TWI354513B - - Google Patents
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- Publication number
- TWI354513B TWI354513B TW96136590A TW96136590A TWI354513B TW I354513 B TWI354513 B TW I354513B TW 96136590 A TW96136590 A TW 96136590A TW 96136590 A TW96136590 A TW 96136590A TW I354513 B TWI354513 B TW I354513B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- space
- electrode
- open end
- opening
- Prior art date
Links
- 238000010494 dissociation reaction Methods 0.000 claims description 17
- 230000005593 dissociations Effects 0.000 claims description 17
- 230000005281 excited state Effects 0.000 claims description 13
- 230000005684 electric field Effects 0.000 claims description 5
- 238000007750 plasma spraying Methods 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 63
- 238000004381 surface treatment Methods 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96136590A TW200915930A (en) | 2007-09-29 | 2007-09-29 | Normal-pressure linear plasma jet device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96136590A TW200915930A (en) | 2007-09-29 | 2007-09-29 | Normal-pressure linear plasma jet device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200915930A TW200915930A (en) | 2009-04-01 |
| TWI354513B true TWI354513B (enExample) | 2011-12-11 |
Family
ID=44725876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96136590A TW200915930A (en) | 2007-09-29 | 2007-09-29 | Normal-pressure linear plasma jet device |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200915930A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI488546B (zh) * | 2012-02-23 | 2015-06-11 | Shinkawa Kk | A plasma generating device and a plasma reactor |
| TWI647978B (zh) * | 2012-09-19 | 2019-01-11 | 艾普傑特公司 | 大氣壓力電漿處理裝置及方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI486996B (zh) | 2013-12-04 | 2015-06-01 | Ind Tech Res Inst | 電漿裝置及電漿裝置的操作方法 |
| EP2960358A1 (en) | 2014-06-25 | 2015-12-30 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Plasma source and surface treatment method |
-
2007
- 2007-09-29 TW TW96136590A patent/TW200915930A/zh unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI488546B (zh) * | 2012-02-23 | 2015-06-11 | Shinkawa Kk | A plasma generating device and a plasma reactor |
| TWI647978B (zh) * | 2012-09-19 | 2019-01-11 | 艾普傑特公司 | 大氣壓力電漿處理裝置及方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200915930A (en) | 2009-04-01 |
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