TWI349301B - - Google Patents
Info
- Publication number
- TWI349301B TWI349301B TW099105854A TW99105854A TWI349301B TW I349301 B TWI349301 B TW I349301B TW 099105854 A TW099105854 A TW 099105854A TW 99105854 A TW99105854 A TW 99105854A TW I349301 B TWI349301 B TW I349301B
- Authority
- TW
- Taiwan
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009095873A JP4752943B2 (en) | 2009-04-10 | 2009-04-10 | Excimer discharge lamp |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201106415A TW201106415A (en) | 2011-02-16 |
TWI349301B true TWI349301B (en) | 2011-09-21 |
Family
ID=42945501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW99105854A TW201106415A (en) | 2009-04-10 | 2010-03-01 | Excimer discharge lamp |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4752943B2 (en) |
KR (1) | KR101073295B1 (en) |
CN (1) | CN101859687A (en) |
TW (1) | TW201106415A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101872752B1 (en) | 2013-12-13 | 2018-06-29 | 에이에스엠엘 네델란즈 비.브이. | Radiation source, metrology apparatus, lithographic system and device manufacturing method |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6459754A (en) * | 1987-08-31 | 1989-03-07 | Toshiba Corp | High pressure sodium lamp |
DE19613502C2 (en) * | 1996-04-04 | 1998-07-09 | Heraeus Noblelight Gmbh | Durable excimer emitter and process for its manufacture |
US6635993B1 (en) * | 1998-08-26 | 2003-10-21 | Ngk Insulators, Ltd. | Joined bodies, high-pressure discharge lamps and a method for manufacturing the same |
JP2006244898A (en) * | 2005-03-04 | 2006-09-14 | Ushio Inc | Excimer lamp |
JP4356776B2 (en) * | 2007-06-15 | 2009-11-04 | ウシオ電機株式会社 | UV discharge lamp |
JP4424394B2 (en) * | 2007-08-31 | 2010-03-03 | ウシオ電機株式会社 | Excimer lamp |
-
2009
- 2009-04-10 JP JP2009095873A patent/JP4752943B2/en not_active Expired - Fee Related
-
2010
- 2010-03-01 TW TW99105854A patent/TW201106415A/en not_active IP Right Cessation
- 2010-03-11 KR KR1020100021865A patent/KR101073295B1/en not_active IP Right Cessation
- 2010-04-09 CN CN201010164297A patent/CN101859687A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JP4752943B2 (en) | 2011-08-17 |
KR20100113021A (en) | 2010-10-20 |
CN101859687A (en) | 2010-10-13 |
TW201106415A (en) | 2011-02-16 |
JP2010250952A (en) | 2010-11-04 |
KR101073295B1 (en) | 2011-10-12 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |