107121095B (zh) * 2017-06-08 2019-10-18 杭州电子科技大学 一种精确测量超大曲率半径的方法及装置
JP7296334B2 (ja) * 2020-03-26 2023-06-22 住友重機械工業株式会社 真直度計測システム、変位センサ校正方法、及び真直度計測方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9523572B2 (en) 2014-12-12 2016-12-20 Industrial Technology Research Institute Thin-film curvature measurement apparatus and method thereof
US9970880B2 (en) 2016-08-19 2018-05-15 Industrial Technology Research Institute Apparatus for measuring a curvature of a thin film and the method thereof

Also Published As

Publication number Publication date
TW200944749A (en) 2009-11-01

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