TWI349301B - - Google Patents

Info

Publication number
TWI349301B
TWI349301B TW099105854A TW99105854A TWI349301B TW I349301 B TWI349301 B TW I349301B TW 099105854 A TW099105854 A TW 099105854A TW 99105854 A TW99105854 A TW 99105854A TW I349301 B TWI349301 B TW I349301B
Authority
TW
Taiwan
Application number
TW099105854A
Other languages
Chinese (zh)
Other versions
TW201106415A (en
Inventor
Yukihiro Morimoto
Kengo Moriyasu
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW201106415A publication Critical patent/TW201106415A/en
Application granted granted Critical
Publication of TWI349301B publication Critical patent/TWI349301B/zh

Links

TW99105854A 2009-04-10 2010-03-01 Excimer discharge lamp TW201106415A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009095873A JP4752943B2 (en) 2009-04-10 2009-04-10 Excimer discharge lamp

Publications (2)

Publication Number Publication Date
TW201106415A TW201106415A (en) 2011-02-16
TWI349301B true TWI349301B (en) 2011-09-21

Family

ID=42945501

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99105854A TW201106415A (en) 2009-04-10 2010-03-01 Excimer discharge lamp

Country Status (4)

Country Link
JP (1) JP4752943B2 (en)
KR (1) KR101073295B1 (en)
CN (1) CN101859687A (en)
TW (1) TW201106415A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101872752B1 (en) 2013-12-13 2018-06-29 에이에스엠엘 네델란즈 비.브이. Radiation source, metrology apparatus, lithographic system and device manufacturing method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6459754A (en) * 1987-08-31 1989-03-07 Toshiba Corp High pressure sodium lamp
DE19613502C2 (en) * 1996-04-04 1998-07-09 Heraeus Noblelight Gmbh Durable excimer emitter and process for its manufacture
US6635993B1 (en) * 1998-08-26 2003-10-21 Ngk Insulators, Ltd. Joined bodies, high-pressure discharge lamps and a method for manufacturing the same
JP2006244898A (en) * 2005-03-04 2006-09-14 Ushio Inc Excimer lamp
JP4356776B2 (en) * 2007-06-15 2009-11-04 ウシオ電機株式会社 UV discharge lamp
JP4424394B2 (en) * 2007-08-31 2010-03-03 ウシオ電機株式会社 Excimer lamp

Also Published As

Publication number Publication date
JP4752943B2 (en) 2011-08-17
KR20100113021A (en) 2010-10-20
CN101859687A (en) 2010-10-13
TW201106415A (en) 2011-02-16
JP2010250952A (en) 2010-11-04
KR101073295B1 (en) 2011-10-12

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees