TWI356912B - Fabrication of a high fill ratio reflective spatia - Google Patents

Fabrication of a high fill ratio reflective spatia Download PDF

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Publication number
TWI356912B
TWI356912B TW93115847A TW93115847A TWI356912B TW I356912 B TWI356912 B TW I356912B TW 93115847 A TW93115847 A TW 93115847A TW 93115847 A TW93115847 A TW 93115847A TW I356912 B TWI356912 B TW I356912B
Authority
TW
Taiwan
Prior art keywords
substrate
hinge
layer
mirror
mirror plate
Prior art date
Application number
TW93115847A
Other languages
English (en)
Chinese (zh)
Other versions
TW200525272A (en
Inventor
Shaoher X Pan
Xiao Yang
Original Assignee
Miradia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miradia Inc filed Critical Miradia Inc
Publication of TW200525272A publication Critical patent/TW200525272A/zh
Application granted granted Critical
Publication of TWI356912B publication Critical patent/TWI356912B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
TW93115847A 2003-06-02 2004-06-02 Fabrication of a high fill ratio reflective spatia TWI356912B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47540403P 2003-06-02 2003-06-02
US61096703A 2003-06-30 2003-06-30

Publications (2)

Publication Number Publication Date
TW200525272A TW200525272A (en) 2005-08-01
TWI356912B true TWI356912B (en) 2012-01-21

Family

ID=33514051

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93115847A TWI356912B (en) 2003-06-02 2004-06-02 Fabrication of a high fill ratio reflective spatia

Country Status (5)

Country Link
EP (1) EP1636629A4 (de)
JP (1) JP2006526806A (de)
KR (1) KR20060016800A (de)
TW (1) TWI356912B (de)
WO (1) WO2004109364A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7483198B2 (en) 2003-02-12 2009-01-27 Texas Instruments Incorporated Micromirror device and method for making the same
CN101084462B (zh) * 2003-10-27 2010-06-02 视频有限公司 高反差空间光调制器和方法
US7113322B2 (en) 2004-06-23 2006-09-26 Reflectivity, Inc Micromirror having offset addressing electrode
US7215459B2 (en) 2004-08-25 2007-05-08 Reflectivity, Inc. Micromirror devices with in-plane deformable hinge
US7119944B2 (en) 2004-08-25 2006-10-10 Reflectivity, Inc. Micromirror device and method for making the same
US7436572B2 (en) 2004-08-25 2008-10-14 Texas Instruments Incorporated Micromirrors and hinge structures for micromirror arrays in projection displays
US7019880B1 (en) 2004-08-25 2006-03-28 Reflectivity, Inc Micromirrors and hinge structures for micromirror arrays in projection displays
US6980349B1 (en) 2004-08-25 2005-12-27 Reflectivity, Inc Micromirrors with novel mirror plates
US7372617B2 (en) * 2005-07-06 2008-05-13 Peter Enoksson Hidden hinge MEMS device
JP5176387B2 (ja) * 2007-05-18 2013-04-03 大日本印刷株式会社 メンブレン構造体の製造方法
US7859971B2 (en) 2007-06-29 2010-12-28 International Business Machines Corporation Directory hologram forming an anchor location of a pattern of stored holograms
KR100888076B1 (ko) * 2008-05-02 2009-03-11 이화여자대학교 산학협력단 자가 정렬 전극을 이용한 마이크로미러 제작 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5583688A (en) * 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
DE19757197A1 (de) * 1997-12-22 1999-06-24 Bosch Gmbh Robert Herstellungsverfahren für mikromechanische Vorrichtung
US6204085B1 (en) * 1998-09-15 2001-03-20 Texas Instruments Incorporated Reduced deformation of micromechanical devices through thermal stabilization
US6529310B1 (en) * 1998-09-24 2003-03-04 Reflectivity, Inc. Deflectable spatial light modulator having superimposed hinge and deflectable element
US20020013054A1 (en) * 2000-05-12 2002-01-31 Farmer, Ii Kenneth R. Single crystal silicon micro-actuator/mirror and method therefor
DE60043726D1 (de) * 2000-08-09 2010-03-11 St Microelectronics Srl Mikroelektromechanische Struktur mit unterschiedlichen Teilen, die durch eine Vorrichtung zur Umwandlung von translatorischen in rotatorische Bewegungen miteinander mechanisch verbunden sind
JP2002307396A (ja) * 2001-04-13 2002-10-23 Olympus Optical Co Ltd アクチュエータ
US20040004753A1 (en) * 2002-06-19 2004-01-08 Pan Shaoher X. Architecture of a reflective spatial light modulator

Also Published As

Publication number Publication date
TW200525272A (en) 2005-08-01
WO2004109364A1 (en) 2004-12-16
EP1636629A4 (de) 2009-04-15
KR20060016800A (ko) 2006-02-22
JP2006526806A (ja) 2006-11-24
EP1636629A1 (de) 2006-03-22

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MM4A Annulment or lapse of patent due to non-payment of fees