TWI348732B - Retainer ring of chemical mechanical polishing and fabricating method thereof - Google Patents

Retainer ring of chemical mechanical polishing and fabricating method thereof

Info

Publication number
TWI348732B
TWI348732B TW096123810A TW96123810A TWI348732B TW I348732 B TWI348732 B TW I348732B TW 096123810 A TW096123810 A TW 096123810A TW 96123810 A TW96123810 A TW 96123810A TW I348732 B TWI348732 B TW I348732B
Authority
TW
Taiwan
Prior art keywords
mechanical polishing
chemical mechanical
retainer ring
fabricating method
fabricating
Prior art date
Application number
TW096123810A
Other languages
Chinese (zh)
Other versions
TW200901298A (en
Inventor
Li Chin Tsai
Kai Huang
Ming Ta Yang
Original Assignee
Li Chin Tsai
Kai Huang
Ming Ta Yang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Li Chin Tsai, Kai Huang, Ming Ta Yang filed Critical Li Chin Tsai
Priority to TW096123810A priority Critical patent/TWI348732B/en
Publication of TW200901298A publication Critical patent/TW200901298A/en
Application granted granted Critical
Publication of TWI348732B publication Critical patent/TWI348732B/en

Links

TW096123810A 2007-06-29 2007-06-29 Retainer ring of chemical mechanical polishing and fabricating method thereof TWI348732B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096123810A TWI348732B (en) 2007-06-29 2007-06-29 Retainer ring of chemical mechanical polishing and fabricating method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096123810A TWI348732B (en) 2007-06-29 2007-06-29 Retainer ring of chemical mechanical polishing and fabricating method thereof

Publications (2)

Publication Number Publication Date
TW200901298A TW200901298A (en) 2009-01-01
TWI348732B true TWI348732B (en) 2011-09-11

Family

ID=44721635

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096123810A TWI348732B (en) 2007-06-29 2007-06-29 Retainer ring of chemical mechanical polishing and fabricating method thereof

Country Status (1)

Country Link
TW (1) TWI348732B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8998676B2 (en) * 2012-10-26 2015-04-07 Applied Materials, Inc. Retaining ring with selected stiffness and thickness

Also Published As

Publication number Publication date
TW200901298A (en) 2009-01-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees