TWI352399B - Electrostatic chuck with heater - Google Patents

Description

Π52399 IX. Inventor's Note: This application is based on and claims the priority of the patent application No. 2006-1 96794 and the domestic priority claim (the application number is equal to the post) applied for July 19, 2006. All of its contents are hereby incorporated by reference. TECHNICAL FIELD OF THE INVENTION The present invention relates to a coulomb electrostatically held head with a heater. [Prior Art] In the past, in the manufacture of semiconductors and the like, a coulomb-type electrostatic holding head with a heater was used. A substrate composed of ceramic is provided in the electrostatic holding head having such a heater, and an electrode and a resistance heating body are disposed inside the substrate. A substrate mounting surface on which a substrate such as a wafer is placed is formed on the upper surface of the substrate. In the above-mentioned substrate, a dielectric layer is formed from a portion of the electrode to the substrate mounting surface, and a support member is formed from the electrode to the lower portion of the substrate (for example, refer to Japanese Laid-Open Patent Publication No. H-1 2053). However, in the conventional electrostatic holding head with a heater, since the dielectric resistivity of the dielectric layer is small, there is a concern that the detachment resistance of the substrate placed on the substrate mounting surface is lowered. Since the detachment resistance of the substrate is lowered and the time during which the substrate is detached from the electrostatic holding head becomes long, the processing time of the substrate becomes long, and the processing ability of the substrate per unit time is lowered. Further, since the main component of the resistance heating element is sharp (N b ), there is a concern that the ruthenium component is diffused into the support member provided with the resistance heating element, 7066-8791-PF 5 -1352399. Due to the diffusion of the bismuth component, the resistance value of the entire resistance heating body becomes large, so that the heat generation density of the diffusion portion is different from the desired design value. Further, the degree of diffusion of the respective portions of the substrate is not uniform, and the temperature distribution of the substrate mounting surface is increased. As a result, there is a possibility that the soaking property of the substrate is lowered. The soaking property of the substrate is lowered, and it is difficult to form (4) and film formation in the semiconductor process. As a result, there is a fear that the yield of the manufactured component is deteriorated. < SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an electrostatic holding head having a heater that increases the volume resistivity of a dielectric layer in order to improve the detachment resistance of a substrate placed on a substrate mounting surface. At the same time, it is possible to suppress the diffusion of the crucible as a main component of the aforementioned resistance heating body into the support member. In order to achieve the above object, the electrostatic holding head with a heater of the present invention includes a base body composed of a sintered body containing alumina, an electrode disposed on the upper side of the base body, and a lower portion embedded in the base body. The side of the resistance heating element. The foregoing substrate is composed of a dielectric layer from the electrode to the upper surface of the substrate and a branch member from the electrode to the underside of the substrate, wherein the carbon content in the dielectric layer is 100 ppm or less, and the carbon content of the support member is 〇〇3 〇 .25% by weight (wt%), the above-mentioned resistance heating body is formed into a coil shape, and the main component is sharp. The electrostatic holding head with a heater of the present invention has the following effects. 1) Since the carbon content of the support member is 0 03 to 〇 25 parts by weight (wt%), it is possible to prevent sharp diffusion of the main component 7066-8791-PF 6 Ϊ 352399 which is the above-mentioned resistance heating element. By preventing the sharp component from diffusing, the resistance heating element can have a predetermined electric resistance, so that an effect of achieving the same heat generation density as a desired design value can be obtained. Further, it is possible to obtain an effect of coloring the oxidized sintered body in the branch member to be grayish black to black, efficiently radiating heat from the resistance heating body, and improving heat generation efficiency. Therefore, the effect of improving the soaking property of the substrate to be heated can be obtained. 2) Since the resistance heating element is formed in a coil shape and embedded in the supporting member, it is formed by a film composed of a film such as screen printing. In comparison with the heating element, the upper side portion and the lower side portion of the resistance heating element in the supporting member are surely joined together. On the other hand, since the resistance heating element is formed in a coil shape and radiates heat in a three-dimensional manner, τ efficiently conducts heat to the substrate mounting surface as compared with the resistance heating element composed of a film such as screen printing. 3) Because the carbon content in the dielectric layer is reduced! 〇〇ppm or less, so the volume resistivity becomes high. Therefore, in the case of It used as a Coulomb type electrostatic holding head, the detachment resistance of the substrate placed on the substrate mounting surface can be improved. 4) Since the main component of the resistance heating element is 铌, the difference in expansion coefficient between the substrate containing alumina and the above-mentioned resistance heating element becomes small. Therefore, when the resistance heating element is heated, the thermal deformation occurring between the peripheral portion of the resistance heating body and the resistance heating body can be greatly reduced. Therefore, for repeated thermal cycling, an electrostatic holding head with a heater having a long life, being difficult to break, and long-term reliability can be obtained. 7066-87 91-pF 7 [Embodiment] The embodiment of the present invention will be described. L Electrostatic Retaining Head] Fig. 1 is a plan view showing an electric holding head of the present invention. Figure 2 is a diagram of the drawing.

2 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 On. The electrode 5 on the side of the crucible and the resistance heating element 7 embedded in the lower side of the substrate 3 are placed. [Substrate] As shown in Fig. 1 and Fig. 2, the front substrate 3 is formed into a disk shape, and a substrate mounting surface on which a substrate such as a wafer is placed is formed on the upper surface (surface) of the substrate 3, and the substrate is formed. The electrode 5 in the upper side of the electrode 5, that is, the portion from the electrode 5 to the substrate mounting surface 9, is formed with a dielectric layer 11. Moreover, from the electrode 5 to the bottom

The type of the static portion of the heater 1 is formed along the section II-II, that is, the support member 13 is formed from the electrode 5 to the bottom portion of the base q and the bottom (back surface) of the soil d. Since the carbon content in the electric layer 11 is reduced to less than 100 ppm, the volume resistivity of the dielectric layer 11 is increased. Therefore, the electrostatic holding head with the heater of the present embodiment can improve the detachment responsiveness of the substrate placed on the substrate by the use of the electrostatic holding head of the (10) lomb. . [Electrode] FIG. 1 and FIG. 2 show a diameter embedded in the upper side of the base 3.

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7066-8791-PF 8 1352399 The base 3 has a small disk-shaped electrode 5. The main component of this electrode 5 is a carbonized crane and contains 5 volume percent (vol%) or more and 20 volume percent (vol%) or less of alumina. Here, the content of tungsten carbide in the electrode 5 is preferably 70% by volume (v〇l%) to 95% by volume (v〇l%). Further, as shown in Fig. 2, a receiving hole 15 extending upward from the lower surface of the base 3 is formed at a radially central portion of the base 3, and an electrode power supply member 21 is disposed in the receiving hole 15. The upper end of the electrode power supply member 21 is connected to the electrode 5 via the connecting member 19. Electric power is supplied from the electrode power supply member 21 to the electrode 5 via the connection member 19, and electrostatic attraction force (Coulomb force) is generated in the dielectric layer u of the base 3 so that the substrate is adsorbed on the substrate mounting surface 9 of the base 3. As the electrode 5, an electrode obtained by printing a printing paste containing a metal powder of alumina and tungsten carbide into a mesh shape, a comb shape, a circular shape or the like can be used. Moreover, the electrode 5 may also be a gold mesh or a porous metal (perf〇rated).

Since the main component of the electrode 5 is tungsten carbide and contains 5 volume percent (vom) or more and 20 volume percent (v 〇 1%) or less, the third portion of the alumina is connected and meshed through the tungsten carbide. The layer is combined with the oxidation of the branch member 13 and the dielectric layer u. Thus, the bonding strength of the electric 355 and the supporting structure to the electric layer 11 can be improved as compared with the case where the electrode is made only of tungsten carbide. Carbonized cranes do not react with oxidizing, and the coefficient of thermal expansion is better than that of oxidation. _, the bonding of the electrodes formed by tungsten is strong for ^ /, Tian reverse. The strength is low and there is a concern for thermal cycling. However, by mixing alumina in a small amount of 卩φ, the enthalpy expansion coefficient of the electrode 5 is close to that of oxidized IS, and long-term reliability can be improved. ...

7066-8791-PF 9 1352399 [Resistance heating element] The resistance heating element 7 is formed in a coil shape and has 铌 as a main component. Here, the content of ruthenium in the electric resistance heating body 7 is preferably 95% by weight or more (wt%). Further, the resistance heating element 7 may contain a metal component other than ruthenium such as platinum (platinum Pt). Further, as shown in Fig. 2, the resistance heating element 7 is embedded in the support member 13 and disposed on the lower side of the electrode 5. Then, a receiving hole 17' is formed to extend upward from the lower surface 23 of the base 3, and the power supply member 25 for electric resistance heating is disposed in the receiving hole 17. The upper end of the resistance heating element power supply member 25 is connected to the resistance heating body 7 via the connection member 27. Power is supplied from the resistance heating element power supply member 25 to the resistance heating element 7 via the connection member 27, and the resistance heating element 7 is heated and supplied with heat to the substrate placed on the substrate placement surface 9. The resistance heating element 7 of the present embodiment is formed in a coil shape and embedded in the support member 13. Therefore, the upper side portion 29 and the lower side portion 31 of the electric resistance heating body 7 in the support member 13 can be strongly bonded to the electric resistance heating body composed of a film such as screen printing. Further, since the resistance heat generating body 7 is formed in a coil shape and emits heat in a three-dimensional manner, it can efficiently conduct heat to the substrate by 9 as compared with a film such as screen printing. Since the resistance heating body 7 contains platinum or ruthenium, the difference in thermal expansion coefficient from the matrix 3 containing oxidized metal can be reduced. The carbon content of the slab member 13 is as high as 〇.〇3 to 〇25 weight percent (wt%). The stone anti-component reacts with the sharp component to form an extremely thin carbonized phase and an oxidized phase on the surface of the resistance heating element. The sharpening of this carbonized phase and the oxidized phase

The diffusion rate of the 7066-8791-PP fraction is extremely slow, and the magnetic ^ ^ and the carbonized phase are difficult to react with the alumina. Since such a carbonized phase forms a barrier film with oxidation, it is possible to suppress the sharp component in the resistive body 7 from diffusing into the holder member 13. ..., [Method of Manufacturing Electrostatic Retaining Head with Heater] Description This embodiment is separated from it. . ~, the manufacturing process of the electrostatic retention head with heating benefits. The electrostatic holding head 1 is manufactured by forming a dielectric layer 11 from the top of the dielectric electrode 5 and forming a support member <production of a dielectric layer> 2 upside down. The electrode 5 is also formed above the electric layer 11, and from 13 〇 first, the dielectric layer H of the substrate 3 is formed. As described above, the carbon content of the dielectric layer 11 is set to be 100 ppm or less. As the Tauman raw material powder, a high-purity (e.g., 99.7%) oxidized powder and an oxidized town Ug0) raw material powder as a sintering aid are used. In this case, the raw material powder: a polyethylene glycol (pVA) as a binder, water, a dispersing agent, etc., is mixed with a tumbler screen for a set time (for example, 16 hours) to prepare _. Here, the blending amount of the polyethylene glycol (PVA) is preferably 2% by weight (wt%). The obtained slurry is spray-dried by a mist sprayer to obtain a granulated powder, and then subjected to &amp;steaming &amp; burning in an oxidizing atmosphere such as air, for example, at a submerged temperature for 5 hours. The binder is removed from the granulated powder. + Produced calcined alumina granulated powder. Since the binder contains carbon, the carbon content of the dielectric layer 11 can be reduced by removing the binder. Then, the mold was filled with the above-described burnt oxidized granulated powder, and press-forming was carried out to prepare an alumina molded body. Then, in the carbon 7066-8791-pp 11 1352399: placing the oxidized molded body in the container, using the hot press sintering method to perform the second firing, is applied under the force of (four) and is carried out in a nitrogen atmosphere. To gasification Ming sintered body. The emulsified sintered body as the dielectric layer η produced in this manner has a carbon content of 10 〇〇 ppm or less. <Formation of electrodes>

Next, the sintered body of the above-mentioned oxide is subjected to a polishing process to produce a disk having a predetermined size (for example, 034 Å and a thickness of 6 mm). At this time, the surface of one of the surface and the back surface of the disk is polished to work as a smooth surface. Then, a carbonized crane powder as a material of the electrode 5, an alumina powder containing 5 volume percent (V〇1%) and a volume percentage of (20% by volume) and a binder are mixed to prepare a printing paste' by screen printing method. The electrode 5 is formed on the smooth surface of the oxidized sintered body and dried. <Formation of Support Member> An oxidized sintered body in which the electrode 5 was formed was placed in a mold, and oxidized granule powder was filled to cover the electricity #5, and press-formed at a set pressure. Thus, the upper side portion 29 of the support member 13 shown in Fig. 2 is formed. The alumina granulated powder herein is a binder containing no binder. The alumina granulated powder can also be produced in the following manner. Adding polyvinyl alcohol (PVA), a water, a dispersing agent, etc. as a binder to the alumina powder and the magnesium oxide (Mg〇) raw material powder as a sintering aid, 'mixing time by a tumbler screen (10): 16 hours), Make a ruin. Here, in the case of using polyvinyl alcohol (PVA) as a binder, the blending amount of polyvinyl alcohol (PVA) is preferably 0.7 to 3 weight percent (wt%). The obtained slurry was spray-dried using a spray dryer to obtain an alumina granulated powder. 7066-8791-PF 12 jyy branch: = the upper side portion 29 of the branch member 13 (i.e., the hot body 7 in Fig. 2, which is short on the bottom surface) is placed with a coil-like resistor. The granules were granulated, and the alumina shaped body to be the base 3 was produced by the above-mentioned 'station firm'. <Sintering of Substrate> Next, the above-mentioned oxidizing hot-press sintering method is placed in a container made of carbon to carry out sintering of the crucible, and then, under a set pressure, it is carried out in a nitrogen atmosphere, and the product is produced _»_丄^ ^ ... 9 is performed while maintaining the set time in 鬲▲. Thereafter, the surface of the alumina sintered body which has been subjected to two firings of the smashing process is subjected to surface grinding, and the thickness of the alumina sintered body is adjusted to form the dielectric layer 11. Then, the 盏/布加浸, 'layer 乂, the side of the body is cleaned, and the head is fixed by the necessary opening processing, for the Refubi, and the electric holding head. The installation of the pieces 21 and 25 'completes the static use of the heater. The above-mentioned manufacturing side &amp; π 1 k square can make the obtained dielectric layer have a carbon content of less than 100 ppm, and the support is in the brown component. The carbon content is 0. 03~0·25 percent by weight (wt%). The carbon content in the support ruthenium member 13 can be controlled by (4) to 篁 篁 when the granules are prepared, and the temperature can be controlled in addition to the amount of the viscous mixture. The oxygen concentration in the body environment, etc. β, by the above method, the carbon in the sputum, the viscous agent, remains in the lower part during sintering, and serves as a supporting member]q. In the alumina sintered body of 3, a state of being diffused as hetero-carbon is formed. Therefore, 41 θ u 此 ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝 氧化铝

7066-8791-PF 13 • 1352399 Heat 7 heat and improve heat efficiency. The resistance heating element 7 reacts with carbon in the alumina sintered body to form a very thin carbonized phase and an oxidized phase on the surface of the electric resistance heating body 7. Since the diffusion speed of the metal of the carbonized phase and the oxidized phase is extremely small, the action of acting as a protective layer can be suppressed to diffuse the ruthenium into the support member 13. Example

Next, the present invention will be specifically described using examples. [Embodiment 1] First, as a first embodiment, a plurality of dielectric layers u and a substrate 3 having a changed carbon content of the support member 13 were produced to verify whether or not the sharp component of the resistance heating body 7 was diffused into the support member 13. Specifically, the carbon content in the dielectric layer u is less than 100 qing. The carbon content of the member member 13 is &quot;3 to 〇25 weight percent Μ❹ Head 1 as the present invention Example 1 to the electrostatic holding head in which the carbon content in the dielectric layer exceeds the above range "乍 is a heater with a lighter weight than 1 First, the manufacturing procedure of the present invention will be described. The oxidized powder of 99.7% purity is used (the oxidation of the sintering aid is used as the content of magnesium oxide (Mg0) in the ceramic powder). =,

Percent (, water, dispersant, etc., weight to make a slurry. J is mixed with (4) for 16 hours, 7〇66-8791»PF 14 1352399. The obtained slurry is spray dried using a spray dryer, then at 50 (The temperature of rc was kept for 5 hours to remove the binder, and an alumina granulated powder having an average particle diameter of about 80 μm (#m) was produced. The oxidized granulated powder was filled in a mold at 200 kg/cm 2 ( The pressure of kg/Cm2) is subjected to pressure forming 0. Then, the alumina shaped body is placed in a carbon container and sintered by hot press sintering. The sintering is applied at 1 〇〇 kg/cm 2 (kg/cm). Under the pressure, the aluminum oxide sintered body was obtained by heating in a nitrogen gas addition environment (pressure: 300 ° C / hour, and maintaining at i600 t for 2 hours. Next, the alumina sintered body was polished and produced. A disk of Φ 340 mm and a thickness of 6 mm is produced. At this time, the surface of one of the surface and the back surface of the disk is ground by grinding to have a surface roughness Ra of 〇·8 μm (private...the following smooth surface. Then, 80 volumes are mixed) Percent (v〇1%) tungsten carbide powder 2 〇 volume percent (vol%) of alumina powder and Terpined as a binder to produce a printing paste, which is formed by a screen printing method on a smooth surface of an alumina sintered body. After "electrode 5, and dried 0, the above-mentioned oxide body having formed the printed electrode 5 is set, and the amount of the filler added is &amp; 3 °, the weight percentage (wt%) of the horse, and the calcination is not performed. Alumina granulated powder, and press-formed at a core pressure of 2 〇〇 kg / cm 2 . 7 ' Then in the resistance heat, then placed on the coil-like resistance heating element 7066-8791-PF 15 -1352399 body 7 The filler was added in an amount of 3 wt% (liner %), alumina calcined powder which was not calcined, and pressure-formed at a pressure of 200 kg/cm 2 (kg/cm 2 ). Next, a container made of carbon. The alumina shaped body was placed therein and sintered by a hot-pressure sintering method. The sintering was carried out under a pressure of 100 kg/cm 2 (kg/cm 2 ) and in a nitrogen pressurized environment (pressure: i5 〇 kpa). Warm up at 30 (TC/hour speed, at 160 (rc) The aluminum oxide sintered body in which the electrode 5 and the electric resistance heating body 7 are embedded is called. Then, the surface of the alumina sintered body subjected to the two sintering processes is subjected to planar grinding force on the diamond grinding stone to adjust oxidation. The thickness of the sintered body of the chain. Then, the side surface of the alumina sintered body was ground, and the electrostatic holding head 1 of the present invention i was produced by performing the necessary drilling and drawing of the power supply members 21 and 25. Inventive Examples 2 to 4 and Comparative Examples 8 to 8 were produced in the same manner as in the above-described Example 1 of the present invention. However, the amount of the binder added to the dielectric φ layer 11 was as shown in Tables 1 and 2. Further, the value of the volume percentage (vol%) described in the block of the ESC electrode material in the following Tables 1 to 3 indicates the content of alumina (A12〇3). For example, the ESC electrode material in Example 1 of the present invention means a volume percentage (vol%) containing 2 Å of alumina. Further, in Comparative Example 9 of Table 3 to be described later, the electrode material was composed only of tungsten carbide (WC). 7066'8791-PF 16 • 1352399

