TWI350570B - Patterning method - Google Patents

Patterning method

Info

Publication number
TWI350570B
TWI350570B TW096136782A TW96136782A TWI350570B TW I350570 B TWI350570 B TW I350570B TW 096136782 A TW096136782 A TW 096136782A TW 96136782 A TW96136782 A TW 96136782A TW I350570 B TWI350570 B TW I350570B
Authority
TW
Taiwan
Prior art keywords
patterning method
patterning
Prior art date
Application number
TW096136782A
Other languages
English (en)
Other versions
TW200917379A (en
Inventor
Lung En Kuo
Jiunn Hsiung Liao
Min Chieh Yang
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW096136782A priority Critical patent/TWI350570B/zh
Publication of TW200917379A publication Critical patent/TW200917379A/zh
Application granted granted Critical
Publication of TWI350570B publication Critical patent/TWI350570B/zh

Links

TW096136782A 2007-10-01 2007-10-01 Patterning method TWI350570B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096136782A TWI350570B (en) 2007-10-01 2007-10-01 Patterning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096136782A TWI350570B (en) 2007-10-01 2007-10-01 Patterning method

Publications (2)

Publication Number Publication Date
TW200917379A TW200917379A (en) 2009-04-16
TWI350570B true TWI350570B (en) 2011-10-11

Family

ID=44726377

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096136782A TWI350570B (en) 2007-10-01 2007-10-01 Patterning method

Country Status (1)

Country Link
TW (1) TWI350570B (zh)

Also Published As

Publication number Publication date
TW200917379A (en) 2009-04-16

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