Inventive Example 4 2 wt% &lt;100 ppm &gt; 1E+17 8E+15 WC+A1203 20vol% 0. 7wt% 0. 03wt% &gt;1E+17 2E+14 20KV 10Ω Inventive Example 3 2wt% &lt;100ppm &gt ; 1E+17 2E+16 WC+A1203 20vol% L lwt% 0. 05wt% ME+17 1E+14 20KV 10Ω Inventive Example 2 2wt% <100 ppm &gt;1E+17 9E+15 WC+A1203 20vol% 2wt% 0.18wt% 1E+17 2E+13 19KV 10Ω Inventive Example 1 2wt% &lt;100ppm&gt;1E+17 1E+16 WC+A1203 20vol% 3wt% €0·25wt% 8E+16 1E+13 15KV 10Ω Adhesive Adding amount of alumina powder Whether there is carbon in the calcined sintered body 200 ° C ESC electrode material Adhesive addition amount Alumina powder has a carbon content in the calcined sintered body 200 ° C Insulation financial pressure [KV / mm] 铌 diffusion Homogenization (in-plane unevenness) ΔΤ HT resistance value (designed value: 10 Ω) Volume resistivity [ohm-cm] Volume resistivity [ohm-cm] Dielectric layer support member

7066-8791-PF 17 • 1352399 Table 2 Comparative Example 8 2wt% 1 0. 16wt% 1E+17 5E+13 W+A1203 20vol% 5wt% 0. 38wt% 4E+15 5E+11 13KV 10Ω Comparative Example 7 2wt% 0.15wt% 8E+16 4E+13 W+A1203 20vol% llwt% 0. 5wt% 1E+15 1E+11 10KV 10Ω Comparative Example 6 1_ 2wt% 1 0· 15wt% 1E+17 6E+13 W+A1203 20vol% 13wt% 0. 6wt% 9E+14 1 8E+10 &gt; oo 0^ 10Ω Comparative Example 5 2wt% 0. 14wt% &gt;1E+17 5E+13 W+A1203 20vol% 0. 3wt% 0. Olwt% ME +17 1 3E+13 15KV 10°C 13Ω Comparative Example 4 2wt% 0.16wt% &gt;1E+17 4E+13 W+A1203 20vol% 2wt% &lt;100ppm &gt;1E+17 4E+13 15KV 15°C 15Ω Comparative Example 3 1 2wt% 0.15wt% 1E+17 1 5E+13 1_ W+A1203 20vol% 2wt% 0.18wt% 9E+16 2E+13 19KV 10Ω Comparative Example 2 1_ 3wt% 0. 20wt% 8E+16 9E+ 12 W+A1203 20vol% 2wt% 0.19wt% 8E+16 2E+13 18KV 10Ω Comparative Example 1 1_ 5wt% 0. 32wt% 5E+15 5E+11 W+A1203 20vol% 2wt% 0. 20wt% 7E+16 1E +13 17KV 10Ω丨 Addition amount of alumina powder Whether there is carbon in the calcined sintered body 200°C ESC electrode material Adhesive addition amount Alumina powder has the amount of carbon in the calcined sintered body 200°C Insulation withstand voltage [KV/mm] Diffusion of helium Homogenization (in-plane unevenness) ΔΤ ;?;IT value (designed value: ώ 〇 Heat·dielectric layer

7066-8791-PF 18 • 1352399 In the above-described first embodiment, the volume resistivity of the dielectric layer 11 was room temperature and 200 ° C. Both of the inventive examples 1 to 4 were higher than the comparative examples 1 to 8. That is, the error is such that the carbon content in the dielectric layer 11 is 100 ppm or less, and the optimum volume resistivity can be obtained for the electrostatic holding head 1 having a heater of the cou 1 omb. The insulation withstand voltage of the support member 13 was also higher than the comparative examples 6 to 8 of the present invention examples 1 to 4. Further, in Examples 1 to 4 of the present invention, the heat absorption was better than those of Comparative Examples 6 to 8. That is, by making the carbon content in the support member 13 〇25 vol% (wt%) or less, the volume resistivity of the support member 13 can be maintained at a practically sufficient insulation withstand voltage, and since it is derived from the resistance heater The leakage current of 7 is small, so the soaking property can also be improved. The diffusion of the bismuth component of the electric resistance heating element 7 in the support member 13 did not occur in all of the inventive examples 1 to 4, but the comparative examples 4 and 5 occurred. Further, the in-plane unevenness of the heat-dissipating property of the substrate mounting surface 9 and the resistance value of the resistance heating element 7 are also better than the comparative examples 1 to 8 of the present invention. The reason why the unevenness of the soaking heat is lowered is that the diffusion of the sharp component of the electric resistance heating body 7 in the support member 13 is suppressed, and it is expected that the temperature distribution according to the design is achieved. That is, by making the carbon content in the support member 13 0.03% by volume or more, the soaking property of the substrate to which the electrostatic holding head having the heater is adsorbed can be remarkably improved. [Example 2] It was confirmed whether the adhesion strength of the electrode 5 was changed by the material of the electrode 5. Specifically, the electrostatic holding of the electrode 5 including alumina and tungsten carbide containing 5 volume percent (v〇1%) or more, 7066-8791-PF 19 13,52399 2 volume percent (v〇1%) or less The head 1 was taken as Examples 5 to 7 of the present invention; the electrostatic holding head 1 exceeding the above range was used as Comparative Example 9 to 1 〇. The manufacturing procedure of each of the electrostatic holding heads 1 is the same as that of the first embodiment of the present invention. However, the material of the electrode 5 is the condition shown in Table 3.

7066-8791-PF 20 • 1352399 Comparative Example 10 2wt% 1__ cup &lt;100ppm &gt;1E+17 9E+15 50MPa 2wt% 0.19wt% 9E+16 3E+13 18KV 10Ω Comparative Example 9 2wt% l <lOOppm &gt; 1E+17 8E+15 WC+A1203 22vol% 80MPa 2wt% 0.19wt% 9E+16 3E+13 19KV 10Ω Inventive Example 6 2wt% <lOOppm &gt;1E+17 9E+15 W+A1203 20vol% 250MPa 2wt% 0.18 Wt% 1E+17 5E+13 20KV 10Ω Inventive Example 5 2wt% <lOOppm &gt;1E+17 1E+16 W+A1203 lOvol% 200MPa 2wt% 0. 20wt% ME+17 6E+13 20KV 10Ω Adhesive Addition Whether the alumina powder has a carbon content in the calcined sintered body 200 ° C ESC electrode material ESC electrode adhesion strength (shear strength) Adhesive addition amount Alumina powder has calcination 1 Sintered body carbon amount 20 Ot Insulation resistance Pressure [KV/mm] ! 扩散 Diffusion homogenization (in-plane unevenness) ΔΤ HT resistance value (designed value: 10 Ω) Volume resistivity [ohm-cm] Volume resistivity [ohm-cm] Dielectric layer support member

7066-8791-PF 21 .1352399 As shown in Table 3, it can be clearly judged that the adhesion strength of the electrode 5 is high in the examples 5, 6, and 7 of the present invention and the comparative example 9 denier. Further, in the oxidation, the resistance of the ESC electrode is increased by 22% by volume (v 〇 1%) or more, and it becomes poor. It is better because the high frequency current is applied to the ESC electrode. [Measurement Method] Further, the measurement methods of the respective measurement values in the first embodiment and the second embodiment will be described below. First, in terms of the carbon content in the oxidized sintered body, it was measured by a frequency-heating infrared absorption method. Further, in terms of volume resistivity, it is measured in the atmosphere (temperature: 23 〇 c) and 2 〇 (rc) by a method using jIS C2141 as a standard. The applied voltage is 1 〇〇〇V/mm, When the voltage is applied for 3 minutes, the current value is read to calculate the volume resistivity. In terms of shear intensity, it is measured by a microdroplet method. The apparatus (manufactured by Toei Sangyo Co., Ltd.) cuts the shear strength from the base 3 to be cut so that the electrode 5 is centered in the radial direction, and the shear strength is measured. The pressure is measured in the atmosphere (temperature: 23 ° C) by the method of JIS C2141. The diffusion of the yttrium around the resistance heating element 7 is first included in the oxidized sintered body. After the portion of 7 was cut out and the profile was polished, it was confirmed in the electron probe microanalyzer (electron probe 7066-8791-PF 22 • 1352399 micro-analysis: x-ray microanalyzer) whether or not there is diffusion of germanium. Heat, As shown in FIG. 3, the electrostatic holding head i is introduced into the vacuum chamber 3. 5, and the substrate is measured in an infrared camera under a low pressure (less than 1e_3 T〇rr) and the control temperature is set to i〇〇°c. The temperature in the mounting surface 9. The structure of the soaking measuring device of Fig. 3 will be briefly described below. The soaking measuring device 33 includes a box-shaped vacuum chamber 35, an infrared camera 37 disposed above the vacuum chamber 35, and an electrostatic connection. The controller 39 of the holding head! The opening 41 is formed in the upper wall surface 41 of the vacuum chamber 35, and the opening 43 is covered with sapphire crystals (Sapphire GUss) 45. The infrared camera 37 is disposed above the opening 43. The bottom surface 41 of the vacuum chamber 35 is provided with a leg portion 47 on which the electrostatic holding head is placed. The resistance heating element of the electrostatic holding head 1 is connected to the controller by the power supply member 25, and the 'Using a digital multimeter' is used in the atmosphere. Environment (temperature: 23. (:)

The electric resistance between the electrode terminals was measured in the electric resistance value of the electric resistance heating body 7 (TR6847: manufactured by Adpen Tiested). BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing an electrostatic holding head with a heater according to an embodiment of the present invention. 2 is a cross-sectional view taken along line I I-Ι I of FIG. 1. FIG. 3 is a cross-sectional view of the embodiment of the apparatus as viewed from the side. The soaking test used in the calculation of 7066-8791-pf 23 -1352399 [Description of main components] 1: Electrostatic holding head with heater 3: Substrate 5: Electrode 7: Resistive heating element 9: Substrate mounting surface 11: Electrical layer 13: support member 15: receiving hole 17: receiving hole 19: connecting member 21. electrode power supply member 23: lower surface 25: power supply member for resistance heating element 27: connecting member 29: upper side portion 31: lower side portion 33: Homogenization measuring device 35: vacuum chamber 37: infrared camera 39: controller 41: upper wall surface 43: opening portion 47: foot portion

7066-8791-PF 24

Claims (1)

1352399 No. 96125194 '. March 30, 30 correction correction page 10, the scope of application for patents: h-Electrostatic holding head with heater, including a substrate composed of a sintered body containing oxidation, set in the aforementioned substrate The upper side electrode and the lower side resistance heat generating body embedded in the base body are, for example, composed of a dielectric layer from the electrode to the upper surface of the base body and a support member from the lower surface of the base body of the electrode, wherein The carbon content in the dielectric layer is 1 〇〇ppm or less, and the content of the absorbing member is 〜·〇3 to 0.25 by weight. The electric resistance heating body is formed into a coil shape, and the main component is 铌, wherein the main component of the electrode is It is tungsten carbide and contains 5% or more of alumina and 20% by volume or less. 7066-8791-PF1 25